Measuring device

Abstract

The present disclosure provides a measuring device capable of reducing damage to a sensor portion. The sensor portion (41) comprises a substrate (42), a pair of comb-tooth electrodes (43) and (44) disposed on a first main surface (42a), and a pair of back electrodes disposed on a second main surface and corresponding to the pair of comb-tooth electrodes, respectively. The pair of comb-tooth electrodes respectively comprise a plurality of teeth (52) to (56), (62) to (67), and connecting portions (51) and (61) for connecting the teeth to each other. The substrate comprises via-hole conductors (C1) and (C2) at positions corresponding to the teeth within an area (Ar1) within the pair of comb-tooth electrodes, wherein the area (Ar1) is surrounded by outer teeth (52), (62), (63) and connecting portions (51) and (61) located at both ends in the arrangement direction of the teeth (52) to (56), (62) to (67), and the via-hole conductors (C1) and (C2) connect the comb-tooth electrodes to the back electrodes.

Description

Technical Field

[0001] The present invention relates to a measuring device. Background Art

[0002] Conventionally, there is a measuring device for measuring an object by holding it with the hand of the person measuring the object, such as an oral moisture measuring device (for example, see Patent Documents 1 and 2). Such a measuring device has an electrostatic capacitance sensor unit at the front end of a probe unit, and the measuring surface of the sensor unit is pressed against a measuring surface such as the tongue mucosa of the object to measure the moisture content of the object.

[0003] The sensor unit of the measuring device of Patent Document 2 has a comb-tooth-shaped comb electrode provided on one main surface of a substrate and an amplifier circuit provided on the other main surface side of the substrate. Furthermore, the comb-tooth electrode of the sensor unit and the amplifier circuit are electrically connected via a conductive member provided in a via hole (contact hole) formed in the substrate.

[0004] Patent Document 1: International Publication No. 2004 / 028359

[0005] Patent Document 2: Japanese Patent Application Publication No. 2005-287547

[0006] However, in the sensor unit used in the above-mentioned measuring device, a pair of comb-tooth electrodes are provided on the main surface of the substrate, and when the measuring surface of the sensor unit is pressed against the measured surface for measurement, an external force (load) accompanying the pressing acts on the sensor unit, thereby causing a concern that the sensor unit may be damaged. Summary of the invention

[0007] The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a measuring device capable of reducing damage to a sensor portion.

[0008] A measuring device as one embodiment of the present invention includes a sensor unit, which includes: a substrate having a first main surface and a second main surface; a pair of comb-tooth electrodes arranged on the above-mentioned first main surface; and a pair of back electrodes arranged on the above-mentioned second main surface and corresponding to the above-mentioned pair of comb-tooth electrodes, respectively, each of the above-mentioned pair of comb-tooth electrodes having a plurality of teeth and a connecting portion connecting the teeth to each other, and the above-mentioned substrate has a conductive hole conductor at a position corresponding to the teeth in an area within the above-mentioned pair of comb-tooth electrodes, wherein the above-mentioned area is surrounded by teeth located at both ends in the arrangement direction of the above-mentioned plurality of teeth and the above-mentioned connecting portion of the above-mentioned pair of comb-tooth electrodes, and the above-mentioned conductive hole conductor connects the above-mentioned comb-tooth electrode and the above-mentioned back electrode.

[0009] According to this structure, by arranging the via hole conductor, which has many different types of interfaces and is easy to concentrate the influence of deformation caused by external force, at a position corresponding to the teeth in the area surrounded by the teeth located at both ends in the arrangement direction of the above-mentioned multiple teeth in a pair of comb-tooth electrodes and the above-mentioned connecting portion of the above-mentioned pair of comb-tooth electrodes, the via hole conductor is surrounded by the teeth and the connecting portion. As a result, compared with the case where the position of the via hole conductor is set at the connecting portion or the case where the position of the via hole conductor is set at the teeth located at both ends in the arrangement direction of the above-mentioned multiple teeth in the comb-tooth electrode, it is easy to disperse the external force, so that the external force acting on the comb-tooth electrode can be alleviated from the via hole conductor. In particular, by arranging the via hole conductor on the relatively inner side (center side), the effect of resisting external force can be improved, so that the damage to the sensor part can be reduced.

[0010] According to the measuring device of the present invention, there is an effect that damage to the sensor portion can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic side view of the measuring device in the first embodiment.

[0012] Figure 2 It is a schematic top view of the measuring device in this embodiment.

[0013] Figure 3 It is a schematic top view of the sensor unit in this embodiment.

[0014] Figure 4 It is a schematic rear view of the sensor unit in this embodiment.

[0015] Figure 5 It is a cross-sectional view of the sensor portion in this embodiment.

[0016] Figure 6 It is a schematic rear view of the sensor unit in the modification example.

[0017] Figure 7 It is a schematic top view of the sensor part in the reference example.

[0018] Figure 8 is a schematic cross-sectional view of the sensor portion in this reference example.

[0019] Fig. 9 It is a schematic cross-sectional view of a sensor unit in a modified example.

[0020] Fig.10 It is a schematic cross-sectional view of a sensor unit in a modified example.

[0021] Fig.11 It is a schematic cross-sectional view of a sensor unit in a modified example.

[0022] Fig.12It is a schematic cross-sectional view of a sensor unit in a modified example.

[0023] Fig.13 It is a schematic top view of the sensor unit in the modified example.

[0024] Fig.14 It is a schematic top view of the sensor unit in the modified example.

[0025] Fig.15 It is a schematic rear view of the sensor unit in the modification example.

[0026] Fig.16 1 is a schematic top view of the sensor unit in this modification example.

[0027] Fig.17 It is a schematic rear view of the sensor unit in the modification example.

[0028] Fig.18 1 is a schematic top view of the sensor unit in this modification example.

[0029] Fig.19 It is a schematic rear view of the sensor unit in the modification example.

[0030] Fig. 20 1 is a schematic top view of the sensor unit in this modification example.

[0031] Fig.21 It is a schematic plan view of a sensor unit in a modified example of the first embodiment.

[0032] Fig. 22 It is a schematic cross-sectional view of a sensor portion in a modified example of the reference example. DETAILED DESCRIPTION

[0033] Hereinafter, embodiments will be described with reference to the drawings.

[0034] In addition, the drawings may show components in an enlarged manner for easy understanding. Also, the dimensional ratios of components may be different from the actual ratios or ratios in other drawings.

[0035] (First Embodiment)

[0036] like Figure 1 As shown in FIG. 1 , the measuring device 10 includes a main body 11 and a cover 12 attached to the main body 11. The measuring device 10 is an oral moisture measuring device for measuring, for example, the amount of moisture in the oral cavity as a measurement object.

[0037] like Figure 1 as well as Figure 2 As shown, the main body 11 includes a gripping portion 21 at one end region in the longitudinal direction of the main body 11 , and a probe portion 31 at the other end region in the longitudinal direction of the main body 11 .

[0038] The grip 21 is formed in a substantially rectangular parallelepiped shape that is long in the same direction as the longitudinal direction of the body 11 and has an upper surface 21a, a lower surface 21b, side surfaces 21c, 21d, and end surfaces 21e, 21f. A display 22 that displays measurement results and the like is provided on the upper surface 21a of the grip 21.

[0039] The probe part 31 protrudes from one end surface 21e of the grip part 21. In the present embodiment, the probe part 31 includes a head part 32 and an arm part 33 connecting the head part 32 to the grip part 21.

[0040] The head portion 32 has a rectangular parallelepiped plate shape and includes a sensor portion 41 and an oscillation circuit portion 101 .

[0041] like Figure 3 to Figure 5 As shown in the figure, the sensor unit 41 includes: a substrate 42 having a substantially rectangular plate shape and having a first main surface 42a and a second main surface 42b, comb-tooth electrodes 43 and 44 provided on the first main surface 42a of the substrate 42, and back electrodes 45 and 46 provided on the second main surface 42b of the substrate 42. In this embodiment, two comb-tooth electrodes 43 and 44 and two back electrodes 45 and 45 are provided on the substrate 42 of the sensor unit 41. That is, the sensor unit 41 includes a pair of comb-tooth electrodes 43 and 44 and a pair of back electrodes 45 and 46. In addition, the comb-tooth electrodes 43 and 44 and the back electrodes 45 and 46 are made of a conductive material.

[0042] like Figure 3 As shown, one comb-tooth electrode 43 of the pair of comb-tooth electrodes 43 and 44 is configured to have a connecting portion 51 and a plurality of tooth portions 52 to 56 and to have a comb-tooth shape.

[0043] The connecting portion 51 of the comb-tooth electrode 43 is in a strip shape that is long in one direction. The connecting portion 51 of the comb-tooth electrode 43 extends, for example, in the arrangement direction of the plurality of teeth 52 to 56. The longitudinal direction of the connecting portion 51 is substantially consistent with the longitudinal direction of the body 11, for example.

[0044] The plurality of teeth 52 to 56 of the comb-tooth electrode 43 extend from the connection portion 51 in a direction perpendicular to the longitudinal direction of the connection portion 51. In other words, the teeth 52 to 56 are connected by the connection portion 51. The teeth 52 to 56 are provided with gaps in the longitudinal direction of the connection portion 51. In this embodiment, five teeth 52 to 56 are provided.

[0045] The other of the pair of comb-tooth electrodes 43 and 44 , the comb-tooth electrode 44 , includes a connecting portion 61 and a plurality of tooth portions 62 to 67 and is configured to have a comb-tooth shape.

[0046] The connecting portion 61 of the comb-tooth electrode 44 is in the shape of a strip that is long in one direction. The connecting portion 61 of the comb-tooth electrode 44 extends, for example, in the arrangement direction of the plurality of teeth 62 to 67. The connecting portion 61 is in the shape of a strip that is long in the same direction as the connecting portion 51 of the comb-tooth electrode 43. That is, the long side direction of the connecting portion 61 is substantially consistent with the long side direction of the body 11.

[0047] The plurality of teeth 62 to 67 of the comb-tooth electrode 44 extend from the connection portion 61 in a direction perpendicular to the longitudinal direction of the connection portion 61. In other words, the teeth 62 to 67 are connected by the connection portion 51. The teeth 62 to 67 are provided with gaps in the longitudinal direction of the connection portion 61. Six teeth 62 to 67 are provided in this embodiment. That is, the number of teeth 52 to 56 of the comb-tooth electrode 43 is different from the number of teeth 62 to 67 of the comb-tooth electrode 44.

[0048] In the following description, the teeth at both ends of the long-side direction of the connection portion 51 of the teeth 52 to 56 of the comb-tooth electrode 43 in the arrangement direction of the teeth 52 to 56 are referred to as the outer teeth 52, 53 of the comb-tooth electrode 43, and the teeth arranged between the two outer teeth 52, 53 in the arrangement direction of the teeth 52 to 56 are referred to as the inner teeth 54 to 56 of the comb-tooth electrode 43. Similarly, the teeth at both ends of the long-side direction of the connection portion 61 of the teeth 62 to 67 of the comb-tooth electrode 44 in the arrangement direction of the teeth 62 to 67 are referred to as the outer teeth 62, 63 of the comb-tooth electrode 44, and the teeth arranged between the two outer teeth 62, 63 in the arrangement direction of the teeth 62 to 67 are referred to as the inner teeth 64 to 67 of the comb-tooth electrode 44. The comb-tooth electrodes 43 and 44 are arranged so that a predetermined separation distance is formed between the teeth 52 to 56 of the comb-tooth electrode 43 and the teeth 62 to 67 of the comb-tooth electrode 44 .

[0049] For the teeth 52 to 56, 62 to 67 of the pair of comb-tooth electrodes 43 and 44 configured as described above, the outer teeth 52 of the comb-tooth electrode 43 and the outer teeth 62 of the comb-tooth electrode 44 in the outer teeth 52, 53, 62, 63 are arranged opposite to each other in the extending direction of the teeth. Although not limited to this, the distance between the ends of the outer teeth 52 and the ends of the outer teeth 62 (also referred to as the gap between the ends) may be the same or substantially the same as the separation distance specified above. Furthermore, the teeth 52 to 56, 62 to 67 of the pair of comb-tooth electrodes 43 and 44 are arranged in the order of the inner teeth 64, the inner teeth 54, the inner teeth 65, the inner teeth 55, the inner teeth 66, the inner teeth 56, the inner teeth 67, the outer teeth 53, and the outer teeth 63 from the outer teeth 52 and the outer teeth 62. That is, the inner teeth portions 54 to 56 , 64 to 67 and the outer teeth portion 53 are provided between the outer teeth portions 52 , 62 and the outer teeth portion 63 .

[0050] like Figure 5 As shown, each comb-tooth electrode 43, 44 is formed by laminating a plurality of metal layers 71, 72, 73, 74. That is, the connection portions 51, 61 and the teeth portions 52 to 56, 62 to 67 constituting the comb-tooth electrodes 43, 44 are each formed by laminating a plurality of metal layers 71, 72, 73, 74.

[0051] The first metal layer 71, which is the bottom layer (on the substrate 42 side) among the plurality of metal layers 71, 72, 73, and 74, is arranged substantially entirely along the groove 42c formed on the substrate 42. In addition, the groove 42c is formed, for example, according to the shape of each comb-tooth electrode 43, 44. The first metal layer 71 is made of, for example, silver (Ag). The second metal layer 72 is arranged to cover the entire first metal layer 71. The second metal layer 72 is, for example, a nickel (Ni) film having a thickness of approximately 5.0 μm. The third metal layer 73 is arranged to cover the entire second metal layer 72. The third metal layer 73 is, for example, a palladium (Pd) film having a thickness of approximately 0.15 μm. The fourth metal layer 74 is arranged to cover the entire third metal layer 73. The fourth metal layer 74 is, for example, a gold (Au) film having a thickness of approximately 0.07 μm. In addition, the thickness and material of the first metal layer 71, the second metal layer 72, the third metal layer 73, and the fourth metal layer 74 are only examples and can be changed arbitrarily.

[0052] like Figure 4 As shown, each of the pair of back electrodes 45 and 46 has a base portion 81 and an extension portion 82. The base portion 81 is configured to be rectangular. The extension portion 82 is configured to extend from the base portion 81. The back electrodes 45 and 46 are point-symmetrical shapes with the center point CP of the second main surface 42b of the substrate 42 as a reference. The base portion 81 is provided at a substantially central position in the long-side direction of the connecting portions 51 and 61 of the comb-tooth electrodes 43 and 44. The extension portion 82 extends in the same direction as the long-side direction of the connecting portions 51 and 61 of the comb-tooth electrodes 43 and 44.

[0053] like Figure 5 As shown, the back electrodes 45 and 46 are formed by laminating a plurality of metal layers 91, 92, 93, and 94. That is, the base portion 81 and the extension portion 82 constituting the back electrodes 45 and 46 are each formed by laminating a plurality of metal layers 91, 92, 93, and 94.

[0054] The first metal layer 91, which is the lowest layer (on the substrate 42 side) among the plurality of metal layers 91, 92, 93, 94, is provided substantially entirely along the groove 42d formed on the second main surface 42b of the substrate 42. The groove 42d is formed, for example, according to the shape of the back electrodes 45, 46.

[0055] The first metal layer 91 is composed of silver (Ag), for example. The second metal layer 92 is configured to cover the entire first metal layer 91. The second metal layer 92 is, for example, a nickel (Ni) film, and its thickness is about 5.0μm. The third metal layer 93 is configured to cover the entire second metal layer 92. The third metal layer 93 is, for example, a palladium (Pd) film, and its thickness is about 0.15μm. The fourth metal layer 94 is configured to cover the entire third metal layer 93. The fourth metal layer 94 is, for example, a gold (Au) film, and its thickness is about 0.07μm. In addition, the thickness and material of the first metal layer 91, the second metal layer 92, the third metal layer 93 and the fourth metal layer 94 are examples and can be changed arbitrarily.

[0056] The back electrode 45 constructed as described above is electrically connected to the comb-tooth electrode 43 through the via-hole conductor C1 filled in the via-hole V1 provided in the substrate 42. In addition, the back electrode 46 is electrically connected to the comb-tooth electrode 44 through the via-hole conductor C2 filled in the via-hole V2 provided in the substrate 42. Each via-hole conductor C1, C2 is called a conductive member or a via-hole filler filled in the via-hole V1, V2 provided in the substrate 42, respectively. The via-hole conductors C1, C2 and the first metal layers 71, 91 are made of the same metal. Therefore, the comb-tooth electrodes 43, 44 and the back electrodes 45, 46 can be compressed and molded, and the generation of useless pores in each electrode 43, 44, 45, 46 can be suppressed, and each electrode 43, 44, 45, 46 can be densely formed.

[0057] like Figure 5 As shown in FIG. 1 , each via hole V1 and V2 is a through hole that connects the first main surface 42a and the second main surface 42b of the substrate 42. In the following description, the positions of the via holes V1 and V2 can be referred to as the positions of the via hole conductors C1 and C2. Figure 3 As shown, the via holes V1 and V2 are provided at positions corresponding to the teeth 53 to 56, 64 to 67 in the area Ar1 in a pair of comb-tooth electrodes 43 and 44, wherein the area Ar1 is surrounded by the outer teeth 52, 62, 63 and the connecting parts 51 and 61 located at both ends in the arrangement direction of the teeth 52-56, 62-67. In the present embodiment, the via holes V1 and V2 are provided at positions corresponding to the front end portion 54a of the inner tooth portion 54 of the comb-tooth electrode 43 and the front end portion 67a of the inner tooth portion 67 of the comb-tooth electrode 44. In addition, the via holes V1 and V2 are provided at positions corresponding to the front end portion of the extension portion 82 of the above-mentioned back electrodes 45 and 46. Figure 3 In the example, the via holes V1 and V2 are not provided in the outer teeth 52 , 62 , 63 and the connecting parts 51 and 61 located at both ends in the arrangement direction of the teeth 52 - 56 , 62 - 67 in the pair of comb-tooth electrodes 43 and 44 .

[0058] like Figure 5As shown, the sensor portion 41 is provided with a protective layer 75 to integrally cover the entire comb-tooth electrodes 43 and 44 on the first main surface 42a of the substrate 42. The protective layer 75 is, for example, a polyimide layer or a layer containing polyimide, and has a thickness of about 10 μm.

[0059] like Figure 5 As shown, the oscillation circuit unit 101 is, for example, a CR oscillation circuit formed on a circuit substrate 102. The oscillation circuit unit 101 has electrodes 103 and 104, and the electrodes 103 and 104 are electrically connected to the back electrodes 45 and 46 by contact. The oscillation circuit unit 101 outputs an oscillation signal corresponding to the electrical signal from the sensor unit 41. Specifically, a transmission signal of a frequency corresponding to the capacitance value between the pair of comb-tooth electrodes 43 and 44 is output.

[0060] like Figure 1 as well as Figure 2 As shown, the oscillation circuit unit 101 is connected to the control circuit unit 111. The control circuit unit 111 is, for example, arranged in the gripping portion 21 and connected to the oscillation circuit unit 101 through the wiring 112. The control circuit unit 111 is a structure in which components such as a CPU are mounted on a control circuit substrate. The control circuit unit 111 detects the moisture content of the measurement object based on the number of pulses of the output signal of the oscillation circuit unit 101. In addition, the control circuit unit 111 displays the detected moisture content on the display unit 22.

[0061] like Figure 1 as well as Figure 2 As shown, the cover 12 includes a flat bag-shaped cover member 121 and a support member 122 mounted on the cover member 121. The cover member 121 and the support member 122 are made of a transparent or translucent resin. The cover 12 is mounted so that the cover member 121 covers the sensor part 41 at the front end of the probe part 31. The cover member 121 prevents the front end of the probe part 31, especially the measurement object, from directly contacting the sensor part 41.

[0062] The operation of this embodiment will be described.

[0063] In the measurement device 10 of the present embodiment, the moisture content in the oral cavity is measured by pressing the sensor portion 41 against the oral cavity (for example, the tongue) of a measurement target while the user is holding the grip portion 21 .

[0064] The sensor unit 41 of the measuring device 10 has via holes V1 and V2 set in the area Ar1 of the substrate 42 , and the via holes V1 and V2 are filled with via hole conductors C1 and C2 . That is, the via holes V1 and V2 are set at relatively central positions of the substrate 42 .

[0065] The effects of this embodiment will be described.

[0066] (1-1) The via hole conductors C1 and C2, where there are many different types of interfaces and the influence of deformation caused by external force is easily concentrated, are arranged at positions corresponding to the teeth 53 to 56, 64 to 67 in the area Ar1 in the pair of comb-tooth electrodes 43 and 44, wherein the area Ar1 is surrounded by the outer teeth 52, 62, 63 and the connecting parts 51 and 61 located at both ends in the arrangement direction of the teeth 52 to 56, 62 to 67, and the via hole conductors C1 and C2 are surrounded by at least the outer teeth 52, 62, 63 and the connecting parts 51 and 61. As a result, compared with the case where the via hole conductors C1 and C2 are positioned at the connecting parts 51 and 61 or at the outer teeth 52, 62, 63, it is easier to disperse the external force, so that the external force acting on the comb-tooth electrodes 43 and 44 can be relieved from the via hole conductors C1 and C2. Furthermore, by arranging the via-hole conductors C1 and C2 in the region Ar1 , the length of the extending portion 82 of the back electrodes 45 and 46 can be shortened, and the parasitic capacitance caused by the length of the extending portion 82 can be reduced.

[0067] (1-2) Since the pair of back electrodes 45 and 46 have a point-symmetrical shape, the external force acting on the back electrodes 45 and 46 via the comb-shaped electrodes 43 and 44 can be dispersed in a balanced manner.

[0068] (1-3) By embedding the first metal layer 71 of the comb-tooth electrodes 43 and 44 in the groove portion 42c of the substrate 42, the portion where the comb-tooth electrodes 43 and 44 are exposed from the first main surface 42a of the substrate 42 can be thinned. As a result, the step difference between the comb-tooth electrodes 43 and 44 and the first main surface 42a of the substrate 42 becomes smaller. As a result, the protective layer 75 that covers and protects the comb-tooth electrodes 43 and 44 can be formed more uniformly. In addition, by reducing the step difference, the content of air contained between the measurement object and the sensor portion 41 can be suppressed, and measurement deviation can be suppressed. In addition, by reducing the step difference, the stimulation when contacting the measurement object can be reduced.

[0069] In addition, in this example where the sensor unit 41 is covered by the cover 12, since air is contained between the cover 12 and the sensor unit 41, wrinkles and twists are generated in the cover 12, and measurement deviation is likely to occur. However, in this example, by reducing the step difference as described above, the content of air between the cover 12 and the sensor unit 41 can be suppressed, and the generation of wrinkles and twists on the cover 12 can be suppressed, so that measurement deviation can be suppressed.

[0070] In addition, by embedding the first metal layers 71 and 91 into the substrate 42, the adhesion strength between the electrodes 43, 44, 45, and 46 and the substrate 42 is improved, and interface peeling can be suppressed, so that the back electrodes 45 and 46 can be directly joined to the oscillation circuit unit 101. Therefore, the deviation of the measured value caused by the deviation of the parasitic capacitance of the wiring (deviation of the distance between the wirings and the wiring length during product assembly and measurement) due to the omission of the wiring can be suppressed. In addition, by eliminating the parasitic capacitance of the wiring, the sensitivity of the sensor unit 41 is also improved. In addition, since the sensor unit 41 and the oscillation circuit unit 101 can be arranged close to each other, the head 32 can be miniaturized (lighter and thinner), and it is easy to introduce it into the oral cavity.

[0071] Furthermore, in the present embodiment, since the first metal layer 71 is entirely buried in the groove portion 42 c of the substrate 42 , the above-mentioned effect can be more significantly obtained.

[0072] (1-4) Since the via holes V1 and V2 are set directly below the first metal layer 71 of the comb-tooth electrodes 43 and 44, the penetration of water such as saliva into the via holes V1 and V2 is suppressed, thereby suppressing interface peeling at the interface between the via hole conductors C1 and C2 in the via holes V1 and V2 and the substrate 42.

[0073] (1-5) By forming the first metal layer 71, 91 and the via hole conductors C1, C2 from the same metal, the comb-tooth electrodes 43, 44 and the back electrodes 45, 46 can be compressed and molded, and the generation of useless pores in each electrode 43, 44, 45, 46 can be suppressed, and they can be formed densely. As a result, it is possible to suppress the infiltration of moisture into the interface between the first metal layer 71, 91 and the via hole conductors C1, C2. In addition, by filling the via holes V1, V2 with the via hole conductors C1, C2, it is possible to suppress the infiltration of moisture into the via holes V1, V2. By suppressing the infiltration of moisture into the via holes V1, V2, the generation of a short circuit between the back electrode 45 and the back electrode 46, the generation of a short circuit in the circuit substrate 102 of the oscillation circuit unit 101, and the reduction, loss, and abnormal heat generation of the function as an oral moisture meter associated with the generation of a short circuit can be reduced. In addition, the dissolution and leakage of metals caused by accumulated moisture (such as saliva) and the infection associated with the accumulation of saliva can be suppressed.

[0074] (1-6) By setting the via holes V1 and V2 at positions corresponding to the front end portions of the extension portions 82 of the back electrodes 45 and 46, when the base portion 81 of the back electrodes 45 and 46 is welded, the extension portions 82 can be set so that the stress applied to the welded portions is difficult to be transmitted to the via holes V1 and V2.

[0075] (Reference example)

[0076] In the reference example, the same reference numerals as those in the first embodiment are used for the same components as those in the first embodiment, and part or all of the description thereof will be omitted.

[0077] like Figure 7 as well as Figure 8 As shown, the measuring device 10 of this reference example includes a sensor unit 131 and an oscillation circuit unit 101 similarly to the first embodiment.

[0078] The sensor portion 131 includes a pair of comb-shaped electrodes 43 and 44 provided on the first principal surface 42 a of the substrate 42 , and back surface electrodes 45 and 46 provided on the second principal surface 42 b of the substrate 42 .

[0079] The sensor unit 131 includes a wall portion 132 surrounding a pair of comb-tooth electrodes 43 and 44 on the first main surface 42a of the substrate 42. The wall portion 132 is formed by laminating a plurality of metal layers 133, 134, 135, and 136, similarly to the comb-tooth electrodes 43 and 44. That is, the wall portion 132 has the same structure as the pair of comb-tooth electrodes 43 and 44.

[0080] The first metal layer 133, which is the lowest layer (on the substrate 42 side) among the plurality of metal layers 133, 134, 135, and 136, is substantially entirely provided along the groove portion 42e formed on the substrate 42. In addition, the groove portion 42e is formed in a quadrangular frame shape, for example, according to the shape of the wall portion 132. The first metal layer 133 is composed of, for example, silver (Ag). The second metal layer 134 is provided to cover the entire first metal layer 133. The second metal layer 134 is, for example, a nickel (Ni) film having a thickness of approximately 5.0 μm. The third metal layer 135 is provided to cover the entire second metal layer 134. The third metal layer 135 is, for example, a palladium (Pd) film having a thickness of approximately 0.15 μm. The fourth metal layer 136 is provided to cover the entire third metal layer 135. The fourth metal layer 136 is, for example, a gold (Au) film having a thickness of approximately 0.07 μm. In addition, the thickness and material of the first metal layer 133 , the second metal layer 134 , the third metal layer 135 , and the fourth metal layer 136 are just examples and can be changed arbitrarily.

[0081] The protruding length of the wall portion 132 from the first main surface 42 a is substantially equal to the protruding length of the comb-shaped electrodes 43 and 44 from the first main surface 42 a .

[0082] like Figure 7As shown, each via hole V1, V2 is a through hole connecting the first main surface 42a and the second main surface 42b of the substrate 42. The via holes V1, V2 are provided at positions corresponding to the teeth 52 to 56, 62 to 67 in the area Ar2 surrounded by the wall portion 132. In this reference example, similarly to the first embodiment, the via holes V1, V2 are provided at positions corresponding to the front end portion 54a of the inner tooth portion 54 of the comb-tooth electrode 43 and the front end portion 67a of the inner tooth portion 67 of the comb-tooth electrode 44. In addition, the via holes V1, V2 are provided at positions corresponding to the front end portions of the extension portions 82 of the above-mentioned back electrodes 45, 46.

[0083] like Figure 8 As shown, the sensor portion 131 is provided with a protective layer 137 to integrally cover the comb-tooth electrodes 43 and 44 and the entire wall portion 132 on the first main surface 42a of the substrate 42. The protective layer 137 is, for example, a polyimide layer or a layer containing polyimide, and has a thickness of about 10 μm.

[0084] The function of this reference example is described.

[0085] In the measuring device 10 of this reference example, the moisture content in the oral cavity is measured by pressing the sensor portion 131 against the oral cavity (for example, the tongue) as a measurement object while the user holds the grip portion 21 .

[0086] The sensor section 131 of the measuring device 10 sets via holes V1 and V2 at positions corresponding to the teeth 52 to 56 and 62 to 67 in the area Ar2 surrounded by the wall section 132 of the substrate 42, and the via hole conductors C1 and C2 are filled in the via holes V1 and V2. That is, the via holes V1 and V2 are set at relatively central positions of the substrate 42.

[0087] Effects of this reference example are described below. In this reference example, in addition to the effects (1-2) to (1-5) of the first embodiment described above, the following effects are achieved.

[0088] (2-1) Since the wall portion 132 provided on the first main surface 42a surrounds the pair of comb-tooth electrodes 43 and 44, the external force acting on the comb-tooth electrodes 43 and 44 can be received by the wall portion 132, so that the damage to the sensor portion 131 can be reduced. In addition, it is considered that the end of the sensor portion 131 is pressed against the oral mucosa in the oral cavity where visual confirmation is difficult. In this case, the strength of the sensor portion 131 can be improved by the wall portion 132 arranged on the outside of the sensor portion 131, so the damage to the sensor portion 131 can be reduced.

[0089] (2-2) Since the wall portion 132 has the same structure as the pair of comb-shaped electrodes 43 and 44, the wall portion 132 can be formed in the same method and at the same timing as the comb-shaped electrodes 43 and 44. In other words, compared with the case of forming the wall portion separately, an increase in the number of steps can be suppressed.

[0090] (2-3) The protruding length of the wall portion 132 from the first main surface 42 a is substantially equal to the protruding length of the comb-shaped electrodes 43 , 44 from the first main surface 42 a . Therefore, the wall portion 132 and the comb-shaped electrodes 43 , 44 can suppress the level difference on the surface of the protective layer 137 .

[0091] (Other embodiments)

[0092] In addition, the above-mentioned embodiment and reference example can be modified and implemented as follows. The above-mentioned embodiment and reference example and the following modification examples can be combined and implemented with each other within the range that there is no technical contradiction.

[0093] In the above-mentioned embodiment and reference example, the number of teeth 52 to 56 of the comb-tooth electrode 43 is set to 5, and the number of teeth 62 to 67 of the comb-tooth electrode 44 is set to 6, but these numbers can be changed as appropriate. For example, the number of teeth of the comb-tooth electrode 43 and the number of teeth of the comb-tooth electrode 44 can be set to the same.

[0094] In the first embodiment described above, the surface of the first metal layer 71 of the comb-tooth electrodes 43 and 44 is set to be substantially on the same level as the first main surface 42a of the substrate 42, but the present invention is not limited thereto. For example, a structure in which a portion of the first metal layer 71 protrudes from the first main surface 42a of the substrate 42 and a portion of the first metal layer 71 is buried and arranged in the substrate 42 may be adopted. In addition, a structure in which the entire first metal layer 71 is arranged on the first main surface 42a of the first substrate 42 may be adopted.

[0095] In the first embodiment, the base portion 81 is provided at a substantially central position in the longitudinal direction of the connecting portions 51 and 61 of the substrate 42, but the present invention is not limited thereto. Figure 6 As shown, the base portion 81 may be provided at a position of the substrate 42 that is offset from the substantially central position in the longitudinal direction of the connecting portions 51 and 61. In this way, the position of the base portion 81 can be changed as appropriate.

[0096] In the above reference example, the wall portion 132 and the comb-teeth electrodes 43 and 44 have the same structure, but the wall portion 132 and the comb-teeth electrodes 43 and 44 may have different structures.

[0097] Furthermore, the protruding length of the wall portion 132 from the first main surface 42 a is configured to be substantially equal to the protruding length of the comb-shaped electrodes 43 and 44 from the first main surface 42 a , but they may be different.

[0098] In the above-mentioned reference example, a structure is adopted in which the wall portion 132 is provided only on the first main surface 42 a side, but the present invention is not limited to this.

[0099] like Fig. 9 As shown, the sensor portion 141 may include a wall portion 142 on the second main surface 42 b side. Fig. 9 The wall portion 142 is shown to be of the same construction as the wall portion 132 .

[0100] Although not particularly mentioned in the above-mentioned embodiment and reference example, it is preferable that the protective layer 75 or 137 has a structure thinner than the thickness of the substrate 42. By adopting such a structure, the sensitivity of the sensor unit 41 can be improved.

[0101] In the above-mentioned embodiment and reference example, the protective layers 75 and 137 are made of polyimide, but are not limited thereto. For example, the protective layers 75 and 137 may be made of the same material as the substrate 42, and the relative dielectric constant of the protective layers 75 and 137 may be made equal to or higher than the relative dielectric constant of the substrate 42. As an example of the same material as the substrate 42, for example, a mixture of glass and ceramics can be cited.

[0102] As described above, since the protective layer is a mixture of glass and ceramics, oxidation of the comb-tooth electrodes 43 and 44 can be suppressed by covering the comb-tooth electrodes 43 and 44. In addition, by using the same material for the protective layer and the substrate 42, the protective layer and the substrate 42 can be closely connected, and moisture can be suppressed from entering from the interface between the protective layer and the substrate 42.

[0103] In the above-mentioned embodiment, reference example and each modified example, the oscillation circuit unit 101 and the sensor units 41, 131, 141 are directly connected by direct contact of electrodes, but the present invention is not limited to this. Fig.10 The structure shown.

[0104] like Fig.10 As shown, the electrodes 103 and 104 of the oscillation circuit portion 101 and the back electrodes 45 and 46 may be connected via conductors 151 and 152 which may be wiring. Fig.10 The structure shown is Fig. 9 The modified examples shown are shown as a basis, but the first embodiment and the reference example may be used as a basis.

[0105] In the above-mentioned embodiment and reference example, the comb-tooth electrodes 43 and 44 are formed by stacking a plurality of metal layers 71, 72, 73, and 74. Fig.11 As shown, the comb-tooth electrodes 43 and 44 may be formed of only a single metal layer (conductor layer).

[0106] exist Fig.11In the structure of the sensor section 161 shown, the substrate 162 is stacked so as to cover the comb-teeth electrodes 43 and 44. The substrate 162 preferably has a relative dielectric constant equal to or greater than the relative dielectric constant of the substrate 42, for example.

[0107] like Fig.12 As shown, a structure in which a resin member 163 is stacked on the substrate 162 may be adopted. By covering the substrate 162 with the resin member 163, the rigidity can be improved.

[0108] The positions of the via holes V1 and V2 shown in the above embodiment and reference example are examples and may be appropriately changed within the regions Ar1 and Ar2. As a modification of the above reference example, for example, the via holes V1 and V2 may be provided directly below the connection portions 51 and 61.

[0109] like Fig.13 As shown, the via hole V1 may be provided just below the branch point between the connecting portion 51 and the tooth portion 56 , and the via hole V2 may be provided just below the branch point between the connecting portion 61 and the tooth portion 65 .

[0110] like Fig.14 As shown, the via hole V1 may be provided just below the branch point between the connecting portion 51 and the outer tooth portion 52 , and the via hole V2 may be provided just below the branch point between the connecting portion 61 and the outer tooth portion 63 .

[0111] As described above, by providing the via holes V1 just below the branching points with the teeth in the connection portions 51 and 61 , stress generated by external force acting on the comb-tooth electrodes 43 and 44 can be easily dispersed in the branching directions.

[0112] In the above-mentioned embodiment and reference example, the back electrodes 45 and 46 are composed of the rectangular base portion 81 and the extension portion 82 extending from the base portion 81, but the present invention is not limited thereto. Fig.15 As shown, a pair of back electrodes 181, 182 may also be rectangular. That is, the structure in which the extension portion 82 of the back electrodes 45, 46 in the above-mentioned embodiment and reference example is omitted may also be used. In addition, the back electrodes 181, 182 are similar to the structure in which the base portion 81 of the back electrodes 45, 46 in the above-mentioned embodiment and reference example is rotated 90° around the center point CP. Therefore, the vias V1, V2 located directly below the back electrodes 181, 182 are also changed compared with the above-mentioned embodiment and reference example.

[0113] like Fig.16 As shown, the via hole V1 of this example is provided at a mid-lengthwise position (eg, a longitudinally central position) of the tooth portion 54. The via hole V2 of this example is provided at a mid-lengthwise position (eg, a longitudinally substantially central position) of the tooth portion 67.

[0114] In the above-mentioned embodiments and reference examples, the back electrodes 45 and 46 may be Fig.15 The back electrodes 181 and 182 are square, but they may also be Fig.17 The back electrodes 191 and 192 shown in the figure are rectangular. Fig.10 As shown, wiring can be used as the conductors 151 and 152 connecting the substrate 42 and the circuit substrate 102, but in this case, the two wirings (conductors 151 and 152) connecting the back electrodes 45 and 46 and the oscillation circuit unit 101 are preferably arranged at equal distances (i.e., equal lengths) and equal angles (e.g., symmetrical postures). In this regard, when the back electrodes 45 and 46 are rectangular, the two via hole conductors C1 and C2 can be as far away from each other as possible, and the two wirings (conductors 151 and 152) connecting the back electrodes 45 and 46 and the oscillation circuit unit 101 are arranged in a shape close to equal distances (i.e., equal lengths) and equal angles (e.g., symmetrical postures), which is conducive to improving the degree of freedom in design.

[0115] In the above-described embodiment and reference example, the back surface electrode 45 and the back surface electrode 46 are formed to have a point-symmetrical shape with respect to the central point CP, but the present invention is not limited thereto.

[0116] like Fig.17 As shown, the back electrode 191 and the back electrode 192 may be configured to be line symmetrical about a virtually set reference line BL on the second main surface 42b of the substrate 42. Here, when the rectangular plate-shaped substrate 42 is viewed from a direction orthogonal to the second main surface 42b, and the reference line BL is set to pass through the center of a pair of opposite sides, the back electrode 191 and the back electrode 192 are configured to be line symmetrical about the reference line BL as described above, so that the external force acting on the back electrodes 191 and 192 via the comb-tooth electrodes 43 and 44 can be evenly dispersed.

[0117] like Fig.17 as well as Fig.18 As shown, in this example, the via hole V1 arranged just below the back electrode 191 is provided at a position corresponding to the front end portion 55a of the tooth portion 55 of the comb-tooth electrode 43. The via hole V2 arranged just below the back electrode 192 is provided at a position corresponding to the front end portion 67a of the tooth portion 67 of the comb-tooth electrode 44. In this case, the via holes V1 and V2 may not be arranged at line-symmetrical positions centered on the reference line BL.

[0118] In addition, if Fig.19As shown in FIG. 1 , the base 201a of the back electrode 201 and the base 202a of the back electrode 202 may be point-symmetrical with respect to the center point CP, and the extension 201b of the back electrode 201 and the extension 202b of the back electrode 202 may be non-point-symmetrical. More specifically, the extension length of the extension 201b of the back electrode 201 and the extension length of the extension 202b of the back electrode 202 may be different. In addition, the extension direction of the extension 201b of the back electrode 201 and the extension direction of the extension 202b of the back electrode 202 may be the same direction.

[0119] like Fig.19 as well as Fig. 20 As shown, in this example, the via hole V1 arranged just below the back electrode 201 is provided at a position corresponding to the front end portion 54a of the tooth portion 54 of the comb-tooth electrode 43. The via hole V2 arranged just below the back electrode 202 is provided at a position corresponding to the front end portion 64a of the tooth portion 64 of the comb-tooth electrode 44. In this case, the via holes V1 and V2 may not be arranged at point-symmetrical positions with respect to the center point CP.

[0120] In the above-mentioned embodiment and reference example, the distance between the end of the outer tooth portion 52 and the end of the outer tooth portion 62 (the gap between the ends) can be changed appropriately. Fig.14 as well as Fig. 20 As shown, the distance between the end of the outer tooth portion 52 and the end of the outer tooth portion 62 may be greater than that in the above-mentioned embodiment and the reference example.

[0121] In the above-mentioned embodiment and reference example, the extension direction of the extension portion 82 of the back electrodes 45 and 46 is along the long side direction of the connecting portions 51 and 61 of the comb-tooth electrodes 43 and 44, but the extension direction of the extension portion 82 may be set to a direction intersecting the long side direction of the connecting portions 51 and 61. As an example, a structure may be adopted in which the extension direction of the extension portion 82 is along a direction orthogonal to the long side direction of the connecting portions 51 and 61 of the comb-tooth electrodes 43 and 44 (the extension direction of the teeth 52 to 56, 62 to 67).

[0122] In the above-mentioned embodiment and reference example, the long side direction of the main body 11 is roughly consistent with the long side direction of the connecting parts 51 and 61 of the comb-tooth electrodes 43 and 44, but the long side direction of the main body 11 and the long side direction of the connecting parts 51 and 61 of the comb-tooth electrodes 43 and 44 may be intersected.

[0123] In the above embodiment and reference example, the oscillator circuit unit 101 is provided in the head portion 32 of the probe portion 31, but the position of the oscillator circuit unit 101 may be changed as appropriate. That is, the oscillator circuit unit 101 may be provided in the arm portion 33 of the probe portion 31 or the grip portion 21.

[0124] In the above-described embodiment and reference example, the oscillation circuit portion 101 and the control circuit portion 111 are configured separately, but the oscillation circuit portion 101 and the control circuit portion 111 may be formed on the same substrate, for example.

[0125] ·like Fig.21 As shown in FIG. 1 , a wall portion 50 may be provided on the first principal surface 42a of the sensor portion 41 of the above-mentioned embodiment, the wall portion 50 protruding from the first principal surface 42a and surrounding the periphery of the comb-tooth electrodes 43 and 44. In this case, since the periphery of the comb-tooth electrodes 43 and 44 is surrounded by the wall portion 50, the external force acting on the comb-tooth electrodes 43 and 44 can be received by the wall portion 50, and the external force acting on the comb-tooth electrodes 43 and 44 can be reduced. The horizontal line of the top of the wall portion 50 and / or the protruding height of the wall portion 50 from the first principal surface 42a can be determined so that the external force acting on the comb-tooth electrodes 43 and 44 can be reduced. For example, the horizontal line of the top of the wall portion 50 may coincide with the horizontal line of the top of the comb-tooth electrodes 43 and 44, and the protruding height of the wall portion 50 from the first principal surface 42a may be the same as the protruding height of the comb-tooth electrodes 43 and 44 from the first principal surface 42a. The wall portion 50 may have the same structure as the wall portion 132 of the reference example, or may be modified as in various modified examples of the reference example.

[0126] exist Fig.21 In the illustrated modification, the via hole conductors C1 and C2 are provided inside the wall portion 50 and at positions corresponding to one or more teeth (e.g., 54 and 67) of the teeth 53 to 56, 64 to 67 in the region Ar1 surrounded by the outer teeth 52, 62, 63 and the connecting portions 51 and 61 located at both ends in the arrangement direction of the teeth 52 to 56, 62 to 67 in the pair of comb-tooth electrodes 43 and 44. The via hole conductors may not be provided in the outer teeth 52, 62, 63 and the connecting portions 51 and 61 located at both ends in the arrangement direction of the teeth 52 to 56, 62 to 67 in the pair of comb-tooth electrodes 43 and 44.

[0127] If the via hole conductors C1 and C2 are arranged at the tip end portion of one or more teeth in the region Ar1 (for example Figure 3 as well as Fig.21 The front end portions 54a, 67a, Fig.18 The front end portions 55a, 67a, Fig. 20By forming the front end portions 54a, 64a of the via-hole conductors C1 and C2, the distance between the via-hole conductors C1 and C2 can be increased, and even when stress is applied to the via-hole conductors C1 and C2, the stress applied to the entire substrate 42 can be dispersed.

[0128] In a structure where the wall portions 132 and 142 are provided on the first main surface 42a and the second main surface 42b of the substrate 42, respectively (for example, Fig. 9 as well as Fig.10 ), the wall portions 132 and 142 may both be conductive. A via conductor electrically connecting the wall portion 132 and the wall portion 142 may also be provided on the substrate 42. For example, Fig. 22 In the example shown, both the wall portions 132 and 142 are conductive, and the wall portions 132 and 142 are electrically connected via a via conductor C3 provided on the substrate 42. The wall portion 142 of the second main surface 42b is connected to the ground electrode 105 provided on the circuit substrate 102 via a conductor 153. By the electrical conduction between the wall portions 132 and 142 of the sensor portion 40 and the ground electrode 105, static electricity applied to the sensor portion 40 from the external environment of the sensor portion 40 can be released to the ground electrode 105 of the circuit substrate 102 through the wall portions 132 and 142, thereby improving the resistance of the sensor portion 40 or the measuring device 10 to static electricity. As a result, the reliability of the measuring device 10 is improved. Fig. 22 In the example, the conductor 153 may be, for example, a wiring.

[0129] exist Fig. 22 In the example shown, the conductors 151, 152, and 153 are omitted, and the back electrodes 45, 46 of the second main surface 42b and the wall portion 142 can be respectively joined to the electrodes 103, 104 and the ground electrode 105 of the oscillation circuit portion 101 via solder, or can be directly in contact with the electrodes 103, 104 and the ground electrode 105 of the oscillation circuit portion 101, respectively.

[0130] In the above embodiment and reference example, the measuring device for measuring the moisture content in the oral cavity is described, but the moisture content may be measured outside the oral cavity. In addition, the cover 12 is not essential, and the sensor part 41 may be directly pressed against the measurement object to measure the moisture content.

[0131] The above embodiments and reference examples are measuring devices for measuring water content, but they can also be measuring devices for measuring other contents. For example, they can also be measuring devices such as pH measuring devices and oral bacteria measuring devices. In addition, they can also be measuring devices for measuring blood flow and blood oxygen. In addition, they can also be measuring devices for measuring multiple measurement values.

[0132] The present disclosure includes the following configuration examples.

[0133] [Structural Example 1] A measuring device, comprising a sensor unit, the sensor unit comprising: a substrate having a first main surface and a second main surface; a pair of comb-tooth electrodes provided on the first main surface; and a pair of back electrodes provided on the second main surface and corresponding to the pair of comb-tooth electrodes, respectively.

[0134] The sensor unit further includes a wall portion on the first main surface, the wall portion protruding from the first main surface and surrounding the pair of comb-tooth electrodes.

[0135] The substrate has a conducting hole at a position corresponding to the tooth portion in the area surrounded by the wall portion.

[0136] The via hole includes a conductive member that connects the comb-tooth electrode and the back electrode.

[0137] According to Configuration Example 1, since the periphery of the pair of comb-teeth electrodes is surrounded by the wall portion provided on the first main surface, external force acting on the comb-teeth electrodes can be received by the wall portion, and damage to the sensor portion can be reduced.

[0138] [Structural Example 2] A measuring device according to Structural Example 1, wherein the wall portion has the same structure as the pair of comb-tooth electrodes.

[0139] [Structural Example 3] A measuring device according to Structural Example 1 or 2, wherein the pair of back electrodes are point-symmetrical in shape.

[0140] Description of Reference Numerals

[0141] 10...measuring device; 41, 131, 141, 161...sensor portion; 42...substrate; 42a...first main surface; 42b...second main surface; 43, 44...comb-tooth electrode; 45, 46...back electrode; 51, 61...connecting portion; 52-56, 62-67...teeth portion; 50, 132, 142...wall portion; 181, 182, 191, 192, 201, 202...back electrode; Ar1, Ar2...region; V1, V2...via hole; C1, C2...via hole conductor.

Claims

1. A measuring device, comprising a sensor unit, the sensor unit comprising: a substrate having a first main surface and a second main surface; a pair of comb-tooth electrodes provided on the first main surface; and a pair of back electrodes provided on the second main surface and corresponding to the pair of comb-tooth electrodes, respectively. Each of the pair of comb-tooth electrodes has a plurality of teeth and a connecting portion connecting the teeth. The substrate has a via conductor, and the via conductor connects the comb-tooth electrode and the back electrode. The via hole conductors are arranged not at positions corresponding to teeth located at both ends in the arrangement direction of the plurality of teeth in the pair of comb-shaped electrodes but at positions corresponding to teeth other than the teeth located at the both ends.

2. The measuring device according to claim 1, wherein: The sensor unit further includes a wall portion on the first main surface, the wall portion protruding beyond the first main surface and surrounding the pair of comb-shaped electrodes.

3. The measuring device according to claim 1, wherein: The via-hole conductor is disposed at a tip end portion of the tooth portion other than the tooth portions located at the two ends.

4. The measuring device according to claim 2, wherein: The via-hole conductor is disposed at a tip end portion of the tooth portion other than the tooth portions located at the two ends.

5. The measuring device according to any one of claims 1 to 4, wherein: The pair of back electrodes are point-symmetrical in shape.

6. The measuring device according to any one of claims 1 to 4, wherein: The pair of back electrodes are rectangular.

7. The measuring device according to claim 5, wherein: The pair of back electrodes are rectangular.

8. The measuring device according to any one of claims 1 to 4, wherein The pair of back electrodes includes a base portion and an extension portion, and the via-hole conductor is connected to the extension portion of the pair of back electrodes.

9. The measuring device according to claim 5, wherein: The pair of back electrodes includes a base portion and an extension portion, and the via-hole conductor is connected to the extension portion of the pair of back electrodes.

10. The measuring device according to claim 2 or 4, wherein: The wall portion has the same structure as the pair of comb-teeth electrodes.

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