A pressure regulating plate, an installation method, and a wafer transfer device

Abstract

The present invention discloses a pressure regulating plate, an installation method and a wafer transfer device. The pressure regulating plate includes two fixed side plates that are parallel and spaced apart. Above the two fixed side plates, a number of spliceable plate bodies are jointly provided. The plate bodies can slide along the fixed side plates and are detachably connected to the fixed side plates. The plate bodies are defined on the fixed side plates by fixing components, and the fixing components can limit the plate bodies in the front-back, left-right and up-down directions. The fixing components can quickly define the positions of the plate parts through a plurality of limiting parts, and can quickly disassemble the plate parts from the fixed side plates. At the same time, the plurality of limiting parts cooperate with each other to limit the plate parts in all directions, prevent the plate parts from shaking in all directions, and improve the stability.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and particularly to a pressure regulating plate, an installation method, and a wafer transfer device. Background Art

[0002] Semiconductor processing equipment usually includes a wafer transfer device (Equipment Front End Module, EFEM). The wafer transfer device is mainly used for automatic conveying and loading / unloading of wafers. The EFEM usually includes multiple separate and independent components or sub-devices such as a robot arm, a pre-alignment mechanism, a load port assembly, a fan / filter unit, etc. At the same time, as a component of semiconductor processing equipment, the EFEM will also collect signals from various field-level devices of the semiconductor processing equipment during the working process and participate in the control.

[0003] Due to environmental requirements, the EFEM usually includes a housing. An FFU (High Efficiency Filter) part is arranged at a position close to the top of the housing. Multiple FFUs for air filtration are arranged inside the FFU part. The bottom of the FFU part and the housing form a sorting chamber. A pressure regulating plate is arranged inside the sorting chamber. The air blown out by the FFU part passes through the pressure regulating plate and then blows into the operation area for wafer operation below. The pressure regulating plate is fixed at the middle position of the sorting chamber and is composed of multiple plate bodies spliced together. Through holes for gas to pass through are arranged on the plate bodies.

[0004] The air pressure of the EFEM is determined by the aperture of the through holes on the plate bodies. The smaller the aperture, the greater the air pressure of the EFEM. In order to adjust the air pressure inside the EFEM, it is often necessary to replace or clean the pressure regulating plate according to actual needs. The existing pressure regulating plates are usually directly connected by screws, which brings great inconvenience to disassembly and replacement.

[0005] At the same time, some EFEMs are equipped with a wafer alignment device, and the wafer alignment device is often fixed on the pressure regulating plate. A robot arm is arranged inside the sorting chamber, and the robot arm can carry the wafer to the wafer alignment device. Since the accuracy requirements of the wafer alignment device are high, it is required that the robot arm does not interfere with the wafer alignment device during the process of carrying the wafer. This puts forward higher requirements for the stability of the pressure regulating plate, and it is necessary to ensure that the pressure regulating plate is always stable and does not shake. Summary of the Invention

[0006] To overcome the above-mentioned drawbacks, the purpose of the present invention is to provide a pressure regulating plate. Through the setting of multiple limiting parts, the positions of the plate parts can be quickly limited, and the plate parts can be quickly disassembled from the fixed side plates. At the same time, the multiple limiting parts cooperate with each other to limit the plate parts in all directions, prevent the plate parts from shaking in all directions, and improve the stability.

[0007] To achieve the above object, the technical solution adopted by the present invention is: a regulating plate, comprising two fixed side plates arranged in parallel, above the two fixed side plates, a plurality of plate bodies are jointly arranged, and the plate bodies are limited by fixing components, and it is characterized in that: the fixing components include

[0008] a limiting part C, the limiting part C is distributed at intervals along the length direction of the fixed side plate, the limiting part C includes a first limiting surface and a second limiting surface, the first limiting surface, the second limiting surface and the upper end surface of the fixed side plate define a slot C for the side of the plate body to be inserted and slide, the plate body is located between the slot Cs on the two fixed side plates, the first limiting surface is parallel to the upper end surface of the fixed side plate, and the second limiting surface is perpendicular to the first limiting surface;

[0009] a limiting part B, the limiting part B is located between adjacent plate bodies, the limiting part B includes an inclined surface B, the limiting part B is fixed on one plate body, and the adjacent plate body has a first folded edge that can abut against the inclined surface B, and the inclined surface B provides a pressure in the vertical direction and the horizontal direction along the sliding of the plate body for the plate body abutting against it.

[0010] The beneficial effects of the present invention are as follows: The limiting part C limits the position of the upper end surface of the plate body, that is, limits the plate body in the Z direction, reducing the shaking of the plate body in the Z direction. At the same time, since the limiting part C is fixed on the fixed side plates on both sides of the plate body, the plate body is limited in the Y direction, reducing the shaking of the plate body in the Y direction. At the same time, in order to improve the connection stability between the plate bodies, the adjacent plate bodies can be tightened by the limiting part B located between them. The inclined surface B provides a pressing force in the X direction for the plate body, and at the same time provides an upward supporting force for the plate body, and the plate body is restricted by the limiting part C, limiting the upward distance of the plate body. That is, the plate body is limited in the three directions of X, Y and Z to achieve fixation, which can effectively prevent the regulating plate from shaking in each direction and enhance the stability of the regulating plate. At the same time, multiple plate bodies can slide in the slot, which is convenient for disassembly. The plate bodies form a modular structure, and the modular installation is convenient for quick disassembly, installation and replacement.

[0011] Furthermore, the vertical distance between the first limiting surface and the upper end surface of the fixed side plate is not less than the thickness of the plate body; the vertical distance between the second limiting surface on one fixed side plate and the second limiting surface on the other fixed side plate is not less than the width of the plate body.

[0012] When the vertical distance between the first limiting surface and the fixed side plate is equal to the thickness of the plate body, the best limiting effect on the plate body is achieved. In this way, the height of the slot C matches the plate body, reducing the wobbling of the plate body in the Z direction. When the vertical distance between the second limiting surfaces on the fixed side plates is equal to the width of the plate body in the Y direction, the best limiting effect on the plate body is achieved, and the two sides of the plate body are directly abutted against the two second limiting surfaces, reducing the wobbling of the plate body in the Y direction.

[0013] Furthermore, the first limiting surface and the second limiting surface are arranged on a limiting part C. The limiting part C includes a fixed part C and a limiting part C which are vertically arranged. The fixed part C is placed on the upper end surface of the fixed side plate, and the limiting part C is arranged parallel to the fixed side plate. The surface of the limiting part C facing the fixed side plate is the first limiting surface, and the vertical side surface of the fixed part C perpendicular to the first limiting part is the second limiting surface. The limiting part C is an integral part, which is convenient for installation and forms a modularization.

[0014] Furthermore, both sides of the first limiting surface along the horizontal direction of the sliding of the plate body are connected with inclined surfaces C. The inclined surfaces C are inclined away from the fixed side plate in the vertical direction along the first limiting surface. The setting of the inclined surfaces C forms a flared structure, which is convenient for the insertion of the plate body.

[0015] Furthermore, first flanges are bent downward on both sides of the plate body perpendicular to its sliding direction. The first flanges are located between the two fixed side plates. The first flanges include a vertical portion and a horizontal portion. The inclined surface B abuts against the junctions of the vertical portion and the horizontal portion of the first flanges.

[0016] Furthermore, the limiting part B includes a fixed part B and a pressing part B which are vertically arranged. The fixed part B is fixed on the vertical portion of the first flange, and the inclined surface B is arranged on the upper end surface of the pressing part B. The inclined surface B is inclined upward from far away from the fixed part B to close to the fixed part B. The limiting part B is an integral part, which is convenient for installation and forms a modularization.

[0017] Furthermore, the outermost plate body is fixed to a fixed side plate by bolts, and limiting holes matching the bolts are provided on the plate body; the limiting holes are waist-shaped holes, and the waist-shaped holes are arranged along the sliding direction of the plate body. The bolts located in the limiting holes realize the final positioning of the spliced plate body in the X direction. When the plate parts need to be disassembled, the bolts in the limiting holes are directly removed, and then the plate parts can be pulled out.

[0018] Furthermore, the fixing component further includes a limiting part A. The plate body includes a wide plate and a narrow plate with different widths, and both sides of the narrow plate are wide plates. A notch corresponding to the narrow plate is formed on one of the fixed side plates. The limiting part A is arranged at the notch and fixedly connected to the wide plates on both sides of the narrow plate. The limiting part A is used for clamping the narrow plate;

[0019] The limiting part A includes a third limiting surface, a fourth limiting surface and a fifth limiting surface. The third limiting surface and the fifth limiting surface are both parallel to the upper end surface of the narrow plate, and the third limiting surface and the fifth limiting surface are respectively located on the upper and lower sides of the narrow plate; the fourth limiting surface is perpendicular to the third limiting surface and parallel to the second limiting surface.

[0020] For plate members with different widths, it is necessary for the limiting part A to limit the narrow plate at the notch of the fixed side plate to improve the stability of the narrow plate, and further improve the stability of the entire pressure regulating plate.

[0021] Furthermore, a second folded edge bent downward is provided on one side of the narrow plate located at the notch. The limiting part A further includes a sixth limiting surface that can abut against the lower end surface of the second folded edge. The horizontal part of the second folded edge (i.e., the lower end surface of the second folded edge) is directly placed on the sixth limiting surface, and the sixth limiting surface lifts the horizontal part of the second folded edge, increasing the supporting force for the narrow plate.

[0022] Furthermore, the limiting part A includes a fixing part A. Two spaced baffles a and b extend upward along the upper end surface of the fixing part A. An ear is extended from the end of the baffle b far away from the fixing part A, and the ear is parallel to the fixing part A; a slot A for inserting the second folded edge is defined between the fixing part A, the baffle b and the ear. The second folded edge is inserted into the slot A and is limited within the slot A; the opposite surfaces of the fixing part A and the ear are respectively the sixth limiting surface and the fifth limiting surface, the side of the baffle b facing the baffle a is the fourth limiting surface, and the end surface of the baffle a far away from the fixing part A is the third limiting surface. The limiting part A is an integral part, which is convenient for installation and forms a modularization.

[0023] Furthermore, the vertical distance between the third limiting surface and the fifth limiting surface is not less than the thickness of the narrow plate, that is, the narrow plate is limited between the third limiting surface and the fifth limiting surface in the Z direction. When the vertical distance between the third limiting surface and the fifth limiting surface is equal to the thickness of the narrow plate, the limiting effect on the narrow plate is the best.

[0024] The vertical distance between the sixth limiting surface and the fifth limiting surface is not less than the height of the second folded edge.

[0025] Furthermore, one side of the fifth limiting surface is connected with an inclined surface A, and the inclined surface A is inclined away from the narrow plate along the fifth limiting surface in the vertical direction. The setting of the inclined surface A forms a flared structure, which is convenient for the insertion of the narrow plate.

[0026] The present invention also discloses an installation method of a pressure regulating plate for installing the above-mentioned pressure regulating plate, which is characterized by including the following steps:

[0027] A plurality of limiting parts C are arranged in the length direction of the two fixed side plates, and a slot C is defined between the limiting parts C and the fixed side plates;

[0028] The wide plate is inserted from the slot C, and the end of the wide plate inserted first abuts against the shell to achieve limiting;

[0029] Continue to insert the wide plate from the slot C. The later inserted wide plate is fixed with a limiting part B, and the limiting part B has an inclined surface B. The inclined surface B abuts against the first folded edge of the previously inserted wide plate. When pushing the later inserted wide plate, the inclined surface B provides a pre-tightening force for the previously inserted wide plate;

[0030] When it is necessary to insert the narrow plate, a limiting part A is fixed on the wide plate adjacent to the narrow plate, and a slot A is formed by limiting on the limiting part A. One side plate of the narrow plate slides along the slot C, and the second folded edge of the narrow plate is inserted into the slot A;

[0031] When the last wide plate is inserted from the slot C, the last inserted wide plate is fixed to a fixed side plate through a bolt.

[0032] The present invention also discloses a wafer transfer device, which includes a shell, and the above-mentioned pressure regulating plate is arranged in the shell. Description of the Drawings

[0033] Figure 1 It is a schematic structural diagram and a partial enlarged view of a pressure regulating plate in the prior art;

[0034] Figure 2 It is a schematic structural diagram of another angle and a partial enlarged view of a pressure regulating plate in the prior art;

[0035] Figure 3 It is a three-dimensional structural diagram and a partial enlarged view of an embodiment of the present invention;

[0036] Figure 4 It is a three-dimensional structural diagram of another angle of an embodiment of the present invention;

[0037] Figure 5 It is Figure 4 The enlarged view at A in;

[0038] Figure 6 It is a side view of an embodiment of the present invention;

[0039] Figure 7 This is a three-dimensional structural schematic diagram of the limit part C in the embodiment of the present invention;

[0040] Figure 8 This is a three-dimensional structural schematic diagram of the limit part B in the embodiment of the present invention;

[0041] Figure 9 This is a side view of the limit part B in the embodiment of the present invention;

[0042] Figure 10 This is a schematic diagram of the connection structure between the limit part B and the plate body in the embodiment of the present invention;

[0043] Figure 11 This is a three-dimensional structural schematic diagram of the limit part A in the embodiment of the present invention;

[0044] Figure 12 This is a three-dimensional structural schematic diagram of the limit part A from another angle in the embodiment of the present invention;

[0045] Figure 13 This is a schematic diagram of the connection structure between the limit part A and the narrow plate in the embodiment of the present invention.

[0046] In the figure:

[0047] 1. Fixed side plate; 2. Limit part C; 21. Fixed part C; 211. Bolt hole C; 212. Second limit surface; 22. Limit part C; 221. Inclined surface C; 222. First limit surface; 23. Slot C; 3. Limit part B; 31. Fixed part B; 311. Bolt hole B; 32. Tightening part B; 321. Inclined surface B; 4. Limit part A; 41. Fixed part A; 411. Bolt hole A; 412. Sixth limit surface; 42. Baffle a; 421. Third limit surface; 43. Baffle b; 431. Fourth limit surface; 44. Hanging ear; 441. Fifth limit surface; 442. Inclined surface A; 45. Slot A; 51. Wide plate; 511. First folded edge; 512. Limit hole; 52. Narrow plate; 521. Second folded edge. Detailed implementation manners

[0048] The following elaborates on the preferred embodiments of the present invention in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0049] See the attached Figure 1-2 As shown, it is an adjusting pressure plate in the prior art, including two parallel fixed side plates 1, on which a fixed frame is fixed, and the fixed frame is fixed on the shell of the EFEM.

[0050] A number of plates are fixed between two fixed side plates 1. The plates are fixed to the fixed side plates 1 by bolts. The plates abut against the upper end surfaces of the fixed side plates 1 and are directly fixed by bolts passing through both of them. Adjacent plates are also fixed by bolts.

[0051] For plates with different widths, there is also an L-shaped angle iron connecting the two. The L-shaped angle iron includes a first connecting plate and a second connecting plate arranged vertically. The first connecting plate abuts against one plate and is fixed to this plate by bolts. The second connecting plate abuts against another adjacent plate and is fixed by bolts. This kind of pressure regulating plate is directly connected by bolts, which is not convenient to disassemble. All bolts need to be disassembled before the plate can be removed from the fixed side plate 1. And the bolts will become loose during long-term use, affecting the stability of the pressure regulating plate.

[0052] See Appendix Figure 3 and 4 As shown, a pressure regulating plate in an embodiment of the present application includes two fixed side plates 1 arranged in parallel and at intervals. The fixed side plates 1 extend in the X direction. The two fixed side plates 1 are spaced in the Y direction, and the two fixed side plates 1 are parallel up and down on the Y axis, ensuring that the upper end surfaces of the two fixed side plates 1 are at the same height in the Z axis direction. A number of plates are jointly arranged above the two fixed side plates 1. The plates can slide along the fixed side plates 1 in the X direction and are detachably connected to the fixed side plates 1. The plates can be spliced, and through holes are arrayed on the plates.

[0053] The fixed side plate 1 can be an integral body or can be spliced by a plurality of short side plates abutting against each other in sequence. The fixed side plate 1 is fixed on the shell of the EFEM.

[0054] The pressure regulating plate further includes a fixing component, which can limit the position of the plate in the front-back, left-right, and up-down directions. Among them, the front-back, left-right, and up-down directions respectively correspond to the Y direction, X direction, and Z direction in the figure. The up-down is the vertical direction, and the front-back and left-right are two mutually perpendicular directions on the horizontal plane.

[0055] See Appendix Figure 1 and Appendix Figure 6 As shown, the fixing component includes a limiting part C2. The limiting parts C2 are spaced at intervals along the length direction of the two fixed side plates 1. The length direction of the fixed side plates 1 is the X direction. A U-shaped slot C23 is defined between the limiting part C2 and the upper end surface of the fixed side plate 1. The upper end surface of the fixed side plate 1 is the surface for placing the plate. The side of the plate can slide in the slot C23. The slot C23 defines a slot C top wall, a slot C bottom wall, and a slot C side wall. Among them, the slot C bottom wall is the upper end surface of the fixed side plate 1. The lower end surface of the plate abuts against the slot C bottom wall, and the slot C top wall defines the position of the upper end surface of the plate, that is, limits the position of the plate in the Z direction.

[0056] Since the limiting parts C2 are arranged on both of the two fixed side plates 1, there are slot C23s on both sides of the plate body along the Y direction. The plate body is located between the slot C23s of the two fixed side plates 1, and the side plates are limited between the side walls C of the two slot C23s. The plate body abuts against the side walls C of the slot C23s on both sides, and the limiting part C2 can limit the plate body in the Y direction.

[0057] See the appendix Figure 7 As shown, the limiting part C2 has a first limiting surface 222 and a second limiting surface 212. The first limiting surface 222 is parallel to the upper end surface of the fixed side plate 1, and the vertical distance between the first limiting surface 222 and the upper end surface of the fixed side plate 1 is not less than the thickness of the plate body. The first limiting surface 222 is the top wall of the slot C. When the vertical distance between the first limiting surface 222 and the fixed side plate 1 is equal to the thickness of the plate body, the best limiting effect on the plate body is achieved. In this way, the height of the slot C23 matches the plate body, reducing the sway of the plate body in the Z direction. The second limiting surface 212 is perpendicular to the first limiting surface 222, and the second limiting surface 212 is the side wall of the slot C. The vertical distance between the second limiting surface 212 on one fixed side plate 1 and the second limiting surface 212 on the other fixed side plate 1 is not less than the width of the plate body in the Y direction. When the vertical distance between the second limiting surface 212 on the fixed side plate 1 and the second limiting surface 212 on the other fixed side plate 1 is equal to the width of the plate body in the Y direction, the best limiting effect on the plate body is achieved, and the two side edges of the plate body directly abut against the two second limiting surfaces 212, reducing the sway of the plate body in the Y direction.

[0058] See the appendix Figure 7 As shown, the limiting part C2 includes a fixed part C21 and a limiting part C22 arranged vertically. The fixed part C21 is placed on the upper end surface of the fixed side plate 1, and the limiting part C22 extends along the Y direction and is arranged parallel to the plate body. The first limiting surface 222 is arranged on the limiting part C22 and is the lower end surface of the limiting part C22. The plate body is located between the limiting part C22 and the fixed side plate 1 in the Z direction. The second limiting surface 212 is arranged on the fixed part C21 and is the vertical side surface of the fixed part C21. The plate body is located between the two fixed parts C21 in the Y direction.

[0059] In one embodiment, the fixed part C21 and the limiting part C22 are of an integral structure, that is, the limiting part C2 is integrally fixed on the fixed side plate 1. Of course, in one embodiment, the fixed part C21 and the limiting part C22 can also be of a split structure and are respectively fixed on the fixed side plate 1.

[0060] See the appendix Figure 7As shown, the limiting part C2 in this embodiment is an integral structure, which is detachably connected to the fixed side plate 1. The fixing part C21 is placed on the upper end surface of the fixed side plate 1 and is fixedly connected to the fixed side plate 1 by bolts. The fixing part C21 is provided with a bolt hole C211 for the bolt to pass through, and one or more bolt holes C211 are provided. One bolt hole C211 can fix the fixing part C21 on the fixed side plate 1, but in order to improve the stability of the connection between the fixing part C21 and the fixed side plate 1, the bolt hole C211 can be flexibly provided according to the actual length of the fixing part C21.

[0061] Of course, the limiting component C2 may also be non-detachably connected to the fixed side plate 1 , such as by directly welding or integrally forming.

[0062] In one embodiment, in order to facilitate the insertion of the plate into the slot C23, the first limiting surface 222 is connected to inclined surfaces C221 on both sides along the X direction, and the inclined surfaces C221 are inclined along the first limiting surface 222 in the Z direction toward the side away from the plate. The setting of the inclined surfaces C221 forms a flared structure to facilitate the insertion of the plate. That is, in this embodiment, the inclined surfaces C221 are formed by cutting on both sides of the lower end surface of the limiting portion C22, and the two inclined surfaces C221 are inclined upward from one end close to each other to one end away from each other.

[0063] After multiple plates are inserted between the limiting part C2 and the fixed side panel 1, they can slide in the slot C23, and the outermost plate is fixed by bolts and the fixed side panel 1. The outermost plate is the last plate to be inserted. The first plate is inserted into the slot C23, and slides to the end of the fixed side panel 1 and abuts against the shell, thereby fixing the first plate. Then the other plates are inserted in sequence, and the plates abut against each other until the last plate is inserted, that is, the outermost plate is inserted into the slot C23. At this time, the outermost plate is fixed to the fixed side panel 1 by bolts, and the spliced ​​plates are limited in the X direction to reduce the shaking of the plates in the X direction.

[0064] In one embodiment, see the attached Figure 3 As shown, the plate body is provided with a limiting hole 512 matching with the bolt. For the convenience of adjustment, the limiting hole 512 is a waist-shaped hole, and the waist-shaped hole extends along the insertion direction of the plate body (i.e., the X direction). If disassembly is required, only the bolt in the limiting hole 512 is removed, and the plate body can be smoothly pulled out in sequence, which is more convenient for the maintenance of the equipment in the EFEM.

[0065] See attached Figure 2 As shown, the fixing assembly also includes a limiting part B3, and the limiting part B3 is located between the two plates. The two adjacent plates can be tightened by the limiting part B3.

[0066] See attached Figure 10As shown, the limiting part B3 has an inclined surface B321. The limiting part B3 is fixed on a plate body, and the adjacent plate body has a first folded edge 511 that can abut against the inclined surface B321. The inclined surface B321 provides X-direction and Z-direction pressures to the plate body that abuts against it.

[0067] The force exerted by the inclined surface B321 on the plate body that abuts against it is decomposed into an X-direction pressure and a Z-direction pressure. Among them, the X-direction pressure pushes the plate body towards the plate body on the side away from the limiting part B3, increasing the tightness between the plate bodies in the X direction. The Z-direction pressure provides an upward supporting force for the plate body, and the plate body is restricted by the limiting part C2 to limit the upward distance of the plate body.

[0068] The limiting parts B3 are arranged at intervals along the side of the plate body in the Y direction, and the number can be flexibly set according to the width of the plate body in the front-back direction, and can be one or multiple.

[0069] See the appendix Figure 10 As shown, first folded edges 511 that are bent downward are provided on both sides of the plate body extending in the Y direction. The first folded edges 511 are located between two fixed side plates 1. The first folded edge 511 includes a vertical part and a horizontal part. The vertical part extends in the Z direction, the horizontal part is parallel to the upper end surface of the plate body, and the junction of the vertical part and the horizontal part abuts against the inclined surface B321.

[0070] See the appendix Figure 8 and the appendix Figure 9 As shown, the limiting part B3 includes a fixed part B31 and a pressing part B32 that are vertically arranged. The fixed part B31 is fixed on the vertical part of the first folded edge 511. The inclined surface B321 is provided on the upper end surface of the pressing part B32, and is inclined upward from far away from the fixed part B31 to close to the fixed part B31, and the inclined surface B321 extends to the fixed part B31.

[0071] Due to the process limitations of the plate body, it is impossible to ensure that the thickness of each plate body is consistent, nor can it ensure that the sides of adjacent plate bodies can completely abut and match. Therefore, the limiting part B3 is set, and two adjacent side plates are pressed tightly through an inclined surface B321. The Z-direction pressure that can be exerted through the inclined surface B321 can abut the upper end surface of the plate body against the first limiting surface 222 to perform Z-direction constraint on the plate body. The X-direction pressure presses the plate body tightly in the X direction to perform X-direction constraint on the plate body. At the same time, there is a small gap between the vertical part of the first folded edge 511 that abuts against the inclined surface B321 and the fixed part B31 of the limiting part B3, reducing the processing precision requirements for the plate body, improving the production and installation efficiency, and only pressing tightly the two plate bodies through the inclined surface B321.

[0072] In one embodiment, the limiting part B3 is detachably connected to the plate body, and the fixing part B31 is fixed to the vertical part by bolts. The fixing part B31 is provided with bolt holes B311 for the bolts to pass through, and one or more bolt holes B311 are provided. One bolt hole B311 can fix the fixing part B31 to the vertical part, but in order to improve the stability of the connection between the fixing part B31 and the fixed side plate 1, the bolt holes B311 can be flexibly provided according to the actual length of the fixing part B31.

[0073] Of course, the limiting part B3 can also be connected to the plate body in an undetachable manner, such as directly by welding or integral molding.

[0074] During installation, the plate body 1 is first inserted between the limiting part C2 and the fixed side plate 1, and the end is abutted against the shell to achieve limiting. At this time, the plate body 2 with the limiting part B3 is inserted and fixed, and the inclined surface B321 of the limiting part B3 abuts against the first folded edge 511 of the plate body 1. When the plate body 2 is pushed, the inclined surface B321 provides a pressing force in the X direction for the plate body 1, and at the same time provides an upward supporting force for the plate body 1. The plate body 1, under the constraint of the limiting part C2, limits the upward distance of the plate body 1. At the same time, the second limiting surface 212 of the limiting part C2 on the two fixed side plates 1 limits the distance between the plate body 1 and the plate body 2 in the Y direction, that is, the two sides of the plate body abut against the two second limiting surfaces 212 respectively. That is, the plate body is limited in the three directions of X, Y and Z to achieve fixation, which can effectively prevent the voltage regulating plate from shaking in all directions and enhance the stability of the voltage regulating plate.

[0075] In order to facilitate the operation of the robot in the sorting chamber, a gap corresponding to the robot is set on the pressure regulating plate. Figure 1 As shown, a notch is formed on a fixed side panel 1, and the panel located at the notch is a narrow panel 52, and the other panel is a wide panel 51. The wide panels 51 have the same length in the Y direction, and there are fixed side panels 1 on both sides of the wide panels 51. The wide panels 51 can be fixed in the three directions of X, Y and Z by the limiting parts C2 and B3. However, for the narrow panel 52, since there is no fixed side panel 1 on one side of the narrow panel 52, the narrow panel 52 is only fixed by the limiting parts C2 on one side panel and the limiting parts B3 on the adjacent wide panel 51, which has poor stability and cannot meet the use requirements.

[0076] Therefore, the fixing assembly also includes a limiting part A4, see the attached Figure 4 and attached Figure 5 As shown, the limiting part A4 is fixed on the two wide plates 51 adjacent to the narrow plate 52, located at the notch, and is used to clamp the narrow plate 52. The limiting part A4 can limit the narrow plate 52 in the Z direction, and can cooperate with the limiting part C2 on the fixed side plate 1 to limit the narrow plate 52 in the X direction.

[0077] See attached Figure 11-Appendix Figure 13 As shown in Figure 13 , the limiting part A4 includes a third limiting surface 421, a fourth limiting surface 431, and a fifth limiting surface 441. Both the third limiting surface 421 and the fifth limiting surface 441 are parallel to the upper end surface of the narrow plate 52, and the third limiting surface 421 and the fifth limiting surface 441 are respectively located on the upper and lower sides of the narrow plate 52. The vertical distance between the third limiting surface 421 and the fifth limiting surface 441 is not less than the thickness of the narrow plate 52, that is, the narrow plate 52 is limited in the Z direction between the third limiting surface 421 and the fifth limiting surface 441. When the vertical distance between the third limiting surface 421 and the fifth limiting surface 441 is equal to the thickness of the narrow plate 52, the limiting effect on the narrow plate 52 is the best. The third limiting surface 421 serves to support the narrow plate 52 and, in cooperation with the fifth limiting surface 441, limits the narrow plate 52 in the Z direction.

[0078] The fourth limiting surface 431 is perpendicular to the third limiting surface 421 and parallel to the second limiting surface 212. The narrow plate 52 is limited between the second limiting surface 212 and the fourth limiting surface 431, and the narrow plate 52 is limited in the Y direction.

[0079] See Appendix Figure 13 and Appendix Figure 5 As shown in Figure 5 and , the limiting part A4 is fixed on the horizontal part of the first folded edge 511 of the wide plate 51. A second folded edge 521 that bends downward is provided on one side of the narrow plate 52 extending in the X direction. The second folded edge 521 has the same structure as the first folded edge 511 and also includes a horizontal part and a vertical part. The limiting part A4 includes a sixth limiting surface 412 that can abut against the horizontal part of the second folded edge 521. The horizontal part of the second folded edge 521 (i.e., the lower end surface of the second folded edge 521) is directly placed on the sixth limiting surface 412, and the sixth limiting surface 412 supports the horizontal part of the second folded edge 521. The vertical distance between the sixth limiting surface 412 and the fifth limiting surface 441 is not less than the height of the second folded edge 521. That is, the second folded edge 521 is limited in the Z direction between the sixth limiting surface 412 and the fifth limiting surface 441.

[0080] See Appendix Figure 11 and Appendix Figure 12As shown in the figure, the limit part A4 includes a fixing part A41. Two spaced baffles a42 and b43 extend upward along the upper end surface of the fixing part A41. An ear 44 extends from the end of the baffle b43 away from the fixing part A41, and the ear 44 is parallel to the fixing part A41. The opposite surfaces of the fixing part A41 and the ear 44 are the sixth limit surface 412 and the fifth limit surface 441 respectively. The horizontal part of the second folded edge 521 abuts against the fixing part A41, and the side of the ear 44 facing the fixing part abuts against the upper end surface of the narrow plate 52 to limit the narrow plate 52 in the Z direction. The side of the baffle b43 facing the baffle a42 is the fourth limit surface 431, and the baffle b43 cooperates with the limit part C2 to limit the narrow plate 52 in the Y direction. At the same time, the end surface of the baffle a42 away from the fixing part A41 is the third limit surface 421, and the stop block a abuts against the lower end surface of the narrow plate 52.

[0081] In one embodiment, the fixing part A41 is detachably connected to the wide plate 51 and is fixed on the horizontal part of the second folded edge 521 of the wide plate 51 by bolts. Bolt holes A411 for the bolts to pass through are provided on the fixing part A41. The bolt holes A411 can be one or more, which can be determined according to the shape of the fixing part A41, as long as the fixing part A41 can be fixed on the wide plate 51.

[0082] Of course, the fixing part A41 and the wide plate 51 can also be non-detachably connected, and the bracket can be fixed by welding or integrally formed.

[0083] See the appendix Figure 13 As shown in the figure, a slot A45 for inserting the second folded edge 521 is defined between the fixing part A41, the baffle b43 and the ear 44. The second folded edge 521 of the narrow plate 52 is inserted into the slot A45 and is limited within the slot A45. The limit part A4 replaces a fixed side and the limit part C2 to limit the narrow plate 52 at the notch of the fixed side plate 1.

[0084] To facilitate the insertion of the narrow plate 52 into the slot A45, a slope A442 is connected to one side of the fifth limit surface 441. The slope A442 is arranged at the entrance of the fifth limit surface 441, and the slope A442 slopes away from the narrow plate 52 in the Z direction along the fifth limit surface 441. The slope A442 forms a flared structure to facilitate the insertion of the narrow plate 52. That is, in this embodiment, the slope A442 is formed by cutting the inner side surface of the ear 44 facing the fixing part A41.

[0085] To improve the connection tightness between the wide plate 51 and the narrow plate 52, a limit part B3 is also provided on the narrow plate 52, which can squeeze the adjacent wide plate 51 through the limit part B3 to improve the tightness between the two and improve the stability of the mesh plate formed by the combination of the wide plate 51 and the narrow plate 52. That is, no matter what kind of plate body, a limit part B3 is provided between two adjacent plate bodies.

[0086] When installing the regulating plate, first, a plurality of limiting parts C2 are arranged in the length direction of the fixed side plate 1. A slot C23 is defined between the limiting part C2 and the fixed side plate 1. Then, the wide plate 51 is inserted from the slot C23, and the end abuts against the housing to achieve limiting.

[0087] Then, the wide plate 51 is continuously inserted from the slot C23. The later inserted wide plate 51 is fixed with a limiting part B3. The limiting part B3 has an inclined surface B321. The inclined surface B321 abuts against the first folded edge 511 of the previously inserted wide plate 51. When pushing the later inserted wide plate 51, the inclined surface B321 provides a pressing force in the X direction for the previously inserted wide plate 51, and at the same time provides an upward supporting force for the previously inserted wide plate 51. And the previously inserted wide plate 51 is restricted by the limiting part C2, which limits the upward distance of the previously inserted wide plate 51. At the same time, the second limiting surfaces 212 of the limiting parts C2 on the two fixed side plates 1 limit the distance of the wide plate 51 in the Y direction. The wide plate 51 is limited in the three directions of X, Y, and Z.

[0088] When it is necessary to insert the narrow plate 52, at this time, a limiting part A4 is fixed on the wide plate 51 adjacent to the narrow plate 52. A slot A45 is formed by upper limiting on the limiting part A4. One side plate of the narrow plate 52 slides along the slot C23, and the second folded edge 521 of the narrow plate 52 is inserted into the slot A45. The limiting part A4 can limit the narrow plate 52 in the Z direction and can cooperate with the limiting part C2 to limit the narrow plate 52 in the X direction. The narrow plate 52 is also fixed with a limiting part B3.

[0089] When the last wide plate 51 is inserted from the slot C23, at this time, the last inserted wide plate 51 is fixed to a fixed side plate 1 through bolts, and the spliced regulating plate is finally fixed in the X direction.

[0090] When it is necessary to disassemble the regulating plate, as long as the bolt connecting the last wide plate 51 and the fixed side plate 1 is removed, and then the wide plate 51 or the narrow plate 52 is sequentially drawn out from the slot C23.

[0091] In one embodiment, the present invention also discloses a wafer transfer device, including a housing, and the fixed side plate 1 of the above-mentioned regulating plate is fixed in the housing.

[0092] The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it. It cannot be used to limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A pressure regulating plate of a wafer transfer device, comprising two fixed side plates arranged in parallel, and a plurality of plate bodies are jointly arranged above the two fixed side plates, and the plate bodies are limited by fixing components, and it is characterized in that: The fixing component includes limiting part C, which is distributed at intervals along the length direction of the fixed side plate. The limiting part C includes a first limiting surface and a second limiting surface. The first limiting surface, the second limiting surface and the upper end surface of the fixed side plate define a slot C for the side edge of the plate body to be inserted and slide. The plate body is located between the slot Cs on the two fixed side plates. The first limiting surface is parallel to the upper end surface of the fixed side plate, and the second limiting surface is perpendicular to the first limiting surface; limiting part B, which is located between adjacent plate bodies. The limiting part B includes an inclined surface B. The limiting part B is fixed on one plate body, and the adjacent plate body has a first folded edge that can abut against the inclined surface B. The inclined surface B provides pressure in the vertical direction and the horizontal direction along the sliding of the plate body for the plate body that abuts against it; The fixing component further includes a limiting part A. The plate body includes a wide plate and a narrow plate with different widths, and both sides of the narrow plate are wide plates. A notch corresponding to the narrow plate is formed on one of the fixed side plates. The limiting part A is arranged at the notch and fixedly connected to the wide plates on both sides of the narrow plate. The limiting part A is used for clamping the narrow plate; The limiting part A includes a third limiting surface, a fourth limiting surface and a fifth limiting surface. The third limiting surface and the fifth limiting surface are both parallel to the upper end surface of the narrow plate, and the third limiting surface and the fifth limiting surface are respectively located on the upper and lower sides of the narrow plate; the fourth limiting surface is perpendicular to the third limiting surface and parallel to the second limiting surface; The narrow plate is provided with a second folded edge bent downward on one side of the notch. The limiting part A further includes a sixth limiting surface that can abut against the lower end surface of the second folded edge.

2. The pressure regulating plate according to claim 1, wherein: The vertical distance between the first limiting surface and the upper end surface of the fixed side plate is not less than the thickness of the plate body; the vertical distance between the second limiting surfaces on one fixed side plate and the second limiting surfaces on the other fixed side plate is not less than the width of the plate body.

3. The pressure regulating plate according to claim 1, wherein: The first limiting surface and the second limiting surface are arranged on one limiting part C. The limiting part C includes a fixed part C and a limiting part C arranged vertically. The fixed part C is placed on the upper end surface of the fixed side plate, and the limiting part C is arranged parallel to the fixed side plate. The surface of the limiting part C facing the fixed side plate is the first limiting surface, and the vertical side surface of the fixed part C perpendicular to the first limiting part is the second limiting surface.

4. The pressure regulating plate according to claim 1, wherein: Both sides of the first limiting surface along the horizontal direction of the sliding of the plate body are connected with inclined surfaces C, and the inclined surfaces C are inclined away from the fixed side plate in the vertical direction along the first limiting surface.

5. The pressure regulating plate according to claim 1, wherein: Both sides of the plate body perpendicular to its sliding direction are bent downward with first folded edges. The first folded edges are located between the two fixed side plates. The first folded edges include a vertical part and a horizontal part. The inclined surface B abuts against the junction of the vertical part and the horizontal part of the first folded edge.

6. The pressure regulating plate according to claim 5, characterized in that: The limiting part B includes a fixed part B and a tightening part B arranged vertically. The fixed part B is fixed on the vertical part of the first folded edge, and the inclined surface B is arranged on the upper end surface of the tightening part B. The inclined surface B is inclined upward from far away from the fixed part B to close to the fixed part B.

7. The pressure regulating plate according to any one of claims 1-6, characterized in that: The outermost plate body is fixed by bolts and a fixed side plate, and a limiting hole matching the bolts is formed on the plate body; the limiting hole is an oblong hole, and the oblong hole is arranged along the sliding direction of the plate body.

8. The pressure regulating plate according to claim 1, wherein: The limiting part A includes a fixing part A. Two spaced baffles a and b extend upward along the upper end surface of the fixing part A. An ear is extended from the end of the baffle b away from the fixing part A, and the ear is parallel to the fixing part A; a slot A for inserting the second folded edge is defined among the fixing part A, the baffle b and the ear, and the second folded edge is inserted into the slot A and limited therein; the opposite surfaces of the fixing part A and the ear are the sixth limiting surface and the fifth limiting surface respectively, the side of the baffle b facing the baffle a is the fourth limiting surface, and the end surface of the baffle a away from the fixing part A is the third limiting surface.

9. The pressure regulating plate according to claim 1, wherein: The vertical distance between the third limiting surface and the fifth limiting surface is not less than the thickness of the narrow plate; the vertical distance between the sixth limiting surface and the fifth limiting surface is not less than the height of the second folded edge.

10. The pressure regulating plate according to claim 1, wherein: One side of the fifth limiting surface is connected with an inclined surface A, and the inclined surface A is inclined in the vertical direction along the fifth limiting surface towards the side away from the narrow plate.

11. A method for installing a regulating plate, which is used to install the regulating plate according to any one of claims 8-10, characterized in that: It includes the following steps: A number of limiting parts C are arranged in the length direction of the two fixed side plates, and a slot C is defined between the limiting parts C and the fixed side plates; The wide plate is inserted from the slot C, and the end of the wide plate inserted first abuts against the shell to achieve limiting; The wide plate is continuously inserted from the slot C. The later inserted wide plate is fixed with a limiting part B, and the limiting part B has an inclined surface B. The inclined surface B abuts against the first folded edge of the wide plate inserted first. When the later inserted wide plate is pushed, the inclined surface B provides a pre-tightening force for the wide plate inserted first; When the narrow plate needs to be inserted, the limiting part A is fixed on the wide plate adjacent to the narrow plate. A slot A is formed by the upper limit of the limiting part A, and one side plate of the narrow plate slides along the slot C, and the second folded edge of the narrow plate is inserted into the slot A; After the last wide plate is inserted from the slot C, the last inserted wide plate is fixed to a fixed side plate by bolts.

12. A wafer transfer device, characterized in that: It includes a shell, and a pressure regulating plate as described in any one of claims 1-10 is arranged in the shell.

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