Lithography equipment

Abstract

The present application provides a lithography device. The lithography device includes a housing, a workbench, a grating ruler, a color-changing structure and a detection device, wherein the workbench includes a cooling device and an optical structure, the cooling device is arranged around the outer periphery of the optical structure, the grating ruler is located on the inner wall of the housing, the color-changing structure is located on the inner wall of the housing between the grating ruler and the cooling device, and the detection device is used to determine whether the cooling device has a liquid leak according to the color information of the color-changing structure. The lithography device includes a color-changing structure and a detection device, the color-changing structure is arranged on the inner wall of the housing between the grating ruler and the cooling device, and the color of the color-changing structure changes when encountering liquid. Therefore, when the cooling device leaks liquid and the liquid flows onto the color-changing structure, the color of the color-changing structure changes. In this way, it is only necessary to use the detection device to monitor the color information of the color-changing structure to determine whether the cooling device has a leak, thereby realizing the monitoring of whether the cooling water pipe of the lithography device is leaking.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, and in particular, to a photolithography device. Background Art

[0002] There are many water pipes under the workbench of the lithography equipment, which provide cooling for the normal operation of the workbench and keep the temperature of the machine engine and the workbench constant. As the working time of the lithography equipment increases, water leakage is inevitable in the pipes. Once the leaking water drips onto the grating ruler below, the positioning accuracy of the machine will deviate, which will cause the machine to shut down.

[0003] Therefore, there is an urgent need for a solution that can monitor the leakage of cooling water pipes of lithography equipment.

[0004] The above information disclosed in the background technology section is only used to enhance the understanding of the background technology of the technology described in this article. Therefore, the background technology may contain certain information that does not form the prior art known in this country for those skilled in the art. Summary of the invention

[0005] The main purpose of the present application is to provide a lithography device to solve the problem in the prior art of lacking a solution for monitoring water leakage in the cooling water pipe of the lithography device.

[0006] According to one aspect of an embodiment of the present invention, there is provided a lithography device, comprising: a shell having a accommodating cavity; a workbench located in the accommodating cavity, the workbench comprising a cooling device and an optical structure, the cooling device being arranged around the periphery of the optical structure, the optical structure being used to receive a light beam; a grating scale located on the inner wall of the shell; a color-changing structure located on the inner wall of the shell between the grating scale and the cooling device, the color of the color-changing structure changing when in contact with liquid; and a detection device, used to obtain color information of the color-changing structure, and determine whether liquid leakage occurs in the cooling device based on the color information of the color-changing structure.

[0007] Optionally, the detection device includes: an image acquisition device, located in the accommodating cavity, and used to acquire an image of the color-changing structure; a processing unit, communicatively connected to the image acquisition device, and used to acquire color information of the color-changing structure based on the image of the color-changing structure, and determine whether liquid leakage occurs in the cooling device based on the color information.

[0008] Optionally, the processing unit is used to obtain color information of the color-changing structure based on the image of the color-changing structure, and determine that liquid leakage has occurred in the cooling device based on the color information, including: obtaining current color information of the color-changing structure; and determining that liquid leakage has occurred in the cooling device when the current color information is different from preset color information.

[0009] Optionally, the processing unit is used to obtain color information of the color-changing structure based on the image of the color-changing structure, and determine that liquid leakage has occurred in the cooling device based on the color information, including: obtaining initial color information and current color information of the color-changing structure, the initial color information being the color information of the color-changing structure when it is not in contact with liquid; and determining that liquid leakage has occurred in the cooling device when the current color information is different from the initial color information.

[0010] Optionally, the detection device is further used to determine the location where the cooling device leaks according to the location where the color information of the color-changing structure changes.

[0011] Optionally, the detection device includes: a decoding device for determining a location where the cooling device leaks according to a location where the color information of the color-changing structure changes.

[0012] Optionally, the color-changing structure includes a plurality of color-changing particles arranged in sequence, and the detection device is further used to determine the location where the cooling device leaks based on the positions of the color-changing particles.

[0013] Optionally, a plurality of the color-changing particles are arranged along a predetermined direction, which is the length direction of the color-changing structure. The detection device is also used to determine the location where the cooling device leaks based on the color of the color-changing particles, including: numbering the color-changing particles along the predetermined direction, wherein the numbers are used to characterize different areas of the cooling device; when the color of the color-changing particles changes, determining the numbers of the color-changing particles that have changed color; and determining the location where the cooling device leaks based on the numbers.

[0014] Optionally, the detection device is also used to issue an alarm message when liquid leakage occurs in the cooling device.

[0015] Optionally, the detection device further includes: a driving device fixed on the inner wall of the shell, the driving device being used to drive at least a portion of the detection device to move on the inner wall of the shell to obtain color information of different positions of the color-changing structure.

[0016] Optionally, the driving device is a linear motor, wherein the linear motor comprises a track and a sliding part, the track is fixed on the inner wall of the shell, the sliding part is located on the track, and the sliding part is used to place at least part of the detection device.

[0017] Optionally, the detection device further comprises: a fixing portion fixed on the inner wall of the shell, and the driving device is mounted on the fixing portion.

[0018] Optionally, the color-changing structure includes a color-changing layer and an adhesive layer stacked in sequence, the adhesive layer is arranged in contact with the inner wall of the shell, and the color-changing layer is located on the surface of the adhesive layer away from the inner wall of the shell.

[0019] Optionally, the material of the color-changing layer includes cobalt chloride.

[0020] Optionally, the lithography device further includes: a water collecting trough, located on the inner wall of the shell between the grating scale and the color changing structure, the water collecting trough being used to collect the liquid; a drain pipe, the water inlet of the drain pipe being connected to the water collecting trough, the water outlet of the drain pipe being located outside the lithography device, the drain pipe being used to discharge the liquid collected in the water collecting trough out of the lithography device.

[0021] In an embodiment of the present invention, a lithography device includes a housing, a workbench, a grating ruler, a color-changing structure and a detection device, wherein the workbench includes a cooling device and an optical structure, the cooling device is arranged around the outer periphery of the optical structure, the grating ruler is located on the inner wall of the housing, the color-changing structure is located on the inner wall of the housing between the grating ruler and the cooling device, and the detection device is used to determine whether the cooling device has a liquid leak according to the color information of the color-changing structure. The lithography device includes a color-changing structure and a detection device, the color-changing structure is arranged on the inner wall of the housing between the grating ruler and the cooling device, and the color-changing structure will change color when encountering liquid. Therefore, when the cooling device leaks liquid and the liquid flows onto the color-changing structure, the color-changing structure will change color. In this way, it is only necessary to use the detection device to monitor the color information of the color-changing structure to determine whether the cooling device has a leak, thereby realizing the monitoring of whether the cooling device of the lithography device has a liquid leak, thereby solving the problem of the lack of a solution in the prior art that can monitor the leakage of the cooling water pipe of the lithography device. Subsequently, according to the detection result, the lithography device can be repaired in time to avoid liquid dripping onto the grating ruler, causing the accuracy of the lithography device to deviate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings constituting part of the present application are used to provide a further understanding of the present application. The exemplary embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0023] Figure 1 A schematic structural diagram of a lithography device according to an embodiment of the present application is shown;

[0024] Figure 2 A schematic structural diagram of a color-changing structure including a plurality of color-changing particles according to an embodiment of the present application is shown;

[0025] Figure 3 A schematic structural diagram of a color-changing structure including a plurality of color-changing particles according to an embodiment of the present application is shown;

[0026] Figure 4 A schematic structural diagram of a linear motor according to an embodiment of the present application is shown;

[0027] Figure 5 shows a side view of a linear motor according to an embodiment of the present application;

[0028] Figure 6 A top view of a linear motor according to an embodiment of the present application is shown;

[0029] Figure 7 A cross-sectional view of a color-changing structure according to an embodiment of the present application is shown;

[0030] Figure 8 A schematic flow chart showing the working method of the lithography equipment according to an embodiment of the present application is shown.

[0031] The above drawings include the following reference numerals:

[0032] 10. Cooling device; 11. Grating scale; 12. Inner wall of shell; 13. Color-changing structure; 14. Driving device; 15. Water collecting tank; 16. Drain pipe; 17. Color-changing particles; 18. Color-changing particles that change color; 19. Sliding part; 20. Track; 21. Image acquisition device; 22. Fixed part; 23. Color-changing layer; 24. Adhesive layer. DETAILED DESCRIPTION

[0033] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0034] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0035] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0036] It should be understood that when a component (such as a layer, film, region, or substrate) is described as being "on" another component, the component may be directly on the other component, or there may be intermediate components. Moreover, in the specification and claims, when it is described that a component is "connected" to another component, the component may be "directly connected" to the other component, or "connected" to the other component through a third component.

[0037] As mentioned in the background art, the prior art lacks a solution for monitoring the leakage of cooling water pipes of lithography equipment. In order to solve the above problem, in a typical embodiment of the present application, a lithography equipment is provided.

[0038] According to an embodiment of the present application, a lithography device is provided. Figure 1 is a structural diagram of a lithography apparatus according to an embodiment of the present application. Figure 1 As shown, the lithography apparatus comprises:

[0039] A housing having a receiving cavity;

[0040] A workbench is located in the accommodating cavity, the workbench comprises a cooling device 10 and an optical structure, the cooling device 10 is arranged around the periphery of the optical structure, and the optical structure is used to receive a light beam;

[0041] The grating ruler 11 is located on the inner wall 12 of the housing;

[0042] A color changing structure 13 is located on the inner wall 12 of the housing between the grating scale 11 and the cooling device 10. When the color changing structure 13 comes into contact with liquid, the color changes;

[0043] The detection device is used to obtain the color information of the color-changing structure 13 and determine whether the cooling device 10 has liquid leakage based on the color information of the color-changing structure 13.

[0044] The above-mentioned lithography equipment includes a housing, a workbench, a grating ruler, a color-changing structure and a detection device, wherein the workbench includes a cooling device and an optical structure, the cooling device is arranged around the outer periphery of the optical structure, the grating ruler is located on the inner wall of the housing, the color-changing structure is located on the inner wall of the housing between the grating ruler and the cooling device, and the detection device is used to determine whether the cooling device has liquid leakage according to the color information of the color-changing structure. The lithography equipment includes a color-changing structure and a detection device, the color-changing structure is arranged on the inner wall of the housing between the grating ruler and the cooling device, and the color-changing structure will change color when encountering liquid. Therefore, when liquid leaks from the cooling device and the liquid flows onto the color-changing structure, the color-changing structure will change color. In this way, it is only necessary to use the detection device to monitor the color information of the color-changing structure to determine whether the cooling device has leaked, thereby realizing the monitoring of whether the cooling device of the lithography equipment has liquid leakage, thereby solving the problem of the lack of a solution in the prior art that can monitor the leakage of the cooling water pipe of the lithography equipment. Subsequently, according to the detection result, the lithography equipment can be repaired in time to avoid liquid dripping onto the grating ruler, causing the accuracy of the lithography equipment to deviate.

[0045] In a specific embodiment of the present application, the liquid in the above-mentioned cooling device is water. Of course, in actual applications, the liquid in the above-mentioned cooling device can not only be water, but also other liquids, such as liquid nitrogen.

[0046] In another specific embodiment of the present application, the length of the color-changing structure is greater than or equal to the length of the grating ruler, so that it is possible to detect whether liquid leakage occurs above the grating ruler, thereby preventing liquid leaking from the cooling device from dripping onto the grating ruler, thereby causing a deviation in the positioning accuracy of the lithography device. If the length of the color-changing structure is less than the length of the grating ruler, it is impossible to detect whether liquid leakage occurs in a place without the color-changing structure. In this way, when liquid leakage occurs in a place without the color-changing structure, it is impossible to promptly remind the user that liquid leakage has occurred, thereby causing liquid to fall onto the grating ruler and causing a deviation in positioning accuracy.

[0047] In one embodiment of the present application, the detection device includes an image acquisition device and a processing unit, wherein the image acquisition device is located in the accommodating cavity, and the image acquisition device is used to acquire an image of the color-changing structure; the processing unit is in communication connection with the image acquisition device, and the processing unit is used to acquire color information of the color-changing structure based on the image of the color-changing structure, and determine whether liquid leakage occurs in the cooling device based on the color information. In this embodiment, the detection device includes an image acquisition device and a processing unit, and the image acquisition device acquires an image of the color-changing structure, and accurate color information of the color-changing structure can be obtained based on the image of the color-changing structure, thereby making the color information of the color-changing structure acquired by the subsequent processing unit more accurate, and further making the detection result of the detection device more accurate.

[0048] The above-mentioned image acquisition device is located in the above-mentioned accommodating cavity, but the position of the image acquisition device in the accommodating cavity is not fixed and can be set according to actual conditions as long as the complete image of the above-mentioned color-changing structure can be obtained.

[0049] In a specific embodiment of the present application, the image acquisition device is a camera, the camera acquires an image of the color-changing structure, and the processing unit processes the image to obtain color information of the color-changing structure. Of course, in actual applications, the image acquisition device is not limited to a camera, and can also be other image acquisition devices, such as a CCD sensor, and those skilled in the art can choose according to actual conditions.

[0050] In order to further improve the accuracy of the detection results, in another embodiment of the present application, the processing unit is used to obtain the color information of the color-changing structure according to the image of the color-changing structure, and determine that the cooling device has a liquid leak according to the color information, including: obtaining the current color information of the color-changing structure; when the current color information is different from the preset color information, determining that the cooling device has a liquid leak. When the color information of the current color-changing structure is different from the preset structure color information, it indicates that the color-changing structure has encountered liquid and has changed color, so it is determined that the cooling device has a liquid leak.

[0051] The preset color information is set by the user according to the color-changing structure. For example, the color-changing structure is blue before encountering liquid and red after encountering liquid, so the user can set the preset color information to blue. When the color-changing structure turns red, which is different from the preset color information, it indicates that the color-changing structure encounters liquid in the cooling device, so liquid leakage occurs in the cooling device.

[0052] In another embodiment of the present application, the processing unit is used to obtain the color information of the color-changing structure according to the image of the color-changing structure, and determine that the cooling device has a liquid leakage according to the color information, including: obtaining the initial color information and current color information of the color-changing structure, the initial color information being the color information of the color-changing structure when it is not in contact with the liquid; and determining that the cooling device has a liquid leakage when the current color information is different from the initial color information. In this embodiment, it is also possible to obtain the initial color information of the color-changing structure without color change through an image acquisition device without manually setting the preset color information of the color-changing structure, and by comparing the current color information of the color-changing structure with the initial color information, it is possible to determine whether the cooling device has changed, making the user's operation more flexible.

[0053] In another embodiment of the present application, the detection device is also used to determine the location where the cooling device leaks according to the location where the color information of the color-changing structure changes. When liquid leaks from the cooling device, the leaked liquid will drip vertically from the location where the leak occurs along the inner wall of the lithography device onto the color-changing structure. Therefore, in this embodiment, it is only necessary to find the location where the color information of the color-changing structure changes to trace back to the location where the cooling device leaks, thereby quickly locating the location of the liquid leak, which is convenient for subsequent engineers to perform repairs.

[0054] In order to locate the position where the liquid leakage occurs more quickly, in another embodiment of the present application, the above-mentioned detection device includes: a decoding device for determining the position where the leakage of the above-mentioned cooling device occurs according to the position where the color information of the above-mentioned color-changing structure changes.

[0055] In another embodiment of the present application, the color-changing structure includes a plurality of color-changing particles arranged in sequence, and the detection device is further used to determine the location where the cooling device leaks according to the location of the color-changing particles. In this embodiment, the location of the cooling device liquid leak can be determined according to the location of the color-changing particles, so that engineers can quickly locate the location of the liquid leak and repair the lithography equipment in time to avoid causing greater losses.

[0056] In another embodiment of the present application, a plurality of the above-mentioned color-changing particles are arranged along a predetermined direction, and the above-mentioned predetermined direction is the length direction of the above-mentioned color-changing structure. The above-mentioned detection device is also used to determine the location where the above-mentioned cooling device has leaked according to the color of the above-mentioned color-changing particles, including: numbering the above-mentioned color-changing particles along the above-mentioned predetermined direction, and the above-mentioned numbers are used to characterize different areas of the above-mentioned cooling device; when the color of the above-mentioned color-changing particles changes, the numbers of the above-mentioned color-changing particles with color changes are determined; and according to the above-mentioned numbers, the location where the above-mentioned cooling device has leaked is determined. In this embodiment, a plurality of color-changing particles are numbered, and the numbers correspond to different areas of the cooling device. When the color of the color-changing particles changes, the location of the leak can be found by locating the numbers of the color-changing particles. This method is relatively simple and can locate the location of the leak more quickly, thereby further improving the detection efficiency.

[0057] For example, Figure 2 and Figure 3 As shown, Figure 2 and Figure 3 It is only a schematic diagram, and not all the color-changing particles 17 are drawn. The length of the color-changing structure is 120 cm, the width is 5 cm, the color-changing particles 17 are round, and the diameter is 5 cm. There are 24 color-changing particles 17, and the plurality of color-changing particles 17 are closely arranged along the predetermined direction. Figure 2 and Figure 3As shown, along the predetermined direction, a plurality of color-changing particles 17 are numbered 1, 2, 3, ..., 24, and the numbers correspond to different areas of the cooling device. When the color of the color-changing particles 17 changes, the number corresponding to the color-changing particles 18 that change color is found, and the area where the liquid leaks can be quickly located.

[0058] In a specific embodiment of the present application, the image acquisition device is used to obtain color information of the plurality of color-changing particles, and then the decoding device determines the location where the cooling device leaks based on the numbers of the color-changing particles that have changed color.

[0059] In another embodiment of the present application, the detection device is also used to send out an alarm message when liquid leaks from the cooling device. In this embodiment, when liquid leaks from the cooling device, an alarm message is sent out to promptly remind engineers that the cooling device has leaked, thereby avoiding damage to the grating ruler and causing greater losses.

[0060] The above alarm information can be in the form of sound. When liquid leakage occurs in the cooling equipment, the detection device will emit an alarm sound. The above alarm information can also be in the form of text. The detection device can be connected to the user terminal to send the text alarm information to the user terminal. The above alarm information can also be the display information of the LED light. An LED light is arranged outside the shell of the lithography equipment. When the grinding pad is deformed, the LED light is controlled to light up. A combination of the above alarm methods can also be adopted. Technical personnel in this field can choose according to actual conditions.

[0061] In another embodiment of the present application, Figure 1 As shown, the detection device further includes a driving device 14, wherein the driving device 14 is fixed on the inner wall 12 of the shell, and the driving device 14 is used to drive at least part of the detection device to move on the inner wall 12 of the shell, so as to obtain color information of different positions of the color-changing structure 13. In this embodiment, the driving device enables at least part of the detection device to move on the inner wall of the shell, so that the detection device can obtain color information of different positions of the color-changing structure, thereby making the obtained color information more accurate and comprehensive, thereby further improving the accuracy of the detection.

[0062] In another embodiment of the present application, Figures 4 to 6 As shown, the driving device is a linear motor, wherein the linear motor includes a track 20 and a sliding portion 19, the track 20 is fixed on the inner wall 12 of the shell, the sliding portion 19 is located on the track 20, and the sliding portion 19 is used to place at least part of the detection device.

[0063] In practical applications, the linear motor may be a flat plate type, a U-groove type or a tube type, and those skilled in the art may make a selection according to actual needs.

[0064] In a specific embodiment of the present application, Figures 4 to 6 As shown, the image acquisition device 21 is located on the sliding part 19, and the linear motor drives the image acquisition device 21 to move rapidly left and right, so as to scan the entire color-changing structure 13. The reciprocating frequency of the linear motor can be set according to actual needs, such as once every 10 minutes. In actual applications, the scanning frequency can also be increased to once every 2 minutes, or after detecting that the color information of part of the color-changing structure 13 has changed, stop at the changed area and perform long-term uninterrupted scanning and shooting. There are many ways to detect the color information of the color-changing structure 13, and only a few examples are listed here.

[0065] In another specific embodiment of the present application, the track length of the linear motor is the same as the length of the color-changing structure, so that the color information of the complete color-changing structure can be obtained. Similarly, in actual applications, the track length of the linear motor may not be the same as the length of the color-changing structure, as long as the angle of the image acquisition device is adjusted so that the image acquisition device can obtain the color information of the complete color-changing structure.

[0066] In another embodiment of the present application, Figure 5 As shown, the detection device further includes a fixing portion 22, wherein the fixing portion 22 is fixed to the inner wall 12 of the housing, and the driving device is mounted on the fixing portion 22. In this embodiment, the detection device further includes a fixing portion, which makes the fixing of the driving device more stable, thereby preventing the driving device from shifting during long-term operation, thereby causing the detection device to be unable to obtain the color information of the complete color-changing structure.

[0067] In another embodiment of the present application, Figure 7 As shown, the color-changing structure includes a color-changing layer 23 and an adhesive layer 24 stacked in sequence, the adhesive layer 24 is disposed in contact with the inner wall of the shell, and the color-changing layer 23 is located on the surface of the adhesive layer 24 away from the inner wall of the shell. In this embodiment, the adhesive layer makes the color-changing structure more tightly connected to the inner wall of the shell, avoiding the problem of the color-changing structure falling off and shifting after being immersed in liquid, thereby affecting the accuracy of the detection result.

[0068] In a specific embodiment of the present application, the color-changing layer may also be a color-changing test paper, which may also change color when in contact with water.

[0069] In another embodiment of the present application, the material of the color-changing layer includes cobalt chloride. Cobalt chloride is red when it does not absorb water and light blue after absorbing water. Cobalt chloride has a strong adsorption effect on water and can quickly change color after encountering liquid, making the detection result more accurate.

[0070] In practical applications, the material of the color-changing layer can be not only cobalt chloride but also other materials. The appropriate material of the color-changing layer can be selected according to the liquid in the cooling device.

[0071] In a specific embodiment of the present application, the color-changing particles are composed of color-changing silica gel, and the main component of the color-changing silica gel is cobalt chloride.

[0072] In order to further prevent the lithography equipment from being damaged, in another embodiment of the present application, Figure 1 As shown, the photolithography device further includes a water collection tank 15 and a drain pipe 16, wherein the water collection tank 15 is located on the inner wall 12 of the shell between the grating scale 11 and the color changing structure 13, and the water collection tank 15 is used to collect the liquid; the water inlet of the drain pipe 16 is connected to the water collection tank 15, and the water outlet of the drain pipe 16 is located outside the photolithography device, and the drain pipe 16 is used to discharge the liquid collected by the water collection tank 15 out of the photolithography device. In this embodiment, the water collection tank is on the inner wall between the grating scale and the color changing structure, collects the leaked liquid, and discharges the liquid from the photolithography device through the drain pipe, so as to avoid the liquid damaging the grating scale and causing errors in the positioning accuracy of the photolithography device, thereby further increasing the service life of the photolithography device.

[0073] In order to enable those skilled in the art to more clearly understand the technical solution of the present application, the technical solution of the present application will be described in detail below in combination with specific embodiments and comparative examples.

[0074] Example

[0075] The structural diagram of the lithography apparatus of this embodiment is shown in FIG. Figure 1 As shown, the lithography equipment includes a shell, a workbench, a grating ruler, a color-changing structure and a detection device, wherein the shell has a accommodating cavity; the workbench is located in the accommodating cavity, the workbench includes a cooling device 10 and an optical structure, the cooling device 10 is arranged around the periphery of the optical structure, and the optical structure is used to receive a light beam; the grating ruler 11 is located on the inner wall 12 of the shell; the color-changing structure 13 is located on the inner wall 12 of the shell between the grating ruler 11 and the cooling device 10, and the color of the color-changing structure 13 will change when it comes into contact with liquid; the detection device is used to obtain color information of the color-changing structure 13, and determine whether liquid leakage occurs in the cooling device 10 based on the color information of the color-changing structure 13.

[0076] The detection device includes an image acquisition device and a processing unit, wherein the image acquisition device is located in the accommodating cavity, and the image acquisition device is used to acquire the image of the color-changing structure; the processing unit is connected to the image acquisition device in communication, and the processing unit is used to acquire the color information of the color-changing structure according to the image of the color-changing structure, and determine whether the cooling device has liquid leakage according to the color information. The detection device includes a decoding device, which is used to determine the location of the cooling device leakage according to the location where the color information of the color-changing structure changes. The detection device also includes a driving device 14, wherein the driving device 14 is fixed on the inner wall 12 of the shell, and the driving device 14 is used to drive at least part of the detection device to move on the inner wall 12 of the shell to acquire the color information of different positions of the color-changing structure 13. The color-changing structure includes a plurality of color-changing particles arranged in sequence, and the plurality of color-changing particles are arranged along a predetermined direction, and the predetermined direction is the length direction of the color-changing structure. The detection device is also used to determine the location of the cooling device leakage according to the color of the color-changing particles. The detection device is also used to send an alarm message in the event of liquid leakage in the cooling device.

[0077] The liquid in the cooling device of this embodiment is water, the length of the color-changing structure is greater than the length of the grating ruler, the image acquisition device is a camera, and the driving device is a linear motor, such as Figures 4 to 6 As shown, the linear motor includes a track 20 and a sliding part 19. The track 20 is fixed on the inner wall 12 of the housing. The sliding part 19 is located on the track 20. The sliding part 19 is used to place at least part of the detection device. The color-changing structure has a length of 120 cm and a width of 5 cm. The color-changing particles 17 are circular and have a diameter of 5 cm. There are 24 color-changing particles 17, and the plurality of color-changing particles 17 are closely arranged along the predetermined direction. Figure 2 and Figure 3 As shown, along the predetermined direction, the plurality of color-changing particles 17 are numbered 1, 2, 3, ..., 24, respectively, and the above numbers correspond to different areas of the above cooling device. The track length of the above linear motor is the same as the length of the above color-changing structure. The working method of the lithography device is as follows Figure 8 As shown, the specific steps include:

[0078] The linear motor drives the camera to move quickly from left to right, scanning the entire color-changing structure and collecting the color changes at each position of the color-changing structure. The reciprocating frequency of the linear motor can be set according to actual needs, such as once every 10 minutes. When the color-changing particles in the color-changing structure are detected to have changed in color, the detection device first locates the position where the color-changing structure has changed in color, finds the number corresponding to the color-changing particle that has changed in color, and locates the number of the color-changing particle to quickly locate the position where the liquid leaks in the cooling equipment, and sends out an alarm message, so that the engineer can inspect and repair it. After the repair is completed, return to the above collection step; if the color-changing structure does not change in color, return to the above collection step.

[0079] From the above description, it can be seen that the above embodiments of the present application achieve the following technical effects:

[0080] The lithography equipment of the present application includes a housing, a workbench, a grating ruler, a color-changing structure and a detection device, wherein the workbench includes a cooling device and an optical structure, the cooling device is arranged around the periphery of the optical structure, the grating ruler is located on the inner wall of the housing, the color-changing structure is located on the inner wall of the housing between the grating ruler and the cooling device, and the detection device is used to determine whether the cooling device has a liquid leak according to the color information of the color-changing structure. The lithography equipment includes a color-changing structure and a detection device, the color-changing structure is arranged on the inner wall of the housing between the grating ruler and the cooling device, and the color-changing structure will change color when encountering liquid. Therefore, when the cooling device leaks liquid and the liquid flows onto the color-changing structure, the color-changing structure will change color. In this way, it is only necessary to use the detection device to monitor the color information of the color-changing structure to determine whether the cooling device has a leak, thereby realizing the monitoring of whether the cooling device of the lithography equipment has a liquid leak, thereby solving the problem of the lack of a solution in the prior art that can monitor the leakage of the cooling water pipe of the lithography equipment. Subsequently, according to the detection result, the lithography equipment can be repaired in time to avoid liquid dripping onto the grating ruler, causing the accuracy of the lithography equipment to deviate.

[0081] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A lithography apparatus, characterized in that: include: A housing having a receiving cavity; A workbench, located in the accommodating cavity, comprising a cooling device and an optical structure, wherein the cooling device is arranged around the periphery of the optical structure, and the optical structure is used to receive a light beam; A grating ruler is located on the inner wall of the housing; A color-changing structure is located on the inner wall of the housing between the grating ruler and the cooling device, the color-changing structure includes a plurality of color-changing particles arranged in sequence, the plurality of color-changing particles are arranged along a predetermined direction, the predetermined direction is the length direction of the color-changing structure, the color-changing particles are numbered along the predetermined direction, and the numbers are used to characterize different areas of the cooling device; the color-changing particles are composed of color-changing silica gel, and the main component of the color-changing silica gel is cobalt chloride; The color-changing structure changes color when in contact with liquid; A detection device, used to obtain color information of the color-changing structure, and determine whether liquid leakage occurs in the cooling device according to the color information of the color-changing structure; When the color of the color-changing structure changes, the number of the color-changing particles that have changed color is determined; and according to the number, the location where the cooling device has leaked is determined.

2. The lithographic apparatus according to claim 1, characterized in that The detection device comprises: An image acquisition device, located in the accommodating cavity, and used to acquire an image of the color-changing structure; A processing unit is communicatively connected to the image acquisition device, and is used to obtain color information of the color-changing structure based on the image of the color-changing structure, and determine whether liquid leakage occurs in the cooling device based on the color information.

3. The lithographic apparatus according to claim 2, characterized in that The processing unit is used to obtain color information of the color-changing structure according to the image of the color-changing structure, and determine that liquid leakage occurs in the cooling device according to the color information, including: Obtaining current color information of the color-changing structure; When the current color information is different from the preset color information, it is determined that liquid leakage occurs in the cooling device.

4. The lithographic apparatus according to claim 2, characterized in that: The processing unit is used to obtain color information of the color-changing structure according to the image of the color-changing structure, and determine that liquid leakage occurs in the cooling device according to the color information, including: Acquire initial color information and current color information of the color-changing structure, wherein the initial color information is color information of the color-changing structure when it is not in contact with liquid; When the current color information is different from the initial color information, it is determined that liquid leakage occurs in the cooling device.

5. The lithographic apparatus according to claim 1, characterized in that The detection device comprises: A decoding device is used to determine the location where the cooling device leaks according to the location where the color information of the color-changing structure changes.

6. The lithographic apparatus according to any one of claims 1 to 5, characterized in that: The detection device is also used to issue an alarm message when liquid leakage occurs in the cooling device.

7. The lithographic apparatus according to any one of claims 1 to 5, characterized in that: The detection device also includes: A driving device is fixed on the inner wall of the shell, and is used to drive at least part of the detection device to move on the inner wall of the shell to obtain color information of different positions of the color-changing structure.

8. The lithographic apparatus according to claim 7, characterized in that The driving device is a linear motor, wherein the linear motor comprises a track and a sliding part, the track is fixed on the inner wall of the shell, the sliding part is located on the track, and the sliding part is used to place at least part of the detection device.

9. The lithographic apparatus according to claim 7, characterized in that: The detection device also includes: The fixing part is fixed on the inner wall of the shell, and the driving device is installed on the fixing part.

10. The lithographic apparatus according to any one of claims 1 to 5, characterized in that: The color-changing structure comprises a color-changing layer and an adhesive layer stacked in sequence, wherein the adhesive layer is arranged in contact with the inner wall of the shell, and the color-changing layer is located on the surface of the adhesive layer away from the inner wall of the shell.

11. The lithographic apparatus according to claim 10, characterized in that The material of the color-changing layer includes cobalt chloride.

12. The lithographic apparatus according to any one of claims 1 to 5, characterized in that The lithographic apparatus further comprises: A water collecting tank is located on the inner wall of the housing between the grating ruler and the color changing structure, and the water collecting tank is used to collect the liquid; A drain pipe, wherein the water inlet of the drain pipe is connected to the water collecting tank, the water outlet of the drain pipe is located outside the photolithography equipment, and the drain pipe is used to discharge the liquid collected in the water collecting tank out of the photolithography equipment.

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