Coating device and magnetic field strength uniformity online detection and control method

Abstract

The present invention relates to a coating device and a method for online detection and control of magnetic field strength uniformity, the coating device comprising: a rotating target assembly, the rotating target assembly comprising a rotating target material and a magnetic part for generating a magnetic field, the magnetic part being arranged in the rotating target material; a detection assembly, comprising a plurality of magnetic field strength sensing parts, the plurality of magnetic field strength sensing parts being spaced apart along the axial direction of the rotating target material; a display assembly, the display assembly being connected to the plurality of magnetic field strength sensing parts to display the detection results of the plurality of magnetic field strength sensing parts. Compared with manual detection of magnetic field strength, the coating device can quickly and accurately detect the magnetic field strength in the coating device online through the cooperation of the plurality of magnetic field strength sensing parts as described above. The method for online detection and control of magnetic field strength uniformity can detect and control the magnetic field strength in the coating device online.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum magnetron sputtering coating, and in particular to a coating device and an online detection and control method for magnetic field intensity uniformity. Background Art

[0002] Vacuum magnetron sputtering coating is a core production technology used in the public construction industry for coating LOW-E glass. Magnetron sputtering coating technology refers to a coating technology that uses the coating material used to form the film as the target cathode, bombards the target material with argon ions, generates cathode sputtering, and sputters the target atoms onto the workpiece to form a deposited layer.

[0003] The uniformity of coating is the key to ensuring product color and energy-saving effects. In magnetron sputtering coating technology, the uniformity of magnetic field intensity is a key factor affecting coating uniformity.

[0004] However, in traditional technologies, the detection and judgment of magnetic field strength is still achieved manually, which greatly affects the efficiency of coating and increases labor costs. Summary of the invention

[0005] Based on this, it is necessary to provide a coating device and an online detection and control method for the uniformity of magnetic field intensity in order to address the coating efficiency and cost issues.

[0006] A coating device, comprising:

[0007] A rotating target assembly, the rotating target assembly comprising a rotating target material and a magnetic member for generating a magnetic field, the magnetic member being arranged in the rotating target material;

[0008] The detection component comprises a plurality of magnetic field strength sensing components, and the plurality of magnetic field strength sensing components are distributed at intervals along the axis direction of the rotating target material.

[0009] In one embodiment, the coating device further includes a display component, and the display component is connected to the plurality of magnetic field strength sensing components to display the detection results of the plurality of magnetic field strength sensing components.

[0010] In one embodiment, the coating device also includes a cathode cover plate and a driving member arranged on the cathode cover plate, and the rotating target assembly also includes a rotating target barrel. The driving member is connected to both ends of the rotating target barrel to drive the rotating target barrel and the rotating target material to rotate, and the rotating target material is coaxially sleeved with the rotating target barrel to rotate with the rotating target barrel.

[0011] In one embodiment, the coating device also includes a support beam and a connecting piece that are both hollow, and a plurality of magnetic field strength sensors are arranged on the support beam. The support beam is connected to the cathode cover plate through the connecting piece to be fixed relative to the cathode cover plate. The cathode cover plate is provided with a socket for electrically connecting to the display component, and the wires of the plurality of magnetic field strength sensors pass through the support beam and the connecting piece to the inside of the cathode cover plate to be electrically connected to the socket.

[0012] In one embodiment, the number of the rotating target assemblies is two, the two rotating target assemblies are distributed in parallel, and the plurality of magnetic field intensity sensing components are disposed between the two rotating target assemblies along the axis direction of the rotating target assemblies.

[0013] In one embodiment, the distance from any one of the magnetic field strength sensing elements to the two rotating target assemblies is equal; and / or

[0014] A plane that is tangent to the two rotating target assemblies is defined as a tangent plane, and the lowest point or the highest point of any magnetic field intensity sensing element is located on the tangent plane.

[0015] In one embodiment, there are multiple rotating target assemblies, and the detection assembly includes multiple groups of magnetic field strength sensing components, which correspond one-to-one to the multiple rotating target assemblies, and the magnetic field strength sensing components of one group are spaced apart along the axial direction of the corresponding rotating target assembly.

[0016] In one embodiment, the distance between any two adjacent magnetic field intensity sensing elements is equal.

[0017] A method for online detection and control of uniformity of magnetic field intensity applied to a coating device, the method comprising:

[0018] A rotating target assembly, a detection assembly and a display assembly are provided, wherein the rotating target assembly comprises a rotating target material and a rotating target barrel which are coaxially sleeved, and a magnetic member arranged in the rotating target material, and the detection assembly comprises a plurality of magnetic field intensity sensing members which are spaced apart and distributed along the axis of the rotating target material;

[0019] The magnetic field strength at each location in the axial direction of the rotating target is detected online by using a plurality of magnetic field strength sensing components;

[0020] Transmitting the detection results of the plurality of magnetic field strength sensing components to a display component;

[0021] The display component receives and displays the magnetic field strengths detected by the plurality of magnetic field strength sensing components to determine the uniformity of the magnetic field strength of the coating device.

[0022] In one embodiment, the online detection and control method further includes:

[0023] When the magnetic field intensities detected by the magnetic field intensity sensing components displayed by the display assembly are different, the process parameters of the coating device are adjusted so that the magnetic field intensities detected by the plurality of magnetic field intensity sensing components are the same.

[0024] The detection component in the above-mentioned coating device includes a plurality of magnetic field strength sensors. It is understandable that the plurality of magnetic field strength sensors can respectively detect the magnetic field strength of the corresponding positions. Since the plurality of magnetic field strength sensors are spaced apart along the axis of the rotating target, the magnetic field strength at each position along the axis of the rotating target can be sensed by the plurality of magnetic field strength sensors, so as to judge the uniformity of the magnetic field strength along the axis of the rotating target, that is, to judge whether the magnetic field strength along the axis of the rotating target is the same. Compared with manual detection of magnetic field strength, the above-mentioned coating device can quickly and accurately detect the magnetic field strength in the coating device through the cooperation of the plurality of magnetic field strength sensors as mentioned above. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 An axial schematic diagram of a coating device provided by an embodiment;

[0026] Figure 2 for Figure 1 A side view of an end face of the coating device shown;

[0027] Figure 3 for Figure 1 A partial enlarged view of the middle A;

[0028] Figure 4 For along Figure 2 Sectional view along the midline BB;

[0029] Figure 5 It is a schematic diagram of the position of the rotating target assembly and the magnetic field strength sensing component.

[0030] Figure numerals: 10, coating device; 100, rotating target assembly; 110, rotating target material; 120, magnetic part; 130, rotating target tube; 200, detection assembly; 210, magnetic field strength sensing part; 211, wire; 300, cathode cover plate; 310, socket; 400, driving part; 500, support beam; 510, wire entry hole; 600, connecting part. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0032] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial direction", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0034] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0037] See also Figures 1 to 3 A coating device 10 provided in one embodiment of the present invention includes a rotating target assembly 100, a detection assembly 200 and a display assembly (not shown in the figure, the same below).

[0038] The rotating target assembly 100 includes a rotating target material 110 and a magnetic member 120 for generating a magnetic field, and the magnetic member 120 is disposed in the rotating target material 110. It can be understood that the magnetic member 120 is used to generate a magnetic field in the coating device 10, and the magnetic field is used to confine the charged particles generated by cathode sputtering of the rotating target material 110, and to provide plasma density to increase the sputtering rate. The uniformity of the magnetic field strength is a key factor affecting the uniformity of the coating.

[0039] The detection assembly 200 includes a plurality of magnetic field intensity sensing components 210 , and the plurality of magnetic field intensity sensing components 210 are distributed at intervals along the axis direction of the rotating target 110 .

[0040] The detection component 200 in the above-mentioned coating device 10 includes a plurality of magnetic field strength sensors 210. It is understandable that the plurality of magnetic field strength sensors 210 can respectively detect the magnetic field strength of the corresponding positions. Since the plurality of magnetic field strength sensors 210 are spaced apart along the axial direction of the rotating target 110, the magnetic field strength of each position along the axis of the rotating target 110 can be sensed by the plurality of magnetic field strength sensors 210, so as to judge the uniformity of the magnetic field strength along the axis of the rotating target 110, that is, to judge whether the magnetic field strength along the axis of the rotating target 110 is the same. Compared with manual detection of magnetic field strength, through the mutual cooperation of the plurality of magnetic field strength sensors 210 as described above, the above-mentioned coating device 10 can quickly and accurately detect the uniformity of the magnetic field strength in the coating device 10.

[0041] In one embodiment, further, the coating device 10 further includes a display component, which is connected to multiple magnetic field strength sensing components 210 to display the detection results of multiple magnetic field strength sensing components 210, that is, to display the magnetic field strength at various locations along the axis direction of the target material 110. The display component can display the detection results of multiple magnetic field strength sensing components 210, that is, the display component can display the magnetic field strength of each point in the axis direction of the rotating target material 110. In this way, it is possible to quickly find one or more points where the magnetic field strength is uneven. Compared with manually detecting each point one by one, this can improve the efficiency of detection. In addition, it should be understood that the magnetic field strength sensing component 210 detects the magnetic field strength continuously, and the magnetic field strength sensing component 210 can implement detection and monitoring of the corresponding point and output it through the display component. In other words, by combining multiple magnetic field strength sensing components 210 with the display component, the uniformity of the magnetic field strength in the axis direction of the rotating target material 110 can be detected online. Real-time detection can provide a reference basis for adjusting the magnetic field strength of the rotating target material 110, and realize feedback adjustment of the magnetic field strength. In addition, a big data analysis system for online detection of the uniformity of the magnetic field strength in the axial direction of the rotating target 110 and overall magnetic field strength as well as process optimization are provided to provide technical references.

[0042] Furthermore, in the above-mentioned coating device 10, the online detection scheme of the detection component 200 in conjunction with the display component is simple in structure and does not complicate the overall structure of the coating device 10. In addition, the detection method using multiple magnetic field strength sensing components 210 is relatively low in cost. At the same time, it can also save a certain amount of labor cost compared to manual detection.

[0043] It should be understood that ensuring the uniformity of the magnetic field strength along the axis of the rotating target 110 can improve the uniformity of the coating on the workpiece to be coated.

[0044] In one embodiment, the magnetic field strength sensing element 210 may be a Hall sensor, for example, and multiple Hall sensors may be used to detect the magnetic field strength of each point in the axial direction of the rotating target 110. Of course, the magnetic field strength sensing element 210 may also be configured as other detection components capable of detecting the magnetic field strength in real time according to requirements, which is not further limited herein.

[0045] In one embodiment, the number of magnetic field strength sensing components 210 can be set based on the overall length of the rotating target 110 and the accuracy requirements of online detection. It can be understood that for rotating targets 110 of the same length, the more magnetic field strength sensing components 210 there are within a unit distance, the higher the detection accuracy, reflecting a better degree of uniformity of magnetic field strength. For rotating targets 110 of conventional length, the number of magnetic field strength sensing components 210 can be 3-20, and of course the number of magnetic field strength sensing components 210 can be set to be greater than 20. Due to the influence of the size of the workpiece to be coated and other factors, the length of the rotating target 110 in the actual coating process is also different, so the number of magnetic field strength sensing components 210 can be set specifically according to the length and accuracy requirements of the rotating target 110, and is not limited here. The length of the above-mentioned rotating target 110 refers to the size of the rotating target 110 in the direction of its axis.

[0046] See also Figure 1 , Figure 2 and Figure 4 In one embodiment, the coating device 10 further includes a cathode cover plate 300 and a driving member 400 disposed on the cathode cover plate 300. The rotating target assembly 100 further includes a rotating target barrel 130, and the driving member 400 is connected to both ends of the rotating target barrel 130 to drive the rotating target barrel 130 and the rotating target material 110 to rotate. The rotating target material 110 is coaxially sleeved with the rotating target barrel 130 to rotate with the rotating target barrel 130. In other words, the rotating target barrel 130 is sleeved on the rotating target material 110 and connected to the rotating target material 110, and the driving member 400 drives the rotating target barrel 130 to rotate. The above-mentioned coaxial sleeve connection between the rotating target material 110 and the rotating target barrel 130 means that the rotating target barrel 130 is not only sleeved on the rotating target material 110, but also the axes of the two coincide with each other.

[0047] It should be understood that the magnetic member 120 located in the rotating target material 110 does not rotate with the rotating target barrel 130. Figure 3 , the magnetic poles of the magnetic member 120 in the rotating target 110 can be distributed along the radial direction of the rotating target 110. The magnetic field strength in the coating device 10 does not change with the rotation of the rotating target 110. The magnetic poles of the two magnetic members 120 can be arranged in parallel, and the two magnetic members can be arranged with the N pole facing downward and the S pole facing upward.

[0048] See also Figure 1 In one embodiment, the number of the rotary targets 110 is multiple, that is, the rotary target assembly 100 includes multiple rotary targets 110 .

[0049] See also Figures 1 to 3In one embodiment, the number of the rotary target assemblies 100 may be two, and the two rotary target assemblies 100 are arranged in parallel. A plurality of magnetic field strength sensing components 210 are arranged between the two rotary target assemblies 100 along the axis direction of the rotary target assemblies 100. It can be understood that the plurality of rotary target assemblies 100 each include a rotary target material 110 and a magnetic component 120 arranged inside the rotary target material 110.

[0050] The two magnetic members 120 are respectively arranged inside the two rotating target assemblies 100, so the position between the two rotating target assemblies 100 is the intersection of the magnetic induction lines generated by the two magnetic members 120, where the magnetic induction intensity is relatively strong. The multiple magnetic field intensity sensing members 210 are arranged between the two rotating target assemblies 100 along the axial direction of the rotating target assemblies 100. On the one hand, the accuracy of the magnetic field intensity sensing members 210 in detecting the magnetic field intensity can be improved; on the other hand, the uniformity of the magnetic field intensity in the axial direction of the two rotating target assemblies 100 can also be detected simultaneously. Not only the accuracy of the detection is improved, but also the detection efficiency is improved.

[0051] It should be noted that the parallel distribution of the two rotating target assemblies 100 means that the rotating targets 110 included in the two rotating target assemblies 100 are distributed in parallel, that is, the axes of the two rotating targets 110 are parallel. At this time, the distribution direction of the multiple magnetic field intensity sensing elements 210 is also parallel to the axes of the two rotating targets 110.

[0052] See also Figure 3 Furthermore, the distance between any magnetic field strength sensing component 210 and the two rotating target assemblies 100 can be set to be equal, that is, the distance between any magnetic field strength sensing component 210 and the two rotating target materials 110 is the same, and any magnetic field strength sensing component 210 is located on the middle plane of the two rotating target materials 110. It can be understood that the middle plane of the two rotating target materials 110 is the concentrated superposition of the magnetic fields generated by the two magnetic components 120, where the magnetic induction intensity is strong. Therefore, making the distance between any magnetic field strength sensing component 210 and the two rotating target materials 110 the same can further ensure the accuracy of the detection results of the magnetic field strength sensing component 210. See the above-mentioned middle plane Figure 3 The middle label is K.

[0053] Please continue reading Figure 3In one embodiment, a plane that is tangent to both rotating target assemblies 100 is defined as a tangent plane, and the lowest point or the highest point of any magnetic field strength sensing member 210 is located on the tangent plane. It can be understood that the setting position of the magnetic field strength sensing member 210 is the basis for ensuring the accuracy of the online detection result. In this embodiment, by taking the lowest point or the highest point of the magnetic field strength sensing member 210 as the reference point on the magnetic field strength sensing member 210, and taking the tangent plane of the two rotating target assemblies 100 as the reference reference of the rotating target assemblies 100, it is convenient to make each magnetic field strength sensing member 210 be set at the expected position. Specifically, since the two rotating target assemblies 100 are arranged in parallel, there will be two tangent planes for the two rotating target assemblies 100. When the tangent plane located above is used as the reference reference, the highest point of the magnetic field strength sensing member 210 can be used as the reference point of the magnetic field strength sensing member 210; when the tangent plane located below is used as the reference reference, the lowest point of the magnetic field strength sensing member 210 can be used as the reference point of the magnetic field strength sensing member 210. The high and low references described in this embodiment are Figure 3 The two tangent planes mentioned above refer to Figure 3 Among M1 and M2.

[0054] See also Figure 1 and Figure 4 In one embodiment, the distance between any two adjacent magnetic field strength sensing elements 210 can be set equal. In other words, the plurality of magnetic field strength sensing elements 210 are evenly spaced and distributed along the axis direction of the rotating target 110. In this way, the uniformity of the magnetic field strength along the axis direction of the rotating target 110 can be more comprehensively reflected.

[0055] In one embodiment, when the number of the rotating target assemblies 100 is more than one but not equal to two, the detection assembly 200 includes multiple groups of magnetic field strength sensing components 210, and the multiple groups of magnetic field strength sensing components 210 correspond to the multiple rotating target assemblies 100 one by one, and one group of magnetic field strength sensing components 210 is distributed at intervals along the axis direction of the corresponding rotating target assembly 100. It can be understood that one group of magnetic field strength sensing components 210 includes multiple magnetic field strength sensing components 210.

[0056] In other words, when the number of the rotating target assemblies 100 is more than but not equal to two, a group of magnetic field intensity sensing elements 210 can detect one rotating target assembly 100 correspondingly, so as to accurately reflect the uniformity of the corresponding rotating target assembly 100 being detected.

[0057] For example, when there are three rotating target assemblies 100, the detection assembly 200 may include three sets of magnetic field strength sensing components 210. The three sets of magnetic field strength sensing components 210 correspond to detecting three rotating target assemblies 100. When there are four rotating target assemblies 100, the same is true, so it will not be repeated.

[0058] It should be understood that when there is only one rotating target assembly 100 , only one set of detection assemblies 200 may be provided to detect one rotating target assembly 100 .

[0059] Please refer to 4 and Figure 5 In one embodiment, the coating device 10 further includes a support beam 500 and a connector 600, both of which are hollow. A plurality of magnetic field strength sensing components 210 are disposed on the support beam 500, and the support beam 500 is connected to the cathode cover plate 300 through the connector 600 to be fixed relative to the cathode cover plate 300. The cathode cover plate 300 is provided with a socket 310 for electrically connecting to the display component, and the wires 211 of the plurality of magnetic field strength sensing components 210 pass through the support beam 500 and the connector 600 to the inside of the cathode cover plate 300 to be electrically connected to the socket 310. In other words, the support beam 500 and the connector 600 can not only be used to support the connection detection component 200, but also can be used to straighten the wires of the plurality of magnetic field strength sensing components 210, so that the coating device 10 has a more compact structure.

[0060] Specifically, the support beam 500 can be a hollow prism or a round tube, a first connecting hole (not shown in the figure, the same below) is provided inside the support beam 500, and a plurality of wire entry holes 510 connected to the first connecting hole are provided on the side wall of the support beam 500. The support beam 500 and the first connecting holes inside thereof are distributed along the axis direction of the rotating target assembly 100. The wires 211 of the plurality of magnetic field intensity sensing components 210 can extend into the first connecting hole through the wire entry hole 510, and extend out of the first connecting hole through the wire exit hole (not shown in the figure, the same below) and enter the connector 600.

[0061] The connector 600 may also be a hollow round tube or an angular tube, and a second connecting hole (not shown in the figure, the same below) is arranged inside the connector 600. The connector 600 and the second connecting hole inside it extend and distribute along the direction from the support beam 500 to the cathode cover plate 300. The wires 211 of the multiple magnetic field intensity sensing components 210 sequentially extend into the cathode cover plate 300 through the wire entry hole 510, the first connecting hole, the wire exit hole and the second connecting hole to be electrically connected to the socket 310, so as to transmit the detection results to the display component.

[0062] In order to ensure the stability of the connection between the support beam 500 and the cathode cover plate 300, a plurality of connectors 600 may be provided, and the plurality of connectors 600 are spaced apart along the length direction of the support beam 500. The wires 211 of the plurality of magnetic field intensity sensing elements 210 may be selectively passed through the nearest connector 600 to penetrate into the cathode cover plate 300.

[0063] It should be noted that the length of the support beam 500 is determined by the length of the rotating target 110 , and the number of the connectors 600 is determined by the length of the support beam 500 . In other words, the length of the support beam 500 and the number of the connectors 600 can be selected according to the length of the rotating target 110 .

[0064] The wire 211 of the magnetic field strength sensing element 210 may specifically include a power line and a signal line.

[0065] The present invention also provides an online detection and control method for uniformity of magnetic field strength applied to the coating device 10. The online detection and control method for uniformity of magnetic field strength includes:

[0066] A rotating target assembly 100 , a detection assembly 200 and a display assembly are provided. The rotating target assembly 100 includes a coaxially sleeved rotating target material 110 and a rotating target barrel 130 , and a magnetic member 120 disposed in the rotating target material 110 . The detection assembly 200 includes a plurality of magnetic field strength sensing members 210 spaced apart and distributed along the axis of the rotating target material 110 .

[0067] The magnetic field strength at various locations along the axis of the rotating target 110 is detected online by a plurality of magnetic field strength sensing elements 210 .

[0068] The detection results of the plurality of magnetic field intensity sensing elements 210 are transmitted to the display component.

[0069] The display component receives and displays the magnetic field strength detected by the plurality of magnetic field strength sensing elements 210 to determine the uniformity of the magnetic field strength of the coating device 10 .

[0070] Of course, in some embodiments, the coating device 10 may also include a processor (not shown in the figure, the same below), which improves the detection efficiency by designing an algorithm to compare the magnetic field strength detection results input by the magnetic field strength sensing element 210 at each point and the points where there are differences with the magnetic field strength detection results at other points.

[0071] In one embodiment, when the magnetic field strength detected by the magnetic field strength sensing element 210 displayed by the display component is different, the process parameters of the coating device 10 are adjusted so that the magnetic field strength detected by the multiple magnetic field strength sensing elements 210 are the same. Specifically, for example, the process parameters of the flow rate of the process gas and the power of the power supply in the coating device 10 can be adjusted to make the magnetic field strength in the coating device 10 uniform.

[0072] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0073] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A coating device, characterized in that: The coating device comprises: Cathode cover; A rotating target assembly, the rotating target assembly is arranged on the cathode cover plate, the rotating target assembly comprises a rotating target material and a magnetic member for generating a magnetic field, the magnetic member is arranged in the rotating target material; A detection assembly, comprising a plurality of magnetic field strength sensing components, wherein the plurality of magnetic field strength sensing components are spaced apart and distributed along the axis direction of the rotating target; and The supporting beam and the connecting piece are all hollow, and the plurality of magnetic field strength sensing pieces are arranged on the supporting beam, and the supporting beam is connected to the cathode cover plate through the connecting piece to be fixed relative to the cathode cover plate; Among them, the two rotating target assemblies are distributed in parallel, and the multiple magnetic field strength sensing components are arranged between the two rotating target assemblies along the axial direction of the rotating target assembly; the distance from any of the magnetic field strength sensing components to the two rotating target assemblies is equal; a plane that is tangent to the two rotating target assemblies at the same time is defined as a tangent plane, and the lowest point or the highest point of any of the magnetic field strength sensing components is located on the tangent plane.

2. The coating device according to claim 1, characterized in that: The coating device further comprises a display component, and the display component is connected to the plurality of magnetic field strength sensing components to display the detection results of the plurality of magnetic field strength sensing components.

3. The coating device according to claim 2, characterized in that: The coating device also includes a driving member arranged on the cathode cover plate, and the rotating target assembly also includes a rotating target barrel. The driving member is connected to both ends of the rotating target barrel to drive the rotating target barrel and the rotating target material to rotate, and the rotating target material is coaxially sleeved with the rotating target barrel to rotate with the rotating target barrel.

4. The coating device according to claim 3, characterized in that: The coating device also includes a socket on the cathode cover plate for electrically connecting to the display component, and the wires of the plurality of magnetic field strength sensors pass through the support beam and the connector to the inside of the cathode cover plate to be electrically connected to the socket.

5. The coating device according to claim 4, characterized in that: A first connecting hole is provided inside the support beam, and a plurality of wire entry holes connected to the first connecting hole are provided on the side wall of the support beam. The support beam and the first connecting hole are distributed along the axial direction of the rotating target assembly, and the wires of the plurality of magnetic field strength sensing components can extend into the first connecting hole through the wire entry holes.

6. The coating device according to claim 1, characterized in that: The number of the magnetic field strength sensing components is 3-20.

7. The coating device according to claim 1, characterized in that: There are multiple rotating target assemblies, and the detection assembly includes multiple groups of magnetic field strength sensing components, which correspond one-to-one to the multiple rotating target assemblies, and one group of magnetic field strength sensing components is spaced apart along the axial direction of the corresponding rotating target assembly.

8. The coating device according to claim 1, characterized in that: The distance between any two adjacent magnetic field intensity sensing components is equal.

9. A method for online detection and control of magnetic field intensity uniformity, characterized in that: The method is applied to the coating device according to any one of claims 1 to 8, and the method for online detection and control of magnetic field intensity uniformity includes: A rotating target assembly, a detection assembly and a display assembly are provided, wherein the rotating target assembly comprises a rotating target material and a rotating target barrel which are coaxially sleeved, and a magnetic member arranged in the rotating target material, and the detection assembly comprises a plurality of magnetic field intensity sensing members which are spaced apart and distributed along the axis of the rotating target material; The magnetic field strength at each location in the axial direction of the rotating target is detected online by using a plurality of magnetic field strength sensing components; Transmitting the detection results of the plurality of magnetic field strength sensing components to a display component; The display component receives and displays the magnetic field strengths detected by the plurality of magnetic field strength sensing components to determine the uniformity of the magnetic field strength of the coating device.

10. The method for online detection and control of magnetic field intensity uniformity according to claim 9, characterized in that: The online detection and control method also includes: When the magnetic field intensities detected by the magnetic field intensity sensing components displayed by the display assembly are different, the process parameters of the coating device are adjusted so that the magnetic field intensities detected by the plurality of magnetic field intensity sensing components are the same.

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