Working platform and lithography equipment

Abstract

The present application relates to a work platform for a lithography apparatus to support a workpiece. The lithography apparatus includes a frame and an optical device, and the frame is movable relative to the work platform. The work platform includes a platform and a pump body connected to the platform. The platform includes a platform body having a working surface and a support assembly disposed on the platform body. The support assembly is movable relative to the platform body in the height direction of the platform body and at least partially protrudes from the working surface to support the workpiece, or the upper end surface of the support assembly is parallel to or lower than the working surface, so that the workpiece is located on the working surface. By providing a support assembly on the platform, when using a lifting member to move the workpiece onto or away from the working surface of the platform, the support assembly supports the workpiece, so that there is a gap between the workpiece and the working surface, and the lifting member can be easily disengaged from the workpiece or inserted under the workpiece to support the workpiece. The operation is simple and labor-saving, and the loading and unloading of large-volume or heavy workpieces can be easily achieved, improving the practicability of the work platform.

Description

Technical Field

[0001] The present invention relates to a working platform and a lithography apparatus. Background Art

[0002] Lithography, that is, optical etching, is to irradiate light on a light-reactive material to cause the light-reactive material to react. Usually, light is irradiated on the light-reactive material according to a specific pattern to obtain a required structure. Lithography is generally also called exposure, and the apparatus for performing lithography is a lithography machine or an exposure machine.

[0003] Common objects to be lithographed are screen plates, dry films or glass coated with light-reactive materials. A screen plate is to fix a wire mesh on a wooden or steel frame and coat the wire mesh with a light-reactive material. After the screen plate undergoes exposure and subsequent processing, it can be used for printing fabrics. A dry film is a film coated with a light-reactive material and is usually used for manufacturing PCB boards. Glass coated with a light-reactive material is usually used for preparing display screens.

[0004] The weights of screen plates, dry films and glass are relatively light, and the work of handling and loading / unloading can be completed by 1-3 people. However, under some special requirements, the equipment needs to perform lithography on objects with large mass and volume, such as steel plates, marble, etc. The length and width dimensions of such objects are 2-3 meters and the weight exceeds 150 Kg. They cannot be transported by manual handling, loading / unloading vehicle or assembly line, so new equipment and processes are required for loading / unloading.

[0005] However, such objects cannot be hoisted by installing a lifting hook thereon and can only be handled by a lifting method. The lifting method is to lift a large steel plate upward with a lifting member at the bottom of the large steel plate or the like. However, when it is transported to the working platform, the lifting member cannot be directly separated from the large steel plate, resulting in the large steel plate unable to be placed on the platform. Summary of the Invention

[0006] The purpose of the present invention is to provide a working platform that can use the lifting method to realize the loading / unloading of large-volume or large-weight workpieces.

[0007] To achieve the above object, the present invention provides the following technical solution: A working platform for a lithography apparatus to support a workpiece. The lithography apparatus further includes a frame and an optical device installed on the frame. The frame can move relative to the working platform. The working platform includes a platform and a pump body connected to the platform. The platform includes a platform body having a working surface and a support assembly provided on the platform body. The support assembly can move relative to the platform body along the height direction of the platform body and at least partially protrudes from the working surface to support the workpiece, or the upper end surface of the support assembly is parallel to or lower than the working surface, so that the workpiece is located on the working surface.

[0008] Further, a receiving cavity is formed in the platform body, and the support assembly is disposed in the receiving cavity and is movable in the receiving cavity.

[0009] Further, the receiving cavity is a through hole penetrating the platform body or a groove provided on the working surface.

[0010] Further, the support assembly includes a support member movable relative to the platform body and a driving member for driving the support member to move, and the driving member is disposed below the working surface.

[0011] Further, the receiving cavity has an opening on the working surface, and when the upper end surface of the support member moves to the working surface, the opening can be blocked.

[0012] Further, the driving member is any one of a motor, a cylinder, and a hydraulic cylinder.

[0013] Further, at least two of the support assemblies are spaced apart.

[0014] Further, the platform further includes a plurality of air holes penetrating the platform body and communicating with the pump body, and a floating assembly is disposed in the air holes. The floating assembly is movable in the air holes and partially protrudes from the working surface to support the workpiece.

[0015] Further, the distance that the floating assembly protrudes from the working surface is less than the distance that the support assembly protrudes from the working surface.

[0016] The present invention also provides a lithography apparatus, including the working platform as described above.

[0017] The beneficial effects of the present invention are as follows: By providing a support assembly on the platform, when using a lifting member to move a workpiece to or from the working surface of the platform, the support assembly supports the workpiece, so that there is a gap between the workpiece and the working surface. The lifting member can be easily detached from the workpiece or inserted under the workpiece to support the workpiece. The operation is simple and labor-saving, and the loading and unloading of large-volume or heavy workpieces can be easily achieved, improving the practicability of the working platform.

[0018] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it in accordance with the content of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of a working platform shown in an embodiment of the present application;

[0020] Figure 2 is Figure 1Partial structural sectional view of the working platform;

[0021] Figure 3 Partial structural sectional view of the working platform when the workpiece is not covered and the pump body is blowing air;

[0022] Figure 4 Partial structural sectional view of the working platform when the workpiece is covered and the pump body is blowing air;

[0023] Figure 5 Partial structural sectional view of the working platform when the workpiece is not covered and the pump body is sucking air;

[0024] Figure 6 Partial structural sectional view of the working platform when the workpiece is covered and the pump body is sucking air;

[0025] Figure 7 Schematic structural view of the lifting member lifting the workpiece;

[0026] Figure 8 Schematic structural view of the support assembly supporting the workpiece;

[0027] Figure 9 Another schematic structural view of the support assembly supporting the workpiece;

[0028] Figure 10 Schematic structural view of the floating assembly supporting the workpiece;

[0029] Figure 11 Another schematic structural view of the working platform shown in an embodiment of the present application;

[0030] Figure 12 Schematic structural view of the edge pressing member and the abutting member away from the workpiece;

[0031] Figure 13 Schematic structural view of the edge pressing member and the abutting member approaching the workpiece;

[0032] Figure 14 Schematic structural view of the edge pressing member and the abutting member contacting the workpiece;

[0033] Figure 15 Schematic structural view of the lithography apparatus shown in an embodiment of the present invention. Detailed implementation manners

[0034] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0035] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred mechanism or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0036] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0037] Please refer to Figure 1 , the work platform 100 shown in an embodiment of the present application is used for a lithography device to support a workpiece 200 (such as Figure 8 shown), and it includes a platform 1 and a pump body (not shown) connected to the platform 1.

[0038] The platform 1 includes a platform body 11 and a plurality of air holes 12 that penetrate through the platform body 11 and are communicated with the pump body. The platform body 11 has a working surface 111 and a bottom surface 112 disposed opposite to the working surface 111, and the air holes 12 communicate the working surface 111 and the bottom surface 112. The platform body 11 is in the shape of a cuboid, and the shape and specific dimensions of the platform body 11 are not limited herein and can be set according to actual needs. The plurality of air holes 12 are arranged at equal intervals on the working surface 111, but not limited thereto. The plurality of air holes 12 can also be randomly arranged on the working surface 111. In this embodiment, the cross-section of the air hole 12 is circular, but not limited thereto. The cross-section of the air hole 12 can also be other shapes, which are not listed one by one herein. Regarding the specific number, specific dimensions of the air holes 12 and the distance between adjacent air holes 12, no specific limitations are made herein, and they can be set according to actual needs. The air holes 12 are communicated with the pump body. By starting the pump body, blowing or suction can be realized into the air holes 12. A chamber (not shown) communicating with the plurality of air holes 12 can be formed by surrounding the bottom surface 112 of the platform 1. This chamber can be connected to the pump body through a pipeline (not shown), so as to realize the pump body blowing or sucking air into the plurality of air holes 12 synchronously. The connection manners of the air holes 12 and the pump body are not listed one by one herein. It should be noted that the height direction of the platform 1 is as Figure 1 shown by the direction a in

[0039] Please refer to Figure 2, in this embodiment, in the height direction of the platform 1, the air hole 12 is provided with a first opening 121 and a second opening 122. The first opening 121 is formed on the working surface 111, and the second opening 122 is formed inside the platform body 11. Obviously, the air hole 12 is also provided with a third opening (not shown), and the third opening is formed on the bottom surface 112, so as to penetrate the platform body 11 through the first opening 121 and the third opening.

[0040] A floating component 13 is arranged in the air hole 12. The floating component 13 can move in the air hole 12 and partially protrude out of the working surface 111 to support the workpiece 200, and the floating component 13 can also move in the air hole 12 and block the air hole 12. Specifically, the floating component 13 can move to the first opening 121 and protrude out of the first opening 121 or move to the second opening 122 and block the second opening 122.

[0041] The floating component 13 includes a floating member 131 arranged between the first opening 121 and the second opening 122, an elastic member 132 for limiting the floating member 131 between the first opening 121 and the second opening 122, and a fixing member 133 connected to the platform body 11. The floating member 131 has an arc surface, and the arc surface faces the first opening 121 and can protrude out of the air hole 12 to support the workpiece 200. In this embodiment, the floating member 131 is a sphere. In other embodiments, the floating member 131 can also be an ellipse or an irregular structure with an arc surface at one end, which will not be listed one by one here. The maximum size of the floating member 131 is larger than the sizes of the first opening 121 and the second opening 122, so as to be limited between the two by the first opening 121 and the second opening 122. Specifically, when the floating member 131 is a sphere, the diameter of the sphere is larger than the sizes of the first opening 121 and the second opening 122.

[0042] The elastic member 132 can be a structure with elastic force such as a spring. The fixing member 133 and the floating member 131 are relatively arranged at both ends of the elastic member 132. The fixing member 133 is located at the third opening. The fixing member 133 can be integrally formed with the platform body 11 to simplify the structure. A channel 1331 communicating with the pump body and the air flow is formed on the fixing member 133, and the third opening is the opening of the channel 1331 on the bottom surface 112. In other embodiments, the fixing member 133 can also be fixedly connected to the platform body 11, which is not specifically limited here. The fixing member 133 can be a hollow cylinder structure or a hollow cuboid structure, etc., which will not be listed one by one here.

[0043] The elastic member 132 can be in abutting contact with the fixed member 133 and the floating member 131. Under the action of gravity, the elastic member 132 abuts against the fixed member 133, and the floating member 131 abuts against the elastic member 132, so that the floating member 131 is held between the first opening 121 and the second opening 122. One end of the elastic member 132 can also be fixedly connected to the fixed member 133, and the other end can be fixedly connected to the floating member 131.

[0044] When the pump body is not working, the elastic member 132 is in a natural state. The floating member 131 abuts against one end of the elastic member 132, and there is a first gap between the floating member 131 and the first opening 121, and a second gap between the floating member 131 and the second opening 122. That is, at this time, the floating member 131 does not block the first opening 121 and does not block the second opening 122 either. Starting the pump body can allow the air flow to circulate in the air hole 12.

[0045] Please refer to Figure 3 , if there is no workpiece 200 covering the upper part of the air hole 12, when the pump body is blowing air, the formed air flow enters the channel 1331 of the fixed member 133 from the third opening, then passes through the elastic member 132 and blows towards the floating member 131. Under the action of the air flow, the floating member 131 moves towards the first opening 121 and partially protrudes out of the air hole 12. That is, the floating member 131 protrudes out of the working surface 111 until the floating member 131 blocks the first opening 121 and then the floating member 131 stops moving. At this time, the workpiece 200 can be placed on the floating member 131, where the air flow direction is as shown by the arrow. After the pump body stops working, under the action of gravity, the floating member 131 moves towards the position of the second opening 122 and is located between the first opening 121 and the second opening 122 under the action of the elastic member 132.

[0046] Please refer to Figure 4 , if there is a workpiece 200 covering the upper part of the air hole 12, when the pump body is blowing air, the formed air flow enters the channel 1331 of the fixed member 133 from the third opening, then passes through the elastic member 132 and blows towards the floating member 131. Under the action of the air flow, the floating member 131 moves towards the first opening 121 and supports the workpiece 200 to move upward, so as to support the workpiece 200 and keep it away from the working surface 111 until the floating member 131 blocks the first opening 121 and then stops moving, where the air flow direction is as shown by the arrow. After the pump body stops working, under the dual action of gravity and the workpiece 200, the floating member 131 moves towards the position of the second opening 122 and is located between the first opening 121 and the second opening 122 under the action of the elastic member 132.

[0047] When the workpiece 200 is placed on the working surface 111 or removed from the working surface 111, the floating member 131 can support the workpiece 200. And when the mass and volume of the workpiece 200 are relatively large, such as steel plates, marble, etc., it cannot be manually carried. At this time, a lifting device is used, for example, a crane with a hook, to hook the workpiece 200 with the hook or lift the bottom of the workpiece 200 and place the workpiece 200 on the working surface 111. Since the floating member 131 protrudes from the working surface 111, it can support the workpiece 200. Because the top end of the floating member 131 is an arc structure, it is convenient to place the workpiece 200 and the workpiece 200 can be easily moved on the working surface 111. The operation is simple and labor-saving, avoiding damage to the workpiece 200 and the working surface 111 caused by direct contact and friction between the workpiece 200 and the working surface 111, and increasing the service life of the platform 1.

[0048] Please refer to Figure 5 , when the pump body is in the suction operation, the floating member 131 in the air hole 12 that does not support the workpiece 200 moves towards the second opening 122 and blocks the second opening 122, and a negative pressure is formed between the floating member 131 and the second opening 122. Specifically, when the pump body is in the suction operation, the formed air flow enters the air hole 12 from the first opening 121. Under the action of the air flow, the floating member 131 moves towards the second opening 122. At this time, the elastic member 132 is compressed, and the air flow passes through the channel 1331 of the fixing member 133 and enters the pump body from the third opening until the floating member 131 blocks the second opening 122, and then the floating member 131 stops moving. At this time, a negative pressure is formed between the floating member 131 and the second opening 122, thereby blocking the air hole 12. Among them, the air flow direction is as shown by the arrow. After the pump body stops working, the floating member 131 moves towards the position of the first opening 121 under the action of the elastic member 132 and moves to between the first opening 121 and the second opening 122.

[0049] Please refer to Figure 6 , if the workpiece 200 covers the upper part of the air hole 12, when the pump body is in the suction operation, since the workpiece 200 blocks the first opening 121, a negative pressure is immediately formed between the workpiece 200 and the first opening 121, and the floating member 131 remains in place. Under the action of the negative pressure, the workpiece 200 is firmly adsorbed on the working surface 111. After the pump body stops working, the negative pressure between the workpiece 200 and the first opening 121 disappears. Among them, the air flow direction is as shown by the arrow.

[0050] After the workpiece 200 is placed at the target position, the pump body can be switched to the air suction operation. The floating member 131 can move into the air hole 12 to obtain a flat working surface 111. The workpiece 200 is in close contact with the working surface 111. A negative pressure is immediately formed at the workpiece 200 and the first opening 121, and the workpiece 200 is adsorbed on the working surface 111. The floating member 131 in the air hole 12 that does not support the workpiece 200 moves in the air hole 12 and blocks the air hole 12, preventing air from continuously entering due to some air holes 12 not being covered by the workpiece 200, so that a negative pressure cannot be formed or the negative pressure is small, and the adsorption force is much smaller than the suction force of the pump body. Thus, the adsorption force of the pump body on the workpiece 200 is equal to or slightly less than the suction force of the pump body, enabling the workpiece 200 to be tightly adsorbed. Workpieces 200 of any size can be adsorbed, improving the practicability of the work platform 100. The workpiece 200 can be of any size and can be placed at any position on the working surface 111, and high-suction adsorption of the workpiece 200 can be achieved.

[0051] Please refer to Figure 7 , when the workpiece 200 can only be transported by lifting, since the lifting member 210 is located at the bottom of the workpiece 200 and the lifting member 210 has a certain height, the lifting member 210 cannot directly disengage from the workpiece 200, nor can it directly lift the bottom of the workpiece 200 to move the workpiece 200 away from the working surface, resulting in the workpiece 200 being unable to be placed on the platform 1.

[0052] Please refer to Figure 1 、 Figures 8 to 10 , in this embodiment, the platform 1 further includes a support assembly 14 provided on the platform body 11. The support assembly 14 is used to support the workpiece 200 so that there is a gap between the workpiece 200 and the working surface 111, and the height of this gap is greater than the height of the part of the lifting member 210 located below the workpiece 200, facilitating the lifting member 210 to withdraw or insert through the lower part of the workpiece 200. Obviously, the distance that the floating assembly 13 protrudes from the working surface 111 is less than the distance that the support assembly 14 protrudes from the working surface 111.

[0053] At least two support assemblies 14 can be provided and at least two support assemblies 14 are arranged separately to be able to support the workpiece 200. In order to stably support the workpiece 200, the number of support assemblies 14 is three, and the three support assemblies 14 form a triangular arrangement on the working surface 111, but it is not limited thereto. The number of support assemblies 14 can also be other numbers, which are not specifically limited herein. The layout of the support assemblies 14 on the platform body 11 can be set according to actual needs.

[0054] The support assembly 14 can move relative to the platform body 11 along the height direction a of the platform body 11 and at least partially protrude from the working surface 111 to support the workpiece 200, or the upper end surface of the support assembly 14 is parallel to or lower than the working surface 111, so that the workpiece 200 is located on the working surface 111. Specifically, the support assembly 14 includes a support member 141 that can move relative to the platform body 11 and a driving member 142 for driving the support member 141 to move. To distinguish the subsequent driving member, the driving member 142 is temporarily referred to as the fourth driving member 142. The fourth driving member 142 is arranged below the working surface 111. The fourth driving member 142 can be any one of a motor, a cylinder, and a hydraulic cylinder, but is not limited thereto, and can also be other devices capable of providing power, which will not be listed one by one here.

[0055] Specifically, a receiving cavity 113 is formed in the platform body 11, and the support assembly 14 is arranged in the receiving cavity 113 and can move in the receiving cavity 113. The receiving cavity 113 is a through hole penetrating the platform body 11 or a groove provided on the working surface 111. In this embodiment, the receiving cavity 113 is a through hole penetrating the platform body 11, the support member 141 is inserted through the platform body 11, and the fourth driving member 142 is arranged below the platform body 11.

[0056] The connection manner between the fourth driving member 142 and the support member 141 and the specific operation of the fourth driving member 142 for driving the support member 141 to protrude from the working surface 111 or enter the receiving cavity 113 are prior arts and will not be elaborated here.

[0057] The receiving cavity 113 has an opening 1131 on the working surface 111. When the upper end surface of the support member 141 moves to the working surface 111, the opening 1131 can be blocked. That is, when the support member 141 is received in the platform body 11, the through hole can be blocked, so as to avoid reducing the adsorption force on the workpiece 200 due to air leakage through the through hole during the subsequent air suction operation of the pump body.

[0058] In addition, in order to increase the contact area between the support member 141 and the workpiece 200, the top end of the support member 141 has a support portion 143, and the support portion 143 contacts the bottom surface of the workpiece 200, so as to improve the support stability of the support assembly 14.

[0059] The process of placing the workpiece 200 on the platform 1 is as follows: Please refer to Figure 8 , first start each fourth driving member 142 of the three support assemblies 14 to protrude the support member 141 from the working surface 111 and make the distance between the support portion 143 and the working surface 111 greater than the height of the part of the lifting member 210 located below the workpiece 200, then stop the fourth driving member 142, and place the workpiece 200 on the support member 141; Please refer to Figure 9, remove the lifting member 210, start the pump body to blow air, the floating member 131 moves towards the first opening 121 and partially protrudes from the working surface 111, and then start the fourth driving member 142 to drive the supporting member 141 to return to the receiving cavity 113. At this time, the floating member 131 supports the workpiece 200. When the workpiece 200 is removed from the platform 1, first protrude the supporting member 141 from the working surface 111, insert the lifting member 210 under the workpiece 200, move the workpiece 200 away, and then drive the supporting member 141 to return to the receiving cavity 113, as Figure 10 shown. The operation is simple, improving the operator's experience.

[0060] Please refer to Figures 11 to 14 , the platform 1 further includes at least one edge pressing member 15 provided on the platform body 11. The edge pressing member 15 can move relative to the platform body 11 to form a clamping notch with the platform body 11, so as to clamp the workpiece 200 on the working surface 111, avoiding the side of the workpiece 200 from warping and being unable to closely adhere to the working surface 111, resulting in problems such as air leakage and insecure adsorption when the platform 1 adsorbs.

[0061] The edge pressing member 15 includes a body portion 151 and an edge pressing portion 152 that can move relative to the platform body 11 along the height direction a of the platform body 11, and a first driving member (not shown) for driving the body portion 151 and the edge pressing portion 152 to move along the height direction a. The body portion 151 and the edge pressing portion 152 are connected. The body portion 151 and the edge pressing portion 152 can be integrally formed or separately provided. The edge pressing portion 152 is at least partially located above the workpiece 200. When the edge pressing member 15 clamps the workpiece 200, the body portion 151 is located on the side of the workpiece 200, and the edge pressing portion 152 is located above the workpiece 200. The edge pressing portion 152 can be a circular structure, but is not limited thereto, and can also be a square structure, etc. Since the edge pressing portion 152 will cover a part of the workpiece 200, causing the covered part to be unable to perform photolithography, the edge pressing portion 152 can be made of a transparent material, such as resin, high-strength glass, etc., so that light can pass through the edge pressing portion 152 and irradiate the surface of the workpiece 200 for photolithography.

[0062] The first driving member can drive the edge pressing portion 152 to move away from or close to the working surface 111. When the workpiece 200 moves to the clamping notch, in order to facilitate the workpiece 200 to enter the clamping notch, the first driving member can first drive the edge pressing portion 152 to move away from the working surface 111, increasing the size of the clamping notch in the height direction a, so as to easily move the workpiece 200 under the edge pressing portion 152. When the workpiece 200 moves into the clamping notch, the first driving member drives the edge pressing portion 152 to move towards the working surface 111, so as to tightly fit the workpiece 200 on the working surface 111. Obviously, the edge pressing member 15 can clamp workpieces 200 with various height dimensions, increasing the practicability of the working platform 1.

[0063] The first driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed one by one herein. The connection manner between the first driving member and the blank holding portion 152 and the specific operation of the first driving member driving the blank holding portion 152 to move are prior arts and will not be described in detail herein.

[0064] The flatness of the workpiece 200 is low. In particular, the middle is concave and the two sides are warped, and the two sides cannot be closely attached to the tabletop, which will cause air leakage when the platform 1 adsorbs the workpiece 200, resulting in insecure adsorption. In order to closely attach the workpiece 200 to the working surface 111, two blank holding members 15 may be provided. The two blank holding members 15 are respectively provided on both sides of the workpiece 200, but are not limited thereto. In other embodiments, multiple blank holding members 15 may be provided so that at least part of the four sides of the workpiece 200 are located in the clamping slots.

[0065] Taking two blank holding members 15 respectively provided on both sides of the workpiece 200 as an example for detailed description, the blank holding member 15 includes a first blank holding member 153 and a second blank holding member 154. The second blank holding member 154 can move relative to the first blank holding member 153 on the working surface 111 so that the first blank holding member 153 and the second blank holding member 154 are relatively abutted against both sides of the workpiece 200, that is, the first blank holding member 153 can move on the working surface 111. At this time, the second blank holding member 154 is fixedly provided on the working surface 111; or the second blank holding member 154 can move on the working surface 111. At this time, the first blank holding member 153 is fixedly provided on the working surface 111; or both the first blank holding member 153 and the second blank holding member 154 can move on the working surface 111. Thus, the distance between the first blank holding member 153 and the second blank holding member 154 is adjusted to be applicable to workpieces 200 of various lengths or widths.

[0066] Specifically, at least one slide rail 114 is provided on the platform body 11. The first blank holding member 153 and / or the second blank holding member 154 moves in the slide rail 114. A second driving member (not shown) connected to the first blank holding member 153 or the second blank holding member 154 is also provided on the platform body 11. The second driving member drives the first blank holding member 153 or the second blank holding member 154 to move in the slide rail 114. The second driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed one by one herein.

[0067] For the convenience of description, it is defined that the first blank holding member 153 is fixedly provided on the working surface 111, and the second blank holding member 154 can move on the slide rail 114. Please refer to Figure 12, when the workpiece 200 is placed on the working surface 111, the first blank holder 153 and the second blank holder 154 can both be away from the workpiece 200; move the workpiece 200 in the direction where the first blank holder 153 is located. When one side of the workpiece 200 moves to the clamping notch formed by the first blank holder 153 and the working surface 111, move the second blank holder 154 to the other side of the workpiece 200, and make at least a part of the workpiece 200 located in the clamping notch formed by the second blank holder 154 and the working surface 111.

[0068] After the workpiece 200 is placed on the working surface 111, it needs to be moved to the target position, which is generally located at the vertex of the working surface 111 for easy positioning. The first blank holder 153 can be placed outside the target position. When the workpiece 200 moves to the first blank holder 153, it reaches the target position.

[0069] Since the workpiece 200 is heavy, even if it is lifted by the floating assembly 13, it is still laborious to move manually. Therefore, the platform 1 further includes at least one abutting member 16 provided on the platform body 11. The abutting member 16 abuts against the workpiece 200 to limit the workpiece 200 on the working surface 111.

[0070] The abutting member 16 can be set to two, and the two abutting members 16 are respectively arranged on both sides of the workpiece 200, but not limited to this. In other embodiments, multiple abutting members 16 can be set and can be distributed at any position on the four sides of the workpiece 200.

[0071] Now, taking the two abutting members 16 respectively arranged on both sides of the workpiece 200 as an example for detailed description, the abutting member 16 includes a first abutting member 161 and a second abutting member 162. The second abutting member 162 can move relative to the first abutting member 161 on the working surface 111 so that the first abutting member 161 and the second abutting member 162 abut against both sides of the workpiece 200 relatively. That is, the first abutting member 161 can move on the working surface 111. At this time, the second abutting member 162 is fixedly arranged on the working surface 111; or, the second abutting member 162 can move on the working surface 111. At this time, the first abutting member 161 is fixedly arranged on the working surface 111, or both the first abutting member 161 and the second abutting member 162 can move on the working surface 111. Thus, the distance between the first abutting member 161 and the second abutting member 162 is adjusted to be applicable to workpieces 200 of various lengths or widths.

[0072] Specifically, at least one sliding groove 115 is provided on the platform body 11, and the first abutting member 161 and / or the second abutting member 162 move within the sliding groove 115. A third driving member (not shown) connected to the first abutting member 161 or the second abutting member 162 is also provided on the platform body 11, and the third driving member drives the first abutting member 161 or the second abutting member 162 to move within the sliding groove 115. The third driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed one by one herein.

[0073] For the convenience of description, it is defined that the first abutting member 161 is fixedly arranged on the working surface 111. The first abutting member 161 can be arranged outside the target position, and the second abutting member 162 can move on the sliding groove 115 to abut against the workpiece 200 and drive the workpiece 200 to move. Please refer to Figure 12 , when the workpiece 200 is placed on the working surface 111, both the first abutting member 161 and the second abutting member 162 can be away from the workpiece 200; when the third driving member is started, the second abutting member 162 moves towards the direction where the first abutting member 161 is located to abut against the workpiece 200 and drive the workpiece 200 to move, as Figure 13 shown; when one side of the workpiece 200 abuts against the first abutting member 161, it is okay, as Figure 14 shown.

[0074] The first abutting member 161 and the first edge pressing member 153 can be arranged at two side edges of the target position, so as to facilitate the second abutting member 162 to drive the workpiece 200 to move to the target position.

[0075] Please refer to Figure 15 In addition, the present invention also provides a lithography apparatus 001, which includes a machine base 300, a frame 400 arranged on the machine base 300, an optical device 500 arranged on the frame 400, and a working platform 100 arranged on the machine base 300 as shown above.

[0076] The frame 400 adopts the structure of a gantry. The frame 400 is slidably mounted on the machine base 300 along the X direction, and the frame 400 can be externally connected to a power device (not shown), so that the power device drives the frame 400 to move along the X direction on the machine base 300. The optical device 500 can move relative to the frame 400 along the Y direction and the Z direction, so that the position of the optical device 500 can be adjusted to realize the processing and lithography of the workpiece 200 located on the working platform 100. The installation method and movement method of the optical device 500 on the frame 400 are prior arts and will not be elaborated herein.

[0077] The optical device 500 includes a light source (not shown), a DMD (not shown), and a lens assembly (not shown). The light beam emitted by the light source is projected onto the DMD, reflected by the DMD, and then formed through the lens assembly and irradiated onto the workpiece 200 for etching processing. The structure of the optical device 500 is prior art and will not be elaborated here.

[0078] This application also provides a loading and unloading method for the work platform of the above-mentioned lithography equipment, and the method includes:

[0079] S1. Start the support assembly so that at least part of the support assembly protrudes from the working surface of the platform;

[0080] S2. Use the lifting member to move the workpiece to the working surface of the platform, and the support assembly supports the workpiece;

[0081] S3. Disconnect the lifting member from the workpiece;

[0082] S4. Open the pump body connected to the platform with a plurality of air holes, and the pump body blows air into the plurality of air holes, so that the floating assembly arranged in the air holes moves in the air holes and at least part of it protrudes from the working surface;

[0083] S5. Close the support assembly so that the upper end surface of the support assembly is parallel to or lower than the working surface, and the floating assembly supports the workpiece;

[0084] S6. Move the workpiece to the target position and fix the workpiece on the working surface;

[0085] S7. After the workpiece is processed, start the support assembly so that at least part of the support assembly protrudes from the working surface of the platform to support the workpiece;

[0086] S8. Insert the lifting member into the gap between the workpiece and the working surface to lift the workpiece and move the workpiece away from the work platform.

[0087] Among them, when the mass and volume of the workpiece are large, such as steel plates, marble, etc., it cannot be manually carried and it is difficult to move on the platform. The workpiece can be placed on the platform or removed from the platform using a lifting device. For example, a crane, the lifting member is connected to the lifting device, and the workpiece is lifted from the bottom using the lifting member and placed on the working surface.

[0088] The target position is located at the vertex of the working surface, such as the upper left corner, the lower left corner, etc. The setting of the target position facilitates the subsequent positioning of the workpiece during lithography by the lithography equipment.

[0089] The operation method for moving the workpiece to the target position is: the workpiece is located between the first abutting member and the second abutting member, and the first abutting member and / or the second abutting member are moved until the two sides of the workpiece respectively abut against the first abutting member and the second abutting member. There is no need for manual driving, and the operation is labor-saving and simple.

[0090] The operating method for fixing the workpiece on the working surface is as follows: Start the first pressing member and the second pressing member located on both sides of the workpiece. The first pressing member and the second pressing component respectively form clamping notches with the working surface, thereby clamping the workpiece on the working surface and preventing the side edges of the workpiece from warping, which may lead to poor adsorption performance.

[0091] The following is a detailed description of the loading and unloading method of the workbench with specific embodiments:

[0092] Step 1: Start the support component so that at least part of the support component protrudes from the working surface of the platform.

[0093] Step 2: Start the lifting equipment, use the lifting member to move the workpiece to the working surface of the platform, and the support component supports the workpiece.

[0094] Step 3: Disengage the lifting member from the workpiece.

[0095] Step 4: Open the pump body connected to the platform with a plurality of air holes. The pump body blows air into the plurality of air holes, causing the floating component disposed in the air holes to move in the air holes and at least part of it to protrude from the working surface.

[0096] Step 5: Close the support component so that the upper end surface of the support component is parallel to or lower than the working surface, and the floating component supports the workpiece.

[0097] Step 6: Start the second abutting member and the first pressing member to move on the working surface and drive the workpiece to move to the target position.

[0098] Step 7: Start the first pressing member and the second pressing member to fix the workpiece on the working surface.

[0099] Step 8: Start the pump body to suck air. The floating component moves in the air holes and enters the air holes. The workpiece covers part of the air holes and is adsorbed on the working surface. The floating components in the air holes that do not support the workpiece move in the air holes and block the air holes, and the pump body stably adsorbs the workpiece.

[0100] Step 9: The optical device of the lithography equipment positions the workpiece, and then starts the lithography process. After the workpiece is processed, start the support component so that at least part of the support component protrudes from the working surface of the platform to support the workpiece.

[0101] Step 10: Insert the lifting member into the gap between the workpiece and the working surface to lift the workpiece and move the workpiece away from the workbench, and close the support component so that the upper end surface of the support component is parallel to or lower than the working surface.

[0102] In summary, by setting up the supporting component on the platform, when the lifting component is used to move the workpiece to or from the working surface of the platform, the supporting component supports the workpiece, so that there is a gap between the workpiece and the working surface. The lifting component can be easily disengaged from the workpiece or inserted under the workpiece to support the workpiece. The operation is simple and labor-saving, and the loading and unloading of large-volume or heavy workpieces can be easily realized, improving the practicability of the working platform.

[0103] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0104] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent should be subject to the appended claims.

Claims

1. A working platform is used for a lithography apparatus to support a workpiece. The lithography apparatus further includes a frame and an optical device mounted on the frame. The frame is movable relative to the working platform. Characterized in that, The working platform includes a platform and a pump body connected to the platform. The platform includes a platform body having a working surface and a support assembly provided on the platform body. The support assembly is movable relative to the platform body in the height direction of the platform body and at least partially protrudes from the working surface to support the workpiece, or the upper end surface of the support assembly is parallel to or lower than the working surface, so that the workpiece is located on the working surface. The workpiece is moved above the working surface by a lifting member supporting its bottom. The support assembly is used to rise to lift the workpiece when the lifting member moves the workpiece above the working surface, so that the workpiece is disengaged from the lifting member.

2. The working platform according to claim 1, Characterized in that, A receiving cavity is formed on the platform body. The support assembly is disposed in the receiving cavity and is movable in the receiving cavity.

3. The working platform according to claim 2, Characterized in that, The receiving cavity is a through hole penetrating the platform body or a groove provided on the working surface.

4. The working platform according to claim 2, Characterized in that, The support assembly includes a support member movable relative to the platform body and a driving member for driving the support member to move. The driving member is disposed below the working surface.

5. The working platform according to claim 4, Characterized in that, The receiving cavity has an opening on the working surface. When the upper end surface of the support member moves to the working surface, the opening can be blocked.

6. The working platform according to claim 4, Characterized in that, The driving member is any one of a motor, a cylinder, and a hydraulic cylinder.

7. The working platform according to claim 1, Characterized in that, At least two of the support assemblies are arranged separately.

8. The working platform according to claim 1, Characterized in that, The platform further includes a plurality of air holes penetrating the platform body and communicating with the pump body. A floating assembly is disposed in the air holes. The floating assembly is movable in the air holes and partially protrudes from the working surface to support the workpiece.

9. The working platform according to claim 8, Characterized in that, The distance that the floating assembly protrudes from the working surface is less than the distance that the support assembly protrudes from the working surface.

10. A lithography apparatus, Characterized in that, It includes the working platform according to any one of claims 1 to 9.

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