A method for detecting automatic photoresist replacement

Abstract

The application discloses a kind of detection methods of automatically replacing photoresist.The prior art is overcome by the present application, which has the problems of complex process flow, tedious steps and easy to cause abnormal coating due to errors in manual replacement of photoresist bottles.The application comprises the following steps:S1: simultaneously monitor the presence or absence of photoresist in the glue discharge pipe and buffer, determine whether to replace the photoresist bottle alarm prompt, and automatically replace the photoresist bottle operation;S2: simultaneously open the air inlet valve and exhaust bubble valve, when the pressure gauge detects that the air pressure in the photoresist bottle is greater than a certain threshold, start automatic glue supplement;S3: simultaneously monitor the presence or absence of photoresist below the glue discharge pipe, buffer and exhaust bubble valve in real time, to determine whether the buffer is filled with photoresist, close the air inlet valve and exhaust bubble valve, and complete the automatic glue supplement.By simultaneous linkage monitoring of multiple sensors in multiple positions, the replacement of photoresist bottles is automatically completed, reducing labor costs, avoiding human errors, and ensuring the quality of the process flow.

Description

Technical Field

[0001] This invention relates to the field of photoresist replacement detection, and more particularly to a detection method for automatic photoresist replacement. Background Technology

[0002] Photoresist (PR) is an important element in the semiconductor industry. It is used at various stages of the semiconductor manufacturing process to form patterns on wafers.

[0003] Currently, photoresist bottles are typically changed manually. After changing the photoresist bottle, the air vent valve is manually opened. The air inlet tube is manually inserted into the bottle. Pressure is applied to the bottle, pushing the photoresist into the air vent buffer. Air bubbles in the buffer rise and are expelled through the air vent valve. Once no air bubbles are visually detected in the buffer, the air vent valve is closed. The air inlet tube is then disconnected from the bottle. The drawback of manually changing photoresist bottles is that the process is complex and cumbersome for the equipment operator, making it prone to errors. Forgetting to disconnect the air vent tube or close the air vent valve during manual operation can lead to abnormal coating and process errors.

[0004] There are also solutions for automatically replacing photoresist bottles. For example, a Chinese patent document, "Vehicle, Computer System, and Replacement Method for Replacing Photoresist Bottles," publication number CN110712582A, includes a processor configured to receive a request signal to replace a first photoresist bottle. The processor is also configured to transmit an instruction based on the request signal. The vehicle also includes multiple wheels configured to move the vehicle from a first location to a second location and from the second location to the first location. The vehicle also includes a robotic arm configured to load the first photoresist bottle into a first container at the first location; load a second photoresist bottle into a second container; remove a cap from the second photoresist bottle and remove a sleeve from the first photoresist bottle; couple the sleeve of the first photoresist bottle to the second photoresist bottle; and unload the second photoresist bottle from the second container.

[0005] However, the plan only discloses the device for automatically replacing photoresist bottles, without disclosing the timing of replacement or the testing standards for replacement. Summary of the Invention

[0006] This invention primarily addresses the problems of existing technologies that involve manual replacement of photoresist bottles, which are complex, cumbersome, and prone to errors leading to abnormal photoresist application. It provides an automated detection method for photoresist replacement, utilizing simultaneous monitoring from multiple sensors at multiple locations to determine the presence of photoresist in the bottle, and then automatically replacing and replenishing the photoresist. This automated operation avoids human error and ensures the quality of the process.

[0007] The above-mentioned technical problems of the present invention are mainly solved by the following technical solutions:

[0008] An automatic photoresist replacement detection method uses a system comprising an air inlet pipe with an air inlet valve, a photoresist bottle, a photoresist discharge pipe, and a buffer connected in sequence. An exhaust pipe with a bubble removal valve is installed above the buffer. The detection method includes the following steps:

[0009] S1: Simultaneously monitor the presence or absence of photoresist in the dispensing tube and buffer in real time to determine whether an alarm reminder is needed to replace the photoresist bottle, and automatically replace the photoresist bottle.

[0010] S2: After the photoresist bottle is replaced, open the air inlet valve and the air vent valve at the same time. When the pressure gauge detects that the air pressure in the photoresist bottle is greater than a certain threshold, automatic photoresist replenishment will begin.

[0011] S3: Simultaneously monitor the presence or absence of photoresist below the discharge tube, buffer, and bubble degassing valve in real time to determine whether the buffer is full of photoresist, close the air inlet valve and bubble degassing valve, and complete automatic photoresist replenishment.

[0012] This solution utilizes multiple sensors at multiple locations for simultaneous monitoring to determine the presence of photoresist in the photoresist bottle and whether the buffer is full of photoresist, thus automatically replacing and replenishing the photoresist bottle. Based on the monitoring results, the system automatically operates the air inlet valve and air bubble venting valve, reducing labor costs, avoiding human error, and ensuring the quality of the process.

[0013] Preferably, a first sensor is installed in the discharge tube, and a second sensor is installed in the buffer. Step S1 includes the following steps:

[0014] S11: The first sensor and the second sensor simultaneously monitor the presence or absence of photoresist in real time. When the first sensor and the second sensor simultaneously output a signal indicating no photoresist, it is determined that the photoresist bottle is empty and proceeds to step S12; otherwise, it returns to step S11.

[0015] S12: Issue an alarm reminder to replace the photoresist bottle, control the automatic replacement device to remove the empty photoresist bottle, and place the photoresist bottle filled with photoresist into the appropriate position;

[0016] S13: Connect the photoresist bottle filled with photoresist to the air inlet and the photoresist outlet.

[0017] Because there may be photoresist residue adhering to the wall below the bubble degassing valve, causing false detections, the sensor below the bubble degassing valve is not detected. Only two locations are detected to make a comprehensive judgment on the state of the photolithography bottle.

[0018] Preferably, a third sensor is installed in the exhaust pipe below the bubble-expelling valve; step S3 includes the following steps:

[0019] S31: The first sensor, the second sensor, and the third sensor simultaneously monitor the presence or absence of photoresist in real time. When the first sensor, the second sensor, and the third sensor simultaneously output a photoresist presence signal, proceed to step S32; otherwise, return to step S31.

[0020] S32: Close the air inlet valve and the air vent valve, and check the pressure value in the photoresist bottle using a pressure gauge;

[0021] S33: When the pressure gauge detects no pressure in the photoresist bottle, automatic photoresist replenishment is completed; otherwise, the equipment stops working and an alarm is triggered.

[0022] By combining sensor signals from three locations, the system determines whether the buffer is full of photoresist and automatically controls the closure of the air inlet and air vent valves, reducing labor costs and avoiding human error. After closing the valves, the air pressure is monitored to ensure system safety.

[0023] Preferably, the sensor is a photoelectric sensor. Photoresist reflects light; if the photoelectric sensor reflects light, it outputs a signal indicating the presence of photoresist; if the photoelectric sensor does not reflect light, it outputs a signal indicating the absence of photoresist.

[0024] Preferably, after the first, second, and third sensors simultaneously detect the absence or presence of photoresist, a delay of 2-5 seconds is made before determining whether the absence or presence of photoresist can still be detected simultaneously. If yes, a signal indicating the absence of photoresist or the presence of photoresist is output; otherwise, the monitoring of the presence or absence of photoresist continues. Increasing the delay avoids noise signals caused by slow photoresist flow or residue, thus increasing the reliability of the judgment.

[0025] Preferably, the automatic replacement device includes a robotic arm for gripping photoresist bottles and a mounting base for placing several photoresist bottles. The mounting base has several receiving grooves along its edge, and limit gates are provided between the sidewalls of the receiving grooves. The limit gates and the receiving grooves form mounting grooves adapted to the photoresist bottles. The photoresist bottles are limited by the limit gates, and the receiving grooves are located at the edge of the mounting base, facilitating the replacement of the photoresist bottles.

[0026] Preferably, the automatic replacement device further includes a drive motor, and a receiving hole for a limiting gate is formed on the side wall of the receiving groove. The drive motor drives the limiting gate to move. When loading or unloading the photoresist bottle, the limiting gate is located in the receiving hole, and the robot arm takes out or puts in the photoresist bottle; after the photoresist bottle is loaded or unloaded, the drive motor drives the limiting gate to move out of the receiving hole, forming an installation groove with the receiving groove, which is used to limit and fix the photoresist bottle.

[0027] Preferably, a pressure sensor is installed at the bottom of the mounting slot. The pressure sensor further determines the amount of photoresist in the photoresist bottle, and calculates the weight range when the photoresist bottle is empty based on historical data. If the weight data from the pressure sensor is outside the preset range when the photoresist bottle is determined to be empty by the signals from the first and second sensors, an alarm is triggered to call for personnel to determine the cause and avoid false detection. If the weight data from the pressure sensor is within the preset range, the photoresist bottle is replaced.

[0028] The beneficial effects of this invention are:

[0029] 1. By simultaneously monitoring multiple locations and sensors, the system determines whether there is photoresist in the photoresist bottle and whether the buffer is full of photoresist, then automatically replaces and replenishes the photoresist bottle. Based on the monitoring results, the system automatically operates the air inlet valve and air bubble vent valve, reducing labor costs, avoiding human error, and ensuring the quality of the process.

[0030] 2. When determining the amount of photoresist in the photoresist bottle, because there may be photoresist adhering to the wall below the bubble vent valve, causing false detection, the sensor below the bubble vent valve is not detected. Only two positions are detected, making the detection data more reliable.

[0031] 3. Increase the delay to avoid noise signals caused by slow photoresist flow or residue, thereby increasing the reliability of the judgment. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the automatic photoresist replacement system used in this invention.

[0033] Figure 2 This is a flowchart of the automatic photoresist replacement detection method of the present invention.

[0034] Figure 3 This is a schematic diagram of the mounting base structure according to Embodiment 2 of the present invention.

[0035] In the figure: 1. Inlet pipe, 2. Photoresist bottle, 3. Discharge pipe, 4. Buffer, 5. Inlet valve, 6. Exhaust pipe, 7. Pressure gauge, 8. Air bubble valve, 9. Photoresist delivery pipe, 10. First sensor, 11. Second sensor, 12. Second sensor, 13. Mounting base, 14. Receiving groove, 15. Limiting grid. Detailed Implementation

[0036] The technical solution of the present invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0037] Example 1:

[0038] This embodiment provides a detection method for automatically changing photoresist, employing an automatic photoresist replacement system, such as... Figure 1 As shown, the system includes an air inlet pipe 1 with an air inlet valve 5, a photoresist bottle 2, a photoresist discharge pipe 3, and a buffer 4 connected in sequence.

[0039] The air inlet pipe 1 is equipped with a pressure gauge 7 for detecting the internal air pressure of the photoresist bottle 2 on the side near the photoresist bottle 2; an exhaust pipe 6 with a bubble degassing valve 8 is provided above the buffer 4; and a photoresist delivery pipe 9 for delivering photoresist to the coating system is provided below the buffer 4.

[0040] One end of the discharge tube 3 extends into the bottom of the photoresist bottle 2, and the air inlet tube 1 is connected to the top of the photoresist bottle 2. A first sensor 10 is installed in the discharge tube 3, and the first sensor 10 is located in the center of the discharge tube 3. A second sensor 11 is installed in the buffer 4, and the second sensor is located in the center of the buffer 4. A third sensor 12 is installed in the exhaust pipe 6 below the bubble degassing valve 8.

[0041] The first sensor 10, the second sensor 11, and the third sensor 12 are used to monitor the presence or absence of photoresist. They can be photoelectric sensors or capacitive sensors. In this embodiment, they are photoelectric sensors. If the photoelectric sensor reflects light, it outputs a photoresist presence signal. If the photoelectric sensor does not reflect light, it outputs a no-photoresist signal.

[0042] This embodiment provides a detection method for automatically replacing photoresist, such as... Figure 2 As shown, it includes the following steps:

[0043] S1: Simultaneously monitor the presence or absence of photoresist in the dispensing tube and buffer in real time to determine whether an alarm reminder is needed to replace the photoresist bottle, and automatically replace the photoresist bottle.

[0044] S11: The first sensor 10 and the second sensor 11 simultaneously monitor the presence or absence of photoresist in real time. When the first sensor and the second sensor simultaneously output a signal indicating no photoresist, it is determined that the photoresist bottle is empty and proceeds to step S12; otherwise, it returns to step S11.

[0045] The first sensor monitors the presence or absence of photoresist in the dispensing tube in real time, and the second sensor monitors the presence or absence of photoresist in the buffer transducer in real time. When the first and second sensors simultaneously output a no-photoresist signal, there is a delay of 2 to 5 seconds. If the first and second sensors still output a no-photoresist signal simultaneously during the delay, it is determined that the photoresist bottle is empty. Otherwise, it is determined to be noise interference, and the monitoring of the presence or absence of photoresist continues.

[0046] Because there may be photoresist residue adhering to the wall below the bubble vent valve, causing false detections, the third sensor does not detect anything in this situation. In this embodiment, a 3-second delay is set to avoid interference from noise signals and to prevent interference.

[0047] S12: Issue an alarm reminder for replacing the photoresist bottle, control the automatic replacement device to remove the empty photoresist bottle, and place the photoresist bottle filled with photoresist into the appropriate position.

[0048] S13: Connect the photoresist bottle filled with photoresist to the air inlet and the photoresist outlet.

[0049] S2: After the photoresist bottle is replaced, open the air inlet valve and the air vent valve at the same time. When the pressure gauge detects that the air pressure in the photoresist bottle is greater than a certain threshold, automatic photoresist replenishment will begin.

[0050] Nitrogen gas is introduced into the photoresist bottle by opening the air inlet valve. The gas pressure pushes the photoresist in the bottle towards the buffer, initiating the replenishment of photoresist into the subsequent coating system. In this embodiment, the threshold pressure is 0.1 MPa.

[0051] S3: Simultaneously monitor the presence or absence of photoresist below the discharge tube, buffer, and bubble degassing valve in real time to determine whether the buffer is full of photoresist, close the air inlet valve and bubble degassing valve, and complete automatic photoresist replenishment.

[0052] S31: The first sensor, the second sensor, and the third sensor simultaneously monitor the presence or absence of photoresist in real time. When the first sensor, the second sensor, and the third sensor simultaneously output a photoresist presence signal, proceed to step S32; otherwise, return to step S31.

[0053] The first sensor monitors the presence of photoresist in the dispensing tube in real time, the second sensor monitors the presence of photoresist in the buffer in real time, and the third sensor detects whether there is photoresist in the exhaust pipe below the air vent valve. When the first, second, and third sensors simultaneously output a photoresist presence signal, there is a delay of 2 to 5 seconds. If the first, second, and third sensors still simultaneously output a photoresist presence signal during the delay, it is determined that the photoresist in the buffer is full, and the air inlet valve and air vent valve are automatically closed; otherwise, it is determined to be noise interference, the photoresist in the buffer is not full, and photoresist replenishment continues while monitoring the presence of photoresist continues.

[0054] S32: Automatically closes the air inlet valve and the air bubble venting valve, and detects the pressure value in the photoresist bottle using a pressure gauge.

[0055] S33: When the pressure gauge detects no pressure in the photoresist bottle, automatic photoresist replenishment is completed; otherwise, the equipment stops working and an alarm is triggered. In this embodiment, "no pressure" means the pressure in the photoresist bottle is 0 MPa, that is, the pressure inside the photoresist bottle is the same as the external standard atmospheric pressure, and no nitrogen is added to increase the pressure of the photoresist.

[0056] Once all three sensors detect the presence of photoresist, it indicates that the photoresist in the buffer is full. The air inlet valve and air bubble de-escalation valve then automatically close. Through the coordinated monitoring of the three sensors, plus a delay, the photoresist status of the system can be comprehensively monitored without requiring real-time manual monitoring. Furthermore, the automatic control of the air inlet valve and air bubble de-escalation valve when preset conditions are met avoids human error and ensures the quality of subsequent processes.

[0057] Example 2:

[0058] This embodiment of the invention provides a detection method for automatically replacing photoresist, which employs an automatic photoresist replacement system and optimizes the automatic replacement device within the system.

[0059] The automatic replacement device includes a robotic arm for gripping the photoresist bottle 2 and a mounting base 13 for placing several photoresist bottles.

[0060] The mounting base 13 has several receiving grooves 14 on its edge. Limiting grids 15 are provided between the side walls of the receiving grooves 14, and the limiting grids 15 and the receiving grooves 14 form a mounting groove for the photoresist bottle 2. The photoresist bottle 2 is limited by the limiting grids 15. The receiving grooves 14 are located on the edge of the mounting base 13 to facilitate the replacement of the photoresist bottle 2.

[0061] The automatic replacement device also includes a drive motor. A receiving hole for a limit gate 15 is provided on the side wall of the receiving groove 14. The drive motor drives the limit gate 15 to move. When loading or unloading the photoresist bottle 2, the limit gate 15 is located in the receiving hole, and the robot arm takes out or puts in the photoresist bottle 2. After the photoresist bottle 2 is loaded or unloaded, the drive motor drives the limit gate 15 to move out of the receiving hole, forming a mounting groove with the receiving groove 14, which is used to limit and fix the photoresist bottle 2.

[0062] The process of the automatic photoresist bottle replacement device is as follows:

[0063] When the signal to automatically replace the photoresist bottle is sent, the robotic arm moves to the position of the corresponding photoresist bottle 2 and clamps the photoresist bottle 2;

[0064] The drive motor drives the limit gate 15 to move into the receiving groove 14, and the robot moves horizontally to remove the photoresist bottle 2 from the edge of the mounting base 13 along the receiving groove 14.

[0065] The robotic arm picks up two new bottles of photoresist filled with photoresist and places them into the mounting slot along the opening of the receiving groove 14 on the edge of the mounting base 13. The drive motor drives the limiting grid 15 to move out of the receiving hole to limit the photoresist bottle 2.

[0066] This embodiment optimizes the automatic replacement device; other settings are the same as in Embodiment 1.

[0067] Example 3:

[0068] This embodiment of the invention provides a detection method for automatically replacing photoresist, which employs an automatic photoresist replacement system.

[0069] A pressure sensor is installed at the bottom of the mounting slot where the photoresist bottle is placed.

[0070] The amount of photoresist in the photoresist bottle is further determined by a pressure sensor. Based on historical data, the weight range when the photoresist bottle is empty is estimated. If the weight data from the pressure sensor is outside the preset range when the photoresist bottle is determined to be empty by signals from the first and second sensors, an alarm is triggered, and personnel are called to determine the cause, thus avoiding false alarms. If the weight data from the pressure sensor is within the preset range, the photoresist bottle is replaced.

[0071] This solution uses a pressure sensor for further judgment, avoiding false detections by the photoelectric sensor and improving the reliability of the detection data.

[0072] The other settings in this embodiment are the same as in Embodiment 2.

[0073] It should be understood that the embodiments are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the invention, and these equivalent forms also fall within the scope defined by the appended claims.

Claims

1. A detection method for automatically changing photoresist, characterized in that, The system includes an air inlet pipe with an air inlet valve, a photoresist bottle, an exhaust pipe, and a buffer connected in sequence. An exhaust pipe with a bubble-removing valve is installed above the buffer. The testing method includes the following steps: S1: Simultaneously monitor the presence or absence of photoresist in the dispensing tube and buffer in real time to determine whether an alarm reminder is needed to replace the photoresist bottle, and automatically replace the photoresist bottle. S2: After the photoresist bottle is replaced, open the air inlet valve and the air vent valve at the same time. When the pressure gauge detects that the air pressure in the photoresist bottle is greater than a certain threshold, automatic photoresist replenishment will begin. S3: Simultaneously monitor the presence or absence of photoresist below the discharge tube, buffer, and bubble degassing valve in real time to determine whether the buffer is full of photoresist, close the air inlet valve and bubble degassing valve, and complete automatic photoresist replenishment.

2. The detection method for automatically replacing photoresist according to claim 1, characterized in that, A first sensor is installed in the discharge tube, and a second sensor is installed in the buffer. Step S1 includes the following steps: S11: The first sensor and the second sensor simultaneously monitor the presence or absence of photoresist in real time. When the first sensor and the second sensor simultaneously output a signal indicating no photoresist, it is determined that the photoresist bottle is empty and proceeds to step S12; otherwise, it returns to step S11. S12: Issue an alarm reminder to replace the photoresist bottle, control the automatic replacement device to remove the empty photoresist bottle, and place the photoresist bottle filled with photoresist into the appropriate position; S13: Connect the photoresist bottle filled with photoresist to the air inlet and the photoresist outlet.

3. The detection method for automatically replacing photoresist according to claim 1 or 2, characterized in that, A third sensor is installed in the exhaust pipe below the bubble venting valve; step S3 includes the following steps: S31: The first sensor, the second sensor, and the third sensor simultaneously monitor the presence or absence of photoresist in real time. When the first sensor, the second sensor, and the third sensor simultaneously output a photoresist presence signal, proceed to step S32; otherwise, return to step S31. S32: Close the air inlet valve and the air vent valve, and check the pressure value in the photoresist bottle using a pressure gauge; S33: When the pressure gauge detects no pressure in the photoresist bottle, automatic photoresist replenishment is completed; otherwise, the equipment stops working and an alarm is triggered.

4. The detection method for automatically replacing photoresist according to claim 3, characterized in that, The sensor in question is a photoelectric sensor.

5. The detection method for automatically replacing photoresist according to claim 3, characterized in that, After the first, second, and third sensors simultaneously detect the absence or presence of photoresist, a delay of 2-5 seconds is made to determine whether the absence or presence of photoresist can still be detected simultaneously. If yes, a signal indicating the absence of photoresist or the presence of photoresist is output; otherwise, the presence or absence of photoresist is monitored.

6. The detection method for automatically replacing photoresist according to claim 2, characterized in that, The automatic replacement device includes a robotic arm for gripping photoresist bottles and a mounting base for placing several photoresist bottles; the edge of the mounting base is provided with several receiving grooves, and a limit grid is provided between the side walls of the receiving grooves, forming a mounting groove adapted to the photoresist bottles between the limit grid and the receiving groove.

7. The detection method for automatically replacing photoresist according to claim 6, characterized in that, The automatic replacement device also includes a drive motor, and a receiving hole for a limit gate is provided on the side wall of the receiving groove, and the drive motor drives the limit gate to move.

8. The detection method for automatically replacing photoresist according to claim 6, characterized in that, A pressure sensor is installed at the bottom of the mounting slot.

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