Repeater device

Abstract

The application discloses a transfer device and belongs to the technical field of wafer manufacturing. The transfer device comprises a tray, a supporting piece and a lifting mechanism. The tray comprises a tray body and a lifting disc. A first accommodating groove is formed in the upper surface of the tray body. The lifting disc is accommodated in the first accommodating groove, and the top surface of the lifting disc is flush with or lower than the upper surface of the tray body. A first through hole is formed in the groove bottom of the first accommodating groove. The lifting disc is used for engaging products. The supporting piece is used for supporting the tray body. The lifting mechanism comprises a lifting driving piece and a lifting column arranged at the output end of the lifting driving piece. The lifting column vertically penetrates the first through hole and is engaged with the lifting disc. The application can solve the problem that the wafer bearing mode of the existing tray easily leads to wafer breakage or wafer picking failure.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer manufacturing, and in particular to a transfer device. BACKGROUND

[0002] In the process of wafer manufacturing, the wafer is often first loaded onto a tray, and then the tray carrying the wafer is transported into a reaction chamber to complete the relevant process production. After the reaction is completed in the reaction chamber, the tray is removed from the reaction chamber together with the wafer, and the wafer is then taken off the tray.

[0003] The existing way of loading the wafer on the tray is mostly to use a PIN needle. When the wafer needs to be loaded, the PIN needle is raised to pass through the PIN needle hole on the tray until it reaches above the tray loading surface. The wafer is placed on the PIN needle, and then the PIN needle is lowered until the wafer falls onto the tray, and the wafer loading is completed. The wafer taking process is opposite to the wafer loading process. However, the PIN needle is prone to wear and breakage, resulting in wafer loading and taking failure, and even wafer breakage in severe cases. SUMMARY

[0004] The purpose of the present application is to provide a transfer device which can solve the problem of wafer loading and taking failure or wafer breakage caused by the existing way of loading the wafer on the tray.

[0005] To achieve the above purpose, the following technical solutions are provided:

[0006] A transfer device comprises:

[0007] A tray comprises a tray body and a lifting disc. A first accommodating groove is formed on the upper surface of the tray body. The lifting disc is accommodated in the first accommodating groove, and the top surface of the lifting disc is flush with or lower than the upper surface of the tray body. A first through hole is formed in the groove bottom of the first accommodating groove. The lifting disc is used to engage the product.

[0008] A support member is used to support the tray body.

[0009] A lifting mechanism comprises a lifting driving member and a lifting column arranged at the output end of the lifting driving member. The lifting column vertically penetrates the first through hole and engages the lifting disc.

[0010] Further, the tray body is a circular structure, the lifting column is a cylindrical structure, and when the lifting column penetrates the first through hole, the lifting column coincides with the central axis of the tray body.

[0011] Further, the transfer device further comprises two follow-up structures, and each follow-up structure comprises:

[0012] A horizontal driving member, the driving direction of the horizontal driving member is along a first direction.

[0013] a mounting plate, provided at an output end of the horizontal driving member;

[0014] two rollers, provided on the mounting plate and spaced apart along a second direction, and the distance between the two rollers along the second direction is less than the outer diameter of the tray body, the first direction and the second direction are perpendicular in the horizontal plane; the rotation axis of the roller extends in the vertical direction, and the roller is used for rolling contact with the outer peripheral wall of the tray body;

[0015] The two follow-up structures are centrally symmetrically arranged with respect to the lifting column; the four rollers of the two follow-up structures are distributed in a rectangular shape, and the center of the rectangle is located on the central axis.

[0016] Further, a first negative pressure channel is formed in the lifting column, the first negative pressure channel is provided through the top end of the lifting column, and the lifting disc is adsorbed to the top end of the lifting column by the negative pressure in the first negative pressure channel.

[0017] Further, a second negative pressure channel is also formed in the lifting column, the second negative pressure channel is provided through the top end of the lifting column, a third negative pressure channel is formed through the lifting disc, when the lifting column and the lifting disc are engaged, the second negative pressure channel and the third negative pressure channel are in communication, and the product is adsorbed to the lifting disc by the negative pressure in the second negative pressure channel and the third negative pressure channel.

[0018] Further, a circular negative pressure groove is formed in the upper surface of the lifting disc, the third negative pressure channel penetrates upward to the groove bottom of the negative pressure groove; the third negative pressure channel is provided at least two, and the at least two third negative pressure channels are uniformly distributed along the circumference of the negative pressure groove.

[0019] Further, a converging groove is formed in the bottom end of the lifting disc, the third negative pressure channel penetrates downward to communicate with the converging groove, and the second negative pressure channel communicates with the third negative pressure channel through the converging groove.

[0020] Further, a first sealing member is arranged between the lifting column and the lifting disc, and the first sealing member is annularly arranged at the periphery of the joint between the first negative pressure channel and the lifting disc.

[0021] Further, a second sealing member is arranged between the lifting column and the lifting disc, and the second sealing member is annularly arranged at the periphery of the joint between the second negative pressure channel and the third negative pressure channel.

[0022] Further, the first sealing ring is arranged outside the second sealing ring to form a fourth negative pressure channel between the first sealing ring and the second sealing ring, and the first negative pressure channel and the fourth negative pressure channel are communicated.

[0023] Further, the upper surface of the tray body is further provided with a second accommodating groove for accommodating products, and the first accommodating groove is arranged at the groove bottom of the second accommodating groove.

[0024] Further, the first negative pressure channel is provided with a first switch valve and a second switch valve, the first switch valve is used for introducing negative pressure into the first negative pressure channel, and the second switch valve is used for introducing positive pressure into the first negative pressure channel.

[0025] Further, the second negative pressure channel is provided with a third switch valve and a fourth switch valve, the third switch valve is used for introducing negative pressure into the second negative pressure channel, and the fourth switch valve is used for introducing positive pressure into the second negative pressure channel.

[0026] Compared with the prior art, the present application has the following beneficial effects:

[0027] The transfer device sets the tray as a separable structure combined by a tray body and a lifting disc, and uses the lifting disc to engage with the wafer, and then realizes the selective separation between the lifting disc and the tray body through the lifting mechanism, and finally completes the taking and placing of the wafer on the tray body; the lifting disc can increase the contact area with the wafer, fully engage the wafer, and is not easy to wear, avoiding the wear and breakage of the PIN pin supporting the wafer in the prior art, and fully avoiding the failure of taking and placing the wafer and the phenomenon of wafer breakage. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is a structure schematic view of the transfer device in the embodiment of the present application when transferring products;

[0029] Figure 2 It is a front view of the transfer device in the embodiment of the present application when transferring products;

[0030] Figure 3 It is a schematic view of the overall structure of the transfer device in the embodiment of the present application;

[0031] Figure 4 It is an assembly schematic view of the tray and the lifting column in the embodiment of the present application;

[0032] Figure 5 It is a structure schematic view of the transfer device in the embodiment of the present application after removing the tray;

[0033] Figure 6 It is Figure 5 It is a local enlarged view of A in the embodiment of the present application;

[0034] Figure 7 Fig. 4 is a schematic view of the lifting disc after being disassembled in an embodiment of the present application;

[0035] Figure 8 Fig. 5 is a control schematic diagram of the transfer device in use in an embodiment of the present application.

[0036] Reference signs:

[0037] 100, product;

[0038] 10, machine table; 20, tray; 30, support; 40, lifting mechanism; 50, positioning mechanism;

[0039] 11, top plate; 21, tray body; 22, lifting disc; 31, support column; 41, lifting driving member; 42, lifting column; 51, follow-up structure;

[0040] 111, second through hole; 211, first through hole; 212, first accommodating groove; 213, second accommodating groove; 221, third negative pressure channel; 222, negative pressure groove; 223, converging groove; 421, first negative pressure channel; 422, second negative pressure channel; 423, first sealing member; 424, second sealing member; 425, fourth negative pressure channel; 511, horizontal driving member; 512, mounting plate; 513, roller. DETAILED DESCRIPTION

[0041] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0043] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0044] In the description of the application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings or the orientation or positional relationship commonly placed when the product of the application is used, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. In addition, the terms "first", "second", "third" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance. In the description of the application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0045] In the description of the application, it should be noted that, unless otherwise specified and limited, the terms "provided", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0046] In the present application, unless otherwise specified and limited, "on" or "under" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, "on", "above" and "above" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" of the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0047] The embodiments of the application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary, only for explaining the application, and cannot be understood as a limitation on the application.

[0048] The embodiment is to provide a transfer device for loading wafers onto a tray (i.e. wafer loading); after the tray carries the wafers, the tray is taken together to carry out relevant process production, after the relevant process is completed, the transfer device is used to unload the wafers from the tray (i.e. wafer unloading), that is, the transfer device plays a role of a transfer station, and the wafer loading and wafer unloading actions are carried out in the transfer station. In specific implementation, a mechanical arm is used to complete the wafer loading or wafer unloading action. Of course, the transfer device can be applied not only in the wafer manufacturing field, but also can be used for the wafer loading or wafer unloading transfer operation of any product which needs to be carried by a tray to carry out production processes, and the embodiment is described by taking wafers as main products.

[0049] As shown in Figures 1-4 The transfer device comprises a tray 20, a supporting piece 30 and a lifting mechanism 40; the tray 20 comprises a tray body 21 and a lifting disc 22, the upper surface of the tray body 21 is provided with a first accommodating groove 212, the lifting disc 22 is accommodated in the first accommodating groove 212, and the top surface of the lifting disc 22 is flush with or lower than the upper surface of the tray body 21; the groove bottom of the first accommodating groove 212 is provided with a first through hole 211; the lifting disc 22 is used for engaging the product 100; the supporting piece 30 is used for supporting the tray body 21; the lifting mechanism 40 comprises a lifting driving piece 41 and a lifting column 42 arranged at the output end of the lifting driving piece 41, and the lifting column 42 vertically penetrates the first through hole 211 and engages with the lifting disc 22.

[0050] The transfer device of the embodiment sets the tray 20 as a detachable structure combined by the tray body 21 and the lifting disc 22. When placing the wafer, the tray body 21 is first supported on the support 30 to keep relatively stable. The lifting driving member 41 drives the lifting column 42 to rise. The lifting column 42 penetrates the first through hole 211 and is engaged with the lifting disc 22. The lifting column 42 continues to rise and then stably rises with the lifting disc 22. The lifting disc 22 is separated from the tray body 21. The mechanical arm places the product 100 on the lifting disc 22. The lifting disc 22 is engaged with the product 100. The lifting driving member 41 drives the lifting column 42 to descend until the lifting disc 22 is seated in the first accommodating groove 212. At this time, the lifting column 42 is disengaged from the lifting disc 22. Since the top surface of the lifting disc 22 is flush with or lower than the upper surface of the tray body 21, the product 100 is supported by the tray body 21, and the tray body 21 completes the product 100 bearing. The lifting column 42 continues to descend below the first through hole 211, and the wafer placing action is completed. When taking the wafer, the tray body 21 bearing the product 100 is seated on the support 30. The lifting column 42 rises until it penetrates the first through hole 211 and is engaged with the lifting disc 22. The lifting column 42 continues to rise to separate the lifting disc 22 from the tray body 21. The lifting disc 21 is engaged with the product 100. The lifting column 42 continues to rise. The lifting disc 22 carries the product 100 upward away from the tray body 21. After reaching the target position, the product 100 is disengaged from the lifting disc 22. The mechanical arm can take away the product 100, and the wafer taking action is completed.

[0051] In summary, the transfer device of the embodiment can engage the wafer with the lifting disc 22 and selectively separate the lifting disc 22 from the tray body 21 through the lifting mechanism 40. Finally, the wafer is placed on the tray body 21. The lifting disc 22 can increase the contact area with the wafer, fully engage the wafer, and is not easy to wear and avoid the PIN pin supporting the wafer in the prior art, which is easy to wear and break. Therefore, the wafer placing and taking failure and the wafer breaking phenomenon are avoided.

[0052] Specifically, the tray body 21 and the first accommodating groove 212 are both circular structures, and the central axes of the two coincide, that is, the first accommodating groove 212 is arranged at the center of the tray body 21. Correspondingly, the lifting tray 22 is also a circular structure, and the central axis of the lifting tray 22 coincides with that of the tray body 21, so that the lifting tray 22 can be smoothly seated in or separated from the first accommodating groove 212 when the lifting tray 22 vertically ascends or descends. Optionally, the outer diameter of the lifting tray 22 is the same as the inner diameter of the first accommodating groove 212, so that the lifting tray 22 cannot be offset after being placed in the first accommodating groove 212, thereby ensuring the consistency of the position of the product 100 seated on the lifting tray 22 on the tray body 21. Generally, the wafer as the product 100 is circular, and the above arrangement helps to keep the center of the wafer on the central axis of the lifting tray 22 and the tray body 21 when the wafer is placed on the lifting tray 22 and the tray body 21. Optionally, the first through hole 211 is also circular.

[0053] Further, referring to Figure 3 and Figure 4 , the upper surface of the tray body 21 is further provided with a second accommodating groove 213 for accommodating the product 100; the first accommodating groove 212 is arranged at the groove bottom of the second accommodating groove 213. In order to ensure the stable placement of the product 100 on the tray body 21, the second accommodating groove 213 is arranged here to accommodate the product 100, and the product 100 cannot easily separate from the tray body 21 due to the stopping action of the groove wall of the second accommodating groove 213, thereby ensuring the stability of the tray body 21 carrying the product 100. Specifically, the second accommodating groove 213 is a circular structure matched with the product 100, and the inner diameter of the second accommodating groove 213 is the same as the outer diameter of the product 100.

[0054] Further, referring to Figures 1-3 , the transfer device further comprises a positioning mechanism 50 for positioning the position of the tray body 21, so that the position of the tray body 21 is kept consistent each time, thereby ensuring that the lifting column 42 can pass through the first through hole 211 each time, and the product 100 can be accurately placed in the corresponding second accommodating groove 213. Since the tray body 21 is a circular structure, the positioning mechanism 50 is used to keep the central axis of the tray body 21 at the same position each time. Optionally, the lifting column 42 is a cylindrical structure; therefore, when the lifting column 42 penetrates the first through hole 211, the central axis of the lifting column 42 should coincide with that of the tray body 21. In this embodiment, after the positioning of the tray body 21 is completed, the central axes of the lifting column 42, the tray body 21, the lifting tray 22, the first through hole 211, the first accommodating groove 212 and the second accommodating groove 213 all coincide.

[0055] Specifically, the positioning mechanism 50 comprises two follower structures 51; each follower structure 51 comprises a horizontal driving member 511, a mounting plate 512 and two rollers 513; the driving direction of the horizontal driving member 511 is along a first direction (that is, the horizontal direction of the tray body 21), and the two rollers 513 are arranged on the mounting plate 512 and are driven to rotate by the horizontal driving member 511.Figure 3 The mounting plate 512 is arranged at the output end of the horizontal driving member 511; two rollers 513 are arranged on the mounting plate 512 in the second direction and the spacing of the two rollers 513 in the second direction (i.e. the middle Y direction) is less than the outer diameter of the tray body 21, and the first direction is perpendicular to the second direction in the horizontal plane; the rotation axis of the roller 513 extends in the vertical direction, and the roller 513 is used to rollingly contact the outer peripheral wall of the tray body 21. Figure 3

[0056] Specifically, when the tray body 21 is placed on the support 30, the position thereof may be offset relative to the positioning position, at which time the horizontal driving member 511 drives the mounting plate 512 to move towards the tray body 21 in the first direction until the roller 513 contacts the outer peripheral wall of the tray body 21, and the roller 513 further pushes the tray body 21 to move horizontally, thereby performing fine adjustment of the position. Since the roller 513 and the outer peripheral wall of the tray body 21 roll relative to each other, the contact between the roller 513 and the tray body 21 is at most linear contact, and the tray body 21 is pushed to move while not being excessively limited in movement. Specifically, the follower structure 51 is provided in two, and the two follower structures 51 are arranged in central symmetry relative to the lifting column 42; that is, the two follower structures 51 are located on the same radial of a virtual circle, and the center of the virtual circle is located on the central axis of the lifting column 42. Further, the four rollers 513 of the two follower structures 51 are distributed in a rectangle, and the center of the rectangle is located on the central axis of the lifting column 42. It is not difficult to understand that, since the spacing between the two rollers 513 on the same mounting plate 512 is less than the outer diameter of the tray body 21, when the horizontal driving members 511 on both sides simultaneously drive the mounting plate 512 to move horizontally towards the tray body 21, the tray 20 can be continuously adjusted in position until the four rollers 513 simultaneously contact the tray body 21, at which time the two follower structures 51 are also arranged in central symmetry relative to the central axis of the tray body 21, that is, the central axis of the tray body 21 coincides with the central axis of the lifting column 42, the positioning of the tray body 21 is completed, and the tray body 21 is stably clamped between the four rollers 513. After the tray 20 is loaded with the product 100, the horizontal driving member 511 drives the roller 513 to move away from the tray body 21, thereby releasing the clamping of the tray body 21, and the tray 20 as a whole can be taken away by the transfer device.

[0057] Specifically, referring to Figures 4-6 , the first negative pressure passage 421 is arranged in the lifting column 42 and penetrates the top end of the lifting column 42, and the lifting disc 22 is adsorbed to the top end of the lifting column 42 by negative pressure in the first negative pressure passage 421. That is, the engagement between the lifting column 42 and the lifting disc 22 is achieved by negative pressure, and the negative pressure adsorption method is simple and fast, and also does not damage the adsorbed object.

[0058] ​Further, referring to Figures 4-7 The second negative pressure passage 422 is arranged through the top end of the lifting column 42, and the third negative pressure passage 221 is arranged through the lifting disc 22. When the lifting column 42 is engaged with the lifting disc 22, the second negative pressure passage 422 is in communication with the third negative pressure passage 221, and the product 100 is adsorbed on the lifting disc 22 by the negative pressure in the second negative pressure passage 422 and the third negative pressure passage 221. That is, the engagement between the product 100 and the lifting disc 22 is also achieved by the negative pressure, and the product 100 is not damaged. Moreover, the negative pressure can be transmitted from the second negative pressure passage 422 to the third negative pressure passage 221, and the related components for controlling the negative pressure can be arranged on the lifting column 42 instead of the lifting disc 22, so that the cooperation between the lifting disc 22 and the tray body 21 is not interfered.

[0059] Specifically, the upper surface of the lifting disc 22 is provided with a circular negative pressure groove 222, and the third negative pressure passage 221 is arranged upwardly through the groove bottom of the negative pressure groove 222. The third negative pressure passage 221 is arranged in at least two, and the at least two third negative pressure passages 221 are uniformly distributed along the circumference of the groove. The circular negative pressure groove 222 can improve the adsorption effect between the lifting disc 22 and the product 100. The plurality of third negative pressure passages 221 are arranged and uniformly distributed along the circumference, so that the adsorption force on the product 100 is more sufficient and uniform, which helps to stably hold the product 100 on the lifting disc 22. Specifically, the inner diameter of the circular negative pressure groove 222 is defined as R1, the outer diameter is defined as R2, and the pressure in the negative pressure groove 222 is defined as P1. The adsorption force F1 of the negative pressure groove 222 on the product 100 is The adsorption force F1 of the negative pressure groove 222 on the product 100 can be adjusted by changing the specific values of R1 and R2.

[0060] Further, the bottom end of the lifting disc 22 is provided with a flow collection groove 223, the third negative pressure passage 221 is arranged downwardly through the flow collection groove 223, and the second negative pressure passage 422 is in communication with the third negative pressure passage 221 through the flow collection groove 223. The flow collection groove 223 makes the communication between the plurality of third negative pressure passages 221 and the second negative pressure passage 422 more convenient. The flow collection groove 223 also has the function of flow stabilization. The airflow delivered by the second negative pressure passage 422 is stabilized in the flow collection groove 223, and then uniformly and stably transmitted to each third negative pressure passage 221, so as to improve the adsorption effect.

[0061] For example, the first seal 423 is arranged between the lifting column 42 and the lifting disc 22, and is annularly arranged at the periphery of the joint between the first negative pressure channel 421 and the lifting disc 22, so as to ensure that the negative pressure does not leak when the lifting column 42 is jointed to the lifting disc 22, and to ensure the smooth adsorption of the lifting disc 22 to the product 100. Further, the second seal 424 is also arranged between the lifting column 42 and the lifting disc 22, and is annularly arranged at the periphery of the joint between the second negative pressure channel 422 and the third negative pressure channel 221. The second seal 424 is arranged to ensure that the negative pressure is not leaked when transmitted between the joint between the second negative pressure channel 422 and the third negative pressure channel 221, and to ensure the smooth adsorption of the lifting disc 22 to the product 100. Specifically, the first seal 423 and the second seal 424 can be selected as a sealing ring.

[0062] Optionally, referring to Figure 6 , the first seal 423 is annularly arranged at the periphery of the second seal 424, so that the fourth negative pressure channel 425 is formed between the first seal 423 and the second seal 424, and the first negative pressure channel 421 is in communication with the fourth negative pressure channel 425. In this embodiment, the second negative pressure channel 422 is arranged at the central axis of the lifting column 42, and the third negative pressure channel 221 is arranged at the central axis of the lifting disc 22, so that the second seal 424 is annularly arranged at the periphery of the central axis of the lifting column 42. The first negative pressure channel 421 is arranged away from the central axis of the lifting column 42, so that the first seal 423 is annularly arranged at the periphery of the central axis of the lifting column 42, and is annularly arranged at the periphery of the second seal 424. In this way, the fourth negative pressure channel 425 is annularly formed between the first seal 423 and the second seal 424, and the negative pressure in the first negative pressure channel 421 can be transmitted to the entire fourth negative pressure channel 425, so as to improve the adsorption effect of the lifting disc 22. Specifically, the first seal 423 and the second seal 424 can be circular structures, and the central axes of the first seal 423 and the second seal 424 coincide with the central axis of the lifting column 42.

[0063] In this embodiment, referring to Figure 6 , the fourth negative pressure channel 425 is a circular ring structure, and the inner diameter of the fourth negative pressure channel 425 is R3, the outer diameter is R4, and the pressure in the fourth negative pressure channel 425 is p2. The adsorption force of the fourth negative pressure channel 425 to the lifting disc 22 is Since the pressure received by the lifting disc 22 includes not only the negative pressure of the fourth negative pressure channel 425, but also the negative pressure received by the product 100, the pressure F2 received by the lifting disc 22 is By changing the specific values of R1, R2, R3, and R4, the size of the pressure F2 received by the lifting disc 22 can be adjusted.

[0064] Optionally, referring to Figure 5The support 30 comprises a plurality of support columns 31 extending in the vertical direction, and the tray body 21 is supported on the top ends of the plurality of support columns 31. In this embodiment, the support columns 31 are provided in four. Further, the top surfaces of the support columns 31 are arc-shaped in structure, so as to reduce the contact area with the tray body 21, to play a supporting role while reducing friction, and to avoid the tray body 21 from being blocked from moving during positioning. In specific implementation, the top surfaces of the support columns 31 can be provided in a hemispherical structure.

[0065] Further, referring to Figure 1 、 2 and 5, the transfer device further comprises a machine table 10, and the lifting mechanism 40, the support 30 and the follower structure 51 are all arranged on the machine table 10. Optionally, the machine table 10 is a hollow frame structure, and the support 30 and the follower structure 51 are arranged on the top plate 11 of the machine table 10. Further, the top plate 11 of the machine table 10 is provided with a second through hole 111, and the lifting column 42 is arranged in the second through hole 111, so that the lifting column 42 can be partially accommodated in the hollow space of the machine table 10, thereby compressing the height dimension of the entire transfer device and improving the compactness of the device.

[0066] Optionally, the horizontal driving member 511 and the lifting driving member 41 can be a gas cylinder or a combination structure of a linear motor and a screw rod guide rail. Specifically, the lifting driving member 41 is fixed to the top plate 11 through a fixing bracket. In this embodiment, the fixing bracket is fixed to the lower surface of the top plate 11, so that the lifting driving member 41 can also be partially accommodated in the second through hole 111, further compressing the occupied space of the lifting mechanism in the vertical direction; and the lifting stroke of the lifting column 42 can be fully utilized for the lifting operation of the lifting disc 22.

[0067] In specific implementation, referring to Figure 8 , a first switch valve and a second switch valve are arranged on the first negative pressure passage 421, the first switch valve is used for introducing negative pressure into the first negative pressure passage 421, and the second switch valve is used for introducing positive pressure into the first negative pressure passage 421; and a first pressure gauge is further arranged on the first negative pressure passage 421, and is used for measuring the pressure value in the first negative pressure passage 421. When the lifting column 42 needs to be engaged with the lifting disc 22, the first switch valve is opened, the second switch valve is closed, and negative pressure is introduced; when the lifting column 42 needs to be disengaged from the lifting disc 22, the first switch valve is closed, the second switch valve is opened, and positive pressure is introduced into the first negative pressure passage 421 until there is no pressure difference between the transfer device and the environment, so that the lifting disc 22 and the lifting column 42 are disengaged; and the pressure value in the first negative pressure passage 421 can be understood in real time through the first pressure gauge, so as to determine the engagement state between the lifting disc 22 and the lifting column 42.

[0068] The third switch valve is configured to introduce negative pressure into the second negative pressure channel 422, and the fourth switch valve is configured to introduce positive pressure into the second negative pressure channel 422. When the lifting disc 22 needs to be engaged with the product 100, the third switch valve is opened, the fourth switch valve is closed, and negative pressure is introduced. When the lifting disc 22 needs to be disengaged from the product 100, the third switch valve is closed, the fourth switch valve is opened, and positive pressure is introduced into the second negative pressure channel 422 until there is no pressure difference between the environment of the transfer device and the lifting disc 22 and the product 100 are disengaged. The pressure value in the second negative pressure channel 422 can be obtained in real time through the second pressure gauge, and the engagement state between the lifting disc 22 and the product 100 can be determined.

[0069] Further, the transfer device further comprises a robot sensor in communication with the third switch valve, configured to transmit signals to the robot to facilitate the action of the robot. Specifically, when the third switch valve is opened, it indicates that the lifting disc 22 needs to adsorb the product 100 and needs to perform a film placing operation. At this time, the robot receives a signal and places the product 100 on the lifting disc 22 from the outside. When the third switch valve is closed, it indicates that the lifting disc 22 needs to be disengaged from the product 100 and needs to perform a film taking operation. The robot receives a signal and removes the product 100 from the lifting disc 22.

[0070] The transfer device further comprises a first position sensor and a second position sensor, and the first position sensor is located above the second position sensor. When the lifting column 42 moves to the highest position, the first position sensor is triggered, and the first position sensor sends a signal that the lifting column 42 is in the high position. When the lifting column 42 moves to the lowest position, the second position sensor is triggered, and the second position sensor sends a signal that the lifting column 42 is in the low position. The position signal of the lifting column 42 can provide a reference for implementing related actions.

[0071] In specific implementation, the third switch valve and the first switch valve can be controlled by the same pressure control valve, or can be controlled by different pressure control valves. In the present embodiment, the former is selected.

[0072] In one embodiment, the second switch valve is configured to selectively connect the first negative pressure channel 421 and the atmosphere, and the fourth switch valve is configured to selectively connect the second negative pressure channel 422 and the atmosphere, i.e., the entire transfer device is placed in an atmospheric environment for use. At this time, the atmospheric pressure is the positive pressure. In another embodiment, with reference to Figure 8The whole transfer device is placed in a closed chamber with a certain negative pressure, and a third pressure gauge is used to detect the negative pressure value p3 in the closed chamber. The negative pressure value is smaller than the negative pressure in the first negative pressure channel 421 and the second negative pressure channel 422, and thus it can be considered as "positive pressure" relative to the pressure in the first negative pressure channel 421 and the second negative pressure channel 422. At this time, the second switch valve selectively connects the first negative pressure channel 421 and the closed chamber, and the fourth switch valve selectively connects the second negative pressure channel 422 and the closed chamber. In this case, the adsorption force F1 of the negative pressure groove 222 to the product 100 is And the provided pressure F2 on the lifting disc 22 is Here, the gravity of the product 100 and the lifting disc 22 itself is ignored.

[0073] It is noted that the above only describes the preferred embodiments of the present application and the technical principles applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and those skilled in the art can make various obvious changes, re-adjustments and substitutions without departing from the scope of the present application. Therefore, although the present application has been described in detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the appended claims.

Claims

1. A transfer device, characterized in that: include: A tray (20) comprises a tray body (21) and a lifting tray (22), wherein the upper surface of the tray body (21) is provided with a first receiving groove (212), the lifting tray (22) is accommodated in the first receiving groove (212), and the top surface of the lifting tray (22) is flush with or lower than the upper surface of the tray body (21); a first through hole (211) is provided at the bottom of the first receiving groove (212); the lifting tray (22) is used for engaging a product (100); A support member (30) for supporting the tray body (21); The lifting mechanism (40) includes a lifting drive member (41) and a lifting column (42) provided at the output end of the lifting drive member (41). The lifting column (42) vertically passes through the first through hole (211) and engages with the lifting plate (22). The tray body (21) is a circular structure, the lifting column (42) is a cylindrical structure, and when the lifting column (42) passes through the first through hole (211), the lifting column (42) coincides with the central axis of the tray body (21). The transfer device further comprises two follower structures (51), wherein the follower structures (51) comprise: A horizontal driving member (511), wherein the driving direction of the horizontal driving member (511) is along a first direction; A mounting plate (512) is provided at the output end of the horizontal driving member (511); Two rollers (513) are arranged on the mounting plate (512) at intervals along a second direction, and the spacing between the two rollers (513) along the second direction is smaller than the outer diameter of the tray body (21), and the first direction and the second direction are perpendicular in a horizontal plane; the rotation axis of the rollers (513) extends in a vertical direction, and the rollers (513) are used to roll in contact with the outer peripheral wall of the tray body (21); Two follower structures (51) are provided, and the two follower structures (51) are centrally symmetrically arranged relative to the lifting column (42); the four rollers (513) of the two follower structures (51) are distributed in a rectangular shape, and the center of the rectangle is located on the central axis.

2. The transfer device according to claim 1, characterized in that: A first negative pressure channel (421) is provided in the lifting column (42), and the first negative pressure channel (421) is arranged to pass through the top end of the lifting column (42), and the lifting plate (22) is adsorbed on the top end of the lifting column (42) by the negative pressure in the first negative pressure channel (421).

3. The transfer device according to claim 2, characterized in that: A second negative pressure channel (422) is also provided in the lifting column (42), and the second negative pressure channel (422) is arranged to pass through the top end of the lifting column (42). A third negative pressure channel (221) is provided to pass through the lifting plate (22). When the lifting column (42) is engaged with the lifting plate (22), the second negative pressure channel (422) is connected to the third negative pressure channel (221), and the product (100) is adsorbed on the lifting plate (22) through the negative pressure in the second negative pressure channel (422) and the third negative pressure channel (221).

4. The transfer device according to claim 3, characterized in that: A circular negative pressure groove (222) is provided on the upper surface of the lifting plate (22), and the third negative pressure channel (221) extends upward to the bottom of the negative pressure groove (222); at least two third negative pressure channels (221) are provided, and at least two third negative pressure channels (221) are evenly distributed along the circumference of the negative pressure groove (222).

5. The transfer device according to claim 3, characterized in that: A confluence groove (223) is provided at the bottom end of the lifting plate (22), the third negative pressure channel (221) extends downwardly through the confluence groove (223) and is connected to the third negative pressure channel (221), and the second negative pressure channel (422) is connected to the third negative pressure channel (221) through the confluence groove (223).

6. The transfer device according to claim 3, characterized in that: A first sealing member (423) is further provided between the lifting column (42) and the lifting plate (22), and the first sealing member (423) is arranged around the periphery of the junction between the first negative pressure channel (421) and the lifting plate (22).

7. The transfer device according to claim 6, characterized in that: A second sealing member (424) is provided between the lifting column (42) and the lifting plate (22), and the second sealing member (424) is arranged around the periphery of the junction of the second negative pressure channel (422) and the third negative pressure channel (221).

8. The transfer device according to claim 7, characterized in that: The first sealing member (423) is arranged around the periphery of the second sealing member (424) so ​​that a fourth negative pressure channel (425) is formed between the first sealing member (423) and the second sealing member (424), and the first negative pressure channel (421) is connected to the fourth negative pressure channel (425).

9. The transfer device according to any one of claims 1 to 8, characterized in that: The upper surface of the tray body (21) is further provided with a second accommodating groove (213) for accommodating the product (100); the first accommodating groove (212) is provided at the bottom of the second accommodating groove (213).

10. The transfer device according to claim 2, characterized in that: A first switch valve and a second switch valve are provided on the first negative pressure channel (421), wherein the first switch valve is used for introducing negative pressure into the first negative pressure channel (421), and the second switch valve is used for introducing positive pressure into the first negative pressure channel (421).

11. The transfer device according to claim 3, characterized in that: A third switch valve and a fourth switch valve are provided on the second negative pressure channel (422), the third switch valve is used to introduce negative pressure into the second negative pressure channel (422), and the fourth switch valve is used to introduce positive pressure into the second negative pressure channel (422).

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