A vacuum control device

Abstract

The vacuum control device provided by the present invention includes: a control module and a drive module, wherein the control module is used to receive the current vacuum value of the target vacuum chamber, and generate a logic control signal according to the current vacuum value and a preset vacuum threshold; the input end of the drive module is connected to the control module, and the output end is connected to the vacuum pump, and is used to receive the logic control signal, and generate a drive signal according to the logic control signal to drive the vacuum pump to vacuum. By implementing the present invention, when the current vacuum value is not within the preset vacuum threshold range, the vacuum pump is driven to vacuum, and when the current vacuum value is within the preset vacuum threshold range, the vacuum pump is stopped to vacuum, thereby shortening the continuous operation time of the vacuum pump and extending the service life of the equipment parts.

Description

Technical Field

[0001] The invention relates to the field of vacuum degree control, and in particular to a vacuum pumping control device. Background Art

[0002] Both atomic emission spectrometry and atomic emission spectrometer quantitative analysis require an optical path spectroscopic imaging system to perform spectroscopic analysis of the excitation light source and collect full spectrum data. In order to eliminate external interference to the optical path spectroscopic imaging system caused by external light, air and mechanical deformation, the optical chamber in the optical path spectroscopic imaging system needs to be in a closed constant temperature vacuum state. Specifically, on the one hand, changes in the temperature vacuum inside the optical chamber will make the intensity of the excitation light source in the optical chamber unstable. The longer the wavelength of the analysis light, the better the air absorption effect, resulting in a decrease in the intensity of the analysis light; on the other hand, changes in the temperature vacuum inside the optical chamber will cause the optical chamber to deform and oxidize, resulting in floating changes in the spectroscopic effect, and finally errors in the measurement results.

[0003] Therefore, it is necessary to provide a stable temperature and vacuum environment for the optical path spectroscopic imaging system. Among them, the stable vacuum environment is ensured by controlling the working state of the vacuum pump. In the existing vacuum control device, the vacuum pump is generally controlled to operate continuously at a fixed pumping speed. However, the continuous operation of the vacuum pump not only causes energy waste, but also shortens the service life of the vacuum pump and control equipment parts. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of the prior art that the continuous operation of the vacuum pump causes energy waste and shortens the service life of the parts of the vacuum pump equipment, thereby providing a vacuum control device.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] An embodiment of the present invention provides a vacuum control device, which is applied to a vacuum pump. The vacuum pump is arranged in a target vacuum chamber and is used to vacuum the target vacuum chamber. The vacuum control device includes: a control module and a drive module, wherein the control module is used to receive a current vacuum value of the target vacuum chamber, and generate a logic control signal according to the current vacuum value and a preset vacuum threshold; the input end of the drive module is connected to the control module, and the output end is connected to the vacuum pump, and is used to receive the logic control signal, and generate a drive signal according to the logic control signal to drive the vacuum pump to vacuum.

[0007] In one embodiment, the driving module includes: a relay control circuit and a relay circuit, wherein the input end of the relay control circuit is connected to the output end of the control module, the output end of the relay control circuit is connected to the input end of the relay circuit, and the output end of the relay circuit is connected to the vacuum pump.

[0008] In one embodiment, the relay control circuit includes: a first relay control circuit and a second relay control circuit, wherein the first relay control circuit includes: a first controllable switch and a first photoelectric coupler, wherein the first end of the first controllable switch is grounded, the control end is connected to the first output end of the control module, the second end is respectively connected to an external DC power supply and the second end of the first photoelectric coupler, the first end of the first photoelectric coupler is connected to the external DC power supply, the third end is connected to the relay circuit, and the fourth end is connected to the external DC power supply; the second relay control circuit includes: a second controllable switch and a second photoelectric coupler, wherein the first end of the second controllable switch is grounded, the control end is connected to the second output end of the control module, the second end is respectively connected to the external DC power supply and the second end of the second photoelectric coupler, the first end of the second photoelectric coupler is connected to the external DC power supply, the third end is connected to the relay circuit, and the fourth end is connected to the external DC power supply.

[0009] In one embodiment, the relay circuit includes: a third controllable switch, a fourth controllable switch, a first relay and a second relay, wherein a first end of the third controllable switch is grounded, a control end of the third controllable switch is connected to a third end of the first photocoupler, a second end of the third controllable switch is connected to one end of the first relay coil, and the other end of the first relay coil is connected to the external DC power supply; a first end of the fourth controllable switch is grounded, a control end of the fourth controllable switch is connected to a third end of the second photocoupler, a second end of the fourth controllable switch is connected to one end of the second relay coil, and the other end of the second relay coil is connected to the external DC power supply.

[0010] In one embodiment, the relay circuit further includes: a third relay and a fourth relay, wherein the first moving contact of the third relay is connected to the moving contact of the first relay, the first static contact corresponding to the first moving contact of the third relay is connected to the moving contact of the second relay, the second static contact of the second relay is respectively connected to one end of the coil of the fourth relay and the first moving contact of the fourth relay, the other end of the coil of the fourth relay is grounded, and the second moving contact corresponding to the first moving contact of the fourth relay is connected to the vacuum pump; the second moving contact of the fourth relay is connected to the first static contact of the first relay, the first static contact corresponding to the second moving contact of the fourth relay is connected to one end of the coil of the third relay, and the other end of the coil of the third relay is grounded.

[0011] In one embodiment, the relay circuit further includes: a fifth relay, one end of the fifth relay coil is connected to the second moving contact corresponding to the first moving contact of the fourth relay, the other end of the fifth relay coil is grounded, the first moving contact of the fifth relay is connected to the L-phase line of the external AC power supply, the second moving contact of the fifth relay is connected to the N-phase line of the external AC power supply, the second static contact corresponding to the first moving contact of the fifth relay is connected to the L-phase line of the vacuum pump, and the second static contact corresponding to the second moving contact of the fifth relay is connected to the N-phase line of the vacuum pump.

[0012] In one embodiment, the relay circuit further includes: a sixth relay and a solenoid valve connected to the sixth relay, wherein one end of the sixth relay coil is connected to a second moving contact corresponding to the first moving contact of the fourth relay, the other end of the sixth relay coil is grounded, the first moving contact of the sixth relay is connected to an L-phase line of an external AC power supply, the second moving contact of the sixth relay is connected to an N-phase line of the external AC power supply, the second static contact corresponding to the first moving contact of the sixth relay is connected to the L-phase line of the solenoid valve, and the second static contact corresponding to the second moving contact of the sixth relay is connected to the N-phase line of the solenoid valve.

[0013] In one embodiment, the relay circuit further includes: a first diode, a second diode, a third diode, a fourth diode, a first resistor and a second resistor, wherein the anode of the first diode is connected to one end of the first relay coil, the cathode of the first diode is connected to the other end of the first relay coil, the cathode of the second diode is connected to the second end of the third controllable switch, the anode of the second diode is connected to one end of the first resistor, and the other end of the first resistor is connected to the external DC power supply; the anode of the third diode is connected to one end of the second relay coil, the cathode of the third diode is connected to the other end of the second relay coil, the cathode of the fourth diode is connected to the second end of the fourth controllable switch, the anode of the fourth diode is connected to one end of the second resistor, and the other end of the second resistor is connected to the external DC power supply.

[0014] In one embodiment, the relay circuit further includes: a fifth diode, a sixth diode, a seventh diode and an eighth diode, wherein the anode of the fifth diode is connected to the other end of the coil of the third relay, and the cathode is connected to one end of the coil of the third relay; the anode of the sixth diode is connected to the other end of the coil of the fourth relay, and the cathode is connected to one end of the coil of the fourth relay; the anode of the seventh diode is connected to the other end of the coil of the fifth relay, and the cathode is connected to one end of the coil of the fifth relay; the anode of the eighth diode is connected to the other end of the coil of the sixth relay, and the cathode is connected to one end of the coil of the sixth relay.

[0015] In one embodiment, the vacuum control device also includes: a first power module and a second power module, wherein the first power module is connected to the driving module to provide a DC power supply to the driving module; the second power module is respectively connected to the vacuum pump and the solenoid valve to provide an AC power supply to the vacuum pump and the solenoid valve.

[0016] The technical solution of the present invention has the following advantages:

[0017] The vacuum pumping control device provided by the present invention includes: a control module and a driving module, wherein the control module is used to receive the current vacuum value of the target vacuum pumping chamber, and generate a logic control signal according to the current vacuum value and the preset vacuum threshold; the input end of the driving module is connected to the control module, and the output end is connected to the vacuum pump, and is used to receive the logic control signal, and generate a driving signal according to the logic control signal to drive the vacuum pump to perform vacuum pumping. By comparing the current vacuum value of the target vacuum pumping chamber with the preset vacuum threshold, a logic control signal is generated according to the comparison result to drive the vacuum pump to perform vacuum pumping. According to the comparison result, when the current vacuum value is not within the preset vacuum threshold range, the vacuum pump can be driven to perform vacuum pumping, and when the current vacuum value is within the preset vacuum threshold range, the vacuum pump can be stopped to perform vacuum pumping. By intermittently controlling the vacuum pump to perform vacuum pumping, the continuous operation time of the vacuum pump is shortened, and the service life of the equipment parts is extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 is a principle block diagram of a specific example of a vacuum control device in an embodiment of the present invention;

[0020] Figure 2 is a structural diagram of a specific example of a control interface in an embodiment of the present invention;

[0021] Figure 3 is a principle block diagram of another specific example of a vacuum control device in an embodiment of the present invention;

[0022] Figure 4 is a circuit diagram of a specific example of a driving module in an embodiment of the present invention;

[0023] Figure 5 is a circuit diagram of another specific example of a driving module in an embodiment of the present invention;

[0024] Figure 6 A circuit diagram of a specific example of power input in an embodiment of the present invention. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms “first”, “second” and “third” are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can also be the internal connection of two components, it can be a wireless connection, or it can be a wired connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] An embodiment of the present invention provides a vacuum pump control device, which is applied to a vacuum pump. The vacuum pump is arranged in a target vacuum chamber and is used to vacuum the target vacuum chamber. Figure 1 As shown, the vacuum control device includes: a control module 1 and a drive module 2, wherein the control module 1 is used to receive the current vacuum value of the target vacuum chamber, and generate a logic control signal according to the current vacuum value and a preset vacuum threshold; the input end of the drive module 2 is connected to the control module 1, and the output end is connected to the vacuum pump, for receiving the logic control signal, and generating a drive signal according to the logic control signal to drive the vacuum pump to perform vacuum.

[0030] In a specific embodiment, the target vacuum chamber is equipped with a vacuum detector for detecting the current vacuum value in the target vacuum chamber and sending the detected current vacuum value to the control module 1. The current vacuum value is compared with the preset vacuum threshold value by a comparator inside the control module 1 to generate a logic control signal, and the control signal is transmitted through the control module 1. Figure 2The CN8 control interface shown outputs a low signal or a high signal corresponding to the logic control signal, wherein the 4th pin of the CN8 control interface outputs a low signal, the 5th pin outputs a high signal, and the 6th pin is grounded GND. In the embodiment of the present invention, the preset vacuum threshold is set to 5Pa-10Pa, and the high and low levels of the high and low signals are 5V and 0V respectively. The control module 1 adopts a single-chip microcomputer, which is only taken as an example and is not limited to this.

[0031] The vacuum pumping control device provided by the present invention includes: a control module and a driving module, wherein the control module is used to receive the current vacuum value of the target vacuum pumping chamber, and generate a logic control signal according to the current vacuum value and the preset vacuum threshold; the input end of the driving module is connected to the control module, and the output end is connected to the vacuum pump, and is used to receive the logic control signal, and generate a driving signal according to the logic control signal to drive the vacuum pump to perform vacuum pumping. By comparing the current vacuum value of the target vacuum pumping chamber with the preset vacuum threshold, a logic control signal is generated according to the comparison result to drive the vacuum pump to perform vacuum pumping. According to the comparison result, when the current vacuum value is not within the preset vacuum threshold range, the vacuum pump can be driven to perform vacuum pumping, and when the current vacuum value is within the preset vacuum threshold range, the vacuum pump can be stopped to perform vacuum pumping. By intermittently controlling the vacuum pump to perform vacuum pumping, the continuous operation time of the vacuum pump is shortened, and the service life of the equipment parts is extended.

[0032] In one embodiment, if Figure 3 As shown, the driving module 2 includes: a relay control circuit 21 and a relay circuit 22, wherein the input end of the relay control circuit 21 is connected to the output end of the control module 1, the output end of the relay control circuit 21 is connected to the input end of the relay circuit 22, and the output end of the relay circuit 22 is connected to the vacuum pump.

[0033] In a specific embodiment, if Figure 4As shown, the relay control circuit 21 includes: a first relay control circuit 211 and a second relay control circuit 212, wherein the first relay control circuit 211 includes: a first controllable switch Q2 and a first photocoupler U1, wherein the first end of the first controllable switch Q2 is grounded, the control end is connected to the first output end of the control module 1, the second end is respectively connected to the external DC power supply and the second end of the first photocoupler U1, the first end of the first photocoupler U1 is connected to the external DC power supply, the third end is connected to the relay circuit 22, and the fourth end is connected to the external DC power supply; the second relay control circuit 212 includes: a second controllable switch Q22 and a second photocoupler U11, wherein the first end of the second controllable switch Q22 is grounded, the control end is connected to the second output end of the control module 1, the second end is respectively connected to the external DC power supply and the second end of the second photocoupler U11, the first end of the second photocoupler U11 is connected to the external DC power supply, the third end is connected to the relay circuit 22, and the fourth end is connected to the external DC power supply.

[0034] In the embodiment of the present invention, when there is an external DC power supply input, the High signal output by the control module 1 controls the on-off of the first controllable switch Q2, and the on-off of the first controllable switch Q2 further controls the operation of the first photocoupler U1; the Low signal output by the control module 1 controls the on-off of the second controllable switch Q22, and the on-off of the second controllable switch Q22 further controls the operation of the second photocoupler U11. By controlling the working states of the first controllable switch Q2, the first photocoupler U1, the second controllable switch Q22 and the second photocoupler U11, the control of the relay circuit 22 is finally achieved. Specifically, the first controllable switch Q2 and the second controllable switch Q22 both use 9013 transistors, which are NPN-type silicon transistors with low voltage, high current and small signal. The first photocoupler U1 and the second photocoupler U11 both use SFH615A-2 photocoupler, which is an NPN photocoupler with a current transfer ratio of 63%-125%, and has the characteristics of multiple transfer ratios, low coupling capacitance and high isolation voltage. The first photocoupler U1 and the second photocoupler U11 both have a gallium arsenide infrared diode emitter, which is optically coupled to a silicon planar phototransistor detector and integrated in a plastic DIP-4 package.

[0035] In one embodiment, if Figure 5As shown, the relay circuit 22 includes: a third controllable switch Q1, a fourth controllable switch Q11, a first relay K1 and a second relay K11, wherein a first end of the third controllable switch Q1 is grounded, a control end of the third controllable switch Q1 is connected to a third end of the first photocoupler U1, a second end of the third controllable switch Q1 is connected to one end of a coil of the first relay K1, and the other end of the coil of the first relay K1 is connected to an external DC power supply; a first end of the fourth controllable switch Q11 is grounded, a control end of the fourth controllable switch Q11 is connected to a third end of the second photocoupler U11, a second end of the fourth controllable switch Q11 is connected to one end of a coil of the second relay K11, and the other end of the coil of the second relay K11 is connected to an external DC power supply.

[0036] In a specific embodiment, if Figure 5 As shown, the relay circuit 22 also includes: a third relay RL1 and a fourth relay RL11, wherein the first moving contact 9 of the third relay RL1 is connected to the moving contact 1 of the first relay K1, the first static contact 1 corresponding to the first moving contact 9 of the third relay RL1 is connected to the moving contact 1 of the second relay K11, the second static contact 4 of the second relay K11 is respectively connected to one end of the coil of the fourth relay RL11 and the first moving contact 9 of the fourth relay RL11, the other end of the coil of the fourth relay RL11 is grounded, and the second moving contact 5 corresponding to the first moving contact 9 of the fourth relay RL11 is connected to the vacuum pump; the second moving contact 12 of the fourth relay RL11 is connected to the first static contact 3 of the first relay K1, the first static contact 4 corresponding to the second moving contact 12 of the fourth relay RL11 is connected to one end of the coil of the third relay RL1, and the other end of the coil of the third relay RL1 is grounded.

[0037] Furthermore, if Figure 5 As shown, the relay circuit 22 also includes: a fifth relay RL3, one end of the coil of the fifth relay RL3 is connected to the second moving contact 5 corresponding to the first moving contact 9 of the fourth relay RL11, the other end of the coil of the fifth relay RL3 is grounded, the first moving contact 9 of the fifth relay RL3 is connected to the L phase line of the external AC power supply, the second moving contact 12 of the fifth relay RL3 is connected to the N phase line of the external AC power supply, the second static contact 5 corresponding to the first moving contact 9 of the fifth relay RL3 is connected to the L phase line of the vacuum pump, and the second static contact 8 corresponding to the second moving contact 12 of the fifth relay RL3 is connected to the N phase line of the vacuum pump.

[0038] Furthermore, if Figure 5As shown, the relay circuit 22 also includes: a sixth relay RL4 and a solenoid valve connected to the sixth relay RL4, wherein one end of the coil of the sixth relay RL4 is connected to the second moving contact 5 corresponding to the first moving contact 9 of the fourth relay RL11, the other end of the coil of the sixth relay RL4 is grounded, the first moving contact 9 of the sixth relay RL4 is connected to the L phase line of the external AC power supply, the second moving contact 12 of the sixth relay RL4 is connected to the N phase line of the external AC power supply, the second static contact 5 corresponding to the first moving contact 9 of the sixth relay RL4 is connected to the L phase line of the solenoid valve, and the second static contact 8 corresponding to the second moving contact 12 of the sixth relay RL4 is connected to the N phase line of the solenoid valve.

[0039] Furthermore, if Figure 5 As shown, the relay circuit 22 also includes: a first diode D1, a second diode D3, a third diode D11, a fourth diode D33, a first resistor R5 and a second resistor R55, wherein the anode of the first diode D1 is connected to one end of the coil of the first relay K1, the cathode of the first diode D1 is connected to the other end of the coil of the first relay K1, the cathode of the second diode D3 is connected to the second end of the third controllable switch Q1, the anode of the second diode D3 is connected to one end of the first resistor R5, and the other end of the first resistor R5 is connected to the external DC power supply; the anode of the third diode D11 is connected to one end of the coil of the second relay K11, the cathode of the third diode D11 is connected to the other end of the coil of the second relay K11, the cathode of the fourth diode D33 is connected to the second end of the fourth controllable switch Q11, the anode of the fourth diode D33 is connected to one end of the second resistor R55, and the other end of the second resistor R55 is connected to the external DC power supply.

[0040] Furthermore, if Figure 5 As shown, the relay circuit 22 also includes: a fifth diode D2, a sixth diode D22, a seventh diode D5 and an eighth diode D6, wherein the anode of the fifth diode D2 is connected to the other end of the coil of the third relay RL1, and the cathode is connected to one end of the coil of the third relay RL1; the anode of the sixth diode D22 is connected to the other end of the coil of the fourth relay RL11, and the cathode is connected to one end of the coil of the fourth relay RL11; the anode of the seventh diode D5 is connected to the other end of the coil of the fifth relay RL3, and the cathode is connected to one end of the coil of the fifth relay RL3; the anode of the eighth diode D6 is connected to the other end of the coil of the sixth relay RL4, and the cathode is connected to one end of the coil of the sixth relay RL4.

[0041] In a specific embodiment, the first relay K1 and the second relay K11 are power relays, the third relay RL1, the fifth relay RL3 and the fourth relay RL11 are general relays, and the model is RXM2AB2BD. The sixth relay RL4 is a time relay, the model is H3Y-2 / 4, and the time relay setting time is 60 seconds. After the vacuum control device is powered on, the initial vacuum value is 1 atmosphere (101.325kPa). Since the upper and lower limit thresholds of the vacuum are set to 5pa-10pa, the vacuum process can be divided into two stages: the vacuum low stage and the vacuum high stage. In the vacuum low stage, if the current vacuum value P>10Pa, V high=V low=0V, at this time the third relay RL1 does not work, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 work, and the solenoid valve and the vacuum pump start to vacuum. If 5Pa<P≤10Pa, then V high=5V, V low=0V, at this time the third relay RL1 does not work, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 work, and the solenoid valve and the vacuum pump start to evacuate. If the current vacuum value P≤5Pa, then V high=V low=5V, at this time the third relay RL1 works, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 do not work, and the solenoid valve and the vacuum pump stop working.

[0042] In the vacuum high return stage, if the current vacuum value P = 5Pa, then V high = V low = 5V, at this time the third relay RL1 works, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 do not work, and the solenoid valve and the vacuum pump stop working. If 5Pa < P < 10Pa, then V high = 5V, V low = 0V, at this time the third relay RL1 works, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 do not work, and the solenoid valve and the vacuum pump stop working. If P = 10Pa, then V high = 5V, V low = 0V, at this time the third relay RL1 does not work, the fifth relay RL3, the sixth relay RL4, and the fourth relay RL11 work, and the solenoid valve and the vacuum pump start to evacuate. In the vacuum low stage and the vacuum high return stage, the relay circuit 22 gives the working signal to the solenoid valve and the vacuum pump synchronously, but the working states of the solenoid valve and the vacuum pump are different. The sixth relay RL4 is connected in series with the solenoid valve, and the setting time is 60 seconds. After each vacuum pump works for 60 seconds, the solenoid valve opens to exhaust the vacuum in the vacuum pump and prevent back suction.

[0043] In the embodiment of the present invention, Figure 4 and Figure 5As shown, when the control module 1 has no high signal or low signal output, the first controllable switch Q2, the second controllable switch Q22, the first photocoupler U1, the second photocoupler U11, the third controllable switch Q1, and the fourth controllable switch Q11 do not work due to no pressure difference, and the two ends of the coils of the first relay K1 and the second relay K11 do not attract due to no 24V pressure difference. At this time, the first relay K1 and the second relay K11 do not work. The 24V at the pin 1 of the first relay K1 passes through the pins 9 and 1 of the third relay RL1 to the pin 1 of the second relay K11. Because the second relay K11 does not work, the pins 1 and 4 are connected, so that the coil of the fourth relay RL11 is powered and works, and the pin 12 of the fourth relay RL11 is cut to the pin 8. Since the pin 4 of the fourth relay RL11 is connected to the coil of the third relay RL1, the coil of the third relay RL1 can only be powered and work when the first relay K1 works and the fourth relay RL11 does not work. By setting the first relay K1, the second relay K11, the third relay RL1 and the fourth relay RL11 to the above-mentioned line connection relationship, the fourth relay RL11 forms an interlocking protection with the first relay K1 and the third relay RL1. When the coil of the third relay RL1 is energized to work, the fourth relay RL11 is ensured not to work, thereby preventing the fifth relay RL3 and the sixth relay RL4 from malfunctioning to start the vacuum pump.

[0044] When a high signal (high level) is input before R7, the first controllable switch Q2 is turned on, and pin 3 of the first controllable switch Q2 is at a low level. Then the first photocoupler U1 works, and the 24V of the resistor R2 is transmitted to pin 3 and the third controllable switch Q1 through pin 4 of the first photocoupler U1. The third controllable switch Q1 is turned on, and pin 3 of the third controllable switch Q1 is at a low level. +24V passes through the first resistor R5, and the second diode D3 lights up. At the same time, the coil of the first relay KI is energized (pins 2 and 5), the first relay K1 works, pin 1 is cut to pin 3, and the +24V of pin 1 reaches pin 1 through pin 3 and pins 12 and 4 of the fourth relay RL11, pins 14 and 13 of the third relay RL1. The coil of the third relay RL1 is energized, the third relay RL1 works, and pin 9 is cut to pin 5.

[0045] When a low signal (high level) is input before R77, the second controllable switch Q22 is turned on, and the 3rd pin of the second controllable switch Q22 is at a low level, and then the second photocoupler U11 works, and the +24V of the resistor R22 is transmitted to the 3rd pin and the fourth controllable switch Q11 through the 4th pin of the second photocoupler U11, and the fourth controllable switch Q11 is turned on, and the 3rd pin of the fourth controllable switch Q11 is at a low level, and the +24V passes through the second resistor R55, and the fourth diode D33 lights up. At the same time, the coil of the second relay K11 is energized (2nd pin and 5th pin), and the second relay K11 works, and the 1st pin is cut to the 3rd pin (NC), and the fourth relay RL11 will not work, thereby controlling the fifth relay RL3 and the sixth relay RL4 (i.e., the two load solenoid valves and the vacuum pump) not to work.

[0046] In one embodiment, if Figure 3 As shown, the vacuum control device also includes: a first power module 3 and a second power module 4, wherein the first power module 3 is connected to the driving module 2 to provide a DC power supply to the driving module 2; the second power module 4 is respectively connected to the vacuum pump and the solenoid valve to provide an AC power supply to the vacuum pump and the solenoid valve.

[0047] In a specific embodiment, the first power module 3 provides two types of DC power to the driving module 2, namely +24V and +5V. Figure 6 As shown, +24V and +5V input voltages are provided by P5 and P3 respectively. To prevent wrong connection, P5 (+24V) uses a 2-pin terminal and P3 (+5V) uses a 4-pin terminal. The second power module 4 provides AC220V power for the vacuum pump and the solenoid valve. Figure 5 As shown, the AC220V power supply is provided by P4, which provides power supply voltage to the two loads of the vacuum pump and the solenoid valve. Among them, D4 is the +24V power indicator light, and R4 (4.7KΩ) is the voltage dividing resistor. When the first power module 3 provides +24V DC power to the driving module 2, the power indicator light D4 is on.

[0048] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention.

Claims

1. A vacuum pump control device, applied to a vacuum pump, wherein the vacuum pump is arranged in a target vacuum chamber and is used to vacuum the target vacuum chamber, characterized in that: The vacuum control device comprises: a control module and a drive module, wherein: The control module is used to receive the current vacuum value of the target vacuum chamber, and generate a logic control signal according to the current vacuum value and a preset vacuum threshold; The input end of the driving module is connected to the control module, and the output end is connected to the vacuum pump, for receiving the logic control signal, and generating a driving signal according to the logic control signal to drive the vacuum pump to perform vacuum extraction; The driving module includes: a relay control circuit and a relay circuit, wherein: The input end of the relay control circuit is connected to the output end of the control module, the output end of the relay control circuit is connected to the input end of the relay circuit, and the output end of the relay circuit is connected to the vacuum pump; The relay control circuit comprises: a first relay control circuit and a second relay control circuit, wherein: The first relay control circuit comprises: a first controllable switch and a first photoelectric coupler, wherein the first end of the first controllable switch is grounded, the control end is connected to the first output end of the control module, the second end is respectively connected to an external DC power supply and the second end of the first photoelectric coupler, the first end of the first photoelectric coupler is connected to the external DC power supply, the third end is connected to the relay circuit, and the fourth end is connected to the external DC power supply; The second relay control circuit comprises: a second controllable switch and a second photoelectric coupler, wherein the first end of the second controllable switch is grounded, the control end is connected to the second output end of the control module, the second end is respectively connected to the external DC power supply and the second end of the second photoelectric coupler, the first end of the second photoelectric coupler is connected to the external DC power supply, the third end is connected to the relay circuit, and the fourth end is connected to the external DC power supply; The relay circuit includes: a third controllable switch, a fourth controllable switch, a first relay and a second relay, wherein: A first end of the third controllable switch is grounded, a control end of the third controllable switch is connected to a third end of the first photoelectric coupler, a second end of the third controllable switch is connected to one end of the coil of the first relay, and the other end of the coil of the first relay is connected to the external DC power supply; A first end of the fourth controllable switch is grounded, a control end of the fourth controllable switch is connected to a third end of the second photoelectric coupler, a second end of the fourth controllable switch is connected to one end of the coil of the second relay, and the other end of the coil of the second relay is connected to the external DC power supply; The relay circuit further includes: a third relay and a fourth relay, wherein: The first moving contact of the third relay is connected to the moving contact of the first relay, the first static contact corresponding to the first moving contact of the third relay is connected to the moving contact of the second relay, the second static contact of the second relay is respectively connected to one end of the coil of the fourth relay and the first moving contact of the fourth relay, the other end of the coil of the fourth relay is grounded, and the second moving contact corresponding to the first moving contact of the fourth relay is connected to the vacuum pump; The second moving contact of the fourth relay is connected to the first static contact of the first relay, the first static contact corresponding to the second moving contact of the fourth relay is connected to one end of the coil of the third relay, and the other end of the coil of the third relay is grounded; The relay circuit further includes: a fifth relay, one end of the coil of the fifth relay is connected to the second moving contact corresponding to the first moving contact of the fourth relay, the other end of the coil of the fifth relay is grounded, the first moving contact of the fifth relay is connected to the L phase line of the external AC power supply, the second moving contact of the fifth relay is connected to the N phase line of the external AC power supply, the second static contact corresponding to the first moving contact of the fifth relay is connected to the L phase line of the vacuum pump, and the second static contact corresponding to the second moving contact of the fifth relay is connected to the N phase line of the vacuum pump; The relay circuit further includes: a sixth relay and a solenoid valve connected to the sixth relay, wherein: One end of the coil of the sixth relay is connected to the second moving contact corresponding to the first moving contact of the fourth relay, the other end of the coil of the sixth relay is grounded, the first moving contact of the sixth relay is connected to the L-phase line of the external AC power supply, the second moving contact of the sixth relay is connected to the N-phase line of the external AC power supply, the second static contact corresponding to the first moving contact of the sixth relay is connected to the L-phase line of the solenoid valve, and the second static contact corresponding to the second moving contact of the sixth relay is connected to the N-phase line of the solenoid valve; The relay circuit further includes: a first diode, a second diode, a third diode, a fourth diode, a first resistor and a second resistor, wherein: The anode of the first diode is connected to one end of the coil of the first relay, the cathode of the first diode is connected to the other end of the coil of the first relay, the cathode of the second diode is connected to the second end of the third controllable switch, the anode of the second diode is connected to one end of the first resistor, and the other end of the first resistor is connected to the external DC power supply; The anode of the third diode is connected to one end of the coil of the second relay, the cathode of the third diode is connected to the other end of the coil of the second relay, the cathode of the fourth diode is connected to the second end of the fourth controllable switch, the anode of the fourth diode is connected to one end of the second resistor, and the other end of the second resistor is connected to the external DC power supply.

2. The vacuum control device according to claim 1, characterized in that: The relay circuit further includes: a fifth diode, a sixth diode, a seventh diode and an eighth diode, wherein: The anode of the fifth diode is connected to the other end of the coil of the third relay, and the cathode is connected to one end of the coil of the third relay; The anode of the sixth diode is connected to the other end of the coil of the fourth relay, and the cathode is connected to one end of the coil of the fourth relay; The anode of the seventh diode is connected to the other end of the coil of the fifth relay, and the cathode is connected to one end of the coil of the fifth relay; The anode of the eighth diode is connected to the other end of the coil of the sixth relay, and the cathode of the eighth diode is connected to one end of the coil of the sixth relay.

3. The vacuum control device according to claim 1, characterized in that: Also includes: A first power module and a second power module, wherein: The first power supply module is connected to the driving module and is used to provide a DC power supply to the driving module; The second power supply module is connected to the vacuum pump and the solenoid valve respectively, and is used to provide AC power to the vacuum pump and the solenoid valve.

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