Wafer Cassette Handling Robot

Abstract

The present invention relates to the field of wafer handling technology, and specifically discloses a wafer box handling robot. The wafer box handling robot includes an automatic guided vehicle, a holding device, a wafer box carrying device arranged on the automatic guided vehicle, and a mechanical arm used to drive the holding device to move; the holding device is used to hold a wafer box with handles protruding from two opposite sides, including two supporting arms arranged oppositely and spaced apart to support the two handles one-to-one and a connecting arm connected between the two supporting arms; the wafer box carrying device includes a base body installed on the automatic guided vehicle and a carrying platform arranged on the base body; at least one accommodating groove for carrying the wafer box is formed on the carrying platform; one end of the mechanical arm is connected to the base body, and the other end is connected to the holding device so that the holding device holds the wafer box into the accommodating groove or takes it out from the accommodating groove. The wafer box handling robot of the present invention has the characteristics of convenient wafer box holding, good controllability, high reliability and high handling efficiency.

Description

Technical Field

[0001] The invention relates to the field of wafer transportation, and in particular to a wafer box transportation robot. Background Art

[0002] Wafers are thin, light, brittle, and require a clean environment. To reduce the risk of wafer contamination, wafers are usually stored in wafer boxes and transported through wafer boxes. In traditional technology, wafer boxes are usually transported manually in warehouses, production workshops, and other indoor locations, which consumes a lot of manpower.

[0003] In order to solve the problems in the above-mentioned traditional technology, the prior art proposes a wafer handling robot for handling wafer boxes. In the existing wafer box handling robot, a mechanical arm is generally installed on an automatic guided vehicle (English full name: Automated Guided Vehicle, referred to as: AGV), and a gripping device (such as a gripper or a manipulator) is provided on the mechanical arm to grip and carry the wafer box through the gripping device. However, when such an existing gripping device is used to grip and carry the wafer box, the following defects exist:

[0004] (1) It is difficult to control the clamping force of the clamping device on the wafer box, and it is easy to damage the wafer box and the wafer. For example, when the clamping force of the wafer box is too large, it is easy to crush the wafer box, resulting in debris contamination, or even crushing the wafer box and the wafer; and when the clamping force of the wafer box is too small, the stability and reliability of the clamping device to clamp the wafer box will be reduced, so that the wafer box is easy to slip off the clamping device and fall, and then cause damage to the wafer box and the wafer. (2) The setting of the telescopic drive mechanism makes the structure of the clamping device more complicated and the cost is higher. (3) The loading and unloading and handling efficiency is low, and only one wafer box can be handled at a time.

[0005] In order to improve the handling efficiency, a wafer box carrier is installed on the existing wafer box handling robot. The wafer box carrier includes a horizontal portion and a vertical portion extending upward from the top of the horizontal portion. A wafer box carrier plate is protrudingly provided on one side of the vertical portion. The wafer box is loaded on the carrier plate by a clamping device, thereby improving the handling efficiency of the wafer box. However, such a wafer box handling robot also has defects:

[0006] (a) The center of gravity of the wafer box handling robot is unstable. On the one hand, since the wafer box support seat installed on the automatic guided vehicle only has a wafer box support plate protruding from one side of the vertical part, the center of gravity of the wafer box handling robot is offset to one end of the vertical part. In order to stabilize the center of gravity, the size of the wafer box support plate needs to be designed to be relatively large or the size of the wafer box support plate extending from the vertical part in the horizontal direction away from the vertical part will exceed the size of the automatic guided vehicle to maintain the stability of the center of gravity of the wafer box handling robot when it is empty; on the other hand, since the wafer support plate is protruding from one side of the vertical part, when loading wafer boxes onto the wafer box support plate, the side loaded with the wafer box will become heavier and heavier, resulting in an unstable center of gravity of the wafer box handling robot when it is fully loaded. Both aspects will make it difficult to maintain the stability of the center of gravity of the entire wafer box handling robot.

[0007] (b) The number of wafer boxes that can be transported is limited, and the transport efficiency is low. On the one hand, the number of wafer boxes that can be loaded on the wafer box carrier plate set on one side is limited; on the other hand, due to the characteristics of the wafer, multiple wafer boxes cannot be stacked on the wafer box carrier plate, which also limits the number of wafer boxes that can be transported each time; both of these aspects lead to the low transport efficiency of the existing wafer box transport robot.

[0008] (c) Handling is prone to malfunctions. Horizontally loading wafer boxes on a wafer box carrier will make the horizontal area of ​​the wafer box carrier larger than the horizontal area of ​​the automatic guided vehicle, which will eventually increase the horizontal area of ​​the wafer box handling robot. When the robot is working, it is easy to touch other objects in warehouses, workshops, etc. and cause malfunctions. Summary of the invention

[0009] The object of the present invention is to provide a wafer box handling robot, which aims to solve the technical problems of existing wafer box handling robots such as inconvenient clamping, low handling efficiency, and easy handling accidents.

[0010] To achieve the above object, the present invention provides a solution: a wafer box handling robot, comprising an automatic guided vehicle, a holding device, a wafer box carrying device arranged on the automatic guided vehicle, and a mechanical arm for driving the holding device to move;

[0011] The holding device is used to hold a wafer box with two handles protruding from two opposite sides, and the holding device includes two supporting arms spaced apart and arranged opposite to each other to support the two handles one by one, and a connecting arm connected between the two supporting arms;

[0012] The wafer box carrying device comprises a base body mounted on the automatic guided vehicle and a carrying platform provided on the base body; at least one accommodating groove for carrying the wafer box is formed on the carrying platform;

[0013] One end of the robot arm is connected to the base body, and the other end is connected to the holding device, so that the holding device holds the wafer box into the accommodating groove or takes it out of the accommodating groove.

[0014] Optionally, the seat body includes a vertical extension portion, the vertical extension portion has a first side end and a second side end, and the first side end and the second side end are arranged opposite to each other;

[0015] At least one bearing platform is protruded from each of the first side end and the second side end.

[0016] Optionally, at least two of the bearing platforms are spaced apart and distributed along the height direction of the vertical extension portion on the first side end;

[0017] And / or, at least two of the supporting platforms are spaced apart and distributed along the height direction of the vertically extending portion on the second side end.

[0018] Optionally, at least two accommodating grooves distributed along the horizontal direction are formed on each of the carrying platforms.

[0019] Optionally, the vertical extension portion also includes a third side end and a fourth side end arranged opposite to the third side end, the third side end and the fourth side end are respectively connected to the first side end and the second side end, and the accommodating grooves on each of the supporting platforms are spaced apart in the direction from the third side end to the fourth side end.

[0020] Optionally, the carrying platform further comprises at least one detection component for detecting whether the wafer box is loaded in each of the containing grooves; the containing groove comprises a groove bottom wall for supporting the wafer box and a groove side wall protruding from the edge of the groove bottom wall for limiting the position of the wafer box;

[0021] The detection assembly includes a first detector embedded in the bottom wall of the slot for detecting whether the wafer box is supported on the bottom wall of the slot and a second detector disposed on the side wall of the slot for detecting whether the wafer box is loaded in the containing slot;

[0022] And / or, the carrying platform further comprises an identification device for identifying the information carrier of the wafer box, and the identification device is embedded in the end of the carrying platform away from the vertical extension portion.

[0023] Optionally, the first detector is a micro switch or a pressure sensor; the second detector is a diffuse reflection photoelectric sensor or an optical coupler or an ultrasonic sensor; and / or,

[0024] The identification device is a radio frequency card reader, a bar code scanner, or a two-dimensional code scanner.

[0025] Optionally, each of the detection components includes one or more than two of the first detectors.

[0026] Optionally, each of the detection components includes two of the first detectors symmetrically distributed on both sides of the center of the bottom wall of the groove.

[0027] Optionally, the groove side wall is an annular wall body arranged around the edge of the groove bottom wall; or,

[0028] The groove side wall includes at least two segmented wall bodies arranged along the edge surrounding the groove bottom wall and at intervals.

[0029] Optionally, the edge of the bottom wall of the groove includes four corner portions that are diagonally arranged in pairs, and each of the detection components includes two of the first detectors that are respectively arranged close to the two diagonally arranged corner portions.

[0030] Optionally, the seat body further includes a transverse extension portion, the vertical extension portion is connected to the transverse extension portion and extends from the transverse extension portion to above the transverse extension portion, and the bearing platform is arranged above the transverse extension portion.

[0031] Optionally, the bearing platform closest to the lateral extension portion is connected to the top of the lateral extension portion and / or the vertical extension portion.

[0032] Optionally, the supporting arm is provided with a second plug-in limit portion for plugging and cooperating with the first plug-in limit portion of the supporting handle to prevent the wafer box from slipping off the supporting arm.

[0033] Optionally, the supporting arm has a supporting surface for supporting the supporting handle, and the second insertion limiting portion is a boss extending above the supporting surface for being inserted into the first insertion limiting portion.

[0034] Optionally, the boss extends from the support surface above the support surface with a trend of gradually decreasing cross-sectional area.

[0035] Optionally, the side of the boss has a first limiting surface set toward the connecting arm and a second limiting surface set away from the connecting arm, and the first limiting surface and the second limiting surface on one supporting arm extend obliquely in a direction away from the other supporting arm with a trend of gradually increasing distance.

[0036] Optionally, the side of the boss further has a smooth transition surface connected between the first limiting surface and the second limiting surface, and the first limiting surface and the second limiting surface on one of the supporting arms extend obliquely from the smooth transition surface in a direction away from the other supporting arm with a trend of gradually increasing distance; and / or

[0037] The supporting arm comprises a supporting arm body and a limiting member installed on the side of the supporting arm body, and the limiting member is provided with the second plug-in limiting portion.

[0038] Optionally, the supporting device further comprises a detection device for detecting whether the supporting handle is supported on the supporting arm, and the detection device is provided on at least one of the supporting arms.

[0039] Optionally, the detection device is a micro switch or a pressure sensor; and / or,

[0040] Each of the supporting arms is provided with at least one detection device.

[0041] Optionally, the supporting arm is provided with a first stopper for preventing the wafer box from sliding away from the connecting arm and / or a second stopper for preventing the wafer box from sliding toward the connecting arm; and / or,

[0042] The two ends of the connecting arm are respectively connected to one end of the two supporting arms.

[0043] Optionally, the supporting device further includes an identification and positioning device provided on the connecting arm for auxiliary positioning.

[0044] Optionally, the holding device further comprises an identification detection device disposed on the connecting arm for detecting whether there is a wafer box on the shelf.

[0045] The beneficial effects of the present invention are:

[0046] The wafer box handling robot provided by the present invention includes a holding device for holding a wafer box and a wafer box carrying device for loading the wafer box, which are installed on an automatic guided vehicle, and a carrying platform is provided on the base body of the wafer box carrying device, and at least one accommodating groove for carrying the wafer box is formed on each carrying platform. Such a design, on the first hand, changes the wafer box clamping from clamping to holding, and there is no need to apply clamping force to the wafer box, so that holding becomes convenient and the risk of wafer handling being damaged and contaminated is greatly reduced; on the second hand, the holding device holds the wafer box from under the holding handles on the two opposite sides of the wafer box, and the wafer box is not easy to slip off or fall from the holding device, and the controllability and reliability of holding are greatly improved; on the third hand, the holding device only holds the wafer box to the carrying platform of the wafer box carrying device, so that the wafer box handling robot can carry multiple wafer boxes at a time, thereby improving the handling efficiency; and finally effectively improving the comprehensive handling performance of the wafer handling robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0048] Figure 1 is a schematic diagram of the three-dimensional structure of a wafer box handling robot provided by an embodiment of the present invention;

[0049] Figure 2 is a schematic diagram of a fourth side end view of a wafer box handling robot provided by an embodiment of the present invention;

[0050] Figure 3 is a schematic diagram of the three-dimensional structure of a wafer box carrying device provided by an embodiment of the present invention;

[0051] Figure 4 is a schematic diagram of the three-dimensional structure of a carrying platform provided in an embodiment of the present invention;

[0052] Figure 5 yes Figure 4 A local enlarged schematic diagram of the middle A;

[0053] Figure 6 is a schematic diagram of the exploded structure of the load-bearing platform provided in an embodiment of the present invention;

[0054] Figure 7 is a schematic diagram of the three-dimensional structure of a holding device provided in an embodiment of the present invention;

[0055] Figure 8 yes Figure 7 A partial enlarged schematic diagram of point B in the middle;

[0056] Fig. 9 yes Figure 7 A partial enlarged schematic diagram of point C in the middle;

[0057] Fig.10 is a schematic diagram of another viewing angle of the holding device provided by an embodiment of the present invention;

[0058] Fig.11 It is a schematic diagram of the three-dimensional structure of a wafer box supported by a supporting device provided by an embodiment of the present invention;

[0059] Fig.12 yes Fig.11 A partial enlarged schematic diagram of point D in the middle;

[0060] Fig.13 It is a schematic diagram of the three-dimensional structure of a wafer box provided in an embodiment of the present invention.

[0061] Description of Figure Numbers:

[0062] 1. Wafer box handling robot; 10. Automatic guided vehicle; 20. Wafer box carrying device; 210. Base; 211. Vertical extension; 2111. First side end; 2112. Second side end; 2113. Third side end; 2114. Fourth side end; 212. Lateral extension; 220. Carrying platform; 221. Accommodating groove; 2211. Groove bottom wall; 22111. Corner; 2212. Groove side wall; 22121. Limiting wall; 22122. Guide wall; 230. Detection component; 2301. First detector; 2302. Second detector; 240. Identification device; 30. Supporting device; 310. Support arm; 3100. Support surface; 311. Support arm body; 3111. First limiting part; 3112, second limiting portion; 312, limiting member; 3120, second card-insertion limiting portion; 3121, first limiting surface; 3122, second limiting surface; 3123, smooth transition surface; 3124, connecting seat; 3101, avoidance space; 320, connecting arm; 330, detection device; 340, identification and positioning device; 350, identification and detection device; 40, robotic arm; 50, wafer box; 51, support handle; 511, first card-insertion limiting portion; 52, wafer box body. DETAILED DESCRIPTION

[0063] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0064] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0065] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or may be indirectly connected to the other element through an intermediate element.

[0066] In addition, the descriptions of "first", "second", etc. in the present invention are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0067] Figures 1 to 13 The wafer box handling robot 1 of the embodiment of the present invention and its main components are schematically shown in FIG. The wafer box handling robot 1 of the embodiment of the present invention can be used to handle wafer boxes 50 with handles 51 protruding from two opposite sides, but is not limited to wafer boxes 50 with handles 51 protruding from two opposite sides.

[0068] See also Figure 1 and Figure 2 The wafer box handling robot 1 includes an automatic guided vehicle 10, a wafer box carrier 20, a holding device 30 and a robot arm 40. The automatic guided vehicle 10 is used to carry the wafer box carrier 20 for movement, the wafer box carrier 20 is used to load the wafer box 50, the holding device 30 is used to hold the wafer box 50, and the robot arm 40 is used to drive the holding device 30 to move. Through the driving action of the robot arm 40, the wafer box 50 can be held on the holding device 30, and the holding device 30 can transfer the held wafer box 50 to the wafer box carrier 20 or remove the wafer box 50 from the wafer box carrier 20. Specifically, the wafer box carrier 20 is arranged on the automatic guided vehicle 10, and one end of the robot arm 40 is connected to the wafer box carrier 20, and the other end is connected to the holding device 30.

[0069] See also Figure 1 and Figure 3 The wafer box carrying device 20 includes a base 210 , a carrying platform 220 and an indicator light (not shown in the figure). The base 210 is installed on the automatic guided vehicle 10 , and the carrying platform 220 is arranged on the base 210 .

[0070] See also Figure 2 and Figure 3The seat body 210 includes a vertical extension portion 211 and a horizontal extension portion 212. The vertical extension portion 211 includes a first side end 2111, a second side end 2112, a third side end 2113 and a fourth side end 2114. The first side end 2111 and the second side end 2112 are arranged opposite to each other, and the first side end 2111 and the second side end 2112 are arranged at intervals, the third side end 2113 and the fourth side end 2114 are arranged opposite to each other, and the third side end 2113 and the fourth side end 2114 are arranged at intervals, and the third side end 2113 is connected to the first side end 2111 and the second side end 2112 respectively, and the fourth side end 2114 is connected to the first side end 2111 and the second side end 2112 respectively. Two bearing platforms 220 are convexly provided on the first side end 2111, and the two bearing platforms 220 on the first side end 2111 are spaced apart along the height direction of the vertical extension portion 211; two bearing platforms 220 are convexly provided on the second side end 2112, and the two bearing platforms 220 on the second side end 2112 are spaced apart along the height direction of the vertical extension portion 211. In some alternative embodiments, the number of bearing platforms 220 on the first side end 2111 may be one, three, or four, etc.; and in another alternative embodiment, the number of bearing platforms 220 on the second side end 2112 may be one, three, or four, etc. The vertical extension portion 211 is connected to the lateral extension portion 212, and the vertical extension portion 211 extends above the lateral extension portion 212, that is, the vertical extension portion 211 extends from the lateral extension portion 212 along the height direction of the automatic guided vehicle 10 toward a direction away from the automatic guided vehicle 10, and the portion where the vertical extension portion 211 is connected to the lateral extension portion 211 is located at the center of the horizontal dimension of the lateral extension portion 212.

[0071] See also Figure 2 , Figure 3 and Figure 4, the carrying platform 220 is arranged above the lateral extension portion 212, and two receiving grooves 221 for carrying the wafer box 50 are formed on each carrying platform 220. The two receiving grooves 221 on the same carrying platform 220 are spaced apart from each other in the direction from the third side end 2113 to the fourth side end 2114. In some alternative embodiments, the number of receiving grooves 221 on the carrying platform 220 may be one, three or other numbers. In some possible embodiments, one of the carrying platforms 220 protruding on the first side end 2111 is closest to the top of the lateral extension portion 212, and the carrying platform 220 closest to the top of the lateral extension portion 212 is connected to the top of the lateral extension portion 212; one of the carrying platforms 220 protruding on the second side end 2112 is closest to the top of the lateral extension portion 212, and the carrying platform 220 closest to the top of the lateral extension portion 212 is connected to the top of the lateral extension portion 212. In some alternative embodiments, the bearing platform 220 closest to the top of the lateral extension portion 212 is connected to the top of the lateral extension portion 212 and is also connected to the vertical extension portion 211. The bearing platform 220 close to the top of the lateral extension portion 212 is connected to the top of the lateral extension portion 212 and the vertical extension portion 211 at the same time, which can effectively improve the reliability of the bearing platform 220.

[0072] Please click on View Figure 3 to Figure 5 In a possible embodiment, the receiving groove 221 has a groove bottom wall 2211 and a groove side wall 2212. The groove bottom wall 2211 is used to support the wafer box 50, and the groove side wall 2212 is protruding from the edge of the groove bottom wall 2211 to limit the wafer box 50 and prevent the wafer box 50 loaded in the receiving groove 221 from moving. In a possible embodiment, the groove side wall 2212 is an annular wall body arranged around the edge of the groove bottom wall 2211. As an alternative embodiment, the groove side wall 2212 includes at least two segmented walls arranged around the edge of the groove bottom wall 2211 and arranged at intervals.

[0073] See also Figure 4 and Figure 5In a possible embodiment, the groove side wall 2212 includes a limiting wall 22121 and a guide wall 22122. The bottom edge of the limiting wall 22121 is connected to the edge of the groove bottom wall 2211, and the bottom edge of the guide wall 22122 is connected to the top edge of the limiting wall 22121. The guide wall 22122 extends from the position where the guide wall 22122 and the limiting wall 22121 are connected to the top of the vertical extension portion 211 with a trend of gradually increasing distance relative to the center of the accommodating groove 221, and is connected to the edge of the notch of the accommodating groove 221. The wafer box 50 can be introduced into the accommodating groove 221 by the guide wall 22122, and the wafer box 50 can be restricted in the accommodating groove 221 by the limiting wall 22121, so as to prevent the wafer box 50 from moving horizontally in the accommodating groove 221 during the transportation of the wafer box 50.

[0074] See also Figure 5 and Figure 6 In a possible implementation, each carrying platform 220 includes a detection component 230 for monitoring whether a wafer box 50 is loaded in the receiving slot 221 and an identification device 240 for identifying the information carrier of the wafer box 50. The detection component 230 includes two first detectors 2301 and a second detector 2302, and the first detector 2301 and the second detector 2302 are used to feedback whether a wafer box 50 is loaded in the receiving slot 221. Since the first detector 2301 and the second detector 2302 independently detect whether the wafer box 50 is loaded in the receiving slot 221 from different dimensions, it provides a guarantee for the wafer box handling robot 1 to obtain the information of whether the wafer box 50 is loaded in the receiving slot 221. When one of the first detector 2301 or the second detector 2302 fails, the other will not be affected and the other can still work normally. Therefore, when one of the first detector 2301 or the second detector 2302 fails, it will not affect the normal operation of the wafer box handling robot 1, effectively improving the reliability of the wafer box handling robot 1.

[0075] In some embodiments, the first detector 2301 is disposed on the bottom wall 2211 of the groove to detect whether the bottom wall 2211 of the groove supports the wafer box 50; and the second detector 2302 is disposed on the side wall 2212 of the groove. In a possible implementation, the first detector 2301 is a micro switch or a pressure sensor, etc. Since the micro switch or the pressure sensor has the characteristics of sensitive response and small size, when the wafer box 50 is loaded in the receiving groove 221, the wafer box 50 presses against the micro switch or the pressure sensor and triggers the micro switch or the pressure sensor to quickly send a feedback signal. In a possible implementation, the second detector 2302 is a diffuse reflection photoelectric sensor or an optical coupler or an ultrasonic sensor. Since the diffuse reflection photoelectric sensor or the optical coupler or the ultrasonic sensor has the characteristics of fast response and accurate detection, it can quickly and accurately detect whether the receiving groove 221 carries the wafer box 50. In addition, by setting the first detector 2301 in the receiving slot 221, it is also possible to effectively determine whether the wafer box 50 is loaded facing the receiving slot 221. If the wafer box 50 is not loaded facing the receiving slot 221, the first detector 2301 will feedback corresponding information to the robot arm 40 and the supporting device 30, so that the loading position of the wafer box 50 can be adjusted until the wafer box 50 can be loaded facing the receiving slot 221. This is particularly effective for the wafer box carrier 20 used in the automated transportation scenario, which can effectively improve the efficiency of automated transportation, and at the same time reduce the transportation failures and transportation risks caused by inaccurate loading position of the wafer box 50; by setting the second detector 2302 in the receiving slot 221, it is also possible to effectively determine whether the wafer box 50 is loaded in the receiving slot 221. When the wafer box carrier 20 is used in the automated transportation scenario, it is possible to quickly determine which receiving slot 221 has been loaded with the wafer box 50, thereby reducing the transportation action and improving the transportation efficiency.

[0076] Preferably, the edge of the bottom wall 2211 of the groove includes four corner portions 22111 arranged diagonally in pairs, and each detection assembly 230 includes two first detectors 2301 respectively arranged close to the two diagonally arranged corner portions 22111. Through this arrangement, it is possible to detect and feedback at multiple points whether the wafer box 50 is accurately loaded into the receiving groove 221, which is conducive to ensuring that the wafer box 50 can be loaded in the receiving groove 221 in the correct position, thereby ensuring the reliability of the placement and positioning of the wafer box 50.

[0077] See also Figure 4 In a possible embodiment, the groove sidewall 2212 is an annular wall body disposed around the edge of the groove bottom wall 2211. Of course, in other embodiments, the groove sidewall 2212 includes at least two segmented wall bodies disposed around the edge of the groove bottom wall 2211 at intervals.

[0078] See also Figure 5 and Figure 6 In a possible implementation, the identification device 240 is embedded in the end of the carrying platform 220 away from the vertical extension portion 211. Specifically, the identification device 240 is embedded in the groove side wall 2212, and an identification device 240 is provided on the groove side wall 2212 of each receiving groove 221. The provision of the identification device 240 facilitates the establishment of a one-to-one relationship between the receiving groove 221 and the wafer box 50, and facilitates the tracking and management of the wafer box 50. Preferably, the identification device 240 is selected from any one of a radio frequency card reader, a bar code scanner, a two-dimensional code scanner, and the like. Among them, the radio frequency card reader is used to identify the radio frequency identification tag on the wafer box 50, the bar code scanner is used to identify the bar code on the wafer box 50, and the two-dimensional code scanner is used to identify the two-dimensional code on the wafer box 50.

[0079] See also Figure 1 and Figure 3 In a possible embodiment, the indicator lights include two, one of which is disposed on the carrier platform 220 at the first side end 2111 close to the top of the vertical extension portion 211, and the other indicator light is disposed on the carrier platform 220 at the second side end 2112 close to the top of the vertical extension portion 211, and both indicator lights are disposed at the end of the carrier platform 220 away from the vertical extension portion 211. The indicator lights are used to display the working status of the wafer box handling robot 1. For example, when the wafer box handling robot 1 fails, the indicator light is red and flashes continuously; when the wafer box handling robot 1 works normally, the indicator light is green and does not flash; when the wafer box handling robot 1 is in other states, the indicator light may be blue and flashes continuously to serve as a warning, etc. Of course, the display of the indicator lights is not limited to the above-mentioned colors, but may also be other colors. Specifically, different light colors and information indicated by the light colors may be set according to user needs. In another possible embodiment, only one indicator light is needed, and the indicator light is installed on the top of the vertical extension part 211. By setting the indicator light on the top of the vertical extension part 211, only one indicator light is needed to quickly see the working status of the wafer box handling robot 1 in all directions. In another alternative embodiment, there is only one indicator light, and it is set on the base 210. By setting the indicator light on the base 210, when the indicator light flashes, it will not be too dazzling, and it will not affect the observation of the working status of the wafer box handling robot 1 by people around. Of course, there can also be four indicator lights, which are distributed on the four lateral ends of the base 210. Of course, the indicator lights of the present invention are not limited to being set on the above-mentioned positions, and the positions where they are set can also be adjusted according to actual needs.

[0080] See also Figure 7The holding device 30 is used to hold a wafer box 50 with two handles 51 protruding from two opposite sides. The holding device 30 includes a supporting arm 310 and a connecting arm 320, wherein the supporting arm 310 includes two, and the two supporting arms 310 are arranged opposite to each other to support the two handles 51 on the wafer box 50 one by one, and the connecting arm 320 is connected between the two supporting arms 310.

[0081] In a specific application, two supporting arms 310 support the wafer box 50 from both sides of the wafer box 50, and each supporting arm 310 supports a corresponding supporting handle 51. The setting of the supporting device 30 in the embodiment of the present invention, on the one hand, since the supporting device 30 supports the wafer box 50 by supporting, it can effectively avoid the occurrence of undesirable phenomena such as the supporting device 30 crushing the wafer box 50 or even crushing the wafer box 50 and the wafer, and ensure the stability and reliability of the wafer box 50 supported on the supporting device 30; on the other hand, since the supporting device 30 supports the wafer box 50 instead of clamping it, and supports it from the opposite sides of the wafer box 50, it can minimize the disturbance of the wafer in the wafer box 50 when the wafer box 50 is supported or put down, effectively avoid the phenomenon of collision between the wafer and the wafer box 50 during the transportation process, thereby effectively reducing the loss of the wafer during the transportation process. On the other hand, since the holding device 30 does not need to be equipped with a power mechanism for driving the clamping or releasing of the wafer box 50, the structure and control difficulty of the holding device 30 are effectively simplified, which is conducive to reducing the cost of the holding device 30, and can also effectively reduce the generation of pollution sources such as tiny particles and dust caused by the relative friction movement of various components during the transportation process.

[0082] See also Fig.11 , Fig.12 and Fig.13 The wafer box 50 includes a wafer box body 52 and two supporting handles 51. The wafer box body 52 is provided with a receiving cavity (not shown in the figure) for accommodating wafers. In a possible embodiment, a supporting handle 51 is respectively provided on two opposite sides of the wafer box body 52, and each supporting handle 51 is also provided with a first plug-in limit portion 511. The two supporting arms 310 of the supporting device 30 respectively support a supporting handle 51 from two opposite sides of the wafer box body 52; of course, the number of supporting handles 51 is not limited to two. For example, as an alternative embodiment, a supporting handle 51 can also be provided on each of the four sides of the wafer box body 52.

[0083] See also Figure 7 and Figure 8In a possible implementation manner, a second card-insertion limit portion 3120 is provided on the supporting arm 310, and the second card-insertion limit portion 3120 is used to engage with the first card-insertion limit portion 511 on the wafer box 50 to prevent the wafer box 50 from slipping off the supporting arm 310, thereby fully ensuring the stability and reliability of the wafer box 50 supported on the supporting device 30.

[0084] See also Figure 7 and Figure 8 In a possible implementation, the support arm 310 has a support surface 3100 for supporting the support handle 51, and the second insertion limit portion 3120 is a boss extending above the support surface 3100 for being inserted into the first insertion limit portion 511. In a specific application, the second insertion limit portion 3120 on the support arm 310 is a boss, and the first insertion limit portion 511 on the wafer box 50 is a slot adapted to the boss. The boss is inserted into the slot to limit the movement of the wafer box 50; of course, as an alternative implementation, the second insertion limit portion 3120 is set as a slot, and the first insertion limit portion 511 is set as a boss.

[0085] See also Figure 7 and Figure 8 In a possible implementation, the boss extends from the support surface 3100 to the top of the support surface 3100 with a trend of gradually decreasing cross-sectional area. In a specific application, when the support arm 310 moves upward and supports the wafer box 50, the end of the boss with a smaller cross-sectional area is first inserted into the slot of the support handle 51, so as to ensure the smooth insertion and removal of the boss into and from the slot, and reduce the disturbance of the wafer in the wafer box 50 during the insertion process.

[0086] See also Figure 7 and Figure 8In a possible embodiment, the side of the boss has a first limiting surface 3121 disposed toward the connecting arm 320 and a second limiting surface 3122 disposed away from the connecting arm 320. The first limiting surface 3121 and the second limiting surface 3122 on one supporting arm 310 extend obliquely in a direction away from the other supporting arm 310 with a distance therebetween (the distance between the first limiting surface 3121 and the second limiting surface 3122) gradually increasing. The first limiting surface 3121 and the second limiting surface 3122 can extend and intersect to form a horizontal V-shaped structure. An avoidance space 3101 for avoiding the wafer box 50 is formed between the two supporting arms 310. The horizontal distance between the first limiting surface 3121 and the second limiting surface 3122 in one boss changes gradually, and the horizontal distance is the smallest on the side close to the avoidance space 3101. In a possible embodiment, the first limiting surface 3121 and the second limiting surface 3122 are both set as inclined surfaces, so that the first limiting surface 3121 and the second limiting surface 3122 can limit the support handle 51 from two mutually perpendicular horizontal directions, thereby improving the reliability of the plug-in limit between the second plug-in limit portion 3120 and the first plug-in limit portion 511, and reducing the disturbance to the wafer in the wafer box 50.

[0087] In one possible embodiment, the first limiting surface 3121 is arranged toward the connecting arm 320 to limit the movement of the wafer box 50 in the direction away from the connecting arm 320, and the second limiting surface 3122 is arranged opposite to the connecting arm 320, which can limit the movement of the wafer box 50 in the direction close to the connecting arm 320. Therefore, in the process of transporting the wafer box 50 by the supporting device 30, the wafer box 50 is affected by the first limiting surface 3121 and the second limiting surface 3122 and will not slide in the horizontal direction, thereby effectively reducing the disturbance of the wafer in the wafer box 50 during the transportation of the wafer box 50,

[0088] See also Figure 7 and Figure 8 In a possible embodiment, the side of the boss further has a smooth transition surface 3123 connected between the first limiting surface 3121 and the second limiting surface 3122. The first limiting surface 3121 and the second limiting surface 3122 on one supporting arm 310 extend obliquely from the smooth transition surface 3123 in a direction away from the other supporting arm 310 with a trend of gradually increasing distance therebetween. By providing the smooth transition surface 3123, the sharp edges and corners of the part of the boss used to cooperate with the slot can be effectively eliminated, thereby preventing the boss from scratching the support handle 51 and generating debris when inserted into the slot of the support handle 51.

[0089] See also Figure 7 and Figure 8In a possible embodiment, the support arm 310 includes a support arm body 311 and a stopper 312, wherein the stopper 312 is mounted on the side of the support arm body 311, and a second plug-in stopper 3120 is provided on the stopper 312. In a possible embodiment, the stopper 312 includes a connection seat 3124 and a boss protruding from the connection seat 3124, and the top surface of the support arm body 311 and the top surface of the connection seat 3124 are flush and together constitute a support surface 3100. Of course, in a specific application, as an alternative embodiment, the top surface of the connection seat 3124 can be set lower than the top surface of the support arm body 311, and in this case, the support surface 3100 is only constituted by the top surface of the support arm body 311.

[0090] See also Figure 7 and Fig. 9 In a possible implementation, the holding device 30 further includes a detection device 330 for detecting whether the holding handle 51 is supported on the supporting arm 310, and at least one supporting arm 310 is provided with the detection device 330. The detection device 330 is mainly used to feedback whether the holding device 30 supports the wafer box 50, so as to facilitate the control of the holding device 30 to support and place the wafer box 50 at a specified position.

[0091] In a possible implementation, at least one detection device 330 is provided on each supporting arm 310, so as to ensure that each supporting arm 310 has a feedback signal when supporting a supporting handle 51, so that the supporting device 30 is controlled to move only after both supporting arms 310 accurately support two supporting handles 51. As a preferred implementation of this embodiment, each supporting arm 310 is provided with a detection device 330; of course, in a specific application, the number of detection devices 330 provided on each supporting arm 310 is not limited to one, such as the number of detection devices 330 provided on each supporting arm 310 may be more than two.

[0092] In a possible implementation, the detection device 330 is a micro switch. When the support handle 51 is supported on the support arm 310, the support handle 51 presses against the micro switch and triggers the micro switch to operate, so that the micro switch sends a feedback signal. The micro switch has the characteristics of sensitive response and small size. Of course, in specific applications, the detection device 330 is not limited to using a micro switch. For example, the detection device 330 can also use a pressure sensor.

[0093] See also Figure 7In a possible implementation, the supporting arm 310 is provided with a first stopper 3111 for preventing the wafer box 50 from sliding in a direction away from the connecting arm 320 and a second stopper 3112 for preventing the wafer box 50 from sliding in a direction close to the connecting arm 320. The provision of the first stopper 3111 and the second stopper 3112 can further improve the stability and reliability of the wafer box 50 supported on the supporting arm 310. Of course, in a specific application, only one of the first stopper 3111 and the second stopper 3112 can be provided on the supporting arm 310.

[0094] In a possible implementation, the two ends of the connecting arm 320 are respectively connected to one end of the two supporting arms 310. This arrangement can make the supporting device 30 simpler in structure and smaller in size. Of course, in a specific application, the connection between the two ends of the connecting arm 320 and the supporting arm 310 may not be a connection between the ends.

[0095] See also Fig.10 In a possible implementation, the holding device 30 further includes an identification and positioning device 340 disposed on the connecting arm 320 for auxiliary positioning. The identification and positioning device 340 is mainly used to feedback the position information of the holding device 30, so as to facilitate the precise control of the holding device 30 to move to the position of the wafer box 50 to clamp the wafer box 50 and the precise control of the holding device 30 to clamp the wafer box 50 and move to the designated position to place the wafer box 50.

[0096] In a possible implementation, the identification and positioning device 340 is a camera. Of course, in a specific application, the identification and positioning device 340 may also be other types of visual sensors.

[0097] See also Fig.10 In a possible implementation, the holding device 30 further includes an identification detection device 350 disposed on the connecting arm 320 to detect whether there is a wafer box 50 on the shelf. By providing the identification detection device 350, it is helpful to reduce useless movements of the holding device 30. In a specific application, when the holding device 30 moves to a cargo position on the shelf, the identification detection device 350 first detects and feedbacks whether there is a wafer box 50 in the cargo position. If the identification detection device 350 feedbacks that there is a wafer box 50 in the cargo position, the holding device 30 is controlled to move to support the wafer box 50; and if the identification detection device 350 feedbacks that there is no wafer box 50 in the cargo position, the holding device 30 is controlled to move to the next cargo position.

[0098] In a possible implementation, the identification detection device 350 is an ultrasonic sensor. Of course, in a specific application, the identification detection device 350 may also be a photoelectric sensor.

[0099] In a possible implementation, the base 210 is provided with a first controller (not shown in the figure) for controlling the movement of the robot arm 40, and the automatic guided vehicle 10 is provided with a battery (not shown in the figure) and a second controller (not shown in the figure) for controlling the movement of the automatic guided vehicle 10. Of course, in a specific application, the first controller and the second controller may also be integrated into one; or, the movement of the automatic guided vehicle 10 and the robot arm 40 may also be controlled by an external industrial computer.

[0100] Combine the following Figures 1 to 13 The working principle of the wafer box handling robot according to the embodiment of the present invention is briefly described as follows:

[0101] (a) The wafer handling robot moves to the side of the shelf loaded with the wafer box 50, the automatic guided vehicle 10 stops moving, and the robot arm 40 starts;

[0102] (b) The robot arm 40 moves under the guidance of the identification and positioning device 340 and the identification and detection device 350 on the holding device 30 and drives the holding device 30 to move until the two supporting arms 310 of the holding device 30 move to the positions directly below the two supporting handles 51 of a wafer box 50 respectively;

[0103] (c) The robot arm 40 drives the supporting device 30 to move upward until the detection device 330 of the supporting arm 310 is triggered by the supporting handle 51 of the wafer box 50 and then controls the supporting device 30 to stop the upward movement;

[0104] (d) The robot arm 40 drives the holding device 30 to hold the wafer box 50 to move, and holds the wafer box 50 into a receiving groove 221 of the base body 210;

[0105] (e) After the wafer box 50 is placed in a receiving groove 221 of the base body 210, the robot arm 40 controls the holding device 30 to move downward to release the holding of the wafer box 50, thus completing the action of loading a wafer box 50;

[0106] (f) The robot arm 40 continues to control the holding device 30 to hold and carry other wafer boxes 50 until the accommodating slot 221 on the wafer box carrying device 20 is fully loaded with wafer boxes 50, and then the robot arm 40 retracts into the wafer box handling robot 1. After the space occupied by the robot arm 40 reaches the minimum state, the robot arm 40 stops moving, the automatic guided vehicle 10 starts, and the wafer handling robot carries the wafer box 50 and drives to the destination;

[0107] (g) The robot arm 40 is started and, according to the actions of steps (b) to (f), the wafer box is unloaded from the wafer box carrier 20 and placed at a designated destination, thereby completing the transportation of the wafer box 50.

[0108] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. Wafer box handling robot, characterized by: It includes an automatic guided vehicle, a holding device, a wafer box carrying device arranged on the automatic guided vehicle, and a mechanical arm for driving the holding device to move; The holding device is used to hold a wafer box with two handles protruding from two opposite sides, and the holding device includes two supporting arms spaced apart and arranged opposite to each other to support the two handles one by one, and a connecting arm connected between the two supporting arms; The wafer box carrying device comprises a base body mounted on the automatic guided vehicle and a carrying platform provided on the base body; at least one accommodating groove for carrying the wafer box is formed on the carrying platform; One end of the robot arm is connected to the base body, and the other end is connected to the holding device, so that the holding device holds the wafer box into the containing tank or takes it out of the containing tank; The seat body comprises a vertical extension portion, the vertical extension portion has a first side end and a second side end, the first side end and the second side end are arranged opposite to each other; At least one of the bearing platforms is protruded from each of the first side end and the second side end; At least two of the bearing platforms are spaced apart and distributed along the height direction of the vertical extension portion on the first side end; And / or, at least two of the bearing platforms are spaced apart and distributed along the height direction of the vertically extending portion on the second side end; The carrying platform further comprises at least one detection component for detecting whether the wafer box is loaded in each of the accommodating slots; the accommodating slots have a slot bottom wall for supporting the wafer box and a slot side wall protruding from the edge of the slot bottom wall for limiting the position of the wafer box; The detection assembly includes a first detector embedded in the bottom wall of the slot for detecting whether the wafer box is supported on the bottom wall of the slot and a second detector disposed on the side wall of the slot for detecting whether the wafer box is loaded in the containing slot; Furthermore, the carrying platform further comprises an identification device for identifying the information carrier of the wafer box, and the identification device is embedded in the end of the carrying platform away from the vertical extension portion; The supporting arm is provided with a second plug-in limiting portion for plugging and cooperating with the first plug-in limiting portion of the supporting handle to prevent the wafer box from slipping off the supporting arm.

2. The wafer box handling robot according to claim 1, characterized in that: At least two accommodating grooves distributed along the horizontal direction are formed on each of the carrying platforms.

3. The wafer box handling robot according to claim 2, characterized in that: The vertical extension portion also includes a third side end and a fourth side end arranged opposite to the third side end, the third side end and the fourth side end are respectively connected to the first side end and the second side end, and the accommodating grooves on each of the supporting platforms are spaced apart in the direction from the third side end to the fourth side end.

4. The wafer box handling robot according to claim 1, characterized in that: The first detector is a micro switch or a pressure sensor; the second detector is a diffuse reflection photoelectric sensor or an optical coupler or an ultrasonic sensor; and / or, The identification device is a radio frequency card reader, a bar code scanner, or a two-dimensional code scanner.

5. The wafer box handling robot according to claim 4, characterized in that: Each of the detection components includes one or more than two of the first detectors.

6. The wafer box handling robot according to claim 5, characterized in that: Each of the detection components includes two first detectors symmetrically distributed on both sides of the center of the bottom wall of the groove.

7. The wafer box handling robot according to claim 6, characterized in that: The groove side wall is an annular wall body arranged around the edge of the groove bottom wall; or, The groove side wall includes at least two segmented wall bodies arranged along the edge surrounding the groove bottom wall and at intervals.

8. The wafer box handling robot according to claim 7, characterized in that: The edge of the bottom wall of the groove includes four corner portions which are arranged diagonally in pairs, and each of the detection components includes two of the first detectors which are respectively arranged close to the two diagonally arranged corner portions.

9. The wafer box handling robot according to any one of claims 1 to 8, characterized in that: The seat body also includes a transverse extension portion, the vertical extension portion is connected to the transverse extension portion and extends from the transverse extension portion to above the transverse extension portion, and the bearing platform is arranged above the transverse extension portion.

10. The wafer box transport robot according to claim 9, characterized in that: The bearing platform closest to the lateral extension portion is connected to the top of the lateral extension portion and / or the vertical extension portion.

11. The wafer box transport robot according to claim 1, characterized in that: The supporting arm has a supporting surface for supporting the supporting handle, and the second insertion limiting portion is a boss extending above the supporting surface for being inserted into the first insertion limiting portion.

12. The wafer box transport robot according to claim 11, characterized in that: The boss extends from the support surface above the support surface with a trend of gradually decreasing cross-sectional area.

13. The wafer box transport robot according to claim 12, characterized in that: The side of the boss has a first limiting surface arranged toward the connecting arm and a second limiting surface arranged away from the connecting arm. The first limiting surface and the second limiting surface on one supporting arm extend obliquely in a direction away from the other supporting arm with a trend of gradually increasing distance.

14. The wafer box transport robot according to claim 13, characterized in that: The side of the boss further comprises a smooth transition surface connected between the first limiting surface and the second limiting surface, and the first limiting surface and the second limiting surface on one of the supporting arms extend obliquely from the smooth transition surface in a direction away from the other supporting arm with a trend of gradually increasing distance; and / or The supporting arm comprises a supporting arm body and a limiting member installed on the side of the supporting arm body, and the limiting member is provided with the second plug-in limiting portion.

15. The wafer box transport robot according to any one of claims 1 to 8 or 11 to 14, characterized in that: The supporting device also includes a detection device for detecting whether the supporting handle is supported on the supporting arm, and the detection device is provided on at least one of the supporting arms.

16. The wafer box transport robot according to claim 15, characterized in that: The detection device is a micro switch or a pressure sensor; and / or, Each of the supporting arms is provided with at least one detection device.

17. The wafer box transport robot according to claim 16, characterized in that: The supporting arm is provided with a first stopper for preventing the wafer box from sliding away from the connecting arm and / or a second stopper for preventing the wafer box from sliding toward the connecting arm; and / or, The two ends of the connecting arm are respectively connected to one end of the two supporting arms.

18. The wafer box transport robot according to any one of claims 1 to 8 or 11 to 14, characterized in that: The holding device also includes an identification and positioning device arranged on the connecting arm for auxiliary positioning.

19. The wafer box transport robot according to any one of claims 1 to 8 or 11 to 14, characterized in that: The holding device also includes an identification detection device arranged on the connecting arm to detect whether there is a wafer box on the shelf.

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