Film box and film box positioning device

Abstract

The present invention belongs to the field of photolithography technology, and specifically discloses a film box and a film box positioning device. The film box is provided with a receiving groove for accommodating a substrate, and the bottom of the film box is provided with an avoidance groove extending along the X direction. A positioning strip is convexly provided at the bottom of the avoidance groove. The film box has a positioning surface perpendicular to the X direction, and the receiving groove has a notch extending through the positioning surface, through which the substrate can enter or exit the receiving groove. The film box positioning device is used to position the film box as above, and includes a carrier plate, on which at least two positioning grooves are provided along the X direction, and the positioning strips of film boxes of different sizes can be inserted into the set positioning grooves; the film box positioning device has a detection surface, and when the film box is loaded on the carrier plate, the detection surface coincides with the positioning surface. The film box and the film box positioning device disclosed in the present invention can improve the compatibility of the film box positioning device with film boxes of different specifications.

Description

Technical Field

[0001] The present invention relates to the field of photolithography technology, and in particular to a film box and a film box positioning device. Background Art

[0002] In many semiconductor equipment, such as lithography machines, transport systems are required to quickly, accurately, and reliably transport materials such as substrates and silicon wafers to improve production efficiency, processing precision, and process flow. With the continuous advancement of integrated circuit manufacturing technology, lithography machines are able to process an increasing number of wafer types and sizes, requiring transport systems to be compatible with materials of varying sizes.

[0003] The materials processed by photolithography machines include round and square wafers. Square wafers come in a variety of sizes, including 50×50, 120×120, 160×100, and 160×200. This diversity in wafer size leads to a wide variety of wafer cassette sizes, making it more difficult for the transport system to locate and detect cassettes of varying sizes.

[0004] The prior art provides a loading mechanism that is compatible with loading different substrates, which includes a loading device, a loading jig, a wafer box and a sensor. The loading device includes a carrying platform, the carrying jig is arranged on the carrying platform, and wafers of different sizes to be processed are respectively arranged in different wafer boxes, and the wafer boxes containing wafers of different sizes are respectively arranged on the carrying platform and the loading jig of the loading device.

[0005] Although the loading mechanism provided by the prior art is compatible with the settings of two wafer cassettes of different sizes, during use, when switching from loading one wafer cassette to loading another wafer cassette, it is necessary to install and disassemble the loading fixture on the carrier, which reduces the loading efficiency and thus causes the transmission system to reduce the processing efficiency of the silicon wafers; and this loading mechanism is difficult to achieve compatibility with wafer cassettes of multiple sizes. Summary of the Invention

[0006] A first object of the present invention is to provide a film box that improves the positioning convenience and compatibility of the film box in a film box positioning device.

[0007] A second object of the present invention is to provide a film box positioning device that is compatible with the positioning and loading of film boxes of various sizes.

[0008] To achieve the above object, the present invention adopts the following technical solutions:

[0009] A film box is provided with a receiving groove for receiving a substrate, an avoidance groove is provided at the bottom of the film box along the X direction, a positioning strip is provided at the bottom of the avoidance groove, the film box has a positioning surface perpendicular to the X direction, the receiving groove has a notch passing through the positioning surface, and the substrate can enter or exit the receiving groove through the notch.

[0010] As an optimal technical solution for a film box, the positioning bar is arranged along the Y direction, the Y direction is perpendicular to the X direction, and the positioning surface is perpendicular to the XY plane; or the height of the positioning bar is less than or equal to the depth of the avoidance groove.

[0011] As a preferred technical solution of a film box, the film box is provided with one positioning strip, or the film box is provided with at least two positioning strips spaced apart along a length direction perpendicular to the positioning strip;

[0012] A stopper is provided in the avoidance groove, and each positioning bar has a stopper on the outer sides of both ends along the length direction thereof, and the minimum distance between the two stoppers at both ends of the same positioning bar is L;

[0013] For a film box provided with at least two positioning strips, different positioning strips correspond to different L values;

[0014] For any two film boxes of different specifications, at least one L value of one of the film boxes is different from the L values corresponding to all the positioning strips on the other film box.

[0015] A film cassette positioning device, for positioning the above-mentioned film cassette, comprising a carrier plate, wherein the carrier plate is provided with at least two positioning slots along the X-direction, wherein the positioning strips of the film cassettes of different specifications can be inserted into the predetermined positioning slots, and wherein the predetermined positioning slots corresponding to the film cassettes of different specifications are not completely the same, and wherein the slot width of the positioning slot along the X-direction is equal to the width of the corresponding positioning strip along the X-direction;

[0016] The film box positioning device has a detection surface perpendicular to the X direction. When the film box is loaded on the carrying plate, the detection surface coincides with the positioning surface.

[0017] As a preferred technical solution of the film box positioning device, the film box is provided with M positioning strips, where M is an integer greater than 0 and less than N, and the M positioning strips can be respectively inserted into M set positioning grooves;

[0018] The width of the positioning groove on the supporting plate gradually increases in the direction away from the detection surface, and the length of the positioning groove gradually decreases in the direction away from the detection surface; or, the width of the positioning groove gradually decreases in the direction away from the detection surface, and the length of the positioning groove gradually increases in the direction away from the detection surface; the length of any positioning strip is equal to the length of the set positioning strip, and the width of any positioning strip is equal to the width of the set positioning strip.

[0019] As an optimal technical solution for a film box positioning device, N X-direction positioning blocks are protruding from the upper surface of the carrier plate, where N is an integer greater than or equal to 3. The N X-direction positioning blocks are arranged parallel and at intervals along the X direction, and the positioning groove is formed between two adjacent X-direction positioning blocks.

[0020] As a preferred technical solution of the film box positioning device, the lengths of the N X-direction positioning blocks along the Y direction gradually increase in a direction away from the detection surface.

[0021] As a preferred technical solution of the cassette positioning device, the lengths of the N X-direction positioning blocks along the Y direction gradually increase in a direction away from the detection surface;

[0022] The film box is provided with M positioning strips, where M is an integer greater than 0 and less than N, and the M positioning strips can be respectively inserted into the M set positioning slots;

[0023] Each of the positioning bars is provided with a stopper at both ends along its length direction, the stopper is located in the avoidance groove, and the minimum distance between the two stoppers at both ends of the same positioning bar is L;

[0024] For any of the positioning strips, if, among the two X-direction positioning blocks that form the positioning groove set by the positioning strip, the length of one X-direction positioning block close to the detection surface is L1, and the length of the other X-direction positioning block is L2, then the L value corresponding to the positioning strip is greater than or equal to L1 and less than L2.

[0025] As a preferred technical solution of the film box positioning device, a film box detection sensor is provided at the bottom of each positioning groove, and the film box detection sensor is used to detect whether the positioning strip is inserted into the corresponding positioning groove.

[0026] As a preferred technical solution of the film box positioning device, a Y-direction positioning structure is provided on the carrier plate, and the Y-direction positioning structure is used to locate the Y-direction position of the film box on the carrier plate.

[0027] As a preferred technical solution of a film box positioning device, the film box positioning device further includes:

[0028] An adjusting bottom plate, the adjusting bottom plate being arranged opposite to and spaced apart from the supporting plate;

[0029] The horizontal adjustment assembly is arranged between the adjustment base plate and the supporting plate, and is used to realize the rotation adjustment of the supporting plate relative to the adjustment base plate around the X direction and / or around the Y direction.

[0030] As a preferred technical solution of the cassette positioning device, the horizontal adjustment components are provided in multiple groups at intervals along the circumference of the carrier plate, and the horizontal adjustment components include:

[0031] Adjusting bolts, the bearing plate and the adjusting base plate are connected by vertically arranged adjusting bolts;

[0032] The elastic member is sleeved on the adjusting bolt and is located between the bearing plate and the adjusting base plate.

[0033] As a preferred technical solution of the film box positioning device, the adjusting base plate is vertically connected to a vertically arranged positioning pin, and the adjusting base plate is rotatably connected to the workbench where the film box positioning device is arranged through the positioning pin.

[0034] As an optimal technical solution for a film box positioning device, the supporting plate and the adjusting base plate are both D-shaped structures, the vertical sides of the D-shaped structure are parallel to the detection surface, and the center of the circle corresponding to the arc part of the D-shaped structure is located on the central axis of the positioning pin.

[0035] As a preferred technical solution of the film box positioning device, the film box positioning device further includes: a protrusion sensor, which is fixed relative to the supporting plate and is used to detect whether the base located in the receiving groove protrudes from the positioning surface.

[0036] A substrate transport system comprises the above-mentioned film box positioning device and the film box.

[0037] A photolithography system includes the substrate transport system described above.

[0038] The beneficial effects of the present invention are:

[0039] The film box provided by the present invention can achieve positioning of the film box on the film box positioning device by arranging a positioning strip at the bottom of the avoidance groove, and the positioning strip and the groove structure on the film box positioning device cooperate to achieve positioning of the film box, and the size and positioning position of the positioning strip will not be affected by the size of the film box, so that film boxes of various sizes can be positioned on the film box positioning device by adopting the form of cooperating between the positioning strip and the groove structure; by arranging the avoidance groove running through in the X direction and arranging the positioning strip at the bottom of the avoidance groove, when a plurality of groove structures are provided on the film box positioning device for positioning film boxes of different sizes, the arrangement of the plurality of groove structures will not interfere with the arrangement of the film box on the film box positioning device.

[0040] The film box positioning device provided by the present invention is provided with a positioning groove adapted to the positioning strip on the film box, so that after a film box of a specific size is placed in the positioning groove, the detection surface coincides with the positioning surface, thereby realizing X-axis positioning of the film box on the film box positioning device; and because the positioning strip and the positioning groove are used in a positioning manner in which the positioning strip is coordinated with each other, the positioning strip is arranged at the bottom of the film box, and the avoidance groove of the film box passes through the film box in the X direction, so that the positioning groove in the film box positioning device can be located between two adjacent groove walls of the avoidance groove in the Y direction, thereby making the arrangement of the avoidance groove corresponding to a film box of a certain size not interfere with the arrangement of film boxes of other sizes on the carrier plate, so that the film box positioning device can be applicable to the arrangement of film boxes of various sizes.

[0041] The substrate transmission system provided by the present invention, by adopting the above-mentioned film box and film box positioning device, can realize the transmission of substrates of different sizes by the substrate transmission system, thereby improving the compatibility and transmission efficiency of the substrate transmission system for substrates of different sizes.

[0042] The photolithography system provided by the present invention can improve the processing capability and processing efficiency of the photolithography system for substrates of different sizes by adopting the above-mentioned substrate transmission system. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 is a structural diagram of a base transmission system provided in Example 1 of the present invention;

[0044] Figure 2 This is a schematic structural diagram of the film box provided by the first embodiment of the present invention at a first viewing angle;

[0045] Figure 3 is a structural schematic diagram of the film box provided by the first embodiment of the present invention at a second viewing angle;

[0046] Figure 4 This is a schematic diagram of the cooperation between the film box positioning device provided in the first embodiment of the present invention and a film box of a certain size;

[0047] Figure 5 This is a schematic diagram of the cooperation between the film box positioning device provided by the first embodiment of the present invention and a film box of another size;

[0048] Figure 6 Schematic diagram of the cooperation between the film box positioning device provided in the first embodiment of the present invention and a film box of another size;

[0049] Figure 7 2 is a schematic diagram of the back structure of the film box positioning device provided by an embodiment of the present invention;

[0050] Figure 8 It is a schematic diagram of the cooperation between the film box positioning device provided in the second embodiment of the present invention and a film box of a certain size.

[0051] The following are marked in the figure:

[0052] 1. Film cassette; 11. Mounting side frame; 111. Fixed frame; 1111. Fixed vertical plate; 1112. Fixed horizontal plate; 112. Carrying frame; 1121. Connecting plate; 1122. Carrying plate; 113. Limiting plate; 114. Accommodating groove; 115. Positioning surface; 12. Top plate; 13. Bottom plate; 14. Positioning strip; 15. Stopper; 151. Guide slope; 16. Avoidance groove;

[0053] 2. Cassette positioning device; 21. Carrying plate; 211. Arc-shaped avoidance hole; 22. Adjustment base plate; 221. Arc-shaped mounting hole; 222. Weight reduction hole; 23. X-axis positioning block; 231. Positioning slot; 24. Y-axis positioning block; 241. First Y-axis positioning block; 242. Second Y-axis positioning block; 243. Third Y-axis positioning block; 25. Horizontal adjustment assembly; 251. Adjustment bolt; 252. Elastic member; 26. Threaded connector; 27. Cassette detection sensor; 28. Lug sensor; 29. Front baffle; 291. Guide plate portion; 292. Fixed plate portion; 210. Positioning pin; 220. Positioning mark;

[0054] 3. Base. DETAILED DESCRIPTION

[0055] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It will be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all structures.

[0056] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0057] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0058] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meanings.

[0059] Figure 1 A schematic diagram of the structure of the base transmission system provided by the embodiment of the present invention is shown as follows: Figure 1 As shown, this embodiment provides a substrate transport system that can be used in photolithography systems or other semiconductor processing systems to position, detect, and transport sheet-like substrates 3, such as silicon wafers and glass, during processing or transport of substrates 3. The substrate transport system includes a cassette 1 and a cassette positioning device 2. The cassette 1 is used to carry substrates 3, and the cassette positioning device 2 is used to position and detect the cassette 1 to ensure the positioning accuracy of the cassette 1, thereby achieving rapid and accurate transport of substrates 3.

[0060] In this embodiment, the substrate 3 mainly refers to a square silicon substrate. The silicon substrate has various sizes, which can be 50×50, 120×120, 160×100, 160×200 and other sizes commonly used in photolithography systems, or other sizes. The present invention does not impose any specific restrictions on the specific size of the substrate 3.

[0061] To facilitate subsequent description, Figure 1A coordinate system is established in the directions shown, wherein the X direction is the length direction of the substrate 3, the Y direction is the width direction of the substrate 3, and the Z direction is the thickness direction of the substrate 3, and X, Y and Z satisfy the right-hand rule.

[0062] Figure 2 is a structural diagram of the film box provided by the first embodiment of the present invention at a first viewing angle, Figure 3 : is a schematic structural diagram of the film box provided by the first embodiment of the present invention at a second viewing angle, as shown in FIG. Figure 2 and 3 As shown, the film box 1 has a receiving groove 114 for receiving the base 3, and the bottom of the film box 1 is provided with an avoidance groove 16 along the X direction, and the bottom of the avoidance groove 16 is convexly provided with a positioning bar 14, and the height of the positioning bar 14 is less than or equal to the depth of the avoidance groove 16; the film box 1 has a positioning surface 115 perpendicular to the X direction, and the receiving groove 114 has a notch passing through the positioning surface 115, and the base 3 can enter or exit the receiving groove 114 through the notch.

[0063] The film box 1 provided in this embodiment can achieve the positioning of the film box 1 on the film box positioning device 2 by arranging a positioning strip 14 at the bottom of the avoidance groove 16, and the positioning strip 14 and the groove structure on the film box positioning device 2 can cooperate to realize the positioning of the film box 1 on the film box positioning device 2, and the size and positioning position of the positioning strip 14 will not be affected by the size of the film box 1, so that film boxes 1 of various sizes can be positioned on the film box positioning device 2 by adopting the form of cooperating between the positioning strip 14 and the groove structure; by arranging the avoidance groove 16 that passes through along the first direction and arranging the positioning strip 14 at the bottom of the avoidance groove 16, when the film box positioning device 2 is provided with multiple groove structures for positioning film boxes 1 of different sizes, the setting of multiple groove structures will not interfere with the setting of the film box 1 on the film box positioning device 2.

[0064] Preferably, the positioning strip 14 extends along the Y direction, which can better improve the positioning accuracy of the film box 1 on the film box positioning device 2 and is more conducive to the arrangement of the groove structure on the film box positioning device 2.

[0065] In this embodiment, since the base 3 is a square sheet structure, the film box 1 is roughly a hexahedron structure, and one side of the hexahedron structure is parallel to the YZ plane and forms a positioning surface 115. It is understood that when the base 3 is circular or other shapes, the shape of the film box 1 and / or the receiving groove 114 can be changed according to the shape of the base 3.

[0066] The receiving groove 114 extends through opposite sides of the film cassette 1 along the X-direction, and a retaining structure is provided at the opening of the receiving groove 114 at one end away from the positioning surface 115 to prevent the substrate 3 from falling out. Preferably, the dimension of the receiving groove 114 along the X-direction is equal to the dimension of the substrate 3 along the X-direction, so that when the substrate 3 is placed in the receiving groove 114, the end of the substrate 3 away from the positioning surface 115 abuts against the retaining structure, while the end of the substrate 3 facing the positioning surface 115 coincides with the positioning surface 115, thereby achieving the positioning of the substrate 3 in the film cassette 1, and facilitating the rapid and accurate grasping of the substrate 3 by the robotic arm fork used to grasp the substrate 3.

[0067] Furthermore, the film box 1 includes two mounting side frames 11 arranged opposite and spaced apart, a top plate 12 connected to the tops of the two mounting side frames 11, and a bottom plate 13 connected to the bottoms of the two mounting side frames 11. The top plate 12 and the bottom plate 13 are both detachably connected to the mounting side frames 11. Each mounting side frame 11 has a groove along the X direction on a side facing the other mounting side frame 11. The notches of the grooves of the two mounting side frames 11 are arranged opposite to each other and together form a receiving slot 114. This arrangement can simplify the processing of the film box 1, reduce the requirements for the overall processing accuracy of the film box 1, and effectively reduce the weight of the film box 1. At the same time, this arrangement can improve the modularity of the film box 1 by adjusting the distance between the two mounting side frames 11 to accommodate substrates 3 with the same size in the X direction but different sizes in the Y direction, thereby reducing the processing and design costs of the film box 1. In other embodiments, the film box 1 can also be a monolithic structure.

[0068] Furthermore, each mounting side frame 11 includes a detachably connected fixing frame 111, a supporting frame 112 and a limiting plate 113. The fixing frame 111 has an F-shaped structure, which includes a fixed vertical plate portion 1111 constituting the vertical side of the F-shaped structure and two fixed horizontal plate portions 1112 constituting the horizontal side of the F-shaped structure. The fixed vertical plate portion 1111 is parallel to the XZ plane, the fixed horizontal plate portion 1112 is parallel to the XY plane, and the fixed horizontal plate portion 1112 is located on the side of the fixed vertical plate portion 1111 facing the other mounting side frame 11.

[0069] The supporting frame 112 is arranged between the two fixed horizontal plate portions 1112, and the supporting frame 112 includes a vertically arranged connecting plate portion 1121 and a carrying plate portion 1122 parallel to and evenly spaced along the Z direction on the connecting plate portion 1121. The connecting plate portion 1121 is fitted with and connected to the fixed vertical plate portion 1111, and the carrying plate portion 1122 is perpendicular to the connecting plate portion 1121 and the above-mentioned groove is formed between the two adjacent carrying plate portions 1122. The base 3 located in the accommodating groove 114 is placed on the carrying plate portion 1122 located below the corresponding groove, and the two carrying plate portions 1122 on the uppermost and lowermost sides of the supporting frame 112 are respectively detachably connected to the fixed horizontal plate portion 1112.

[0070] A limiting plate 113 is located at one end of the groove opening and is detachably connected to the fixed frame 111. Limiting plate 113 forms a retaining structure that prevents the substrate from escaping from the receiving groove 114. In this embodiment, limiting plate 113 is parallel to the YZ plane and is taller than the supporting frame 112. This allows grooves on the same side to share a common limiting plate 113 for positioning, simplifying the structure.

[0071] The above arrangement, by configuring the mounting side frame 11 as a detachably connected fixed frame 111, a carrying frame 112, and a limiting plate 113, can reduce the machining accuracy requirements for the fixed frame 111 and the limiting plate 113 while ensuring the machining accuracy of the side surfaces of the carrying frame 112. This improves the machining convenience of the mounting side frame 11 and reduces the machining cost of the mounting side frame 11. Furthermore, by changing the number of mounting plate portions 1122 on the carrying frame 112 without changing other structures, mounting side frames 11 with different groove heights can be obtained to adapt to different substrate 3 transport requirements, thereby improving the flexibility and versatility of the film cassette 1. In other embodiments, the mounting side frame 11 can also adopt an integrated structure.

[0072] The top plate 12 is disposed on top of the mounting side frames 11 and is detachably connected thereto. The bottom plate 13 is disposed between the two mounting side frames 11 and is detachably connected to the fixed transverse plate portion 1112 located below. In this embodiment, the bottom plate 13 is higher than the bottom surfaces of the mounting side frames 11. The aforementioned avoidance groove 16 is formed between the bottom plate 13 and the two mounting side frames 11. The positioning bar 14 is disposed on the lower surface of the bottom plate 13.

[0073] Figure 4 Schematic diagram of the cooperation between the film box positioning device provided by the first embodiment of the present invention and a film box of a certain size. Figure 5 1 is a schematic diagram of the cooperation between the film box positioning device provided in the first embodiment of the present invention and a film box of another size. Figure 6 FIG. 1 is a schematic diagram showing the cooperation between the film box positioning device provided in the first embodiment of the present invention and a film box of another size. Figure 1 and Figure 4-6 It can be seen that the film box positioning device 2 includes a supporting plate 21 arranged along the XY plane, and the supporting plate 21 is provided with at least two positioning grooves 231 parallel and spaced along the X direction, and the groove width of the positioning groove 231 along the X direction is equal to the size of the positioning bar 14 along the X direction; the positioning bars 14 of film boxes 1 of different specifications can be inserted into the set positioning grooves 231, and the set positioning grooves corresponding to the film boxes 1 of different specifications are not exactly the same; a detection surface parallel to the YZ plane is provided on the supporting plate 21, and when film boxes 1 of different sizes are loaded on the supporting plate 21, the detection surface coincides with the positioning surface 115.

[0074] The aforementioned positioning grooves corresponding to the different sizes of film cassettes are not completely identical. Specifically, when each film cassette has only one positioning bar 14, the positioning bars 14 of the different sizes of film cassettes are inserted into different positioning grooves 231. For any two film cassettes 1 of different sizes, if at least one of the film cassettes 1 has two or more positioning bars 231, the positioning groove of at least one positioning bar 1 on the film cassette 1 will be different from the positioning grooves of all the positioning bars 1 on the other film cassette 1. It is understood that the different positioning grooves here mainly refer to the different positions of the positioning grooves on the carrier plate, and do not involve the size of the positioning grooves. That is, different positioning grooves 231 are positioning grooves 231 at different positions on the carrier plate 21.

[0075] The film box positioning device 2 provided in this embodiment, by providing a positioning groove 231 adapted to the positioning strip 14 on the film box 1, enables the film box 1 of a specific size to be set in the set positioning groove 231, and the detection surface coincides with the positioning surface 115, thereby realizing the X-axis positioning of the film box 1 on the film box positioning device 2; and because the positioning strip 14 and the positioning groove 231 are used for positioning, the positioning strip 14 is provided at the bottom of the film box 1, and multiple positioning grooves 231 are arranged side by side along the X direction, and the avoidance groove 16 of the film box 1 is provided through the film box 1 along the X direction, so that the positioning groove 231 in the film box positioning device 2 can be located between two adjacent groove walls of the avoidance groove 16 along the Y direction, so that the setting of the avoidance groove 16 corresponding to a certain size of the film box 1 will not interfere with the setting of the film box 1 of other sizes on the carrier plate 21, so that the film box positioning device 2 can be applicable to the setting of film boxes 1 of various sizes.

[0076] More preferably, in this embodiment, N X-direction positioning blocks 23 are provided on the carrier plate 21 in parallel and at intervals along the X-direction, where N is an integer greater than or equal to 3. The X-direction positioning blocks 23 are protruding from the upper surface of the carrier plate 21 and extend along the Y-direction. The aforementioned positioning grooves 231 are formed between two adjacent X-direction positioning blocks 23. The length of the X-direction positioning blocks 23 is less than the length of the avoidance groove 16 of the smallest sized film cassette 1 in the applicable film cassette 1 along the Y-direction. This arrangement allows the bottom surface of the film cassette 1 to abut against the upper surface of the carrier plate 21 when the film cassette 1 is placed on the carrier plate 21. At least the X-direction positioning blocks 23 whose projections on the carrier plate 21 coincide with the projections of the film cassette 1 on the carrier plate 21 are accommodated in the avoidance grooves 16, facilitating the placement of the positioning grooves 231 while preventing the positioning strips 14 from interfering with the placement of the film cassette 1. In other embodiments, a boss may be provided on the upper surface of the supporting plate 21 , the height of the boss being smaller than the depth of the avoidance groove 16 , and a plurality of the positioning grooves 231 are provided on the boss in parallel and at intervals along the X direction.

[0077] More preferably, each X-axis positioning block 23 is detachably connected to the carrier plate 21. This arrangement allows adjustment of the distance between each X-axis positioning block 23 and the detection surface, thereby adjusting the distance between each positioning slot 231 and the detection surface, as well as the slot width of the positioning slot 231. This effectively ensures that when a film cassette 1 adapted to the positioning slot 231 is loaded on the carrier plate 21, the detection surface coincides with the positioning surface 115 of the film cassette 1, thereby ensuring positioning accuracy and adjustable flexibility of the film cassette 1 on the carrier plate 21. In other embodiments, the X-axis positioning block 23 may also be welded to the carrier plate 21 or integrally formed.

[0078] In this embodiment, the length of the X-direction positioning block 23 gradually increases in a direction away from the detection surface, and a line connecting the length centers of all the X-direction positioning blocks 23 is parallel to the X-direction.

[0079] The film cassette 1 is provided with M positioning bars 14, where M is an integer greater than 0 and less than N. The M positioning bars 14 can be respectively inserted into M predetermined positioning slots 231. Each positioning bar 14 is provided with a stopper 15 at both ends along its length. The stopper 15 is located within the avoidance slot 16, and the minimum distance between the two stoppers 15 at both ends of the same positioning bar 14 is L. For any positioning bar 14, if the length of one of the two X-direction positioning blocks 23 forming the positioning slot 16 set for the positioning bar 14 is L1 and the length of the other X-direction positioning block 23 is L2, then the L value corresponding to the positioning bar 14 is greater than or equal to L1 and less than L2. For any two film cassettes 1 of different specifications, the predetermined positioning slot corresponding to at least one positioning bar 14 in one of the film cassettes 1 is different from the predetermined positioning slots corresponding to all positioning bars 14 in the other film cassette 1.

[0080] The above arrangement ensures that, under the premise that the positioning surface 115 does not exceed the detection surface, a film box 1 of a specific size can only be placed in the positioning groove 231 corresponding to the film box 1 and cannot be placed in other positioning grooves 231, thereby effectively preventing the problem of inaccurate positioning caused by misplacement of the film box 1.

[0081] In another embodiment, the cassette 1 can be prevented from misalignment by matching the width of the positioning slot 231 with the width of the positioning strip 14. For example, the width of the positioning slot 231 on the carrier plate 21 can be gradually increased in the direction away from the detection surface, while the length of the positioning slot 231 can be gradually decreased in the direction away from the detection surface; or the width of the positioning slot can be gradually decreased in the direction away from the detection surface, while the length of the positioning slot can be gradually increased in the direction away from the detection surface. If the length and width of any positioning strip 14 are equal to the length and width of the designated positioning slot, the same error-proofing function can be achieved, ensuring that any positioning strip 14 can only be placed in the designated positioning slot.

[0082] In this embodiment, a positioning bar 14 is provided at the bottom of each film box 1, and the number of positioning grooves 231 is N-1. Therefore, the number of film boxes 1 that can be positioned and identified by the film box positioning device 2 is N-1. In other embodiments, more than one positioning bar 14 can be provided side by side along the X direction at the bottom of the film box 1. If the bottom of the film box 1 has one positioning bar 14, then the N-1 positioning grooves 231 can correspond to and identify N-1 different sizes of film boxes 1; if the bottom of the film box 1 has two positioning bars 14, then any two of the N-1 positioning grooves 231 can identify one size of film box 1, that is, the N-1 positioning grooves 231 can identify a total of If the cassette 1 has three positioning bars 14 at the bottom, then the combination of any three positioning grooves 231 in the N-1 positioning grooves 231 can identify a cassette 1 of one size, that is, the N-1 positioning grooves 231 can identify a total of cassettes 1 of different sizes and having three positioning strips 14 at the bottom. That is, if the carrier plate 21 is provided with N-1 positioning slots 231, the maximum number of cassettes 1 that the cassette positioning device 2 can be compatible with and recognize is

[0083] In this embodiment, the number of X-direction positioning blocks 23 is 7, and the number of positioning slots 231 is 6, but the present invention is not limited to this. The number of positioning slots 231 can be specifically set according to the size and number of compatible film boxes 1.

[0084] It is understandable that the number of positioning strips on cassettes of different specifications may be the same or different, and the present invention does not impose any limitation on this.

[0085] In this embodiment, the detection surface is a virtually formed vertical plane, which is difficult to provide mechanical limitation for the positioning of the film box 1. Therefore, further, a front baffle 29 is provided on the supporting plate 21. The front baffle 29 is located on the front side of the film box 1 (the side of the film box 1 away from the limit plate 113) and is arranged along the Y direction. The front baffle 29 is used to prevent the film box 1 from being misplaced into other positioning slots 231 on the side of the set positioning slot 231 close to the detection surface.

[0086] More preferably, the front baffle 29 includes a guide plate portion 291 that is tilted relative to the YZ plane. The guide plate portion 291 protrudes from the upper surface of the carrier plate 21 and is tilted upward in a direction away from the detection surface and the film cassette. The provision of the guide plate portion 291 can guide the film cassette 1 when it is loaded on the carrier plate 21, thereby improving the stability of the placement of the film cassette 1 in the film cassette positioning device 2.

[0087] In order to further improve the positioning accuracy of the film box 1 on the film box positioning device 2, a Y-direction positioning structure is further provided on the carrier plate 21 of the film box positioning device 2. The Y-direction positioning structure is used to position the film box 1 on the carrier plate in the Y direction.

[0088] In this embodiment, the Y-direction positioning structure includes Y-direction positioning blocks 24 protruding from the upper surface of the carrier plate 21. At least a pair of Y-direction positioning blocks 24 are provided. When the film cassette 1 is loaded on the carrier plate 21, two opposing side surfaces of the film cassette 1 along the Y direction abut against two Y-direction positioning blocks 24 in the pair. More preferably, the two Y-direction positioning blocks 24 in each pair of Y-direction positioning blocks 24 are symmetrically arranged with respect to a line connecting the longitudinal centers of the N X-direction positioning blocks 23, thereby ensuring that the centerline of the film cassette 1 along the Y direction coincides with a line connecting the centers of the X-direction positioning blocks 23, thereby improving positioning accuracy.

[0089] Furthermore, multiple groups of Y-direction positioning blocks 24 are sequentially arranged from the inside outward, with the length center line of the N X-direction positioning blocks 23 as a reference. Each group of Y-direction positioning blocks 24 includes a pair of Y-direction positioning blocks 24 or at least two pairs of Y-direction positioning blocks 24 spaced apart along the X direction. To prevent the inner Y-direction positioning blocks 24 from interfering with the placement of large-sized film cassettes 1, the height of the Y-direction positioning blocks 24 protruding from the carrier plate 21 is less than the depth of the avoidance groove 16. This allows the inner Y-direction positioning blocks 24 to remain in the avoidance groove 16 of the film cassette 1 while the outer Y-direction positioning blocks 24 are used for positioning.

[0090] In the present embodiment, three Y-direction positioning block groups are provided on the carrier plate 21, namely, a first Y-direction positioning block group, a second Y-direction positioning block group, and a third Y-direction positioning block group. The two second Y-direction positioning blocks 242 of the second Y-direction positioning block group are arranged between the two third Y-direction positioning blocks 243 of the third Y-direction positioning block group, and the two first Y-direction positioning blocks 241 of the first Y-direction positioning block group are located between the two second Y-direction positioning blocks 242 of the two second Y-direction positioning block groups. The first Y-direction positioning block group, the second Y-direction positioning block group, and the third Y-direction positioning block group are respectively used to perform X-direction positioning on film cassettes 1 having different widths. That is, the arrangement of the Y-direction positioning blocks 24 provided in the present embodiment can achieve positioning of film cassettes 1 of three different width types.

[0091] Typically, the larger the size of the film cassette 1 in the Y direction, the larger its size in the X direction. To improve the accuracy of the Y-direction positioning blocks 24 in positioning the film cassette 1, in this embodiment, a first Y-direction positioning block group is provided at a position close to the detection surface, two second Y-direction positioning block groups are provided at intervals along the X direction, and three third Y-direction positioning block groups are provided at intervals along the X direction. In other embodiments, the number of Y-direction positioning block groups and the spacing between the two Y-direction positioning blocks 24 in each Y-direction positioning block group can be specifically set according to the size of the film cassette 1 as needed.

[0092] In this embodiment, the Y-axis positioning block 24 is detachably connected to the carrier plate 21, allowing the Y-axis positioning block 24 to be specifically positioned in the Y direction according to the size of the desired cassette 1, thereby improving the applicability and versatility of the cassette positioning device 2 for the cassette 1 and reducing design costs. Preferably, the detachable connection is a screw connection, which provides greater stability. In other embodiments, the Y-axis positioning block 24 may also be welded to the carrier plate 21 or integrally formed.

[0093] In this embodiment, the projected areas of the X-axis positioning block 23 and the Y-axis positioning block 24 on the carrier plate 21 are both rectangular, resulting in a simple structure, convenient installation, and reliable positioning. In other embodiments, the X-axis positioning block 23 and the Y-axis positioning block 24 may also have other shapes, and the present invention does not impose any specific limitations on this.

[0094] More preferably, in this embodiment, a positioning mark 220 is provided on the upper surface of the carrier plate 21. The positioning mark 220 is used to visually provide a rough positioning for the installation of the film cassette 1 on the carrier plate 21. The positioning mark 220 does not protrude from the upper surface of the carrier plate 21. It can be a color or pattern mark formed on the carrier plate 21 with a colored marker, or a groove mark formed on the surface of the carrier plate 21.

[0095] To detect the position and type of the film cassette 1, a film cassette detection sensor 27 is provided at the bottom of each positioning slot 231. The film cassette detection sensor 27 is used to detect whether the positioning bar 14 is inserted into the corresponding positioning slot 231. To facilitate the installation of the film cassette detection sensor 27, a mounting slot is provided at the bottom of the positioning slot 231 through the carrier plate 21. A circuit board is provided on the lower surface of the carrier plate 21, and multiple film cassette detection sensors 27 are installed on the circuit board. The position and number of the film cassette detection sensors 27 correspond one-to-one with the positioning slots 231, and the film cassette detection sensors 27 are at least partially accommodated in the mounting slot.

[0096] In this embodiment, the cassette detection sensor 27 is a mechanical sensor. When no cassette 1 is positioned in the positioning slot 231, the free end of its elastic blocking piece protrudes from the bottom of the positioning slot 231. When the positioning bar 14 of the cassette 1 is inserted into the positioning slot 231, the elastic blocking piece is pressed down by the positioning bar 14, thereby triggering the cassette detection sensor 27, identifying the cassette 1 having the positioning bar 14 inserted in the positioning slot 231, and thus identifying the cassette 1 having the positioning bar 14. The use of a mechanical cassette detection sensor 27 can prevent interference with the cassette detection sensor 27 in the positioning slot 231 when detecting whether a cassette 1 is inserted in another positioning slot 231, thereby improving detection accuracy and reducing detection costs.

[0097] Furthermore, in order to improve the positioning accuracy of the film box 1 in the film box positioning device 2, the film box positioning device 2 also includes an adjustment base plate 22 arranged relative to the supporting plate 21, the adjustment base plate 22 is located below the supporting plate 21, and a horizontal adjustment component 25 is arranged between the supporting plate 21 and the adjustment base plate 22. The horizontal adjustment component 25 is used to realize the Rx and / or Ry adjustment of the supporting plate 21 relative to the adjustment base plate 22, thereby adjusting the horizontality of the supporting plate 21.

[0098] Specifically, in this embodiment, multiple groups of level adjustment assemblies 25 are arranged at intervals along the circumference of the support plate 21. The level adjustment assemblies 25 include adjustment bolts 251 and elastic members 252. The support plate 21 and the adjustment base plate 22 are connected by vertically arranged adjustment bolts 251. The elastic members 252 are sleeved on the adjustment bolts 251 and located between the support plate 21 and the adjustment base plate 22. By adjusting the degree of tightening of each group of adjustment bolts 251, the distance between the support plate 21 and the adjustment base plate 22 at the corresponding adjustment bolt 251 is adjusted, thereby adjusting the levelness of the support plate 21. The provision of the elastic members 252 enables the deformation of the elastic members 252 when tightening or loosening the adjustment bolts 251 to adjust the distance between the support plate 21 and the adjustment base plate 22 at corresponding positions while ensuring the connection reliability between the support plate 21 and the adjustment base plate 22.

[0099] In this embodiment, the elastic member 252 is preferably a spherical washer. More preferably, the spherical washer includes a concave spherical washer and a convex spherical washer disposed opposite each other along the axial direction of the adjusting bolt 251. The concave spherical washer is disposed below the convex spherical washer, with the concave portion facing the convex spherical washer and the convex portion of the convex spherical washer facing the support plate 21, thereby improving the deformation capability of the elastic member 252. In other embodiments, the elastic member 252 may also adopt other structures, such as a spring or other compressible deformation structure.

[0100] In this embodiment, the substrate transmission system further includes a workbench for placing the cassette positioning device 2 and a manipulator fork for taking and placing the cassette 1 in the cassette 1. The manipulator fork takes and places the substrate 3 in the receiving slot 114 from the front end opening of the receiving slot 114. In order to improve the convenience of the manipulator fork in taking and placing the substrate 3, the manipulator fork is installed on the workbench and is usually arranged opposite the positioning surface 115 of the cassette 1. In order to ensure that the manipulator fork does not interfere with the cassette 1 when entering the cassette 1, and to improve the efficiency and accuracy of the manipulator fork in taking and placing the substrate 3, the cassette positioning device 2 is preferably rotatably connected to the workbench so that the cassette positioning device 2 can rotate relative to the workbench around the Z axis, thereby adjusting the orientation of the positioning surface 115, and then adjusting the relative position of the positioning surface 115 and the manipulator fork.

[0101] Figure 7FIG. 1 is a schematic diagram of the back structure of the film box positioning device provided by an embodiment of the present invention. Figure 7 As shown, specifically, the adjustment base plate 22 is rotatably connected to the workbench via a vertically arranged positioning pin 210. In this embodiment, the positioning pin 210 is fixed to the workbench, and in addition to achieving the rotational connection of the film cassette positioning device 2, it also provides a positioning for the installation of the film cassette positioning device 2 on the workbench. The adjustment plate is provided with a positioning hole, and the positioning pin 210 is inserted into the positioning hole. In other embodiments, the positioning pin 210 can also be fixed to the adjustment base plate 22 and rotatably connected to the workbench.

[0102] To secure the cassette positioning device 2 to the workbench, an arcuate mounting hole 221 is provided on the adjustment base plate 22. The center of the circle corresponding to the arcuate mounting hole 221 coincides with the central axis of the positioning pin 210. A connecting threaded hole is provided on the workbench corresponding to the arcuate mounting hole 221. The adjustment base plate 22 is connected to the workbench via a threaded connector 26 that penetrates the arcuate mounting hole 221 and the connecting threaded hole. By providing the arcuate mounting hole 221, the adjustment base plate 22 can be rotated relative to the workbench by loosening the threaded connector 26. At the same time, the length of the arcuate mounting hole 221 determines the angle to which the adjustment base plate 22 can be adjusted relative to the workbench.

[0103] Preferably, a plurality of arc-shaped mounting holes 221 are provided at intervals around the central axis of the positioning pin 210 to improve the connection stability between the cassette positioning device 2 and the workbench. In this embodiment, four arc-shaped mounting holes 221 are provided, but the present invention is not limited thereto, and the number of arc-shaped mounting holes 221 can be set according to installation requirements.

[0104] Preferably, to facilitate operation of the threaded connector 26, an arc-shaped avoidance hole 211 is provided on the support plate 21 at a position corresponding to the arc-shaped mounting hole 221. The center arc of the arc-shaped avoidance hole 211 coincides with the center arc of the arc-shaped mounting hole 221 in the horizontal plane, and the length and width of the arc-shaped avoidance hole 211 are respectively greater than the length and width of the arc-shaped mounting hole 221. The number and position of the arc-shaped avoidance holes 211 correspond one-to-one with the arc-shaped mounting holes 221.

[0105] Preferably, if Figure 1As shown, the adjustment base plate 22 and the supporting plate 21 are both "D"-shaped structures with substantially the same shape and size. The positioning surface 115 of the film box 1 is arranged toward and close to the vertical side of the "D"-shaped structure, and is parallel to the vertical side of the "D"-shaped structure, so as to provide a better visual positioning for the setting of the film box 1 on the film box positioning device 2. The length center line of the N X-direction positioning blocks 23 coincides with the symmetry axis of the "D"-shaped structure, so as to improve the layout rationality and space utilization of the structure on the supporting plate 21 and reduce the area of the supporting plate 21. At the same time, the center of the circle corresponding to the arc portion constituting the "D"-shaped structure is located on the central axis of the positioning pin 210, so as to provide a positioning reference for the opening of the arc-shaped mounting hole 221 and the arc-shaped avoidance hole 211, thereby simplifying the structure of the supporting plate 21 and the adjustment base plate 22.

[0106] Furthermore, to improve the accuracy and reliability of the robotic fork's placement of substrate 3 in cassette 1 and prevent substrate 3 from falling from the cassette, a protrusion sensor 28 is provided on cassette positioning device 2. This sensor is used to detect whether cassette 1 protrudes outside positioning surface 115. Protrusion sensor 28 is positioned at the center of the vertical side of the "D"-shaped structure and is removably connected to support plate 21 or adjustment base plate 22. In this embodiment, protrusion sensor 28 is a reflective photoelectric sensor whose emitting end is capable of emitting detection light in a vertical direction, and the distance between the emitted detection light and the detection surface is greater than 0 and less than 10 mm.

[0107] Furthermore, to facilitate the connection between the front baffle 29 and the carrier plate 21, the front baffle 29 includes a fixing plate portion 292 parallel to the YZ plane. The fixing plate portion 292 extends in the Y direction and aligns parallel to the side surface of the vertical edge of the D-shaped structure of the carrier plate 21. The fixing plate portion 292 is removably connected to the side surface. This arrangement can further facilitate the positioning and installation accuracy of the front baffle 29. To prevent the installation of the front baffle 29 from interfering with the detection of the tab sensor 28, the front baffle 29 is provided with a tab sensor 28 on each side along the Y direction.

[0108] This embodiment further provides a photolithography system, including the above-mentioned substrate transmission system. The photolithography system provided in this embodiment can improve the photolithography efficiency by adopting the above-mentioned substrate transmission system.

[0109] Example 2

[0110] Figure 8 FIG. 1 is a schematic diagram showing the cooperation between the film box positioning device provided in the second embodiment of the present invention and a film box of a certain size. Figure 8As shown, this embodiment provides a substrate transport system, including a film cassette 1 and a film cassette positioning device 2. Compared with the first embodiment, the structures of the film cassette 1 and the film cassette positioning device 2 provided in this embodiment are the same as those in the first embodiment, with only the Y-axis positioning structure and the arrangement of the stopper 15 being different. This embodiment will not further describe the same structures as those in the first embodiment.

[0111] like Figure 8 As shown, in this embodiment, the minimum distance between the two stoppers 15 on the film cassette 1 is L0. Of the two X-direction positioning blocks 23 forming the corresponding positioning slot 231 for the film cassette 1, the length of the X-direction positioning block 23 closest to the detection surface is L1, so L0 = L1. This arrangement allows the two stoppers 15 on the film cassette 1 to abut against the end faces of the X-direction positioning blocks 23 after the positioning bar 14 of the film cassette 1 is inserted into the corresponding positioning slot 231, thereby achieving X-direction positioning of the film cassette 1 on the carrier plate 21. That is, in this embodiment, the stoppers 15 form a Y-direction positioning structure. The X-direction positioning of the film cassette 1 on the carrier plate 21 can be referred to in Example 1 and will not be further described here.

[0112] More preferably, in this embodiment, the stopper 15 includes a first portion and a second portion arranged along the X-direction, the first portion is located at one end of the second portion facing the detection surface, and a side of the first portion facing the other stopper 15 abuts against the end face of the X-direction positioning block 23 of the corresponding positioning groove 231 facing the detection surface, and a side of the second portion facing the other stopper 15 abuts against the end face of the X-direction positioning block 23 of the corresponding positioning groove 231 away from the detection surface. Thus, the stopper 15 abuts against the end faces of the two X-direction positioning blocks 23 forming the corresponding positioning groove 231, so as to better realize the positioning function of the film box 1 on the film box positioning device 2.

[0113] This embodiment further provides a photolithography system, including the above-mentioned substrate transmission system. The photolithography system provided in this embodiment can improve the photolithography efficiency by adopting the above-mentioned substrate transmission system.

[0114] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A film box positioning device for positioning a film box, wherein the film box is provided with a receiving groove (114) for receiving a base (3), the bottom of the film box is provided with an avoidance groove (16) extending through the bottom along the X direction, a positioning strip (14) is provided protruding from the bottom of the avoidance groove (16), the film box has a positioning surface (115) perpendicular to the X direction, the receiving groove (114) has a notch extending through the positioning surface (115), and the base (3) can enter or exit the receiving groove (114) through the notch, wherein: The film box positioning device (2) includes a carrier plate (21), and at least two positioning grooves (231) are provided on the carrier plate (21) along the X direction. The positioning strips (14) of the film boxes of different specifications can be inserted into the set positioning grooves (231), and the set positioning grooves corresponding to the film boxes of different specifications are not completely the same. The slot width of the positioning groove (231) along the X direction is equal to the width of the corresponding positioning strip (14) along the X direction. The film box positioning device (2) has a detection surface perpendicular to the X direction, and when the film box is loaded on the carrier plate (21), the detection surface coincides with the positioning surface (115); A front baffle (29) is provided on the carrier plate (21), the front baffle (29) is located at the front side of the film box (1) and is arranged along the Y direction, the front baffle (29) includes a guide plate portion (291) arranged obliquely relative to the YZ plane, the guide plate portion (291) protrudes from the upper surface of the carrier plate (21), and the guide plate portion (291) is inclined from bottom to top in a direction away from the detection surface and the film box (1); A Y-direction positioning structure is also provided on the carrier plate (21), and the Y-direction positioning structure is used to position the film box on the carrier plate (21) in the Y direction.

2. The cassette positioning device according to claim 1, characterized in that: The positioning bar (14) is arranged along the Y direction, the Y direction is perpendicular to the X direction, and the positioning surface (115) is perpendicular to the XY plane; or the height of the positioning bar (14) is less than or equal to the groove depth of the avoidance groove (16).

3. The cassette positioning device according to claim 1, wherein: The film box is provided with one positioning strip (14), or the film box is provided with at least two positioning strips (14) spaced apart along a length direction perpendicular to the positioning strip (14); A stopper (15) is provided in the avoidance groove (16), and each positioning bar (14) has a stopper (15) on the outer sides of both ends along the length direction thereof, and the minimum distance between the two stoppers (15) at both ends of the same positioning bar (14) is L; For a film box provided with at least two positioning strips (14), different positioning strips (14) correspond to different L values; For any two film boxes of different specifications, at least one L value of one of the film boxes is different from the L values corresponding to all the positioning strips (14) on the other film box.

4. The cassette positioning device according to claim 1, wherein: The film box is provided with M positioning bars (14), where M is an integer greater than 0 and less than N, and the M positioning bars (14) can be respectively inserted into M set positioning slots (231); The slot width of the positioning slot (231) on the carrying plate (21) gradually increases in a direction away from the detection surface, and the slot length of the positioning slot (231) gradually decreases in a direction away from the detection surface; or the slot width of the positioning slot (231) gradually decreases in a direction away from the detection surface, and the slot length of the positioning slot (231) gradually increases in a direction away from the detection surface; The length of any one of the positioning strips (14) is equal to the slot length of the set positioning slot, and the width of any one of the positioning strips (14) is equal to the slot width of the set positioning slot.

5. The cassette positioning device according to claim 1, characterized in that: N X-direction positioning blocks (23) are convexly provided on the upper surface of the carrier plate (21), wherein N is an integer greater than or equal to 3, and the N X-direction positioning blocks (23) are arranged parallel to and spaced apart from each other along the X-direction, with the positioning groove (231) being formed between two adjacent X-direction positioning blocks (23).

6. The cassette positioning device according to claim 5, characterized in that: The lengths of the N X-direction positioning blocks (23) along the Y direction gradually increase in a direction away from the detection surface.

7. The cassette positioning device according to claim 5, characterized in that: The film box is provided with M positioning bars (14), where M is an integer greater than 0 and less than N, and the M positioning bars (14) can be respectively inserted into M set positioning slots (231); Each positioning bar (14) is provided with a stopper (15) at both ends along its length direction, the stopper (15) is located in the avoidance groove (16), and the minimum distance between the two stoppers (15) at both ends of the same positioning bar (14) is L; For any of the positioning strips (14), if, of the two X-direction positioning blocks (23) forming the positioning groove (231) set by the positioning strip (14), the length of one of the X-direction positioning blocks (23) close to the detection surface is L1, and the length of the other X-direction positioning block (23) is L2, then the L value corresponding to the positioning strip (14) is greater than or equal to L1 and less than L2.

8. The cassette positioning device according to any one of claims 1 to 7, characterized in that: A film box detection sensor (27) is provided at the bottom of each positioning slot (231), and the film box detection sensor (27) is used to detect whether the positioning strip (14) is inserted into the corresponding positioning slot (231).

9. The film box positioning device according to any one of claims 1 to 7, characterized in that: The cassette positioning device (2) further comprises: an adjusting bottom plate (22), the adjusting bottom plate (22) being arranged opposite to and spaced apart from each other below the carrying plate (21); A horizontal adjustment component (25) is provided between the adjustment base plate (22) and the supporting plate (21) and is used to realize rotational adjustment of the supporting plate (21) relative to the adjustment base plate (22) around the X direction and / or around the Y direction.

10. The cassette positioning device according to claim 9, characterized in that: The horizontal adjustment components (25) are arranged in multiple groups at intervals along the circumference of the carrier plate (21), and the horizontal adjustment components (25) include: Adjusting bolts (251), the bearing plate (21) and the adjusting base plate (22) are connected by vertically arranged adjusting bolts (251); The elastic member (252) is sleeved on the adjusting bolt (251) and is located between the bearing plate (21) and the adjusting base plate (22).

11. The cassette positioning device according to claim 9, characterized in that: The adjusting base plate (22) is vertically connected to a vertically arranged positioning pin (210), and the adjusting base plate (22) is rotatably connected to a workbench on which the film box positioning device (2) is arranged via the positioning pin (210).

12. The cassette positioning device according to claim 11, characterized in that: The bearing plate (21) and the adjustment base plate (22) both have a D-shaped structure, the vertical sides of the D-shaped structure are parallel to the detection surface, and the center of the arc portion of the D-shaped structure is located on the central axis of the positioning pin (210).

13. The cassette positioning device according to any one of claims 1 to 7, characterized in that: The film box positioning device (2) further includes: a protrusion sensor (28), the protrusion sensor (28) being fixed relative to the carrier plate (21), and the protrusion sensor (28) being used to detect whether the base (3) located in the receiving groove (114) protrudes from the positioning surface (115).

Images