Apparatus and method for laser-induced cavitation enhanced electrochemical micro-additive manufacturing

Abstract

The application discloses a device and a method for laser-induced cavitation reinforced electrochemical micro-additive manufacturing, which comprises a laser, a 45-degree total reflection mirror, a focusing assembly, a four-way joint, an anode electrode, a nozzle, a cathode base and a liquid tank; the focusing assembly is installed at a first interface of the four-way joint, a second interface is sealed through a plug cover, one end of the anode electrode penetrates into the second interface through the plug cover, the nozzle is installed at a third interface, a jet port at the bottom end of the nozzle is arranged in the liquid tank, a fourth interface is used for injecting electroforming liquid, the cathode base is arranged in the liquid tank, a microstructure is deposited on the surface of the cathode base, the microstructure is in positive alignment with the jet port, and a laser beam emitted by the laser is refracted to the focusing assembly through the 45-degree total reflection mirror, focused in the jet port and cavitation bubbles are generated.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of electrochemical micro-additive manufacturing, in particular to a device and method for laser-induced cavitation enhanced electrochemical micro-additive manufacturing. BACKGROUND

[0002] In today's development of science and technology and manufacturing technology, more and more microstructures appear in industrial applications, and microfabrication research has been widely valued. Electrochemical micro-additive manufacturing, also known as micro-electroforming or electrodeposition, is a special processing technology based on the electrodeposition of metal ions on the cathode surface to manufacture metal microstructures with certain shape and dimensional accuracy. Compared with other metal additive manufacturing technologies, electrochemical micro-additive manufacturing technology has low implementation temperature, easy shape and property control, no need for subsequent annealing and homogenization heat treatment, no residual thermal stress, and can process complex metal parts.

[0003] Jet electrodeposition technology is a technology that uses a high-speed jet of "anodized" electrolyte liquid beam to impact the cathode surface. Metal ions in the liquid beam are reduced to atoms under the action of an electric field and accumulated on the cathode, thereby realizing selective electrodeposition processing. However, in jet electrodeposition processing, uneven distribution of internal mass transfer rate and current density will lead to difficulty in achieving ideal levels of microstructure and morphology quality of the deposited layer, and the quality will deteriorate with increasing deposition time. SUMMARY

[0004] The present application provides a device and method for laser-induced cavitation enhanced electrochemical micro-additive manufacturing. In the electrochemical deposition process, the high-speed, high-pressure microjet and shock wave formed by the collapse of the cavitation bubble generated by laser-induced cavitation are used to synchronize the precise forging of the microstructure, which can eliminate the cavitation and internal stress generated during the micro-additive manufacturing process, refine the grains, and improve the mechanical properties of the microstructure. At the same time, laser heat and laser-induced cavitation jet can enhance the mass transfer effect in the micro-machining gap and improve the deposition efficiency.

[0005] The technical solution of the present application is as follows:

[0006] The device of laser-induced cavitation reinforced electrochemical micro-additive manufacturing comprises a laser, a 45-degree full reflection mirror, a focusing assembly, a four-way joint, an anode electrode, a nozzle, a cathode substrate and a liquid tank; the four-way joint comprises a first interface, a second interface, a third interface and a fourth interface, wherein the first interface corresponds to the third interface, the second interface corresponds to the fourth interface, the focusing assembly is installed at the first interface to block and seal the first interface, the second interface is sealed by a plug, one end of the anode electrode penetrates into the second interface from the center hole of the plug, and the periphery of the anode electrode is sealed with the center hole, the top of the nozzle is installed at the bottom of the third interface, the jet port at the bottom end of the nozzle is placed in the liquid tank, the fourth interface is connected with an external liquid supply pipeline to inject the electrocasting liquid into the nozzle, the cathode substrate is placed in the liquid tank, the surface of the cathode substrate is deposited with a microstructure, the microstructure is aligned with the jet port at the bottom end of the nozzle, the laser beam emitted by the laser is reflected to the focusing assembly through the 45-degree full reflection mirror, and is focused in the jet port at the bottom end of the nozzle through the focusing assembly, so that cavitation bubbles are generated in the jet port.

[0007] The focusing assembly, the anode electrode, the nozzle and the liquid inlet are integrated into a device by the four-way joint, when working, the electrocasting liquid is injected into the nozzle through the fourth interface, and the electrocasting liquid is subjected to "anodization" through the anode electrode at the second interface, the microstructure is formed by electrodepositing processing on the surface of the cathode substrate through the jet port at the bottom of the nozzle after the electrocasting liquid is subjected to "anodization", at this time, the pulsed laser beam emitted by the laser is reflected to the focusing assembly through the 45-degree full reflection mirror, and is focused in the jet port by the focusing assembly, so as to induce cavitation of the electrocasting liquid to generate cavitation bubbles, when the cavitation bubbles collapse, high-speed and high-pressure microjets and shock waves are formed, which reach the working area of the electrochemical micro-additive manufacturing through the jet port, and precisely strike the microstructure deposited on the surface of the cathode substrate, so as to eliminate the cavities and internal stress generated in the process of micro-additive manufacturing, refine the grains, and improve the mechanical properties of the microstructure, meanwhile, the laser heat and the microjets generated by laser-induced cavitation can improve the mass transfer effect and the electrodepositing efficiency.

[0008] The focusing assembly is installed at the first interface to block and seal the first interface, meanwhile, the second interface is sealed by the plug, and the center hole through which the anode electrode penetrates is sealed, so that the electrocasting liquid injected into the whole four-way joint cannot leak and overflow from other places, and all flows out from the nozzle.

[0009] Further, the bottom of the liquid tank is provided with a liquid outlet. The liquid outlet is used to discharge the electrocasting liquid dripping after the surface of the cathode substrate is subjected to electrodepositing processing.

[0010] Further, the focusing assembly comprises a focusing mirror, a mirror frame cylinder, a telescopic cylinder, high light transmission glass and a glass cylinder, the focusing mirror is installed in the mirror frame cylinder, the mirror frame cylinder is fixedly installed at the top of the telescopic cylinder, the top of the glass cylinder extends into the bottom of the telescopic cylinder, and the bottom of the mirror frame cylinder is arranged in the inner cavity of the glass cylinder, the outer sidewall of the top of the glass cylinder is in sliding abutment with the inner sidewall of the bottom of the telescopic cylinder, so that the telescopic cylinder can be telescoped relative to the glass cylinder, the glass cylinder is fixed at the first interface, the high light transmission glass is installed in the inner cavity of the glass cylinder and arranged at the bottom of the mirror frame cylinder and in alignment with the focusing mirror, and the laser beam focused by the focusing mirror passes through the high light transmission glass and converges in the nozzle.

[0011] The mirror frame cylinder is used for installing and fixing the focusing mirror, the top edge of the mirror frame cylinder is fixedly connected with the top edge of the telescopic cylinder, and the bottom of the mirror frame cylinder extends into the inner cavity of the telescopic cylinder; the glass cylinder is used for fixing and installing the high light transmission glass, the middle of the glass cylinder is provided with a connecting edge which is fixedly connected with the top edge of the first interface, the top of the glass cylinder extends into the bottom of the inner cavity of the telescopic cylinder, and the bottom of the mirror frame cylinder is arranged in the inner cavity of the glass cylinder; meanwhile, the outer sidewall of the top of the glass cylinder is in sliding abutment with the inner sidewall of the bottom of the telescopic cylinder, so that the telescopic cylinder can be telescoped relative to the glass cylinder, and the distance from the focusing mirror to the nozzle is adjusted.

[0012] Further, the fourth interface is communicated with an adapter, and the external liquid supply pipeline is communicated with the fourth interface through the adapter.

[0013] Further, the anode electrode and the cathode substrate are made of copper.

[0014] Further, the anode electrode is bent at the end penetrating into the second interface and extends into the third interface.

[0015] The extension of the anode electrode penetrating into the third interface increases the contact area of the anode electrode and the electroforming solution and improves the efficiency of anodization in the electroforming solution.

[0016] The application also provides a method for laser-induced cavitation enhanced electrochemical micro-additive manufacturing, which uses the above-mentioned laser-induced cavitation enhanced electrochemical micro-additive manufacturing device, and the specific process is as follows:

[0017] S1: the cathode substrate is pretreated by alcohol and dilute sulfuric acid to remove grease and oxides on the surface, and then is fixed and clamped in a liquid tank;

[0018] S2: the anode electrode is connected to the positive pole of the power supply, and the cathode substrate is connected to the negative pole of the power supply;

[0019] S3: the electrocasting liquid is injected through the fourth interface, so that the inside of the nozzle is filled with the electrocasting liquid, and the end face of the nozzle bottom end is kept at a distance of 20-100 mu m from the surface of the cathode substrate;

[0020] S4: the laser is started, and the 45° total reflection mirror is adjusted to make the laser beam directly irradiate to the focusing assembly, so that the laser beam is focused to the position 200-500 mu m away from the end face of the nozzle through the focusing assembly;

[0021] S5: the flow rate of the electrocasting liquid is adjusted, the liquid supply for electrodeposition is started, and the power supply parameters are set, the power supply is turned on, and the electrodeposition is started;

[0022] S6: the power and frequency of the pulsed laser emitted on the laser are adjusted, the cavitation bubbles are generated by laser-induced cavitation in the nozzle, and the microjet and shock wave formed when the cavitation bubbles collapse are emitted through the nozzle to precisely forge the microstructure below the nozzle.

[0023] Further, in step S5, the flow rate of the electrocasting liquid is adjusted to 5 ml / h, and the power supply parameters are set to constant current output 0.005 A.

[0024] Further, in step S6, the power of the pulsed laser is adjusted to the diameter of the cavitation bubble generated by each pulse is 0.5r, r is the outlet diameter of the nozzle, to prevent the cavitation bubble formed by single pulse from being too large to pass through the nozzle.

[0025] Further, in step S6, the frequency of the cavitation bubble generated by the pulsed laser is adjusted to once every 5 seconds, to adjust the frequency of the microjet and shock wave forging the deposited microstructure.

[0026] The beneficial effects of the present application are as follows:

[0027] In the traditional electrochemical micro-additive manufacturing method, the laser-induced cavitation effect is introduced, the high-speed and high-pressure microjet and shock wave formed when the cavitation bubble generated by laser-induced cavitation collapses are used to precisely forge the microstructure, the cavities and internal stress generated in the micro-additive manufacturing process are eliminated, the crystal grains are refined, the mechanical properties of the microstructure are improved, and the laser heat and laser-induced cavitation jet can strengthen the mass transfer effect of the micro-machining gap, and improve the electrodeposition efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is the structure diagram of the laser-induced cavitation reinforced electrochemical micro-additive manufacturing device of the present application;

[0029] Figure 2 is a schematic diagram of the process of electrodeposition and laser-induced cavitation strengthening of cathode substrate by nozzle;

[0030] Figure 3 is Figure 2 is an enlarged schematic diagram of part A in figure.

[0031] In the figure: laser 1, 45° total reflection mirror 2, four-way joint 3, first interface 301, second interface 302, third interface 303, fourth interface 304, anode electrode 4, nozzle 5, nozzle 501, cathode substrate 6, liquid tank 7, liquid outlet 701, plug 8, microstructure 9, cavitation bubble 10, focusing mirror 11, mirror holder 12, telescopic cylinder 13, high-transmittance glass 14, glass cylinder 15, adapter 16, microjet 17, shock wave 18.

[0032] Figure 1 The arrow in figure indicates the flow direction of the electroforming liquid. DETAILED DESCRIPTION

[0033] The accompanying drawings are only used for illustrative purposes and should not be construed as limiting the patent; in order to better illustrate the embodiments, some components in the drawings may be omitted, enlarged or reduced, and do not represent the actual product size; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted. The positional relationship described in the drawings is only used for illustrative purposes and should not be construed as limiting the patent.

[0034] Example 1:

[0035] As Figures 1-3As shown, the device for laser-induced cavitation enhanced electrochemical micro-additive manufacturing comprises a laser 1, a 45° full reflection mirror 2, a focusing assembly, a four-way joint 3, an anode electrode 4, a nozzle 5, a cathode substrate 6 and a liquid tank 7. The four-way joint 3 comprises a first interface 301, a second interface 302, a third interface 303 and a fourth interface 304, wherein the first interface 301 corresponds to the third interface 303, the second interface 302 corresponds to the fourth interface 304, the focusing assembly is installed at the first interface 301 to block and seal the first interface 301, the second interface 302 is sealed by a plug cover 8, one end of the anode electrode 4 penetrates into the second interface 302 from the center hole of the plug cover 8, and the periphery of the anode electrode 4 is sealed with the center hole, the top of the nozzle 5 is installed at the bottom of the third interface 303, the jet port 501 at the bottom end of the nozzle 5 is placed in the liquid tank 7, the fourth interface 304 is connected with an external liquid supply pipeline to inject the electrocasting liquid into the nozzle 5, the cathode substrate 6 is placed in the liquid tank 7, the surface of the cathode substrate 6 is deposited with a microstructure 9, the microstructure 9 is aligned with the jet port 501 at the bottom end of the nozzle 5, the laser beam emitted by the laser 1 is reflected to the focusing assembly through the 45° full reflection mirror 2, and is focused in the jet port 501 at the bottom end of the nozzle 5 through the focusing assembly, so that the cavitation bubble 10 is generated in the jet port 501.

[0036] In the present embodiment, the focusing assembly is installed at the first interface 301 to block and seal the first interface 301, the second interface 302 is sealed by the plug cover 8, and the center hole through which the anode electrode 4 penetrates is sealed (which can be sealed by glue), so that the electrocasting liquid injected into the entire four-way joint 3 cannot leak out from other places, and all flows out from the nozzle 5.

[0037] In the present embodiment, the bottom of the liquid tank 7 is provided with a liquid outlet 701 for discharging the electrocasting liquid dripping after the surface of the cathode substrate 6 is electro-deposited.

[0038] In the present embodiment, the focusing assembly comprises a focusing mirror 11, a mirror holder barrel 12, an extension cylinder 13, a high-transmittance glass 14 and a glass cylinder 15, the focusing mirror 11 is installed in the mirror holder barrel 12, the mirror holder barrel 12 is fixedly installed at the top of the extension cylinder 13, the top of the glass cylinder 15 extends into the bottom of the extension cylinder 13, and the bottom of the mirror holder barrel 12 is placed in the inner cavity of the glass cylinder 15, the outer sidewall of the top of the glass cylinder 15 is in sliding abutment with the inner sidewall of the bottom of the extension cylinder 13, so that the extension cylinder 13 can be extended and retracted relative to the glass cylinder 15, the glass cylinder 15 is fixed at the first interface 301, the high-transmittance glass 14 is installed in the inner cavity of the glass cylinder 15 and is placed at the bottom of the mirror holder barrel 12 in alignment with the focusing mirror 11, and the laser beam focused by the focusing mirror 11 passes through the high-transmittance glass 14 and converges in the jet port 501.

[0039] The frame cylinder 12 is used for mounting the focusing mirror 11, the top edge of which is fixedly connected with the top edge of the telescopic cylinder 13, and the bottom extends into the top of the inner cavity of the telescopic cylinder 13. The glass cylinder 15 is used for mounting the high-transmittance glass 14, the middle of which is protruded and has a connecting edge fixedly connected with the top edge of the first interface 301, and the top extends into the bottom of the inner cavity of the telescopic cylinder 13. The bottom of the frame cylinder 12 is arranged in the inner cavity of the glass cylinder 15, and the top outer side wall of the glass cylinder 15 is in sliding abutment with the bottom inner side wall of the telescopic cylinder 13, so that the telescopic cylinder 13 can be telescopically adjusted relative to the glass cylinder 15, so as to adjust the outlet distance of the focusing mirror 11 to the outlet 501 of the nozzle 5. A locking bolt (not shown in the figure) can be arranged on the outer wall of the telescopic cylinder 13. After the telescopic cylinder 13 is telescopically adjusted relative to the glass cylinder 15, the locking bolt is screwed through the screw hole of the telescopic cylinder 13 and abuts against the surface of the glass cylinder 15, so as to fix the position of the telescopic cylinder 13 relative to the glass cylinder 15.

[0040] In the embodiment, the fourth interface 304 is connected with the adapter 16, and the external liquid supply pipeline can be quickly connected with the fourth interface 304 through the adapter 16.

[0041] In the embodiment, the cathode substrate 6 and the anode electrode 4 are made of copper material with good electrical conductivity, so as to ensure that the copper ion concentration in the electroforming solution is maintained in a certain range during the processing.

[0042] The specific process of laser-induced cavitation strengthening of electrochemical micro-additive manufacturing by using the above device is as follows:

[0043] S1: The cathode substrate 6 is made of a copper sheet with good electrical conductivity of 15 mm x 15 mm x 0.5 mm. The cathode substrate 6 is pretreated with alcohol and dilute sulfuric acid, and after removing the grease and oxides on the surface, it is fixed and clamped in the liquid tank 7.

[0044] S2: The anode electrode 4 is connected with the positive pole of the power supply, and the cathode substrate 6 is connected with the negative pole of the power supply.

[0045] S3: The electroforming solution is injected through the fourth interface 304. The electroforming solution is a solution containing 20 g of copper sulfate and 6 g of concentrated sulfuric acid per 100 ml of solution. The inside of the nozzle 5 is filled with the electroforming solution, and the end face of the outlet 501 at the bottom end of the nozzle 5 is kept at a distance of 20-100 μm from the surface of the cathode substrate 6.

[0046] S4: Start the laser 1, adjust the 45° total reflection mirror 2 so that the laser beam is directly incident on the focusing mirror 11, adjust the telescopic cylinder 13 to adjust the outlet distance of the focusing mirror 11 to the outlet 501 at the bottom of the nozzle 5, so that the laser beam passes through the high-transmittance glass 14 and is focused to a distance of 200-500 μm from the end face of the outlet 501.

[0047] S5: adjust the flow rate of the electroforming solution to 5ml / h, start supplying the electroforming solution for electrodeposition, and set the power supply parameters to constant current output 0.005A, turn on the power supply, and start electrodeposition;

[0048] S6: adjust the power and frequency of the pulsed laser emitted by the laser 1, and use the laser-induced cavitation in the nozzle 501 to generate cavitation bubbles 10, and when the cavitation bubbles 10 collapse, microjets 17 and shock waves 18 are formed and emitted through the nozzle 501 to precisely strike the microstructure 9 located directly below the nozzle 501.

[0049] In step S6, the power of the pulsed laser is adjusted to generate cavitation bubbles 10 with a diameter of 0.5r per pulse, where r is the diameter of the outlet of the nozzle 501, to prevent the cavitation bubbles 10 from being too large to pass through the nozzle 501, and the frequency of the pulsed laser generating cavitation bubbles 10 is adjusted to once every 5 seconds to adjust the frequency of the microjets 17 and shock waves 18 striking the deposited microstructure 9.

[0050] The present application uses a four-way joint 3 to integrate the focusing assembly, the anode electrode 4, the nozzle 5, and the liquid inlet into a device, and when working, the electroforming solution is injected into the nozzle 5 through the fourth interface 304, and the electroforming solution is "anodized" by the anode electrode 4 at the second interface 302, and the "anodized" electroforming solution is electrodeposited on the surface of the cathode substrate 6 through the nozzle 5 to form the microstructure 9, at this time, the pulsed laser beam emitted by the laser 1 is reflected by the 45° total reflection mirror 2 to the focusing assembly, and is focused by the focusing assembly in the nozzle 501 to induce cavitation of the electroforming solution to generate cavitation bubbles 10, when the cavitation bubbles 10 collapse, high-speed and high-pressure microjets 17 and shock waves 18 are formed, which pass through the nozzle 501 to the working area of the electrochemical micro-additive manufacturing, and precisely strike the deposited microstructure 9 on the surface of the cathode substrate 6 to eliminate the cavities and internal stress generated during the micro-additive manufacturing process, and refine the grains to improve the mechanical properties of the microstructure 9, and the laser heat and the microjets 17 generated by the laser-induced cavitation can improve the mass transfer effect and improve the electrodeposition efficiency.

[0051] Example 2:

[0052] This embodiment is similar to example 1, except that in this embodiment, the anode electrode 4 is bent and extends into the third interface 303 from the end inserted into the second interface 302, forming an L shape. The extension of the anode electrode 4 increases the contact area of the anode electrode 4 with the electroforming solution, and improves the "anodization" efficiency of the electroforming solution.

[0053] Example 3:

[0054] The embodiment is similar to the embodiment 1, except that a three-dimensional moving platform (not shown in the figure) is arranged at the bottom of the liquid tank 7 in the embodiment, the position of the liquid tank 7 can be changed through the three-dimensional moving platform, so that the position to be processed in the cathode base 6 in the liquid tank 7 can be accurately aligned with the jet port 501 at the bottom of the nozzle 5, and the processing accuracy is improved.

[0055] Meanwhile, in order to facilitate the liquid outlet 701 at the bottom of the liquid tank 7 to discharge and recycle, the liquid outlet 701 can be connected to a recycling pool (not shown in the figure) through a conduit, a water pump is arranged at the outlet end of the recycling pool, the recycled electroforming liquid is pumped out and transported to an intermediate filtering treatment device by the water pump, the electroforming liquid after filtering and purifying meets the standard, and then the recycled electroforming liquid is recycled into an external liquid supply pipeline for continuous recycling.

[0056] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. All the implementation modes do not need to be exhausted here. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. An apparatus for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing, characterized in that, Includes a laser (1), a 45° total reflection mirror (2), a focusing assembly, a four-way connector (3), an anode electrode (4), a nozzle (5), a cathode substrate (6), and a liquid tank (7); The four-way connector (3) includes a first interface (301), a second interface (302), a third interface (303), and a fourth interface (304), wherein the first interface (301) corresponds to the third interface (303), and the second interface (302) corresponds to the fourth interface (304). The focusing component is installed at the first interface (301) to block and seal the first interface (301). The second interface (302) is sealed by a plug (8). One end of the anode electrode (4) passes through the center hole of the plug (8) into the second interface (302), and the periphery of the anode electrode (4) is sealed with respect to the center hole. The top of the nozzle (5) is installed at the bottom of the third interface (303), and the nozzle (501) at the bottom end of the nozzle (5) is... The fourth interface (304) is connected to an external liquid supply pipe to inject electroforming liquid into the nozzle (5). The cathode substrate (6) is placed in the liquid tank (7). The surface of the cathode substrate (6) is deposited with microstructures (9). The microstructures (9) are aligned with the nozzle (501) at the bottom. The laser beam emitted by the laser (1) is reflected by the 45° total reflection mirror (2) to the focusing component and focused by the focusing component into the nozzle (501) at the bottom, so that cavitation (10) is generated in the nozzle (501). The bottom of the liquid tank (7) is provided with an outlet (701). One end of the anode electrode (4) that enters the second interface (302) is bent and extended into the third interface (303).

2. The apparatus for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing according to claim 1, characterized in that, The focusing assembly includes a focusing lens (11), a lens holder (12), a telescopic cylinder (13), a high-transmittance glass (14), and a glass cylinder (15). The focusing lens (11) is installed inside the lens holder (12), and the lens holder (12) is fixedly installed on the top of the telescopic cylinder (13). The top of the glass cylinder (15) extends into the bottom of the telescopic cylinder (13), and the bottom of the lens holder (12) is placed inside the cavity of the glass cylinder (15). The outer side wall of the top of the glass cylinder (15) is flush with the bottom of the telescopic cylinder (13). The inner sidewall of the bottom of the telescopic cylinder (13) slides against the glass cylinder (15) so that the telescopic cylinder (13) can slide and extend relative to the glass cylinder (15). The glass cylinder (15) is fixed at the first interface (301). The high-transmittance glass (14) is installed in the inner cavity of the glass cylinder (15) and placed at the bottom of the lens holder (12) aligned with the focusing lens (11). After the laser beam is focused by the focusing lens (11), it passes through the high-transmittance glass (14) and converges in the firing port (501).

3. The apparatus for laser-induced cavitation-enhanced electrochemical microadditive manufacturing according to claim 1, characterized in that, The fourth interface (304) is connected to an adapter (16), which is connected to an external liquid supply pipeline.

4. The apparatus for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing according to claim 1, characterized in that, Both the anode electrode (4) and the cathode substrate (6) are made of copper.

5. A method for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing, characterized in that, The specific process of using the laser-induced cavitation-enhanced electrochemical micro-additive manufacturing apparatus according to any one of claims 1-4 is as follows: S1: The cathode substrate (6) is pretreated with alcohol and dilute sulfuric acid to remove the grease and oxides on the surface and then fixed and clamped in the liquid tank (7); S2: Connect the anode electrode (4) to the positive terminal of the power supply and connect the cathode substrate (6) to the negative terminal of the power supply; S3; inject electroforming liquid through the fourth interface (304) to fill the nozzle (5) with electroforming liquid, and keep the end face of the nozzle (501) at the bottom of the nozzle (5) at a distance of 20-100μm from the surface of the cathode substrate (6); S4: Start the laser (1), adjust the 45° total reflection mirror (2) to make the laser beam shine directly onto the focusing component, so that the laser beam is focused by the focusing component to a distance of 200-500μm from the end face of the nozzle (501) inside the nozzle (501); S5: Adjust the flow rate of the electroforming solution to start supplying the solution for electrodeposition. At the same time, set the power parameters, turn on the power, and start the electrodeposition process. S6: Adjust the power and frequency of the pulsed laser emitted from the laser (1) to generate cavitation (10) in the nozzle (501) by laser-induced cavitation. When the cavitation (10) collapses, the micro-jet (17) and shock wave (18) formed are emitted through the nozzle (501) to precisely forge the microstructure (9) located directly below the nozzle (501).

6. The method for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing according to claim 5, characterized in that, In step S5, the flow rate of the electroforming solution is adjusted to 5 ml / h, and the power supply parameters are set to a constant current output of 0.005 A.

7. The method for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing according to claim 5, characterized in that, In step S6, the power of the pulsed laser is adjusted so that the diameter of the cavitation bubble (10) generated by each pulse is 0.5r, where r is the exit diameter of the nozzle (501).

8. The method for laser-induced cavitation-enhanced electrochemical micro-additive manufacturing according to claim 5, characterized in that, In step S6, the frequency of the pulsed laser generating cavitation (10) is adjusted to once every 5 seconds to adjust the frequency at which the microjets (17) and shock waves (18) forge the deposited microstructures (9).

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