Impedance matching network regulation method

Abstract

The application relates to an impedance matching network adjusting method. The method comprises the following steps: an impedance adjusting network generates at least one control voltage according to an incident signal and a reflected signal between an impedance matching network and a load impedance, and sends the control voltage to the impedance matching network, wherein the incident signal is a signal transmitted by the impedance matching network to the load impedance, and the reflected signal is a signal returned by the load impedance to the impedance matching network; the impedance matching network adjusts impedance according to the control voltage to obtain an adjusted matching impedance; and the sum of the matching impedance and the load impedance is equal to the power impedance of the radio frequency power supply. By using the method, the impedance of the impedance matching network can be adjusted through the control voltage, the impedance of the impedance matching network does not need to be changed through a servo stepping motor, the impedance matching process is shortened, and the impedance matching speed is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of impedance matching network regulation, in particular to an impedance matching network regulation method. BACKGROUND

[0002] The radio frequency power supply system includes a radio frequency power supply, which is a matched power supply of a plasma chamber and is applied to the fields of radio frequency sputtering, PECVD chemical vapor deposition, reactive ion etching, etc. In the implementation process, the inventor finds that at least the following problems exist in the prior art:

[0003] The impedance of the nonlinear load in the plasma chamber is not equal to the constant output impedance of the radio frequency power supply, so there is a serious impedance mismatch between the radio frequency power supply and the plasma chamber, which causes a large reflected power on the transmission line, and the power generated by the radio frequency power supply cannot be fully delivered to the plasma chamber, resulting in large power loss.

[0004] To solve this problem, the impedance matching network in the radio frequency power supply system is adjusted so that the sum of the impedance of the matching network and the impedance of the nonlinear load in the plasma chamber is equal to the impedance of the radio frequency power supply, thereby achieving impedance matching and achieving maximum output power. In the prior art, the impedance matching is usually achieved by changing the capacitance value in the matching box. A common method is to change the distance between the two poles of the capacitor by using a servo stepper motor to change the value of the capacitor. This adjustment method requires high precision of the servo stepper motor, and the adjustment speed is not fast enough. SUMMARY

[0005] Therefore, it is necessary to provide an impedance matching network regulation method that can accelerate the adjustment speed to solve the above technical problems.

[0006] An impedance matching network regulation method is applied to a radio frequency power supply system, the radio frequency power supply system includes a radio frequency power supply, an impedance matching network, an impedance regulation network and a load impedance, the impedance matching network is electrically connected with the radio frequency power supply, the impedance regulation network and the load impedance respectively, the impedance regulation network is also electrically connected with the load impedance, and the method comprises the following steps:

[0007] The impedance regulation network generates at least one control voltage according to the incident signal and the reflected signal between the impedance matching network and the load impedance, and sends the control voltage to the impedance matching network, wherein the incident signal is the signal transmitted by the impedance matching network to the load impedance, and the reflected signal is the signal returned by the load impedance to the impedance matching network.

[0008] The impedance matching network adjusts impedance according to the control voltage to obtain an adjusted matching impedance; wherein the sum of the matching impedance and the load impedance is equal to the power supply impedance of the radio frequency power supply.

[0009] Optionally, the impedance adjusting network comprises a directional coupler, an amplitude and phase measurement chip and a control module, the amplitude and phase measurement chip is electrically connected with the directional coupler and the control module respectively, and the control module is electrically connected with the impedance matching network.

[0010] Optionally, the impedance adjusting network generates at least one control voltage according to the incident signal and the reflected signal between the impedance matching network and the load impedance, and sends the control voltage to the impedance matching network, comprising:

[0011] The directional coupler collects the incident signal and the reflected signal between the impedance matching network and the load impedance;

[0012] The amplitude and phase measurement chip compares the incident signal and the reflected signal to obtain a comparison result, and generates a difference voltage according to the incident signal and the reflected signal when the comparison result indicates that there is a difference between the incident signal and the reflected signal, wherein the difference voltage comprises an amplitude difference voltage and a phase angle difference voltage;

[0013] The control module generates at least one control voltage according to the amplitude difference voltage and the phase angle difference voltage, and transmits the control voltage to the impedance matching network.

[0014] Optionally, after the amplitude and phase measurement chip compares the incident signal and the reflected signal to obtain a comparison result, the method further comprises:

[0015] The amplitude and phase measurement chip stops generating the difference voltage when the comparison result indicates that there is no difference between the incident signal and the reflected signal;

[0016] The step of collecting the incident signal and the reflected signal between the impedance matching network and the load impedance by the directional coupler is performed.

[0017] Optionally, the control module comprises a master control module and a controlled voltage source, and the control module generates at least one control voltage according to the amplitude difference voltage and the phase angle difference voltage, and transmits the control voltage to the impedance matching network, comprising:

[0018] The master control module generates at least one control signal according to the amplitude difference voltage and the phase angle difference voltage;

[0019] The controlled voltage source converts the control signal to generate a corresponding control voltage and transmits the control voltage to the impedance matching network.

[0020] Optionally, the impedance matching network comprises a first branch, a second branch, a third branch and a fourth branch, a first end of the first branch and a first end of the fourth branch are electrically connected to a first node, a second end of the first branch and a first end of the second branch are electrically connected to a second node, a second end of the second branch and a first end of the third branch are electrically connected to a third node, a second end of the third branch and a second end of the fourth branch are electrically connected to a fourth node, the first node is electrically connected to a first end of the radio frequency power source, the second node is electrically connected to a second end of the radio frequency power source, the third node is electrically connected to the directional coupler, and the fourth node is electrically connected to the load impedance.

[0021] Optionally, the first branch and the third branch are inductive branches, and the inductive branches comprise a first capacitor and a first inductor connected in series.

[0022] Optionally, the second branch and the fourth branch are capacitive branches, and the capacitive branches comprise a second capacitor and a third capacitor connected in series.

[0023] Optionally, the control voltage comprises a first voltage and a second voltage, the first voltage and the second voltage correspond to different control signals respectively, and the transmitting the control voltage to the impedance matching network comprises:

[0024] The controlled voltage source transmits the first voltage to an inductive branch in the impedance matching network, so that the impedance matching network adjusts the impedance of the inductive branch according to the first voltage;

[0025] The controlled voltage source transmits the second voltage to a capacitive branch in the impedance matching network, so that the impedance matching network adjusts the impedance of the capacitive branch according to the second voltage.

[0026] One of the above technical solutions has the following advantages and beneficial effects:

[0027] The impedance adjustment network determines the loss degree of signal transmission power according to the incident signal and the reflected signal between the impedance matching network and the load impedance, and then generates at least one control voltage and sends the control voltage to the impedance matching network for impedance adjustment. The impedance of the impedance matching network is adjusted by the control voltage, without the need to change the impedance of the impedance matching network by a servo stepper motor, thereby shortening the impedance matching process and greatly improving the speed of impedance matching. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 FIG. 1 is a structural block diagram of a radio frequency power supply system according to an embodiment of the present application.

[0029] Figure 2 FIG. 2 is a flowchart of a method for regulating an impedance matching network according to an embodiment of the present application.

[0030] Figure 3 FIG. 3 is a structural block diagram of a radio frequency power supply system according to an embodiment of the present application.

[0031] Figure 4 FIG. 4 is a structural block diagram of a radio frequency power supply system according to an embodiment of the present application.

[0032] Figure 5 FIG. 5 is a structural block diagram of a radio frequency power supply system according to an embodiment of the present application.

[0033] Figure 6 FIG. 6 is a structural block diagram of a controlled voltage source according to an embodiment of the present application.

[0034] Figure 7 FIG. 7 is a structural block diagram of a radio frequency power supply system according to an embodiment of the present application.

[0035] Figure 8 FIG. 8 is a structural block diagram of a voltage-controlled capacitor according to an embodiment of the present application. DETAILED DESCRIPTION

[0036] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0037] The method for regulating an impedance matching network provided by the present application can be applied to a radio frequency power supply system as shown in Figure 1 . The radio frequency power supply system includes a radio frequency power supply 110, an impedance matching network 120, an impedance regulating network 130 and a load impedance 140. The impedance matching network 120 is electrically connected to the radio frequency power supply 110, the impedance regulating network 130 and the load impedance 140 respectively. The impedance regulating network 130 is also electrically connected to the load impedance 140.

[0038] In one embodiment, as shown in Figure 2 , a method for regulating an impedance matching network is provided. The method will be described below by taking a radio frequency power supply system as an example, which includes the following steps: Figure 1

[0039] In step 210, the impedance regulating network 130 generates at least one control voltage according to the incident signal and the reflected signal between the impedance matching network 120 and the load impedance 140, and sends the control voltage to the impedance matching network 120.​

[0040] Wherein, the incident signal is the signal transmitted by the impedance matching network 120 to the load impedance 140, and the reflected signal is the signal returned by the load impedance 140 to the impedance matching network 120.

[0041] Specifically, according to the incident signal and the reflected signal, the loss degree of the signal transmission power between the impedance matching network 120 and the load impedance 140 can be determined, that is, whether the power generated by the radio frequency power supply 110 is all transmitted to the load impedance 140. If there is no difference between the incident signal and the reflected signal, it means that the power generated by the radio frequency power supply 110 is all transmitted to the load impedance 140. If there is a difference between the incident signal and the reflected signal, it means that the power generated by the radio frequency power supply 110 is not all transmitted to the load impedance 140, so the impedance of the impedance matching network 120 needs to be adjusted. Then, the incident signal and the reflected signal are used to generate a corresponding control voltage, which can be one or more, and there is a correlation between each control voltage.

[0042] Step 220, the impedance matching network 120 adjusts the impedance according to the control voltage to obtain an adjusted matching impedance.

[0043] Wherein, the sum of the matching impedance and the load impedance 140 is equal to the power supply impedance of the radio frequency power supply 110.

[0044] Specifically, the impedance matching network 120 is a network composed of capacitors and inductors. The control voltage is used to adjust the capacitance of the capacitor and / or the inductance of the inductor in the impedance matching network 120. The corresponding matching impedance is calculated and generated according to the adjusted capacitance and inductance. The capacitance and inductance in the impedance matching network 120 are directly adjusted by the control voltage, without the need to change the impedance of the impedance matching network 120 through a servo stepper motor, thereby shortening the impedance matching process and improving the speed of impedance matching. The sum of the matching impedance and the load impedance 140 after adjustment is equal to the power supply impedance of the radio frequency power supply 110, so that the power generated by the radio frequency power supply 110 after impedance adjustment can be all transmitted to the load impedance 140, thereby reducing the loss of signal transmission power.

[0045] In one embodiment, as shown in Figure 3 The impedance adjustment network 130 includes a directional coupler 131, an amplitude and phase measurement chip 132, and a control module 133. The amplitude and phase measurement chip 132 is electrically connected with the directional coupler 131 and the control module 133 respectively, and the control module 133 is electrically connected with the impedance matching network 120.

[0046] Specifically, the directional coupler 131 includes a first coupler and a second coupler. The first coupler is used to acquire the incident signal, and the second coupler is used to acquire the reflected signal. The first coupler is electrically connected to the impedance matching network 120 and the load impedance 140, respectively. The second coupler is electrically connected to the impedance matching network 120 and the load impedance 140, respectively. The amplitude and phase measurement chip 132 can be any chip that can simultaneously measure the amplitude ratio and phase difference between two input signals within a specified frequency range. In this embodiment, the AD8302 chip is selected as the amplitude and phase measurement chip 132.

[0047] In one embodiment, the impedance adjustment network 130 generates at least one control voltage based on the incident and reflected signals between the impedance matching network 120 and the load impedance 140, and sends the control voltage to the impedance matching network 120. This includes: the directional coupler 131 acquiring the incident and reflected signals between the impedance matching network 120 and the load impedance 140; the amplitude and phase measurement chip 132 comparing the incident and reflected signals to obtain a comparison result, and generating a difference voltage based on the incident and reflected signals when the comparison result indicates a difference between the incident and reflected signals, wherein the difference voltage includes an amplitude difference voltage and a phase difference voltage; and the control module 133 generating at least one control voltage based on the amplitude difference voltage and the phase difference voltage, and transmitting the control voltage to the impedance matching network 120.

[0048] Specifically, the directional coupler 131 acquires the incident and reflected signals between the impedance matching network 120 and the load impedance 140, such as... Figure 4 As shown, the directional coupler sends the incident and reflected signals to the attenuation network 134 for attenuation processing, thus obtaining attenuated incident and reflected signals. The attenuation network 134 then sends the attenuated incident and reflected signals to the amplitude and phase measurement chip 132 for comparison processing. The amplitude and phase measurement chip 132 compares the amplitude and phase between the incident and reflected signals to obtain the comparison result. The comparison result is used to indicate the amplitude difference and phase difference between the incident and reflected signals. When the comparison result indicates that there is an amplitude difference and phase difference between the incident and reflected signals, the corresponding amplitude difference voltage and phase difference voltage are generated according to the incident and reflected signals. The amplitude difference voltage is denoted as V. MAG The phase angle difference voltage is denoted as V. PHS The relationships between amplitude difference voltage, phase angle difference voltage, incident signal, and reflected signal are as follows:

[0049]

[0050] V PHS =VΦ [φ(V INPA )-φ(V INPB )]

[0051] Among them, V INPA V is the amplitude of the incident signal. INPB The amplitude of the reflected signal, φ(V) INPA ) represents the phase of the incident signal, φ(V) INPB V represents the phase of the reflected signal. LSP The change in output voltage, V, is used to indicate the change in the amplitude ratio of the input signal of the amplitude and phase measurement chip 132 when the change is 1dB. Φ The change in the output voltage of the amplitude and phase measurement chip 132 is indicated when the phase change of the input signal is 1°.

[0052] The amplitude and phase measurement chip 132 sends the amplitude difference voltage and phase angle difference voltage to the main control module for processing, thereby obtaining the attenuated incident and reflected signals. The control module 133 determines the impedance amount that the impedance matching network 120 needs to be adjusted based on the amplitude difference voltage and phase angle difference voltage, and then generates a corresponding control voltage according to the required impedance amount. The control voltage is denoted as V. ctr If a control voltage is generated, the capacitance of all or part of the capacitors in the impedance matching network 120 is controlled according to the control voltage. That is, the capacitance of all or part of the capacitors in the impedance matching network 120 is adjusted by a control voltage, so that the matching impedance of the impedance matching network 120 is obtained according to the capacitance of the adjusted capacitors, and the sum of the matching impedance and the load impedance 140 is equal to the power supply impedance. If two or more control voltages are generated, each control voltage can be used to adjust the capacitance of one or more capacitors in the impedance matching network 120, so that the matching impedance of the impedance matching network 120 is obtained according to the capacitance of the adjusted capacitors, and the sum of the matching impedance and the load impedance 140 is equal to the power supply impedance.

[0053] In one embodiment, after the amplitude-phase measurement chip 132 compares the incident signal and the reflected signal to obtain the comparison result, the method further includes: when the comparison result indicates that there is no difference between the incident signal and the reflected signal, the amplitude-phase measurement chip 132 stops generating the difference voltage; and performs the step of the directional coupler 131 acquiring the incident signal and the reflected signal between the impedance matching network 120 and the load impedance 140.

[0054] Specifically, if the comparison result indicates that there is no amplitude difference or phase difference between the incident signal and the reflected signal, then stop generating the corresponding amplitude difference voltage and phase difference voltage based on the incident signal and the reflected signal, and return to the step of continuing to collect the incident signal and reflected signal between the impedance matching network 120 and the load impedance 140 through the directional coupler 131.

[0055] In one embodiment, such as Figure 5 As shown, the control module 133 includes a main control module 1331 and a controlled voltage source 1332. The control module 133 generates at least one control voltage based on the amplitude difference voltage and the phase angle difference voltage, and transmits the control voltage to the impedance matching network 120. This includes: the main control module 1331 generating at least one control signal based on the amplitude difference voltage and the phase angle difference voltage; and the controlled voltage source 1332 converting the control signal to generate the corresponding control voltage and transmitting the control voltage to the impedance matching network 120.

[0056] Specifically, the main control module 1331 can be any chip or device capable of data processing, such as a microcontroller of model STM32, MSP430, or TMS. The main control module 1331 calculates and generates the control signal required for impedance adjustment of the impedance matching network 120 based on the amplitude difference voltage and phase angle difference voltage. The main control module 1331 sends the control signal to the controlled voltage source 1332, which converts the control signal into a corresponding control voltage and then sends the control voltage to one or more capacitors to be adjusted in the impedance matching network 120 to adjust the capacitance.

[0057] Among them, such as Figure 6 As shown, the controlled voltage source 1332 includes a first resistor R1, a second resistor R2, and a comparator, thus forming an operational amplifier structure to process the control signal V input to the controlled voltage source 1332. ctr It is converted into a control voltage V1 and output to the impedance matching network 120.

[0058] In one embodiment, such as Figure 7 As shown, the impedance matching network 120 includes a first branch, a second branch, a third branch, and a fourth branch. The first end of the first branch and the first end of the fourth branch are electrically connected to a first node. The second end of the first branch and the first end of the second branch are electrically connected to a second node. The second end of the second branch and the first end of the third branch are electrically connected to a third node. The second end of the third branch and the second end of the fourth branch are electrically connected to a fourth node. The first node is electrically connected to the first end of the RF power supply 110. The second node is electrically connected to the second end of the RF power supply 110. The third node is electrically connected to the directional coupler 131. The fourth node is electrically connected to the load impedance 140.

[0059] Specifically, the impedance matching network 120 adopts a symmetrical X-type matching network. Compared with the traditional π-type, L-type, and Γ-type networks, the symmetrical X-type matching network increases the number of variable capacitors and variable inductors, thereby expanding the impedance adjustment range while keeping the control signal constant.

[0060] In one embodiment, the first branch and the third branch are inductive branches, and the inductive branch includes a first capacitor and a first inductor connected in series.

[0061] Specifically, such as Figure 7 As shown, the first capacitor in the first branch is C1, and the first inductor in the first branch is L1. The first terminal of the first capacitor C1 serves as the first terminal of the first branch, and the second terminal of the first capacitor C1 is electrically connected to the first terminal of the first inductor L1. The second terminal of the first inductor L1 serves as the second terminal of the first branch. Similarly, the first capacitor in the third branch is C2, and the first inductor in the third branch is L2. The first terminal of the first capacitor C2 serves as the first terminal of the third branch, and the second terminal of the first capacitor C2 is electrically connected to the first terminal of the first inductor L2. The second terminal of the first inductor L2 serves as the second terminal of the third branch.

[0062] In one embodiment, the second branch and the fourth branch are capacitor branches, and the capacitor branch includes a second capacitor and a third capacitor connected in series.

[0063] Specifically, such as Figure 7 As shown, the second capacitor in the second branch is C4, and the third capacitor in the second branch is C5. The first terminal of the second capacitor C4 serves as the first terminal of the second branch, and the second terminal of the second capacitor C4 is electrically connected to the first terminal of the third capacitor C5. The second terminal of the third capacitor C5 serves as the second terminal of the second branch. Similarly, the second capacitor in the fourth branch is C3, and the third capacitor in the fourth branch is C6. The first terminal of the second capacitor C3 serves as the first terminal of the fourth branch, and the second terminal of the second capacitor C3 is electrically connected to the first terminal of the third capacitor C6. The second terminal of the third capacitor C6 serves as the second terminal of the fourth branch.

[0064] In one embodiment, the control voltage includes a first voltage and a second voltage, the first voltage and the second voltage respectively corresponding to different control signals. Transmitting the control voltage to the impedance matching network 120 includes: the controlled voltage source 1332 transmitting the first voltage to the inductor branch in the impedance matching network 120, causing the impedance matching network 120 to adjust the impedance of the inductor branch according to the first voltage; and the controlled voltage source 1332 transmitting the second voltage to the capacitor branch in the impedance matching network 120, causing the impedance matching network 120 to adjust the impedance of the capacitor branch according to the second voltage.

[0065] Specifically, the control voltage includes the first voltage V. ctr1 Second voltage V ctr2 ,like Figure 7 As shown, the first voltage is used to adjust the impedance of the first and third branches to adjust the inductance of the variable inductor, and the second voltage is used to adjust the impedance of the second and fourth branches to adjust the capacitance of the variable capacitor, thereby obtaining the adjusted matching impedance to achieve the optimal impedance matching relationship. The optimal impedance matching relationship is as follows:

[0066] Z in =Z s

[0067] Considering the load impedance 140Ω and the input impedance expression of the impedance matching network 120, the following is a possible interpretation:

[0068]

[0069] Among them, Z s Used to indicate a load impedance of 140.

[0070] In this way, the optimal impedance matching relationship can be achieved by adjusting the capacitors and inductors in the impedance matching network 120.

[0071] The capacitors in impedance matching network 120 are all voltage-controlled capacitors, such as... Figure 8 As shown, the voltage-controlled capacitor consists of two parts, AB and BC, connected in parallel. The capacitance value C is the capacitance value across AC, which is equivalent to the capacitance value C of AB. AB The capacitance value C of BC BC Parallel arrangement, by changing U AB and / or U BC To change the capacitance value C, since AB and BC are constructed with dielectrics of different dielectric constants and are connected in parallel, the capacitance value C is mainly determined by the smaller capacitance portion. If C AB >C BC Then by changing U BC To change the capacitance value C; if CBC >C AB Then by changing U AB To change the capacitance value C.

[0072] It should be understood that, although Figure 2 The steps in the flowchart are shown sequentially as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order in which these steps are executed, and they can be performed in other orders. Figure 2 At least some of the steps in the process may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0073] Specific limitations regarding the impedance matching network 120 adjustment device can be found in the limitations of the impedance matching network adjustment method described above, and will not be repeated here. Each module in the aforementioned impedance matching network 120 adjustment device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in hardware or independently of the processor in a computer device, or stored in software in the memory of a computer device, so that the processor can call and execute the corresponding operations of each module.

[0074] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An impedance matching network regulation method, characterized by, The application is applied to a radio frequency power supply system, the radio frequency power supply system comprises a radio frequency power supply, an impedance matching network, an impedance adjusting network and a load impedance, the impedance matching network is electrically connected with the radio frequency power supply, the impedance adjusting network and the load impedance respectively, the impedance adjusting network is also electrically connected with the load impedance, and the method comprises: The impedance adjusting network generates at least one control voltage according to incident signals and reflected signals between the impedance matching network and the load impedance, and sends the control voltage to the impedance matching network, wherein the incident signals are signals transmitted by the impedance matching network to the load impedance, and the reflected signals are signals returned by the load impedance to the impedance matching network; The impedance matching network adjusts impedance according to the control voltage to obtain an adjusted matching impedance; wherein the sum of the matching impedance and the load impedance is equal to the power supply impedance of the radio frequency power supply; The impedance adjusting network comprises a directional coupler, an amplitude and phase measurement chip and a control module, the amplitude and phase measurement chip is electrically connected with the directional coupler and the control module respectively, and the control module is electrically connected with the impedance matching network; The impedance matching network comprises a first branch, a second branch, a third branch and a fourth branch, a first end of the first branch and a first end of the fourth branch are electrically connected to a first node, a second end of the first branch and a first end of the second branch are electrically connected to a second node, a second end of the second branch and a first end of the third branch are electrically connected to a third node, a second end of the third branch and a second end of the fourth branch are electrically connected to a fourth node, the first node is electrically connected with a first end of the radio frequency power supply, the second node is electrically connected with a second end of the radio frequency power supply, the third node is electrically connected with the directional coupler, and the fourth node is electrically connected with the load impedance; the first branch and the third branch are inductive branches, and the inductive branches comprise a first capacitor and a first inductor connected in series; the second branch and the fourth branch are capacitive branches, and the capacitive branches comprise a second capacitor and a third capacitor connected in series; The control voltage comprises a first voltage and a second voltage, the first voltage is used for adjusting the impedance of the first branch and the third branch to adjust the inductance of the variable inductor, and the second voltage is used for adjusting the impedance of the second branch and the fourth branch to adjust the capacity of the variable capacitor.

2. The impedance matching network regulation method of claim 1, wherein, The impedance adjusting network generates at least one control voltage according to incident signals and reflected signals between the impedance matching network and the load impedance, and sends the control voltage to the impedance matching network, comprising: The directional coupler collects the incident signals and the reflected signals between the impedance matching network and the load impedance; The amplitude and phase measurement chip compares the incident signals and the reflected signals to obtain a comparison result, and generates a difference voltage according to the incident signals and the reflected signals when the comparison result indicates that there is a difference between the incident signals and the reflected signals, wherein the difference voltage comprises an amplitude difference voltage and a phase angle difference voltage; The control module generates at least one control voltage according to the amplitude difference voltage and the phase angle difference voltage, and transmits the control voltage to the impedance matching network.

3. The impedance matching network regulation method of claim 2, wherein, The amplitude-phase measurement chip compares the incident signal and the reflected signal, and obtains a comparison result. When the comparison result indicates that there is no difference between the incident signal and the reflected signal, the amplitude-phase measurement chip stops generating the difference voltage. The step of performing the directional coupler to collect the incident signal and the reflected signal between the impedance matching network and the load impedance.

4. The impedance matching network regulation method of claim 2, wherein, The control module includes a master control module and a controlled voltage source. The control module generates at least one control voltage according to the amplitude difference voltage and the phase angle difference voltage, and transmits the control voltage to the impedance matching network, including: The master control module generates at least one control signal according to the amplitude difference voltage and the phase angle difference voltage. The controlled voltage source converts the control signal to generate a corresponding control voltage, and transmits the control voltage to the impedance matching network.

5. The impedance matching network regulation method of claim 4, wherein, The first branch and the third branch are inductive branches, and the inductive branches include a first capacitor and a first inductor connected in series.

6. The impedance matching network regulation method of claim 5, wherein, The second branch and the fourth branch are capacitive branches, and the capacitive branches include a second capacitor and a third capacitor connected in series.

7. The impedance matching network regulation method of claim 6, wherein, The control voltage includes a first voltage and a second voltage, and the first voltage and the second voltage correspond to different control signals respectively. Transmitting the control voltage to the impedance matching network includes: The controlled voltage source transmits the first voltage to the inductive branch in the impedance matching network, so that the impedance matching network adjusts the impedance of the inductive branch according to the first voltage. The controlled voltage source transmits the second voltage to the capacitive branch in the impedance matching network, so that the impedance matching network adjusts the impedance of the capacitive branch according to the second voltage.

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