Connecting device for connecting the valve stem of a vacuum valve to a closure member

Abstract

A connecting device for connecting a valve stem (4) of a vacuum valve to a closure member (1), comprising a connecting body (12) arranged between a first connecting member (10) and a second connecting member (11), the connecting body having the basic shape of a Steinmetz body formed by cutting two cylinders. The connecting body (12) is arranged in an intermediate cavity between arm protrusions (24, 25) of the first connecting member (10), and in an intermediate cavity between arm protrusions (26, 27) of the second connecting member (11). The corresponding contact surfaces (28, 29, 30, 31) of the arm protrusions (24, 25, 26, 27) are in contact with the contact surfaces (13, 14, 15, 16) of the connecting body (12). The two arm protrusions (24, 25, 26, 27) of the corresponding connecting parts (10, 11) approach each other toward their free ends.

Description

Technical Field

[0001] The present invention relates to a connecting device for connecting a valve stem of a vacuum valve to a closure member, comprising a first connecting component that can be connected to or has been connected to or is integrally constructed with the valve stem, a second connecting component that can be connected to or has been connected to or is integrally constructed with the closure member, and a connecting body arranged between the first connecting component and the second connecting component.

[0002] The present invention also relates to a vacuum valve, comprising: a valve body having a valve opening; and a closure member carried by a valve stem, the closure member being adjustable between an open position and a closed position, wherein the valve opening is released in the open position and the valve opening is closed by the closure member in the closed position, wherein the closure member is connected to the valve stem via a connecting device. Background Art

[0003] In order to connect the closure element, which is usually designed in the form of a disk, to the valve stem, it is known to use screws between the closure element and the valve stem.

[0004] In order to achieve uniform compression of an elastic seal arranged between a closure element and a closure element valve seat in the closed state of the vacuum valve despite tolerances in the closed state of the vacuum valve, wherein the elastic seal is usually arranged on the closure element, it is known to enable the closure element to be displaced relative to the valve stem. Thus, for example, US 2002 / 0130288 A1 discloses a connection device between a valve stem and a disk-shaped closure element, which connection device has an elastic block with a force transmission part arranged therein. As a result, when the closure element is pressed against the valve seat, the closure element can be slightly swiveled relative to the valve stem.

[0005] Other connections between closure element and valve stem are known from US Pat. No. 7,134,642 B2 and US Pat. No. 3,837,617, which allow the closure element to be movable relative to the valve stem.

[0006] US 2011 / 0108750A1 discloses a connection device between a valve stem and a closure member, which has a rotatable crossbeam. The closure member can be swiveled to a certain extent relative to the valve stem by twisting the crossbeam. Summary of the invention

[0007] The object of the present invention is to provide an advantageous connection device for connecting a valve stem of a vacuum valve to a closure element, which allows the closure element to be displaced relative to the valve stem about two mutually perpendicular axes. According to the invention, this is achieved by a connection device having the features of claim 1. The vacuum valve according to the invention has the features of claim 10.

[0008] The connection device according to the invention has a connection body with the basic shape of a Steinmetz body, wherein the Steinmetz body is formed by cutting two cylinders. The connection body thus has a primary contact surface formed by sections of the outer surface of the cylinder around a first axis and a secondary contact surface formed by sections of the outer surface of the cylinder around a second axis perpendicular to the first axis.

[0009] The connecting body is arranged in the middle cavity between the arm protrusions of the first connecting part, and is arranged in the middle cavity between the arm protrusions of the second connecting part. The arm protrusions of the first connecting part have a primary corresponding contact surface formed by some sections of the outer surface of the cylinder around the first axis, and the arm protrusions of the second connecting part have a secondary corresponding contact surface formed by some sections of the outer surface of the cylinder around the second axis. The primary corresponding contact surface is in contact with the primary contact surface of the connecting body, and the secondary corresponding contact surface is in contact with the secondary contact surface of the connecting body.

[0010] The arm projections of the first connecting part have sections connected to their free ends, via which the arm projections approach each other toward their free ends. The arm projections of the second connecting part have sections connected to their free ends, via which the arm projections approach each other toward their free ends. The connecting body is thereby secured in a form-fitting manner to prevent it from being pulled out of the first connecting part in the axial direction of the first connecting part and to prevent it from being pulled out of the second connecting part in the axial direction of the second connecting part.

[0011] By means of the design according to the invention, the second connecting part is movable relative to the first connecting part about two mutually perpendicular axes, which correspond to the axes of the two cylinders whose sections form the Steinmetz body. The closure part can thus be displaced relative to the valve stem with respect to the two mutually perpendicular axes.

[0012] In an advantageous embodiment of the present invention, the connecting body has a main groove in a plane perpendicular to the first axis and a secondary groove in a plane perpendicular to the second axis. A first clamping part fixed to the first connecting part extends into the main groove, and a second clamping part fixed to the second connecting part extends into the secondary groove.

[0013] The first clamping member is engaged in the main groove, and a form-fit connection is generated between the connecting body and the first connecting member, which prevents the first connecting member from being pulled out of the connecting body in a direction parallel to the first axis. The second clamping member is engaged in the secondary groove, and a form-fit connection is generated between the connecting body and the second connecting member, which prevents the second connecting member from being pulled out of the connecting body in a direction parallel to the second axis.

[0014] The first and second clamping parts are preferably pin-shaped and arranged in the holes of the connecting part. Advantageously, the clamping parts each extend into the corresponding groove along at least a portion of their diameter in the middle section of their longitudinal extension. Preferably, the hole in which the first clamping part is arranged extends perpendicularly to the first axis and the hole in which the second clamping part is arranged extends perpendicularly to the second axis.

[0015] The connecting body can advantageously be clamped between the first and second clamping parts. This allows a so-called heavy gear to be achieved, i.e., the first connecting part can be displaced relative to the second connecting part only by overcoming the clamping force caused by the clamping of the connecting body. This allows the closure part to be adjusted accordingly when the vacuum valve is closed for the first time, overcoming this clamping force, and the position remains unchanged. Therefore, during the subsequent closing process, the first connecting part cannot be displaced further relative to the second connecting part, thereby avoiding the undesired generation of particles in the vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Other advantages and details of the present invention are described below with the aid of the accompanying drawings.

[0017] Figure 1 An oblique view of a vacuum valve in an open position of a closure member, the vacuum valve having a connecting device according to the invention between a valve stem and a closure member;

[0018] Figure 2 is the position corresponding to the Figure 1 Oblique view of

[0019] Figure 3 and 4 It is a side view and a front view;

[0020] Figure 5 For along Figure 4 A cross-sectional view taken along line AA of FIG. 1 (only the main body 3 and the connecting member 4 are cut);

[0021] Figure 6 A view of a portion of a vacuum valve in a viewing direction perpendicular to a valve stem, the vacuum valve comprising a connecting device, a valve stem, a bellows surrounding the valve stem, and a flange arranged on the bellows;

[0022] Figure 7 For along Figure 6 A cross-sectional view taken along line BB;

[0023] Figure 8 Shows the vacuum valve Figure 6 The portion shown in , but rotated 90° around the longitudinal center axis of the valve stem;

[0024] Fig. 9 For along Figure 8 A cross-sectional view taken along line CC of ;

[0025] Fig.10 For vacuum valve Figure 6 An oblique view of the portion shown in ;

[0026] Fig.11 , 12 13 and 14 are views of the vacuum valve from different viewing directions. Figure 6 An oblique view of the parts shown in , which shows the connecting device separated from each other in an exploded view;

[0027] Fig.15 and 16 For similar Figure 6 and 8 , but in a state where the second connecting member is swung relative to the first connecting member;

[0028] Fig.17 A second embodiment of the present invention is shown.

[0029] The figures are to different scales and are shown partially simplified. DETAILED DESCRIPTION

[0030] Below with the help of Figures 1 to 16 An embodiment of a vacuum valve having a connecting device according to the present invention is described.

[0031] The vacuum valve has a plate-shaped closing element 1, which can also be called a valve plate or valve disc. The closing element 1 can be in an open position ( Figure 1 ) and closed position ( Figure 2 ). In the open position of the closure member, the valve opening 2 is released, which is closed by the closure member 1 in the closed position. The valve opening 2 is arranged in the body 3.

[0032] The closure element 1 is carried by the valve stem 4. In this embodiment, the closure element 1 is displaced between the open position and the closed position solely by axially displacing the valve stem 4. In modified embodiments of the invention, the closure element can also be displaced between the open position and the closed position in an L-shaped or J-shaped movement, for example by axial displacement of the valve stem and subsequent tilting, or by displacing the valve stem perpendicularly to its longitudinal axis, as is known.

[0033] In order to adjust the valve rod 4 so as to adjust the closure element 1 between the open position and the closed position, a transmission element 5 is used, which in this embodiment is formed by a pneumatic piston-cylinder unit. The valve rod 4 is connected to the piston rod of the piston-cylinder unit or is formed integrally therewith.

[0034] The valve stem 4 is led out of the vacuum region in a sealed manner, and the closure member 1 is arranged in the vacuum region. For this purpose, a bellows 6 is used in this embodiment. One end of the bellows is connected to the first connecting member 10 described below, and the other end is connected to the flange 7, which can be connected to the main body 3 in a vacuum-tight manner.

[0035] In order to seal between the closure part 1 and the body 3 in the closed state of the vacuum valve, a sealing ring 8 made of an elastomeric material is used. In this embodiment, the sealing ring is arranged on the closure part 1, as is preferred. The valve opening 2 is surrounded by a sealing surface, which forms a sealing seat, against which the sealing ring rests in the closed position of the closure part 1. The opposite arrangement (sealing ring arranged on the body 3 and sealing surface arranged on the closure part 1) is also conceivable and feasible in principle.

[0036] The main body 3 can be a vacuum chamber. Figures 1 to 5 In each of the figures, only a part of the vacuum chamber is shown. A connecting piece 9 is fixed to the vacuum chamber in the opening region (by means of screws not shown in the figure), wherein a sealing ring arranged between the vacuum chamber and the connecting piece 9 surrounds the opening on the vacuum chamber for a vacuum-tight connection. The transmission element 5 is fixed to the connecting piece 9 on the outside, and the valve stem extends through a channel in the connecting piece 9, wherein the flange 7 is fixed to the connecting piece on the inside (with a sealing ring located therebetween). The ventilation hole is introduced into the channel, and a guide bushing (not shown in the figure) is provided in the channel for guiding the valve stem 4.

[0037] In an alternative design, the body 3 can be a valve housing, only a part of which is shown, which has a further opening in order to form a through passage through the valve housing in the open position of the closure 1. Such a valve housing can be connected, for example, between two vacuum chambers.

[0038] It is also conceivable and feasible to design the main body 3 in the form of a valve body, which is inserted into the vacuum chamber as an insert so that the valve opening is aligned with the opening on the chamber wall (wherein the sealing ring surrounding the valve opening 2 is arranged between the chamber wall and the main body 3).

[0039] In order to connect the valve stem 4 with the closure member 1 , a connecting device is used, which includes a first connecting component 10 connected to the valve stem 4 , a second connecting component 11 connected to the closure member 1 , and a connecting body 12 .

[0040] The first connecting part 10 is rigidly connected, for example screwed or welded, to the valve rod 4. Also conceivable and feasible is a one-piece construction, ie, consisting completely of the same material.

[0041] The second connecting element 11 is rigidly connected to the closure element 1 and is screwed thereto in this exemplary embodiment. Welding is also conceivable and possible, or it can also be constructed in one piece, ie, made completely of the same material.

[0042] The connecting body 12 has the basic shape of a Steinmetz body, which is formed by cutting two cylinders (double cylinder). The connecting body 12 thus has a first main contact surface 13 and a second main contact surface 14 formed by some sections of the outer surface of the cylinder around the first axis 17, and a first main contact surface 15 and a second secondary contact surface 16 formed by some sections of the outer surface of the cylinder around the second axis 18, wherein the second axis 18 is perpendicular to the first axis 17.

[0043] Grooves 19 and 20 are provided on the primary and secondary contact surfaces 13-16. The primary groove 19 passes through the primary contact surfaces 13 and 14, is located in a plane perpendicular to the first axis 17, and extends through the vertex 22 of the connecting body 12 facing the first connecting part 10. The secondary groove 20 passes through the secondary contact surfaces 15 and 16, is located in a plane perpendicular to the second axis 18, and extends through the vertex 23 of the connecting body 12 facing the second connecting part 11. In this embodiment, the primary groove 19 and the secondary groove 20 extend completely around the connecting body 12. They can also extend only through the area of ​​the corresponding contact surface 13-16 connected to the corresponding vertex 22 and 23.

[0044] In this embodiment, the connecting body 12 further has a through hole 21 passing through it, for example parallel to the second axis. This through hole may also be omitted.

[0045] The first connecting member 10 has two arm projections 24, 25, which enclose an intermediate cavity between them, and the connecting body 12 is arranged in the intermediate cavity. The second connecting member 11 has two arm projections 26, 27, which enclose an intermediate cavity between them, and the connecting body 12 is arranged in the intermediate cavity. The arm projections 24, 25 of the first connecting member have main corresponding contact surfaces 28, 29 formed by some sections of the outer surface of the cylinder around the first axis 17. The arm projections 26, 27 of the second connecting member 11 have secondary corresponding contact surfaces 30, 31 formed by some sections of the outer surface of the cylinder around the second axis 18. The main corresponding contact surfaces 28, 29 are in contact with the main contact surfaces 13, 14 of the connecting body 12, and the secondary corresponding contact surfaces 30, 31 are in contact with the secondary contact surfaces 15, 16 of the connecting body 12.

[0046] Some sections of the arm projections 24, 25 of the first connecting member 10 are connected to the free ends of the arm projections 24, 25, and these sections approach each other in the direction toward the free ends of the arm projections 24, 25, that is, the intermediate cavity between the arm projections 24, 25 narrows toward the free ends of the arm projections 24, 25. A similar situation applies to the arm projections 26, 27 of the second connecting member 11. As a result, the first connecting member 10 is fixed to prevent it from being pulled out of the connecting body 12 in the direction of the longitudinal axis 32 of the first connecting member 10, that is, the valve stem 4 (which is perpendicular to the first axis 17), and the second connecting member 11 is fixed to prevent it from being pulled out of the connecting body 12 in the direction of the longitudinal axis 33 of the second connecting member 11 (which is perpendicular to the second axis 18).

[0047] In order to prevent the first connecting member 10 from being pulled out of the connecting body 12 in a direction parallel to the first axis 17, a pin-shaped first clamping member 34 is used. The first clamping member is arranged in a hole 36 of the first connecting member 10, which extends perpendicularly to the first axis 17. In the middle area of ​​its longitudinal extension, the hole 36 opens toward the connecting body 12 along a part of its circumference, and the first clamping member 34 extends into the main groove 19 of the connecting body 12 along a part of its diameter in the middle area of ​​its longitudinal extension.

[0048] In order to prevent the second connecting member 11 from being pulled out of the connecting body 12 in a direction parallel to the second axis 18, a pin-shaped second clamping member 35 is used. The second clamping member is arranged in a hole 37 of the second connecting member 11, which extends perpendicularly to the second axis 18. In the middle area of ​​its longitudinal extension, the hole 37 opens toward the connecting body 12 along a part of its circumference, and the second clamping member 35 extends into the auxiliary groove 20 along a part of its diameter in the middle area of ​​its longitudinal extension.

[0049] The middle sections of the first clamping part 34 and the second clamping part 35 are eccentric relative to the two end sections. Therefore, after the corresponding clamping parts 34, 35 are inserted into the corresponding holes 36, 37, the corresponding clamping parts 34, 35 can be pressed onto the connecting body 12 by rotation. The connecting body 12 is thus clamped between the clamping parts 34, 35 in the installed state.

[0050] To assemble the connection device, the connection body 12 is first pushed into the intermediate space between the arm projections 24, 25 of the first connection part 10 parallel to the first axis 17 and fixed there by inserting the first clamping part 34 into the hole 36 and rotating the first clamping part 34. Subsequently, the connection body 12 installed in the first connection part 10 is pushed into the intermediate space between the arm projections 26, 27 of the second connection part 11 parallel to the second axis 18, and the second clamping part 35 is inserted into the hole 37 and clamped and pressed onto the connection body 12 by rotating. Of course, the opposite assembly sequence is also conceivable and feasible (first connecting the connection body to the second connection part 11 and then to the first connection part 10).

[0051] If the closure element 1 is moved into the closed position for the first time after the connection device is installed, the closure element 1 can be adapted to the angular position of the valve seat, so that even large tolerances can be compensated. In this case, the first connection part 10 can be pivoted relative to the connection body 12 about the first axis 17 while overcoming the friction between the two parts, and / or the valve body 12 can be pivoted relative to the second connection part 11 about the second axis 18 while overcoming the friction between the two parts. The second connection part 11 then remains oriented relative to the first connection part 12 due to the friction, which keeps the connection body 12 in its current position.

[0052] To make it clear, Fig.15 and 16 A position of the second connecting element 11 is shown in which it is pivoted relative to the first connecting element about the first axis 17 by an angle 38 and about the second axis 18 by an angle 39 , wherein these pivot angles are shown greatly exaggerated compared to what usually occurs in reality.

[0053] exist Fig.17 , a modified embodiment of the invention is shown. The difference from the previous embodiment is that screw pins (also called heavy-duty clamping pins) are provided as clamping parts 34, 35. These screw pins are designed in the form of sleeves and have a continuous axial slit extending along their length. Therefore, after these clamping parts 34, 35 are pressed into the holes 36, 37, the connecting body 12 is already clamped between the clamping parts 34, 35, and the clamping parts 34, 35 no longer need to be rotated about their axis.

[0054] Without departing from the scope of the invention, different other modifications of the illustrated embodiment of the invention are conceivable and feasible. For example, the first component 34 and the second clamping component 35 can also be designed in a different manner than a pin. The connection with the first connecting component 10 or the second connecting component 11 can then be designed in another way. For example, a clamping component of, for example, a spherical configuration can be arranged in the recess of the first connecting component 10 or the second connecting component 11 and pressed against the bottom of the corresponding groove 19, 20 by a corresponding spring component.

[0055] If a sufficient friction fit is provided between the connecting body 12 and the first connecting part 10 and the second connecting part 11 even without the first clamping part 34 and / or the second clamping part 35 , the first clamping part 34 and / or the second clamping part 35 may also be omitted.

[0056] Reference numerals list

[0057] 1 Closure

[0058] 2 Valve opening

[0059] 3 Subject

[0060] 4 Valve stem

[0061] 5 Transmission parts

[0062] 6 Bellows

[0063] 7 Flange

[0064] 8 Seals

[0065] 9 Connectors

[0066] 10 First connecting member

[0067] 11 Second connecting member

[0068] 12 Connector

[0069] 13 Main contact surface

[0070] 14 Main contact surface

[0071] 15. Contact surface

[0072] 16 Auxiliary contact surface

[0073] 17 First Axis

[0074] 18 Second Axis

[0075] 19 Main Slot

[0076] 20 Secondary slots

[0077] 21 Through Holes

[0078] 22 Vertex

[0079] 23 Vertex

[0080] 24 Arm raised

[0081] 25 Arm raised

[0082] 26 Arm raised

[0083] 27 Arm raised

[0084] 28 Main contact surface

[0085] 29 Main contact surface

[0086] 30 pairs of corresponding contact surfaces

[0087] 31 pairs of corresponding contact surfaces

[0088] 32 Vertical axis

[0089] 33 Vertical axis

[0090] 34 First clamping part

[0091] 35 Second clamping member

[0092] 36 holes

[0093] 37 holes

[0094] 38 Angle

[0095] 39 Angle

Claims

1. A connecting device for connecting a valve stem (4) of a vacuum valve to a closure member (1), comprising: - a first connecting member (10) which can be connected to, is connected to or is integrally constructed with the valve stem (4); - a second connecting part (11) connectable to, connected to or integrally formed with the closure part (1); and - a connecting body (12) arranged between the first connecting part (10) and the second connecting part (11), It is characterized in that The connecting body (12) has a basic shape of a Steinmetz body formed by cutting two cylinders, the Steinmetz body having primary contact surfaces (13, 14) formed by some sections of the outer surface of the cylinder around a first axis (17) and secondary contact surfaces (15, 16) formed by some sections of the outer surface of the cylinder around a second axis (18) perpendicular to the first axis (17), and The first connecting component (10) has arm protrusions (24, 25), between which there is an intermediate cavity, and the connecting body (12) is arranged in the intermediate cavity; the second connecting component (11) has arm protrusions (26, 27), between which there is an intermediate cavity, and the connecting body (12) is arranged in the intermediate cavity, wherein the arm protrusions (24, 25) of the first connecting component (10) have main corresponding contact surfaces (28, 29), which are composed of some sections of the outer surface of the cylinder around the first axis (17) and are in contact with the main contact surfaces (13, 14) of the connecting body (12); the arm protrusions (26, 27) of the second connecting component (11) have secondary corresponding contact surfaces (30, 31), which are composed of some sections of the outer surface of the cylinder around the second axis (18) and are in contact with the secondary contact surfaces (15, 16) of the connecting body (12); and The arm protrusions (24, 25) of the first connecting component (10) are close to each other toward the free ends of the arm protrusions (24, 25) of the first connecting component (10) in some sections connected to the free ends of the arm protrusions (24, 25) of the first connecting component (10), and the arm protrusions (26, 27) of the second connecting component (11) are close to each other toward the free ends of the arm protrusions (26, 27) of the second connecting component (11) in some sections connected to the free ends of the arm protrusions (26, 27) of the second connecting component (11), The connecting body (12) has a main groove (19) in a plane perpendicular to the first axis (17), wherein a first clamping part (34) fixed to the first connecting part (10) extends into the main groove (19), and the connecting body (12) has a secondary groove (20) in a plane perpendicular to the second axis (18), wherein a second clamping part (35) fixed to the second connecting part (11) extends into the secondary groove (20), The connecting body (12) is clamped between the first clamping part (34) and the second clamping part (35).

2. The connection device according to claim 1, characterized in that The first clamping part (34) is arranged in a pin-shaped hole (36) on the first connecting part (10), and the second clamping part (35) is arranged in a pin-shaped hole (37) on the second connecting part (11).

3. The connection device according to claim 2, characterized in that The first clamping part (34) is inserted into the main groove (19) in a middle section of its longitudinal extension at least along a portion of its diameter, and the second clamping part (35) is inserted into the secondary groove (20) in a middle section of its longitudinal extension at least along a portion of its diameter.

4. The connection device according to claim 2 or 3, characterized in that: The hole (36) on the first connecting member (10) extends perpendicularly to the first axis (17), and the hole (37) on the second connecting member (11) extends perpendicularly to the second axis (18).

5. The connection device according to claim 1, characterized in that: The main groove (19) extends through the vertex (22) of the connecting body (12) facing the first connecting part (10), and extends at least along the area of ​​the main contact surface (14) connected to the vertex (22) of the connecting body (12) on the opposite side, and the secondary groove (20) extends through the vertex (23) of the connecting body (12) facing the second connecting part (11), and extends at least along the area of ​​the secondary contact surface (15, 16) connected to the vertex (23) of the connecting body (12) on the opposite side.

6. The connection device according to any one of claims 1 to 5, characterized in that: The middle sections of the first clamping part (34) and the second clamping part (35) are eccentric relative to the two end sections of the corresponding clamping part (34, 35).

7. The connection device according to any one of claims 1 to 5, characterized in that: The first clamping part (34) and the second clamping part (35) are designed as screw pins.

8. A vacuum valve having a closure member (1) carried by a valve stem (4), the closure member being movable between an open position, in which a valve opening (2) can be released, and a closed position, in which the valve opening (2) can be closed by the closure member (1), wherein: The closure element (1) is connected to the valve stem (4) via a connecting device, wherein the connecting device is configured according to any one of claims 1 to 7.

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