Automatic leveling method and device for inclination angle of tested sample

Abstract

The present invention discloses a method and device for automatically leveling the inclination angle of a sample to be tested. The surface of the sample to be tested has a reference scale. The method comprises: drawing a rectangle in the tested area of ​​the sample to be tested so that the diagonal corners of the rectangle are located on a group of adjacent interference fringes; determining the length and width of the rectangle according to the reference scale; determining the first inclination angle and the second inclination angle of the offset of the sample to be tested according to the length, width and wavelength of the rectangle and the light source; and leveling the sample to be tested according to the first inclination angle and the second inclination angle. The method for automatically leveling the inclination angle of the sample to be tested according to the embodiment of the present invention not only has a high level of automation, but also can accurately calculate the sample inclination angle through the interference fringes, effectively ensuring the precision and accuracy.

Description

Technical Field

[0001] The invention relates to the technical field of inclination adjustment, and in particular to a method and a device for automatically adjusting the inclination of a sample to be tested. Background Art

[0002] In the related art, when leveling the sample to be tested, it is generally adjusted manually, and the adjustment process is cumbersome, troublesome and time-consuming. If you are not careful, you may accidentally touch other equipment, resulting in rework, which needs to be solved urgently. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems in the related art to a certain extent. To this end, the first object of the present invention is to provide a method for automatically leveling the inclination angle of a sample to be measured, which not only has a high level of automation, but also can accurately calculate the inclination angle of the sample through interference fringes, effectively ensuring the accuracy and precision.

[0004] The second object of the present invention is to provide an automatic leveling device for the inclination angle of a sample to be tested.

[0005] To achieve the above-mentioned purpose, an embodiment of the first aspect of the present invention proposes a method for automatically leveling the inclination of a sample to be measured, wherein the surface of the sample to be measured has a reference scale, and the method comprises: drawing a rectangle in the measured area of ​​the sample to be measured so that the diagonals of the rectangle are located on a group of adjacent interference fringes; determining the length and width of the rectangle according to the reference scale; determining a first inclination angle and a second inclination angle of the offset of the sample to be measured according to the length and width of the rectangle and the wavelength of the light source; and leveling the sample to be measured according to the first inclination angle and the second inclination angle.

[0006] In addition, the automatic leveling method for the inclination angle of the sample under test according to the above embodiment of the present invention may also have the following additional technical features:

[0007] According to one embodiment of the present invention, before drawing a rectangle in the tested area of ​​the sample, it also includes: judging whether there are interference fringes on the surface of the sample; if interference fringes exist on the surface of the sample, drawing a rectangle in the tested area of ​​the sample.

[0008] According to one embodiment of the present invention, after the sample to be tested is leveled, it also includes: determining whether there are interference fringes on the surface of the sample to be tested; if interference fringes exist on the surface of the sample to be tested, returning to execute the step of drawing a rectangle in the tested area of ​​the sample to be tested, so that the diagonals of the rectangle are located on a group of adjacent interference fringes until the sample to be tested is leveled.

[0009] According to one embodiment of the present invention, leveling the sample under test according to the first tilt angle and the second tilt angle includes: determining a distance that the translation stage needs to move according to the first tilt angle and the second tilt angle; and controlling the translation stage to move according to the distance to level the sample under test.

[0010] According to an embodiment of the present invention, the interference fringes are observed via a CCD image.

[0011] According to the automatic leveling method for the inclination angle of the measured sample of an embodiment of the present invention, when the measured sample is tilted, a rectangle can be drawn in the measured area of ​​the measured sample so that the diagonals of the rectangle are located on a group of adjacent interference fringes, and the length and width of the rectangle can be determined according to a reference scale; a first inclination angle and a second inclination angle of the measured sample offset can be determined according to the length and width of the rectangle and the wavelength of the light source, and the measured sample can be leveled according to the first inclination angle and the second inclination angle. Not only is the automation level high, but the sample inclination angle can also be accurately calculated through the interference fringes, effectively ensuring the precision and accuracy.

[0012] To achieve the above-mentioned purpose, the second aspect of the present invention proposes an automatic leveling device for the inclination of a sample to be measured, wherein the surface of the sample to be measured has a reference scale, and the device comprises: a drawing module, used to draw a rectangle in the measured area of ​​the sample to be measured, so that the diagonals of the rectangle are located on a group of adjacent interference fringes; a first determination module, used to determine the length and width of the rectangle according to the reference scale; a second determination module, used to determine the first inclination angle and the second inclination angle of the offset of the sample to be measured according to the length, width and wavelength of the light source of the rectangle; and a leveling module, used to level the sample to be measured according to the first inclination angle and the second inclination angle.

[0013] According to one embodiment of the present invention, before drawing a rectangle in the measured area of ​​the sample, the drawing module is also used to: determine whether there are interference fringes on the surface of the sample; if there are interference fringes on the surface of the sample, draw a rectangle in the measured area of ​​the sample.

[0014] According to one embodiment of the present invention, after the sample to be tested is leveled, the leveling module is further used to: determine whether there are interference fringes on the surface of the sample to be tested; if interference fringes exist on the surface of the sample to be tested, return to execute the step of drawing a rectangle in the tested area of ​​the sample to be tested, so that the diagonals of the rectangle are located on a group of adjacent interference fringes until the sample to be tested is leveled.

[0015] According to an embodiment of the present invention, the leveling module is specifically used to: determine the distance the translation stage needs to move according to the first tilt angle and the second tilt angle; and control the translation stage to move according to the distance to level the sample under test.

[0016] According to an embodiment of the present invention, the interference fringes are observed via a CCD image.

[0017] According to the automatic leveling device for the inclination angle of the measured sample of the embodiment of the present invention, when the measured sample is tilted, a rectangle can be drawn in the measured area of ​​the measured sample so that the diagonals of the rectangle are located on a group of adjacent interference fringes, and the length and width of the rectangle can be determined according to a reference scale; a first inclination angle and a second inclination angle of the measured sample offset can be determined according to the length and width of the rectangle and the wavelength of the light source, and the measured sample can be leveled according to the first inclination angle and the second inclination angle. Not only is the automation level high, but the sample inclination angle can also be accurately calculated through the interference fringes, effectively ensuring the precision and accuracy.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a flow chart of a method for automatically leveling the inclination of a sample under test according to an embodiment of the present invention;

[0020] Figure 2 is a schematic diagram of the decomposition of the inclination angle of an inclined plane according to an embodiment of the present invention;

[0021] Figure 3 is a schematic structural diagram of an automatic leveling system for an inclination angle of a sample under test according to an embodiment of the present invention;

[0022] Figure 4 is a schematic diagram of the principle of calculating the inclination angle using the interference fringe method according to an embodiment of the present invention;

[0023] Figure 5 is a flow chart of a method for automatically leveling the inclination of a sample under test according to an embodiment of the present invention;

[0024] Figure 6 4 is a schematic block diagram of an automatic leveling device for the inclination angle of a sample under test according to an embodiment of the present invention. DETAILED DESCRIPTION

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0026] The following describes a method and device for automatically leveling the inclination of a sample under test according to an embodiment of the present invention with reference to the accompanying drawings.

[0027] Figure 1 The figure is a flow chart of the automatic leveling method of the inclination angle of the sample under test according to the embodiment of the present invention. In the embodiment, the surface of the sample under test has a reference scale.

[0028] Before introducing the automatic leveling method for the inclination of the measured sample according to the embodiment of the present invention, the principle of the automatic leveling method for the inclination of the measured sample according to the embodiment of the present invention and the structure of the leveling system involved in the automatic leveling method for the inclination of the measured sample are briefly introduced.

[0029] It can be understood that any inclined plane in space can have its inclination angle decomposed into two inclination angles φ and θ with the x-axis and y / z-axis, such as Figure 2 As shown (the inclined plane is a triangle surrounded by dotted lines). If you want to correct it to be parallel to the xy plane, you only need to go through two steps: rotate the plane by an angle of φ to correct it to be parallel to the x-axis, and then correct the plane by an angle of θ to make it parallel to the y-axis. The plane obtained after this operation is parallel to the xy plane.

[0030] Light waves propagate in the medium in the form of sinusoidal waves. Due to the independence and linear superposition of light wave propagation, when two or more light waves of the same frequency meet, the light intensity will increase or decrease depending on the phase. The interference phenomenon and the appearance of interference fringes are of great significance for optical measurement of small deformations, and can be used to measure small deformations and tilt angles.

[0031] When measuring the sample, the sample is usually fixed on a horizontal sample stage. If there is an inclination between the plane where the sample surface is located and the horizontal plane, the incident light focused by the lens will produce an optical path difference on the sample surface, generating light and dark interference fringes. This interference fringes can be observed in the CCD image, and the spacing of the interference fringes is directly related to the inclination of the sample. The spacing / width of the interference fringes can be converted into a function of the wavelength of light and the inclination angle. Finally, according to the rotation characteristics of the angular displacement stage, the inclination angle of the sample can be converted into the distance the displacement stage moves in a straight line.

[0032] like Figure 3As shown, the automatic leveling system for the inclination angle of the sample under test involved in the automatic leveling method for the inclination angle of the sample under test in the embodiment of the present invention may include: a CCD imaging device, a sample under test, an angular displacement stage, a piezoelectric actuator, and a controller. The CCD imaging device is mainly composed of an LED light source, an objective lens, and a CCD (such as a CCD camera). The objective lens can be a flat-field apochromatic lens with a numerical aperture of 0.70, a magnification of 100x, and a working distance of 6mm. It is suspended directly above the sample under test and fixed with a set of support rods. Its function is to focus the purple light emitted by the LED on the sample surface and collect the light reflected back from the sample surface. The CCD optical path can be used to observe the contour of the surface of the sample under test, and its switch state is controlled by the PC end.

[0033] The θ angular displacement stage is connected to the sample holder above it through an adapter plate, fixed by non-magnetic screws, and directly connected to the φ angular displacement stage below. The angle adjustment range of the angular displacement stage is ±5°, and the angle adjustment accuracy is better than 25". The combination of the two can complete the leveling of the inclined plane.

[0034] The two piezoelectric actuators are fixed on the sides of the θ angular displacement stage and the φ angular displacement stage respectively. The horizontal movement of the actuator on the x-axis or y-axis can drive the angular displacement stage to rotate in the θ and φ directions to correct the tilt angle of the sample. The effective stroke of the piezoelectric actuator is about 12mm, and the single step length is less than 30nm. Its moving distance is controlled by the actuator controller, and its instructions are sent from the PC to the controller.

[0035] The adjustment range and adjustment accuracy of the angular displacement stage can be flexibly adjusted according to needs. Similarly, the type of actuator can be flexibly selected according to needs, which can be a piezoelectric actuator with nanometer adjustment accuracy or a screw micrometer with sub-millimeter resolution.

[0036] like Figure 1 As shown, the automatic leveling method for the inclination of the sample under test includes:

[0037] S1, draw a rectangle in the measured area of ​​the sample to be measured so that the diagonal corners of the rectangle are located on a set of adjacent interference fringes.

[0038] According to one embodiment of the present invention, before drawing a rectangle in the tested area of ​​the tested sample, it also includes: judging whether there are interference fringes on the surface of the tested sample; if there are interference fringes on the surface of the tested sample, drawing a rectangle in the tested area of ​​the tested sample.

[0039] It can be understood that when there are no interference fringes on the surface of the sample being tested, it means that there is no tilt angle on the sample being tested; when there are interference fringes on the surface of the sample being tested, it means that there is a tilt angle on the sample being tested;

[0040] According to one embodiment of the present invention, the interference fringes are observed through CCD images.

[0041] Specifically, the CCD image can be an image of the sample surface formed by the CCD imaging device through the objective lens. When the sample is placed unevenly, alternating light and dark interference fringes will be generated on the sample surface. The interference fringes can be observed by the CCD imaging device, that is, the plane where the sample surface is located has a certain inclination angle relative to the horizontal plane and needs to be leveled.

[0042] That is to say, after interference fringes exist on the surface of the sample to be tested, the embodiment of the present invention draws a rectangle on the surface of the sample to be tested through two adjacent interference fringes, so that the diagonal corners of the drawn rectangle just fall on the adjacent interference fringes, thereby generating the horizontal width dx and numerical length dy of the rectangle. S2, determine the length and width of the rectangle according to the reference scale.

[0043] It is understood that the surface of the sample to be tested is generally flat, and the surface may have markers of known size. The sample is fixed on a sample holder made of non-magnetic material, such as Figure 4 As shown, a ruler is drawn as a reference scale based on a marker of known size on the surface of the sample to be tested (such as the "cross" mark in the attached figure), and its length "Scale" value S can be noted; and the software automatically identifies the number of pixels n occupied by the drawn ruler, and calculates the length S / n corresponding to each pixel; then the software automatically identifies the number of pixels mx and my occupied by the length and width dx and dy of the drawn rectangle, and based on the known length S / n corresponding to each pixel, the lengths of dx and dy can finally be calculated, dx=mx*S / n, dy=my*S / n.

[0044] S3, determining a first tilt angle and a second tilt angle of the sample to be measured according to the length and width of the rectangle and the wavelength of the light source.

[0045] It can be understood that, since the wavelength of the CCD light source is known (λ=532nm), the values ​​of the tilt angles θ and φ can be obtained by background calculation, sinθ=λ / 2dx, cosφ=λ / 2dy.

[0046] S4, leveling the sample to be tested according to the first inclination angle and the second inclination angle.

[0047] According to one embodiment of the present invention, the sample under test is leveled according to the first tilt angle and the second tilt angle, including: determining the distance that the translation stage needs to move according to the first tilt angle and the second tilt angle; and controlling the translation stage to move according to the distance to level the sample under test.

[0048] It is understandable that after calculating the first tilt angle and the second tilt angle, the embodiment of the present invention can control the angular displacement stage to move the corresponding angles θ and φ in two directions, respectively, so as to drive the sample above to achieve leveling, wherein the horizontal movement of the piezoelectric actuator is relied on to drive the angular displacement stage to rotate along the guide rail. Therefore, the inclination angle of the sample must first be converted into the distance moved by the piezoelectric actuator, and then a command is sent to the actuator controller through the PC to control the piezoelectric actuator to move a specific distance in the x and y directions, so as to push the angular displacement stage to rotate the corresponding angles, offset the tilt angle of the sample, and achieve leveling of the sample.

[0049] That is to say, the embodiment of the present invention can use the piezoelectric actuator rod to push the inclination displacement table to rotate to a specific angle through horizontal movement. The movement of the piezoelectric actuator rod depends on its controller to send it a movement command, and the inclination displacement table drives the measured sample above to rotate the corresponding angle to achieve tilt angle correction.

[0050] According to one embodiment of the present invention, after leveling the sample to be tested, it also includes: determining whether there are interference fringes on the surface of the sample to be tested; if interference fringes exist on the surface of the sample to be tested, returning to execute drawing a rectangle in the tested area of ​​the sample to be tested so that the diagonals of the rectangle are located on a group of adjacent interference fringes until the sample to be tested is leveled.

[0051] It is understandable that after one leveling, the sample under test may still have a certain tilt. Therefore, the embodiment of the present invention can determine again whether there are interference fringes on the surface of the sample under test. If there are still interference fringes in the observed image, the above steps S1-S4 can be repeated and leveling can be performed again until no interference fringes appear in the observed CCD image, thus achieving automatic leveling of the sample.

[0052] In order to enable those skilled in the art to further understand the method for automatically leveling the inclination angle of a sample under test according to an embodiment of the present invention, a specific embodiment is described in detail below.

[0053] like Figure 5 As shown, the method for automatically leveling the inclination of the sample under test comprises the following steps:

[0054] S501, draw a ruler as a reference scale according to a marker of a straight size on the sample to be measured.

[0055] S502, drawing a rectangle in the tested area of ​​the tested sample so that the diagonals of the rectangle are located on a group of adjacent interference fringes.

[0056] S503, calculating the length and width of the drawn rectangle according to the reference ruler.

[0057] S504, calculating and obtaining the tilt angles θ and φ of the sample to be tested in two directions.

[0058] S505, converting the tilt angle into the moving distance of the two angular translation stages.

[0059] S506, controlling the two angular displacement stages to move corresponding distances to correct the inclination angles.

[0060] S507, observe again whether there are interference fringes on the surface of the sample to be tested, if yes, execute step S502, otherwise, execute step S508.

[0061] S508, leveling is completed.

[0062] In summary, the automatic leveling method for the inclination angle of the measured sample proposed in the embodiment of the present invention not only has a high level of automation, but can also accurately calculate the sample inclination angle through interference fringes, and the minimum step of the piezoelectric actuator is less than 30nm, and the angle correction accuracy is high, and the accuracy can exceed 25", which is of great significance for accurately imaging the microstructure morphology of the sample surface at the micro-nano scale.

[0063] According to the automatic leveling method for the inclination angle of the measured sample proposed in an embodiment of the present invention, when the measured sample is tilted, a rectangle can be drawn in the measured area of ​​the measured sample so that the diagonals of the rectangle are located on a group of adjacent interference fringes, and the length and width of the rectangle can be determined according to a reference scale; a first inclination angle and a second inclination angle of the measured sample offset can be determined according to the length and width of the rectangle and the wavelength of the light source, and the measured sample can be leveled according to the first inclination angle and the second inclination angle. Not only is the automation level high, but the sample inclination angle can also be accurately calculated through the interference fringes, effectively ensuring the precision and accuracy.

[0064] Figure 6 Schematic diagram of the automatic leveling device for the inclination angle of the sample under test according to the embodiment of the present invention. In this embodiment, the surface of the sample under test has a reference scale, such as Figure 6 As shown, the automatic leveling device for the inclination angle of the sample under test includes: a drawing module 100 , a first determination module 200 , a second determination module 300 and a leveling module 400 .

[0065] The drawing module 100 is used to draw a rectangle in the measured area of ​​the measured sample so that the diagonal corners of the rectangle are located on a set of adjacent interference fringes. The first determination module 200 is used to determine the length and width of the rectangle according to a reference scale. The second determination module 300 is used to determine the first tilt angle and the second tilt angle of the measured sample according to the length, width and wavelength of the rectangle. The leveling module 400 is used to level the measured sample according to the first tilt angle and the second tilt angle.

[0066] According to one embodiment of the present invention, before drawing a rectangle in the tested area of ​​the tested sample, the drawing module is further used to: determine whether there are interference fringes on the surface of the tested sample; if there are interference fringes on the surface of the tested sample, draw a rectangle in the tested area of ​​the tested sample.

[0067] According to one embodiment of the present invention, after the sample to be tested is leveled, the leveling module 400 is also used to: determine whether there are interference fringes on the surface of the sample to be tested; if there are interference fringes on the surface of the sample to be tested, return to execute drawing a rectangle in the tested area of ​​the sample to be tested so that the diagonals of the rectangle are located on a group of adjacent interference fringes until the sample to be tested is leveled.

[0068] According to an embodiment of the present invention, the leveling module 400 is specifically used to: determine the distance that the translation stage needs to move according to the first tilt angle and the second tilt angle; and control the translation stage to move according to the distance to level the sample under test.

[0069] According to one embodiment of the present invention, the interference fringes are observed via a CCD image.

[0070] It should be noted that the above explanation of the embodiment of the method for automatically adjusting the inclination angle of the measured sample is also applicable to the automatic inclination angle leveling device for the measured sample of this embodiment, and will not be repeated here.

[0071] According to the automatic leveling device for the inclination angle of the measured sample proposed in the embodiment of the present invention, when the measured sample is tilted, a rectangle can be drawn in the measured area of ​​the measured sample so that the diagonals of the rectangle are located on a group of adjacent interference fringes, and the length and width of the rectangle can be determined according to a reference scale; a first inclination angle and a second inclination angle of the measured sample offset can be determined according to the length and width of the rectangle and the wavelength of the light source, and the measured sample can be leveled according to the first inclination angle and the second inclination angle. Not only is the automation level high, but the sample inclination angle can also be accurately calculated through the interference fringes, effectively ensuring the precision and accuracy.

[0072] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0073] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0074] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0075] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0076] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0077] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A method for automatically leveling the inclination of a sample under test, characterized in that: The surface of the sample to be measured has a reference scale, and the method comprises: Draw a rectangle in the tested area of ​​the tested sample so that the diagonal corners of the rectangle are located on a set of adjacent interference fringes; Determine the length and width of the rectangle according to the reference ruler; Determining a first tilt angle and a second tilt angle of the sample under test according to the length and width of the rectangle and the wavelength of the light source; and Leveling the sample to be tested according to the first tilt angle and the second tilt angle; After the sample to be tested is leveled, the method further comprises: Determining whether interference fringes exist on the surface of the sample being tested; If interference fringes exist on the surface of the sample under test, return to the step of drawing a rectangle on the tested area of ​​the sample under test so that the diagonal corners of the rectangle are located on a group of adjacent interference fringes until no interference fringes appear; The interference fringes are observed through CCD images, and the CCD images are images formed by a CCD imaging device on the sample surface through an objective lens; the CCD imaging device is composed of an LED light source, an objective lens and a CCD.

2. The method for automatically leveling the inclination angle of the sample under test according to claim 1, characterized in that: Before drawing a rectangle in the tested area of ​​the tested sample, the method further comprises: Determining whether interference fringes exist on the surface of the sample being tested; If interference fringes exist on the surface of the sample to be tested, a rectangle is drawn in the tested area of ​​the sample to be tested.

3. The method for automatically leveling the inclination of a sample under test according to claim 1, characterized in that: The step of leveling the sample to be tested according to the first tilt angle and the second tilt angle comprises: Determining a distance that the translation stage needs to move according to the first tilt angle and the second tilt angle; The translation stage is controlled to move according to the distance to level the sample being tested.

4. An automatic leveling device for the inclination angle of a sample under test, characterized in that: The surface of the sample to be measured has a reference scale, and the device comprises: A drawing module, used for drawing a rectangle in the tested area of ​​the tested sample, so that the diagonal corners of the rectangle are located on a set of adjacent interference fringes; A first determining module, used to determine the length and width of the rectangle according to the reference ruler; A second determining module is used to determine a first tilt angle and a second tilt angle of the sample under test according to the length and width of the rectangle and the wavelength of the light source; and A leveling module, used for leveling the sample to be tested according to the first tilt angle and the second tilt angle; After the tested sample is leveled, the leveling module is further used to: Determining whether interference fringes exist on the surface of the sample being tested; If interference fringes exist on the surface of the sample under test, the process returns to the step of drawing a rectangle on the tested area of ​​the sample under test, so that the diagonal corners of the rectangle are located on a group of adjacent interference fringes, until no interference fringes appear.

5. The automatic leveling device for the inclination angle of the sample under test according to claim 4, characterized in that: Before drawing a rectangle in the tested area of ​​the tested sample, the drawing module is further used to: Determining whether interference fringes exist on the surface of the sample being tested; If interference fringes exist on the surface of the sample to be tested, a rectangle is drawn in the tested area of ​​the sample to be tested.

6. The automatic leveling device for the inclination angle of the sample under test according to claim 4, characterized in that: The leveling module is specifically used for: Determining a distance that the translation stage needs to move according to the first tilt angle and the second tilt angle; The translation stage is controlled to move according to the distance to level the sample being tested.

Images