Adsorption fixing sheet

Abstract

The present invention provides an adsorption fixing sheet, which is arranged on the adsorption surface of an adsorption device to prevent the adsorption object from contacting the adsorption surface, and the adsorption fixing sheet comprises: a porous sheet having air permeability in the thickness direction; and an adhesive layer, which is arranged on one surface of the porous sheet and has air permeability in the thickness direction, and the adhesive layer contains a cross-linked adhesive, and the sheet area is set to 100 cm by a predetermined method. 2 The suction force at the time of suction is not less than 450 N. The suction fixing sheet of the present invention can suppress the reduction in processing accuracy of the suction object even when used at high temperatures.

Description

Technical Field

[0001] The present invention relates to a suction fixing sheet which is arranged on a suction surface of a suction device to prevent a suction target from contacting the suction surface. Background Art

[0002] In the process of processing thin and lightweight sheet bodies such as metal foil, plastic film, and ceramic green sheets used in the manufacture of ceramic capacitors, the following operation is performed: these sheet bodies are adsorbed to the adsorption surface of the adsorption device and fixed or transported. At this time, an adsorption and fixing sheet with air permeability is usually arranged on the adsorption surface. By arranging the adsorption and fixing sheet on the adsorption surface, it is possible to prevent the sheet body, which is the adsorption object, from directly contacting the adsorption surface. In this way, it is possible to prevent damage to the adsorption object during adsorption, scratches on the adsorption surface, and contamination of the adsorption surface caused by components contained in the adsorption object. Scratches and contamination on the adsorption surface may become factors that cause defects in the adsorption object to be adsorbed later.

[0003] Patent Document 1 discloses a suction fixing sheet formed of a porous sheet of ultra-high molecular weight polyethylene with a hot melt adhesive disposed on one side. The suction fixing sheet of Patent Document 1 is fixed to the suction surface of a suction device by a hot melt adhesive and used.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 9-22935 Summary of the invention

[0007] Problem that the invention aims to solve

[0008] In the adsorption and pressurizing process of pressurizing the adsorption object in the adsorption state, the adsorption and fixing sheet is sometimes exposed to a high processing temperature, and it is expected that the processing temperature is increased for the purpose of improving the processing efficiency, etc. According to the research of the present inventors, it is clear that, for the adsorption and fixing sheet of Patent Document 1 provided with a hot melt adhesive, the processing accuracy of the adsorption object tends to decrease when the processing temperature is increased.

[0009] An object of the present invention is to provide a suction and fixing sheet capable of suppressing a decrease in processing accuracy of an adsorbed object even when used at high temperatures.

[0010] Solutions for solving problems

[0011] The present invention provides an adsorption fixing sheet, which is arranged on an adsorption surface of an adsorption device to prevent an adsorption object from contacting the adsorption surface.

[0012] The adsorption and fixing sheet comprises: a porous sheet having air permeability in the thickness direction; and an adhesive layer which is arranged on one surface of the porous sheet and has air permeability in the thickness direction.

[0013] The adhesive layer comprises a cross-linked adhesive.

[0014] The sheet area is set to 100 cm 2 The adsorption force is above 450N.

[0015] The above-mentioned adsorption force is the following value: when the above-mentioned adsorption fixing sheet is fixed to a predetermined adsorption fixing table via the above-mentioned adhesive layer and the non-air-permeable measurement sheet is stacked on the surface of the above-mentioned adsorption fixing sheet on the side of the above-mentioned porous sheet, the above-mentioned adsorption fixing table generates an adsorption force, and the vacuum pressure (kPa) generated on the adsorption fixing table is calculated by the formula: vacuum pressure (kPa) × sheet area 100cm 2 The value found.

[0016] Effects of the Invention

[0017] According to the research of the inventors, it is clear that in the adsorption fixing sheet of Patent Document 1 provided with a hot melt adhesive, the hot melt adhesive flows at high temperature, thereby causing wrinkles and floating on the adsorption fixing sheet on the adsorption surface, and thus there is a tendency for the processing accuracy of the adsorption object to be reduced. On the other hand, in the adsorption fixing sheet of the present invention, the adhesive contained in the adhesive layer is cross-linked. Therefore, the generation of wrinkles and floating at high temperatures in the adsorption fixing sheet on the adsorption surface caused by the flow of the adhesive layer is suppressed.

[0018] In addition, the present inventors have studied the use of adhesives other than the hot melt adhesive disclosed in Patent Document 1, and the situation is still that the processing accuracy of the adsorbed object is reduced. Further research was conducted on this phenomenon, and the results clearly showed that: (I) unlike hot melt adhesives that can be blown and sprayed in a molten state, the adhesive cannot fully ensure the follow-up of the unevenness of the porous sheet surface, and there is a tendency to generate a gap between the porous sheet and the adhesive arranged on the sheet; (II) due to this gap, the air permeability in the in-plane direction of the adsorption fixing sheet during adsorption becomes larger; and (III) due to the above-mentioned air permeability in the in-plane direction, the adsorption fixing sheet has a reduced adsorption force on the adsorption surface, and it becomes easy to cause positional deviation on the adsorption fixing sheet on the adsorption surface, thereby reducing the processing accuracy of the adsorption object. On the other hand, for the adsorption fixing sheet of the present invention, by making the adhesive contained in the adhesive layer a cross-linked adhesive and the adsorption force of the specified area is greater than the specified value, the occurrence of positional deviation in the adsorption fixing sheet on the adsorption surface can be suppressed.

[0019] Therefore, according to the present invention, it is possible to realize a suction and fixing sheet that can suppress a decrease in processing accuracy of an adsorption object even when used at high temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a cross-sectional view schematically showing an example of the suction and fixation sheet of the present invention.

[0021] Figure 2 This is a schematic diagram for explaining a method for measuring the adsorption force of the adsorption fixing sheet.

[0022] Figure 3 This is a cross-sectional view schematically showing an example of a double-sided PSA sheet that the adsorption and fixation sheet of the present invention may include as a PSA layer.

[0023] Figure 4 This is a plan view schematically showing an example of the arrangement of through holes in a double-sided pressure-sensitive adhesive sheet that may be provided as a pressure-sensitive adhesive layer on the suction and fixation sheet of the present invention.

[0024] Figure 5 This is a plan view schematically showing another example of the arrangement of through holes in a double-sided pressure-sensitive adhesive sheet that may be provided as a pressure-sensitive adhesive layer on the suction and fixation sheet of the present invention.

[0025] Fig. 6A A top view schematically showing another example of the adsorption and fixing sheet of the present invention

[0026] Figure 6B To show Fig. 6A Schematic diagram of cross section BB of the adsorption fixation sheet.

[0027] Fig. 7A This is a plan view schematically showing another example of the suction and fixation sheet of the present invention.

[0028] Figure 7B To show Fig. 7A Schematic diagram of cross section BB of the adsorption fixation sheet.

[0029] Figure 8 This is a cross-sectional view schematically showing a process of adsorbing an adsorption object onto the adsorption surface of an adsorption device using the adsorption and fixing sheet of the present invention. DETAILED DESCRIPTION

[0030] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments described below.

[0031] [Adsorption fixing sheet]

[0032] An example of the suction fixing sheet of the present invention is shown in Figure 1 . Figure 1The adsorption fixing sheet 1 comprises: a porous sheet 2, which is air permeable in the thickness direction; and an adhesive layer 3, which is air permeable in the thickness direction. The adhesive layer 3 is arranged on one surface of the porous sheet 2. The adsorption fixing sheet 1 has air permeability in the thickness direction, and by being arranged on the adsorption surface of the adsorption device, it can be used as an adsorption fixing sheet that prevents the adsorption object from contacting the adsorption surface. The adsorption fixing sheet 1 is arranged and fixed to the adsorption surface of the adsorption device in a manner that the adhesive layer 3 contacts the adsorption surface. It should be noted that in this specification, the "thickness direction" of a sheet or layer refers to any direction connecting one surface of the sheet or layer to another surface. For example, Figure 3 In the example shown, the through holes 12 that form the air permeation path in the thickness direction of the double-sided adhesive sheet 11 as the adhesive layer 3 extend in a direction perpendicular to the surfaces 11a and 11b of the sheet 11, but the direction in which the through holes 12 extend is not limited to the perpendicular direction. The direction in which the through holes 12 extend may be inclined relative to the perpendicular direction as long as the through holes 12 connect one surface 11a and the other surface 11b of the double-sided adhesive sheet 11.

[0033] The sheet area is set to 100 cm 2 The adsorption force of the adsorption fixing sheet 1 is 450N or more (hereinafter, “the sheet area is 100cm 2 The adsorbed force of the adsorption fixing sheet 1 is abbreviated as "adsorbed force"). The adsorbed force of the adsorption fixing sheet 1 can be greater than 475N, greater than 500N, greater than 525N, greater than 550N, and further greater than 575N. The upper limit of the adsorbed force of the adsorption fixing sheet 1 is, for example, less than 10000N. It should be noted that the adsorbed force of the adsorption fixing sheet 1 is a value at room temperature.

[0034] The suction force of the suction fixing sheet 1 is a value obtained by the following method. Figure 2 A method for measuring the suction force of the suction and fixing sheet 1 will be described.

[0035] First, the adsorption fixing sheet 1 is fixed to a predetermined adsorption fixing platform 21 via the adhesive layer 3, and the non-air-permeable measuring sheet 22 is stacked on the surface of the adsorption fixing sheet 1 on the porous sheet 2 side. The area of ​​the adsorption fixing sheet 1 is set to 100 cm 2 It is preferred to use a square adsorption and fixing sheet 1 of 10 cm×10 cm.

[0036] The adsorption fixing table 21 is a flat table made of metal such as stainless steel, and is connected to a vacuum pump 26 via a pipe 25 equipped with a pressure gauge 23 and a flow meter 24. In the area A of the adsorption fixing table 21 for fixing the adsorption fixing sheet 1, a plurality of through holes 27 (diameter 1 mm) with a center-to-center distance (pitch) of 3 mm are provided, and the opening and cross-sectional shape are circular. The through holes 27 are provided in such a manner that the center of each through hole is located at the intersection (lattice point) of an imaginary square grid on the fixed surface when viewed from a direction perpendicular to the fixed surface of the adsorption fixing table 21. By the operation of the vacuum pump 26, a flow of air is generated from the fixed surface of the adsorption fixing table 21 along the direction of the pipe 25 through the through holes 27, thereby generating an adsorption force on the adsorption fixing table 21. The through holes 27 may be provided in an area other than the area A of the adsorption fixing table 21. In the case of providing the through holes 27, when the vacuum reaching pressure described later is measured, a negative pressure is generated only in the through holes 27 of the area A by the vacuum pump 26. The surface of the portion other than the through hole in the region A of the adsorption fixing table 21 (surface of the fixing surface) preferably has a surface roughness of 2.0 μm or less as indicated by the arithmetic mean roughness Ra specified in Japanese Industrial Standard (hereinafter referred to as "JIS") B0601:2001. The adsorption fixing sheet 1 is fixed to the adsorption fixing table 21 as follows: the adsorption fixing sheet 1 is arranged on the adsorption fixing table 21 so that no folds or overlaps are generated on the sheet 1, and a roller with a mass of 2 kg is moved back and forth once on the surface of the adsorption fixing sheet 1. For example, the roller based on JIS Z0237:2009 "Testing methods for adhesive tapes and adhesive sheets" can be used.

[0037] The measuring sheet 22 stacked on the adsorption fixing sheet 1 is a non-air-permeable sheet, and is stacked on the sheet 1 in order to make the air permeability of the adsorption fixing sheet 1 in the thickness direction lose when the adsorption force is measured. The measuring sheet 22 can be, for example, a metal sheet or a resin sheet. A typical example of the measuring sheet 22 is a polyethylene terephthalate (PET) sheet with a thickness of 25 μm. It should be noted that the "non-air-permeable sheet" in this specification refers to a sheet whose air permeability in the thickness direction is expressed by the air permeability (Gurley air permeability) measured by the air permeability measurement method B (Gurley type method) specified in JIS L1096: 2010, and is 10,000 seconds / 100 mL or more. The area of ​​the measuring sheet 22 is set to be larger than the area of ​​the adsorption fixing sheet 1. The measuring sheet 22 is stacked on the adsorption fixing sheet 1 in a manner that does not generate folds on the sheet 22, overlaps, and covers the entire adsorption fixing sheet 1.

[0038] Next, the vacuum pump 26 is operated to generate an adsorption force on the adsorption fixing table 21. The stack of the adsorption fixing sheet 1 and the measuring sheet 22 fixed to the fixing surface of the adsorption fixing table 21 is used to hinder the flow of air passing through the through hole 27, thereby generating a vacuum pressure (negative pressure) on the adsorption fixing table 21. After the adsorption force is generated, the magnitude of the vacuum pressure generated when it becomes stable depends on the flow rate of air passing through the adsorption fixing sheet 1 in the in-plane direction. More specifically, the smaller the flow rate of the air, the greater the vacuum pressure. The maximum vacuum pressure generated on the adsorption fixing table 21 due to the generation of the adsorption force, i.e., the vacuum reaching pressure (kPa), is measured using the pressure gauge 23. Based on the measured vacuum reaching pressure (kPa), the formula: vacuum reaching pressure (kPa) × sheet area 100cm 2 , the adsorbed force of the adsorption fixing sheet 1 can be calculated. It should be noted that after the adsorption force is generated, the flow rate of the air flowing in the piping 25 when it becomes a stable state is equivalent to the flow rate of the air passing through the adsorption fixing sheet 1 in the in-plane direction. Therefore, the flow rate measured by the flowmeter 24 can be set as the air permeability in the in-plane direction of the adsorption fixing sheet 1. The air permeability in the in-plane direction of the adsorption fixing sheet 1 changes according to the composition of the porous sheet 2 and the adhesive layer 3. It should be noted that in order to accurately measure the adsorbed force, the vacuum pump 26 preferably uses an oil rotary vacuum pump, a diaphragm dry vacuum pump, a swing piston dry vacuum pump, or a vane pump with excellent reaching pressure and effective exhaust speed. The reaching pressure of the vacuum pump 26 expressed in absolute pressure is, for example, 86Pa, and the effective exhaust speed is, for example, 235L / minute.

[0039] Figure 1 In the adsorption and fixing sheet 1, an adhesive layer 3 is arranged on the entire surface of one surface of the porous sheet 2. More specifically, Figure 1 In the adsorption fixing sheet 1, the adhesive layer 3 having the same shape as the porous sheet 2 is arranged on the one surface of the porous sheet 2 in a manner that the adhesive layer 3 is overlapped as a whole when viewed from a direction perpendicular to the above-mentioned one surface of the porous sheet 2. In the adsorption fixing sheet 1 of the present invention, the adhesive layer 3 may not be arranged on the entire one surface of the porous sheet 2. In order to more reliably obtain the above-mentioned effect, it is preferred that the adhesive layer 3 is arranged on the entire one surface of the porous sheet 2 in the area in contact with the object when the adsorption object is adsorbed by the adsorption device.

[0040] The porous sheet 2 is, for example, a sintered sheet of a woven fabric, a nonwoven fabric, a film (metal film, resin film, etc.) perforated in the thickness direction, or a resin particle, preferably a resin particle. According to the porous sheet 2 as a sintered sheet, the attachment of foreign matter to the adsorption object caused by the shedding of fibers and the deformation and surface damage of the adsorption object caused by the foreign matter can be avoided. In addition, the gaps between the particles of the porous sheet 2 that become the air permeable passage are present in the whole of the sheet 2, so the adsorption object can be adsorbed more uniformly. However, as long as it has air permeability in the thickness direction, the porous sheet 2 is not limited to the above examples.

[0041] The resin constituting the resin particles is preferably ultra-high molecular weight polyethylene (hereinafter referred to as "UHMWPE") from the aspect of excellent wear resistance and impact resistance when forming the porous sheet 2. That is, the porous sheet 2 is preferably a sintered sheet of UHMWPE particles. However, as long as the porous sheet 2 can be formed by sintering, the resin constituting the resin particles is not limited. It should be noted that the weight average molecular weight Mw of UHMWPE is, for example, 500,000 or more, preferably 1,000,000 or more. The weight average molecular weight of UHMWPE can be evaluated by high temperature gel permeation chromatography (high temperature GPC method).

[0042] The sintered sheet of UHMWPE particles can be produced by a known method, such as methods 1 to 3 shown below. Method 1 is a method in which UHMWPE particles are sintered in a state where they are filled into a mold to form a sintered block of UHMWPE, and the formed sintered block is cut into a sheet. The shape of the sintered block can be cylindrical. Method 2 is a method in which UHMWPE particles are sintered in a state where they are filled into a sheet. Method 3 is a method in which a slurry in which UHMWPE particles are dispersed in a dispersion medium is applied to a transfer sheet, typically a metal sheet, with a specified thickness, heated to above the melting point of UHMWPE, and sintered into a sheet. The coated surface of the slurry in the transfer sheet can be subjected to a demolding treatment. In any method, for example, UHMWPE particles having an average particle size of 20 to 500 μm can be used.

[0043] The thickness of the porous sheet 2 is, for example, 0.050 mm to 3.0 mm, 0.1 mm to 2.0 mm, or 0.2 mm to 1.5 mm. When the thickness of the porous sheet 2 is within these ranges, the above-mentioned effects can be obtained more reliably.

[0044] The air permeability in the thickness direction of the porous sheet 2 is expressed by the Frazier number (hereinafter referred to as “Frazier number”) measured according to the air permeability measurement method A (Frazier type method) specified in JIS L1096:2010, and is, for example, 0.5 cm 3 / (cm 2 · seconds)~20cm3 / (cm 2 · seconds). The lower limit of air permeability is expressed as the Fraser number, which can be 1.0 cm 3 / (cm 2 · seconds) or more, 2.0cm 3 / (cm 2 · seconds) or more, more than 2.0cm 3 / (cm 2 · seconds), 2.5cm 3 / (cm 2 · seconds) and further 3.0cm 3 / (cm 2 The upper limit of air permeability is expressed by the Frazier number, for example, 10 cm 3 / (cm 2 · seconds) or less, can be 8.0cm 3 (cm 2 · seconds) or less. From the viewpoint of being able to reduce the time required for adsorption of the adsorbed object (production cycle time), it is preferred that the porous sheet 2 has a high air permeability in the thickness direction. However, the porous sheet 2 with high air permeability usually has a high porosity, and the strength, wear resistance, impact resistance and other properties required as the adsorption fixing sheet 1 are sometimes reduced due to the high porosity. When the air permeability in the thickness direction of the porous sheet 2 is within the above range, especially when the porous sheet 2 is a sintered sheet of resin particles, the balance between the production cycle time and the above-mentioned properties becomes better.

[0045] The porosity of the porous sheet 2 is, for example, 15 to 50%, or 20 to 45%. When the porosity of the porous sheet 2 is within these ranges, especially when the porous sheet 2 is a sintered sheet of resin particles, the balance between the production cycle time and the above characteristics becomes better. The porosity of the porous sheet 2 can be determined by the volume V (cm 3 ), true specific gravity D (g / cm 3 ) and mass M (g) can be calculated by the formula: porosity (%) = {1-M / (V×D)}×100.

[0046] The surface roughness of the porous sheet 2, especially the surface roughness of the surface in contact with the adsorption object during adsorption, is represented by the arithmetic mean roughness Ra specified in JIS B0601: 2001, preferably less than 1.0 μm, more preferably less than 0.5 μm. When the Ra of the porous sheet 2 is within these ranges, unintentional deformation or surface damage of the adsorption object during adsorption caused by contact with the porous sheet 2 can be suppressed. It should be noted that, according to the porous sheet 2 as a sintered sheet of resin particles, the above-mentioned Ra range can be achieved more easily. The surface roughness in the sheet can be controlled, for example, by the particle size of the resin particles.

[0047] The porous sheet 2 may have a single-layer structure or a laminated structure in which two or more layers having different properties and / or structures are laminated.

[0048] The thickness of the adhesive layer 3 may be, for example, 1 to 300 μm, 10 to 200 μm, or 20 to 100 μm.

[0049] The adhesive layer 3 is, for example, (1) a double-sided adhesive sheet having a substrate and provided with a plurality of through holes; or (2) a layer consisting of a plurality of the above cross-linked adhesives arranged at intervals on one surface of the porous sheet 2. The adhesive layer 3 is not limited to the above examples (1) and (2) if it has air permeability only in the thickness direction.

[0050] An example of the adhesive layer 3 as the double-sided adhesive sheet of (1) is shown in FIG. Figure 3 . Figure 3 The double-sided adhesive sheet 11 shown has: a substrate 13, an adhesive layer 14a formed on one surface of the substrate 13, and an adhesive layer 14b formed on the other surface of the substrate 13. The through hole 12 connects one surface 11a and the other surface 11b of the double-sided adhesive sheet 11. In other words, the through hole 12 penetrates the substrate 13 and the adhesive layers 14a and 14b. The through hole 12 functions as a ventilation path in the thickness direction of the double-sided adhesive sheet 11, and due to the through hole 12, the double-sided adhesive sheet 11 has air permeability in the thickness direction. In addition, the double-sided adhesive sheet 11 has a structure in which the substrate 13 surrounds the through hole 12 as the ventilation path in the thickness direction when viewed from a direction perpendicular to the surfaces 11a and 11b of the sheet 11. Therefore, the double-sided adhesive sheet 11 and the adsorption and fixing sheet 1 having the sheet 11 can ensure air permeability in the thickness direction, and can more reliably suppress air permeability in the in-plane direction, thereby improving the adsorption force of the adsorption and fixing sheet 1. It should be noted that the adhesive layer 3 of the double-sided adhesive sheet is not limited to Figure 3 Example shown.

[0051] The substrate 13 may be a film having no air permeation path connecting one surface with the other surface except for the through-holes 12. More specifically, the substrate 13 may be a film in which the through-holes 12 are formed in a non-porous film.

[0052] The material constituting the substrate 13 is, for example, a resin. Examples of the resin are polyolefins such as polyethylene and polypropylene; polyesters such as polyethylene terephthalate (PET); polycarbonate (PC); acrylic resins; and butyl rubber. The resin is preferably PET or PC, and more preferably PET. PET and PC are relatively hard resin materials, and for example, when the area of ​​the adsorption fixing sheet 1 is large, it is not easy for the sheet 1 to sag or wrinkle when it is fixed on the adsorption surface. In addition, PET and PC can maintain sufficient strength even at the assumed high temperature. It should be noted that the material constituting the substrate 13 is not limited to the above examples.

[0053] The substrate 13 may be a film in which the through-holes 12 are formed in a non-porous resin film, or may be a film in which the through-holes 12 are formed in a non-porous PET film.

[0054] The thickness of the substrate 13 is, for example, 0.005 mm to 0.2 mm, or 0.01 mm to 0.1 mm. When the thickness of the substrate 13 is within these ranges, the above-mentioned effects can be obtained more reliably.

[0055] The adhesive (adhesive composition) contained in the adhesive layers 14 a and 14 b is a cross-linked adhesive.

[0056] Cross-linked adhesives include, for example, various adhesives of acrylic, urethane, silicone, and epoxy series. From another perspective, cross-linked adhesives include, for example, cross-linked adhesives and ultraviolet curing adhesives. Cross-linked adhesives are adhesives that contain a cross-linking agent. Adhesives of acrylic, urethane, and silicone series are generally classified as cross-linked adhesives. Among the above examples, acrylic and / or silicone adhesives have particularly low fluidity at high temperatures, so they are preferred. However, cross-linked adhesives are not limited to the above examples. In addition, cross-linked adhesives can use well-known substances. Whether an adhesive is a cross-linked adhesive can be confirmed as follows: when the adhesive is dissolved in a solvent for dissolving the adhesive (for example, toluene at 25°C), an insoluble component (gel component) remains, thereby confirming it. It should be noted that hot-melt adhesives generally do not have residual gel components and are not cross-linked adhesives.

[0057] The acrylic adhesive is an adhesive having an acrylic polymer as a base polymer. A known acrylic adhesive can be used. An example of the acrylic adhesive is an adhesive disclosed in Japanese Patent Application Laid-Open No. 2005-105212.

[0058] The silicone adhesive is an adhesive having a silicone polymer as a base polymer. A known silicone adhesive can be used. An example of the silicone adhesive is an adhesive disclosed in Japanese Patent Application Laid-Open No. 2003-313516 (including those disclosed as comparative examples).

[0059] The adhesive layer 14a formed on one surface of the substrate 13 and the adhesive layer 14b formed on the other surface may have the same configuration or different configurations. In one example of the double-sided adhesive sheet 11, the adhesive layers 14a and 14b are both made of an acrylic adhesive. In another example of the double-sided adhesive sheet 11, one adhesive layer 14a is made of a silicone adhesive, and the other adhesive layer 14b is made of an acrylic adhesive.

[0060] The adsorption surface of the adsorption device is usually made of metal such as stainless steel. Of the adhesive layer composed of an acrylic adhesive and the adhesive layer composed of a silicone adhesive, the adhesive layer composed of a silicone adhesive can reduce the amount of residual glue in the adsorption surface (the residual amount of the adhesive constituting the adhesive layer). The adsorption fixing sheet 1 fixed to the adsorption surface is usually replaced after a specified number of adsorption processes are carried out, or when the surface of the porous sheet 2 in contact with the adsorption object reaches a specified amount of wear. At this time, if there is residual glue on the adsorption surface, the surface of the reconfigured adsorption fixing sheet 1 will be uneven due to the adhesive remaining on the surface of the adsorption surface, which may sometimes cause unintentional deformation or surface damage on the adsorption object adsorbed next and thereafter, or reduce the processing accuracy of the adsorption object. Therefore, it is desired that the amount of residual glue when replacing the adsorption fixing sheet 1 is as small as possible. In addition, when the porous sheet 2 is a non-woven fabric or a sintered sheet of resin particles, the acrylic adhesive is higher than the silicone adhesive in terms of bonding strength relative to the sheet 2. Taking these into consideration, the sheet 1 for adsorption and fixing is formed by forming one adhesive layer 14a with a silicone adhesive and the other adhesive layer 14b with an acrylic adhesive, so that the adhesive layer 14b is in contact with the porous sheet 2, and the sheet 1 can be fixed to the adsorption device in such a manner that the adhesive layer 14a is in contact with the adsorption surface. Thus, the amount of residual adhesive on the adsorption surface when the sheet 1 for adsorption and fixing is replaced can be reduced, and the reduction in the processing accuracy of the adsorption object can be more reliably suppressed.

[0061] The gel fraction of the cross-linked adhesive is, for example, 1 to 90%, 2 to 80%, or 5 to 60%. When the gel fraction is within these ranges, the fluidity of the cross-linked adhesive at high temperature can be further reduced. The gel fraction of the adhesive can be evaluated, for example, as follows.

[0062] [Gel fraction of acrylic adhesive]

[0063] Collect about 0.1g of the adhesive layer as the evaluation object. After the collected adhesive layer is coated with a polytetrafluoroethylene (PTFE) porous membrane with an average pore size of 0.2μm (for example, NTF1122 manufactured by Nitto Denko), it is tied with a kite line to be used as an evaluation sample, and the weight (weight before immersion c) is measured. The weight before immersion is equivalent to the total weight of the collected adhesive, PTFE porous membrane and kite line. In addition, the total weight of the PTFE porous membrane and kite line used in the evaluation sample is measured in advance and is used as the bag weight b.

[0064] Next, the evaluation sample was placed in a 50 mL container filled with ethyl acetate and left to stand at 23° C. for 7 days. Thereafter, the evaluation sample was taken out of the container and transferred to an aluminum cup, and dried in a dryer set at 130° C. for 2 hours to remove the ethyl acetate. Next, the weight of the evaluation sample was measured, and the weight was taken as the post-immersion weight a.

[0065] The gel fraction can be calculated based on the following formula from the measured weight after immersion a, bag weight b and weight before immersion c.

[0066] Formula: Gel fraction (weight %) = (ab) / (cb)×100

[0067] [Gel fraction of silicone adhesive]

[0068] Prepare an evaluation sample of about 19 mm x about 250 mm, in which a layer of a silicone adhesive as an evaluation object is formed on the surface of a substrate sheet. The substrate sheet is selected to be a sheet made of a material that does not swell due to toluene. The substrate sheet is, for example, a PTFE sheet. Next, measure the weight of the evaluation sample (weight before immersion C).

[0069] Next, the evaluation sample was immersed in about 300 mL of toluene at room temperature for 48 hours. After that, the evaluation sample was taken out from the toluene, air-dried for 30 minutes, and then dried in a dryer set at 120° C. for 2 hours to remove the toluene. Next, the evaluation sample was returned to room temperature, left for 30 minutes, and the post-immersion weight A was measured. Next, the adhesive layer was removed from the substrate sheet, and the weight B of the substrate sheet was measured.

[0070] The gel fraction can be calculated from the measured weight A after immersion, the weight B of the base sheet, and the weight C before immersion based on the following formula.

[0071] Formula: Gel fraction (weight %) = (AB) / (CB)×100

[0072] The thickness of the adhesive layers 14 a and 14 b is, for example, 0.005 mm to 0.3 mm, or 0.01 mm to 0.2 mm.

[0073] Figure 3In the example shown, the direction in which the through hole 12 extends is perpendicular to the surface of the double-sided adhesive sheet 11. In addition, in this example, the through hole 12 extends in a straight line. Furthermore, in this example, the shape of the cross section of the through hole 12 (the cross section perpendicular to the direction of extension) is constant from one side to the other side of the double-sided adhesive sheet 11. Among them, as long as the double-sided adhesive sheet 11 has air permeability in the thickness direction, the direction of extension, the state of extension, and the shape of the cross section of the through hole 12 are not limited. It should be noted that the through hole 12 with a constant cross-sectional shape includes: a through hole with a variation in the cross-sectional shape that is unavoidable in the method of forming the through hole 12.

[0074] The shape of the opening of the through hole 12 is, for example, a circle, an ellipse, or a rectangle, preferably a circle or an ellipse, and more preferably a circle. However, the shape of the opening of the through hole 12 is not limited to the above examples.

[0075] The opening area of ​​each through hole 12 is, for example, 10 mm 2 Below, can be 7mm 2 Below, further 5mm 2 The lower limit of the opening area of ​​each through hole 12 is, for example, 0.1 mm 2 Above, can be 0.3mm 2 Above, further 0.5mm 2 above.

[0076] The opening ratio of the through holes 12 in the double-sided adhesive sheet 11 (the ratio of the total opening area of ​​the through holes 12 in the surface to the surface area of ​​the double-sided adhesive sheet 11) is, for example, 60.0% or less, and can be 55.0% or less, 50.0% or less, or further 45.0% or less. The lower limit of the opening ratio of the through holes 12 is, for example, 10.0% or more, and can be 15.0% or more, 20.0% or more, 25.0% or more, or further 30.0% or more. When the opening ratio of the through holes 12 is within these ranges, air permeability in the thickness direction of the sheet 1 for adsorption and fixing can be ensured, and air permeability in the in-plane direction of the sheet 1 can be more reliably suppressed. Preferably, at least in the area in contact with the adsorption object during adsorption, the opening ratio of the through holes 12 in the double-sided adhesive sheet 11 is within these ranges.

[0077] An example of the arrangement of the through holes 12 in the double-sided adhesive sheet 11 is shown in FIG. Figure 4 , 5 . Figure 4 , 5 The opening of the through hole 12 on the surface of the double-sided adhesive sheet 11 is shown in FIG. However, the configuration of the through hole 12 in the double-sided adhesive sheet 11 is not limited to Figure 4 , 5 Example shown.

[0078] Figure 4 In the example shown, the through holes 12 are arranged so that the center of the opening of each through hole 12 is located at an intersection (lattice point) of an imaginary square lattice 33 on the surface when viewed from a direction perpendicular to the surface of the double-sided adhesive sheet 11 . Figure 5 In the example shown, the through holes 12 are arranged in such a way that the centers of the openings of the through holes 12 are located at the intersections of the imaginary equilateral triangle lattices 34 on the surface when viewed from a direction perpendicular to the surface of the double-sided adhesive sheet 11. The double-sided adhesive sheet 11 may have the arrangement of these through holes at least in the region that contacts the adsorption object when the adsorption object is adsorbed. According to the arrangement of the through holes 12 shown in these examples, it is possible to obtain an adsorption fixing sheet 1 in which air permeability in the thickness direction is more uniform throughout the entire sheet, at least in the entirety of the above-mentioned region. If the air permeability in the thickness direction of the adsorption fixing sheet 1 is more uniform, the adsorption object can be adsorbed further without unevenness, and the reduction in the processing accuracy of the adsorption object can be more reliably suppressed. It should be noted that Figure 4 , 5 In the example shown, the openings and cross-sections of the through holes 12 are all the same, more specifically, circular. However, the openings and / or cross-sections of the through holes 12 may not all be the same. In addition, when the through holes 12 are arranged so that the centers of the openings of the through holes 12 are located at the intersections of an imaginary grid on the surface, the grid is not limited to a square grid or an equilateral triangle grid, but may be a rectangular grid, a diamond grid, or other grids. It should be noted that Figure 4 , 5 In the example shown, the center of each through hole 12 does not need to be strictly located at each intersection of the square lattice 33 or the equilateral triangle lattice 34 , and, for example, deviation of the center position that is inevitable in the process of providing the through hole 12 is allowed.

[0079] Figure 4 , 5 In the example shown, the distance (pitch) P1 between the centers of the most adjacent through holes 12 is, for example, 0.5 mm to 10.0 mm, or may be 1.0 mm to 5.0 mm.

[0080] The adsorption fixing sheet 1 having the double-sided adhesive sheet of (1) as the adhesive layer 3 can be formed by, for example, placing the double-sided adhesive sheet 11 on one surface of the porous sheet 2 via the adhesive layer 14a or 14b. In the case where the adhesive layer 14a and the adhesive layer 14b have different structures, the double-sided adhesive sheet 11 can be attached to the porous sheet 2 via the adhesive layer with greater adhesive strength. In this case, the adsorption fixing sheet 1 is fixed to the adsorption surface of the adsorption device via the adhesive layer with less adhesive strength, so that the replacement of the adsorption fixing sheet 1 becomes easier. However, the method for forming the adsorption fixing sheet 1 is not limited to the above example.

[0081] The double-sided adhesive sheet 11 can be formed, for example, by providing a plurality of through holes 12 in a laminate of an adhesive layer 14a, a substrate 13, and an adhesive layer 14b. However, the method for forming the double-sided adhesive sheet 11 is not limited to this example. Various perforation processing methods such as punching, blanking with a Thomson knife, and laser irradiation can be applied to the processing of providing a plurality of through holes 12. The laminate of the adhesive layers 14a, 14b and the substrate 13 can be formed, for example, by applying an adhesive composition on the surface of the substrate 13, and drying and / or curing the coating film formed by the coating, thereby forming.

[0082] An example of an adsorption and fixing sheet having the above-mentioned layer (2) as the adhesive layer 3 is shown in Fig. 6A and Figure 6B . Figure 6B It is shown in Fig. 6A The cross section BB of the adsorption and fixing sheet 1 is shown. Fig. 6A and Figure 6B The adsorption and fixing sheet 1 comprises: a porous sheet 2 having air permeability in the thickness direction; and a layer 5, which is an adhesive layer 3 having air permeability in the thickness direction. The layer 5 is composed of a plurality of adhesives 6. The plurality of adhesives 6 are arranged on one surface of the porous sheet 2 at intervals. The adhesive 6 is a cross-linked adhesive. The layer 5 is arranged on one surface of the porous sheet 2. The layer 5 is a double-sided adhesive layer without a substrate. The space 7 between adjacent adhesives 6 functions as an air permeability path in the thickness direction of the layer 5, and due to the space 7, the layer 5 has air permeability in the thickness direction.

[0083] Fig. 6A and Figure 6B In the example shown, a plurality of adhesives 6 are arranged at intervals on one surface of the porous sheet 2 to form a layer 5. More specifically, when viewed from a direction perpendicular to one surface of the porous sheet 2, the plurality of adhesives 6 are arranged in stripes on the one surface.

[0084] Another example of the suction fixing sheet having the above-mentioned layer (2) as the adhesive layer 3 is shown in Fig. 7A and Figure 7B . Figure 7B It is shown in Fig. 7A The cross section BB of the adsorption fixing sheet 1. Fig. 7A and Figure 7B The shape and arrangement pattern of the plurality of adhesives 6 in the layer 5 are different from those of the adsorption fixing sheet 1. Fig. 6A and Figure 6B The adsorption fixing sheet 1 is similar. Fig. 7A and Figure 7BIn the example shown, when viewed from a direction perpendicular to one face of the porous sheet 2, a plurality of adhesives 6 having a circular shape are arranged in a dotted manner on the one face. In addition, the adhesive 6 is arranged in a manner that the center of each adhesive 6 is located at the intersection of an imaginary equilateral triangle lattice on the above-mentioned main face. It should be noted that the shape of the plurality of adhesives 6 arranged in a dotted manner as viewed from the above-mentioned vertical direction is not limited to a circle, for example, it can be a polygon or an ellipse including a square and a rectangle. In addition, when the adhesive 6 is arranged in a manner that the center of each adhesive 6 is located at each intersection of an imaginary lattice on the above-mentioned main face, the lattice is not limited to an equilateral triangle lattice, and can also be various lattices such as a square lattice, a rectangular lattice, and a diamond lattice.

[0085] As long as the layer 5 has spaces 7 that allow air to pass through in the thickness direction of the layer 5, the arrangement (arrangement pattern) of the plurality of adhesives 6 in the layer 5 is not limited to Fig. 6A , Figure 6B , Fig. 7A and Figure 7B Example shown.

[0086] The plurality of binders 6 are preferably arranged on the one surface of the porous sheet 2 at least in a region that contacts the adsorbed object during adsorption, and more preferably arranged on the one surface of the porous sheet 2 in the entire region.

[0087] As the adhesive 6 , the cross-linked adhesive described above in the description of the double-sided adhesive sheet 11 can be used.

[0088] The thickness of each adhesive 6 is, for example, 1 to 300 μm. The upper limit of the thickness may be 500 μm or less, 100 μm or less, 50 μm or less, or further 10 μm or less. When the thickness of the adhesive 6 is within these ranges, the above-mentioned effects can be obtained more reliably.

[0089] The area of ​​each adhesive 6 observed perpendicularly to one surface of the porous sheet 2 is, for example, 0.05 mm 2 Above, can be 0.1mm 2 Above, 0.5mm 2 Among them, Fig. 6A and Figure 6B As shown, the area of ​​each adhesive 6 arranged in stripes is the width×length of each adhesive 6, which can be larger than the above range. For example, each adhesive 6 arranged in dots can also have an area within the above range.

[0090] like Fig. 6A and Figure 6B As shown, the width of each adhesive 6 arranged in a stripe shape is, for example, 0.1 to 5 mm, or 0.5 to 2 mm.

[0091] The occupancy rate of the adhesive 6 in the above-mentioned one surface of the porous sheet 2 (the ratio of the total area of ​​the adhesive 6 arranged on the above-mentioned one surface relative to the area of ​​the above-mentioned one surface observed from the direction perpendicular to the above-mentioned one surface of the porous sheet 2) is, for example, 30% or more, and can be 40% or more, 45% or more, 50% or more, 55% or more, 60% or more, and further 65% or more. When the occupancy rate is within these ranges, the layer 5 and the adsorption fixing sheet 1 having the layer 5 can ensure air permeability in the thickness direction and can more reliably suppress air permeability in the in-plane direction, thereby improving the adsorption force of the adsorption fixing sheet 1. The occupancy rate is preferably within these ranges in the area in contact with the object at least when the adsorption object is adsorbed.

[0092] A plurality of adhesives 6 may be arranged at a constant interval on one surface of the porous sheet 2 when viewed from a direction perpendicular to the surface. In this case, the interval between the adhesives 6 is, for example, 0.5 to 10 mm, or 1 to 5 mm. Fig. 6A , Figure 6B , Fig. 7A and Figure 7B In the example shown, the adhesive 6 is arranged such that the spacing between the adhesives 6 is generally the distance between the centers of the most adjacent adhesives 6. Fig. 6A and Figure 6B As shown, in the case of the adhesive 6 arranged in stripes, the interval between the arrangements is the distance (pitch) P2 between the center lines of adjacent adhesives 6. In addition, at least in the area in contact with the object when the adsorption object is adsorbed by the adsorption device, a plurality of adhesives 6 can be arranged on the one surface at a constant interval.

[0093] When viewed from a direction perpendicular to one surface of the porous sheet 2 , the shapes and / or areas of the plurality of adhesives 6 may be the same. Fig. 6A , Figure 6B , Fig. 7A and Figure 7B In the example shown, the shapes and areas of the plurality of adhesives 6 are the same. In addition, at least in the region in contact with the object when the adsorption device adsorbs the object, when viewed from a direction perpendicular to one surface of the porous sheet 2, the shapes and / or areas of the plurality of adhesives 6 may be the same.

[0094] When viewed from a direction perpendicular to one surface of the porous sheet 2, each adhesive 6 may have a shape that surrounds the space 7. In addition, when viewed from a direction perpendicular to one surface of the porous sheet 2, a plurality of adhesives 6 may be arranged on the above-mentioned one surface in such a manner that at least one, preferably two or more adhesives 6 are located between the center and the periphery in all directions from the center to the periphery of the adsorption and fixing sheet 1. In these cases, the layer 5 and the adsorption and fixing sheet 1 having the layer 5 can ensure air permeability in the thickness direction and can more reliably suppress air permeability in the in-plane direction, thereby improving the adsorption force of the adsorption and fixing sheet 1.

[0095] The adsorption fixing sheet 1 having the layer (2) as the adhesive layer 3 can be formed, for example, by configuring an adhesive 6 in a predetermined pattern on one side of a porous sheet 2. After configuring the adhesive 6 in a predetermined pattern on the surface of the transfer sheet, the configured adhesive 6 is transferred to one side of the porous sheet 2, thereby forming the adsorption fixing sheet 1. The configuration of the adhesive 6 having a predetermined configuration pattern can use, for example, a known coating device that can configure the adhesive 6 based on the pattern, such as a slot die with a pad, a dispenser (liquid quantitative discharge device), and various printers. It should be noted that, using a slot die with a comb-shaped pad, the adhesive 6 can also be configured in a stripe shape on one side of the porous sheet 2. In addition, using a dispenser, a gravure printer, or a rotary screen printer, the adhesive 6 can also be configured in a dot shape on one side of the porous sheet 2. Among them, the method for forming the adsorption fixing sheet 1 is not limited to the above example.

[0096] The thickness of the suction and fixation sheet 1 is, for example, 0.065 mm to 6 mm, or 0.1 mm to 3.5 mm, or 0.25 mm to 1.0 mm.

[0097] The air permeability of the adsorption and fixing sheet 1 in the thickness direction is expressed by the Frazier number, for example, 0.1 cm 3 / (cm 2 · seconds) or more, can be 0.3cm 3 / (cm 2 · seconds) or more, 0.5cm 3 / (cm 2 · seconds) or more, 0.7cm 3 / (cm 2 · seconds) or more, 0.9cm 3 / (cm 2 · seconds) or more, 1.2cm 3 / (cm 2 · seconds) or more, and further 1.5cm 3 / (cm 2 The upper limit of the air permeability is expressed by the Frazier number, for example, 10.0 cm 3 / (cm 2· seconds) or less.

[0098] The surface resistivity of the surface of the porous sheet 2 side of the adsorption and fixing sheet 1 is, for example, 1.0×10 12 Ω / □ or less. The surface resistivity can be 1×10 11 Ω / □ or less, 1×10 10 Ω / □ or less, and further 1×10 9 Ω / □ or less. The lower limit of the surface resistivity is not limited, for example, 1×10 7 Ω / □ or more. When the surface resistivity is within these ranges, the generation of static electricity during adsorption of the adsorption object can be suppressed, thereby preventing damage such as pinholes from being generated in the adsorption object. The surface resistivity can be evaluated using a resistivity meter that can measure the surface resistivity of a high-resistance material (for example, Hiresta manufactured by Mitsubishi Chemical Analytech Co., Ltd.).

[0099] The adsorption and fixing sheet 1 having a surface resistivity on the side of the porous sheet 2 within the above range can be formed, for example, by subjecting the porous sheet 2 to an antistatic treatment. As an antistatic treatment, for example, a method of coating the porous sheet 2 with an antistatic agent can be adopted. The coating of the antistatic agent can be implemented, for example, by coating a treatment liquid containing the antistatic agent on the porous sheet 2 and then drying the coated treatment liquid. The medium of the treatment liquid is a medium that does not deteriorate the porous sheet 2 and volatilizes at a drying temperature lower than the melting point of the material constituting the porous sheet 2, such as alcohols such as ethanol, water, and organic solvents. The treatment liquid may also contain any material other than the antistatic agent, such as additives such as ultraviolet absorbers and release agents. The treatment liquid can be applied by a known method, such as casting, dipping, roll coating, gravure coating, screen printing, reverse coating, spraying, kiss coating, die coating, metal bar coating, coating using a chamber doctor in combination, curtain coating, or rod coating. The drying temperature is, for example, 50 to 130° C., preferably 60 to 110° C.

[0100] The antistatic agent is, for example, various surfactants such as cationic surfactants, anionic surfactants, amphoteric surfactants, and nonionic surfactants, preferably cationic surfactants, anionic surfactants, and nonionic surfactants. As the antistatic agent, two or more kinds may be used in combination, preferably not in combination with cationic surfactants and anionic surfactants. Wherein, the antistatic agent is not limited to surfactants.

[0101] Cationic surfactants that can be used as antistatic agents include, for example, alkylammonium acetates, alkyldimethylbenzylammonium salts, alkyltrimethylammonium salts, dialkyldimethylammonium salts, alkylpyridinium salts, oxyalkylenealkylamines, and polyoxyalkylenealkylamines.

[0102] Anionic surfactants that can be used as antistatic agents include, for example, sodium stearate soap and other fatty acid sodium soaps; alkyl sulfates such as sodium lauryl sulfate; α-sulfo fatty acid ester salts; alkyl ether sulfates; sodium alkylbenzene sulfonates; sodium alkylnaphthalene sulfonates; dialkyl sulfosuccinates; alkyl phosphates; and alkyl diphenyl ether disulfonates.

[0103] Zwitterionic surfactants that can be used as antistatic agents include, for example, alkylcarboxybetaines.

[0104] Examples of nonionic surfactants that can be used as the antistatic agent include polyoxyethylene alkyl ethers, sorbitan fatty acid esters, polyoxyethylene sorbitan fatty acid esters, glycerol fatty acid esters, and polyoxyethylene alkylamines.

[0105] As the antistatic agent, a commercially available product can be used. Examples of commercially available antistatic agents include:

[0106] ADEKA (registered trademark) Pluronic L·P·F series, ADEKA (registered trademark) Pluronic TR series and other polyoxyethylene-polyoxypropylene block copolymer type nonionic surfactants;

[0107] ADEKA TOL LB series, ADEKA TOL LA series, ADEKA TOL TN series and other alkyl ether type nonionic surfactants;

[0108] Ester-type nonionic surfactants such as ADEKA NOL NK (glyceride ethylene oxide adduct);

[0109] Special phenolic nonionic surfactants such as ADEKA TOL PC;

[0110] Sulfate-type anionic surfactants such as ADEKA HOPE series;

[0111] Phosphate-type or succinate-type anionic surfactants such as the ADEKA COL series;

[0112] ADEKA MINE series and other 4-grade cationic surfactants (all manufactured by ADEKA);

[0113] ELECNON series of cationic surfactants (manufactured by Dainichi Seika Industries);

[0114] Amphoteric surfactants such as ELEC AC (manufactured by Kao); and

[0115] EMULGEN series, RHEODOL series, EXCEL series, AMIET series and other nonionic surfactants (manufactured by Kao).

[0116] The shape of the suction fixing sheet 1 is, for example, a polygonal shape including a square and a rectangle, or a strip shape. However, the shape of the suction fixing sheet 1 is not limited to the above examples. With the suction fixing sheet 1, even when the area of ​​the sheet 1 is large, the reduction in the processing accuracy of the suction object can be suppressed.

[0117] The area of ​​the adsorption fixing sheet 1 can be, for example, 50 cm 2 Over 100cm 2 Above, 225cm 2 Above, 400cm 2 Above, 1000cm 2 Above, further 10000cm 2 above.

[0118] The adsorption fixing sheet 1 may have components other than the porous sheet 2 and the adhesive layer 3 as long as the effect of the present invention can be obtained. The component is, for example, a separator arranged on the adhesive layer 3 as the exposed surface. The separator is arranged on the sheet 1 when the adsorption fixing sheet 1 is circulated, and is peeled off from the laminate of the porous sheet 2 and the adhesive layer 3 when the sheet 1 is used (when fixed to the adsorption surface of the adsorption device). The adsorption fixing sheet 1 can be formed by the porous sheet 2 and the adhesive layer 3 at least in the area in contact with the adsorption object when the adsorption object is adsorbed.

[0119] The adsorption object may be, for example, a self-supporting sheet such as a metal sheet or a glass sheet, or a thin sheet-like body that is not self-supporting such as a metal foil, a plastic film, or a ceramic green sheet. The adsorption object is not limited to the above examples. The processing accuracy of a sheet-like body that is not self-supporting is more likely to be reduced, but by using the adsorption fixing sheet 1, when such a sheet-like body is adsorbed, the reduction in the processing accuracy of the sheet-like body can be suppressed.

[0120] [Adsorption of an adsorption object using an adsorption fixing sheet]

[0121] Figure 8 2 shows the adsorption process of the adsorption object using the adsorption device having the adsorption fixing sheet 1 fixed on the adsorption surface. As shown in (a), the adsorption fixing sheet 1 is fixed to the adsorption surface 52 of the adsorption unit 51 of the adsorption device by the adhesive layer 3. Then, as shown in (b), the adsorption unit 51 generates suction force, and the adsorption object 61 is adsorbed by the adsorption fixing sheet 1.

[0122] Well-known devices and units can be used as the adsorption device and the adsorption unit 51. The adsorption surface 52 of the adsorption unit 51 is usually a metal surface.

[0123] In a state where the adsorption object is fixed on the adsorption surface, any processing can be performed on the adsorption object. The processing is, for example, pressurization processing. In the pressurization processing, an adsorption pressurization process can be performed in which the adsorption object is pressurized in a state where it is fixed on the adsorption surface.

[0124] Example

[0125] Hereinafter, the present invention will be described in more detail by way of examples. However, the present invention is not limited to the following examples.

[0126] First, a method for evaluating the adsorption and fixation sheet produced in this example will be described.

[0127] [Vacuum ultimate pressure, air permeability in the plane direction, adsorption capacity]

[0128] The vacuum reaching pressure, adsorption force, and air permeability in the in-plane direction of the prepared adsorption fixing sheet are evaluated by the above-mentioned method. Among them, the size of the adsorption fixing sheet as the evaluation object is set to 100mm×100mm, and the measuring sheet stacked on the adsorption fixing sheet is set to a PET sheet (thickness 25μm, size 100mm×100mm). For the measurement, the adsorption fixing sheet is more reliably fixed to the adsorption fixing table, so that for the purpose of improving the measurement accuracy, the roller is moved back and forth once, and then implemented after 10 minutes. The vacuum pump uses a vane pump (KRF40 made by ORION Machinery Co., LTD., reaching pressure (absolute pressure) 86Pa, effective exhaust speed 575L / min). The temperature of the measurement environment is set to 25±10℃, and the relative humidity is set to 50%±20%.

[0129] [Air permeability in thickness direction]

[0130] The air permeability (Frazier number) in the thickness direction of the prepared suction and fixation sheet was measured in accordance with the air permeability measurement method A (Frazier type method) specified in JIS L1096:2010.

[0131] [Surface resistivity]

[0132] The surface resistivity of the exposed surface of the porous sheet side in the produced adsorption and fixation sheet was evaluated as follows: a high resistivity meter (Hiresta MCP-HT450 manufactured by Mitsubishi Chemical Analytech Co., Ltd.) equipped with a URS probe having a double ring electrode was used to apply a voltage of 500 V and measure the surface resistivity at the time when 30 seconds had passed. It should be noted that the evaluation of the surface resistivity was carried out in an atmosphere of 25° C. and a relative humidity of 60% in accordance with the provisions of JIS K6911:2006.

[0133] (Example 1)

[0134] As the porous sheet 2, a sintered sheet of UHMWPE particles (SUNMAP, manufactured by Nitto Denko Corporation, thickness 0.30 mm, size 100 mm×100 mm) was prepared. Antistatic treatment was applied to both sides of the prepared sintered sheet. The air permeability of the prepared porous sheet in the thickness direction was expressed as the Frazier number, which was 6.0 cm 3 / (cm 2 · seconds). Next, an acrylic adhesive is applied in stripes to the entire surface of one surface of the prepared porous sheet 2, thereby forming an adhesive layer 3 (thickness 7 μm) as a double-sided adhesive layer without a substrate, and obtaining an adsorption fixing sheet of Example 1. The obtained adsorption fixing sheet has an adhesive layer 3, and the adhesive layer 3 is formed by configuring an adhesive 6 in a stripe shape relative to the above-mentioned one surface of the porous sheet 2 when viewed from a direction perpendicular to the above-mentioned one surface. A slot mold with a comb-shaped pad is used in the coating of the acrylic adhesive. The width of each acrylic adhesive constituting the stripe is set to 1.0 mm, the thickness is set to 7 μm, and the distance between the center lines of adjacent acrylic adhesives, i.e., the spacing P2, is set to 2.3 mm. The ratio (occupancy rate) of the area of ​​the adhesive relative to the area of ​​the one surface of the porous sheet is 43.5%. In addition, the gel fraction of the double-sided adhesive layer evaluated by the above method is 30%. The thickness of the prepared porous sheet and the adhesive layer is evaluated by using a micrometer (made by Mitutoyo Corporation) or analyzing the observation image of the cross section obtained by a microscope. The acrylic adhesive to be used was prepared as follows.

[0135] Initially, 95 parts by weight of 2-ethylhexyl acrylate, 5 parts by weight of acrylic acid, 0.2 parts by weight of benzoyl peroxide (BPO) as an organic peroxide crosslinking agent, and 100 parts by weight of ethyl acetate were mixed and replaced with nitrogen for 2 hours. Then, polymerization was carried out at 60° C. for 6 hours under a nitrogen replacement environment to obtain an acrylic polymer with a weight average molecular weight of 800,000. Next, 0.14 parts by weight and 0.007 parts by weight of a trifunctional isocyanate compound (trade name: CORONATE L, manufactured by Tosoh) and a multifunctional epoxy resin (trade name: TETRAD-C, manufactured by Mitsubishi Gas Chemical) were respectively mixed with 100 parts by weight of the solid content of the obtained acrylic polymer to prepare the above-mentioned acrylic adhesive.

[0136] (Example 2)

[0137] The entire surface of the prepared porous sheet 2 is coated with an acrylic adhesive in dots to form an adhesive layer 3 as a double-sided adhesive layer without a substrate. The same operation as in Example 1 is performed to obtain an adsorption fixing sheet of Example 2. The obtained adsorption fixing sheet has an adhesive layer 3 (thickness 7 μm), and the adhesive layer 3 is formed by configuring an adhesive 6 in dots relative to the one surface when viewed from a direction perpendicular to the above-mentioned one surface of the porous sheet 2. A gravure printing machine (gravure roller) is used for the coating of the acrylic adhesive. The shape and size of each acrylic adhesive constituting the dot are circular with a diameter of 0.92 mm and a thickness of 7 μm when viewed from a direction perpendicular to the above-mentioned one surface, and the distance between the centers of the closest acrylic adhesives, i.e., the spacing P1, is set to 1.06 mm. The ratio (occupancy rate) of the area of ​​the adhesive in the area of ​​the one surface of the porous sheet is 68.1%.

[0138] (Example 3)

[0139] As a porous sheet, a sintered sheet of UHMWPE particles used in Example 1 was prepared. Different from this, a sheet (manufactured by Nitto Denko Corporation, No. 5603, thickness 30 μm, size 100 mm×100 mm) in which acrylic adhesive layers (both thickness 9 μm) were formed on both sides of a PET substrate (thickness 12 μm) was prepared as a double-sided adhesive sheet. The gel fraction of the acrylic adhesive layer evaluated by the above method was 9%. Next, the prepared double-sided adhesive sheet was subjected to a press processing using a mold to form a plurality of through holes penetrating the sheet in a direction perpendicular to the surface. The cross-section and opening shape of the through hole are set to be circular. In other words, the shape of the through hole formed is cylindrical. The through hole is as Figure 5As shown, the whole sheet is formed by observing the intersection of the regular triangle lattice from the direction perpendicular to the surface of the sheet. The diameter (opening diameter) of each through hole formed is set to 2.0 mm, and the center-to-center distance (pitch) P1 of the closest through hole is set to 3.0 mm. The opening rate of the double-sided adhesive sheet is 40.3%. The thickness of the substrate and the adhesive layer of the prepared double-sided adhesive sheet, as well as the thickness of the double-sided adhesive sheet, are evaluated by analyzing the observation image of the cross section obtained by the microscope.

[0140] Next, the prepared porous sheet and the double-sided adhesive sheet were joined so that the adhesive layer of the double-sided adhesive sheet was in contact with the porous sheet and the outer edges of the two sheets were aligned, thereby obtaining an adsorption and fixation sheet of Example 3.

[0141] (Comparative Example 1)

[0142] The pad was changed so that the width of each acrylic adhesive constituting the stripes was 1.1 mm, the thickness was 21 μm, and the pitch P2 was 2.7 mm. In addition, an adsorption fixing sheet having a double-sided adhesive layer without a substrate as an adhesive layer was obtained in the same manner as in Example 1. The double-sided adhesive layer without a substrate was formed by arranging the adhesive in stripes relative to one surface of the porous sheet when viewed from a direction perpendicular to the one surface. The ratio (occupancy rate) of the area of ​​the adhesive relative to the area of ​​the one surface of the porous sheet was 41.5%.

[0143] (Comparative Example 2)

[0144] The pad was changed so that the width of each acrylic adhesive constituting the stripes was 1.9 mm, the thickness was 31 μm, and the pitch P2 was 3.1 mm. In addition, a sheet for adsorption and fixing having a double-sided adhesive layer without a substrate as an adhesive layer was obtained in the same manner as in Example 1. The double-sided adhesive layer without a substrate was formed by arranging the adhesive in a stripe shape relative to one surface of the porous sheet when viewed from a direction perpendicular to the one surface. The ratio (occupancy rate) of the area of ​​the adhesive relative to the area of ​​the one surface of the porous sheet was 61.5%.

[0145] The evaluation results of the above-mentioned characteristics of the adsorption fixing sheet of Examples 1 to 3 and Comparative Examples 1 and 2 are shown in the following Table 1. It should be noted that in Table 1, the above-mentioned characteristics of the porous sheet monomer used in each Example and Comparative Example, and the ratio of the adsorption force (adsorption force rate) of each Example and Comparative Example when the adsorption force of the porous sheet monomer is set to "1" are shown together. It should be noted that the measurement of the vacuum reaching pressure, the air permeability in the in-plane direction and the adsorption force relative to the porous sheet monomer was carried out by the above-mentioned method without fixing the sheet with the aid of an adhesive layer, and only placing the sheet on the adsorption fixing table 21.

[0146] [Table 1]

[0147]

[0148] Industrial Applicability

[0149] The suction and fixation sheet of the present invention can be used for the same purposes as conventional suction and fixation sheets.

Claims

1. A suction fixing sheet, which is arranged on a suction surface of a suction device to prevent a suction target from contacting the suction surface, The adsorption and fixing sheet comprises: a porous sheet having air permeability in the thickness direction; and a single-layer adhesive layer, which is disposed on one surface of the porous sheet, has air permeability in the thickness direction, and fixes the adsorption-fixing sheet to the adsorption surface by contacting the adsorption surface, The adhesive layer comprises a cross-linked adhesive, The sheet area is set to 100 cm 2 The adsorption force is more than 450N. The air permeability of the adsorption and fixing sheet in the thickness direction is expressed by the Frazier number, which is 1.5 cm 3 / (cm 2 · seconds) or more, the Frazier number is measured according to the air permeability measurement method A specified in JIS L1096:2010, i.e., the Frazier type method, in, The adsorption force is the following value: when the adsorption fixing sheet is fixed to a predetermined adsorption fixing table by means of the adhesive layer and a non-air-permeable measuring sheet is stacked on the surface of the adsorption fixing sheet on the porous sheet side, the adsorption fixing table generates an adsorption force, and the vacuum reaching pressure generated on the adsorption fixing table is calculated by the formula: vacuum reaching pressure × sheet area 100 cm 2 The unit of the vacuum pressure is kPa. In the region in contact with the object when the adsorption device is used to adsorb the object, when viewed from a direction perpendicular to the one surface of the porous sheet, the total ratio of the area of ​​the adhesive to the area of ​​the one surface is 40% or more, The thickness of the adhesive is greater than 1 μm and less than 10 μm.

2. A suction fixing sheet, which is arranged on the suction surface of a suction device to prevent the suction object from contacting the suction surface, The adsorption and fixing sheet comprises: a porous sheet having air permeability in the thickness direction; and an adhesive layer disposed on one surface of the porous sheet, having air permeability in the thickness direction and fixing the adsorption fixing sheet to the adsorption surface by contacting the adsorption surface, The adhesive layer is a double-sided adhesive sheet including a cross-linked adhesive, a plurality of through holes and a substrate. The sheet area is set to 100 cm 2 The adsorption force is more than 450N. The air permeability of the adsorption fixing sheet in the thickness direction is expressed by the Frazier number, which is 1.5 cm 3 / (cm 2 seconds) or more, The air permeability of the porous sheet in the thickness direction is expressed by the Frazier number, which is 3.0 cm 3 / (cm 2 seconds) or more, The Frazier number is measured according to the air permeability measurement method A specified in JIS L1096:2010, i.e., the Frazier type method. in, The adsorption force is the following value: when the adsorption fixing sheet is fixed to a predetermined adsorption fixing table by means of the adhesive layer and a non-air-permeable measuring sheet is stacked on the surface of the adsorption fixing sheet on the porous sheet side, the adsorption fixing table generates an adsorption force, and the vacuum reaching pressure generated on the adsorption fixing table is calculated by the formula: vacuum reaching pressure × sheet area 100 cm 2 The unit of the vacuum pressure is kPa. In the region in contact with the object when the adsorption device is used to adsorb the object, when viewed from a direction perpendicular to the one surface of the porous sheet, the total ratio of the area of ​​the adhesive to the area of ​​the one surface is 40% or more, The thickness of the adhesive is greater than 1 μm and less than 10 μm.

3. The adsorption and fixing sheet according to claim 2, wherein: In a region that comes into contact with the adsorption object when the adsorption object is adsorbed by the adsorption device, an opening ratio of the through holes in the double-sided pressure-sensitive adhesive sheet is 60% or less.

4. The adsorption and fixing sheet according to claim 1, wherein: The adhesive layer is a layer composed of a plurality of the adhesives disposed at intervals on one surface of the porous sheet.

5. The adsorption and fixing sheet according to claim 4, wherein: In a region in contact with the adsorption object when the adsorption device adsorbs the object, the plurality of adhesives have the same shape and area when viewed from a direction perpendicular to the one surface of the porous sheet.

6. The adsorption and fixing sheet according to claim 4, wherein: The plurality of adhesives are arranged at constant intervals in a region that comes into contact with the object when the object is adsorbed by the adsorption device.

7. The adsorption and fixation sheet according to claim 1 or 2, wherein: The thickness of the adhesive layer is 1 to 300 μm.

8. The adsorption and fixation sheet according to claim 1 or 2, wherein: The porous sheet is a sintered sheet of ultra-high molecular weight polyethylene particles.

9. The adsorption and fixation sheet according to claim 1 or 2, wherein: The surface resistivity of the porous sheet side is 1.0×10 12 Ω / □ or less.

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