Sensor and Electronic Device

Abstract

A sensor and an electronic device that can improve accuracy are provided. According to an embodiment, the sensor includes: a sensor unit including a first sensor element and a second sensor element; and a circuit unit. The first sensor element includes a first support portion, a first movable portion supported by the first support portion and capable of vibrating, a first electrode, and a second electrode. The first electrode can output a first signal corresponding to the vibration of the first movable portion. The direction from the first support portion toward the first electrode is along a first direction. The second electrode can output a second signal corresponding to the vibration of the first movable portion. The direction from the first support portion toward the second electrode is along a second direction intersecting the first direction. The second sensor element includes a second support portion, a second movable portion supported by the second support portion and capable of vibrating, a third electrode, and a fourth electrode.

Description

[0001] This application is based on Japanese Patent Application No. 2021-028468 (filing date: February 25, 2021), and claims priority therefrom. This application incorporates the entire content of that application by reference thereto. Technical Field

[0002] Embodiments of the present invention relate to a sensor and an electronic device. Background Art

[0003] There are sensors such as gyro sensors. In sensors and electronic devices, it is desired to improve detection accuracy. Summary of the Invention

[0004] Embodiments of the present invention provide a sensor and an electronic device capable of improving accuracy.

[0005] Technical Solution for Solving the Problem

[0006] According to an embodiment of the present invention, a sensor includes: a sensor unit including a first sensor element and a second sensor element; and a circuit unit. The first sensor element includes a first support portion, a first movable portion supported by the first support portion and capable of vibrating, a first electrode, and a second electrode. The first electrode can output a first signal corresponding to the vibration of the first movable portion. The direction from the first support portion toward the first electrode is along a first direction. The second electrode can output a second signal corresponding to the vibration of the first movable portion. The direction from the first support portion toward the second electrode is along a second direction intersecting the first direction. The second sensor element includes: a second support portion, a second movable portion supported by the second support portion and capable of vibrating, a third electrode, and a fourth electrode. The third electrode can output a third signal corresponding to the vibration of the second movable portion. The direction from the second support portion toward the third electrode is along the first direction. The fourth electrode can output a fourth signal corresponding to the vibration of the second movable portion. The direction from the second support portion toward the fourth electrode is along the second direction. The direction from the second support portion toward the third electrode is opposite to the direction from the first support portion toward the first electrode, and the direction from the second support portion toward the fourth electrode is the same as the direction from the first support portion toward the second electrode. Alternatively, the direction from the second support portion toward the third electrode is the same as the direction from the first support portion toward the first electrode, and the direction from the second support portion toward the fourth electrode is opposite to the direction from the first support portion toward the second electrode. The circuit unit includes an arithmetic unit. The arithmetic unit can output a differential operation result of a first processed signal based on the first signal and the second signal and a second processed signal based on the third signal and the fourth signal.

[0007] The sensor configured as described above can provide a sensor and an electronic device with improved accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 is a schematic diagram illustrating the sensor according to the first embodiment.

[0009] Figure 2 (a) to Figure 2 (d) of is a schematic diagram illustrating the sensor according to the first embodiment.

[0010] Figure 3 (a) to Figure 3 (d) of is a schematic diagram illustrating the sensor according to the first embodiment.

[0011] Figure 4 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0012] Figure 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0013] Figure 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0014] Figure 7 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0015] Figure 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0016] Figure 9 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0017] Figure 10 is a schematic diagram illustrating the electronic device according to the second embodiment.

[0018] Figure 11 (a) to Figure 11 (h) of is a schematic diagram illustrating the application of the electronic device.

[0019] REFERENCE SIGNS LIST

[0020] 10, 20 First sensor element, second sensor element; 10M, 20M First movable part, second movable part; 10S, 20S First support part, second support part; 10U Sensor part; 10W, 20W First spring member, second spring member; 11, 12 First electrode, second electrode; 15, 16 Fifth electrode, sixth electrode; 23, 24 Third electrode, fourth electrode; 27, 28 Seventh electrode, eighth electrode; 31, 32 First substrate, second substrate; 40 Housing; 41, 42 First component, second component; 70 Circuit part; 71-74 First detection circuit - fourth detection circuit; 75 Arithmetic unit; 76a, 76b First processing circuit, second processing circuit; 77 Power supply circuit; 78 Drive circuit; 110-115 Sensors; 170 Circuit control part; 180 Circuit; 185 Drive device; 210 Sensor device; 310 Electronic device; CF1-CF8 First structure - eighth structure; E1, E2 Adjustment electrodes; S1 Signal; Sg1-Sg4 First signal - fourth signal; Sp1, Sp2 First processing signal, second processing signal; Sv1, Sv2 First drive signal, second drive signal; Vx1, Vx2, Vy1, Vy2 Detection signals Detailed implementation mode

[0021] Hereinafter, each embodiment of the present invention will be described with reference to the drawings.

[0022] The drawings are schematic or conceptual, and the relationships between the thicknesses and widths of the respective parts, the ratios of the sizes between parts, etc. are not limited to being the same as in reality. Even when showing the same part, sometimes the mutual dimensions and ratios are shown differently according to the drawings.

[0023] In the specification of this application and each figure, the same reference numerals are given to elements that are the same as those described previously with respect to the figures that have appeared, and detailed descriptions are appropriately omitted.

[0024] (First Embodiment)

[0025] Figure 1 It is a schematic diagram illustrating the sensor according to the first embodiment.

[0026] As Figure 1 shown, the sensor 110 according to the first embodiment includes a sensor part 10U and a circuit part 70. The sensor part 10U includes a first sensor element 10 and a second sensor element 20.

[0027] The first sensor element 10 includes a first support part 10S, a first movable part 10M, a first electrode 11, and a second electrode 12.

[0028] The first movable part 10M is supported by the first support part 10S. The first movable part 10M can vibrate. For example, a first spring member 10W that connects the first support part 10S and the first movable part 10M is provided. The first movable part 10M is supported by the first support part 10S via the first spring member 10W.

[0029] The first electrode 11 can output a first signal Sg1 corresponding to the vibration of the first movable part 10M. The direction from the first support part 10S toward the first electrode 11 is along a first direction. The first direction is, for example, the Y-axis direction.

[0030] One direction perpendicular to the Y-axis direction is taken as the X-axis direction. The direction perpendicular to the Y-axis direction and the X-axis direction is taken as the Z-axis direction.

[0031] The second electrode 12 can output a second signal Sg2 corresponding to the vibration of the first movable part 10M. The direction from the first support part 10S toward the second electrode 12 is along a second direction. The second direction intersects the first direction. The second direction is, for example, the X-axis direction.

[0032] The second sensor element 20 includes a second support part 20S, a second movable part 20M, a third electrode 23, and a fourth electrode 24.

[0033] The second movable part 20M is supported by the second support part 20S. The second movable part 20M can vibrate. For example, a second spring member 20W that connects the second support part 20S and the second movable part 20M is provided. The second movable part 20M is supported by the second support part 20S via the second spring member 20W.

[0034] The third electrode 23 can output a third signal Sg3 corresponding to the vibration of the second movable part 20M. The direction from the second support part 20S toward the third electrode 23 is along the first direction (Y-axis direction).

[0035] The fourth electrode 24 can output a fourth signal Sg4 corresponding to the vibration of the second movable part 20M. The direction from the second support part 20S toward the fourth electrode 24 is along the second direction (X-axis direction).

[0036] In this example, the direction from the first support part 10S toward the second support part 20S is along a plane including the first direction and the second direction (for example, the X - Y plane). For example, the position of the first support part 10S in the Z-axis direction is the same as the position of the second support part 20S in the Z-axis direction. As will be described later, the position of the first support part 10S in the Z-axis direction may also be different from the position of the second support part 20S in the Z-axis direction.

[0037] As Figure 1As shown, in this example, the direction from the second support portion 20S toward the third electrode 23 is opposite to the direction from the first support portion 10S toward the first electrode 11. The direction from the second support portion 20S toward the fourth electrode 24 is the same as the direction from the first support portion 10S toward the second electrode 12. Thus, in the embodiment, between the two sensor elements, one of the two detection directions is opposite.

[0038] The circuit portion 70 includes an arithmetic unit 75. The arithmetic unit 75 can output the differential operation result of the first processing signal Sp1 based on the first signal Sg1 and the second signal Sg2 and the second processing signal Sp2 based on the third signal Sg3 and the fourth signal Sg4. The first processing signal Sp1 corresponds to the rotation of the first movable portion 10M. The second processing signal Sp2 corresponds to the rotation of the second movable portion 20M. The differential operation result corresponds to the rotation angles of the first sensor element 10 and the second sensor element 20. The sensor 110 can output, for example, information related to the rotation angle of the sensor portion 10U as a detection result.

[0039] For example, a rotational force is applied to the sensor portion 10U. The rotation includes, for example, a component centered on the Z-axis direction. The rotational angular velocity corresponding to the rotational force is applied to the sensor portion 10U. As a result, the vibration states of the first movable portion 10M and the second movable portion 20M change. Correspondingly to the change in the vibration state, the first signal Sg1 to the fourth signal Sg4g change. By processing the signals based on these signals (for example, integration processing), the rotation angle can be detected.

[0040] For example, sometimes due to the influence of temperature changes or the like, the signal obtained from one sensor element shifts. Sometimes due to the influence of temperature changes or the like, the rotational angular velocity or the rotation angle of the detection object shifts from the true value. The signal obtained from one sensor element includes changes corresponding to the rotation of the detection object and changes corresponding to other factors such as temperature. Therefore, there are cases where accurate detection is difficult.

[0041] In the embodiment, two sensor elements are provided. The signals obtained from the two sensor elements respectively include changes corresponding to the rotation of the detection object and changes corresponding to other factors such as temperature. By performing differential processing on the signals obtained from the two sensor elements respectively, the influence caused by other factors such as temperature can be removed. In the embodiment, as described above, between the two sensor elements, one of the two detection directions is opposite. In such a configuration, the signal component corresponding to the rotation is not eliminated. Therefore, the influence caused by other factors such as temperature is removed, and the angle of the detection object can be detected with high precision. According to the embodiment, a sensor with improved accuracy can be provided.

[0042] For example, consider the following reference example. In the reference example, the direction from the second support portion 20S toward the third electrode 23 is the same as the direction from the first support portion 10S toward the first electrode 11, and the direction from the second support portion 20S toward the fourth electrode 24 is the same as the direction from the first support portion 10S toward the second electrode 12. In this case, the signal generated by rotation is not eliminated. In this reference example, when differential processing is performed on the signals from the two sensor elements, if the two sensor elements have the same characteristics, the processing result becomes 0.

[0043] In the embodiment, between the two sensor elements, one of the two detection directions is opposite. The two sensor elements do not overlap even when rotated. The influence caused by other factors such as temperature is removed, and the angle of the detection object can be detected with high precision.

[0044] Hereinafter, examples of the detection directions in the two sensor elements will be described.

[0045] Figure 2 of (a) to Figure 2 of (d) and Figure 3 of (a) to Figure 3 of (d) are schematic diagrams illustrating the sensor according to the first embodiment.

[0046] In these figures, examples of the positions of the first support portion 10S, the first movable portion 10M, the first electrode 11, the second electrode 12, the second support portion 20S, the second movable portion 20M, the third electrode 23, and the fourth electrode 24 are shown. In these figures, other components are omitted.

[0047] In Figure 2 of (a) and Figure 2 of (b) shown in the first structure CF1 and the second structure CF2, the direction from the second support portion 20S toward the third electrode 23 is opposite to the direction from the first support portion 10S toward the first electrode 11. The direction from the second support portion 20S toward the fourth electrode 24 is the same as the direction from the first support portion 10S toward the second electrode 12.

[0048] In Figure 2 of (c) and Figure 2 of (d) shown in the third structure CF3 and the fourth structure CF4, the direction from the second support portion 20S toward the third electrode 23 is the same as the direction from the first support portion 10S toward the first electrode 11. The direction from the second support portion 20S toward the fourth electrode 24 is opposite to the direction from the first support portion 10S toward the second electrode 12.

[0049] In the first configuration CF1 to the fourth configuration CF4, for example, the direction from the first sensor element 10 toward the second sensor element 20 may be along a plane (X - Y plane) including the first direction and the second direction. The position of the first sensor element 10 in the third direction may be substantially the same as the position of the second sensor element 20 in the third direction. The third direction intersects the plane including the first direction and the second direction. The third direction is, for example, the Z-axis direction.

[0050] In Figure 3 of (a) to Figure 3 In the fifth configuration CF5 to the eighth configuration CF8 shown in (d) of, the position of the first sensor element 10 in the third direction may also be different from the position of the second sensor element 20 in the third direction. For example, at least a part of the first sensor element 10 may overlap the second sensor element 20 in the Z-axis direction.

[0051] In Figure 3 of (a) and Figure 3 In the fifth structure CF5 and the sixth structure CF6 shown in (b) of, the direction from the second support portion 20S toward the third electrode 23 is opposite to the direction from the first support portion 10S toward the first electrode 11. The direction from the second support portion 20S toward the fourth electrode 24 is the same as the direction from the first support portion 10S toward the second electrode 12.

[0052] In Figure 3 of (c) and Figure 3 In the seventh structure CF7 and the eighth structure CF8 shown in (d) of, the direction from the second support portion 20S toward the third electrode 23 is the same as the direction from the first support portion 10S toward the first electrode 11. The direction from the second support portion 20S toward the fourth electrode 24 is opposite to the direction from the first support portion 10S toward the second electrode 12.

[0053] According to such a configuration, between the two sensor elements, one of the two detection directions becomes opposite. By performing differential processing, the influence caused by other factors such as temperature is removed, and the angle of the detection object can be detected with high precision. By making one of the two detection directions opposite between the two sensor elements, it becomes easy to perform high-precision detection with a simple-structured circuit.

[0054] As Figure 1 shown, the circuit unit 70 may include a first detection circuit 71 to a fourth detection circuit 75. The first signal Sg1 is input to the first detection circuit 71. The second signal Sg2 is input to the second detection circuit 72. The third signal Sg3 is input to the third detection circuit 73. The fourth signal Sg4 is input to the fourth detection circuit 74. These detection circuits output detection signals Vy1, Vx1, Vy2, and Vx2 according to the above signals.

[0055] Preferably, a common power supply is connected to the first detection circuit 71 to the fourth detection circuit 74. Thus, the characteristics of these detection circuits are uniform. For example, a common electrical ground is applied to a plurality of detection paths. For example, a common power supply voltage is applied to a plurality of detection paths. The characteristics of the plurality of detection circuits can be made more uniform.

[0056] For example, the circuit unit 70 may include a power supply circuit 77. The power supply circuit 77 can supply power to the first detection circuit 71 to the fourth detection circuit 74.

[0057] The first detection circuit 71 can output, for example, a signal (detection signal Vy1) corresponding to the amplitude of the component in the first direction of the vibration of the first movable part 10M caused by the rotational angular velocity acting on the first movable part 10M vibrating in the second direction. The second detection circuit 72 can output a signal (detection signal Vx1) corresponding to the amplitude of the component in the second direction of the vibration of the first movable part 10M caused by the rotational angular velocity acting on the first movable part 10M vibrating in the first direction.

[0058] The third detection circuit 73 can output a signal (detection signal Vy2) corresponding to the amplitude of the component in the first direction of the vibration of the second movable part 20M caused by the rotational angular velocity acting on the second movable part 20M vibrating in the second direction. The fourth detection circuit 74 can output a signal (detection signal Vx2) corresponding to the amplitude of the component in the second direction of the vibration of the second movable part 20M caused by the rotational angular velocity acting on the second movable part 20M vibrating in the first direction.

[0059] Signals based on the detection signals Vy1, Vx1, Vy2, and Vx2 are provided to the arithmetic unit 75. In this example, the circuit unit 70 further includes a first processing circuit 76a and a second processing circuit 76b. The first processing circuit 76a can obtain the output of the first detection circuit 71 (detection signal Vy1) and the output of the second detection circuit 72 (detection signal Vx1), and provide a first processing signal Sp1 to the arithmetic unit 75. The second processing circuit 76b can obtain the output of the third detection circuit 73 (detection signal Vy2) and the output of the fourth detection circuit 74 (detection signal Vx2), and provide a second processing signal Sp2 to the arithmetic unit 75.

[0060] The first processing circuit 76a can, for example, calculate information (first processing signal Sp1) related to the rotation angle of the first movable part 10M based on the output (detection signal Vy1) of the first detection circuit 71 and the output (detection signal Vx1) of the second detection circuit 72. The second processing circuit 76b can, for example, calculate information (second processing signal Sp2) related to the rotation angle of the second movable part 20M based on the output (detection signal Vy2) of the third detection circuit 73 and the output (detection signal Vx2) of the fourth detection circuit 74.

[0061] As Figure 1 shown, the first sensor element 10 may include a fifth electrode 15 and a sixth electrode 16. In the first direction (e.g., the Y-axis direction), a first support portion 10S is provided between the fifth electrode 15 and the first electrode 11. In the second direction (e.g., the X-axis direction), a first support portion 10S is provided between the sixth electrode 16 and the second electrode 12. The first movable part 10M vibrates according to the first drive signal Sv1 applied to the fifth electrode 15 and the second drive signal Sv2 applied to the sixth electrode 16.

[0062] The second sensor element 20 may further include a seventh electrode 27 and an eighth electrode 28. In the first direction (e.g., the Y-axis direction), a second support portion 20S is provided between the third electrode 23 and the seventh electrode 27. In the second direction (e.g., the X-axis direction), a second support portion 20S is provided between the eighth electrode 28 and the fourth electrode 24. The second movable part 20M vibrates according to the first drive signal Sv1 applied to the seventh electrode 27 and the second drive signal Sv2 applied to the eighth electrode 28.

[0063] The circuit portion 70 may further include a drive circuit 78. The drive circuit 78 can supply the first drive signal Sv1 to the fifth electrode 15 and the seventh electrode 27. The drive circuit 78 can supply the second drive signal Sv2 to the sixth electrode 16 and the eighth electrode 28.

[0064] According to these drive signals, the first movable part 10M and the second movable part 20M vibrate. According to the rotational force (rotational angular velocity) applied from the outside, the vibration state changes. The change in the vibration state is based on, for example, the Coriolis force.

[0065] For example, in the first processing circuit 76a, an angle θ1 represented by the following first equation is calculated. For example, in the second processing circuit 76b, an angle θ2 represented by the following second equation is calculated.

[0066] θ1 = ∫(+Ω)dt + ∫(+a1T)dt …(1)

[0067] θ2 = ∫(-Ω)dt + ∫(+a2T)dt …(2)

[0068] In the above, "Ω" is the angular velocity of the object to be detected. "T" is the temperature. "a1" is the coefficient in the first sensor element 10. "a2" is the coefficient in the second sensor element 20. "a1" and "a2" have a relationship. For example, a1 / a2 is a constant.

[0069] In the arithmetic unit 75, based on these angles, an operation related to the following third equation is performed.

[0070]

[0071] The right side of the third equation corresponds to the angle of the object to be detected.

[0072] For example, the circuit unit 70 (or the arithmetic unit 75) can be an electronic circuit (including a computer, etc.). The sensor 110 can also be included in the sensor device 210 (for example, an IMU: Inertial Measurement Unit).

[0073] As Figure 1 shown, the first sensor element 10 can also include other electrodes such as the adjustment electrode E1. The second sensor element 20 can also include other electrodes such as the adjustment electrode E2.

[0074] Figure 4 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0075] As Figure 4 shown, in the sensor 110 according to the embodiment, the sensor unit 10U includes the first base 31. The first base 31 is, for example, a substrate. The first base 31 can be, for example, a semiconductor substrate (such as a silicon substrate, etc.). The first sensor element 10 and the second sensor element 20 are formed on the first base 31. For example, the first support portion 10S is fixed to a part of the first base 31. The second support portion 20S is fixed to another part of the first base 31. The direction from the first support portion 10S to the second support portion 20S is along a plane including the first direction and the second direction (for example, the X - Y plane).

[0076] The sensor 110 can also include a housing 40. The sensor unit 10U is provided in the housing 40. The housing 40 includes, for example, a first component 41 and a second component 42. The sensor unit 10U is fixed to the first component 41, for example. The sensor unit 10U is between the first component 41 and the second component 42.

[0077] Figure 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0078] AsFigure 5 As shown, in the sensor 111 according to the embodiment, the first sensor element 10 includes a first base body 31. The second sensor element 20 includes a second base body 32. The sensor unit 10U is provided in the housing 40. The first sensor element 10 and the second sensor element 20 are fixed to the first component 41 of the housing 40. In this example, the direction from the first sensor element 10 toward the second sensor element 20 also follows the plane (X-Y plane) including the first direction and the second direction.

[0079] Figure 6 It is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0080] As Figure 6 shown, the sensor 112 according to the embodiment includes a first component 41. The first component 41 is located between the first sensor element 10 and the second sensor element 20 in a third direction (e.g., the Z-axis direction) intersecting the plane including the first direction and the second direction. The sensor unit 10U is provided in the housing 40.

[0081] Figure 7 It is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0082] As Figure 7 shown, in the sensor 113 according to the embodiment, the first component 41 is located between the first sensor element 10 and the second sensor element 20. The first sensor element 10 includes a first base body 31. The second sensor element 20 includes a second base body 32. The sensor unit 10U is provided in the housing 40.

[0083] In the sensors 110 to 113, the temperature of the first sensor element 10 is substantially the same as the temperature of the second sensor element 20. For example, the temperatures of the two sensor elements become substantially the same via the first base body 31. For example, the temperatures of the two sensor elements become substantially the same via the first component 41. The difference between the temperature of the first sensor element 10 and the temperature of the second sensor element 20 can be, for example, 5°C or less. By having substantially the same temperature, higher-precision detection can be performed.

[0084] Figure 8 It is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0085] As Figure 8As shown, the sensor 114 according to the embodiment includes a first component 41 and a second component 42. The first sensor element 10 is fixed to the first component 41. The second sensor element 20 is fixed to the second component 42. The second component 42 is located between the second sensor element 20 and the first sensor element 10. The first component 41 is located between the second component 42 and the first sensor element 10.

[0086] The first component 41, the second component 42, the first sensor element 10, and the second sensor element 20 are disposed in a housing 40. In this example, the first component 41 and the second component 42 are connected to the housing 40. The temperature of the second component 42 is substantially the same as the temperature of the first component 41.

[0087] Figure 9 It is a schematic cross-sectional view illustrating the sensor according to the first embodiment.

[0088] As Figure 9 shown, the sensor 115 according to the embodiment includes a housing 40. The housing 40 includes a first component 41 and a second component 42. The first sensor element 10 is fixed to the first component 41. The second sensor element 20 is fixed to the second component 42. The first sensor element 10 is located between the first component 41 and the second component 42. The second sensor element 20 is located between the first sensor element 10 and the second component 42. The temperature of the second component 42 is substantially the same as the temperature of the first component 41.

[0089] In sensors 114 and 115, for example, the temperatures of the two sensor elements become substantially the same via the first component 41 and the second component 42. The difference between the temperature of the first sensor element 10 and the temperature of the second sensor element 20 can be, for example, 5°C or less. By having substantially the same temperature, higher-precision detection can be performed.

[0090] (Second Embodiment)

[0091] The second embodiment relates to an electronic device.

[0092] Figure 10 It is a schematic diagram illustrating the electronic device according to the second embodiment.

[0093] As Figure 10 shown, the electronic device 310 according to the embodiment includes the sensor according to the embodiment and a circuit control unit 170. In Figure 10In the example, sensor 110 (or sensor device 210) is depicted as a sensor. The circuit control unit 170 can control the circuit 180 based on the signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit of the drive device 185 or the like. According to the embodiment, the circuit 180 for controlling the drive device 185 or the like can be controlled with high precision based on the high-precision detection result.

[0094] Figure 11 (a) to Figure 11 (h) of are schematic diagrams illustrating applications of the electronic device.

[0095] As Figure 11 shown in (a) of, the electronic device 310 can also be at least a part of a robot. As Figure 11 shown in (b) of, the electronic device 310 can also be at least a part of an industrial robot installed in a manufacturing plant or the like. As Figure 11 shown in (c) of, the electronic device 310 can also be at least a part of an automated guided vehicle inside a factory or the like. As Figure 11 shown in (d) of, the electronic device 310 can also be at least a part of a drone (unmanned aerial vehicle). As Figure 11 shown in (e) of, the electronic device 310 can also be at least a part of an airplane. As Figure 11 shown in (f) of, the electronic device 310 can also be at least a part of a ship. As Figure 11 shown in (g) of, the electronic device 310 can also be at least a part of a submarine. As Figure 11 shown in (h) of, the electronic device 310 can also be at least a part of an automobile. The electronic device 310 can, for example, also include at least any one of a robot and a moving body.

[0096] For example, high-precision sensors have been developed for robots, autonomous driving, and aircraft. The sensors include, for example, gyro sensors. For example, due to manufacturing deviations or the like, the characteristics of the sensors are not necessarily fixed. For example, corrections are performed to correct the non-uniformity of the characteristics of the sensors. When the temperature changes, the effect of this correction decreases.

[0097] In the embodiment, by using two sensor elements, the influence of temperature can be suppressed. For example, the influence of environmental changes such as temperature drift can be suppressed.

[0098] In the embodiment, for example, a common thermal ground is applied to the two elements. In the embodiment, for example, a common electrical ground and a power supply voltage are applied to the plurality of detection circuits. Higher-precision detection can be performed.

[0099] The embodiment may also include the following configurations (for example, technical solutions).

[0100] (Component 1)

[0101] A sensor, comprising:

[0102] A sensor unit, which includes a first sensor element and a second sensor element; and

[0103] A circuit unit,

[0104] The first sensor element includes:

[0105] A first support portion;

[0106] A first movable portion capable of vibrating, which is supported by the first support portion;

[0107] A first electrode, which can output a first signal corresponding to the vibration of the first movable portion, and the direction from the first support portion to the first electrode is along a first direction; and

[0108] A second electrode, which can output a second signal corresponding to the vibration of the first movable portion, and the direction from the first support portion to the second electrode is along a second direction intersecting the first direction,

[0109] The second sensor element includes:

[0110] A second support portion;

[0111] A second movable portion capable of vibrating, which is supported by the second support portion;

[0112] A third electrode, which can output a third signal corresponding to the vibration of the second movable portion, and the direction from the second support portion to the third electrode is along the first direction; and

[0113] A fourth electrode, which can output a fourth signal corresponding to the vibration of the second movable portion, and the direction from the second support portion to the fourth electrode is along the second direction,

[0114] The direction from the second support portion to the third electrode is opposite to the direction from the first support portion to the first electrode, and the direction from the second support portion to the fourth electrode is the same as the direction from the first support portion to the second electrode, or the direction from the second support portion to the third electrode is the same as the direction from the first support portion to the first electrode, and the direction from the second support portion to the fourth electrode is opposite to the direction from the first support portion to the second electrode,

[0115] The circuit unit includes an arithmetic unit,

[0116] The arithmetic unit can output the differential operation result of the first processing signal based on the first signal and the second signal and the second processing signal based on the third signal and the fourth signal.

[0117] (Configuration 2)

[0118] The sensor according to Configuration 1,

[0119] The first processing signal corresponds to the rotation of the first movable part,

[0120] The second processing signal corresponds to the rotation of the second movable part.

[0121] (Configuration 3)

[0122] The sensor according to Configuration 1 or 2,

[0123] The differential operation result corresponds to the rotation angles of the first sensor element and the second sensor element.

[0124] (Configuration 4)

[0125] The sensor according to any one of Configurations 1 to 3,

[0126] The circuit unit further includes:

[0127] The first detection circuit to which the first signal is input;

[0128] The second detection circuit to which the second signal is input;

[0129] The third detection circuit to which the third signal is input; and

[0130] The fourth detection circuit to which the fourth signal is input,

[0131] A common power supply is connected to the first detection circuit to the fourth detection circuit.

[0132] (Configuration 5)

[0133] The sensor according to any one of Configurations 1 to 3,

[0134] The circuit unit includes:

[0135] The first detection circuit to which the first signal is input;

[0136] The second detection circuit to which the second signal is input;

[0137] The third detection circuit to which the third signal is input;

[0138] The fourth detection circuit to which the fourth signal is input; and

[0139] A power supply circuit that can supply power to the first detection circuit to the fourth detection circuit.

[0140] (Configuration 6)

[0141] The sensor according to Configuration 4 or 5,

[0142] The first detection circuit can output a signal corresponding to the amplitude of the component in the first direction of the vibration of the first movable part caused by the rotational angular velocity acting on the first movable part vibrating in the second direction.

[0143] The second detection circuit can output a signal corresponding to the amplitude of the component in the second direction of the vibration of the first movable part caused by the rotational angular velocity acting on the first movable part vibrating in the first direction.

[0144] (Configuration 7)

[0145] The sensor according to any one of Configurations 4 to 6,

[0146] The third detection circuit can output a signal corresponding to the amplitude of the component in the first direction of the vibration of the second movable part caused by the rotational angular velocity acting on the second movable part vibrating in the second direction.

[0147] The fourth detection circuit can output a signal corresponding to the amplitude of the component in the second direction of the vibration of the second movable part caused by the rotational angular velocity acting on the second movable part vibrating in the first direction.

[0148] (Configuration 8)

[0149] The sensor according to any one of Configurations 4 to 7,

[0150] The circuit section further includes a first processing circuit and a second processing circuit.

[0151] The first processing circuit can take in the outputs of the first detection circuit and the second detection circuit and provide the first processing signal to the arithmetic unit.

[0152] The second processing circuit can take in the outputs of the third detection circuit and the fourth detection circuit and provide the second processing signal to the arithmetic unit.

[0153] (Configuration 9)

[0154] The sensor according to any one of Configurations 1 to 8,

[0155] The first sensor element further includes a fifth electrode and a sixth electrode.

[0156] In the first direction, a first support portion is provided between the fifth electrode and the first electrode.

[0157] In the second direction, a first support portion is provided between the sixth electrode and the second electrode.

[0158] The first movable portion vibrates according to a first drive signal applied to the fifth electrode and a second drive signal applied to the sixth electrode.

[0159] The second sensor element further includes a seventh electrode and an eighth electrode.

[0160] In the first direction, a second support portion is provided between the third electrode and the seventh electrode.

[0161] In the second direction, a fourth support portion is provided between the eighth electrode and the fourth electrode.

[0162] The second movable portion vibrates according to the first drive signal applied to the seventh electrode and the second drive signal applied to the eighth electrode.

[0163] (Configuration 10)

[0164] For the sensor according to Configuration 9,

[0165] The circuit portion further includes a drive circuit.

[0166] The drive circuit is capable of supplying the first drive signal to the fifth electrode and the seventh electrode.

[0167] The drive circuit is capable of supplying the second drive signal to the sixth electrode and the eighth electrode.

[0168] (Configuration 11)

[0169] For the sensor according to any one of Configurations 1 to 10,

[0170] The sensor portion further includes a first base.

[0171] The first support portion is fixed to a part of the first base.

[0172] The second support portion is fixed to another part of the first base.

[0173] The direction from the first support portion toward the second support portion is along a plane including the first direction and the second direction.

[0174] (Configuration 12)

[0175] The sensor according to any one of Configurations 1 to 10,

[0176] further includes a housing including a first component,

[0177] the sensor unit is disposed in the housing,

[0178] the first sensor element and the second sensor element are fixed to the first component.

[0179] (Configuration 13)

[0180] The sensor according to Configuration 12,

[0181] The direction from the first sensor element toward the second sensor element is along a plane including the first direction and the second direction.

[0182] (Configuration 14)

[0183] The sensor according to any one of Configurations 1 to 10,

[0184] further includes a first component,

[0185] the first component is located between the first sensor element and the second sensor element in a third direction intersecting a plane including the first direction and the second direction.

[0186] (Configuration 15)

[0187] The sensor according to any one of Configurations 1 to 10,

[0188] further includes a first component and a second component,

[0189] the first sensor element is fixed to the first component,

[0190] the second sensor element is fixed to the second component,

[0191] the second component is disposed between the second sensor element and the first sensor element,

[0192] the first component is disposed between the second component and the first sensor element.

[0193] (Configuration 16)

[0194] The sensor according to Configuration 14 or 15,

[0195] further includes a housing,

[0196] The first component, the first sensor element, and the second sensor element are disposed in the housing.

[0197] (Configuration 17)

[0198] The sensor according to any one of Configurations 1 to 10,

[0199] further includes a housing including a first component and a second component,

[0200] The first sensor element is fixed to the first component,

[0201] The second sensor element is fixed to the second component,

[0202] The first sensor element is disposed between the first component and the second component,

[0203] The second sensor element is disposed between the first sensor element and the second component.

[0204] (Configuration 18)

[0205] The sensor according to any one of Configurations 1 to 17,

[0206] The difference in temperature between the first sensor element and the second sensor element is 5°C or less.

[0207] (Configuration 19)

[0208] An electronic device includes:

[0209] The sensor according to any one of Configurations 1 to 18; and

[0210] a circuit control unit that can control a circuit based on a signal obtained from the sensor.

[0211] (Configuration 20)

[0212] The electronic device according to Configuration 19,

[0213] The electronic device includes at least one of a robot and a moving body.

[0214] According to the embodiment, a sensor and an electronic device capable of improving accuracy can be provided.

[0215] As described above, the embodiments of the present invention have been described with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific structures of the various elements such as the sensor unit, sensor element, support unit, movable unit, electrode, and circuit unit included in the sensor, as long as those skilled in the art can appropriately select from the known range to similarly implement the present invention and achieve the same effects, they are included in the scope of the present invention.

[0216] In addition, as long as it includes the gist of the present invention, technical solutions obtained by combining any two or more elements in the specific examples within the technically feasible range are also included in the scope of the present invention.

[0217] In addition, as long as it includes the gist of the present invention, all sensors that those skilled in the art can appropriately design and modify based on the sensors described as the embodiments of the present invention above also belong to the scope of the present invention.

[0218] In addition, it should be understood that: within the scope of the idea of the present invention, those skilled in the art can conceive of various modification examples and correction examples, and those modification examples and correction examples also belong to the scope of the present invention.

[0219] The above describes several embodiments of the present invention, but these embodiments are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their variations are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and its equivalents.

Claims

1. A sensor, comprising: A sensor unit including a first sensor element and a second sensor element; and a circuit unit, the first sensor element includes: a first support portion; a first movable portion capable of vibrating, which is supported by the first support portion; a first electrode capable of outputting a first signal corresponding to the vibration of the first movable portion, and the direction from the first support portion toward the first electrode is along a first direction; and a second electrode capable of outputting a second signal corresponding to the vibration of the first movable portion, and the direction from the first support portion toward the second electrode is along a second direction intersecting the first direction, the second sensor element includes: a second support portion; a second movable portion capable of vibrating, which is supported by the second support portion; a third electrode capable of outputting a third signal corresponding to the vibration of the second movable portion, and the direction from the second support portion toward the third electrode is along the first direction; and a fourth electrode capable of outputting a fourth signal corresponding to the vibration of the second movable portion, and the direction from the second support portion toward the fourth electrode is along the second direction, the direction from the second support portion toward the third electrode is opposite to the direction from the first support portion toward the first electrode, and the direction from the second support portion toward the fourth electrode is the same as the direction from the first support portion toward the second electrode, or the direction from the second support portion toward the third electrode is the same as the direction from the first support portion toward the first electrode, and the direction from the second support portion toward the fourth electrode is opposite to the direction from the first support portion toward the second electrode, the circuit unit includes an arithmetic unit, the arithmetic unit is capable of outputting a differential operation result of a first processed signal based on the first signal and the second signal and a second processed signal based on the third signal and the fourth signal.

2. The sensor according to claim 1, The circuit unit further includes: a first detection circuit to which the first signal is input; a second detection circuit to which the second signal is input; a third detection circuit to which the third signal is input; and a fourth detection circuit to which the fourth signal is input, a common power supply is connected to the first detection circuit to the fourth detection circuit.

3. The sensor according to claim 2, The first detection circuit can output a signal corresponding to the amplitude of the component in the first direction of the vibration of the first movable part generated by the rotational angular velocity acting on the first movable part vibrating in the second direction, The second detection circuit can output a signal corresponding to the amplitude of the component in the second direction of the vibration of the first movable part generated by the rotational angular velocity acting on the first movable part vibrating in the first direction.

4. The sensor according to claim 2, The third detection circuit can output a signal corresponding to the amplitude of the component in the first direction of the vibration of the second movable part generated by the rotational angular velocity acting on the second movable part vibrating in the second direction, The 4th detection circuit can output a signal corresponding to the amplitude of the component in the 2nd direction of the vibration of the 2nd movable part caused by the rotational angular velocity acting on the 2nd movable part vibrating in the 1st direction.

5. The sensor according to claim 2, The circuit part further includes a 1st processing circuit and a 2nd processing circuit, The 1st processing circuit can take in the outputs of the 1st detection circuit and the 2nd detection circuit, and provide the 1st processing signal to the arithmetic unit. The 2nd processing circuit can take in the outputs of the 3rd detection circuit and the 4th detection circuit, and provide the 2nd processing signal to the arithmetic unit.

6. The sensor according to claim 1, The 1st sensor element further includes a 5th electrode and a 6th electrode, In the 1st direction, the 1st support part is provided between the 5th electrode and the 1st electrode, In the 2nd direction, the 1st support part is provided between the 6th electrode and the 2nd electrode, The 1st movable part vibrates according to the 1st drive signal applied to the 5th electrode and the 2nd drive signal applied to the 6th electrode. The 2nd sensor element further includes a 7th electrode and an 8th electrode, In the 1st direction, the 2nd support part is provided between the 3rd electrode and the 7th electrode, In the 2nd direction, the 2nd support part is provided between the 8th electrode and the 4th electrode, The 2nd movable part vibrates according to the 1st drive signal applied to the 7th electrode and the 2nd drive signal applied to the 8th electrode.

7. The sensor according to claim 1, It further includes a 1st component, The 1st component is located between the 1st sensor element and the 2nd sensor element in the 3rd direction intersecting the plane including the 1st direction and the 2nd direction.

8. The sensor according to claim 1, It further includes a 1st component and a 2nd component, The 1st sensor element is fixed to the 1st component, The 2nd sensor element is fixed to the 2nd component, The 2nd component is provided between the 2nd sensor element and the 1st sensor element, The first component is provided between the second component and the first sensor element.

9. The sensor according to claim 1, comprises a housing including a first component and a second component, the first sensor element is fixed to the first component, the second sensor element is fixed to the second component, the first sensor element is provided between the first component and the second component, and the second sensor element is provided between the first sensor element and the second component.

10. An electronic device, comprising: the sensor according to claim 1; and a circuit control unit that can control a circuit based on a signal obtained from the sensor.

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