Rotatable bellows device

Abstract

The present application relates to the technical fields of semiconductor wet processing equipment, in particular to a rotatable bellows device, the bellows body is made of non-metal material by integral machining, has the function of stretching and compression, and is integrally formed with rotary flanges at both ends to realize the function of integral rotation. The device can realize the functions of rotation and lifting protection simultaneously.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor wet process equipment, in particular to a rotatable bellows device. BACKGROUND

[0002] In the semiconductor wet process equipment, there are some specific environments such as chemical corrosion environment, in which the metal material of the moving mechanism needs to be avoided from being corroded by the chemical medium to failure; at the same time, in order to avoid occupying too much space, a protective device needs to be sealed effectively and meet the lifting and rotating motion at the same time.

[0003] Prior art one: cross telescopic sleeve + static sealing element (sealing ring, sealing gasket, etc.). The disadvantage is that the cross telescopic part occupies a large height space, for example, the occupied space is ≥2 times the telescopic stroke.

[0004] Prior art two: ordinary bellows + static sealing element (sealing ring, sealing gasket, etc.); this structure can meet the lifting motion protection, but cannot be compatible with the rotating motion. SUMMARY

[0005] The present application is to effectively solve the problems in the above background art, and proposes a rotatable bellows device.

[0006] The specific technical scheme is as follows:

[0007] A rotatable bellows device, the bellows body is made of non-metallic material by integral machining, has a stretching and compression function, and is integrally formed with a rotary flange at both ends to realize integrated rotation.

[0008] Preferably, the rotary flange is divided into a first rotary flange and a second rotary flange, the first flange is installed with a moving device, and the second flange is used for fixing to a mounting base.

[0009] Preferably, the second rotary flange includes a first rotary body, a second rotary body and a third rotary body made of non-metallic material, one side of the first rotary body is integrally formed with one end of the bellows body, the other side of the first rotary body extends outward to form a boss structure, the third rotary body is sleeved on the boss structure and limited by the second rotary body, the inner circle of the first rotary body is provided with threads, and the second rotary body is deeply inserted into the inner circle of the first rotary body and connected with the threads.

[0010] Preferably, the third rotary body is provided with a countersunk hole for bolt fixing with the base or the pedestal.

[0011] Compared with the prior art, the present application has the beneficial effects that: the device is made of non-metallic material by machining, can realize the functions of rotation and lifting motion protection at the same time, occupies small space, and has long service life. Attached Figure Description

[0012] Figure 1 This is the front view of the present invention;

[0013] Figure 2 This is the right view of the invention;

[0014] Figure 3 This is the left view of the present invention;

[0015] Figure 4 This is the ultimate compression state diagram of the present invention;

[0016] Figure 5 This is a diagram showing the ultimate tensile state of the present invention;

[0017] Figure 6 This is a perspective view of the present invention;

[0018] Figure 7 This is a cross-sectional view of the second rotating body in this invention. Detailed Implementation

[0019] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, rotated 90 degrees, or in other orientations, and the spatial relative descriptions used herein will be interpreted accordingly.

[0020] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings and preferred embodiments.

[0021] like Figures 1-6 As shown, a rotatable bellows device is disclosed. The bellows body 1 is made of non-metallic material and manufactured through an integrated machining process. It has its own tensile and compressive functions. Both ends are integrally formed with swivel flanges to achieve an integrated swivel function. The bellows itself has its own tensile and compressive functions to achieve lifting and lowering protection. This device is not a simple assembly, but rather uses the flange on one side of the bellows as the first swivel element in the non-metallic swivel ring device to achieve the function.

[0022] The rotating flange is divided into a first rotating flange 2 and a second rotating flange 3, the first flange is installed with a moving device, and the second flange is used for fixing to a mounting base. Figure 7 As shown in the figure, the second rotating flange comprises a first rotating body 4, a second rotating body 5 and a third rotating body 6 made of non-metallic material, one side of the first rotating body is integrally formed with one end of the bellows body, the other side of the first rotating body extends outward to form a boss structure 7, the third rotating body is sleeved on the boss structure and is limited by the second rotating body, the inner ring of the first rotating body is provided with threads, the second rotating body is deeply inserted into the inner ring of the first rotating body and is connected with the threads, the third rotating body is provided with a countersunk hole for fixing with a base or a pedestal by a bolt. The first ring body and the second rotating body are connected by threads + thread locking structure to form an integral body; the third rotating body is not connected with the first rotating body and the second rotating body and is located between the first rotating body and the second rotating body, but the three bodies maintain a concentric relationship; during use, only the third rotating body is used for installation with a base or a pedestal;

[0023] The first rotating flange and the second rotating flange can be adapted according to different needs.

[0024] In the present application, the flange mounting surface can be adapted to an end face sealing element, which can be determined according to actual use.

[0025] The above is only the preferred embodiment of the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, and these improvements and refinements should be considered as the protection scope of the present application.

Claims

1. A rotatable bellows device, characterized in that: The bellows body is made of non-metallic material and manufactured through integrated machining. It has its own tensile and compressive functions. Both ends are integrally formed with the rotary flange to achieve an integrated rotary function. The rotary flange is divided into a first rotary flange and a second rotary flange. The first rotary flange is installed with the motion device, and the second rotary flange is used to fix it to the mounting base. The second rotary flange includes a first rotary body, a second rotary body, and a third rotary body made of non-metallic material. One side of the first rotary body is integrally formed with one end of the bellows body, and the other side of the first rotary body extends outward to form a boss structure. The third rotary body is fitted onto the boss structure and is limited by the second rotary body. The inner ring of the first rotary body has threads, and the second rotary body extends into the inner ring of the first rotary body and is threaded to it. The third rotary body is provided with countersunk holes for bolt fixing to the base or pedestal.

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