Robot and substrate transport system including the robot

Abstract

A robot is provided. The robot (100) includes a base (1) having a plurality of sides, an arm (3) rotatably connected to the base (1), and a hand (8) connected to the arm (3). A connection portion of the arm (3) to the base (1) is disposed closest to a first side (11a) in plan view. The base (1) houses control components. A maintenance portion (12) is provided on a second side (11b) and is configured with a first plate (24) or the like maintenance component for maintenance of the maintenance component.

Description

Technical Field

[0001] The technologies disclosed herein relate to robots and substrate transport systems that include robots. Background Technology

[0002] To date, robots comprising a base, an arm, and an end effector are well known. For example, a robot described in Patent Document 1 includes a base, an arm, and an end effector, all housed within a housing. The arm is rotatably connected to the base, and the end effector is connected to the arm. In this robot, a portion of the base extends outside the housing. This improves the maintainability of the portion of the base extending outside the housing.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2013-157561 Summary of the Invention

[0004] In some cases, robots are deployed inside containers or similar structures. In such situations, maintenance of the robot becomes difficult due to the limited internal space.

[0005] While placing part of the robot outside the basket, as in Patent Document 1, is one way to improve maintainability, there is room for improvement in maintainingability within a confined space, such as inside the basket.

[0006] In view of the above, the purpose of the technology disclosed herein is to improve the maintainability of robots in confined spaces.

[0007] The robot disclosed herein includes a base, an arm, and an end effector. The base has multiple sides. The arm is rotatably connected to the base. The end effector is connected to the arm. The connection portion between the arm and the base, viewed from above, is most closely positioned on a first side, which is one of the multiple sides. The base houses components related to the control of at least one of the arm and the end effector. A maintenance section is provided on a second side, which is not parallel to the first side, for maintaining at least a portion of the components.

[0008] The substrate transport system disclosed herein includes a basket and a robot disposed within the basket for transporting substrates. The basket has a first sidewall and a third sidewall facing each other in a predetermined first direction, and a second sidewall and a fourth sidewall facing each other in a second direction different from the first direction. An opening / closing portion for maintaining the robot is provided on the second sidewall. The robot has a base, an arm, and an end effector. The base has multiple sides. The arm is rotatably connected to the base, and the end effector is connected to the arm. The base houses components related to the control of at least one of the arm and the end effector, and is disposed closer to the first sidewall than the third sidewall. A first sidewall, being one of the multiple sides of the base, faces the first sidewall. A maintenance portion is provided on the second sidewall of the multiple sides of the base, which faces the second sidewall. This maintenance portion is disposed of at least a portion of the components for maintaining the at least a portion of the components.

[0009] (The effect of the invention)

[0010] The robot described above can improve the maintainability of robots within confined spaces.

[0011] The substrate transport system improves the maintainability of robots within confined spaces. Attached Figure Description

[0012] Figure 1 This is a side view of a horizontal multi-joint robot.

[0013] Figure 2 This is a top view of a horizontal multi-jointed robot.

[0014] Figure 3 This is a simplified top view of the substrate processing equipment.

[0015] Figure 4 This is a functional block diagram of the robot.

[0016] Figure 5 This is a side view of the base after the first cover has been removed. Detailed Implementation

[0017] Hereinafter, the embodiments described herein will be explained in detail with reference to the accompanying drawings.

[0018] Figure 1 This is a side view of a horizontal multi-joint robot 100. Figure 2This is a top view of a horizontal articulated robot 100. The horizontal articulated robot (hereinafter simply referred to as the "robot") 100 is a SCARA (Selective Compliance Assembly Robot Arm) type robot. The robot 100 includes a base 1, an arm 3, and a hand 8, the arm 3 being rotatably connected to the base 1, and the hand 8 being connected to the arm 3. The arm 3 is rotatably connected to the base 1 in the horizontal direction, that is, the arm 3 is rotatably connected to the base 1 about a first axis L1 extending in the vertical direction. The arm 3 consists of a plurality of links 30 rotatably connected to each other in the horizontal direction. The hand 8 is rotatably connected to the arm 3 in the horizontal direction. The hand 8 holds an object. For example, the object is a substrate S. The robot 100 is an example of a robot. The hand 8 is an example of an end effector. The robot 100 also includes a control device 10 for overall control of the robot 100.

[0019] Figure 3 This is a simplified top view of the substrate processing apparatus 120. A robot 100 is, for example, assembled into a substrate transport system 110 that transports the substrate S. The substrate transport system 110 has a housing 111 and the robot 100. For example, the substrate transport system 110 is an EFEM (Equipment Front End Module). The substrate transport system 110 is based on SEMI (Semiconductor Equipment and Materials International) specifications. It should be noted that the structure of the substrate transport system 110 can also be a structure outside of the SEMI specifications.

[0020] A transport space 112 is formed inside the housing 111. A robot 100 is disposed inside the housing 111, i.e., the transport space 112. The robot 100 transports a substrate S within the transport space 112. For example, the substrate S is a disk-shaped semiconductor wafer. The transport space 112 is purified. The atmospheric gas filling the transport space 112 is adjusted by a fan filter unit, etc. An alignment device 113 for adjusting the position of the substrate S is provided in the transport space 112.

[0021] The basket 111 has a first sidewall 111a and a third sidewall 111c facing in a defined first direction, and a second sidewall 111b and a fourth sidewall 111d facing in a second direction different from the first direction. The first direction and the second direction intersect. More specifically, the first direction and the second direction are orthogonal. Hereinafter, for ease of explanation, the first direction will be referred to as the "front-back direction," and the second direction will be referred to as the "left-right direction." The front-back direction and the left-right direction are orthogonal to the up-down direction, respectively. The first sidewall 111a is adjacent to the second sidewall 111b. The second sidewall 111b is adjacent to the third sidewall 111c. The third sidewall 111c is adjacent to the fourth sidewall 111d. The fourth sidewall 111d is adjacent to the first sidewall 111a. The basket 111 is formed into a quadrangular shape when viewed from above, and more specifically, into a rectangular shape.

[0022] The gap between the second sidewall 111b and the fourth sidewall 111d is greater than the gap between the first sidewall 111a and the third sidewall 111c. That is, the basket 111, when viewed from above, is formed into a roughly rectangular shape that is longer in the left-right direction than in the front-back direction.

[0023] The basket 111 also has a ceiling wall (not shown) and a bottom wall (not shown) facing each other in the vertical direction. The basket 111 is formed in a generally rectangular prism shape.

[0024] For example, a substrate transport system 110 is assembled into a substrate processing apparatus 120. The substrate processing apparatus 120 has the substrate transport system 110 and multiple storage sections 121 for storing substrates S. A storage chamber is formed inside the storage section 121. The storage chamber is cleaned. For example, the multiple storage sections 121 include a front-opening unified pod (FOUP) 121A and a processing device 121B. The front-opening pod 121A is a container for storing substrates S. The processing device 121B processes substrates S. The front-opening pod 121A and the processing device 121B are respectively disposed adjacent to each other on the outside of the housing 111. The front-opening pod 121A is disposed adjacent to one of the first sidewall 111a and the third sidewall 111c, and the processing device 121B is disposed adjacent to the other side of the first sidewall 111a and the third sidewall 111c. Specifically, the front-opening wafer transfer box 121A is mounted on the third sidewall 111c via a front-opening wafer transfer box manual opener (not shown). The processing device 121B is disposed adjacent to the first sidewall 111a. The front-opening wafer transfer box 121A is an example of a container for holding semiconductor wafers.

[0025] The front-opening wafer transfer box 121A houses both pre-processed and post-processed substrates S. The front-opening wafer transfer box 121A is a substrate container for miniature environments. Multiple substrates S are horizontally arranged at equal intervals in the vertical direction within the front-opening wafer transfer box 121A. In this example, four front-opening wafer transfer boxes 121A are provided. The four front-opening wafer transfer boxes 121A are arranged at equal intervals in the left-right direction. An opening 111e corresponding to the front-opening wafer transfer box 121A is formed in the third sidewall 111c. A manual opening mechanism for the front-opening wafer transfer box is used to switch the connection between the transport space 112 and the internal space of the front-opening wafer transfer box 121A, allowing for both connection and disconnection.

[0026] Processing apparatus 121B is, for example, a processing apparatus that performs heat treatment, impurity introduction processing, thin film formation processing, photolithography processing, cleaning processing, planarization processing, or appearance or dimensional inspection on substrate S. Alternatively, the processing performed by processing apparatus 121B may also be a temporary storage for the delivery of substrate S. In this example, two processing apparatuses 121B are provided. An opening 111f corresponding to the processing apparatus 121B is formed in the first sidewall 111a. A door (not shown) may also be provided in the opening 111f. The opening and closing of the door switches the connection and disconnection between the transport space 112 and the internal space of the processing apparatus 121B.

[0027] In this configuration, a robot 100, included in a substrate transport system 110, transports semiconductor wafers between a front-opening wafer transfer cassette 121A and a processing device 121B. The front-opening wafer transfer cassette 121A houses the semiconductor wafers, and the processing device 121B processes the semiconductor wafers. Specifically, a hand 8 holds the semiconductor wafers as a substrate S. The arm 3 and the hand 8 transport the semiconductor wafers between the front-opening wafer transfer cassette 121A and the processing device 121B.

[0028] <Structure of Robot 100>

[0029] Reference Figure 1 , Figure 2 The structure of robot 100 will be described.

[0030] The base 1 has multiple sides (e.g., side surfaces). Among the multiple sides, at least a first side 11a and a second side 11b are included, the second side 11b not being parallel to the first side 11a. The direction in which the first side 11a faces (i.e., the normal direction of the first side 11a) intersects the direction in which the second side 11b faces (i.e., the normal direction of the second side 11b). More specifically, the direction in which the first side 11a faces and the direction in which the second side 11b faces are orthogonal. The multiple sides also include a third side 11c and a fourth side 11d, the third side 11c facing the first side 11a and the fourth side 11d facing the second side 11b. The first side 11a is adjacent to the second side 11b. The second side 11b is adjacent to the third side 11c. The third side 11c is adjacent to the fourth side 11d. The fourth side 11d is adjacent to the first side 11a. The base 1 is shaped like a square when viewed from above, or more specifically, like a rectangle.

[0031] In addition to having multiple sides, the base 1 also has a ceiling portion 11e and a bottom portion 11f. The base 1 is formed in a generally cuboid shape.

[0032] A lifting mechanism 2 is provided on the base 1, which causes the arm 3 to rise and fall vertically. The lifting mechanism 2 has a movable part 21 and a lifting motor 22, which drives the movable part 21. The movable part 21 is columnar. In the state where the movable part 21 is at its lowest point, most of the movable part 21 is housed within the base 1. The movable part 21 rises upward from the ceiling portion 11e of the base 1. The arm 3 is rotatably connected to the upper end 21a of the movable part 21 in the horizontal direction. Figure 1 As shown by the solid line and the double-dotted line, the movable part 21 moves up and down, causing the arm 3 and the hand 8 to move up and down accordingly.

[0033] The upper end portion 21a of the movable part 21, which is the connection between the arm 3 and the base 1, is closest to the first side portion 11a among the multiple sides when viewed from above. That is, the upper end portion 21a of the movable part 21 is offset from the center of the base 1 toward the first side portion 11a when viewed from above.

[0034] Each link 30 of arm 3 is formed to extend in a predetermined length direction. Hereinafter, unless otherwise specified, the end of each link 30 in the length direction will be referred to as the first end, and the end in the length direction opposite to the first end will be referred to as the second end. Furthermore, when distinguishing the three links 30, they will be sequentially referred to as the first link 31, the second link 32, and the third link 33, starting with the link closest to the base 1. The first link 31 is the link 30 connected to the base 1. The hand 8 is connected to the third link 33.

[0035] The first end 31a of the first link 31 is rotatably connected to the base 1 with a first axis L1 extending in the vertical direction as its center. Specifically, the first end 31a is connected to the upper end 21a of the movable part 21. That is, the first end 31a is the connection portion of the arm 3 to the base 1. The first end 32a of the second link 32 is rotatably connected to the second end 31b of the first link 31 with a second axis L2 extending in the vertical direction as its center. The first end 33a of the third link 33 is rotatably connected to the second end 32b of the second link 32 with a third axis L3 extending in the vertical direction as its center. The first axis L1, the second axis L2, and the third axis L3 extend parallel to each other. The length (i.e., the dimension in the length direction) of the first link 31 is the longest among the three links 30.

[0036] Robot 100 has two hands 8, namely the first hand 8A and the second hand 8B (see reference). Figure 1 Without distinguishing between the first hand 8A and the second hand 8B, it is simply referred to as "Hand 8". The basic structure of the first hand 8A and the second hand 8B is the same. It should be noted that... Figure 2 In the middle, because the two hands 8 are overlapping, only one hand 8 is shown in the picture from the appearance.

[0037] Each hand 8 is rotatably connected to the second end 33b of the third link 33, centered on a fourth axis L4 extending in the vertical direction. The fourth axis L4 extends parallel to the first axis L1, the second axis L2, and the third axis L3.

[0038] The first link 31, the second link 32, the third link 33, the first hand 8A, and the second hand 8B are stacked in this order from bottom to top without touching each other. The first link 31, the second link 32, the third link 33, and the two hands 8 rotate horizontally without interfering with each other.

[0039] The robot 100 also includes a plurality of motors 6 that drive the rotation of a plurality of links 30 and a hand 8. The plurality of motors 6 includes a first motor 61, a second motor 62, a third motor 63, a fourth motor 64, and a fifth motor 65. The first motor 61 drives the rotation of a first link 31, the second motor 62 drives the rotation of a second link 32, the third motor 63 drives the rotation of a third link 33, the fourth motor 64 drives the rotation of a first hand 8A, and the fifth motor 65 drives the rotation of a second hand 8B. Without distinguishing each of the first motor 61, second motor 62, third motor 63, fourth motor 64, and fifth motor 65, they are simply referred to as "motor 6". For example, each motor 6 is an electric motor, specifically a servo motor. Each motor 6 has an encoder 6a that detects the rotational position or amount of rotation of the rotating axis.

[0040] The connecting rod 30 is hollow, having an internal space. The motor 6 is housed within the internal space of the connecting rod 30. Specifically, the first motor 61 and the second motor 62 are housed within the internal space of the first connecting rod 31. The third motor 63 is housed within the internal space of the second connecting rod 32. The fourth motor 64 and the fifth motor 65 are housed within the internal space of the third connecting rod 33. It should be noted that each connecting rod 30, together with each motor 6, is provided with a power transmission mechanism (not shown).

[0041] The hand 8 has a body 81 and a retaining part 82 connected to the body 81, which is bifurcated. The hand 8 is formed in a plate shape. When viewed in its thickness direction, the hand 8 is formed in a roughly Y-shape. The body 81 is rotatably connected to the second end 33b of the third link 33. The hand 8 has a retaining actuator such as a cylinder (not shown). The retaining actuator is used to switch the hand 8's holding and releasing of an object.

[0042] The holding achieved by the hand 8 can be accomplished through various methods such as grasping, adsorption, bearing, or fitting. In this example, the hand 8 is configured to grasp the substrate S as the object. Specifically, a first claw 84 is fixedly provided at each of the two front ends of the holding portion 82. A second claw 85 and a holding actuator 86 are provided on the body 81. The second claw 85 is movable, and the holding actuator 86 drives the second claw 85.

[0043] The actuator 86 is a cylinder with a sleeve 86a and a rod 86b, the rod 86b moving forward and backward from the sleeve 86a. A second pawl 85 is connected to the rod 86b. A piping is provided inside the arm 3 to supply compressed gas to the cylinder. A solenoid valve 88 (see reference) is located on the piping. Figure 1 The gas supply is controlled by solenoid valve 88.

[0044] When rod 86b exits from sleeve 86a, second claw 85 moves toward the first claw 84. When rod 86b retracts toward sleeve 86a, second claw 85 moves away from the first claw 84. By having the second claw 85 exit while the substrate S is positioned between the first claw 84 and the second claw 85, the first claw 84 and the second claw 85 engage at the edge of the substrate S. Therefore, hand 8 holds the substrate S. By retracting the second claw 85 from this position, the second claw 85 moves away from the edge of the substrate S. Therefore, hand 8 releases the substrate S.

[0045] A motion sensor 87 for detecting the movement of the second claw 85 is provided on the main body 81. The motion sensor 87 is a contact or non-contact sensor, which detects the movement of the detected part that moves integrally with the second claw 85 or the rod 86b.

[0046] It should be noted that sensors other than motion sensor 87 are also provided in hand 8, which are not shown in the figure. For example, a mapping sensor that detects the state of semiconductor wafers in the front-opening wafer transfer box 121A can be provided at the front end of the holding part 82. Furthermore, a sensor that detects the presence or absence of semiconductor wafers on the holding part 82 can be provided in the holding part 82.

[0047] The base 1 houses components (hereinafter referred to as "control components") that are control-related to at least one of the arm 3 and hand 8. For example, the base 1 houses a first plate 24, a second plate 25, and a battery 26. The first plate 24 functions as an interface between sensors such as motion sensor 87 and solenoid valve 88 and the control device 10. The second plate 25 supplies power to the encoder of motor 6. The battery 26 provides power to maintain the value of encoder 6a when the main power is off. The first plate 24 and the second plate 25 are printed circuit boards. The second plate 25 supplies power from battery 26 to encoder 6a. The lifting motor 22 is also one of the control components.

[0048] like Figure 3 As shown, in the front-rear direction within the housing 111, the base 1 is positioned closer to the first side wall 111a than the third side wall 111c; that is, it is offset towards the first side wall 111a compared to the center of the housing 111. In the left-right direction, the base 1 is positioned approximately at the center of the housing 111. By offsetting the base 1 towards the first side wall 111a compared to the center of the housing 111 in this way in the front-rear direction, the length of each link 30 can be increased, expanding the range of motion of the hand 8.

[0049] At this time, the first side 11a of the base 1 faces the first sidewall 111a. Therefore, the connection between the arm 3 and the base 1 is positioned closer to the first sidewall 111a. As a result, the length of each link 30 is increased, further expanding the range of motion of the hand 8.

[0050] With this configuration, the second side 11b of the base 1 faces the second side wall 111b, the third side 11c of the base 1 faces the third side wall 111c, and the fourth side 11d of the base 1 faces the fourth side wall 111d.

[0051] Figure 4 This is a functional block diagram of robot 100. The control device 10 includes a control unit 101, a storage unit 102, a memory 103, an interface 104, and a power supply unit 105. The control unit 101 performs overall control of robot 100, the storage unit 102 stores various programs and data, the interface 104 connects to motors 6, etc., and the power supply unit 105 provides power to each component. The control device 10 is located outside the housing 111.

[0052] Storage unit 102 is a computer-readable recording medium, such as a flash memory. It should be noted that storage unit 102 may also be a CD-ROM or other optical disc. Storage unit 102 stores various programs and data required for processing by execution control unit 101.

[0053] The control unit 101 controls the motor 6 and other components according to the program stored in the storage unit 102. The control unit 101 is configured as a processor, such as a CPU (Central Processing Unit). The control unit 101 performs various processes by expanding the program stored in the storage unit 102 and other components into the memory 103 and executing it. It should be noted that the control unit 101 can also be implemented using hardware such as an LSI (Large Scale Integration) that has the same functions as a processor.

[0054] Interface 104 is connected to a lifting motor 22, a first motor 61, a second motor 62, a third motor 63, a fourth motor 64, and a fifth motor 65. Interface 104 is also connected to a first board 24 and a second board 25. A fan 18 is also connected to interface 104. It should be noted that the first board 24 is connected to various sensors, including a motion sensor 87, and a solenoid valve 88. The second board 25 is connected to a battery 26 and various encoders 6a.

[0055] The control device 10 controls the motor 6 and other components according to a pre-defined action program or user-input action commands, thereby controlling the robot 100. The control device 10 controls the lifting motor 22 and / or the motor 6 to displace the arm 3. Furthermore, the control device 10 controls the solenoid valve 88 via the first plate 24 to hold or release the base plate S. At this time, the detection result of the motion sensor 87 is input to the control device 10. The control device 10 also controls the second plate 25 to provide power to the encoder 6a. It should be noted that when the main power supply of the robot 100 is off, power is supplied to the encoder 6a via the second plate 25 to maintain the value of the encoder 6a.

[0056] For example, the control device 10 repositions the arm 3 and the hand 8, allowing the hand 8 to enter the internal space of the front-opening wafer transfer box 121A (see reference). Figure 3 (Solid line). Then, the control device 10 causes the hand 8 to hold the substrate S in the front-opening wafer transfer box 121A. The control device 10 causes the hand 8, which is holding the substrate S, to withdraw from the front-opening wafer transfer box 121A to the transport space 112, and then into the processing device 121B (see reference). Figure 3(The double-dotted line). The control device 10 releases the substrate S from the hand 8 at a predetermined position within the processing device 121B. Then, the control device 10 temporarily withdraws the hand 8 from the processing device 121B. In the processing device 121B, a predetermined process is performed on the substrate S. After the predetermined process is performed on the substrate S, the control device 10 moves the hand 8 into the processing device 121B and holds the substrate S. The control device 10 withdraws the hand 8, which is holding the substrate S, from the processing device 121B to the transport space 112, and then moves it into the front-opening wafer transfer cassette 121A. The control device 10 releases the substrate S from the hand 8 at a predetermined position in the front-opening wafer transfer cassette 121A. In this way, the control device 10 causes the robot 100 to transport the substrate S between the front-opening wafer transfer cassette 121A and the processing device 121B.

[0057] Figure 5 This is a side view of the base 1, showing the state after the first cover 13a has been removed. In a robot 100 with this structure, as... Figure 1 , Figure 5 As shown, a maintenance section 12 is provided on the second side 11b of the base 1. This maintenance section 12 is used to maintain at least a portion of the control components (hereinafter referred to as "maintenance components"). Maintenance components are arranged in the maintenance section 12. The maintenance section 12 is provided so that the components can be maintained without moving the base 1, i.e., while the base 1 remains in its original position. Maintenance components are those that are subject to such maintenance.

[0058] For example, maintenance components are components that require frequent maintenance. For example, maintenance components are electrical components. In this example, the first plate 24, the second plate 25, and the battery 26 are configured as maintenance components in the maintenance section 12.

[0059] The maintenance section 12 is located in the portion of the second side section 11b closer to the third side section 11c. A first cover 13a (see reference) is detachably mounted on the second side section 11b to cover the maintenance section 12. Figure 1 The first cover 13a is mounted on the frame 19 of the base 1. The maintenance part 12 is exposed by removing the first cover 13a. The first cover 13a is an example of a cover.

[0060] Since the connection between the arm 3 and the base 1 is located close to the first side 11a, a lifting mechanism 2 is installed inside the base 1 near the first side 11a. Therefore, in the base 1, the portion near the third side 11c has more space than the portion near the first side 11a. Even in the second side 11b, space can be easily ensured for the maintenance unit 12 in the portion near the third side 11c.

[0061] In the second side portion 11b, in addition to the first cover 13a, a second cover 13b is also mounted on the frame 19. The second cover 13b covers the portion of the second side portion 11b closest to the first side portion 11a. When the second cover 13b is removed, components other than the maintenance components (e.g., the lifting mechanism 2, etc.) are exposed. When those components are being maintained, the second cover 13b is removed. However, when the second cover 13b is removed for maintenance, the base 1 is moved from its original position to the maintenance position.

[0062] Furthermore, the base 1 has a fan 18 that exhausts internal air from the base 1 to the outside. The fan 18 exhausts air from the base 1 to facilitate the lifting and lowering of the movable part 21 by the lifting mechanism 2. The fan 18 is provided on the second side 11b and the fourth side 11d. The illustration of the fan 18 on the fourth side 11d is omitted. The fan 18 on the second side 11b is installed in the portion of the second side 11b other than the first cover 13a; specifically, the fan 18 on the second side 11b is installed on the second cover 13b.

[0063] like Figure 3 As shown, the second side portion 11b faces the second side wall 111b of the housing 111. An opening / closing part 114 for maintaining the robot 100 is provided on the second side wall 111b. Specifically, an opening 114a is formed in the second side wall 111b, and a door for opening and closing the opening 114a is provided as the opening / closing part 114. The opening 114a is sized to allow personnel to pass through.

[0064] When the worker is maintaining the maintenance parts such as the first plate 24 of the robot 100, they open the opening / closing part 114 to enter the housing 111. Then, the worker removes the first cover 13a, exposing the maintenance part 12. Next, the necessary maintenance parts are performed.

[0065] In this way, by providing a maintenance part 12 on the second side 11b, the maintainability of the robot 100 can be improved. The second side 11b is the side of the base 1 that is close to the side wall of the basket 111, other than the first side 11a. The second side 11b faces the side wall 111b on which the opening and closing part 114 is formed.

[0066] In detail, in order to expand the range of motion of the arm 3 and the hand 8 within the restricted transport space 112 within the basket 111, the robot 100 is configured such that the connection portion between the arm 3 and the base 1 is close to the first side wall 111a. Furthermore, the base 1 is configured such that the first side 11a, on the side of the base 1 where the connection portion between the arm 3 and the base 1 is closest, faces the first side wall 111a. Since the first side 11a is close to the first side wall 111a of the basket 111, it is difficult to ensure sufficient space for maintenance if maintenance components are placed on the first side 11a.

[0067] The base 1 is configured in this way so that the second side 11b faces the second side wall 111b of the housing 111. An opening / closing part 114 for maintaining the robot 100 is provided on the second side wall 111b. By providing the maintenance part 12 on the second side 11b, personnel entering the housing 111 from the opening / closing part 114 can easily access the maintenance part 12. This results in improved maintainability of the robot 100's maintenance components.

[0068] In particular, because the basket 111 is formed into a roughly rectangular shape that is longer in the left-right direction when viewed from above, the space in the front-back direction is small. However, there is space in the left-right direction of the base 1. By providing a maintenance part 12 on the second side 11b of the base 1, space for maintenance can be ensured within the basket 111. That is, the space in the left-right direction of the base 1 can be effectively used for maintenance.

[0069] From another perspective, by providing the maintenance section 12 on the second side 11b opposite to the second sidewall 111b, it is not necessary to ensure space for maintenance in the front-rear direction of the base 1. As a result, the dimensions of the housing 111 in the front-rear direction can be miniaturized. This, in turn, enables the miniaturization of the substrate transport system 110.

[0070] Furthermore, a fan 18 is provided on the second side wall 11b to allow air to be exhausted outward from the second side portion 11b. Assuming the fan 18 is mounted on the first cover 13a, the fan 18 moves together with the first cover 13a when it is removed. Wiring is connected to the fan 18. Since the fan 18 and its wiring are integrated with the removed first cover 13a, the handling of the first cover 13a becomes complicated. However, the first cover 13a is configured not to cover the entire second side portion 11b, but only the portion including the maintenance part 12, where the fan 18 is located outside the first cover 13a—the second cover 13b. Therefore, the first cover 13a can be removed while keeping the fan 18 in its original state. This simplifies the handling of the first cover 13a and further improves maintainability.

[0071] As described above, the robot 100 includes a base 1, an arm 3, and a hand 8 (end effector). The base 1 has multiple sides. The arm 3 is rotatably connected to the base 1, and the hand 8 is connected to the arm 3. The first end 31a of the first link 31 and the upper end 21a of the movable part 21 (the connection between the arm and the base) are positioned closest to the first side 11a, which is one of the multiple sides, when viewed from above. The base 1 houses control components (components related to the control of at least one of the arm and the end effector). A maintenance part 12 is provided on a second side 11b, which is not parallel to the first side 11a, and the maintenance part 12 is provided with maintenance components such as a first plate 24 (at least a portion of the components related to the control) for maintaining the maintenance components.

[0072] With this structure, the base 1 houses the control components. Maintenance components among the control components are located in a maintenance section 12, which is situated on the second side 11b of the base 1. Furthermore, the connection between the arm 3 and the base 1 is positioned close to the first side 11a. This allows the robot 100 to be used within a confined space with the first side 11a facing and close to the boundary of the space (e.g., the side wall of the housing 111). This configuration increases the length of the arm 3 (the length of each link 30 when the arm 3 is composed of multiple links 30), expanding the range of motion of the arm 3. In a robot 100 configured in this way, since the first side 11a can be close to the side wall of the housing 111, it is difficult to secure space at the position facing the first side wall 11a. On the other hand, since the second side 11b, where the maintenance section 12 is located, is not parallel to the first side 11a, but faces a different direction than the first side 11a, space can be easily secured in the position opposite to the second side 11b. That is, space can be easily secured when maintaining the maintenance section 12. As a result, the maintainability of the robot 100 within a confined space can be improved.

[0073] Regarding the substrate transport system 110, the substrate transport system 110 includes a basket 111 and a robot 100. The robot 100 is disposed inside the basket 111 for transporting substrates S. The basket 111 has a first side wall 111a, a third side wall 111c, a second side wall 111b, and a fourth side wall 111d. The first side wall 111a and the third side wall 111c face each other in a front-back direction (a defined first direction), while the second side wall 111b and the fourth side wall 111d face each other in a left-right direction (a second direction), which is opposite to the front-back direction. An opening and closing part 114 for maintaining the robot 100 is provided on the second side wall 111b. The robot 100 has a base 1, an arm 3, and a hand. 8 (End effector), the base 1 has multiple sides, the arm 3 is rotatably connected to the base 1, the hand 8 is connected to the arm 3, the base 1 houses control components (components related to the control of at least one of the arm and the end effector), and is configured closer to the first side wall 111a than the third side wall 111c. The first side 11a, which is one of the multiple sides of the base 1, faces the first side wall 111a. The second side 11b, which faces the second side wall 111b, is provided with a maintenance part 12. The maintenance part 12 is provided with maintenance components such as the first plate 24 (at least some of the components related to the control), for maintaining the maintenance components.

[0074] With this structure, the robot 100 is disposed within the housing 111, and the base 1 is positioned close to the first side wall 111a of the housing 111. The base 1 houses control components. Maintenance components among the control components are disposed in a maintenance section 12, which is located on the second side 11b of the base 1. The second side 11b faces the second side wall 111b of the housing 111. An opening / closing section 114 for maintaining the robot 100 is provided on the second side wall 111b. Therefore, after opening the opening / closing section 114 of the housing 111, the operator can easily enter the maintenance section 12 of the base 1 to maintain the maintenance components. As a result, the maintainability of the robot 100 can be improved within the confined space within the housing 111. Furthermore, since it is not necessary to provide space for maintenance in the front-rear direction of the base 1, the front-rear dimensions of the housing 111 can be miniaturized.

[0075] Furthermore, the basket 111 is formed into a four-cornered shape when viewed from above.

[0076] Furthermore, the gap between the second sidewall 111b and the fourth sidewall 111d is greater than the gap between the first sidewall 111a and the third sidewall 111c.

[0077] With this structure, since the space inside the housing 111 is wider in the left-right direction than in the front-back direction, it is easy to ensure space in the left-right direction of the base 1. The second side 11b faces the second sidewall 111b side, i.e., in the left-right direction. Therefore, the space in the left-right direction of the base 1 can be used for the maintenance of maintenance components. As a result, the space inside the housing 111 can be effectively utilized, improving maintainability.

[0078] The first end portion 31a of the arm 3 and the upper end portion 21a of the movable part 21 (the connection part between the arm and the base 1) are most closely arranged to the first side portion 11a among the multiple sides when viewed from above.

[0079] With this structure, since the first side portion 11a faces the first side wall 111a of the basket 111 near the base 1, the first end portion 31a of the arm 3 is positioned close to the first side wall 111a. As a result, the length of the arm 3 (the length of each link 30 when the arm 3 is composed of multiple links 30) can be increased, expanding the range of motion of the arm 3.

[0080] Furthermore, the base 1 has multiple sides including a first side 11a, a second side 11b, a third side 11c opposite to the first side 11a, and a fourth side 11d opposite to the second side 11b. The base 1 is formed into a quadrangular shape when viewed from above.

[0081] With this structure, the base 1 is formed into a roughly quadrangular shape when viewed from above. This quadrangular shape is surrounded by a first side 11a and a third side 11c facing each other, and a second side 11b and a fourth side 11d facing each other.

[0082] Furthermore, the components located in the maintenance section 12 are electrical components.

[0083] Compared to mechanical parts, electrical parts are easier to replace and maintain. Therefore, the parts of the maintenance unit 12 can be easily maintained with the base 1 in its original position.

[0084] Furthermore, the base 1 has a fan 18 disposed on the second side 11b to exhaust the internal air of the base 1. A first cover 13a (cover) covering the maintenance part 12 is detachably installed on the second side 11b, and the fan 18 is disposed in the part of the second side 11b other than the first cover 13a.

[0085] With this structure, the first cover 13a can be removed when performing maintenance on the maintenance section 12. Since the fan 18 is located outside the first cover 13a, the fan 18 remains located on the second side 11b even after the first cover 13a is removed. This makes operation of the first cover 13a easier and improves maintainability.

[0086] As an end effector, a hand 8 is used to hold the substrate S.

[0087] This structure allows the robot 100 to transport the substrate S. The transport of the substrate S often takes place within a clean space, such as inside the housing 111. In other words, the robot 100 is frequently used in confined spaces. Under such usage conditions, the aforementioned structure is particularly effective in improving maintainability.

[0088] A front-opening wafer transfer box 121A (container) for storing semiconductor wafers is disposed adjacent to the first sidewall 111a (one of the first sidewall and the third sidewall), and a processing device 121B for processing semiconductor wafers is disposed adjacent to the third sidewall 111c (the other side of the first sidewall and the third sidewall). A hand 8 holds the semiconductor wafer as a substrate S, and a robot 100 transports the semiconductor wafer between the front-opening wafer transfer box 121A and the processing device 121B.

[0089] With this structure, the robot 100 can be used in a confined space, such as the housing 111, because the operation of semiconductor wafers requires a clean environment. In such usage conditions, the above-described structure is particularly effective in improving maintainability.

[0090] Other implementation methods

[0091] As described above, the embodiments have been presented as examples of the technology disclosed in this application. However, the technology in this disclosure is not limited to this, and can be applied to embodiments with appropriate changes, substitutions, additions, omissions, etc. Furthermore, the various constituent elements described in the embodiments can be combined to create new embodiments. Moreover, the constituent elements described in the drawings and detailed description may include not only those essential for solving the problem, but also, for the purpose of illustrating the technology, constituent elements that are not essential for solving the problem. Therefore, one should not immediately assume that non-essential constituent elements are essential simply because they are described in the drawings and detailed description.

[0092] For example, although robot 100 is assembled into substrate transport system 110, it is not limited thereto. Robot 100 is not limited to robots used in clean environments capable of handling semiconductors. Robot 100 can also be assembled into production lines, etc. It's just that robot 100 is configured for use in a confined space such as a housing 111.

[0093] The substrate transport system 110 may not be assembled into the substrate processing equipment 120. That is, the substrate transport system 110 can adopt any structure as long as the robot 100 transports the substrate S within the housing 111. The starting point and destination of the substrate S are not limited to the front-opening wafer transfer box 121A and the processing device 121B.

[0094] The substrate S can be a thin sheet of material used as a substrate for semiconductor devices such as semiconductor substrates and glass substrates. Examples of semiconductor substrates include silicon substrates and sapphire substrates. Examples of glass substrates include glass substrates for FPDs (Flat Panel Displays) and glass substrates for MEMS (Micro Electro Mechanical Systems).

[0095] Alternatively, the front-opening wafer transfer box 121A may be disposed adjacent to the first sidewall 111a, and the processing device 121B may be disposed adjacent to the third sidewall 111c. Alternatively, the front-opening wafer transfer box 121A or the processing device 121B may also be disposed adjacent to the second sidewall 111b or the fourth sidewall 111d.

[0096] The structure of the basket 111 is not limited to the structure described above. The basket 111 may also have a shape other than a quadrangular shape when viewed from above. For example, the basket 111 may have one or more other sidewalls in addition to the first sidewall 111a and the third sidewall 111c facing each other, and the second sidewall 111b and the fourth sidewall 111d facing each other. For example, the first sidewall 111a and the second sidewall 111b may not be directly connected to each other, but are connected via one or more other sidewalls. Furthermore, even if the basket 111 is generally rectangular when viewed from above, the distance between the first sidewall 111a and the third sidewall 111c may be greater than the distance between the second sidewall 111b and the fourth sidewall 111d.

[0097] Alternatively, the direction in which the first sidewall 111a faces intersects the direction in which the second sidewall 111b faces at an angle other than 90 degrees.

[0098] The opening and closing part 114 is not limited to a door. For example, the opening and closing part 114 can be attached to the basket 111 and completely removed from the basket 111 when the opening 114a is opened.

[0099] The robot is not limited to a horizontal jointed robot 100. For example, the robot can also be a vertical jointed robot.

[0100] Arm 3 may not consist of multiple links 30. When arm 3 is divided, the number of divisions of arm 3, i.e., the number of links 30, is not limited to 3. Arm 3 may also consist of two or more links 30.

[0101] Furthermore, in the substrate transport system 110, the connection portion between the arm 3 and the base 1 may not be the first side 11a among the plurality of sides closest to the base 1. For example, the connection portion may be closest to the second side 11b among the plurality of sides. Moreover, the connection portion may be positioned at the center of the base 1 when viewed from above.

[0102] The end effector is not limited to hand 8. For example, the end effector can also be a painting tool or a welding tool. Even when the end effector is hand 8, the object held by hand 8 is not limited to a substrate. Furthermore, the number of hands 8 (i.e., the number of end effectors) is not limited to two, but can be one or more.

[0103] The structure of the base 1 is not limited to the structure described above. The base 1 may also be formed in a shape other than a quadrangular shape when viewed from above. For example, the base 1 may have one or more other sides in addition to the first side 11a and the third side 11c facing each other and the second side 11b and the fourth side 11d facing each other. For example, the first side 11a and the second side 11b may not be directly connected, but are connected via one or more other sides.

[0104] Alternatively, the direction facing the first side 11a may intersect the direction facing the second side 11b at an angle other than 90 degrees.

[0105] If the maintenance part 12 is the second side 11b, it can be configured in any position. For example, the maintenance part 12 can also be provided in the portion of the second side 11b near the first side 11a. Furthermore, the maintenance part 12 can also be provided throughout the entire second side 11b.

[0106] The maintenance section 12 may be covered by the first cover 13a, or it may be exposed without the first cover 13a. Furthermore, the first cover 13a may be installed on the base 1 in a manner similar to a hinged door, allowing the maintenance section 12 to be opened and closed.

[0107] The components configured in the maintenance section 12 can be components other than the first plate 24, the second plate 25, and the battery 26. For example, when the sensors installed in the hand 8 in the above structure, such as the motion sensor 87, are optical sensors, those sensors can also be configured as maintenance components in the maintenance section 12. In that case, an optical fiber is laid from the sensor configured in the maintenance section 12 to the hand 8 within the arm 3. Therefore, objects in the hand 8 can be detected by the sensors configured in the maintenance section 12. Furthermore, the solenoid valve 88 can also be configured as a maintenance component in the maintenance section 12 instead of being configured inside the arm 3.

[0108] Furthermore, the control device 10 can also be housed in the base 1. In that case, the board containing the control unit 101, etc., of the control device 10 can also be arranged as a maintenance component in the maintenance unit 12. In that case, the electrolytic capacitor that powers the control device 10 can also be housed in the base 1. The electrolytic capacitor can also be arranged as a maintenance component in the maintenance unit 12.

[0109] Furthermore, in the structure where the hand 8 is held in place by adsorption, a pipe is provided for drawing air in from the adsorption section of the hand 8. A solenoid valve and a pressure sensor can be installed on this pipe; the solenoid valve switches the airflow within the pipe and cuts it off, and the pressure sensor detects the pressure within the pipe. These solenoid valves or pressure sensors can also be configured as maintenance components in the maintenance section 12.

[0110] (Potential for industrial application)

[0111] As described above, the technology disclosed herein is useful for robots and substrate transport systems that include robots.

[0112] (Explanation of symbols)

[0113] 100 - Horizontal multi-joint robot (robot); 110 - Base plate transport system; 1 - Base; 11a - First side; 11b - Second side; 11c - Third side; 11d - Fourth side; 12 - Maintenance section; 13a - First cover (lid); 18 - Fan; 21a - Upper end of movable part (connection between arm and base); 24 - First plate (parts related to control); 25 - Second plate (parts related to control) 26-Battery (related to control); 3-Arm; 31a-First end (connection between arm and base); 8-Hand (end actuator); 111-Housing; 111a-First sidewall; 111b-Second sidewall; 111c-Third sidewall; 111d-Fourth sidewall; 114-Opening / closing part; 121A-Front-opening wafer transfer box (container); 121B-Processing device; S-Substrate.

Claims

1. A robot, characterized in that: The robot includes a base, an arm, and an end effector. The base has multiple sides, the arm is rotatably connected to the base, and the end effector is connected to the arm. The connection between the arm and the base, viewed from above, is positioned closest to the first side, which is one of the plurality of sides. The base houses components associated with the control of at least one of the arm and the end effector. The base is provided with a lifting mechanism that allows the arm to move up and down in the vertical direction. A maintenance section is provided on a second side, which is not parallel to the first side, among the plurality of sides. This maintenance section is configured with at least a portion of the components and is used for maintaining at least a portion of the components. The components configured in the maintenance section are electrical components. The base has a fan disposed on the second side to exhaust air from inside the base. A first cover covering the maintenance section and a second cover covering the portion of the second side excluding the first cover are detachably mounted on the second side. The fan is disposed on the second cover. If the second cover is removed, the lifting mechanism is exposed, allowing for maintenance of the lifting mechanism.

2. The robot according to claim 1, characterized in that: The base has multiple sides including a first side, a second side, a third side opposite to the first side, and a fourth side opposite to the second side. The base is square when viewed from above.

3. The robot according to claim 1 or 2, characterized in that... : The end effector is the hand that holds the substrate.

4. The robot according to claim 3, characterized in that... : The hand holds the semiconductor wafer as a substrate. The arm and the hand transport semiconductor wafers between a container and a processing device, the container holding the semiconductor wafers and the processing device processing the semiconductor wafers.

5. A substrate transport system, characterized in that... : The substrate transport system includes a basket and a robot, the robot being configured inside the basket to transport the substrate. The enclosure has a first sidewall and a third sidewall facing in a defined first direction, and a second sidewall and a fourth sidewall facing in a second direction that is different from the first direction. An opening and closing part for maintaining the robot is provided on the second side wall. The robot has a base, an arm, and an end effector. The base has multiple sides, the arm is rotatably connected to the base, and the end effector is connected to the arm. The base houses components related to the control of at least one of the arm and the end effector, and is configured closer to the first sidewall than the third sidewall. The base is provided with a lifting mechanism that allows the arm to move up and down in the vertical direction. The first side portion, which is one of the plurality of sides of the base, faces the first sidewall. A maintenance section is provided on the second side of the base, which faces the second sidewall. This maintenance section is configured with at least a portion of the components for maintenance of the at least a portion of the components. The components configured in the maintenance section are electrical components. The base has a fan disposed on the second side to exhaust air from inside the base. A first cover covering the maintenance section and a second cover covering the portion of the second side excluding the first cover are detachably mounted on the second side. The fan is disposed on the second cover. If the second cover is removed, the lifting mechanism is exposed, allowing for maintenance of the lifting mechanism.

6. The substrate transport system according to claim 5, characterized in that... : The basket is rectangular when viewed from above.

7. The substrate transport system according to claim 5 or 6, characterized in that... : The distance between the second sidewall and the fourth sidewall is greater than the distance between the first sidewall and the third sidewall.

8. The substrate transport system according to claim 5 or 6, characterized in that: The connection between the arm and the base, viewed from above, is positioned closest to the first side of the plurality of sides.

9. The substrate transport system according to claim 5 or 6, characterized in that: The base has multiple sides including a first side, a second side, a third side opposite to the first side, and a fourth side opposite to the second side. The base is square when viewed from above.

10. The substrate transport system according to claim 5 or 6, characterized in that: The end effector is the hand that holds the substrate.

11. The substrate transport system according to claim 10, characterized in that: A container for holding semiconductor wafers is disposed adjacent to one of the first sidewall and the third sidewall. A processing device for processing semiconductor wafers is disposed adjacent to the other side of the first sidewall and the third sidewall. The hand holds the semiconductor wafer, which serves as a substrate. The robot transports semiconductor wafers between the container and the processing device.

Images