A super-resolution imaging system and method based on all-fiber lattice interferometry

Abstract

The invention discloses a super-resolution imaging system and method based on all-fiber lattice interference. The imaging system comprises: a light source module, which is used to emit linearly polarized laser beams of different wavelengths; a beam splitting and phase shifting module, which comprises a beam splitting unit for receiving the linearly polarized laser beam and splitting it into a first beam, a second beam and a third beam, and a phase shifting unit for changing the phase of the first beam and the second beam; a microscope module, which is used to receive the first beam, the second beam and the third beam and irradiate them on a sample to form an interference pattern, and is used to collect a fluorescence signal excited by the sample; an imaging module, which is used to receive the fluorescence signal collected by the microscope module and form an image; wherein the phase shifting unit comprises a polarization-maintaining fiber and a piezoelectric ceramic, the middle part of the polarization-maintaining fiber is wound on the piezoelectric ceramic, and by applying a voltage to the piezoelectric ceramic, the phase of the first beam and the second beam in the polarization-maintaining fiber can be changed, the phase shifting speed is fast, and the imaging speed can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of imaging systems, and in particular to a super-resolution imaging system and method based on all-fiber lattice interference. Background Art

[0002] Structured illumination microscopy (SIM) can extract high spatial frequency information from multiple original images to improve resolution, thereby breaking through the optical diffraction limit. It is a key technology for achieving high-resolution and super-resolution imaging of biological cells and even molecules. Super-resolution SIM systems can usually increase the spatial resolution of optical microscopes by about one-fold, thereby displaying organelles and their substructures below 200nm. Super-resolution SIM systems have been able to observe cells simultaneously in multi-color light channels for a long time, minimizing the harmful photobleaching effect on samples.

[0003] At present, most commercial SIM microscope systems use diffraction gratings to generate ±1-order diffraction beams, which are then projected onto the focal plane of the fluorescence microscope to produce interference patterns. For example, Nikon's N-SIM series of super-resolution microscopes use a mechanical platform to control the grating to produce stripes of different directions and phases, but this method has a slow imaging speed and poor stability due to the operating speed of the mechanical structure and mechanical vibration. Zeiss's Elyra 7 super-resolution microscope uses a galvanometer structure for phase shifting. The galvanometer speed is faster, but the optical path structure is complex and the device cost is too high. In addition, a spatial light modulator (SLM) can also replace the diffraction grating to change the interference pattern, but the utilization rate of the laser by the SLM is very low, usually less than 10%, which places high demands on the power of the laser. Summary of the invention

[0004] The present invention is made in consideration of the above-mentioned problems. The purpose of the invention is to provide a super-resolution imaging system and method based on all-fiber lattice interference. By changing the voltage of piezoelectric ceramics, the two light beams can be phase-shifted. It has a compact structure, a simple optical path, fast imaging speed and good stability.

[0005] To achieve the above object, the present invention provides a super-resolution imaging system based on all-fiber lattice interferometry, comprising:

[0006] A light source module, used for emitting linearly polarized laser beams of different wavelengths;

[0007] A beam splitting and phase shifting module, which includes a beam splitting unit for receiving a linearly polarized laser beam and splitting it into a first beam, a second beam and a third beam, and a phase shifting unit for changing the phases of the first beam and the second beam;

[0008] A collimation and polarization adjustment module, used for collimating the first light beam, the second light beam and the third light beam passing through the phase shift unit, and changing the polarization direction;

[0009] A microscope module, used for receiving the first light beam, the second light beam and the third light beam which have passed through the collimation and polarization adjustment module and irradiating the light beams onto the sample to form an interference pattern, and for collecting the fluorescence signal excited by the sample;

[0010] The imaging module is used to receive the fluorescent signal collected by the microscope module and to form an image.

[0011] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interference, the light source module includes a multi-color laser, and the multi-color laser is used to emit linearly polarized laser beams of different wavelengths.

[0012] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interference, the beam splitting unit includes a beam splitter for receiving the linearly polarized laser beam emitted by the multi-color laser; the phase shifting unit includes three piezoelectric ceramics and three polarization-maintaining optical fibers;

[0013] The beam splitter is also used to split the linearly polarized laser beam into a first beam, a second beam and a third beam of equal intensity, and transmit the first beam, the second beam and the third beam to the collimation and polarization adjustment module respectively through the three polarization-maintaining optical fibers;

[0014] The three piezoelectric ceramics are all located between the beam splitter and the collimation and polarization adjustment module, and the middle parts of the three polarization-maintaining optical fibers are respectively wound around the outsides of the three piezoelectric ceramics.

[0015] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interference, the number of windings of the three polarization-maintaining optical fibers on the three piezoelectric ceramics is consistent.

[0016] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interferometry, the beam splitting and phase shifting module further includes a bracket, the bracket is located between the three piezoelectric ceramics and the collimation and polarization adjustment module, and the bracket is provided with a ring for the three polarization-maintaining optical fibers to pass through, and the diameter of the ring is the same as the diameter of the polarization-maintaining optical fiber;

[0017] The three collars are arranged on the bracket in the shape of an equilateral triangle.

[0018] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interferometry, the collimation and polarization adjustment module includes a collimating beam expander and a polarizer. The collimating beam expander is used to receive the first light beam, the second light beam and the third light beam in the three polarization-maintaining optical fibers, and can be used to expand and collimate the first light beam, the second light beam and the third light beam. The polarizer is used to change the polarization direction of the first light beam, the second light beam and the third light beam passing through the collimating beam expander.

[0019] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interference, the microscope module includes a lens, a reflector, a first tube lens, a dichroic mirror and an objective lens. The first light beam, the second light beam and the third light beam are sequentially irradiated onto the sample through the lens, the reflector, the first tube lens, the dichroic mirror and the objective lens to form an interference pattern.

[0020] According to the above-mentioned super-resolution imaging system based on all-fiber lattice interferometry, the imaging module includes a filter, a second tube lens, a camera, a collection card and a computer which are sequentially away from the dichroic mirror, and the fluorescence signal generated on the sample surface sequentially enters the camera through the objective lens, the dichroic mirror, the filter and the second tube lens, and the camera is used for imaging the fluorescence signal;

[0021] The computer outputs signals through a data acquisition card, which are used to control the synchronous operation of the multi-color laser, the piezoelectric ceramics and the camera, and are used to calculate and obtain a super-resolution image.

[0022] A super-resolution imaging method based on all-fiber lattice interferometry comprises the following steps:

[0023] S1: Split the light beam emitted by the multicolor laser into a first light beam, a second light beam and a third light beam, and arrange the first light beam, the second light beam and the third light beam after the splitting into an equilateral triangle, create images of three point light sources on the rear pupil plane of the objective lens, and generate a hexagonal lattice interference pattern on the sample surface through the objective lens;

[0024] S2: Phase shifting of the first light beam and the second light beam is performed by using piezoelectric ceramics to move the interference pattern laterally;

[0025] S3: The camera collects the fluorescence signal, and the computer processes it through the super-resolution reconstruction algorithm to obtain the super-resolution image.

[0026] According to the above-mentioned super-resolution imaging method based on all-fiber lattice interference, in S2, the phase shift step length of the phase difference between the first light beam and the second light beam is The phase shift period of the phase difference between the first beam and the second beam is 2π, and the phase shift step length of the phase difference between the second beam and the third beam is The phase shift period of the phase difference between the second light beam and the third light beam is 4π.

[0027] The present invention has the following beneficial effects:

[0028] 1. By providing currents of different voltages to the piezoelectric ceramics, two of the light beams can be phase-shifted. The phase-shifting speed is fast and there is no need to change the direction of the interference fringes, which can improve the imaging speed.

[0029] 2. Only piezoelectric ceramics are added, and other phase shifting mechanisms can be omitted, which can reduce the overall space occupied by the system and also reduce costs;

[0030] 3. Transmitting light beams in optical fibers can avoid interference from external stray light as much as possible, with high light energy utilization and reduced laser power requirements;

[0031] 4. The three light beams form an equilateral triangle optical axis arrangement through the bracket. Finally, the three polarized light beams produce a high-contrast hexagonal lattice illumination pattern on the surface of the sample, which is clearer. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is the overall optical path system diagram of the present invention;

[0033] Figure 2 It is a schematic diagram of the assembly of the polarized optical fiber and the piezoelectric ceramic of the present invention;

[0034] Figure 3 It is a schematic diagram of the support structure of the present invention;

[0035] Figure 4 It is a schematic diagram of the structure of the polarizer of the present invention;

[0036] Figure 5 It is a flow chart of the imaging method of the present invention.

[0037] In the figure: 1. multicolor laser; 2. beam splitter; 3. polarization-maintaining fiber; 4. piezoelectric ceramics; 5. bracket; 51. collar; 6. collimating beam expander; 7. polarizer; 8. lens; 9. reflector; 10. first tube mirror; 11. dichroic mirror; 12. objective lens; 13. filter; 14. second tube mirror; 15. camera; 16. acquisition card; 17. computer. DETAILED DESCRIPTION

[0038] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0039] like Figure 1-5 As shown, a super-resolution imaging system based on all-fiber lattice interferometry comprises:

[0040] The light source module is used to emit linearly polarized laser beams of different wavelengths. In this embodiment, the wavelengths of the linearly polarized laser beams emitted by the light source module are 405nm, 488nm, 561nm, and 640nm.

[0041] The beam splitting and phase shifting module includes a beam splitting unit for receiving a linearly polarized laser beam and splitting it into a first beam, a second beam and a third beam, and a phase shifting unit for changing the phases of the first beam and the second beam. The beam splitting unit splits the linearly polarized laser beam emitted by the light source module into three beams, and the phases of two of the beams can be changed by the phase shifting unit, while the phase of the third beam remains unchanged, thereby laterally moving the image irradiated onto the sample.

[0042] The collimation and polarization adjustment module is used to collimate the first light beam, the second light beam and the third light beam passing through the phase shift unit and change the polarization direction. The first light beam, the second light beam and the third light beam are first expanded and collimated, and then the polarization direction of the three light beams is changed to ensure that the polarization states of the three beams are the same, preferably tangential polarization, so as to improve the contrast of the interference fringes.

[0043] The microscope module is used to receive the first light beam, the second light beam and the third light beam that have passed through the collimation and polarization adjustment module and irradiate them onto the sample to form an interference pattern, and is also used to collect the fluorescence signal excited by the sample. The three light beams can be amplified by the microscope module and irradiated onto the surface of the sample to form an interference intensity pattern. The fluorescence signal excited on the surface of the sample can also be transmitted through the microscope module.

[0044] The imaging module is used to receive the fluorescent signal collected by the microscope module and to form an image, and after forming the image, a super-resolution image is obtained based on calculation.

[0045] Preferably, the light source module comprises a multicolor laser 1, and the multicolor laser 1 is used to emit linearly polarized laser beams of different wavelengths. The multicolor laser 1 is used to emit laser beams of different wavelengths.

[0046] Further preferably, the beam splitting unit includes a beam splitter 2 for receiving the linearly polarized laser beam emitted by the multicolor laser 1; the beam splitter 2 is also used to split the linearly polarized laser beam into a first beam, a second beam and a third beam with equal intensities, and transmit the first beam, the second beam and the third beam to the collimation and polarization adjustment module through the three polarization-maintaining optical fibers 3 respectively. By transmitting the light beams using optical fibers, interference from external stray light can be avoided, light energy utilization is high, and power requirements for the multicolor laser 1 are reduced. The intensities of the first beam, the second beam and the third beam are equal, ensuring that the intensity of the generated interference pattern is consistent everywhere.

[0047] Among them, the phase shifting unit includes three piezoelectric ceramics 4 and three polarization-maintaining optical fibers 3. The three piezoelectric ceramics 4 are all located between the beam splitter 2 and the collimation and polarization adjustment module. The middle parts of the three polarization-maintaining optical fibers 3 are respectively wound around the outsides of the three piezoelectric ceramics 4. The first light beam, the second light beam and the third light beam correspond one-to-one to the three polarization-maintaining optical fibers 3. The three piezoelectric ceramics 4 are of the same model. When voltage is applied to the piezoelectric ceramics 4 corresponding to the first light beam and the second light beam, the piezoelectric ceramics 4 produce radial expansion proportional to the voltage, thereby causing a spatial phase change to achieve phase adjustment of the light beam.

[0048] Further preferably, the three polarization-maintaining optical fibers 3 are wound around the three piezoelectric ceramics 4 with the same number of turns, and the three polarization-maintaining optical fibers 3 are wound in the same way with the same number of turns to ensure that the initial phases are the same at zero voltage and the ratio of the phase change to the loaded voltage during phase shifting is the same.

[0049] Preferably, the beam splitting and phase shifting module also includes a bracket 5, which is located between the three piezoelectric ceramics 4 and the collimation and polarization adjustment module. The bracket 5 is provided with a ring 51 for the three polarization-maintaining optical fibers 3 to pass through. The diameter of the ring 51 is the same as the diameter of the polarization-maintaining optical fiber 3. The three rings 51 are arranged in an equilateral triangle on the bracket 5. The bracket 5 is used to fix the three polarization-maintaining optical fibers 3 and provide support for them. The three polarization-maintaining optical fibers 3 are arranged in an equilateral triangle, so that the three light beams can also be arranged in an equilateral triangle, so that images of three point light sources are created on the rear pupil plane of the microscope objective 12, thereby generating a hexagonal lattice-like interference pattern on the sample surface, which is more convenient for observation.

[0050] Preferably, the collimation and polarization adjustment module includes a collimating beam expander 6 and a polarizer 7. The collimating beam expander 6 is used to receive the first light beam, the second light beam and the third light beam in the three polarization-maintaining optical fibers 3, and can be used to expand and collimate the first light beam, the second light beam and the third light beam. The polarizer 7 is used to change the polarization direction of the first light beam, the second light beam and the third light beam passing through the collimating beam expander 6. In this embodiment, the polarizer 7 is a Pizza-type polarizer 7, which is composed of three pizza-shaped polarizers 7 components, and is used to change the polarization direction of the passing light beams to ensure that the polarization states of the three beams are the same and are all tangentially polarized, thereby improving the contrast of the interference fringes.

[0051] Further preferably, the microscope module includes a lens 8, a reflector 9, a first tube lens 10, a dichroic mirror 11 and an objective lens 12. The first light beam, the second light beam and the third light beam are sequentially irradiated onto the sample through the lens 8, the reflector 9, the first tube lens 10, the dichroic mirror 11 and the objective lens 12 to form an interference pattern. The reflector 9 reflects the three tangentially polarized light beams into the first tube lens 10. The first tube lens 10 images the three tangentially polarized light beams onto the back pupil plane of the objective lens 12. The dichroic mirror 11 reflects the light beams into the objective lens 12 and converges them on the sample surface. The objective lens 12 uses an objective lens 12 with a magnification of one hundred times and a vertical aperture of 1.49 to collect the three light beams and irradiate them on the sample surface to form an interference intensity pattern.

[0052] Further preferably, the imaging module includes a filter 13, a second tube lens 14, a camera 15, a collection card 16 and a computer 17 which are sequentially away from the dichroic mirror 11. The fluorescence signal generated on the sample surface enters the camera 15 through the objective lens 12, the dichroic mirror 11, the filter and the second tube lens 14 in sequence. The camera 15 is used for imaging the fluorescence signal. After the objective lens 12 collects the fluorescence signal generated by the sample, the dichroic mirror 11 transmits it to the filter. The filter is used to emit stray light and part of the projected laser in the fluorescence signal, and corresponds to the four wavelengths of laser in the multi-color laser 1. Therefore, four filters 13 with different wavelength ranges are required. For this purpose, a high-speed filter wheel can be used to switch the filters, and the wheel can be controlled by a computer 17. The second tube lens 14 is used to image the intensity information of the fluorescence signal into the interface; the computer 17 outputs a signal through the data acquisition card 16, which is used to control the multi-color laser 1, the piezoelectric ceramic 4 and the camera 15 to work synchronously, and is used to calculate the super-resolution image, and the calculation adopts the structured light reconstruction algorithm.

[0053] A super-resolution imaging method based on all-fiber lattice interferometry comprises the following steps:

[0054] S1: Split the light beam emitted by the laser transmitter into a first light beam, a second light beam and a third light beam, and arrange the split first light beam, second light beam and third light beam in an equilateral triangle, create images of three point light sources on the rear pupil plane of the objective lens 12, and generate a hexagonal lattice interference pattern on the sample surface through the objective lens 12.

[0055] S2: Phase shifting is performed on the first light beam and the second light beam by using the piezoelectric ceramic 4 to move the interference pattern laterally.

[0056] S3: The camera 15 collects the fluorescence signal, and the computer 17 processes it through a super-resolution reconstruction algorithm to obtain a super-resolution image.

[0057] Preferably, in S2, the phase shift step length of the phase difference between the first light beam and the second light beam is The phase shift period of the phase difference between the first beam and the second beam is 2π, and the phase shift step length of the phase difference between the second beam and the third beam is The phase shift period of the phase difference between the second light beam and the third light beam is 4π, wherein the third light beam is not phase shifted; the relative phase of each step in the phase shift process is shown in the following table:

[0058]

[0059]

[0060] Table 1

[0061] Table 1 shows the relative phases of the first light beam, the second light beam and the third light beam during the phase shifting process; wherein k represents the number of phase shifting steps, represents the phase difference of the i-th beam relative to the j-th beam.

[0062] The nth phase-shifted image of the hexagonal lattice interference pattern can be expressed by the following formula:

[0063]

[0064] k m is a frequency vector, represented as follows:

[0065]

[0066]

[0067]

[0068] Where a is the distance between adjacent bright spots, which can be deconstructed from the image captured by the camera; the above nth phase-shifted image equation contains 7 unknowns Where O is the sample function, h is the optical transfer function of the imaging system, α m is the amplitude, is the initial absolute phase, so 7 original images are needed to calculate the super-resolution image, which is different from 9 in the prior art, and the imaging speed is faster; in addition, κ is a constant used to determine the shift direction. Taking κ = 2 can minimize the error propagation of the directional angle. At this time, the intensity formula of the above phase-shifted image can be written as:

[0069]

[0070] Solving the above equation, we can get:

[0071]

[0072]

[0073]

[0074]

[0075] The light represented by the four solutions described above can be applied to hexagonal structured light illumination. We determine the minimum step length required for phase shift to be The minimum period is 2π.

[0076] The technical solution of the present invention is described in detail above in conjunction with the accompanying drawings, and the described embodiments are used to help understand the concept of the present invention. The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art of the invention may make various modifications or supplements to the described specific embodiments or replace them in a similar manner, but they will not deviate from the spirit of the present invention or exceed the scope defined by the attached claims.

[0077] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0078] In addition, in the present invention, descriptions such as "first", "second", "one", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0079] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0080] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

Claims

1. A super-resolution imaging system based on all-fiber lattice interferometry, It is characterized in that include: A light source module, used for emitting linearly polarized laser beams of different wavelengths; A beam splitting and phase shifting module, which includes a beam splitting unit for receiving a linearly polarized laser beam and splitting it into a first beam, a second beam and a third beam, and a phase shifting unit for changing the phases of the first beam and the second beam; A collimation and polarization adjustment module, used for collimating the first light beam, the second light beam and the third light beam passing through the phase shift unit, and changing the polarization direction; A microscope module, used for receiving the first light beam, the second light beam and the third light beam which have passed through the collimation and polarization adjustment module and irradiating the light beams onto the sample to form an interference pattern, and for collecting the fluorescence signal excited by the sample; An imaging module, used for receiving the fluorescent signal collected by the microscope module and forming an image; The light source module includes a multicolor laser, and the multicolor laser is used to emit linearly polarized laser beams of different wavelengths; The beam splitting unit includes a beam splitter for receiving the linearly polarized laser beam emitted by the multi-color laser; the phase shifting unit includes three piezoelectric ceramics and three polarization-maintaining optical fibers; The beam splitter is also used to split the linearly polarized laser beam into a first beam, a second beam and a third beam of equal intensity, and transmit the first beam, the second beam and the third beam to the collimation and polarization adjustment module respectively through the three polarization-maintaining optical fibers; The three piezoelectric ceramics are all located between the beam splitter and the collimation and polarization adjustment module, and the middle parts of the three polarization-maintaining optical fibers are respectively wound around the outsides of the three piezoelectric ceramics; The number of winding turns of the three polarization-maintaining optical fibers on the three piezoelectric ceramics is consistent; The beam splitting and phase shifting module further comprises a bracket, the bracket is located between the three piezoelectric ceramics and the collimation and polarization adjustment module, and a ring is provided on the bracket for the three polarization-maintaining optical fibers to pass through, and the diameter of the ring is the same as the diameter of the polarization-maintaining optical fiber; The three collars are arranged on the bracket in the shape of an equilateral triangle.

2. A super-resolution imaging system based on all-fiber lattice interferometry according to claim 1, It is characterized in that The collimation and polarization adjustment module includes a collimating beam expander and a polarizer. The collimating beam expander is used to receive the first light beam, the second light beam and the third light beam in the three polarization-maintaining optical fibers, and can be used to expand and collimate the first light beam, the second light beam and the third light beam. The polarizer is used to change the polarization direction of the first light beam, the second light beam and the third light beam passing through the collimating beam expander.

3. The super-resolution imaging system based on all-fiber lattice interferometry according to claim 2, It is characterized in that The microscope module includes a lens, a reflector, a first tube lens, a dichroic mirror and an objective lens. The first light beam, the second light beam and the third light beam are sequentially irradiated onto the sample through the lens, the reflector, the first tube lens, the dichroic mirror and the objective lens to form an interference pattern.

4. The super-resolution imaging system based on all-fiber lattice interferometry according to claim 3, It is characterized in that The imaging module includes a filter, a second tube lens, a camera, a collection card and a computer which are sequentially away from the dichroic mirror. The fluorescence signal generated on the sample surface sequentially passes through the objective lens, the dichroic mirror, the filter and the second tube lens and enters the camera. The camera is used for imaging the fluorescence signal. The computer outputs signals through a data acquisition card, which are used to control the synchronous operation of the multi-color laser, the piezoelectric ceramics and the camera, and are used to calculate and obtain a super-resolution image.

5. An imaging method of a super-resolution imaging system based on all-fiber lattice interferometry according to any one of claims 1 to 4, It is characterized in that Includes steps: S1: Split the light beam emitted by the multicolor laser into a first light beam, a second light beam and a third light beam, and arrange the first light beam, the second light beam and the third light beam after the splitting into an equilateral triangle, create images of three point light sources on the rear pupil plane of the objective lens, and generate a hexagonal lattice interference pattern on the sample surface through the objective lens; S2: Phase shifting of the first light beam and the second light beam is performed by using piezoelectric ceramics to move the interference pattern laterally; S3: The camera collects the fluorescence signal, and the computer processes it through the super-resolution reconstruction algorithm to obtain the super-resolution image.

6. The super-resolution imaging method based on all-fiber lattice interferometry according to claim 5, It is characterized in that In S2, the phase shift step of the phase difference between the first beam and the second beam is 2π / 7, the phase shift period of the phase difference between the first beam and the second beam is 2π, the phase shift step of the phase difference between the second beam and the third beam is 4π / 7, and the phase shift period of the phase difference between the second beam and the third beam is 4π.

Images