Reaction Tube Fixing Module and Reaction Furnace

Abstract

The present invention discloses a reaction tube fixing module and a reaction furnace. The reaction tube fixing module includes a reaction tube, a socket piece, and at least two flexible support members: The socket piece is used for connecting with an external component. The socket piece is sleeved on the outside of the reaction tube, and there is a gap between the socket piece and the reaction tube; The flexible support members are sleeved on the outside of the reaction tube, located in the gap and are in contact with the reaction tube and the socket piece respectively, and the flexible support members are distributed along the axial direction of the reaction tube. In the reaction tube fixing module of the embodiment of the present invention, the socket piece supports the reaction tube through at least two flexible support members distributed along the axial direction of the reaction tube, which can prevent the reaction tube from directly contacting the hard socket piece and cracking. The at least two flexible support members can provide multiple support positions, thereby balancing the force on the reaction tube, reducing the pressure at the support positions of the reaction tube, and realizing the stable placement of the reaction tube.

Description

Technical Field

[0001] The present invention relates to the field of wafer manufacturing, and more particularly to a reaction tube fixing module and a reaction furnace. Background Art

[0002] With the rapid development of the domestic semiconductor industry, the demand for semiconductor-related equipment is also increasing. The processing of wafers is carried out in a reaction tube. In some cases, one end of the reaction tube needs to be fixed and the other end remains suspended. In related technologies, a flange is usually used to achieve end fixing. Since the fixed end of the reaction tube needs to bear a large force and the reaction tube is made of a fragile material (such as quartz), it is easy to break after contacting the flange. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. For this purpose, the present invention provides a reaction tube fixing module that can avoid the reaction tube from breaking.

[0004] The present invention also discloses a reaction furnace applying the above reaction tube fixing module.

[0005] The reaction tube fixing module according to the first embodiment of the present invention includes:

[0006] A reaction tube;

[0007] A socket member for connecting with an external component, the socket member being sleeved outside the reaction tube and having a gap therebetween and the reaction tube;

[0008] At least two flexible support members, the flexible support members being sleeved outside the reaction tube, located in the gap and respectively contacting the reaction tube and the socket member, and each of the flexible support members being distributed along the axial direction of the reaction tube.

[0009] The reaction tube fixing module according to the embodiment of the present invention has at least the following beneficial effects:

[0010] The socket member supports the reaction tube through at least two flexible support members distributed along the axial direction of the reaction tube, which can avoid the reaction tube from directly contacting with the rigid socket member and breaking. At least two flexible support members can provide multiple support positions, thereby balancing the force on the reaction tube, reducing the pressure at the support position of the reaction tube, and realizing the stable placement of the reaction tube.

[0011] According to some embodiments of the present invention, the socket member has a first annular groove, and the flexible support member is located in the first annular groove;

[0012] The reaction tube fixing module further includes a first connecting member, the first connecting member being sleeved outside the reaction tube and connected to the socket member to limit the flexible support member in the corresponding first annular groove.

[0013] According to some embodiments of the present invention, the first connecting member can squeeze the corresponding flexible support member so that the flexible support member extends radially along the reaction tube.

[0014] According to some embodiments of the present invention, the first connecting member has an extrusion portion extending into the first annular groove. Along the extending direction of the extrusion portion, the distance between the groove wall of the first annular groove and the reaction tube gradually decreases.

[0015] According to some embodiments of the present invention, the reaction tube fixing module further includes a flexible filling member, which is filled in the gap and contacts the reaction tube.

[0016] According to some embodiments of the present invention, the flexible filling member is heat-conductive silica gel.

[0017] According to some embodiments of the present invention, the reaction tube fixing module further includes a height adjusting member, which is connected to the socket member, supports below the reaction tube, and can move in the vertical direction.

[0018] According to some embodiments of the present invention, the height adjusting member includes a mounting portion and an adjusting portion. The mounting portion is connected to the socket member, the adjusting portion is connected to the mounting portion, has a concave arc surface in contact with the reaction tube, and the hardness of the adjusting portion is less than that of the mounting portion.

[0019] According to some embodiments of the present invention, the socket member has a first heat dissipation cavity, and a first inlet and a first outlet communicating with the first heat dissipation cavity. The first inlet is used to introduce a heat dissipation medium to dissipate heat from each flexible support member.

[0020] According to some embodiments of the present invention, the socket member includes a socket portion sleeved on the reaction tube and a protruding portion connected to the socket portion. The protruding portion extends axially beyond the opening end of the reaction tube along the reaction tube. The end surface of the protruding portion has a second annular groove. The reaction tube fixing module further includes a first sealing ring, and the first sealing ring is located in the second annular groove.

[0021] According to some embodiments of the present invention, the protruding portion has a second heat dissipation cavity, and a second inlet and a second outlet communicating with the second heat dissipation cavity. The second inlet is used to introduce a heat dissipation medium to dissipate heat from the first sealing ring.

[0022] According to some embodiments of the present invention, the flexible support member facing the opening end of the reaction tube is a second sealing ring.

[0023] According to some embodiments of the present invention, the reaction tube fixing module further includes a positioning member, which is connected to the socket member and contacts the open end of the reaction tube for axial positioning, and the hardness of the positioning member is less than that of the socket member.

[0024] A reaction furnace according to the second embodiment of the present invention includes:

[0025] A base;

[0026] The reaction tube fixing module, which is connected to the base through the socket member;

[0027] A furnace body, which is connected to the base, and the reaction tube is located inside the furnace body.

[0028] Additional aspects and advantages of the present invention will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present invention. Description of the Drawings

[0029] The present invention will be further described below in conjunction with the drawings and embodiments, where:

[0030] Figure 1 is a three-dimensional schematic diagram of the reaction tube fixing module according to an embodiment of the present invention;

[0031] Figure 2 is Figure 1 a cross-sectional view of the reaction tube fixing module in ;

[0032] Figure 3 is Figure 2 an enlarged schematic diagram of area A in ;

[0033] Figure 4 is Figure 1 a three-dimensional schematic diagram of the reaction tube fixing module in another direction in, with the socket member hidden;

[0034] Figure 5 is Figure 1 a three-dimensional schematic diagram of the socket member of the reaction tube fixing module in ;

[0035] Figure 6 is Figure 5 a cross-sectional view of the socket member in. Detailed Embodiments

[0036] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0037] In the description of the present invention, it should be understood that with respect to the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., it is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0038] In the description of the present invention, the meaning of "several" is more than one, the meaning of "multiple" is more than two. Understandings such as "greater than", "less than", "exceeding", etc. do not include the recited number, and understandings such as "above", "below", "within", etc. include the recited number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0039] In the description of the present invention, unless otherwise clearly defined, words such as "arrangement", "installation", "connection", etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0040] In the description of the present invention, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0041] Refer to Figure 1 、 Figure 2 As shown in, the reaction tube fixing module of the embodiment of the present invention includes a reaction tube 100, a socket 200, and at least two flexible support members 300. The reaction tube 100 has a reaction chamber for placing wafers. The socket 200 is used to realize the connection between the reaction tube fixing module and an external component and is used to support the reaction tube 100. The flexible support members 300 are located between the reaction tube 100 and the socket 200, so that the socket 200 can both provide support for the reaction tube 100 and not be in direct contact with the reaction tube 100, avoiding the problem that the reaction tube 100 is broken due to hard contact with metal components.

[0042] The reaction tube 100 may be a known structure, such as a round tube as shown in the figure, one end of which (such as the front end shown in the figure) is an open end 110, having an opening 120 for wafers to enter and exit the reaction chamber, and the other end is closed. In the improvement of the present invention, the open end 110 is supported by the sleeve 200 as a fixed end, and the other end of the reaction tube 100 (such as the rear end shown in the figure) is suspended as a suspended end, thereby forming a cantilever fixed structure. It should be noted that the "open end", "fixed end" and "suspended end" referred to in the present invention are all used to illustrate the approximate positional relationship and cannot be understood as a limitation on a specific range.

[0043] The sleeve 200 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, which is sleeved on the outside of the reaction tube 100, and there is a gap 101 between the sleeve 200 and the reaction tube 100, so that the sleeve 200 is not in direct contact with the reaction tube 100. Taking the figure as an example, the sleeve 200 is sleeved on the outside of the open end 110. The sleeve 200 may be a metal component, such as a metal flange, so that it has sufficient strength to be connected to an external component.

[0044] The flexible support member 300 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, which is sleeved on the outside of the reaction tube 100, located in the gap 101 between the sleeve member 200 and the reaction tube 100, and in contact with the reaction tube 100 and the sleeve member 200 respectively, so that the sleeve member 200 supports the reaction tube 100 through the flexible support member 300. Since the hardness of the flexible support member 300 is relatively small, it will deform to a certain extent when subjected to force, thereby preventing the reaction tube 100 from breaking. The reaction tube fixing module of this embodiment includes at least two flexible support members 300, each of which is distributed along the axial direction of the reaction tube 100 to provide multiple support positions, so as to achieve stable support of the sleeve member 200 to the reaction tube 100. The flexible support member 300 may be made of a known flexible material, such as rubber, silicone, etc.

[0045] In the above-mentioned reaction tube fixing module, the socket 200 supports the reaction tube 100 through at least two flexible support members 300 distributed along the axial direction of the reaction tube 100, which can prevent the reaction tube 100 from being broken due to direct contact with the hard socket 200. At least two flexible support members 300 can provide multiple supporting positions, which can balance the force on the reaction tube 100, reduce the pressure at the supporting position of the reaction tube 100, and realize the stable placement of the reaction tube 100.

[0046] Reference Figure 3, the socket member 200 has a first annular groove 210, and the first annular groove 210 has at least a first opening facing the reaction tube 100. The flexible support member 300 is located in the first annular groove 210 and can contact the reaction tube 100 through the above-mentioned first opening. Taking the example shown in the figure, the reaction tube fixing module includes two flexible support members 300. Correspondingly, the socket member 200 has two first annular grooves 210, and the two first annular grooves 210 are respectively located at both ends of the socket portion 290 of the socket member 200 covering the reaction tube 100, and each first annular groove 210 forms a second opening on the corresponding end surface of the socket portion 290.

[0047] The reaction tube fixing module further includes a first connecting member 400. The first connecting member 400 can be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, such as a collar. It is sleeved on the outer side of the reaction tube 100 and connected to the socket member 200 to limit the flexible support member 300 in the corresponding first annular groove 210 and prevent the flexible support member 300 from coming out. Specifically, the end surface of the socket portion 290 has a first threaded hole 291, and the first connecting member 400 has an axial first through hole 410. After the threaded fastener passes through the first through hole 410 and is screwed into the first threaded hole 291, the fixed connection between the first connecting member 400 and the socket member 200 can be realized.

[0048] Referring to Figure 3 , the first connecting member 400 can squeeze the corresponding flexible support member 300 so that the flexible support member 300 extends radially along the reaction tube 100, realizing the close contact between the flexible support member 300, the socket member 200 and the reaction tube 100. Specifically, the first connecting member 400 has a pressing portion 420 extending into the first annular groove 210. Along the extending direction of the pressing portion 420, the distance between the groove wall of the first annular groove 210 and the reaction tube 100 gradually decreases. Taking Figure 3 the first annular groove 210 and the first connecting member 400 located at the front end of the socket portion 290 shown in the figure as an example, along the front-to-back direction, the distance between the groove wall of the first annular groove 210 and the reaction tube 100 gradually decreases. When the pressing portion 420 extends in, it will push the flexible support member 300 to contact the inclined groove wall, thereby limiting the flexible support member 300.

[0049] It should be noted that the first connecting member 400 may not be provided with a pressing portion 420 that can extend into the first annular groove 210. The axial dimension of the flexible support member 300 is greater than the axial dimension of the first annular groove 210, so that a part of the flexible support member 300 is located outside the first annular groove 210. In this way, when the first connecting member 400 is connected to the socket member 200, the flexible support member 300 can also be squeezed.

[0050] As an improvement of the above reaction tube fixing module, the reaction tube fixing module further includes a flexible filling member (not shown). The flexible filling member is filled in the gap 101. Taking the illustration in the figure as an example, it is filled between two flexible supports 300 and contacts the reaction tube 100. The contact area between the flexible filling member and the reaction tube 100 can be larger than the contact area between the flexible support 300 and the reaction tube 100, so as to play a role in support and buffering, and further prevent the reaction tube 100 from cracking. In some embodiments, the flexible filling member can be heat-dissipating silica gel, which contacts the reaction tube 100 and the socket 200 respectively. The socket 200 can be made of a material with good thermal conductivity. The heat of the reaction tube 100 can be transferred to the socket 200 through the flexible filling member, and the socket 200 dissipates heat in an active or passive manner, so as to achieve rapid cooling of the reaction tube 100.

[0051] Referring to Figure 4 , as an improvement of the above reaction tube fixing module, the reaction tube fixing module further includes a height adjusting member 600. The height adjusting member 600 is connected to the socket 200 and supports below the reaction tube 100, and can move in the vertical direction to finely adjust the reaction tube 100 to ensure the horizontal placement of the reaction tube 100. Specifically, the height adjusting member 600 includes a mounting portion 610 and an adjusting portion 620. The mounting portion 610 is connected to the socket 200 through structures such as thread fasteners (not shown). The adjusting portion 620 is connected to the top of the mounting portion 610 and has a concave arc surface 621 that contacts the reaction tube 100. During adjustment, rotating the thread fastener can drive the mounting portion 610 and the adjusting portion 620 to move up and down. The hardness of the adjusting portion 620 is less than that of the mounting portion 610. For example, the mounting portion 610 can be a metal component to ensure the mounting strength, and the adjusting portion 620 can be made of materials such as polytetrafluoroethylene, rubber, or silica gel, to prevent the hard metal component from directly contacting the reaction tube 100.

[0052] It should be noted that an avoidance hole (not shown) is provided on the socket 200 corresponding to the position of the adjusting portion 620, and the adjusting portion 620 can pass through the avoidance hole to contact the reaction tube 100.

[0053] Referring to Figure 2 、 Figure 5 、 Figure 6, as an improvement to the above reaction tube fixing module, the socket part 200 has a first heat dissipation cavity 220, and a first inlet 230 and a first outlet 240 communicating with the first heat dissipation cavity 220. A heat dissipation medium (such as cooling water) can flow into the first heat dissipation cavity 220 through the first inlet 230 and then flow out from the first outlet 240 to dissipate heat from the socket part 200, and further cool the flexible support part 300 in contact with the socket part 200, avoiding rapid aging of the flexible support part 300 due to high temperature. In addition, combined with the above-mentioned thermal conductive silicone, cooling the socket part 200 can also achieve heat dissipation of the reaction tube 100. To improve the cooling effect, the flexible support part 300 can be arranged adjacent to the first heat dissipation cavity 220. Taking the illustration in the figure as an example, the first heat dissipation cavity 220 is axially located between two flexible support parts 300, capable of dissipating heat from the main body part (such as the socket part 290) of the socket part 200.

[0054] Referring to Figure 2 , Figure 5 , Figure 6 , one end of the socket part 200 extends beyond the opening end 110 of the reaction tube 100 along the axial direction of the reaction tube 100. That is, the socket part 200 includes a socket part 290 covering the reaction tube 100 and a protruding part 2100 connected to the socket part 290 and protruding from the reaction tube 100. The end face of the protruding part 2100 has a second annular groove 250. The reaction tube fixing module further includes a first sealing ring. The first sealing ring is located in the second annular groove 250 and can cooperate with an external cover to isolate the inner cavity of the protruding part 2100 from the outside. In addition, referring to Figure 3 , the flexible support part 300 facing the opening end 110 of the reaction tube 100 is a second sealing ring, capable of realizing a sealed connection between the socket part 200 and the reaction tube 100. Combined with the sealed connection between the above-mentioned cover and the protruding part 2100, the inner cavity of the reaction tube 100 can be in a closed state, facilitating the formation of a vacuum environment.

[0055] It should be noted that when it is not necessary to rely on the socket part 200 to achieve sealing, the socket part 200 may not be provided with the protruding part 2100.

[0056] Referring to Figure 5 , Figure 6 , the socket part 200 has a second heat dissipation cavity 260, and a second inlet 270 and a second outlet 280 communicating with the second heat dissipation cavity 260. A heat dissipation medium (such as cooling water) can be used to introduce the heat dissipation medium into the second heat dissipation cavity 260 through the second inlet 270 and then flow out from the second outlet 280 to dissipate heat from the socket part 200, and further cool the first sealing ring in contact with the socket part 200, avoiding rapid aging of the first sealing ring due to high temperature. The second heat dissipation cavity 260 is arranged close to the protruding part 2100 to ensure the cooling effect on the first sealing ring.

[0057] Reference Figure 2 、 Figure 3 The reaction tube fixing module further includes a positioning member 500 and a second connecting member 700. The positioning member 500 is connected to the socket member 200 through the second connecting member 700 and contacts the open end 110 of the reaction tube 100 for positioning, preventing the axial displacement of the reaction tube 100 caused by the internal and external pressure difference after vacuum pumping. The hardness of the positioning member 500 is less than that of the socket member 200. For example, the socket member 200 can be a metal component to ensure the installation strength, and the positioning member 500 can be made of materials such as polytetrafluoroethylene, rubber, or silicone to avoid direct contact between the hard metal component and the reaction tube 100.

[0058] The second connecting member 700 can be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, such as a collar. Its end face facing the open end 110 has a third annular groove 710. The end face of the positioning member 500 facing the second connecting member 700 extends a clamping portion 510, and the clamping portion 510 is clamped in the third annular groove 710 to realize the connection between the positioning member 500 and the second connecting member 700. The end face of the socket portion 290 has a second threaded hole (not shown), and the second threaded hole and the first threaded hole 291 are circumferentially distributed along the socket portion 290. The second connecting member 700 also has a second through hole 720, and the second through hole 720 is offset from the first through hole 410, so that the second connecting member 700 can also be connected to the end face of the socket portion 290 through a threaded fastener.

[0059] The present invention also discloses a reaction furnace, which includes a base, the above-mentioned reaction tube fixing module and a furnace body. The reaction tube fixing module is fixedly connected to the base through the socket member 200, and the reaction tube 100 is located in the furnace body and can be heated by a heating device.

[0060] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the art. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. Reaction tube fixing module, characterized in that, Comprising: A reaction tube, one end of the reaction tube being an open end and the other end being a closed end; A socket member for connecting with an external component, the socket member being sleeved outside the reaction tube and having a gap with the reaction tube; At least two flexible support members, the flexible support members being sleeved outside the reaction tube, located in the gap and respectively contacting the reaction tube and the socket member, and each of the flexible support members being distributed along the axial direction of the reaction tube; The open end is supported by the socket member to serve as a fixed end, and the closed end is suspended to serve as a suspended end; The socket member has a first annular groove, and the flexible support member is located in the first annular groove; The reaction tube fixing module further includes a first connecting member, the first connecting member being sleeved outside the reaction tube and connected to the socket member to limit the flexible support member in the corresponding first annular groove; The first connecting member has a pressing portion extending into the first annular groove, and along the extending direction of the pressing portion, the distance between the groove wall of the first annular groove and the reaction tube gradually decreases.

2. The reaction tube fixing module according to claim 1, characterized in that, The first connecting member can press the corresponding flexible support member to cause the flexible support member to extend radially along the reaction tube.

3. The reaction tube fixing module according to claim 1, characterized in that, The reaction tube fixing module further includes a flexible filling member, the flexible filling member being filled in the gap and contacting the reaction tube.

4. The reaction tube fixing module according to claim 3, characterized in that, The flexible filling member is heat-conducting silica gel.

5. The reaction tube fixing module according to claim 1, characterized in that, The reaction tube fixing module further includes a height adjusting member, the height adjusting member being connected to the socket member, supported below the reaction tube, and capable of moving in the vertical direction.

6. The reaction tube fixing module according to claim 5, characterized in that, The height adjusting member includes a mounting portion and an adjusting portion, the mounting portion being connected to the socket member, the adjusting portion being connected to the mounting portion, having an inner concave arc surface contacting the reaction tube, and the hardness of the adjusting portion being less than the hardness of the mounting portion.

7. The reaction tube fixing module according to claim 1, characterized in that, The socket member has a first heat dissipation cavity, and a first inlet and a first outlet communicating with the first heat dissipation cavity, the first inlet being used for introducing a heat dissipation medium to dissipate heat from each of the flexible support members.

8. The reaction tube fixing module according to claim 1, characterized in that, The socket member includes a socket portion sleeved on the reaction tube and a protruding portion connected to the socket portion, the protruding portion extending axially beyond the open end of the reaction tube, the end surface of the protruding portion having a second annular groove, and the reaction tube fixing module further includes a first sealing ring located in the second annular groove.

9. The reaction tube fixing module according to claim 8, characterized in that, The protruding portion has a second heat dissipation cavity, and a second inlet and a second outlet communicating with the second heat dissipation cavity, the second inlet being used for introducing a heat dissipation medium to dissipate heat from the first sealing ring.

10. The reaction tube fixing module according to claim 8, characterized in that, The flexible support member facing the open end of the reaction tube is a second sealing ring.

11. The reaction tube fixing module according to claim 1, characterized in that, The reaction tube fixing module further includes a positioning member, the positioning member being connected to the socket member, contacting the open end of the reaction tube for axial positioning, and the hardness of the positioning member being less than the hardness of the socket member.

12. Reaction furnace, characterized in that, Comprising: A base; The reaction tube fixing module according to any one of claims 1 to 11, the reaction tube fixing module being connected to the base through the socket member; A furnace body, connected to the base, and the reaction tube is located inside the furnace body.

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