Arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy

Abstract

The present invention discloses an arc-shaped infrared halogen heating lamp positioning clamp assembly for epitaxy, comprising: a lamp holder clamp assembly, a fixing groove is provided in the lamp holder clamp assembly, and the fixing groove runs through the lamp holder clamp assembly; a lamp holder positioning step member is arranged in the middle of both sides of the fixing groove; a hinge assembly is fixed on one side of the lamp holder clamp assembly; and a locking mechanism is fixed on the other side of the lamp holder clamp assembly. The lamp holder clamp assembly of the present invention can independently replace each damaged heating lamp group without removing the entire heating lamp assembly mounting substrate from the equipment chamber, which can not only reduce the downtime of the equipment, but also reduce the number of overall disassembly of the cavity, thereby improving the efficiency of the overall process manufacturing, and has the characteristics of simple disassembly and maintenance, low cost, and high safety.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor film processing, and in particular relates to an arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy. Background Art

[0002] With the development of semiconductor technology, traditional silicon polished wafers can no longer fully meet the needs of semiconductor devices. Silicon epitaxial wafers have the characteristics of high quality and excellent electrical properties. They have been widely used in discrete devices and IC fields. The continuous improvement of the quality of silicon epitaxial wafers depends on the improvement of the epitaxial growth process. The advancement of the growth process is due to the design improvement of silicon epitaxial furnaces.

[0003] In order to meet the development needs of the semiconductor industry, the silicon epitaxial furnace has evolved from diffusion furnace, barrel furnace, vertical furnace, flat furnace to monolithic silicon epitaxial furnace. Among them, the monolithic silicon epitaxial furnace was first introduced by Applied Materials, Inc. of the United States. It adopts the heating method of bulb irradiation. The same number of bulbs are placed in the upper and lower parts of the cavity, and a gold-plated light reflector is installed on the back of the bulb to ensure that the light emitted by the bulb can evenly irradiate the surface of the base, so as to achieve the effect of uniform irradiation. With the development of semiconductors, the epitaxial process has higher and higher requirements for the uniformity of the heating temperature of infrared lamps. The surrounding arrangement of infrared heating lamps can independently adjust the power of each lamp, so as to control the heat radiated by the lamp. However, the vertical installation of the lamp and the positioning of the lamp foot usually require a large enough space, and it is difficult to replace the heating lamp group, which is easy to increase the actual downtime and reduce the process manufacturing time. Therefore, the market is in urgent need of a lamp fixing component that is easy to replace and occupies a small space. Summary of the invention

[0004] The object of the present invention is to provide an arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: an arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy, characterized in that it comprises:

[0006] A lamp holder clamp block assembly, wherein a fixing groove is provided in the lamp holder clamp block assembly and the fixing groove passes through the lamp holder clamp block assembly;

[0007] Lamp holder positioning step pieces, arranged in the middle of both sides of the fixing groove;

[0008] A hinge assembly, fixed to one side of the lamp holder clamp assembly;

[0009] The locking mechanism is fixed on the other side of the lamp holder clamping block assembly.

[0010] In a preferred embodiment of the present invention, the lamp holder clamp assembly comprises:

[0011] A lamp holder clamp A, located at one side of the fixing groove;

[0012] The lamp holder clamp B is located on the side of the lamp holder clamp A and is connected to the lamp holder clamp A through a hinge assembly and a locking mechanism.

[0013] A preferred embodiment of the present invention,

[0014] A reflective arc portion A is provided at the lower portion of the lamp holder clamp A;

[0015] A reflective arc portion B is provided at the lower portion of the lamp holder clamp B.

[0016] In a preferred embodiment of the present invention, the locking mechanism comprises:

[0017] A locking block is fixed on one side of the lamp holder clamp A, and a locking block positioning groove is provided in the middle of the locking block;

[0018] The positioning bead is fixed on one side of the lamp holder clamp B and is matched with the positioning groove of the locking block.

[0019] A preferred embodiment of the present invention,

[0020] The lamp holder clamp A and the lamp holder clamp B are both provided with N mounting holes.

[0021] In a preferred embodiment of the present invention, the fixing groove comprises:

[0022] A lamp tube penetration hole is provided at the lower end of the lamp holder positioning step member;

[0023] The lamp holder positioning hole is arranged at the upper end of the lamp holder positioning step member and is communicated with the lamp tube penetration hole.

[0024] A preferred embodiment of the present invention further includes:

[0025] A lamp cap limiting clamp block placement groove is provided on the side of the lamp cap clamp block assembly;

[0026] A lamp holder limiting clamp block, part of which passes through the upper end of the fixing groove and is connected to the lamp holder limiting clamp block placement groove via a spring baffle.

[0027] A preferred embodiment of the present invention,

[0028] The side of the lamp holder clamp assembly forms a parabola, and the parabola satisfies the following formula, specifically:

[0029] y=tanθ(xp / 2)

[0030] Wherein: y is the vertical coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, θ is the focal length of the parabola on the side of the lamp holder clamp assembly, x is the horizontal coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, and p is the inclination angle of the parabola on the side of the lamp holder clamp assembly.

[0031] A preferred embodiment of the present invention further includes:

[0032] A hinge positioning groove is provided above the middle of the side edge of the lamp holder clamping block assembly;

[0033] A fixing threaded hole is arranged inside the hinge positioning groove.

[0034] A preferred embodiment of the present invention,

[0035] The hinge assembly and the hinge positioning groove are fixedly connected by a fixing screw that passes through the hinge assembly and the fixing threaded hole.

[0036] Technical effects and advantages of the present invention:

[0037] (1) The lamp holder clamp assembly of the present invention can independently replace each damaged heating lamp group without removing the entire heating lamp assembly mounting substrate from the equipment chamber, which can not only reduce the downtime of the equipment, but also reduce the number of overall disassembly of the chamber, thereby improving the efficiency of the overall process manufacturing, and has the characteristics of simple disassembly and maintenance, low cost, and high safety;

[0038] (2) The lamp holder clamp assembly of the present invention can be an independent assembly, and the reflective arc portion at the bottom can be integrated with the reflective plate to form the entire reflective surface, thereby better compensating for the lack of regional temperature and asymmetric thermal field caused by the installation position of the lamp foot, meeting higher infrared heating uniformity requirements and having a large market demand. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a structural schematic diagram of the positioning chuck assembly of the present invention;

[0040] Figure 2 A side view of a positioning chuck assembly of the present invention;

[0041] Figure 3 It is a front view of the positioning chuck assembly of the present invention;

[0042] Figure 4 This is a front view of the lamp holder clamp A of the present invention;

[0043] Figure 5 It is a structural schematic diagram of the lamp holder clamp A of the present invention;

[0044] Figure 6A parabola schematic diagram of a positioning chuck assembly of the present invention;

[0045] Figure 7 This is a simulation diagram corresponding to the first set of experimental data of an embodiment of the present invention;

[0046] Figure 8 This is a simulation diagram corresponding to the second set of experimental data of an embodiment of the present invention;

[0047] Fig. 9 This is a simulation diagram corresponding to the third set of experimental data of an embodiment of the present invention;

[0048] Fig.10 This is a simulation diagram corresponding to the fourth set of experimental data of the embodiment of the present invention;

[0049] Fig.11 This is a simulation diagram corresponding to the fifth set of experimental data of the embodiment of the present invention;

[0050] Fig.12 This is a simulation diagram corresponding to the sixth set of experimental data of the embodiment of the present invention;

[0051] In the figure: 1. lamp holder clamp A; 101. reflective arc part A; 2. lamp holder clamp B; 201. reflective arc part B; 3. lamp holder positioning step; 301. lamp tube penetration hole; 4. hinge assembly; 401. fixing screw; 402. hinge positioning groove; 403; fixing threaded hole; 5. lamp holder limiting clamp placement groove; 6. spring baffle; 7. locking block; 701. locking block positioning groove; 8. positioning bead; 9. mounting hole; 10. lamp holder limiting clamp; 1001. lamp holder positioning hole. DETAILED DESCRIPTION

[0052] The specific embodiments of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0053] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0054] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0055] Example 1

[0056] refer to Figure 1-Figure 5 The present embodiment provides an extension-use arc-shaped infrared halogen heating lamp positioning chuck assembly, and the extension-use arc-shaped infrared halogen heating lamp positioning chuck assembly includes a lamp holder clamp block assembly, a lamp holder positioning step member 3, a hinge assembly 4 and a locking mechanism. A fixing groove is provided inside the lamp holder clamp block assembly, and the fixing groove runs through the middle of the lamp holder clamp block assembly. At the same time, lamp holder positioning step members 3 are provided on both sides of the middle of the fixing groove, so the fixing groove is divided into two parts, an upper part and an lower part, by the lamp holder positioning step member 3, that is, the upper part is the lamp holder positioning hole 1001, and the lower part is the lamp tube penetration hole 301, and the two are interconnected. It is worth noting that the hinge assembly 4 and the locking mechanism are respectively arranged on both sides of the lamp holder clamp block assembly, which are used to fix the two sides of the lamp holder clamp block assembly.

[0057] Specifically, the lamp holder clamp assembly includes a lamp holder clamp A1 and a lamp holder clamp B2, wherein the lamp holder clamp A1 and the lamp holder clamp B2 are respectively located on both sides of the fixing groove, and the lamp holder clamp A1 is located on the side of the lamp holder clamp B2, and one side of the lamp holder clamp A1 and the lamp holder clamp B2 are fixedly connected by a hinge assembly 4, and the other side is movably connected by a locking mechanism. At the same time, a plurality of mounting holes 9 are provided on the lamp holder clamp A1 and the lamp holder clamp B2, and they can be fixedly connected with external components through the mounting holes 9.

[0058] In this embodiment, the locking mechanism includes a locking block 7 and a positioning bead 8, wherein the locking block 7 is fixed to one side of the lamp holder clamp A1, and the side of the lamp holder clamp A1 on which the locking block 7 is installed faces the lamp holder clamp B2, and a locking block positioning groove 701 is provided in the middle of the locking block 7. The positioning bead 8 is fixed to one side of the lamp holder clamp B2, and the side of the lamp holder clamp B2 on which the positioning bead 8 is installed faces the lamp holder clamp A1, and the positioning bead 8 is matched with the locking block positioning groove 701. In other words, the lamp holder clamp A1 and the lamp holder clamp B2 are connected by inserting the positioning bead 8 into the locking block positioning groove 701.

[0059] refer to Figure 1-Figure 3As can be seen from the figure: a lamp holder limit clamp block seating groove 5 is provided on the lamp holder clamp block A1 and the lamp holder clamp block B2, and the lamp holder limit clamp block seating groove 5 is located in the middle of the lamp holder positioning hole 1001. At the same time, a lamp holder limit clamp block 10 is also installed at the lamp holder positioning hole 1001. It is worth noting that part of the lamp holder limit clamp block 10 passes through the lamp holder positioning hole 1001, and is connected to the lamp holder limit clamp block seating groove 5 through a spring baffle 6.

[0060] In this embodiment, the other side of the lamp holder clamp A1 and the lamp holder clamp B2 are connected by a hinge assembly 4. Specifically, a hinge positioning groove 402 is provided at the upper end of one side of the lamp holder clamp A1 and the lamp holder clamp B2, and the hinge positioning groove 402 on the lamp holder clamp A1 is completely symmetrical with the hinge positioning groove 402 on the lamp holder clamp B2. At the same time, a fixed threaded hole 403 is provided in the hinge positioning groove 402, and the hinge assembly 4 and the hinge positioning groove 402 are fixedly connected by a fixed screw 401 passing through the hinge assembly 4 and the fixed threaded hole 403. In other words, the side edges of the lamp holder clamp A1 and the lamp holder clamp B2 are connected by the connection between the hinge assembly 4 and the hinge positioning groove 402.

[0061] Specifically, after the lamp holder clamp A1 and the lamp holder clamp B2 are connected through the connection between the hinge assembly 4 and the hinge positioning groove 402, since a fixing groove is provided inside, it can be adapted to the arc-shaped infrared halogen heating lamp for extension use. The fixing groove is divided into an upper lamp holder positioning hole 1001 and a lower lamp tube penetration hole 301 by the lamp holder positioning step member 3, that is, the upper lamp holder positioning hole 1001 can be fixed with the positioning slot of the arc-shaped infrared halogen heating lamp, and the lower lamp tube penetration hole 301 can be fixed with the ceramic lamp cap of the arc-shaped infrared halogen heating lamp. Therefore, each damaged heating lamp group can be replaced independently without removing the entire heating lamp assembly mounting substrate from the equipment chamber, which can not only reduce downtime and the number of times the cavity is disassembled as a whole, and improve the efficiency of the overall process manufacturing, but also has simple disassembly and maintenance, low cost, and high safety.

[0062] Example 2

[0063] Embodiment 2 is designed to be an arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy, and its basic structure is the same as that of embodiment 1, except that Figure 1 and Figure 2 As can be seen from the figure, a reflective arc portion is disposed at the lower portion of the lamp holder clamp assembly. Specifically, a reflective arc portion A (101) is disposed at the lower portion of the lamp holder clamp A (1), and a reflective arc portion B (201) is disposed at the lower portion of the lamp holder clamp B (2). When the lamp holder clamp assembly is in a sealed state, a parabola is formed between the reflective arc portion A (101) and the reflective arc portion B (201), and the parabola satisfies the following formula, specifically:

[0064] y=tanθ(xp / 2)

[0065] Wherein: y is the vertical coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, θ is the focal length of the parabola on the side of the lamp holder clamp assembly, x is the horizontal coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, and p is the inclination angle of the parabola on the side of the lamp holder clamp assembly.

[0066] In this embodiment, by adjusting the focal length θ of the side parabola of the lamp holder clamping block assembly and the inclination angle p of the side parabola of the lamp holder clamping block assembly, the heating uniformity of the surface of the heated workpiece can be changed, which can be specifically explained by the following six sets of experimental data, specifically:

[0067] Experimental data table

[0068]

[0069]

[0070] refer to Figure 7-Figure 12 , as can be seen from the figure: Figure 7 The temperature difference in the Fig.12 The temperature difference fluctuation tends to be stable and is basically in a stable state. Since the arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy in this technical solution is used in the field of semiconductor film processing technology, the stability of the heating temperature is extremely high during the coating process of semiconductor workpieces. Any large temperature difference will affect the coating result. Therefore, in the process of designing the reflective arc, a large number of tests are required to perform repeated temperature difference comparisons to achieve the optimal coating temperature requirements.

[0071] In this embodiment, the lamp holder clamp assembly can be an independent assembly, and the reflective arc portion at its lower portion can be integrated with the reflective plate to form the entire reflective surface, thereby better compensating for the lack of regional temperature and thermal field asymmetry caused by the installation position of the lamp foot, thereby meeting higher infrared heating uniformity requirements.

[0072] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A circular arc infrared halogen heating lamp positioning chuck assembly for epitaxy, characterized in that: include: A lamp holder clamp block assembly, wherein a fixing groove is provided in the lamp holder clamp block assembly and the fixing groove passes through the lamp holder clamp block assembly; Lamp holder positioning step pieces, arranged in the middle of both sides of the fixing groove; A hinge assembly, fixed to one side of the lamp holder clamp assembly; A locking mechanism, fixed on the other side of the lamp holder clamp assembly; The lamp holder clamp assembly comprises a lamp holder clamp A and a lamp holder clamp B; The lamp holder clamp A is located on one side of the fixing groove; The lamp holder clamp B is located on the side of the lamp holder clamp A and is connected to the lamp holder clamp A through a hinge assembly and a locking mechanism; A reflective arc portion A is provided at the lower portion of the lamp holder clamp A; A reflective arc portion B is provided at the lower portion of the lamp holder clamp B.

2. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 1, characterized in that: The locking mechanism comprises: A locking block is fixed on one side of the lamp holder clamp A, and a locking block positioning groove is provided in the middle of the locking block; The positioning bead is fixed on one side of the lamp holder clamp B and is matched with the positioning groove of the locking block.

3. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 2, characterized in that: The lamp holder clamp A and the lamp holder clamp B are both provided with N mounting holes.

4. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 1, characterized in that: The fixing groove comprises: A lamp tube penetration hole is provided at the lower end of the lamp holder positioning step member; The lamp holder positioning hole is arranged at the upper end of the lamp holder positioning step member and is communicated with the lamp tube penetration hole.

5. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 1, 2 or 4, characterized in that: Also includes: A lamp cap limiting clamp block placement groove is provided on the side of the lamp cap clamp block assembly; A lamp holder limiting clamp block, part of which passes through the upper end of the fixing groove and is connected to the lamp holder limiting clamp block placement groove via a spring baffle.

6. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 5, characterized in that: The side of the lamp holder clamp assembly forms a parabola, and the parabola satisfies the following formula, specifically: y=tanθ(xp / 2) Wherein: y is the vertical coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, θ is the focal length of the parabola on the side of the lamp holder clamp assembly, x is the horizontal coordinate of the center position of the parabola on the side of the lamp holder clamp assembly, and p is the inclination angle of the parabola on the side of the lamp holder clamp assembly.

7. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 5, characterized in that: Also includes: A hinge positioning groove is provided above the middle of the side edge of the lamp holder clamping block assembly; A fixing threaded hole is arranged inside the hinge positioning groove.

8. The arc-shaped infrared halogen heating lamp positioning chuck assembly for epitaxy according to claim 7, characterized in that: The hinge assembly and the hinge positioning groove are fixedly connected by a fixing screw that passes through the hinge assembly and the fixing threaded hole.

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