A wafer scanning method, device, computer equipment and storage medium

Abstract

The embodiment of the present invention discloses a wafer disk scanning method, device, computer equipment and storage medium. The method includes: determining the position information of each grain on the wafer disk through visual recognition; determining the initial scanning area on the wafer disk according to the position information and starting scanning; determining the first movable state of the current scanning area according to the position information, and inserting the first movable state into a data recording container; determining the second movable state of the adjacent scanning area of ​​the current scanning area according to the position information; determining the next scanning area according to the movable state recorded in the data recording container and the second movable state, so as to go to the next scanning area to continue scanning, and insert the movable state of the next scanning area into the data recording container; then returning to re-determine the second movable state until all scanning areas are determined. There is no need to manually set the starting point and the end point, and the scanning of the position without grains and the large-scale movement of the equipment are avoided.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of grain sorting technology, and in particular to a wafer scanning method, device, computer equipment and storage medium. Background Art

[0002] With the rapid development of information, communication and optoelectronic industries, electronic products are gradually becoming more advanced and thinner. Under the demand for high speed, high frequency and miniaturization, wafer circuits are becoming more delicate and miniaturized. Crystal grains are the basic raw materials of general semiconductor components. They are extremely small in size and must be tested and screened before processing to ensure the good rate of semiconductor components.

[0003] In traditional scanning schemes for grain sorting, it is usually necessary to manually define the starting and ending points of the scan to determine the scanning range, and then use a bow-shaped path to perform row and column scanning within the determined scanning range. In order to ensure that no points are missed, all scannable points are scanned, including points without grains, which causes waste. Summary of the invention

[0004] The embodiments of the present invention provide a wafer disk scanning method, device, computer equipment and storage medium, which can adaptively generate a scanning path from any position with a grain without manually setting a starting point and an end point, and avoid scanning a position without a grain.

[0005] In a first aspect, an embodiment of the present invention provides a wafer scanning method, the method comprising:

[0006] Step A, determining the position information of each die on the wafer disk through visual recognition;

[0007] Step B, determining an initial scanning area on the wafer disk according to the position information, and starting scanning;

[0008] Step C, determining a first movable state of the current scanning area according to the position information, and inserting the first movable state into a data recording container;

[0009] Step D, determining a second movable state of a scanning area adjacent to the current scanning area according to the position information;

[0010] Step E: determine the next scanning area according to the movable state recorded in the data recording container and the second movable state, go to the next scanning area to continue scanning, and insert the movable state of the next scanning area into the data recording container; then return to execute step D until all scanning areas are determined.

[0011] Optionally, determining the first movable state of the current scanning area according to the position information includes:

[0012] Determine a boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera; wherein the boundary area includes a left boundary area, an upper boundary area, a right boundary area and a lower boundary area, and the positioning template is a positioning standard image of the grain;

[0013] It is identified whether there are grains in each of the boundary regions, and the first movable state is determined according to the identification result.

[0014] Optionally, determining the boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera includes:

[0015] The preset boundary width is obtained by multiplying the field of view width of the camera by the preset boundary width coefficient, and the preset boundary height is obtained by multiplying the field of view height of the camera by the preset boundary height coefficient;

[0016] The larger value of the preset boundary width and the width of the positioning template is determined as the width of the left boundary area and the right boundary area; the larger value of the preset boundary height and the height of the positioning template is determined as the height of the upper boundary area and the lower boundary area.

[0017] Optionally, before determining the larger value of the preset boundary width and the width of the positioning template as the width of the left boundary area and the right boundary area; and determining the larger value of the preset boundary height and the height of the positioning template as the height of the upper boundary area and the lower boundary area, the method further includes:

[0018] The width and height of the positioning template are adjusted according to the preset effective scanning area.

[0019] Optionally, the preset boundary width coefficient is 10%, the preset boundary height coefficient is 10%, and the preset effective scanning area is 80%.

[0020] Optionally, the first movable state includes:

[0021] If the value of the first movable state is a first preset value, it means that the current scanning area cannot be moved;

[0022] If the value of the first movable state is a second preset value, it means that the current scanning area can be moved to the adjacent scanning area on the left;

[0023] If the value of the first movable state is the third preset value, it means that the current scanning area can be moved to the upper adjacent scanning area;

[0024] If the value of the first movable state is a fourth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the right;

[0025] If the value of the first movable state is the fifth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the lower side;

[0026] If the value of the first movable state is not the first preset value, the second preset value, the third preset value, the fourth preset value and the fifth preset value, the value of the first movable state is split into the sum of at least two of the second preset value, the third preset value, the fourth preset value and the fifth preset value, and the adjacent scanning area to which the current scanning area can be moved is determined according to the preset values ​​obtained by the splitting.

[0027] Optionally, determining the next scanning area according to the movable state recorded in the data recording container and the second movable state includes:

[0028] The scanning points of the data recording container are traversed in reverse order; for each of the traversed scanning points, each adjacent scanning area that can be scanned corresponding to the movable state of the scanning point is traversed according to a preset sequence rule, and if the second movable state of the target adjacent scanning area is that movement is allowed, the target adjacent scanning area is determined as the next scanning area.

[0029] In a second aspect, an embodiment of the present invention further provides a wafer disk scanning device, the device comprising:

[0030] A position information determination module is used to determine the position information of each die on the wafer disk through visual recognition;

[0031] An initial scanning area determination module, used to determine an initial scanning area on the wafer disk according to the position information and start scanning;

[0032] A first movable state determining module, configured to determine a first movable state of a current scanning area according to the position information, and insert the first movable state into a data recording container;

[0033] A second movable state determining module, used to determine a second movable state of a scanning area adjacent to the current scanning area according to the position information;

[0034] A next scanning area determination module is used to determine the next scanning area according to the movable state recorded in the data recording container and the second movable state, so as to go to the next scanning area to continue scanning, and insert the movable state of the next scanning area into the data recording container; then return to the second movable state determination module to continue execution until all scanning areas are determined.

[0035] In a third aspect, an embodiment of the present invention further provides a computer device, the computer device comprising:

[0036] one or more processors;

[0037] A memory for storing one or more programs;

[0038] When the one or more programs are executed by the one or more processors, the one or more processors implement the wafer scanning method provided by any embodiment of the present invention.

[0039] In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the wafer disk scanning method provided by any embodiment of the present invention.

[0040] The embodiment of the present invention provides a wafer disk scanning method, firstly, the position information of each grain on the wafer disk is determined by visual recognition, then the initial scanning area on the wafer disk is determined according to the obtained position information, and the scanning is started, then the first movable state of the current scanning area is determined according to the obtained position information, and the first movable state is inserted into the data recording container, then the second movable state of the adjacent scanning area of ​​the current scanning area is determined according to the obtained position information, and then the next scanning area can be determined according to the movable state recorded in the data recording container and the second movable state, and the movable state of the next scanning area is inserted into the data recording container, and the next scanning area is used as the current scanning area to repeat the process of determining the second movable state of its adjacent area and the next scanning area, until all scanning areas are determined to complete the scanning of the entire wafer disk. The wafer disk scanning method provided by the embodiment of the present invention can scan automatically from any position with grains by adaptively determining the initial scanning area and generating a scanning path, without manually setting the starting point and the end point, and only the position with grains is scanned, and at the same time, the next scanning area is determined by the movable state of the adjacent scanning area each time, and a large range of movement can be avoided, thereby enhancing the stability of the device during scanning. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 A flowchart of a wafer disk scanning method provided in Embodiment 1 of the present invention;

[0042] Figure 2 A schematic diagram of the structure of a wafer disk scanning device provided in the second embodiment of the present invention;

[0043] Figure 3 This is a schematic diagram of the structure of a computer device provided in Embodiment 3 of the present invention. DETAILED DESCRIPTION

[0044] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0045] It should be mentioned before discussing the exemplary embodiments in more detail that some exemplary embodiments are described as processes or methods depicted as flow charts. Although the flow charts describe the steps as sequential processes, many of the steps therein can be implemented in parallel, concurrently or simultaneously. In addition, the order of the steps can be rearranged. The process can be terminated when its operation is completed, but can also have additional steps not included in the accompanying drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, etc.

[0046] Embodiment 1

[0047] Figure 1 This is a flow chart of a wafer scanning method provided in the first embodiment of the present invention. This embodiment is applicable to the case of scanning and sorting grains on a wafer. The method can be performed by a wafer scanning device provided in the embodiment of the present invention. The device can be implemented in hardware and / or software and can generally be integrated into a computer device. Figure 1 As shown, the specific steps include:

[0048] S11. Determine the position information of each crystal grain on the wafer disk through visual recognition.

[0049] Specifically, the grains in the area to be scanned can be detected by visual recognition, and the position information of each grain can be determined, wherein the area to be scanned can be a rectangular area and includes the complete wafer disk area. The grains are generally arranged in an array, neatly arranged in the vertical and horizontal directions, and have the same size, that is, for each grain, there may generally be only adjacent grains in the four directions of up, down, left and right. By determining the position information of each grain on the wafer disk, it can be determined whether there are adjacent grains for each grain, so as to further determine whether mobile scanning can be performed, etc. Among them, any existing visual recognition method can be used, and no specific limitation is made in this embodiment.

[0050] S12, determining an initial scanning area on the wafer disk according to the position information, and starting scanning.

[0051] Specifically, you can first move to any position on the wafer disk where there is a grain to start scanning. Specifically, after determining the position information of each grain, you can randomly select a grain as the starting point, or you can use the grain that is currently closest to the scanning device as the starting point to reduce the movement of the device and start the scanning process as soon as possible. You can also move the device to the position of the grain manually, etc. After determining the grain as the starting point, you can initialize each scanning area in the area to be scanned according to the position information of the grain and the size information of the positioning template to divide the area to be scanned into areas that adapt to the grain size. Each area may include a grain to complete the scanning of one grain each time, wherein the positioning template is the positioning standard image of the grain. After completing the division of the scanning area, the scanning area where the grain as the starting point is located can be used as the initial scanning area, and the scanning is started.

[0052] S13. Determine a first movable state of the current scanning area according to the position information, and insert the first movable state into a data recording container.

[0053] Specifically, after starting the scan, the current scan area, i.e., the initial scan area, can first determine whether there are adjacent grains to the grain as the starting point based on the obtained position information, that is, the movable state can be: if there are adjacent grains above the grain as the starting point, it can be moved upward; if there are adjacent grains to the left of the grain as the starting point, it can be moved to the left; if there are adjacent grains below the grain as the starting point, it can be moved below; if there are adjacent grains to the right of the grain as the starting point, it can be moved to the right. Therefore, the first movable state can be whether the current scan area can be moved in the four directions of up, left, down, and right. After determining the first movable state of the current scan area, the first movable state can be inserted into the data recording container to record it for subsequent use.

[0054] Wherein, optionally, the first movable state includes: if the value of the first movable state is a first preset value, it indicates that the current scanning area is immovable; if the value of the first movable state is a second preset value, it indicates that the current scanning area can be moved to the adjacent scanning area on the left; if the value of the first movable state is a third preset value, it indicates that the current scanning area can be moved to the adjacent scanning area on the upper side; if the value of the first movable state is a fourth preset value, it indicates that the current scanning area can be moved to the adjacent scanning area on the right side; if the value of the first movable state is a fifth preset value, it indicates that the current scanning area can be moved to the adjacent scanning area on the lower side; if the value of the first movable state is not the first preset value, the second preset value, the third preset value, the fourth preset value and the fifth preset value, the value of the first movable state is split into the sum of at least two of the second preset value, the third preset value, the fourth preset value and the fifth preset value, and the adjacent scanning area to which the current scanning area can be moved is determined according to the preset value obtained by the splitting. Specifically, the movable state of the current scanning area can be defined by a specific value for computer use. Exemplarily, the first preset value can be set to -1, the second preset value can be set to 1, the third preset value can be set to 2, the fourth preset value can be set to 4, and the fifth preset value can be set to 8, and the above preset values ​​can be accumulated to represent the movable state, that is, when the value of the first movable state is not the first preset value, the second preset value, the third preset value, the fourth preset value and the fifth preset value, the value of the first movable state can be split into the sum of at least two of the second preset value, the third preset value, the fourth preset value and the fifth preset value, and the adjacent scanning area to which the current scanning area can be moved is determined according to the preset values ​​obtained by the splitting. As exemplarily above, if the current scanning area can be moved in the four directions of left, up, right and down, the first movable state can be 1+2+4+8=15, and accordingly, 15 can only be split into 1+2+4+8. When the first movable state is 15, it can be determined that the current scanning area can move in the four directions of left, up, right and down. By setting the second preset value, the third preset value, the fourth preset value and the fifth preset value to 1, 2, 4 and 8 respectively, it can be ensured that the values ​​obtained by any accumulation are not repeated, so that the adjacent scanning area to which the current scanning area can be moved can be well determined according to the accumulated values. In addition, a sixth preset value can be set to represent a default state, that is, a state when scanning has not yet started, wherein the sixth preset value can be set to 0.

[0055] Optionally, determining the first movable state of the current scanning area according to the position information includes: determining a boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera; wherein the boundary area includes a left boundary area, an upper boundary area, a right boundary area and a lower boundary area, and the positioning template is a standard positioning image of the grain; identifying whether there is a grain in each of the boundary areas, and determining the first movable state according to the identification result.

[0056] Specifically, an image of the current scanning area can be first captured by a CCD camera, wherein the camera's field of view can be larger than the size of the scanning area, and at the same time, the position information can include the location of the center of the grain, and the camera's field of view can make the image of the current scanning area captured with the grain center as the camera's field of view center include part or all of the grains in the adjacent scanning areas in all directions, so that it can be determined whether there are adjacent grains based on the captured image. After the image of the current scanning area is captured by the camera, the boundary area can be adaptively determined in the image based on the size of the positioning template and the camera's field of view, so as to more accurately determine whether there are grains in the adjacent scanning areas. Wherein, the boundary area includes a left boundary area, an upper boundary area, a right boundary area, and a lower boundary area, and the first movable state of the current scanning area can be determined by respectively identifying whether there are grains in each boundary area.

[0057] Further optionally, the determining of the boundary area in the image of the current scanning area captured by the camera based on the size of the positioning template and the field of view of the camera includes: multiplying the field of view width of the camera by a preset boundary width coefficient to obtain a preset boundary width, and multiplying the field of view height of the camera by a preset boundary height coefficient to obtain a preset boundary height; determining the larger value of the preset boundary width and the width of the positioning template as the width of the left boundary area and the right boundary area; and determining the larger value of the preset boundary height and the height of the positioning template as the height of the upper boundary area and the lower boundary area.

[0058] Specifically, assuming that the width and height of the camera field of view are width and height respectively, the preset boundary width coefficient is rate0, the preset boundary height coefficient is rate1, and the width and height of the positioning template are wModel and hModel respectively, then first calculate the preset boundary width width*rate0 and the preset boundary height height*rate1 respectively, and then compare width*rate0 with wModel, and height*rate1 with hModel respectively, and determine the larger value as the width wMax of the left boundary area and the right boundary area, and the height hMax of the upper boundary area and the lower boundary area, to ensure that the grains in adjacent scanning areas can be included in each boundary area, wherein the preset boundary width coefficient and the preset boundary height coefficient may be the same. For each image, the upper left corner of the image can be taken as the coordinate origin, and the right side of the rectangular coordinate system is the positive direction of the horizontal axis, and the downward side is the positive direction of the vertical axis. The horizontal coordinate of the left boundary of the left boundary area is 0, the vertical coordinate of the upper boundary is 0, the horizontal coordinate of the right boundary is wMax, and the vertical coordinate of the lower boundary is height. The horizontal coordinate of the left boundary of the upper boundary area is 0, the vertical coordinate of the upper boundary is 0, the horizontal coordinate of the right boundary is width, and the vertical coordinate of the lower boundary is hMax. The horizontal coordinate of the left boundary of the right boundary area is width-wMax, the vertical coordinate of the upper boundary is 0, the horizontal coordinate of the right boundary is width, and the vertical coordinate of the lower boundary is height. The horizontal coordinate of the left boundary of the lower boundary area is 0, the vertical coordinate of the upper boundary is height-hMax, the horizontal coordinate of the right boundary is width, and the vertical coordinate of the lower boundary is height.

[0059] Further optionally, before determining the larger value of the preset boundary width and the width of the positioning template as the width of the left boundary area and the right boundary area; and determining the larger value of the preset boundary height and the height of the positioning template as the height of the upper boundary area and the lower boundary area, it also includes: adjusting the width and height of the positioning template according to the preset effective scanning area. Specifically, as exemplified above, before comparing the preset boundary width with the width of the positioning template, and the preset boundary height with the height of the positioning template, the width of the positioning template and the height of the positioning template can be first multiplied by the preset effective scanning area rate2, respectively, to adjust the size of the positioning template, that is, width*rate0 is compared with wModel*rate2, and height*rate1 is compared with hModel*rate2, respectively, to obtain wMax and hMax. Among them, optionally, the preset boundary width coefficient is 10%, the preset boundary height coefficient is 10%, and the preset effective scanning area is 80%, so as to avoid the problem of inaccurate adjacent grain recognition results caused by the small size of the positioning template.

[0060] S14. Determine a second movable state of a scanning area adjacent to the current scanning area according to the position information.

[0061] Specifically, the process of determining the second movable state can refer to the process of determining the first movable state as described above, and will not be repeated here. Among them, the adjacent scanning areas may include scanning areas in four directions: left, top, right and bottom. It can be understood that the first movable state is a movable state that needs to be recorded in the data recording container, and the second movable state is a movable state that does not yet need to be recorded in the data recording container. After the next scanning area is determined according to the second movable state, the movable state that needs to be recorded in the data recording container can be determined from the second movable state. In particular, when it is determined based on the position information that there is no grain in a certain adjacent scanning area, its second movable state may not be determined.

[0062] S15, determining the next scanning area according to the movable state recorded in the data recording container and the second movable state, moving to the next scanning area to continue scanning, and inserting the movable state of the next scanning area into the data recording container; then returning to execute step S14 until all scanning areas are determined.

[0063] Specifically, the movable state recorded in the data recording container is the movable state of the scanning area (including the current scanning area) that has been scanned, and the second movable state is the movable state of the adjacent scanning area of ​​the current scanning area (which may not include the scanning area that has been scanned). By determining the next scanning area according to the movable state recorded in the data recording container and the second movable state, the scanning path can be relatively concentrated, thereby reducing the movement of the scanning device. After determining the next scanning area, the next scanning area can be scanned, and the movable state of the next scanning area can be inserted into the data recording container, and the step S14 is returned to be executed. At this time, the current scanning area is updated to the next scanning area. The movable state of the next scanning area can be one of the second movable states of the adjacent scanning area of ​​the current scanning area. When the current scanning area is not the initial scanning area, the movable state of the next scanning area can also be one of the second movable states of the adjacent scanning area of ​​the scanning area that has been scanned. In particular, when the next scanning area cannot be determined based on the movable state and the second movable state recorded in the data recording container, that is, when no scannable area is found near all the scanning areas that have been scanned, the scanning is completed, that is, the complete scanning path is obtained.

[0064] Optionally, determining the next scanning area according to the movable state recorded in the data recording container and the second movable state includes: traversing the scanning points of the data recording container in reverse; for each of the traversed scanning points, traversing each adjacent scanning area that can be scanned corresponding to the movable state of the scanning point according to a preset sequence rule, and if the second movable state of the target adjacent scanning area is allowing movement, determining the target adjacent scanning area as the next scanning area.

[0065] Specifically, an iterative backoff scanning strategy may be used for scanning. Among them, the preset sequence rule may be the order of top, left, bottom, and right. Exemplarily, for the current scanning area, that is, the scanning area (scanning point) corresponding to the latest data inserted in the data recording container, the second movable state of the adjacent scanning area above it is first determined. If the second movable state is that movement is not allowed, then the second movable state of the adjacent scanning area to its left is then determined. If the second movable state of the adjacent scanning area above it is that movement is allowed, then the adjacent scanning area above it can be determined as the target adjacent scanning area, and then the target adjacent scanning area can be determined as the next scanning area, and then moved to the next scanning area to start a new round of judgment process. If the second movable states of the four adjacent scanning areas of the current scanning area (the scanning area that has been scanned can be removed during the judgment) are all determined to be not allowed to move, then one point can be retracted in the data recording container, that is, the previous scanning point of the current scanning area, and the second movable state of the target adjacent scanning area in the adjacent scanning area of ​​the scanning point (the scanning area that has been scanned can be removed) can be re-determined according to the preset sequence rules to determine whether there is a target adjacent scanning area whose second movable state is allowed to move. If there is, the target adjacent scanning area is determined as the next scanning area, and moved to the next scanning area to start a new round of judgment process. If it still does not exist, continue to retract until the target adjacent scanning area is determined. In particular, after traversing all the scanning points in the data recording container, if no scannable target adjacent scanning area is found, the entire scanning process is completed.

[0066] The technical solution provided by the embodiment of the present invention first determines the position information of each grain on the wafer disk through visual recognition, then determines the initial scanning area on the wafer disk according to the obtained position information, and starts scanning, then determines the first movable state of the current scanning area according to the obtained position information, and inserts the first movable state into the data recording container, then determines the second movable state of the adjacent scanning area of ​​the current scanning area according to the obtained position information, and then determines the next scanning area according to the movable state recorded in the data recording container and the second movable state, and inserts the movable state of the next scanning area into the data recording container, and uses the next scanning area as the current scanning area to repeat the process of determining the second movable state of its adjacent area and the next scanning area, until all scanning areas are determined to complete the scanning of the entire wafer disk. By adaptively determining the initial scanning area and generating the scanning path, it is possible to scan automatically from any position with grains without manually setting the starting point and the ending point, and only scan the position with grains. At the same time, the next scanning area is determined by the movable state of the adjacent scanning area each time, and a large range of movement can be avoided, thereby enhancing the stability of the device during scanning.

[0067] Embodiment 2

[0068] Figure 2 This is a schematic diagram of the structure of the wafer scanning device provided in the second embodiment of the present invention. The device can be implemented by hardware and / or software, and can generally be integrated into a computer device to execute the wafer scanning method provided in any embodiment of the present invention. Figure 2 As shown, the device comprises:

[0069] A position information determination module 21 is used to determine the position information of each grain on the wafer disk through visual recognition;

[0070] An initial scanning area determination module 22, used to determine an initial scanning area on the wafer disk according to the position information and start scanning;

[0071] A first movable state determining module 23, configured to determine a first movable state of a current scanning area according to the position information, and insert the first movable state into a data recording container;

[0072] A second movable state determining module 24, configured to determine a second movable state of a scanning area adjacent to the current scanning area according to the position information;

[0073] The next scanning area determination module 25 is used to determine the next scanning area according to the movable state recorded in the data recording container and the second movable state, so as to go to the next scanning area to continue scanning, and insert the movable state of the next scanning area into the data recording container; then return to the second movable state determination module to continue execution until all scanning areas are determined.

[0074] The technical solution provided by the embodiment of the present invention first determines the position information of each grain on the wafer disk through visual recognition, then determines the initial scanning area on the wafer disk according to the obtained position information, and starts scanning, then determines the first movable state of the current scanning area according to the obtained position information, and inserts the first movable state into the data recording container, then determines the second movable state of the adjacent scanning area of ​​the current scanning area according to the obtained position information, and then determines the next scanning area according to the movable state recorded in the data recording container and the second movable state, and inserts the movable state of the next scanning area into the data recording container, and uses the next scanning area as the current scanning area to repeat the process of determining the second movable state of its adjacent area and the next scanning area, until all scanning areas are determined to complete the scanning of the entire wafer disk. By adaptively determining the initial scanning area and generating the scanning path, it is possible to scan automatically from any position with grains without manually setting the starting point and the ending point, and only scan the position with grains. At the same time, the next scanning area is determined by the movable state of the adjacent scanning area each time, and a large range of movement can be avoided, thereby enhancing the stability of the device during scanning.

[0075] On the basis of the above technical solution, optionally, the first movable state determining module 23 includes:

[0076] A boundary area determination submodule, used to determine the boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera; wherein the boundary area includes a left boundary area, an upper boundary area, a right boundary area and a lower boundary area, and the positioning template is a positioning standard image of the grain;

[0077] The grain recognition submodule is used to recognize whether there are grains in each of the boundary regions, and determine the first movable state according to the recognition result.

[0078] Based on the above technical solution, optionally, the boundary area determination submodule includes:

[0079] A preset border size determining unit, configured to multiply the field of view width of the camera by a preset border width coefficient to obtain a preset border width, and to multiply the field of view height of the camera by a preset border height coefficient to obtain a preset border height;

[0080] A border size determination unit is used to determine the larger value of the preset border width and the width of the positioning template as the width of the left border area and the right border area; and to determine the larger value of the preset border height and the height of the positioning template as the height of the upper border area and the lower border area.

[0081] Based on the above technical solution, optionally, the boundary area determination submodule further includes:

[0082] A template size adjustment unit is used to adjust the width and height of the positioning template according to a preset effective scanning area before determining the larger value of the preset boundary width and the width of the positioning template as the width of the left boundary area and the right boundary area; and determining the larger value of the preset boundary height and the height of the positioning template as the height of the upper boundary area and the lower boundary area.

[0083] On the basis of the above technical solution, optionally, the preset boundary width coefficient is 10%, the preset boundary height coefficient is 10%, and the preset effective scanning area is 80%.

[0084] Based on the above technical solution, optionally, the first movable state includes:

[0085] If the value of the first movable state is a first preset value, it means that the current scanning area cannot be moved;

[0086] If the value of the first movable state is a second preset value, it means that the current scanning area can be moved to the adjacent scanning area on the left;

[0087] If the value of the first movable state is the third preset value, it means that the current scanning area can be moved to the upper adjacent scanning area;

[0088] If the value of the first movable state is a fourth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the right;

[0089] If the value of the first movable state is the fifth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the lower side;

[0090] If the value of the first movable state is not the first preset value, the second preset value, the third preset value, the fourth preset value and the fifth preset value, the value of the first movable state is split into the sum of at least two of the second preset value, the third preset value, the fourth preset value and the fifth preset value, and the adjacent scanning area to which the current scanning area can be moved is determined according to the preset values ​​obtained by the splitting.

[0091] On the basis of the above technical solution, optionally, the next scanning area determination module 25 is specifically used for:

[0092] The scanning points of the data recording container are traversed in reverse order; for each of the traversed scanning points, each adjacent scanning area that can be scanned corresponding to the movable state of the scanning point is traversed according to a preset sequence rule, and if the second movable state of the target adjacent scanning area is that movement is allowed, the target adjacent scanning area is determined as the next scanning area.

[0093] The wafer disk scanning device provided in the embodiment of the present invention can execute the wafer disk scanning method provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0094] It is worth noting that in the above-mentioned embodiment of the wafer disk scanning device, the various units and modules included are only divided according to functional logic, but are not limited to the above-mentioned division, as long as the corresponding functions can be achieved; in addition, the specific names of the functional units are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of the present invention.

[0095] Embodiment 3

[0096] Figure 3 The schematic diagram of the structure of the computer device provided for the third embodiment of the present invention shows a block diagram of an exemplary computer device suitable for implementing the implementation mode of the present invention. Figure 3 The computer device shown is only an example and should not limit the functions and scope of use of the embodiments of the present invention. Figure 3 As shown, the computer device includes a processor 31, a memory 32, an input device 33 and an output device 34; the number of processors 31 in the computer device can be one or more. Figure 3 Taking a processor 31 as an example, the processor 31, memory 32, input device 33 and output device 34 in the computer device can be connected through a bus or other means. Figure 3 The example of connecting through bus is taken in the following.

[0097] The memory 32 is a computer-readable storage medium that can be used to store software programs, computer executable programs and modules, such as program instructions / modules corresponding to the wafer disk scanning method in the embodiment of the present invention (for example, the position information determination module 21, the initial scanning area determination module 22, the first movable state determination module 23, the second movable state determination module 24 and the next scanning area determination module 25 in the wafer disk scanning device). The processor 31 executes various functional applications and data processing of the computer device by running the software programs, instructions and modules stored in the memory 32, that is, realizes the above-mentioned wafer disk scanning method.

[0098] The memory 32 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating system and at least one application required for a function; the data storage area may store data created according to the use of the computer device, etc. In addition, the memory 32 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some instances, the memory 32 may further include a memory remotely arranged relative to the processor 31, and these remote memories may be connected to the computer device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0099] The input device 33 can be used to obtain the required image through the CCD camera, and generate key signal input related to the user setting and function control of the computer device, etc. The output device 34 can include a display screen and other devices, which can be used to show the final scanning path and scanning effect to the user.

[0100] Embodiment 4

[0101] Embodiment 4 of the present invention further provides a storage medium containing computer executable instructions, wherein the computer executable instructions are used to execute a wafer scanning method when executed by a computer processor, the method comprising:

[0102] Step A, determining the position information of each die on the wafer disk through visual recognition;

[0103] Step B, determining an initial scanning area on the wafer disk according to the position information, and starting scanning;

[0104] Step C, determining a first movable state of the current scanning area according to the position information, and inserting the first movable state into a data recording container;

[0105] Step D, determining a second movable state of a scanning area adjacent to the current scanning area according to the position information;

[0106] Step E: determine the next scanning area according to the movable state recorded in the data recording container and the second movable state, go to the next scanning area to continue scanning, and insert the movable state of the next scanning area into the data recording container; then return to execute step D until all scanning areas are determined.

[0107] The storage medium may be any of various types of memory devices or storage devices. The term "storage medium" is intended to include: installation media, such as CD-ROM, floppy disk or tape device; computer system memory or random access memory, such as DRAM, DDR RAM, SRAM, EDO RAM, Rambus RAM, etc.; non-volatile memory, such as flash memory, magnetic media (such as hard disk or optical storage); registers or other similar types of memory elements, etc. The storage medium may also include other types of memory or combinations thereof. In addition, the storage medium may be located in the computer system in which the program is executed, or may be located in a different second computer system, which is connected to the computer system via a network (such as the Internet). The second computer system may provide program instructions to the computer for execution. The term "storage medium" may include two or more storage media that may reside in different locations (e.g., in different computer systems connected via a network). The storage medium may store program instructions (e.g., embodied as a computer program) that may be executed by one or more processors.

[0108] Of course, the computer executable instructions of a storage medium including computer executable instructions provided in an embodiment of the present invention are not limited to the operations of the method described above, but can also execute related operations in the wafer scanning method provided in any embodiment of the present invention.

[0109] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, which carry computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0110] The program code embodied on the computer readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.

[0111] Through the above description of the implementation methods, the technicians in the relevant field can clearly understand that the present invention can be implemented by means of software and necessary general hardware, and of course it can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as a computer floppy disk, read-only memory (ROM), random access memory (RAM), flash memory (FLASH), hard disk or optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, server, or network device, etc.) to execute the methods described in each embodiment of the present invention.

[0112] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A wafer scanning method, characterized in that: include: Step A, determining the position information of each die on the wafer disk through visual recognition; Step B, determining an initial scanning area on the wafer disk according to the position information, and starting scanning; Step C, determining a first movable state of the current scanning area according to the position information, and inserting the first movable state into a data recording container; Step D, determining a second movable state of a scanning area adjacent to the current scanning area according to the position information; Step E, determining the next scanning area according to the movable state recorded in the data recording container and the second movable state, moving to the next scanning area to continue scanning, and inserting the movable state of the next scanning area into the data recording container; then returning to step D until all scanning areas are determined; Wherein, determining the next scanning area according to the movable state recorded in the data recording container and the second movable state includes: The scanning points of the data recording container are traversed in reverse order; for each of the traversed scanning points, each adjacent scanning area that can be scanned corresponding to the movable state of the scanning point is traversed according to a preset sequence rule, and if the second movable state of the target adjacent scanning area is that movement is allowed, the target adjacent scanning area is determined as the next scanning area.

2. The wafer scanning method according to claim 1, characterized in that: The determining the first movable state of the current scanning area according to the position information includes: Determine a boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera; wherein the boundary area includes a left boundary area, an upper boundary area, a right boundary area and a lower boundary area, and the positioning template is a positioning standard image of the grain; It is identified whether there are grains in each of the boundary regions, and the first movable state is determined according to the identification result.

3. The wafer scanning method according to claim 2, characterized in that: Determining the boundary area in the image of the current scanning area captured by the camera according to the size of the positioning template and the field of view of the camera includes: The preset boundary width is obtained by multiplying the field of view width of the camera by the preset boundary width coefficient, and the preset boundary height is obtained by multiplying the field of view height of the camera by the preset boundary height coefficient; The larger value of the preset boundary width and the width of the positioning template is determined as the width of the left boundary area and the right boundary area; the larger value of the preset boundary height and the height of the positioning template is determined as the height of the upper boundary area and the lower boundary area.

4. The wafer scanning method according to claim 3, characterized in that: The larger value of the preset border width and the width of the positioning template is determined as the width of the left border area and the right border area; Before determining the larger value of the preset boundary height and the height of the positioning template as the height of the upper boundary area and the lower boundary area, the method further includes: The width and height of the positioning template are adjusted according to the preset effective scanning area.

5. The wafer scanning method according to claim 4, characterized in that: The preset boundary width coefficient is 10%, the preset boundary height coefficient is 10%, and the preset effective scanning area is 80%.

6. The wafer scanning method according to claim 2, characterized in that: The first movable state includes: If the value of the first movable state is a first preset value, it means that the current scanning area cannot be moved; If the value of the first movable state is a second preset value, it means that the current scanning area can be moved to the adjacent scanning area on the left; If the value of the first movable state is a third preset value, it means that the current scanning area can be moved to an upper adjacent scanning area; If the value of the first movable state is a fourth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the right; If the value of the first movable state is the fifth preset value, it means that the current scanning area can be moved to the adjacent scanning area on the lower side; If the value of the first movable state is not the first preset value, the second preset value, the third preset value, the fourth preset value and the fifth preset value, the value of the first movable state is split into the sum of at least two of the second preset value, the third preset value, the fourth preset value and the fifth preset value, and the adjacent scanning area to which the current scanning area can be moved is determined according to the preset values ​​obtained by the splitting.

7. A wafer scanning device, characterized in that: include: A position information determination module is used to determine the position information of each die on the wafer disk through visual recognition; An initial scanning area determination module, used to determine an initial scanning area on the wafer disk according to the position information and start scanning; A first movable state determining module, configured to determine a first movable state of a current scanning area according to the position information, and insert the first movable state into a data recording container; A second movable state determining module, used to determine a second movable state of a scanning area adjacent to the current scanning area according to the position information; a next scanning area determination module, configured to determine a next scanning area according to the movable state recorded in the data recording container and the second movable state, to proceed to the next scanning area for further scanning, and to insert the movable state of the next scanning area into the data recording container; and then to return to the second movable state determination module for further execution until all scanning areas are determined; Wherein, the next scanning area determination module is specifically used for: The scanning points of the data recording container are traversed in reverse order; for each of the traversed scanning points, each adjacent scanning area that can be scanned corresponding to the movable state of the scanning point is traversed according to a preset sequence rule, and if the second movable state of the target adjacent scanning area is that movement is allowed, the target adjacent scanning area is determined as the next scanning area.

8. A computer device, characterized in that: include: one or more processors; A memory for storing one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors implement the wafer scanning method as described in any one of claims 1 to 6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the wafer scanning method as described in any one of claims 1 to 6 is implemented.

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