A device and method for adjusting the concentricity between the tungsten filament and the fixed disk of an electron microscope

Abstract

The present invention provides a device and method for adjusting the concentricity of the tungsten filament of an electron microscope and a fixed disk, and specifically relates to the technical field of electron microscope inspection and maintenance. The device includes a bracket and a pair of chucks, the bracket beam body is horizontally arranged, the top surface of the beam body is provided with a pair of limit holes for fixing the filament feet of the tungsten filament, the bottom surface of the beam body is provided with a pair of protrusions for fixing the bracket and the fixed disk, the chucks are respectively arranged at both ends of the bracket, and are used to fix the bracket, including an upper clamping piece and a lower clamping piece, the upper clamping piece and the lower clamping piece are connected by a spring arranged therebetween, and the clamping ends of the upper clamping piece and the lower clamping piece are both provided with anti-slip pads. The present invention also provides a method for adjusting the concentricity of the tungsten filament of an electron microscope and a fixed disk, which realizes the rapid concentric alignment of the tungsten filament and the fixed disk, and does not require the experimenter to observe with the naked eye and have assembly experience, which greatly improves the accuracy of the concentricity operation of the tungsten filament and the fixed disk.

Description

Technical Field

[0001] The invention relates to the technical field of electron microscope inspection and maintenance, and in particular to a device and method for adjusting the concentricity of a tungsten filament and a fixed disk of an electron microscope. Background Art

[0002] At present, scanning electron microscopes, as a type of large-scale precision instrument, have been widely used in technical fields such as materials science, metallurgy, geology, biology and clinical medicine, and have played an important role in microscopic morphology observation and element analysis. As an important component of the thermal electron emission electron gun in the scanning electron microscope, the tungsten filament has extremely strict installation requirements. During the installation process, it is necessary to ensure that the top of the filament is aligned with the center of the fixing hole of the filament assembly fixing plate, that is, it is necessary to ensure that the top of the tungsten filament is concentric with the inner hole of the fixing plate. The concentricity of the top of the tungsten filament and the fixing hole of the fixing plate is the basis for ensuring high-quality imaging of the scanning electron microscope. At the same time, if the top of the tungsten filament is not concentric with the fixing plate, the service life of the tungsten filament will be greatly shortened due to the increase of bias or current compensation brightness.

[0003] Patent CN 110223900 A discloses an operation method for centering a tungsten filament of a scanning electron microscope using a stereo microscope, which specifically includes the following steps: first, by controlling the rotation angle of the centering adjustment screw, the deviation of the filament from the center of the grid hole is gradually reduced to prevent the tungsten filament from repeatedly deviating from the center during the adjustment process, thereby shortening the adjustment time; second, by setting a positioning ring on the work surface of the stereo microscope, combined with naked eye observation and manual positioning, it is ensured that the grid cap is always in the center of the stereo microscope field of view, greatly shortening the operation time for each observation of the tungsten filament centering effect; third, by quantifying and refining the operation actions, the tungsten filament is quickly and accurately centered. However, during the operation of the technical solution disclosed in the patent, the experimenter needs to adjust the four screws of the fixed disk by naked eye observation so that the ceramic seat is concentric with the fixed disk, thereby ensuring that the filament top of the tungsten filament is concentric with the fixing hole of the fixed disk. This operation process completely depends on the experimenter's own operation experience and requires the experimenter to have rich assembly experience. If the experimenter has insufficient assembly experience, it is impossible to quickly and accurately achieve the concentric operation of the tungsten filament and the fixed disk.

[0004] Therefore, it is urgent to provide a device and method for adjusting the concentricity of the electron microscope tungsten filament and the fixed disk, so that even if the experimenter lacks assembly experience, the concentricity of the electron microscope tungsten filament and the fixed disk can be achieved. Summary of the invention

[0005] The purpose of the present invention is to solve the above-mentioned deficiencies in the prior art and to provide a device and method for adjusting the concentricity of a tungsten filament of an electron microscope and a fixed disk.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] A device for adjusting the concentricity of a tungsten filament of an electron microscope and a fixed plate, comprising a bracket and a pair of chucks; the bracket is in a U-shaped structure, with chucks respectively arranged at both ends, the beam body of the bracket is arranged horizontally, a pair of limiting holes are arranged on the top surface of the beam body, and a pair of protrusions are arranged on the bottom surface;

[0008] The clamps are respectively arranged at both ends of the bracket and connected to the end surface of the bracket. The clamps include an upper clamp and a lower clamp. The upper clamp and the lower clamp are connected by a spring clamped therebetween. Anti-slip pads are arranged at the clamping ends of the upper clamp and the lower clamp.

[0009] Preferably, the limiting holes are symmetrically arranged along the center line of the beam body with the center of the top surface of the support beam body as the symmetry center, and the size of the limiting holes matches the size of the filament foot of the tungsten filament.

[0010] Preferably, the distance between the limiting holes is the same as the filament foot spacing of the tungsten filament.

[0011] Preferably, the protrusions are symmetrically arranged along the center line of the beam body with the bottom surface center of the support beam body as the symmetry center, matching the size of the groove arranged at the bottom open end of the fixing plate, and are used to be embedded in the groove.

[0012] Preferably, the height of the protrusion is the same as the depth of the groove body of the groove, and the length of the protrusion is not less than the length of the groove body of the groove.

[0013] Preferably, the distance between the protrusions is the same as the distance between the grooves at the open ends of the bottom of the fixing plate.

[0014] Preferably, the bracket and the clamp are both made of metal material.

[0015] Preferably, the length of the support beam body is not less than the length of the bottom opening end of the fixing plate.

[0016] Preferably, the bracket and the clamp are both detachable.

[0017] A method for adjusting the concentricity between a tungsten filament of an electron microscope and a fixed disk, using the above-mentioned device for adjusting the concentricity between a tungsten filament of an electron microscope and a fixed disk, specifically comprises the following steps:

[0018] Step 1, use special tweezers to clamp the two filament legs of the tungsten filament, pass the filament legs of the tungsten filament through the fixing holes set on the ceramic base, fix them on the ceramic base, and then pass the top of the filament legs of the tungsten filament through the limiting holes from the bottom surface of the beam body of the bracket, so that the filament legs of the tungsten filament are embedded in the limiting holes, and the filament tip of the tungsten filament is located on one side of the bottom surface of the beam body;

[0019] Step 2, placing the bracket above the bottom open end of the fixed plate, embedding the protrusion set at the bottom of the bracket beam body into the groove set at the bottom open end of the fixed plate, and then clamping the top surface of the fixed plate with a chuck, so that the bracket and the fixed plate are fixed, at this time, the filament tip of the tungsten filament coincides with the center of the fixing hole set on the top surface of the fixed plate, and the filament tip of the tungsten filament is concentric with the fixing hole of the fixed plate;

[0020] Step 3, fix the ceramic base to the fixed plate by rotating the screws set on the outer wall of the fixed plate, remove the bracket, and complete the concentric operation of the tungsten filament and the fixed plate.

[0021] Beneficial technical effects brought by the present invention:

[0022] The present invention proposes a device for adjusting the concentricity of an electron microscope tungsten filament and a fixed disk. The device can quickly align and overlap the filament tip of the electron microscope tungsten filament with the center of a fixing hole of the fixed disk, thereby realizing the concentric operation of the electron microscope tungsten filament and the fixed disk, so that even in the case of lack of assembly experience, the experimenter can quickly align the filament tip of the electron microscope tungsten filament with the center of the fixing hole of the fixed disk without relying on the experimenter's assembly experience, thereby reducing the error caused by the experimenter's naked eye observation, improving the accuracy of the concentric alignment operation of the filament tip of the electron microscope tungsten filament and the fixed disk, and greatly improving the efficiency of the experimental operation.

[0023] The present invention also proposes a method for adjusting the concentricity of the electron microscope tungsten filament and the fixed disk, which shortens the assembly time of the electron microscope, ensures that the filament tip of the tungsten filament is aligned with the center of the fixing hole of the fixed disk, and effectively guarantees the imaging quality of the electron microscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0025] Figure 2 It is a schematic diagram of the bottom structure of the support beam body of the present invention.

[0026] Figure 3 Schematic diagram of the tungsten filament of the present invention.

[0027] Figure 4 Schematic diagram of the fixed disk of the present invention.

[0028] In the figure: 1, bracket, 101, beam body, 102, limiting hole, 103, protrusion, 2, chuck, 201, upper clamp, 202, lower clamp, 203, spring, 3, ceramic seat, 4, tungsten filament, 401, filament foot, 402, filament tip, 5, fixing plate, 501, groove, 502, screw, 503, fixing hole, 504, top surface of fixing plate. DETAILED DESCRIPTION

[0029] It should be noted that the following detailed descriptions are illustrative and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0030] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0031] In the present invention, the directions or positional relationships indicated by terms such as "upper", "lower", "bottom", "top", etc. are based on the directions or positional relationships shown in the accompanying drawings. They are relational words determined only for the convenience of describing the structural relationships of the various parts or elements of the present invention. They do not specifically refer to any part or element in the present invention and cannot be understood as limitations on the present invention.

[0032] In the present invention, terms such as "connected" and "connection" should be understood in a broad sense, indicating that the connection can be fixed, integral or detachable; it can be directly connected or indirectly connected through an intermediate medium. Relevant scientific research or technical personnel in this field can determine the specific meaning of the above terms in the present invention according to specific circumstances, and they should not be understood as limiting the present invention.

[0033] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0034] The present invention provides a device for adjusting the concentricity between the tungsten filament of an electron microscope and a fixed disk, such as Figure 1As shown, it includes a bracket 1 and a pair of clamps 2. The bracket 1 is a U-shaped structure, and the clamps 2 for fixing the bracket are respectively arranged at both ends. The beam body 101 of the bracket 1 is arranged horizontally. On the top surface of the beam body 101, a pair of limiting holes 102 are symmetrically arranged along the center line of the beam body 101 with the center of the top surface as the symmetry center. The diameter of each limiting hole 102 is the same as the diameter of the filament foot 401 of the tungsten filament 4, and the distance between the two limiting holes 102 is the same as the distance between the two filament feet 401 of the tungsten filament, which are used to fix the filament feet of the tungsten filament; on the bottom surface of the beam body 103, a pair of limiting holes 102 are symmetrically arranged along the center line of the beam body 101 with the center of the bottom surface as the symmetry center. A pair of protrusions 103 are provided, and the protrusions 103 match the size of the grooves 501 provided at the bottom open end of the fixed plate 5, that is, the height of each protrusion 103 is the same as the groove body depth of the groove 501, and the length of the protrusion 103 is not less than the groove body length of the groove 501. In this embodiment, the groove 501 is symmetrically arranged along the horizontal axis of the opening end with the center of the bottom open end of the fixed plate 5 as the symmetry center. The distance between the protrusions 103 on the bottom surface of the beam body 101 of the bracket 1 is the same as the distance between the grooves 501 at the bottom of the fixed plate 5. The protrusions 103 can be embedded in the groove at the bottom open end of the fixed plate 5, so as to fix the bracket on the fixed plate.

[0035] The chuck 2 is respectively arranged at both ends of the bracket 1 and is welded to the end face of the bracket 1; the chuck 2 includes an upper clamping piece 201 and a lower clamping piece 202, and the upper clamping piece 201 and the lower clamping piece 202 are connected by a spring 203 clamped therebetween. The clamping ends of the upper clamping piece 201 and the lower clamping piece 202 are both provided with anti-slip pads to ensure the stability of the clamping of the chuck 2.

[0036] In this embodiment, the bracket 1 and the clamp 2 are both made of metal material. The bracket 1, the clamp 2, and the upper clamp 201 and the lower clamp 202 of the clamp are all detachable for easy maintenance and replacement at any time.

[0037] The present invention also proposes a method for adjusting the concentricity of the electron microscope tungsten filament and the fixed disk, using the above-mentioned device for adjusting the concentricity of the electron microscope tungsten filament and the fixed disk, specifically comprising the following steps:

[0038] Step 1, use special tweezers to clamp the two filament feet 401 of the tungsten filament 4, and pass the filament feet 401 of the tungsten filament 4 through the fixing holes set on the ceramic base 3 respectively, and fix the tungsten filament 4 on the ceramic base 3, and the filament tip 402 of the tungsten filament 4 is located below the ceramic base 3, and then the top of the filament foot 401 of the tungsten filament 4 passes through the limiting hole 102 from the bottom surface of the beam body 101 of the bracket 1, so that the filament feet 401 of the tungsten filament 4 are all embedded in the limiting holes 102 of the bracket 1, and at this time, the filament tip 402 of the tungsten filament 4 is located below the beam body 101 of the bracket 1.

[0039] Step 2, place the bracket 1 above the bottom open end of the fixed disk 5, align the center line of the bracket 1 beam 101 with the horizontal axis of the bottom open end of the fixed disk 5, embed the protrusion 103 at the bottom of the bracket 1 beam 101 into the groove 501 at the bottom open end of the fixed disk 5, and then clamp the top surface 504 of the fixed disk 501 with the chuck 2, so that the bracket 1 and the fixed disk 5 are fixed. At this time, the filament tip 402 of the tungsten filament 4 and the fixing hole 503 set on the top surface 504 of the fixing disk have the same center, and the filament tip 402 of the tungsten filament 4 is concentric with the fixing hole 503 of the fixed disk 5.

[0040] Step 3, fix the ceramic base 3 to the fixed plate 5 by rotating the screw 502 set on the outer wall of the fixed plate 5, remove the clamp 2 clamped on the top surface 504 of the fixed plate, remove the bracket 1, and complete the concentric operation of the tungsten filament and the fixed plate.

[0041] During use of the method of the present invention, the experimenter does not need to have assembly experience, and does not need to operate through naked eye observation. The efficiency of the concentric alignment of the tungsten filament and the fixed disk in the electron microscope and the accuracy of the concentric alignment operation are greatly improved, the assembly time of the electron microscope is effectively shortened, and the filament tip of the electron microscope tungsten filament and the center of the fixed hole of the fixed disk are quickly aligned, thereby ensuring the imaging quality of the electron microscope.

[0042] Although the above describes the specific implementation mode of the present invention in conjunction with the accompanying drawings, it is not a limitation of the present invention. Those skilled in the art should understand that various modifications or variations that can be made by those skilled in the art on the basis of the technical solution of the present invention without creative work are still within the protection scope of the present invention.

Claims

1. A device for adjusting the concentricity between the tungsten filament of an electron microscope and a fixed disk, characterized in that: The invention comprises a bracket (1) and a pair of clamps (2); the bracket (1) is in a U-shaped structure, with clamps (2) provided at both ends; the beam body (101) of the bracket (1) is arranged horizontally, a pair of limiting holes (102) are provided on the top surface of the beam body (101), and a pair of protrusions (103) are provided on the bottom surface; The clamping head (2) is respectively arranged at both ends of the bracket (1) and connected to the end surface of the bracket (1). The clamping head (2) comprises an upper clamping piece (201) and a lower clamping piece (202). The upper clamping piece (201) and the lower clamping piece (202) are connected via a spring (203) clamped therebetween. The clamping ends of the upper clamping piece (201) and the lower clamping piece (202) are both provided with anti-slip pads. The limiting hole (102) is symmetrically arranged along the center line of the beam body (101) with the center of the top surface of the support (1) as the symmetry center, and the size of the limiting hole (102) matches the size of the filament foot (401) of the tungsten filament (4); The distance between the limiting holes (102) is the same as the distance between the filament legs (401) of the tungsten filament (4); The protrusion (103) is symmetrically arranged along the center line of the beam body (101) with the bottom center of the support (1) as the symmetry center, and matches the size of the groove (501) arranged at the bottom open end of the fixing plate (5) for being embedded in the groove (501); The height of the protrusion (103) is the same as the depth of the groove (501), and the length of the protrusion (103) is not less than the length of the groove (501); The distance between the protrusions (103) is the same as the distance between the grooves (501) at the bottom opening end of the fixing plate (5).

2. The device for adjusting the concentricity between the tungsten filament of an electron microscope and a fixed disk according to claim 1, characterized in that: The bracket (1) and the clamp (2) are both made of metal material.

3. The device for adjusting the concentricity between the tungsten filament of an electron microscope and a fixed disk according to claim 1, characterized in that: The length of the beam body (101) of the support (1) is not less than the length of the bottom opening end of the fixing plate (5).

4. The device for adjusting the concentricity between the tungsten filament of an electron microscope and a fixed disk according to claim 1, characterized in that: The bracket (1) and the clamp (2) are both detachable.

5. A method for adjusting the concentricity of a tungsten filament of an electron microscope and a fixed disk, using the device for adjusting the concentricity of a tungsten filament of an electron microscope and a fixed disk as claimed in any one of claims 1 to 4, characterized in that: The specific steps include: Step 1, using special tweezers to clamp two filament legs (401) of the tungsten filament (4), respectively passing the filament legs (401) of the tungsten filament (4) through the fixing holes set on the ceramic base (3), and fixing them on the ceramic base (3), and then passing the top of the filament legs (401) of the tungsten filament (4) through the limiting hole (102) from the bottom surface of the beam body (101) of the bracket (1), so that the filament legs (401) of the tungsten filament (4) are embedded in the limiting hole (102), and the filament tip (402) of the tungsten filament (4) is located on one side of the bottom surface of the beam body (101); Step 2, placing the support (1) above the bottom open end of the fixed plate (5), embedding the protrusion (103) arranged at the bottom of the beam body (101) of the support (1) into the groove (501) arranged at the bottom open end of the fixed plate (5), and then clamping the top surface (504) of the fixed plate (501) with a clamp (2), so that the support (1) and the fixed plate (5) are fixed, at this time, the filament tip (402) of the tungsten filament (4) coincides with the center of the fixing hole (503) arranged on the top surface (504) of the fixed plate, and the filament tip (402) of the tungsten filament (4) is concentric with the fixing hole (503) of the fixed plate (5); Step 3, by rotating the screw (502) disposed on the outer wall of the fixing plate (5), the ceramic base (3) and the fixing plate (5) are fixed together, and the bracket (1) is removed to complete the concentric operation of the tungsten filament and the fixing plate.

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