Detection system, detection method and detection equipment

Abstract

The present application discloses a detection system, a detection method and a detection device, wherein the detection system comprises: a detection element and a processing element, wherein the detection element is used to obtain the performance value of an optical signal output by an optical element arranged in an optical path of the detection device for processing the light in the optical path; the processing element is communicatively connected with the detection element, and is configured to generate corresponding processing instructions based on the performance value of the optical signal output by the optical element for processing the light obtained by the detection element, so as to improve the utilization rate of the optical element and thereby improve the service life of the optical element while ensuring the detection accuracy of the detection device.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a detection system, a detection method and a detection device. Background Art

[0002] With the progress of society, communication technology has received more and more attention from people. In order to facilitate daily life, people require semiconductor communication products to become smaller and lighter, while at the same time becoming more and more powerful. This requires semiconductor chips to have "small body, big function", which will inevitably require the semiconductor industry, especially the semiconductor testing industry, to have higher detection accuracy.

[0003] However, during the use of semiconductor testing equipment, long-term, high-power light exposure will inevitably damage the optical components, thereby affecting the detection accuracy of semiconductor testing equipment. The key point is that the cost of optical components in the semiconductor industry is generally high and difficult to replace. Sometimes specialized technicians need to spend a lot of time and energy to repeatedly debug. Therefore, how to improve the utilization rate of optical components while ensuring the detection accuracy of the testing equipment, and then increase the service life of optical components has become a technical problem that needs to be solved in this industry.

[0004] Application Contents

[0005] In order to solve the above technical problems, the present application provides a detection system, a detection method and a detection device, so as to improve the utilization rate of optical elements in the detection device while ensuring the detection accuracy of the detection device, thereby increasing the service life of the optical elements.

[0006] In order to achieve the above objectives, the technical solutions proposed in this application are as follows:

[0007] A detection system, comprising:

[0008] A detection element, used to obtain a performance value of an optical signal output by an optical element disposed in an optical path of the detection device in processing light in the optical path; and

[0009] A processing element is communicatively connected with the detection element and is configured to generate corresponding processing instructions based on a performance value of the optical signal output by the optical element for processing the light obtained by the detection element.

[0010] Optionally, the process of generating a corresponding processing instruction by the processing element based on the performance value of the optical signal output by the optical element for processing the light obtained by the detection element includes:

[0011] forming corresponding preset conditions based on optical parameters of the optical element;

[0012] Comparing the preset condition with a performance value of the optical signal output by the optical element in the detection device in processing the light obtained by the detection element, and generating feedback information;

[0013] Generate corresponding processing instructions based on the feedback information.

[0014] Optionally, the performance value of the optical signal output by the optical element in the detection device processed by the detection element and obtained by the detection element is a spot size of the optical signal output by the optical element processed by the optical element.

[0015] Optionally, the preset condition includes: the length of the target area in the spot of the light signal output by the optical element when processing the light is not less than a first preset value,

[0016] The target area is an area that satisfies a preset uniformity in a light spot of a light signal output by the optical element after processing the light.

[0017] Optionally, the preset condition also includes: a width of a light spot area of ​​a light signal output by the optical element when processing the light is not greater than a second preset value.

[0018] Optionally, the detection element includes an image acquisition element, and the image acquisition element is used to acquire a spot image of a light signal output by the optical element when processing the light.

[0019] Optionally, the detection system further includes:

[0020] The processing element is also in communication with the adjusting element and is configured to generate an adjusting instruction based on the processing instruction, wherein the adjusting instruction controls the adjusting element to adjust a position of the optical element illuminated by the light in the optical path.

[0021] Optionally, the adjusting element is a two-dimensional adjusting element, and the adjusting element controls the optical element to move in a two-dimensional plane according to the adjusting instruction.

[0022] Optionally, the adjusting element drives the optical element to move along the first direction and / or the second direction within a preset plane under the control of the processing element.

[0023] Wherein, the preset plane is parallel to the incident surface of the optical element, and the first direction is perpendicular to the second direction.

[0024] Optionally, the adjusting element is a rotating adjusting element, which drives the optical element to rotate under the control of the processing element.

[0025] Optionally, the optical element is a beam splitter, a reflector, a polarizing lens, a prism, a graticule or a filter.

[0026] The present application also provides a detection method, which is applied to a detection system, and the method comprises:

[0027] Acquiring, by means of a detection element in the detection system, a performance value of an optical signal output by an optical element in the detection device, wherein the optical signal output by the optical element is an optical signal formed by the optical element processing light in an optical path of the detection device;

[0028] A corresponding processing instruction is generated based on the performance value of the optical element processing the light signal output by the light beam obtained by the detection element.

[0029] Optionally, obtaining, by means of a detection element in the detection system, a performance value of an optical signal output by the optical element in the detection device in processing the light includes:

[0030] Acquiring, by means of the detection element, a spot image of a light signal output by the optical element after processing the light;

[0031] Based on the light spot image, obtaining the light signal intensity of the light spot at each position in the third direction;

[0032] Based on the light signal intensity of the light spot at each position in the third direction, determining a region in the light spot that meets a preset uniformity as a target region;

[0033] Based on the target area, determining a size of the target area;

[0034] Wherein, the third direction is the long side direction of the light spot.

[0035] Optionally, based on the light spot image, acquiring the light signal intensity of the light spot at each position in the third direction includes:

[0036] Based on the light spot image, obtaining a light spot cross-sectional image of the light spot at each position in the third direction;

[0037] Based on the cross-sectional view of the light spot at each position in the third direction, obtaining the light signal intensity of the light spot at each position in the fourth direction at each position in the third direction;

[0038] Based on the light signal intensity of the light spot at each position in the third direction, the light signal intensity of the light spot at each position in the fourth direction is obtained;

[0039] Wherein, the fourth direction is the short side direction of the light spot.

[0040] Optionally, based on the light signal intensity of the light spot at each position in the third direction, determining the area in the light spot that satisfies a preset uniformity as the target area includes:

[0041] Based on the light signal intensity of the light spot at each position in the third direction, obtaining the maximum light signal intensity of the light spot;

[0042] Based on the maximum light signal intensity of the light spot and the preset uniformity, obtaining the minimum light signal intensity in the light spot that satisfies the preset uniformity;

[0043] The target area is determined based on a minimum light signal intensity in the light spot that satisfies the preset uniformity.

[0044] Optionally, generating a corresponding processing instruction based on the performance value of the optical element processing the light signal output by the light obtained by the detection element includes:

[0045] forming corresponding preset conditions based on optical parameters of the optical element;

[0046] Comparing the preset condition with a performance value of the optical signal output by the optical element in the detection device in processing the light obtained by the detection element, and generating feedback information;

[0047] Generate corresponding processing instructions based on the feedback information.

[0048] Optionally, the detection method further includes:

[0049] Based on the processing instruction, the adjusting element is controlled to adjust the position of the optical element illuminated by the light in the optical path.

[0050] A detection device comprises a light source and an optical element, and also comprises any of the detection systems described above, wherein the optical element is arranged in the light path of the light source.

[0051] A detection device comprises a light source, an optical element and a detection system. The detection system adopts any of the detection methods described above, and the optical element is arranged in the light path of the light source.

[0052] Compared with the prior art, the above technical solution has the following advantages:

[0053] The detection system provided in the present application includes a detection element and a processing element, wherein the detection element is used to obtain the performance value of an optical signal output by an optical element arranged in an optical path of a detection device when processing the light in the optical path; the processing element is communicatively connected to the detection element, and is configured to generate corresponding processing instructions based on the performance value of the optical signal output by the optical element when processing the light obtained by the detection element, so as to improve the utilization rate of the optical element and thereby improve the service life of the optical element while ensuring the detection accuracy of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0055] Figure 1 A schematic diagram of the structure of a detection system provided in one embodiment of the present application;

[0056] Figure 2 A schematic diagram of a light spot image acquired by a detection element in a detection system provided by another embodiment of the present application;

[0057] Figure 3 A schematic diagram of a structure of a light spot in which an image acquisition element acquires a light signal output by a reflective optical element after processing light in a detection system provided by another embodiment of the present application;

[0058] Figure 4 A schematic diagram of a structure of a light spot in which an image acquisition element acquires a light signal output by a transmissive optical element after processing light in a detection system provided by another embodiment of the present application;

[0059] Figure 5 A schematic diagram of the structure of a detection system provided in another embodiment of the present application;

[0060] Figure 6 A schematic diagram of a two-dimensional adjustment element adjusting a position of an optical element illuminated by light in a detection system provided by yet another embodiment of the present application;

[0061] Figure 7 A schematic diagram of a detection system provided by another embodiment of the present application, in which a rotating adjustment element is used to adjust a position of an optical element illuminated by light;

[0062] Figure 8 A flow chart of a detection method provided in one embodiment of the present application;

[0063] Fig. 9 A flow chart of a detection method provided in another embodiment of the present application;

[0064] Fig.10 In the detection method provided in one embodiment of the present application, the detection element acquires a light spot diagram of a light signal output by the optical element processing light;

[0065] Fig.11 for Fig.10 A local magnified view of the light spot shown;

[0066] Fig.12 for Fig.10 The light signal intensity distribution curve diagram of the light spot along the fourth direction at the position X=a in the third direction;

[0067] Fig.13 for Fig.10 The light signal intensity distribution curve of the light spot shown along the third direction;

[0068] Fig.14 A flowchart of step S2 in a detection method provided in yet another embodiment of the present application. DETAILED DESCRIPTION

[0069] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0070] In the following description, many specific details are set forth to facilitate a full understanding of the present application, but the present application may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0071] Secondly, the present application is described in detail with reference to the schematic diagram. When describing the embodiments of the present application in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present application. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0072] As mentioned in the background technology section, how to improve the utilization rate of optical components while ensuring the detection accuracy of the detection equipment, and thus increase the service life of optical components has become a technical problem that needs to be solved urgently in this industry.

[0073] The inventors have discovered that, in existing optical inspection equipment, although it is possible to detect whether an optical element is damaged through manual inspection and perform manual maintenance when damage occurs, in existing optical inspection equipment, the optical system portion including the optical element is covered by inner and outer sheet metals. In specific applications, when a problem occurs with the optical inspection equipment at a customer's site, the maintenance time required by the customer is generally 1-2 hours. In such a short time, it is impossible to disassemble the entire optical inspection equipment and perform manual inspection and maintenance on the optical elements inside it, which makes the inspection and maintenance of the optical inspection equipment very inconvenient and time-consuming.

[0074] In view of this, the present application embodiment provides a detection system, such as Figure 1 As shown, Figure 1 This is a schematic diagram of the structure of the detection system provided in the embodiment of the present application, and the detection system includes:

[0075] A detection element 10, used to obtain a performance value of an optical signal output by an optical element disposed in an optical path of the detection device in processing the light in the optical path; and

[0076] The processing element 11 is communicatively connected with the detection element and is configured to generate corresponding processing instructions based on the performance value of the optical signal output by the optical element for processing the light obtained by the detection element.

[0077] It should be noted that the optical element is arranged in the optical path of the detection device, and is used to process the light in the optical path and output an optical signal; the detection element is communicatively connected with the processing element, and when the detection element obtains the performance value of the optical signal output by the optical element in the detection device when processing the light, it transmits it to the processing element, and the processing element generates corresponding processing instructions based on the performance value of the optical signal output by the optical element when processing the light obtained by the detection element, so as to improve the utilization rate of the optical element while ensuring the detection accuracy of the detection device, thereby increasing the service life of the optical element.

[0078] Optionally, in one embodiment of the present application, the optical element may include a beam splitter, a reflector, a polarizing lens, a prism, a graticule or a filter, etc. The present application does not limit this and it depends on the specific situation.

[0079] It should be noted that the optical parameters of the optical element are different, and the conditions for judging whether the optical element is damaged are also different. Therefore, based on the above embodiment, in one embodiment of the present application, the process of generating a corresponding processing instruction based on the performance value of the optical signal output by the optical element of the light obtained by the detection element includes:

[0080] forming corresponding preset conditions based on optical parameters of the optical element;

[0081] Comparing the preset condition with a performance value of the optical signal output by the optical element in the detection device in processing the light obtained by the detection element, and generating feedback information;

[0082] Generate corresponding processing instructions based on the feedback information.

[0083] In an embodiment of the present application, the processing element generates feedback information by comparing the preset condition with the performance value of the optical signal output by the optical element in the detection device obtained by the detection element, and the feedback information is used to indicate the usage status of the optical element. Specifically, in one embodiment of the present application, when the performance value of the optical signal output by the optical element in the detection device does not meet the preset condition, it means that the performance value of the optical signal output by the optical element in the detection device can no longer ensure that the detection device meets its detection accuracy requirements. At this time, the processing element generates feedback information, and the feedback information is used to indicate that the optical element has optical damage. Furthermore, the processing element generates corresponding processing instructions based on the feedback information, so as to improve the utilization rate of the optical element while ensuring the detection accuracy of the detection device, thereby increasing the service life of the optical element.

[0084] Based on the above embodiments, in one embodiment of the present application, the performance value of the optical element in the detection device processing the light signal output by the light obtained by the detection element is the spot size of the light signal processed by the optical element.

[0085] It should be noted that, in an embodiment of the present application, the detection element obtains a spot image of the light signal output by the optical element when processing the light, and determines the size of the light spot based on the spot image. The spot image obtained by the detection element is a spot image formed by the light signal output by the optical element when processing the light, and irradiating the target object. Specifically, in an embodiment of the present application, the detection element obtains a spot image formed by the light signal output by the optical element on the target object based on a scattered signal formed by the light signal output by the optical element irradiating the target object. Optionally, in an embodiment of the present application, the target object is a wafer, and the light spot is a spot formed on the wafer when the light signal output by the optical element when processing the light is irradiated onto the wafer.

[0086] In actual detection applications, in order to ensure the detection accuracy of the detection equipment, the light spot of the optical element processing the light signal output by the light needs to have sufficient spot area to meet the preset uniformity. The area in the light spot that meets the preset uniformity is assumed to be the target area, and the size of the light spot includes the size of the target area. The preset condition includes that the size of the target area meets the preset size, wherein the preset uniformity and preset size can be set according to the specific detection accuracy of the detection equipment.

[0087] Optionally, in one embodiment of the present application, the preset conditions include: the length of a target area in a light spot of a light signal output by the optical element for processing the light is not less than a first preset value, wherein the target area is an area that satisfies a preset uniformity in a light spot of a light signal output by the optical element for processing the light, so that the length of an area greater than the preset uniformity in a light spot of a light signal output by the optical element for processing the light is greater than the first preset value, thereby ensuring that a larger area in the light spot of a light signal output by the optical element for processing the light is sufficient to ensure that the detection equipment meets its detection accuracy requirements.

[0088] It should be noted that, in actual detection applications, in addition to the requirement for the length of the light spot of the light signal output by the optical element to meet the preset uniformity area, the detection device also has requirements for the width of the light spot area of ​​the light signal output by the optical element. Therefore, based on the above embodiment, in one embodiment of the present application, the preset condition also includes: the width of the light spot area of ​​the light signal output by the optical element is not greater than the second preset value, so that the length of the light spot of the light signal output by the optical element is greater than the preset uniformity area is greater than the first preset value, and the width of the light spot area is less than the second preset value, so that the light spot of the light signal output by the optical element has a larger area in the long side direction of the light spot, and the light spot area has a relatively concentrated area in the short side direction of the light spot, which can ensure the detection accuracy of the detection device. However, the present application does not limit this. In other embodiments of the present application, the preset condition can also only include that the width of the light spot area is not greater than the second preset value, but does not include that the length of the target area is not less than the first preset value. The present application does not limit this, depending on the specific situation.

[0089] It should be noted that, when the spot area of ​​the light signal output by the optical element for processing the light has different widths at different positions in the long side direction of the spot, the spot area width of the light signal output by the optical element for processing the light is not greater than a second preset value includes: the spot width of at least the area where the target area is located in the spot area of ​​the light signal output by the optical element for processing the light is not greater than the second preset value.

[0090] It should also be noted that the present application does not limit the specific numerical values ​​of the first preset value and the second preset value, which depend on the detection accuracy of the detection equipment.

[0091] The preset condition is described below in conjunction with a specific embodiment by taking the preset condition including that the length of the target area is not less than the first preset value and the width of the spot area is not greater than the second preset value as an example.

[0092] like Figure 2 As shown, Figure 2 A schematic diagram of the light spot acquired by the detection element in the detection system provided in an embodiment of the present application is shown, wherein the light spot area included in the dotted frame area 20 is the target area, that is, the area in the light spot acquired by the detection element that meets the preset uniformity requirement, the length L of the target area is not less than the first preset value, and the width W of the light spot area corresponding to the target area is not greater than the second preset value.

[0093] Specifically, in one embodiment of the present application, the preset uniformity is 80%, the first preset value is 10 mm, and the second preset value is 60 μm, that is, the preset conditions include that the length of the area in the light spot of the light signal output by the optical element that satisfies the uniformity greater than 80% is not less than 10 mm, and the width of the light spot area where the target area is located is not greater than 60 μm, but the present application does not limit this and it depends on the specific circumstances.

[0094] On the basis of any of the above embodiments, in one embodiment of the present application, the detection element 10 includes an image acquisition element to obtain a spot image of the light signal output by the optical element when processing the light. Specifically, in one embodiment of the present application, the image acquisition element includes a photosensitive element and an imaging element, wherein the photosensitive element is used to obtain a scattered signal formed when the light signal output by the optical element when processing the light is irradiated onto the target object, and convert the scattered signal into an electrical signal; the imaging element is used to form an image of a light spot formed when the light signal output by the optical element when processing the light is irradiated onto the target object based on the electrical signal. Optionally, in one embodiment of the present application, the photosensitive element is a charge-coupled device (CCD), but the present application does not limit this, and it depends on the specific circumstances.

[0095] Optionally, in one embodiment of the present application, the optical element is a reflective optical element, such as a plane reflector. Figure 3 As shown, Figure 3The structural schematic diagram of the image acquisition element provided in the embodiment of the present application to obtain the light spot of the light signal output by the reflective optical element for processing the light is shown. Specifically, the laser 30 emits a laser signal to the reflective optical element 31, and the reflective optical element 31 forms a reflected light signal under the irradiation of the laser emitted by the laser 30. The reflected light signal is transmitted to the target object 32, such as a wafer, located on its transmission light path, and forms a light spot on the target object 32 and is scattered by the target object 32. The image acquisition element 33 collects the scattered signal formed by the target object under the irradiation of the reflected light signal, and obtains the light spot image on the target object based on the scattered signal, so that the subsequent processing element generates feedback information based on the comparison of the light spot size and the preset conditions, and then generates processing instructions.

[0096] In another embodiment of the present application, the optical element is a transmissive optical element, such as a transmissive mirror. Figure 4 As shown, Figure 4 The structural schematic diagram of the image acquisition element provided in the embodiment of the present application to obtain the light spot of the light signal output by the transmissive optical element for processing the light is shown. Specifically, the laser 30 emits a laser signal to the transmissive optical element 41, and the transmissive optical element 41 forms a transmitted light signal under the irradiation of the laser emitted by the laser 30. The transmitted light signal is transmitted to the target object 32, such as a wafer, located on its transmission light path, and forms a light spot on the target object 32 and is scattered by the target object 32. The image acquisition element 33 collects the scattered signal formed by the target object under the irradiation of the transmitted light signal, and obtains the light spot on the target object based on the scattered signal, so that the subsequent processing element generates feedback information based on the comparison of the light spot size and the preset conditions, and then generates a processing instruction.

[0097] As can be seen from the above, when the spot size of the light signal output by the optical element does not meet the preset conditions, it means that the spot size of the light signal output by the optical element can no longer ensure that the detection device meets the detection accuracy requirements. At this time, the processing element generates feedback information for prompting that the optical element has optical damage. However, the cost of optical elements in the semiconductor industry is generally high, and it is difficult to replace. Sometimes specialized technicians need to spend a lot of time and energy to repeatedly debug.

[0098] Therefore, based on any of the above embodiments, in one embodiment of the present application, the detection system provided in the embodiment of the present application further includes an adjustment element, such as Figure 5As shown, the processing element is also connected to the adjustment element in communication, and is configured to generate an adjustment instruction based on the processing instruction, and the adjustment instruction controls the adjustment element to adjust the position of the optical element irradiated by the light in the optical path, so as to find the irradiation point in the optical element that satisfies the preset conditions by automatically changing the point operation. It can be seen that the detection system provided in the embodiment of the present application, when it is detected that the current position of the optical element irradiated by the light has optical damage, can adjust the position of the optical element irradiated by the light through the adjustment element, so that the optical element continues to meet the preset conditions when processing the light spot size of the light signal output by the light at the new irradiation position, thereby achieving the improvement of the utilization rate of the optical element while ensuring the detection accuracy of the detection equipment, and then improving the service life of the optical element.

[0099] Specifically, in one embodiment of the present application, after the processing element controls the adjustment element to adjust the position of the optical element irradiated by the light from the original irradiation point to a new irradiation point, a detection instruction is sent to the detection element, and the detection instruction is used to control the detection element to detect the spot of the new irradiation point of the optical element based on the light signal output by the light. If the spot size of the new irradiation point of the optical element based on the light signal output by the light meets the preset condition, the adjustment is stopped; if the spot size of the new irradiation point of the optical element based on the light signal output by the light still does not meet the preset condition, the adjustment is continued until the spot size of the light signal output by the optical element processing the light meets the preset condition.

[0100] It should be noted that, based on the above embodiments, in one embodiment of the present application, when the adjustment element adjusts the optical element and searches through each irradiation point in the optical element and none of the light spot sizes of the light signal output by the optical element for processing the light meets the preset conditions, the processing element may also issue a prompt message to replace the optical element.

[0101] In other embodiments of the present application, the adjusting element adjusts the position of the optical element irradiated by the light in the light path under the control of the operator, and the present application does not limit this, and it depends on the specific situation. It should be noted that in the embodiments of the present application, when the adjusting element adjusts the position of the optical element irradiated by the light in the light path under the control of the processing element, the automation level of the detection system can be improved.

[0102] On the basis of any of the above embodiments, in one embodiment of the present application, the adjusting element is a two-dimensional adjusting element, and the adjusting element controls the movement of the optical element in a two-dimensional plane according to the adjusting instruction.

[0103] Optionally, based on the above embodiments, in one embodiment of the present application, the adjusting element drives the optical element to move along a first direction and / or a second direction within a preset plane under the control of the processing element, wherein the preset plane is parallel to the incident surface of the optical element, and the first direction is perpendicular to the second direction.

[0104] Specifically, in one embodiment of the present application, Figure 6 As shown, Figure 6 The schematic diagram of the two-dimensional adjustment element provided in the embodiment of the present application adjusting the position of the optical element irradiated by the light is shown. In the preset plane, the first direction is set as direction A, the second direction is set as direction K, and the first direction A and the second direction K are perpendicular to each other. At this time, the optical element can be divided into different numbers of irradiable points along the first direction A and the second direction K, and the coordinates of different irradiation points are different, for example, Figure 6 As shown, the optical element is divided into 1-9 irradiable points, which are not limited in the present application and depend on the specific situation. When the current irradiation point of the optical element irradiated by the light is damaged, the two-dimensional adjustment element drives the optical element to move along the first direction A and / or the second direction K in the preset plane under the control of the processing element to find a new irradiation point, so that the spot size of the light signal output by the optical element when processing the light at the new irradiation point meets the preset conditions, and the point change operation is completed.

[0105] Optionally, in one embodiment of the present application, the two-dimensional adjustment element drives the optical element to translate upward along the first direction A to complete the point change operation; for example, Figure 6 As shown, when the current irradiation point 1 in the optical element is damaged, the two-dimensional adjustment element drives the optical element to translate upward along the first direction A in the preset plane under the control of the processing element. At this time, the position of the optical element irradiated by the light moves from point 1 to point 4, and it is detected whether the spot size of the light signal output by the optical element when processing the light at the new irradiation point 4 meets the preset conditions. If the spot size of the light signal output by the optical element when processing the light at the new irradiation point 4 meets the preset conditions, the adjustment is completed. Otherwise, the optical element is continued to be moved to change the position of the optical element irradiated by the light until the spot size of the light signal output by the optical element when processing the light at the new irradiation point meets the preset conditions or all irradiation points in the optical element are searched.

[0106] Optionally, in another embodiment of the present application, the two-dimensional adjustment element drives the optical element to translate leftward along the second direction K to complete the point-changing operation. However, the present application does not limit this. In other embodiments of the present application, the two-dimensional adjustment element can also drive the optical element to translate downward along the first direction A, or translate rightward along the second direction K, or translate along the first direction A and the second direction K at the same time to complete the point-changing operation. The present application does not limit this, and it depends on the specific situation.

[0107] On the basis of any of the above embodiments, in one embodiment of the present application, the adjusting element is a rotating adjusting element, which drives the optical element to rotate under the control of the processing element.

[0108] Specifically, in one embodiment of the present application, Figure 7 As shown, Figure 7 The schematic diagram of the rotating adjustment element provided in the embodiment of the present application adjusting the position of the optical element irradiated by the light is shown. At this time, the optical element can be divided into different numbers of irradiable points according to the angle of the rotation direction (R direction), for example, Figure 7 As shown, the optical element is divided into 1-8 irradiable points, which is not limited in the present application and depends on the specific situation. When the current irradiation point of the optical element irradiated by the light is damaged, the rotation adjustment element drives the optical element to rotate along the rotation direction R under the control of the processing element to find a new irradiation point, so that the spot size of the light signal output by the optical element at the new irradiation point meets the preset conditions, and the point change operation is completed.

[0109] Optionally, in one embodiment of the present application, the rotation adjustment element drives the optical element to rotate clockwise by a certain angle to complete the point change operation. Figure 7As shown, when the current irradiation point 1 in the optical element is damaged, the rotating adjustment element drives the optical element to rotate clockwise by a certain angle. At this time, the position in the optical element irradiated by the light moves from point 1 to point 8, and detects whether the spot size of the light signal output by the optical element at the new irradiation point 8 meets the preset conditions. If the spot size of the light signal output by the optical element at the new irradiation point 8 meets the preset conditions, the adjustment ends. If the spot size of the light signal output by the optical element at the new irradiation point 8 does not meet the preset conditions, the rotating adjustment element continues to drive the optical element to rotate clockwise by a certain angle until the spot size of the light signal output by the optical element at the new irradiation point meets the preset conditions or all irradiation points in the optical element are searched. Optionally, in another embodiment of the present application, the rotating adjustment element drives the optical element to rotate counterclockwise by a certain angle to complete the point change operation. The present application does not limit this, and it depends on the specific situation.

[0110] It should be noted that, in the process where the rotation adjustment element drives the optical element to rotate under the control of the processing element, the present application does not limit the angle at which the rotation adjustment element drives the optical element to rotate each time, which depends on the specific circumstances.

[0111] Specifically, in one embodiment of the present application, the adjustment element may include an electric optical adjustment mechanism, in which the optical element is fixed on a high-precision two-dimensional translation stage or a rotation translation stage. When a certain irradiation point of the optical element in the detection device is damaged, it is only necessary to use the electric optical adjustment mechanism to pre-set the distance that the damaged optical element needs to be translated or the angle that needs to be rotated, and the entire adjustment process can be completed by pressing a button. Compared with the manual detection and point change in the prior art, it saves time and cost, and the accuracy of electric adjustment is much higher than that of manual knob adjustment.

[0112] In summary, in the detection system provided by the embodiment of the present application, the detection element obtains the performance value of the optical signal output by the optical element arranged in the optical path of the detection device when processing the light in the optical path; the processing element generates a corresponding processing instruction based on the performance value of the optical signal output by the optical element when processing the light obtained by the detection element; the adjustment element adjusts the position of the optical element irradiated by the light in the optical path based on the processing instruction, thereby improving the utilization rate of the optical element while ensuring the detection accuracy of the detection device, thereby increasing the service life of the optical element.

[0113] The present application also provides a detection device, Figure 3 or Figure 4As shown, the detection device includes a light source, an optical element and a detection system, wherein the optical element is located in the light path of the light source, processes the light in the light path, and outputs a light signal, and the detection system is the detection system provided by any of the above embodiments, which is used to obtain the performance value of the light signal output by the optical element for processing the light in the light path, and generate corresponding processing instructions based on the performance value of the light signal output by the optical element for processing the light obtained by the detection element, so as to improve the utilization rate of the optical element while ensuring the detection accuracy of the detection device, thereby improving the service life of the optical element. Since the specific implementation process of the detection system has been described in the above embodiments, it will not be repeated here. Optionally, the light source is a laser, but this application does not limit this, and it depends on the specific circumstances.

[0114] In addition, the present application also provides a detection method, which is applied to the detection system provided in any of the above embodiments. Figure 8 As shown, Figure 8 The flow chart of the detection method provided in the embodiment of the present application is shown. Figure 8 , the method comprising:

[0115] Step S1, obtaining the performance value of the optical signal output by the optical element in the detection device through the detection element in the detection system, wherein the optical signal output by the optical element is the optical signal formed by the optical element processing the light in the optical path of the detection device.

[0116] Specifically, in one embodiment of the present application, Fig. 9 As shown, obtaining the performance value of the optical signal output by the optical element in the detection device through the detection element in the detection system includes:

[0117] Step S11, obtaining, by the detection element, a spot image of the light signal output by the optical element after processing the light.

[0118] Specifically, in one embodiment of the present application, Fig.10 As shown, Fig.10 The light spot image of the light signal output by the optical element processing the light obtained by the detection element provided in the embodiment of the present application is shown, and the long side direction (third direction) of the light spot is defined as the X direction, and the short side direction (fourth direction) of the light spot is defined as the Y direction.

[0119] It should be noted that the light spot image obtained by the detection element is a light spot image formed when the optical element processes the light signal output by the light beam and irradiates the light beam onto the target object. Specifically, in one embodiment of the present application, the detection element obtains the light spot image formed on the target object by the light signal output by the optical element based on the scattered signal formed when the light signal output by the optical element irradiates the light beam onto the target object. Optionally, in one embodiment of the present application, the target object is a wafer, and the light spot is a light spot formed on the wafer when the light signal output by the optical element processes the light beam and irradiates the light beam onto the wafer.

[0120] Step S12: based on the light spot image, obtaining the light signal intensity of each position of the light spot in a third direction, wherein the third direction is the long side direction of the light spot.

[0121] Specifically, in one embodiment of the present application, continue as follows Fig. 9 As shown, based on the light spot image, obtaining the light signal intensity of the light spot at each position in the third direction includes:

[0122] Step S121, based on the light spot image, obtaining a light spot cross-sectional view of the light spot at each position in the third direction;

[0123] Specifically, in one embodiment of the present application, the light spot is intercepted at each position in the long side direction of the light spot along the short side direction to obtain a light spot cross-sectional view at each position in the third direction. Fig.11 As shown, Fig.11 for Fig.10 A partial enlarged view of Fig.11 In the light spot diagram shown in FIG. 1 , the light spot cross-section diagram at the position X=a in the third direction is Fig.11 The white line shown is used to intercept the light spot to obtain a cross-sectional view of the light spot. By analogy, cross-sectional views of the light spots at various positions in the third direction in the light spot of the light signal output by the optical element in the detection device for processing the light are obtained.

[0124] Step S122, based on the cross-sectional view of the light spot at each position in the third direction, obtain the optical signal intensity of the light spot at each position in the third direction and at each position in the fourth direction, wherein the fourth direction is the short side direction of the light spot.

[0125] It should be noted that at each position in the third direction, the intensity of the light signal at different positions of the light spot in the fourth direction is different. Therefore, after obtaining the light spot cross-sectional diagram at each position in the third direction, it is necessary to obtain the light signal intensity at each position in the third direction and at each position in the fourth direction based on the light spot cross-sectional diagram at each position in the third direction. Fig.12 As shown, Fig.12 It shows the light signal intensity of the light spot at each position in the fourth direction Y at position X=a in the third direction, wherein the horizontal axis is the Y direction and the vertical axis is the light signal intensity of the light spot at each position in the fourth direction Y at position X=a in the third direction.

[0126] Step S123, obtaining the light signal intensity of the light spot at each position in the third direction based on the light signal intensity of the light spot at each position in the fourth direction at each position in the third direction;

[0127] from Fig.12 It can be seen that in the same light spot, at the same position in the third direction X, different positions in the fourth direction Y have different corresponding light signal intensities. Therefore, based on the above embodiment, in one embodiment of the present application, based on the light signal intensities at various positions in the third direction and the light signal intensities at various positions of the light spot in the fourth direction, obtaining the light signal intensities at various positions of the light spot in the third direction includes:

[0128] Based on the light signal intensity of the light spot at each position in the third direction at each position in the fourth direction, a distribution curve diagram of the light signal intensity of the light spot at each position in the third direction along the fourth direction is obtained, and the distribution curve diagram is as follows: Fig.12 As shown;

[0129] Based on the distribution curve of the light signal intensity of the light spot along the fourth direction at each position in the third direction, the light signal intensity of the light spot at each position in the fourth direction is integrated, and the integration result is used as the light signal intensity of the light spot at the position in the third direction. Fig.13 As shown, Fig.13 The optical signal intensity of the light spot at different positions in the third direction X is shown.

[0130] It should be noted that, in the above-mentioned embodiment, the integral result of the optical signal intensity of the light spot at each position in the fourth direction is taken as the optical signal intensity of the light spot at that position in the third direction, but the present application is not limited to this. In other embodiments of the present application, at each position in the third direction, the weighted average value of the optical signal intensity of the light spot at each position in the fourth direction can be taken as the optical signal intensity of the light spot at that position in the third direction, depending on the specific circumstances.

[0131] from Fig.13It can be seen that the optical signal intensity distribution curve obtained based on the optical signal intensity at each position of the light spot in the third direction has many burrs. In order to facilitate the subsequent acquisition of the minimum optical signal intensity in the light spot that meets the preset uniformity based on the optical signal intensity distribution curve, in one embodiment of the present application, the method also includes: filtering the optical signal intensity distribution curve to make the optical signal intensity distribution curve smoother.

[0132] Specifically, in one embodiment of the present application, filtering the optical signal intensity distribution curve may include low-pass filtering the optical signal intensity distribution curve, may include high-pass filtering the optical signal intensity distribution curve, and may also include simultaneously low-pass filtering and high-pass filtering the optical signal intensity distribution curve. The present application does not impose any limitation on this, as long as the optical signal intensity distribution curve can be made smoother.

[0133] Step S13, determining an area in the light spot that meets a preset uniformity as a target area based on the light signal intensity at each position of the light spot in the third direction;

[0134] Specifically, in one embodiment of the present application, continue as follows Fig. 9 As shown, based on the light signal intensity of the light spot at each position in the third direction, determining the area in the light spot that meets the preset uniformity as the target area includes:

[0135] Step S131, obtaining a maximum light signal intensity of the light spot based on the light signal intensity at each position of the light spot in the third direction;

[0136] Step S132, based on the maximum light signal intensity of the light spot and the preset uniformity, obtaining the minimum light signal intensity in the light spot that satisfies the preset uniformity;

[0137] Step S133: determining the target area based on the minimum light signal intensity in the light spot that satisfies the preset uniformity.

[0138] Specifically, in one embodiment of the present application, continue as follows Fig.13 As shown, based on the light signal intensity of the light spot at each position in the third direction X, the maximum light signal intensity of the light spot in the third direction X can be obtained.

[0139] The formula for spot uniformity is defined as:

[0140]

[0141] Among them, I max is the maximum light signal intensity of the light spot, I minis the minimum light signal intensity of the light spot.

[0142] It can be seen from the formula that the maximum light signal intensity I of the light spot in the third direction X obtained above is max Based on the preset light spot uniformity, according to the above light spot uniformity formula, the minimum light signal intensity I of the light spot in the third direction X that satisfies the preset uniformity can be obtained: min .

[0143] from Fig.13 It can be seen that the light spot meets the minimum light signal intensity I of the preset uniformity in the third direction X. min It may correspond to two different positions, which are set as X=x1 and X=x2. Therefore, the light spot area between X=x1 and X=x2 in the third direction is the target area in the light spot that meets the preset uniformity in the long side direction.

[0144] Step S14: determining the size of the target area based on the target area.

[0145] Based on the above embodiment, in one embodiment of the present application, continue as follows Fig.13 As shown, based on the target area in the light spot that meets the preset uniformity in its long side direction, the length of the target area can be determined as the distance between X=x1 and X=x2 in the third direction X, so as to generate feedback information by comparing the length of the target area with the preset conditions, and then generate corresponding processing instructions.

[0146] Step S2: generating a corresponding processing instruction based on the performance value of the optical element processing the light signal output by the light beam obtained by the detection element.

[0147] It should be noted that the optical parameters of the optical element are different, and the conditions for judging whether the optical element is damaged are also different. Therefore, in one embodiment of the present application, Fig.14 As shown, generating a corresponding processing instruction based on the performance value of the optical element processing the light signal output by the light obtained by the detection element includes:

[0148] Step S21, forming corresponding preset conditions based on the optical parameters of the optical element;

[0149] In actual detection applications, in order to ensure that the detection equipment meets its detection accuracy requirements, the light spot of the optical element processing the light signal output by the light needs to have sufficient spot area to meet the preset uniformity. The area in the light spot that meets the preset uniformity is assumed to be the target area, and the size of the light spot includes the size of the target area. The preset condition includes that the size of the target area meets the preset size, wherein the preset uniformity and preset size can be set according to the specific detection accuracy of the detection equipment.

[0150] Optionally, in one embodiment of the present application, the preset condition includes: the length of a target area in the light spot of the light signal output by the optical element for processing the light is not less than a first preset value, wherein the target area is an area that satisfies a preset uniformity in the light spot of the light signal output by the optical element for processing the light, so that the length of the area greater than the preset uniformity in the light spot of the light signal output by the optical element for processing the light is greater than the first preset value, so that in the long side direction of the light spot, the light spot area of ​​a larger area in the light spot of the light signal output by the optical element for processing the light can ensure the detection accuracy of the detection equipment.

[0151] It should be noted that, in actual detection applications, in addition to the requirement for the length of the light spot of the light signal output by the optical element to meet the preset uniformity area, the detection device also has requirements for the width of the light spot area of ​​the light signal output by the optical element. Therefore, based on the above embodiment, in one embodiment of the present application, the preset condition also includes: the width of the light spot area of ​​the light signal output by the optical element is not greater than the second preset value, so that the length of the light spot of the light signal output by the optical element is greater than the preset uniformity area is greater than the first preset value, and the width of the light spot area is less than the second preset value, so that the light spot of the light signal output by the optical element has a larger area of ​​the light spot in the long side direction of the light spot, and has a relatively concentrated area of ​​the light spot in the short side direction of the light spot, so as to ensure the detection accuracy of the detection device. However, the present application does not limit this. In other embodiments of the present application, the preset condition can also only include that the width of the light spot area is not greater than the second preset value, but does not include that the length of the target area is not less than the first preset value. The present application does not limit this, depending on the specific situation.

[0152] It should be noted that, when the spot area of ​​the light signal output by the optical element for processing the light has different widths at different positions in the long side direction of the spot, the spot area width of the light signal output by the optical element for processing the light is not greater than a second preset value includes: the spot width of at least the area where the target area is located in the spot area of ​​the light signal output by the optical element for processing the light is not greater than the second preset value.

[0153] It should also be noted that the present application does not limit the specific numerical values ​​of the first preset value and the second preset value, which depend on the detection accuracy of the detection equipment.

[0154] Step S22, comparing the preset condition with the performance value of the optical signal output by the optical element in the detection device processed by the light obtained by the detection element, and generating feedback information;

[0155] As can be seen from the foregoing, the preset condition includes at least one of: the length of the target area in the light spot of the light signal output by the optical element when processing the light is not less than a first preset value and the width of the light spot area of ​​the light signal output by the optical element when processing the light is not greater than a second preset value. The width of the light spot area is determined by the size of the light spot of the light signal output by the optical element when processing the light and the passband when filtering the light signal intensity distribution curve obtained based on the light signal intensity at each position of the light spot in the third direction.

[0156] The following description is made by taking the example that the preset condition includes that the length of the target area in the light spot of the light signal output by the optical element when processing the light is not less than the first preset value. Fig.13 As shown, the length of the target area in the light spot that meets the preset uniformity in the long side direction is the distance between X=x1 and X=x2 in the third direction X. Based on the length of the target area (i.e., the distance between X=x1 and X=x2 in the third direction) and the first preset value, it can be determined whether the spot size of the light signal output by the optical element for processing the light meets the preset conditions.

[0157] Optionally, in one embodiment of the present application, when the length of the target area in the light spot of the light signal output by the optical element for processing the light is less than a first preset value, it means that the light spot of the light signal output by the optical element for processing the light can no longer guarantee the detection accuracy requirement of the detection equipment, and feedback information is generated at this time, and the feedback information is used to prompt that the optical element has optical damage.

[0158] Step S23, generating corresponding processing instructions based on the feedback information, so as to adjust the position of the optical element irradiated by the light in the optical path based on the processing instructions, thereby improving the utilization rate of the optical element while ensuring the detection accuracy of the detection equipment, thereby improving the service life of the optical element.

[0159] Based on any of the above embodiments, in one embodiment of the present application, continue as follows Figure 8 As shown, the detection method may also include:

[0160] Step S3, based on the processing instruction, controlling the adjusting element to adjust the position of the optical element irradiated by the light in the optical path, so as to find the irradiation point in the optical element at which the spot size of the light signal output by processing the light meets the preset conditions through automatic point changing operation.

[0161] In other embodiments of the present application, the operator may also control the adjusting element to adjust the position of the optical element illuminated by the light in the optical path to perform a point-changing operation, which is not limited in the present application and depends on the specific circumstances.

[0162] It should be noted that, based on the above embodiments, in one embodiment of the present application, when the adjustment element adjusts the optical element and searches through each irradiation point in the optical element, but none of the light spot sizes of the light signal processed by the optical element to output the light satisfy a preset condition, the detection method may also issue a prompt message to replace the optical element.

[0163] Correspondingly, the embodiment of the present application further provides a detection device, the detection device includes a light source, an optical element and a detection system, the optical element is arranged in the light path of the light source, processes the light in the light path and outputs an optical signal, the detection system adopts the detection method provided in any of the above embodiments, obtains the performance value of the optical signal output by the optical element, and generates corresponding processing instructions based on the performance value of the optical signal. Since the detection method has been described in detail in the above embodiments, it will not be repeated here.

[0164] In summary, the detection method provided in the embodiment of the present application generates feedback information by comparing preset conditions and the performance value of the optical signal output by the optical element arranged in the optical path of the detection device and processed the light in the optical path obtained by the detection element, and generates corresponding processing instructions based on the feedback information, and then further, based on the processing instructions, controls the adjustment element to adjust the position of the optical element irradiated by the light in the optical path, thereby improving the utilization rate of the optical element and further improving the service life of the optical element while ensuring the detection accuracy of the detection equipment.

[0165] The various parts in this manual are described in a combination of parallel and progressive ways. Each part focuses on the differences from other parts, and the same or similar parts between the various parts can be referenced to each other.

[0166] With respect to the above description of the disclosed embodiments, the features described in the embodiments in this specification may be replaced or combined with each other, so that professionals in the field can implement or use the present application. Various modifications to these embodiments will be apparent to professionals in the field, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A detection system, characterized in that: include: A detection element, used for obtaining a performance value of an optical signal output by an optical element disposed in an optical path of a detection device for processing light in the optical path, wherein the performance value of the optical signal output by the optical element in the detection device for processing the light obtained by the detection element is a spot size of the optical signal output by the optical element for processing the light; as well as a processing element, which is in communication with the detection element and is configured to generate a corresponding processing instruction based on a performance value of the optical signal output by the optical element for processing the light obtained by the detection element; The process of generating a corresponding processing instruction by the processing element based on the performance value of the optical signal output by the optical element for processing the light obtained by the detection element includes: A corresponding preset condition is formed based on the optical parameters of the optical element, wherein the preset condition includes: a length of a target area in a light spot of the light signal output by the optical element when processing the light is not less than a first preset value, wherein the target area is an area in the light spot of the light signal output by the optical element when processing the light that meets a preset uniformity; Comparing the preset condition with a performance value of the optical signal output by the optical element in the detection device in processing the light obtained by the detection element, and generating feedback information; Generate corresponding processing instructions based on the feedback information.

2. The detection system according to claim 1, characterized in that: The preset condition also includes: the width of the spot area of ​​the light signal output by the optical element after processing the light is not greater than a second preset value.

3. The detection system according to claim 1, characterized in that: The detection element comprises an image acquisition element, and the image acquisition element is used to acquire a light spot image of a light signal output by the optical element after processing the light.

4. The detection system according to any one of claims 1 to 3, characterized in that: Also includes: The processing element is also in communication with the adjusting element and is configured to generate an adjusting instruction based on the processing instruction, wherein the adjusting instruction controls the adjusting element to adjust a position of the optical element illuminated by the light in the optical path.

5. The detection system according to claim 4, characterized in that: The adjusting element is a two-dimensional adjusting element, and the adjusting element controls the optical element to move in a two-dimensional plane according to the adjusting instruction.

6. The detection system according to claim 5, characterized in that: The adjusting element drives the optical element to move along the first direction and / or the second direction within a preset plane under the control of the processing element. Wherein, the preset plane is parallel to the incident surface of the optical element, and the first direction is perpendicular to the second direction.

7. The detection system according to claim 4, characterized in that: The adjusting element is a rotating adjusting element, which drives the optical element to rotate under the control of the processing element.

8. The detection system according to any one of claims 1 to 3, characterized in that: The optical element is a beam splitter, a reflector, a polarizing lens, a prism, a graticule or a filter.

9. A detection method, characterized in that: Applied to a detection system, the method comprises: Acquiring, by means of the detection element in the detection system, a performance value of an optical signal output by an optical element in the detection device, wherein the optical signal output by the optical element is an optical signal formed by the optical element processing light in the optical path of the detection device, and the performance value of the optical signal output by the optical element is a spot size of the optical signal; Generate a corresponding processing instruction based on the performance value of the optical element processing the light signal output by the light obtained by the detection element; The process of generating a corresponding processing instruction based on the performance value of the optical element processing the light signal output by the light obtained by the detection element includes: A corresponding preset condition is formed based on the optical parameters of the optical element, wherein the preset condition includes: a length of a target area in a light spot of the light signal output by the optical element when processing the light is not less than a first preset value, wherein the target area is an area in the light spot of the light signal output by the optical element when processing the light that meets a preset uniformity; Comparing the preset condition with a performance value of the optical signal output by the optical element in the detection device in processing the light obtained by the detection element, and generating feedback information; Generate corresponding processing instructions based on the feedback information.

10. The detection method according to claim 9, characterized in that: Acquiring, by means of a detection element in the detection system, a performance value of an optical signal output by the optical element in the detection device in processing the light comprises: Acquiring, by means of the detection element, a spot image of a light signal output by the optical element after processing the light; Based on the light spot image, obtaining the light signal intensity of the light spot at each position in the third direction; Based on the light signal intensity of the light spot at each position in the third direction, determining a region in the light spot that meets a preset uniformity as a target region; Based on the target area, determining a size of the target area; Wherein, the third direction is the long side direction of the light spot.

11. The detection method according to claim 10, characterized in that: Based on the light spot image, acquiring the light signal intensity of the light spot at each position in the third direction includes: Based on the light spot image, obtaining a light spot cross-sectional image of the light spot at each position in the third direction; Based on the cross-sectional view of the light spot at each position in the third direction, obtaining the light signal intensity of the light spot at each position in the fourth direction at each position in the third direction; Based on the light signal intensity of the light spot at each position in the third direction, the light signal intensity of the light spot at each position in the fourth direction is obtained; Wherein, the fourth direction is the short side direction of the light spot.

12. The detection method according to claim 10, characterized in that: Based on the light signal intensity of the light spot at each position in the third direction, determining the area in the light spot that meets the preset uniformity as the target area includes: Based on the light signal intensity of the light spot at each position in the third direction, obtaining the maximum light signal intensity of the light spot; Based on the maximum light signal intensity of the light spot and the preset uniformity, obtaining the minimum light signal intensity in the light spot that satisfies the preset uniformity; The target area is determined based on a minimum light signal intensity in the light spot that satisfies the preset uniformity.

13. The detection method according to claim 9, characterized in that: Also includes: Based on the processing instruction, the adjusting element is controlled to adjust the position of the optical element illuminated by the light in the optical path.

14. A detection device, comprising a light source and an optical element, characterized in that: It also includes the detection system according to any one of claims 1 to 8, wherein the optical element is arranged in the light path of the light source.

15. A detection device, comprising a light source, an optical element and a detection system, characterized in that: The detection system adopts the detection method described in any one of items 9-13 to obtain the performance value of the light signal output by the optical element, and generates corresponding processing instructions based on the performance value of the light signal, wherein the optical element is arranged in the light path of the light source.

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