Data uploading method, data receiving method, and semiconductor process equipment

Abstract

The embodiment of the present application provides a data uploading method, a data receiving method and a semiconductor process equipment, which are applied to the technical field of semiconductor equipment, and the data uploading method comprises the following steps: monitoring a plurality of monitoring targets of a predetermined semiconductor process equipment; when communication with an upper computer fails, storing current monitoring information of the monitoring targets to obtain historical monitoring information; after the communication with the upper computer is restored to normal, broadcasting and sending the historical monitoring information to the upper computer; after the historical monitoring information is broadcasted and sent to the upper computer, sending current monitoring information to the upper computer at a preset time interval; and when the communication between the upper computer is normal, sending the current monitoring information to the upper computer at the preset time interval. The above scheme can avoid the interruption of monitoring information, and can avoid waiting for feedback information sent by the upper computer in the process of sending monitoring information, so that the communication efficiency can be improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to data uploading methods, data receiving methods, and semiconductor process equipment. Background Technology

[0002] In semiconductor process equipment, the lower-level machine controls the actions of various modules within the equipment to complete the processing of the wafer. The lower-level machine communicates with the upper-level machine, allowing the upper-level machine to obtain various monitoring information from the lower-level machine and monitor and manage the semiconductor process equipment. However, in existing technologies, the communication efficiency between the lower-level and upper-level machines is relatively low. Summary of the Invention

[0003] The technical problem to be solved by the embodiments of the present invention is the low communication efficiency between the lower-level machine and the upper-level machine in semiconductor process equipment.

[0004] To address the aforementioned problems, this invention discloses a data uploading method applied to a lower-level machine in semiconductor process equipment, wherein the lower-level machine is communicatively connected to a higher-level machine in the semiconductor process equipment; the method includes:

[0005] Multiple predetermined monitoring targets of the semiconductor process equipment are monitored;

[0006] In the event of a communication failure with the host computer, the current monitoring information of the monitored target is stored to obtain historical monitoring information; after the communication with the host computer is restored, the historical monitoring information is broadcast to the host computer; after broadcasting the historical monitoring information to the host computer, the current monitoring information is broadcast to the host computer at preset time intervals.

[0007] Under normal communication conditions with the host computer, the current monitoring information is broadcast to the host computer at the specified time intervals.

[0008] Optionally, storing the current monitoring information of the monitored targets to obtain historical monitoring information includes: storing the current monitoring information of the monitored targets at the target level according to the priority of the plurality of monitored targets to obtain the historical monitoring information of the monitored targets at the target level.

[0009] Optionally, storing the current monitoring information of the target at the target level to obtain the historical monitoring information of the target at the target level includes: when a change is detected in the current monitoring information of the target at the target level, storing the current monitoring information of the target at the target level to obtain the historical monitoring information of the target at the target level.

[0010] Optionally, broadcasting the current monitoring information to the host computer includes: broadcasting the current monitoring information of the monitoring target to the host computer when the current monitoring information of the monitoring target changes.

[0011] Optionally, the step of broadcasting the historical monitoring information to the host computer includes: if the historical monitoring information includes multiple items, packaging the multiple items of historical monitoring information into a data packet and broadcasting the data packet to the host computer.

[0012] This invention also discloses a data receiving method applied to a host computer in a semiconductor process equipment, wherein the host computer is communicatively connected to a slave computer in the semiconductor process equipment; the method includes:

[0013] Receive monitoring information of multiple monitoring targets of the semiconductor process equipment sent by the lower-level machine;

[0014] The monitoring information of the monitoring target includes the historical monitoring information of the monitoring target and / or the current monitoring information of the monitoring target; the historical monitoring information of the monitoring target is monitored and stored by the lower-level machine when the communication between the lower-level machine and the upper-level machine fails, and is broadcast and sent after the communication between the lower-level machine and the upper-level machine is restored to normal; the current monitoring information of the monitoring target is monitored by the upper-level machine when the communication between the lower-level machine and the upper-level machine is normal, and is broadcast and sent at preset time intervals.

[0015] Optionally, the plurality of monitoring targets includes one or more device states of the semiconductor process equipment, and the method further includes:

[0016] When the utilization rate of the host computer is greater than a first preset threshold, for the same device status, a portion of the monitoring information is selected at intervals from multiple consecutive monitoring information of the device status for processing.

[0017] If the usage rate of the host computer is greater than a second preset threshold, the monitoring information of the device status is discarded; the second preset threshold is greater than the first preset threshold.

[0018] Optionally, the plurality of monitoring targets includes one or more process control data of the semiconductor process equipment, and the method further includes:

[0019] If the usage rate of the host computer is greater than a third preset threshold, according to preset rules, the monitoring information of the target process control data related to the process processing result is saved from the monitoring information of the process control data, and the monitoring information of other process control data besides the target process control data is discarded.

[0020] This invention also discloses a semiconductor process apparatus, which includes a host computer and / or a slave computer. The slave computer is configured to execute the data upload method described above, and the host computer is configured to execute the data reception method described above.

[0021] Compared with the prior art, the present invention has the following advantages: the lower-level computer monitors multiple monitoring targets of a predetermined semiconductor process equipment; in the event of a communication failure with the upper-level computer, it stores the current monitoring information of the monitored targets to obtain historical monitoring information; after the communication with the upper-level computer is restored, it broadcasts the historical monitoring information to the upper-level computer; after broadcasting the historical monitoring information to the upper-level computer, it broadcasts the current monitoring information to the upper-level computer at preset time intervals; when the communication with the upper-level computer is normal, it broadcasts the current monitoring information to the upper-level computer at time intervals. By saving monitoring information during communication failures and sending the saved monitoring information when communication is normal, and sending the currently acquired monitoring information to the upper-level computer at preset time intervals, the invention avoids interruption of monitoring information and avoids waiting for feedback information from the upper-level computer during the transmission of monitoring information, thereby improving communication efficiency. Attached Figure Description

[0022] Figure 1 A schematic diagram of a data upload process in prior art is shown;

[0023] Figure 2 This embodiment shows a flowchart of the steps of a data upload method.

[0024] Figure 3 This embodiment illustrates a communication flowchart between a host computer and a slave computer. Detailed Implementation

[0025] To facilitate understanding of this invention, a brief introduction to the communication process between the lower-level machine and the upper-level machine in the prior art will be given first.

[0026] like Figure 1 As shown, Figure 1 The diagram illustrates a prior art data upload process where a lower-level machine in a semiconductor process device communicates with a higher-level machine. After establishing this communication connection, the higher-level machine sends a subscription request to the lower-level machine. The lower-level machine can receive the subscription request, which may include identification information for multiple monitoring targets. Based on this identification information, the lower-level machine determines the targets to be monitored, obtains their monitoring information, and sends this information to the higher-level machine.

[0027] The monitoring target can be the equipment status of semiconductor process equipment, the job status of semiconductor process equipment, or the process control data of semiconductor process equipment. Semiconductor process equipment, such as an etching machine, has process chambers equipped with valves. The equipment status can be the open / closed state of the chamber doors and valves. The job status can be the execution result of the control task sent by the lower-level machine after receiving it from the upper-level machine. Process control data can be information related to Advanced Process Control (APC), which may include various process control parameters during wafer processing. The specific type of monitoring target can be set according to requirements; this embodiment does not impose any limitations on this.

[0028] Taking device status as an example, the subscription request may include valve identification information. After receiving the subscription request, if the lower-level machine determines that the subscription request includes the identification information of a certain valve, it determines that the on / off state of that valve is among the monitoring targets to be monitored. At this time, the lower-level machine can monitor the on / off state of the valve and obtain the corresponding monitoring information, which indicates whether the valve is in the open or closed state. After obtaining the monitoring information of the valve, the lower-level machine can send the monitoring information to the upper-level machine. Typically, there are multiple monitoring targets, and the lower-level machine can monitor the monitoring information of multiple targets. During the transmission of monitoring information, the lower-level machine first establishes a transmission queue. After monitoring the monitoring information of each monitoring target, it inserts the monitoring information of the monitoring target into the tail position of the transmission queue. During transmission, the monitoring information at the head of the transmission queue is retrieved and sent to the upper-level machine. After receiving a monitoring message from the lower-level machine, the upper-level machine processes the monitoring information and, after processing, sends feedback information to the lower-level machine. After receiving feedback information from the host computer, the lower-level computer retrieves another monitoring message from the head of the sending queue and sends it to the host computer. This process continues, with the lower-level computer receiving a feedback message from the host computer and retrieving a monitoring message from the head of the sending queue, sending each monitoring message in the sending queue to the host computer in sequence.

[0029] During the transmission of monitoring information, the lower-level device waits if it does not receive feedback information from the upper-level device. When the wait times out or a communication failure with the upper-level device is detected, the monitoring information retrieved from the transmission queue is reinserted into the head of the transmission queue. When the next feedback information is received, the monitoring information reinserted into the head of the queue is transmitted again.

[0030] In prior art, the lower-level machine needs to wait for feedback from the upper-level machine before sending each monitoring information to the upper-level machine, and multiple monitoring information needs to be sent sequentially, resulting in low transmission efficiency. Furthermore, the upper-level and lower-level machines are highly coupled; a failure in either one will cause the other to enter a stopped state. For example, if the lower-level machine fails, the upper-level machine cannot receive the monitoring information sent by the lower-level machine, and its process needs to stop until it receives the monitoring information from the lower-level machine; similarly, if the upper-level machine fails, the lower-level machine cannot receive feedback information and cannot send the next monitoring information to the upper-level machine until it receives feedback information from the upper-level machine.

[0031] To address the aforementioned technical problems, embodiments of the present invention provide a data uploading method, a data receiving method, and semiconductor process equipment. The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0032] Reference Figure 2 , Figure 2 This embodiment illustrates a flowchart of a data upload method. The method is applied to a lower-level machine in a semiconductor process equipment, and the lower-level machine communicates with a higher-level machine in the semiconductor process equipment. The method may include:

[0033] Step 201: Monitor multiple targets of the pre-determined semiconductor process equipment.

[0034] In this embodiment, the user can pre-set the monitoring targets to be monitored on the lower-level machine. After starting up, the lower-level machine can directly monitor multiple monitoring targets of the semiconductor process equipment and obtain monitoring information for each target. Alternatively, the user can set the monitoring targets to be monitored on the upper-level machine. After starting up and establishing a communication connection with the lower-level machine, the upper-level machine sends a subscription request to the lower-level machine, which includes the identification information of each monitoring target. The lower-level machine can determine the monitoring targets based on the identification information in the subscription request, monitor each monitoring target in the semiconductor process equipment, and obtain the monitoring information of the monitoring targets. While monitoring the monitoring targets, the lower-level machine can continuously monitor the targets, record changes in the monitoring targets, and save the monitoring information of the changed targets. The method for monitoring the targets can be set according to the specific monitoring targets; this embodiment does not limit this.

[0035] Step 202: In the event of a communication failure with the host computer, store the current monitoring information of the monitored targets to obtain historical monitoring information.

[0036] Step 203: After communication with the host computer is restored to normal, broadcast historical monitoring information to the host computer. After broadcasting historical monitoring information to the host computer, broadcast current monitoring information to the host computer at preset time intervals.

[0037] Among them, historical monitoring information is the monitoring information of the monitoring targets obtained by pre-monitoring and storage, while current monitoring information is the monitoring information of the monitoring targets obtained by real-time monitoring.

[0038] In this embodiment, after the lower-level machine starts running, it continuously monitors the communication network between the lower-level machine and the upper-level machine to determine whether the communication between the lower-level machine and the upper-level machine is in a normal or faulty state. For example, the lower-level machine can be equipped with a network monitoring module to monitor the communication network between the lower-level machine and the upper-level machine. For instance, the lower-level machine and the upper-level machine communicate via Transmission Control Protocol / Internet Protocol (TCP / IP). The network monitoring module, for example, a connectivity testing program (PacketInternet Groper), after establishing a communication connection with the upper-level machine, can send an Internet Control Message Protocol (ICMP) message to the upper-level machine at preset detection intervals to test the network connectivity between the lower-level machine and the upper-level machine, and determine whether the communication network between the lower-level machine and the upper-level machine is in a normal or faulty state. The method for monitoring the network can be specifically configured according to the communication protocol between the upper-level machine and the lower-level machine; this embodiment does not limit this.

[0039] When the lower-level machine detects a communication network failure between itself and the upper-level machine, it determines that communication with the upper-level machine is faulty. At this time, the lower-level machine can store the current monitoring information of the monitored target, thus obtaining historical monitoring information. For example, when the lower-level machine detects a communication failure with the upper-level machine, it can store the monitoring information of the valve it is currently monitoring in a preset location. Correspondingly, when communication with the upper-level machine is restored, it first determines whether historical monitoring information is stored. If it is determined that historical monitoring information is stored, it first broadcasts this historical monitoring information to the upper-level machine, and then broadcasts the current monitoring information to the upper-level machine at preset time intervals. Using the above example, after determining that communication with the upper-level machine is normal, if historical monitoring information is detected stored in the preset location, the lower-level machine can read the historical monitoring information from the preset location and then broadcast it to the upper-level machine. After the historical monitoring information is sent, the lower-level machine can broadcast the current monitoring information obtained at the current moment to the upper-level machine. For example, with a time interval of 1 second, after the historical monitoring information of the preset location is sent, the lower-level machine can send the current monitoring information of the monitored target at the current moment to the upper-level machine once every 1 second.

[0040] In this scenario, when broadcasting the current monitoring information obtained at the current moment to the host computer, if the current monitoring information pertains to multiple monitoring targets, the host computer can package the multiple monitoring information items into a data packet and then broadcast the data packet to the host computer, thus sending the multiple monitoring information items to the host computer uniformly. Similarly, if the slave computer simultaneously obtains the current monitoring information for multiple monitoring targets, the slave computer can package the current monitoring information for multiple targets into a single data packet and send the data packet to the host computer. Optionally, different identification information can be set in the current monitoring information for different targets, allowing the host computer to distinguish between different current monitoring information based on the identification information. The specific form of the identification information can be set according to requirements, and this embodiment does not impose any restrictions on it.

[0041] Optionally, the step of sending historical monitoring information to the host computer includes:

[0042] If there are multiple historical monitoring information entries, these entries are packaged into a data packet and sent to the host computer.

[0043] In one implementation, during the broadcasting of historical monitoring information to the host computer, the slave computer, if there are multiple pieces of historical monitoring information, can first package these multiple pieces of information into a single data packet and then broadcast the packaged data packet to the host computer, thus sending the multiple pieces of historical monitoring information to the host computer in a unified manner. Referring to the above example, if the historical monitoring information stored in the preset location includes historical monitoring information for valves and chamber doors, as well as historical monitoring information for process control data and operating status, the slave computer can package multiple pieces of historical monitoring information into a single data packet and send the data packet to the host computer. Optionally, different identification information can be set for different pieces of historical monitoring information, allowing the host computer to distinguish between different pieces of historical monitoring information based on the identification information. The specific form of the identification information can be set according to requirements, and this embodiment does not limit this.

[0044] In this embodiment of the invention, during the transmission of historical monitoring information, the lower-level device can package and send multiple historical monitoring information messages, avoiding the need to send each historical monitoring information message sequentially, thereby improving the transmission efficiency of historical monitoring information.

[0045] Optionally, the step of storing the current monitoring information of the monitored targets and obtaining historical monitoring information may include: storing the current monitoring information of the target-level monitoring targets according to the priority of multiple monitoring targets, and obtaining the historical monitoring information of the target-level monitoring targets.

[0046] In one implementation, the user can pre-set the priorities of different monitoring targets. If a communication failure is detected between the lower-level and upper-level computers, the lower-level computer can store only the current monitoring information for the target-level monitoring targets when storing the current monitoring information, thus obtaining historical monitoring information. Referring to the above example, the user can set the priority of work status and process control data as the first priority, and the priority of equipment status as the second priority. When a communication failure is detected between the upper-level and lower-level computers, the lower-level computer can determine the first priority as the target level, store the current monitoring information of the work status and the current monitoring information of the process control data, and obtain historical monitoring information.

[0047] In this embodiment of the invention, when communication fails, only the monitoring information of the target-level monitoring targets is stored, which can reduce the amount of historical monitoring information. After communication is restored, the amount of data can be reduced and the data transmission efficiency can be improved when sending historical monitoring information.

[0048] Optionally, the current monitoring information of the target-level monitoring targets is stored to obtain the historical monitoring information of the target-level monitoring targets, including:

[0049] When a change is detected in the current monitoring information of a target at the target level, the current monitoring information of the target at the target level is stored to obtain the historical monitoring information of the target at the target level.

[0050] In one implementation, during the storage of current monitoring information, only the changed current monitoring information can be stored to obtain historical monitoring information, while the unchanged current monitoring information is not stored. For example, regarding the current monitoring information of a certain job state, when the job state remains unchanged, the monitoring information of that job state at the current moment will not change; however, when the job state changes, the monitoring information of that job state will change. When a communication failure between the host computer and the slave computer is detected, if the monitoring information of that job state has not changed, then the current monitoring information of that job state is not stored; conversely, when the monitoring information of that job state has changed, then the current monitoring information of that job state is stored to obtain historical monitoring information.

[0051] In this embodiment of the invention, during the storage of current monitoring information, only the current monitoring information that has changed is stored, which can reduce the amount of historical monitoring information. After communication is restored, the amount of data sent to the host computer can be reduced, thereby improving communication quality.

[0052] Step 204: If communication with the host computer is normal, broadcast the current monitoring information to the host computer at time intervals.

[0053] In this embodiment, if the lower-level machine determines that the communication between it and the upper-level machine is normal, and if it also determines that no historical monitoring information is stored, it can directly send the monitoring information of the monitored target at the current time to the upper-level machine in the form of broadcast at preset time intervals.

[0054] Optionally, the steps of broadcasting the current monitoring information to the host computer include:

[0055] If the current monitoring information of the monitored target changes, the current monitoring information of the monitored target will be broadcast to the host computer.

[0056] In one implementation, when the lower-level machine broadcasts monitoring information of a monitored target to the upper-level machine, it can broadcast the changed current monitoring information to the upper-level machine only when the current monitoring information of the monitored target changes. If the current monitoring information of the monitored target does not change, the step of broadcasting the current monitoring information to the upper-level machine is not performed. For example, regarding the current monitoring information of a valve, when the valve is always in an open or closed state, the currently monitored valve information will not change, and the current valve monitoring information will not be sent to the upper-level machine. However, when the valve switches from an open state to a closed state, or vice versa, the valve monitoring information will change, and the changed valve monitoring information will be sent to the upper-level machine. Correspondingly, after receiving the current valve monitoring information sent by the lower-level machine, the upper-level machine updates the valve monitoring information in the upper-level machine according to the current monitoring information. If the upper-level machine does not receive the current valve monitoring information, it assumes that the valve state has not changed and does not update the valve monitoring information in the upper-level machine.

[0057] In this embodiment of the invention, when sending the current monitoring information of the monitoring target to the host computer, the slave computer only sends the changed monitoring information to the host computer, which can reduce the amount of data transmitted between the slave computer and the host computer, thereby improving the communication quality.

[0058] In summary, in this embodiment of the invention, the lower-level computer monitors multiple predetermined monitoring targets of the semiconductor process equipment. In the event of a communication failure with the upper-level computer, it stores the current monitoring information of the monitored targets to obtain historical monitoring information. After communication with the upper-level computer is restored, it broadcasts the historical monitoring information to the upper-level computer. Following this broadcast, it broadcasts the current monitoring information to the upper-level computer at preset time intervals. When communication with the upper-level computer is normal, it broadcasts the current monitoring information to the upper-level computer at time intervals. By saving monitoring information during communication failures and sending the saved monitoring information when communication is normal, and then sending the currently acquired monitoring information to the upper-level computer at preset time intervals, the system avoids interruptions in monitoring information transmission and avoids waiting for feedback from the upper-level computer during the transmission of monitoring information, thereby improving communication efficiency.

[0059] Meanwhile, when the lower-level machine sends monitoring information to the upper-level machine, it does not need to wait for feedback from the upper-level machine, thus decoupling the upper-level and lower-level machines and avoiding the problem of the other waiting if either the upper-level or lower-level machine fails. Furthermore, in the event of a communication failure, monitoring information can be saved, and control can be quickly restored based on the saved historical monitoring information after communication is restored. Moreover, multiple monitoring information messages can be sent simultaneously during the transmission process, improving transmission efficiency.

[0060] Reference Figure 3 , Figure 3 This embodiment illustrates a communication flowchart between a host computer and a slave computer. After startup, the host computer and slave computer establish a communication connection. The slave computer can monitor multiple predetermined monitoring targets of the semiconductor process equipment and monitor the communication network between itself and the host computer. When normal communication is detected, the slave computer broadcasts the current monitoring information of the monitored targets to the host computer at time intervals. In the event of a communication failure, the slave computer stores the current monitoring information of the monitored targets to obtain historical monitoring information. After normal communication with the host computer is detected, the slave computer first broadcasts the stored historical monitoring information to the host computer, and then continues to execute the step of broadcasting the current monitoring information to the host computer at time intervals. Simultaneously, the slave computer continuously monitors the communication network between itself and the host computer and continues to execute the step of obtaining monitoring information of the monitored targets.

[0061] This invention also provides a data receiving method applied to a host computer, which is communicatively connected to a slave computer in a semiconductor process equipment. The method includes: receiving monitoring information from multiple monitoring targets sent by the slave computer; the monitoring information includes historical monitoring information and / or current monitoring information of the monitoring targets; the historical monitoring information is monitored and stored by the slave computer when communication with the host computer fails, and broadcast after communication with the host computer is restored; the current monitoring information is monitored by the host computer when communication with the host computer is normal, and broadcast at preset time intervals. During the processing of the monitoring information, the host computer can perform different processing on the monitoring information of different types of monitoring targets according to its own usage rate.

[0062] Among the multiple monitoring targets, the status of one or more semiconductor process equipment may be included.

[0063] During the process of processing monitoring information of multiple monitoring targets, the host computer can, when its utilization rate is greater than a first preset threshold, select a portion of the monitoring information from multiple consecutive monitoring information of the same device status for processing at intervals; when the utilization rate of the host computer is greater than a second preset threshold, it can discard the monitoring information of the device status; the second preset threshold is greater than the first preset threshold.

[0064] In this embodiment, the host computer can process the device status monitoring information differently based on its own usage rate. The host computer's usage rate can be represented by the usage rate of its Central Processing Unit (CPU) or memory. Figure 3As shown, the host computer can continuously monitor CPU utilization. After receiving monitoring information from the slave computer, it first categorizes the information to determine whether it belongs to equipment status, process control data, or operational status. For equipment status monitoring information, a first preset threshold and a second preset threshold can be pre-set, with the second threshold being greater than the first. During the processing of equipment status monitoring information, if CPU utilization exceeds the first preset threshold, the host computer can selectively process a portion of the received monitoring information at intervals. Taking valve monitoring information as an example, the slave computer sends valve monitoring information to the host computer at multiple consecutive time points, and the host computer receives these multiple consecutive monitoring messages. When CPU utilization exceeds the first preset threshold (e.g., 50%), the host computer can selectively process a portion of the consecutive monitoring information at intervals, discarding other unselected information to reduce data volume and CPU load. Specifically, if the lower-level machine sends a valve monitoring message to the upper-level machine every 0.1 seconds, the upper-level machine can randomly select one monitoring message from ten consecutive monitoring messages for processing, discarding the others. Furthermore, when the CPU utilization exceeds a second preset threshold (e.g., 80%), the upper-level machine can directly discard all valve monitoring messages to further reduce the processor load. The specific values ​​of the first and second preset thresholds can be set according to requirements; this embodiment does not impose any limitations on this.

[0065] Optionally, the multiple monitoring targets include one or more process control data of semiconductor process equipment. The method further includes: when the utilization rate of the host computer is greater than a third preset threshold, according to preset rules, saving the monitoring information of the target process control data related to the process processing result from the monitoring information of the process control data, and discarding the monitoring information of other process control data besides the target process control data.

[0066] In one implementation, when the host computer is under heavy load, it can process only the monitoring information of the target process control data related to the process processing result, while discarding the monitoring information of other process control data besides the target process control data. The third preset threshold can be set according to requirements, and this embodiment does not limit it.

[0067] This invention also includes a semiconductor process apparatus, comprising a host computer and / or a slave computer, wherein the slave computer is configured to perform the data upload method described above, and the host computer is configured to perform the data reception method described above.

[0068] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0069] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0070] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or mobile device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or mobile device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or mobile device that includes said element.

[0071] The deep silicon etching method and semiconductor process equipment provided in the embodiments of the present invention have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the embodiments of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of the embodiments of the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the embodiments of the present invention. Therefore, the content of this specification should not be construed as a limitation on the embodiments of the present invention.

Claims

1. A data uploading method, characterized in that, A lower-level machine used in semiconductor process equipment, the lower-level machine being used to control the operation of various modules in the semiconductor process equipment, the lower-level machine being communicatively connected to a higher-level machine in the semiconductor process equipment; the method includes: Multiple predetermined monitoring targets of the semiconductor process equipment are monitored; the monitoring targets are the equipment status, the operational status, or the process control data of the semiconductor process equipment; the semiconductor process equipment is equipped with process chambers, and valves are installed on the process chambers; the equipment status refers to the open / closed status of the chamber doors and valves; the operational status refers to the execution result of the control task sent by the lower-level machine after receiving the control task sent by the upper-level machine; the process control data refers to relevant information of the advanced process control process. In the event of a communication failure with the host computer, the current monitoring information of the monitored target is stored to obtain historical monitoring information, including: The priority of the operation status and the process control data is set to the first priority, and the priority of the equipment status is set to the second priority. In the event of a communication failure with the host computer, the first priority is determined as the target level, the current monitoring information of the target at the target level is stored, and the historical monitoring information of the target at the target level is obtained. After communication with the host computer is restored to normal, the historical monitoring information is broadcast to the host computer; after broadcasting the historical monitoring information to the host computer, the current monitoring information is broadcast to the host computer at preset time intervals. Under normal communication conditions with the host computer, the current monitoring information is broadcast to the host computer at the specified time intervals.

2. The method according to claim 1, characterized in that, The storage target level provides current monitoring information of the monitoring target, and the resulting historical monitoring information of the monitoring target at the target level includes: If a change is detected in the current monitoring information of the target at the target level, the current monitoring information of the target at the target level is stored to obtain the historical monitoring information of the target at the target level.

3. The method according to claim 1, characterized in that, The step of broadcasting the current monitoring information to the host computer includes: If the current monitoring information of the monitored target changes, the current monitoring information of the monitored target is broadcast to the host computer.

4. The method according to any one of claims 1-3, characterized in that, The step of broadcasting the historical monitoring information to the host computer includes: If there are multiple pieces of historical monitoring information, the multiple pieces of historical monitoring information are packaged into a data packet and broadcast to the host computer.

5. A data receiving method, characterized in that, A host computer used in semiconductor process equipment, the host computer being communicatively connected to a slave computer in the semiconductor process equipment, the slave computer being used to control the operation of various modules in the semiconductor process equipment; the method includes: Receive monitoring information of multiple monitoring targets of the semiconductor process equipment sent by the lower-level machine; The monitoring target is the equipment status of the semiconductor process equipment, or the operational status of the semiconductor process equipment, or the process control data of the semiconductor process equipment; the semiconductor process equipment is provided with process chambers, and valves are installed on the process chambers; the equipment status is the open / closed status of the chamber doors and the open / closed status of the valves; the operational status is the execution result of the control task sent by the lower-level machine after receiving the control task sent by the upper-level machine; the process control data is relevant information of the advanced process control process; the priority of the operational status and the process control data is set as the first priority, and the priority of the equipment status is set as the second priority; the monitoring information of the monitoring target includes the historical monitoring information of the monitoring target and / or the current monitoring information of the monitoring target; the historical monitoring information of the monitoring target is obtained by the lower-level machine determining the first priority as the target level and storing the current monitoring information of the monitoring target at the target level when there is a communication failure between the lower-level machine and the upper-level machine, and broadcasting it after the communication between the lower-level machine and the upper-level machine is restored to normal; the current monitoring information of the monitoring target is monitored by the upper-level machine when the communication between the lower-level machine and the upper-level machine is normal, and broadcasted at preset time intervals.

6. The method according to claim 5, characterized in that, The plurality of monitoring targets includes the status of one or more devices of the semiconductor process equipment, and the method further includes: When the utilization rate of the host computer is greater than a first preset threshold, for the same device status, a portion of the monitoring information is selected at intervals from multiple consecutive monitoring information of the device status for processing. If the usage rate of the host computer is greater than a second preset threshold, the monitoring information of the device status is discarded; the second preset threshold is greater than the first preset threshold.

7. The method according to claim 5, characterized in that, The plurality of monitoring targets includes one or more process control data of the semiconductor process equipment, and the method further includes: If the usage rate of the host computer is greater than a third preset threshold, according to preset rules, the monitoring information of the target process control data related to the process processing result is saved from the monitoring information of the process control data, and the monitoring information of other process control data besides the target process control data is discarded.

8. A semiconductor process apparatus, characterized in that, The semiconductor process equipment includes a host computer and / or a slave computer, the slave computer being configured to perform the method as described in any one of claims 1-4, and the host computer being configured to perform the method as described in any one of claims 5-7.

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