Aerial vehicle and method for controlling the elevation of a holding portion

Abstract

An air transfer cart has: a holding portion that holds an article; a suspension portion that suspends the holding portion; a drive portion that raises the holding portion by winding up the suspension portion; a detection portion that detects a sway of the holding portion; and a controller that controls the drive portion to wind up the suspension portion and house the holding portion in a cart main body. The controller, in winding-up control of the suspension portion, stops winding up of the suspension portion when the sway of the holding portion exceeds a prescribed amplitude, maintains the holding portion at a standby position that is lower than a housing position, and thereafter winds up the suspension portion when the sway of the holding portion becomes below the prescribed amplitude.

Description

Technical Field

[0001] This disclosure relates to an aerial transport vehicle and a method for controlling the lifting of the handle in the aerial transport vehicle. Background Technology

[0002] In an aerial transport vehicle, a gripping part for holding items is raised and lowered while suspended from the transport vehicle. When an item is to be held, the gripping part descends toward a loading section such as a loading port. After the gripping part holds the item, it rises together with the item. The gripping part may vibrate during this rising process. Patent Document 1 investigated the attenuation of vibration during the lifting of the lifting platform.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: JP 2005-67772 Summary of the Invention

[0006] In the event of significant swaying of the overhead conveyor's control unit, an abnormality related to the swaying will be reported, and the raising and lowering of the control unit will be stopped. When the raising and lowering of the control unit stops, the operator needs to manually resume the operation of the overhead conveyor, including the raising and lowering of the control unit. When an overhead conveyor traveling on the track stops due to an abnormality related to swaying, it may also block the track and cause congestion.

[0007] This disclosure describes an aerial transport vehicle and a lifting control method for the holding part that can automatically resume operation of the aerial transport vehicle, including the lifting of the holding part, even if the holding part shakes.

[0008] An aerial transport vehicle of this disclosure comprises: a gripping part for holding an item; a suspension part for suspending the gripping part; a drive unit for lowering the gripping part by extending the suspension part and raising the gripping part by rolling up the suspension part; a transport vehicle body on which the suspension part and the drive unit are mounted; a detection unit for detecting the swaying of the gripping part; and a controller that controls the drive unit to roll up the suspension part and house the gripping part within the transport vehicle body. In the rolling up control of the suspension part, if the swaying of the gripping part detected by the detection unit exceeds a predetermined amplitude, the controller stops the rolling up of the suspension part, maintains the gripping part in a standby position lower than the housing position of the gripping part within the transport vehicle body, and then rolls up the suspension part when the swaying of the gripping part becomes less than or equal to the predetermined amplitude.

[0009] According to this aerial transport vehicle, the handle section is lowered or raised by controlling the drive unit to extend or retract the suspension section using a controller. The handle section lowers or rises while suspended by the suspension section, thus causing swaying. This swaying refers to the suspension section swinging in a certain direction at an angle, based on its vertical extension. In this aerial transport vehicle, if the swaying of the handle section exceeds a predetermined range, the controller stops the retraction of the suspension section and maintains the handle section in a standby position lower than its receiving position. Then, when the swaying of the handle section falls below the predetermined range, the controller retracts the suspension section. This process continues until the swaying of the handle section falls below the predetermined range, maintaining the handle section in a standby position, and then restarting the retraction process when the swaying falls below the predetermined range. Therefore, even if swaying occurs in the handle section, the operation of the aerial transport vehicle, including the raising and lowering of the handle section, can be automatically resumed.

[0010] The specified amplitude can be set to be greater than the permissible sway of the grip when it is housed in the main body of the transport vehicle and / or the permissible sway of the item. The specified amplitude, which serves as the criterion for determining whether to maintain the grip in a standby position, is set to be greater than the permissible sway when the grip is housed. According to this control, the grip remains in a standby position until a relatively large sway subsides slightly, and then begins to roll up again at the point when the sway subsides to the specified amplitude. By restarting the rolling up, the length (extension) of the suspension portion is shortened. The inventors determined that the shorter the suspension portion, the faster the sway subsides. Compared to waiting in a standby position until the sway reaches the aforementioned permissible value, restarting the rolling up earlier allows for a faster overall sway subsiding.

[0011] In the roll-up control of the suspension unit, the controller can also perform a second sway waiting control, which stops the roll-up of the suspension unit for a predetermined time and maintains the grip unit in the calm position when the grip unit is in the calm position between the standby position and the receiving position, after at least one first sway waiting control of maintaining the grip unit in the standby position. By using the controller to perform the second sway waiting control in the calm position, swaying can be reliably calmed before the grip unit is received into the main body of the transport vehicle.

[0012] The second winding speed in the winding control from the calm position to the receiving position can also be lower than the first winding speed in the winding control from the calm position to the receiving position. Since winding from the calm position to the receiving position takes time, residual sway can be effectively reduced.

[0013] In controlling the release of the suspension unit by controlling the drive unit, the controller can stop the release of the suspension unit if the swaying of the gripping unit detected by the detection unit exceeds a predetermined amplitude. Subsequently, when the swaying of the gripping unit falls below the predetermined amplitude, the suspension unit is rolled up, and the gripping unit is held in a calmed position lower than the receiving position. According to this control, compared to waiting for calming at the position where swaying exceeding the predetermined amplitude is initially detected, swaying can be calmed more quickly overall.

[0014] Another aspect of this disclosure is a lifting control method for a gripping part in an aerial transport vehicle. The aerial transport vehicle includes a gripping part for holding an item, a suspension part for suspending the gripping part, a drive unit for lowering the gripping part by extending the suspension part and raising the gripping part by rolling up the suspension part, a transport vehicle body equipped with the suspension part and the drive unit, and a detection unit for detecting the swaying of the gripping part. The lifting control method for the gripping part includes, in the control of rolling up the suspension part, a detection step where the detection unit detects the swaying of the gripping part; and a rolling up step where, if the swaying of the gripping part exceeds a predetermined amplitude, the rolling up of the suspension part is stopped, the gripping part is maintained in a standby position lower than the position where the gripping part is accommodated within the transport vehicle body, and thereafter, if the swaying of the gripping part falls below a predetermined amplitude, the suspension part is rolled up.

[0015] According to the lifting and lowering control method of the gripping part, similarly as described above, the gripping part is maintained in a standby position until the swaying of the gripping part is below a predetermined range, and then the rolling begins again when the swaying is below the predetermined range. Therefore, even if the gripping part sways, the operation of the overhead conveyor, including the lifting and lowering of the gripping part, can be automatically resumed.

[0016] In the roll-up control of the suspension unit, if at least one sway waiting control of the holding unit in the standby position is performed during the roll-up process, a second sway waiting control is performed to stop the roll-up of the suspension unit for a predetermined time while maintaining the holding unit in the calm position when the holding unit is in the calm position between the standby position and the receiving position. By performing the second sway waiting control in the calm position, swaying can be reliably calmed before the holding unit is received into the main body of the transport vehicle.

[0017] Invention Effects

[0018] According to this disclosure, even if the holding part shakes, the operation of the aerial transport vehicle, including the lifting and lowering of the holding part, can be automatically restored. Attached Figure Description

[0019] Figure 1 This is a diagram illustrating the schematic configuration of an aerial transport vehicle according to one embodiment of the present disclosure.

[0020] Figure 2 It is shown Figure 1 A schematic diagram of the detection unit and controller in the aerial transport vehicle.

[0021] Figure 3 (a) is a diagram showing the minimum distance relative to the wall of the device in the direction of travel. Figure 3 (b) is a diagram showing the minimum distance in the lateral direction relative to the wall of the device.

[0022] Figure 4 (a) is a diagram illustrating the concept of permissible values ​​in the direction of travel. Figure 4 (b) is a diagram illustrating the concept of permissible values ​​in the lateral direction.

[0023] Figure 5 This is a flowchart of the processes performed by the controller in the roll-up control.

[0024] Figure 6 It is by Figure 5 The flowchart shows the process of executing the first sway calming control in the process flow.

[0025] Figure 7 (a)~ Figure 7 (c) is a diagram showing the first sway waiting control (sway calming control in the standby position) in the roll-up control.

[0026] Figure 8 (a) and Figure 8 (b) is a diagram showing the second sway waiting control (sway calming control in the calming position) in the roll-up control.

[0027] Figure 9 This is a flowchart of the processes performed by the controller in the release control.

[0028] Figure 10 (a)~ Figure 10 (c) is a diagram showing the first sway waiting control (sway calming control in the standby position) in the release control.

[0029] Figure 11 (a) and Figure 11 (b) is a diagram showing the second sway waiting control (sway calming control in the calming position) in the release control.

[0030] Figure 12 This is a state transition diagram showing the sway calming control and automatic recovery in an aerial transport vehicle. Detailed Implementation

[0031] like Figure 1As shown, in one embodiment, an overhead transport vehicle 1 travels along a track 100 laid near the ceiling of a cleanroom for manufacturing semiconductor devices. The overhead transport vehicle 1 in one embodiment transports FOUP (Front Opening Unified Pod) 200 containing multiple semiconductor wafers, and transfers the FOUP 200 relative to loading ports (placement sections) 300 provided in processing apparatuses that perform various processes on semiconductor wafers. The track 100 is suspended from the ceiling.

[0032] The aerial transport vehicle 1 comprises a frame unit 2, a travel unit (travel section) 3, a lateral unit 4, a theta unit 5, a lifting drive unit 6, a holding unit (holding section) 7, a belt section (suspension section) B, and a controller 8. The frame unit 2 has a central frame 21, a front frame 22, and a rear frame 23. The front frame 22 extends downward from the front end of the central frame 21 (the front end in the travel direction of the aerial transport vehicle 1). The rear frame 23 extends downward from the rear end of the central frame 21 (the rear end in the travel direction of the aerial transport vehicle 1).

[0033] The traveling unit 3 is positioned above the central frame 21. The traveling unit 3 travels along the track 100, for example, by receiving power non-contactly from a high-frequency current line laid along the track 100. The lateral unit 4 is positioned below the central frame 21. The lateral unit 4 causes the θ unit 5, the lifting drive unit 6, and the holding unit 7 to move laterally (to the side in the direction of travel of the aerial transport vehicle 1). The θ unit 5 is positioned below the lateral unit 4. The θ unit 5 causes the lifting drive unit 6 and the holding unit 7 to rotate in the horizontal plane.

[0034] The holding unit 7 holds the flange 201 of the FOUP 200 mounted on the loading port 300. The holding unit 7 has a base 71 and a pair of grippers 72. The pair of grippers 72 are supported by the base 71 in a manner that allows them to open and close in the horizontal direction. The pair of grippers 72 are opened and closed by a drive motor (not shown) and a linkage mechanism (not shown). In this embodiment, when the pair of grippers 72 are in the open state, the height position of the holding unit 7 is adjusted so that the holding surface of the grippers 72 is lower than the lower surface of the flange 201. Moreover, by closing the pair of grippers 72 in this state, the holding surface of the grippers 72 is below the lower surface of the flange 201, and the lifting drive unit 6 is raised in this state, thereby supporting the FOUP 200 by holding (gripping) the flange 201 by the pair of grippers 72.

[0035] The lifting drive unit 6 is positioned below the θ unit 5. The lifting drive unit 6 causes the holding unit 7 to rise and fall. The holding unit 7 is positioned below the lifting drive unit 6. The holding unit 7 is suspended by, for example, four belts B mounted on the lifting drive unit 6. The lifting drive unit 6 has a lifting motor (drive unit) 61 fixed internally. The lifting motor 61 lowers the holding unit 7 by releasing the belts B. The lifting motor 61 raises the holding unit 7 by winding up the belts B. Alternatively, the holding unit 7 can be suspended using three belts B.

[0036] The aerial transport vehicle 1 includes a holding unit 7 and a transport vehicle body 10 for holding the FOUP 200 during transport. The transport vehicle body 10 includes, for example, the frame unit 2, the transverse unit 4, the θ unit 5, the lifting drive unit 6, and the belt section B. In other words, the transport vehicle body 10 is equipped with the belt section B and the lifting drive unit 6, and a lifting motor 61. Figure 2 As shown, a receiving space S for accommodating the holding unit 7 and FOUP 200 is formed in the main body 10 of the transport vehicle. The receiving space S mainly consists of the aforementioned front frame 22 and rear frame 23, and covers 24 and 25 that cover the holding unit 7 in the lateral direction (see reference). Figure 4 (b) is used to fix it. The holding unit 7 as a whole is accommodated in the accommodating space S, for example. The accommodating space S can accommodate the entire FOUP200, or it can only accommodate the upper part of the FOUP200.

[0037] Controller 8 is configured, for example, on the front frame 22 and the rear frame 23. Controller 8 controls the lifting motor 61 to release the belt section B, causing the holding unit 7 to descend above the loading port 300. Controller 8 also controls the lifting motor 61 to wind up the belt section B, causing the holding unit 7 to rise and be housed within the transport vehicle body 10. The holding unit 7 can be raised and lowered above the FOUP 200 (above the loading port 300) by controlling the lifting motor 61 using controller 8. Controller 8 can detect the amount of belt section B released (belt length) by receiving rotation-related signals from the lifting motor 61. Controller 8 can detect the position (height) of the holding unit 7 based on the amount of belt section B released (belt length). Controller 8 is an electronic control unit consisting of a CPU (processor), ROM, and RAM. Controller 8 controls various parts of the aerial transport vehicle 1.

[0038] The aerial transport vehicle 1, configured as described above, operates as follows: When a FOUP 200 is transferred from the loading port 300 to the aerial transport vehicle 1, the aerial transport vehicle 1, without holding the FOUP 200, stops above the loading port 300. If the horizontal position of the holding unit 7 deviates from its position directly above the loading port 300, the horizontal position and angle of the holding unit are finely adjusted, along with the lifting drive unit 6, by driving the lateral unit 4 and the θ unit 5. Next, the lifting drive unit 6 lowers the holding unit 7, which holds the flange 201 of the FOUP 200 placed in the loading port 300. Next, the lifting drive unit 6 raises the holding unit 7 to its rising position, positioning the FOUP 200 between the front frame 22 and the rear frame 23. Then, the aerial transport vehicle 1, holding the FOUP 200, begins to move.

[0039] On the other hand, when transferring FOUP 200 from the aerial transport vehicle 1 to the loading port 300, the aerial transport vehicle 1, holding FOUP 200, stops above the loading port 300. If the horizontal position of the holding unit 7 (FOUP 200) deviates from its position directly above the loading port 300, the horizontal position and angle of the holding unit are finely adjusted, along with the lifting drive unit 6, by driving the lateral unit 4 and the θ unit 5. Next, the lifting drive unit 6 lowers the holding unit 7 and places FOUP 200 in the loading port 300, releasing the holding unit 7 from the flange 201 of FOUP 200. Next, the lifting drive unit 6 raises the holding unit 7 to its rising position. Then, the aerial transport vehicle 1, no longer holding FOUP 200, begins to move.

[0040] The overhead transport vehicle 1 of this embodiment includes a control mechanism for calming the swaying of the holding unit 7 during its ascent and descent (i.e., when the belt B is rolled up and released). This control mechanism, when the holding unit 7 is holding the FOUP 200, calms the swaying of the holding unit 7 and the FOUP 200, and within a limited time, houses the holding unit 7 (and the FOUP 200) within the transport vehicle body 10. Furthermore, even if the swaying of the holding unit 7 (and the FOUP 200) exceeds a predetermined amplitude that was previously difficult to automatically recover from, the control mechanism can calm the swaying, achieving automatic recovery of the overhead transport vehicle 1.

[0041] Reference Figures 2-5 This describes the control mechanism of the aerial transport vehicle 1 used to calm the swaying. Furthermore, in... Figure 2 The following figures schematically illustrate the components of the transport vehicle body 10, including the lifting drive unit 6, the belt section B, and the holding unit 7. Figure 2As shown, the aerial transport vehicle 1 includes a detection unit 67 for detecting the swaying of the holding unit 7. The detection unit 67 is, for example, mounted on the lifting drive unit 6. The detection unit 67 has, for example, a light-emitting section and a light-receiving section, both of which are exposed downwards. On the other hand, a reflector 77 is mounted on the upper surface of the holding unit 7. Based on the holding unit 7 hanging vertically (i.e., the belt B extending in the vertical direction), the detection unit 67 emits light downwards and detects the reflected light reflected by the reflector 77, thereby detecting the swaying of the holding unit 7. The detection unit 67 can determine whether the swaying of the holding unit 7 is greater or less than a certain threshold (e.g., a specified amplitude as described in this specification) by determining whether the reflected light reflected by the reflector 77 is detected. The detection unit 67 may be configured to compare and determine whether the swaying is greater or less than various thresholds (specified amplitude, calming amplitude, or permissible value, etc.) described later. The detection unit 67 only needs to have at least the ability to compare and determine whether the shaking is large or small relative to the specified amplitude described later.

[0042] The sway detected by the detection unit 67 can be, for example, a sway in the direction corresponding to the travel direction of the aerial transport vehicle 1 (the +X or -X direction shown in the figure). Alternatively, the sway detected by the detection unit 67 can be a sway in a horizontal lateral direction orthogonal to the travel direction (the +Y or -Y direction shown in the figure). Furthermore, the sway detected by the detection unit 67 can be a sway in all directions within the XY plane, combining swaying from these various directions. For example, the amplitude of either a positive or negative oscillation can be detected as the sway detected by the detection unit 67.

[0043] like Figure 2 As shown, the controller 8 includes a position acquisition unit 81, a sway acquisition unit 82, a judgment unit 83, and a motor control unit 84. By incorporating these functional elements, the controller 8 performs lifting control of the holding unit 7, which will be described later. Each functional element of the controller 8 is implemented by reading a program from a processor or main memory and executing that program.

[0044] The controller 8 stores a threshold value used in the lifting control described later. The controller 8 stores a predetermined amplitude as a first threshold related to swaying. This predetermined amplitude can be set, for example, from the viewpoint that the FOUP 200 should not come into contact with obstacles such as the wall on the device side when the holding unit 7 holds and pulls up the FOUP 200 placed in the loading port 300. For example, as... Figure 3 As shown in (a), in the direction of travel (X direction), the minimum distance between FOUP200 and the wall portion 310 of the device is the first distance L1. On the other hand, as Figure 3As shown in (b), the minimum distance between FOUP200 and the side wall 320 of the device in the lateral direction (Y direction) is the second distance L2. In this case, the specified amplitude can be set to either the first distance L1 or the second distance L2. The specified amplitude can also be set to the minimum value among these distances. The specified amplitude can be set based on the allowable value (physical allowable value) of the position change of FOUP200 relative to the device (semiconductor device manufacturing device, etc.) using the aerial transport vehicle 1. The specified amplitude can also be set based on the allowable value in a certain direction, either the travel direction or the lateral direction, or based on the allowable value in a direction different from these directions. This specified amplitude is used for the first sway calming control (first sway waiting control) in the lifting control.

[0045] The controller 8 can also store the calming amplitude, for example, as a second threshold related to the shaking. The calming amplitude can be set from the viewpoint that the holding unit 7 (or FOUP 200) does not contact the parts of the transport vehicle body 10 when the holding unit 7 is to be accommodated in the transport vehicle body 10.

[0046] For example, such as Figure 4 As shown in (a), in the travel direction (X direction), the minimum distance between the holding unit 7 and the rear frame 23 of the transport vehicle body 10 is the third distance L3. On the other hand, as Figure 4 As shown in (b), in the lateral direction (Y direction), the minimum distance between the holding unit 7 and the cover 24 of the transport vehicle body 10 is the fourth distance L4, and the minimum distance between the holding unit 7 and the cover 25 of the transport vehicle body 10 is the fifth distance L5. The transport vehicle body 10 may also have a positioning member 62 for positioning the holding unit 7 housed in the transport vehicle body 10. The positioning member 62 includes a conical portion 62a that opens downwards and a semi-cylindrical recess, i.e., a receiving recess 63, formed at the upper end of the conical portion 62a. On the other hand, the holding unit 7 includes an upright portion 73 that is erected on the upper surface of the holding unit 7 and protrudes upwards, and a cylindrical portion 74 mounted on the upper end of the upright portion 73. When the holding unit 7 is housed relative to the transport vehicle body 10 in a standard position, i.e., in a state of zero wobbling, the upright portion 73 and the cylindrical portion 74 are inserted from below into the center of the positioning member 62, and the cylindrical portion 74 is embedded in the receiving recess 63. Even when the unit 7 is kept slightly wobbly near the main body 10 of the transport vehicle, as long as the cylindrical part 74 enters the range of the cone 62a of the positioning member 62, the cylindrical part 74 will be guided by the cone 62a and eventually embedded into the receiving recess 63. Figure 4 In the fitted state shown in (b), the distance in the lateral direction (Y direction) between the upright part 73 (or cylindrical part 74) and the opening end (lower end) of the cone part 62a is the sixth distance L6.

[0047] In this case, the calming amplitude can be set to one of the third distance L3, the fourth distance L4, the fifth distance L5, or the sixth distance L6. The calming amplitude can also be set to the minimum value of these distances. The calming amplitude can also be set based on the allowable value (physical allowable value) of the positional change of the holding unit 7 relative to the transport vehicle body 10. The calming amplitude can also be set based on the allowable swaying value of the holding unit 7 when it is housed within the transport vehicle body 10, in a certain direction of travel or lateral of the air transport vehicle 1, and / or the allowable swaying value of the FOUP200. This calming amplitude is not used for control in this embodiment, but as a variation, it can also be used for the second sway calming control (second sway waiting control).

[0048] The cylindrical part 74 is embedded into the receiving recess 63, and the height at which the positioning of the retaining unit 7 is completed is the rising end of the retaining unit 7, which is the receiving position P3 of the retaining unit 7.

[0049] In this way, in the relationship between the transport vehicle body 10 and the holding unit 7, or the relationship between the transport vehicle body 10 and the FOUP 200 (held by the holding unit 7), the permissible value of the sway of the holding unit 7 when the transport vehicle body 10 contains the holding unit 7, and / or the permissible value of the sway of the FOUP 200, are determined physically. The aforementioned calming amplitude can also be set to be larger than the permissible value. In addition, the aforementioned specified amplitude can also be set to be larger than the permissible value. The specified amplitude used for the first sway calming control is set to be larger than the calming amplitude. In this specification, "calming the sway" means that the sway is below the calming amplitude, and the sway can also be substantially zero.

[0050] Next, the control (processing) performed by controller 8 (i.e., the method for controlling the lifting and lowering of the holding unit) will be explained. First, using... Figures 5-8 Explanation of roll-up control. Figure 5 This is a flowchart of the process executed by the controller 8 in the winding control. The controller 8 can control the holding unit 7 to descend to a position where it can hold the FOUP 200, so that the gripper 72 holds the FOUP 200. The controller 8 controls the lifting motor 61 to wind up the belt section B (step S11). As a result, the holding unit 7 and the FOUP 200 begin to rise.

[0051] In the description of the lifting control based on controller 8, the concept of "position" of holding unit 7, such as standby position, calm position, and receiving position, is used, but these "positions" are concepts corresponding to the height of holding unit 7. In controller 8, "position" corresponds, for example, to the amount of belt B being released. A long release amount means a low "position," that is, holding unit 7 is close to loading port 300. A short release amount means a high "position," that is, holding unit 7 is close to the transport vehicle body 10. Hereinafter, the position of holding unit 7 will sometimes be referred to as "lifting position."

[0052] like Figure 7 As shown in (a), the belt section B is wound up, causing the holding unit 7 and FOUP 200 to rise. The position acquisition unit 81 of the controller 8 receives a rotation-related signal from the lifting motor 61 and acquires the position of the holding unit 7 (step S12). During the winding control performed by the controller 8, position acquisition based on the position acquisition unit 81 is performed at predetermined intervals. Next, the controller 8 performs the first sway calming control (step S13).

[0053] Reference Figure 6 This explains the processing performed by the first sway calming control. In the roll-up control, the detection unit 67 detects the sway of the holding unit 7 (detection process). For example... Figure 6 As shown, the wobbling acquisition unit 82 of the controller 8 receives a signal from the detection unit 67 that detects the wobbling of the holding unit 7, and acquires the wobbling of the holding unit 7 (step S21). Next, the determination unit 83 of the controller 8 determines whether the wobbling detected by the detection unit 67 is greater than a predetermined amplitude (step S22). Figure 7 As shown in (b), for example, the illumination light from the detection unit 67 deviates from the reflector 77, causing the shaking of the holding unit 7 to increase. If it is determined that the shaking is greater than a predetermined amplitude (step S22: Yes), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the winding of the belt B, maintaining the holding unit 7 in an arbitrary standby position P1 (step S23). Afterwards, the controller 8 repeatedly performs the processing of step S21 and the determination of step S22.

[0054] In step S22, if it is determined that the swaying is below a specified amplitude (step S22: No), the motor control unit 84 of the controller 8 controls the lifting motor 61 to wind up the belt section B (step S24). Figure 7As shown in (c), for example, the illumination light from the detection unit 67 always illuminates the reflector 77, and the shaking of the holding unit 7 slightly subsides. In this way, the controller 8 restarts the winding of the belt section B at the point when the shaking of the holding unit 7 slightly subsides. However, the shaking that just becomes less than a predetermined amplitude is greater than the allowable value contained in the transport vehicle body 10; for example, it can be more than twice the allowable value, or more than three times the allowable value. The standby position P1 can be any position determined by the controller 8 as having a shaking greater than a predetermined amplitude. The standby position P1 can also be a position slightly higher than any position determined by the controller 8 as having a shaking greater than a predetermined amplitude (a higher position corresponding to the amount of time delay required for stop control). The processing of steps S22 to S24 above corresponds to the winding process in the lifting control method of the holding section described within the scope of patent protection.

[0055] In the first sway-suppression control, including steps S21 to S24, the winding is stopped or continues based on whether the sway of the holding unit 7 is greater than a predetermined threshold. The processing of step S23, which stops the winding, is equivalent to the first sway-waiting control. In the first sway-suppression control, the first sway-waiting control is executed when the sway of the holding unit 7 is greater than the predetermined threshold. As long as the sway of the holding unit 7 is not below the predetermined threshold, the first sway-waiting control is repeatedly executed, and the holding unit 7 is maintained in any standby position P1. That is, the first sway-waiting control is executed whenever it is determined that the sway is greater than the predetermined threshold. In the first sway-suppression control, the holding unit 7 is stopped and waited until it is safe to pull up the holding unit 7 and FOUP200, that is, until the sway of the holding unit 7 is calmed down to a certain degree of small sway. On the other hand, if the shaking of unit 7 is always below the specified amplitude when judged in step S22, the first shaking is not performed even once and the roll-up of the belt section B is controlled.

[0056] Next, the position acquisition unit 81 of the controller 8 receives a rotation-related signal from the lifting motor 61 and acquires the position of the holding unit 7 (step S25). Next, the determination unit 83 of the controller 8 determines whether the lifting position is a resting position (step S26). The controller 8 stores a resting position and a receiving position regarding the position of the holding unit 7. Prescribed control values ​​corresponding to the resting position and the receiving position are stored in the controller 8. The determination unit 83 of the controller 8 determines whether the position of the holding unit 7 is a resting position based on the position acquired by the position acquisition unit 81. By controlling the lifting motor 61 through the motor control unit 84 of the controller 8, the holding unit 7 can be stopped at the respective resting position and receiving position.

[0057] If the lifting position is determined to be not the resting position (step S26: No), the controller 8 repeatedly performs the processing of step S21. Thus, when the holding unit 7 rises, if a sway exceeding a predetermined amplitude is detected before the holding unit 7 reaches the resting position P2, the controller 8 repeatedly performs sway detection and first sway waiting control while winding up the belt section B (see reference). Figure 12 ).

[0058] On the other hand, in step S26, if it is determined that the rising / falling position is the leveling position (step S26: Yes), the process based on the controller 8 returns to... Figure 5 The process shown involves the determination unit 83 determining whether the first swaying wait control for maintaining the holding unit 7 in the standby position has been executed at least once (step S16). If it is determined that at least one sway is larger than a predetermined amplitude, the first swaying wait control is executed at least once (step S23). In this case, if it is determined that the holding unit 7 has stopped in the standby position (step S16: Yes), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the winding of the belt section B for a predetermined time, maintaining the holding unit 7 in the calm position P2 (step S17, see reference). Figure 8 (a)

[0059] The calming position P2 is the position between the standby position P1 and the receiving position P3. For example, the calming position P2 can be a position where the amount of tape B extended is slightly longer compared to the receiving position P3. In a side view, the calming position P2 can be a position where FOUP200 does not overlap with the main body 10 of the transport vehicle.

[0060] After a predetermined time has elapsed since the start of the process in step S17, the motor control unit 84 of the controller 8 controls the lifting motor 61 to restart the winding of the belt section B, performing climbing winding control (step S18). In climbing winding control, the motor control unit 84 of the controller 8 reduces the second winding speed in the winding control from the resting position P2 to the receiving position P3 to a speed lower than the first winding speed in the winding control from the standby position P1 to the resting position P2 (steps S11 and S24). Then, when the holding unit 7 is located in the receiving position P3, which is the rising end, the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the winding of the belt section B (step S19, see reference). Figure 8 (b)

[0061] In the second sway calming control, including steps S16 to S18, the winding is stopped for a predetermined time or the winding continues, depending on whether the first sway waiting control was executed. The processing of step S17, which stops the winding, is equivalent to the second sway waiting control. In the second sway calming control, without using the threshold related to the holding unit 7, the controller 8 stops the holding unit 7 at the calming position P2 for a predetermined time, thereby ensuring that the sway becomes smaller than the aforementioned calming amplitude.

[0062] In step S16, if it is determined that the holding unit 7 does not stop even once in the standby position (step S16: No), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the winding of the belt section B when the holding unit 7 is in the receiving position P3, which is the rising end (step S19). In this way, if the holding unit 7 does not sway more than a specified amplitude even once, no control is performed to stop winding or reduce the winding speed, and normal winding is performed.

[0063] Based on the control in the example above, when the holding unit 7 is rising, if a sway exceeding a predetermined amplitude is detected, a first sway waiting control is executed at least once. After the sway subsides slightly, and the release amount of the belt section B is shortened, a second sway waiting control is executed. As a result, the time until the sway of the holding unit 7 subsides can be shortened.

[0064] Next, refer to Figures 9-11 This indicates that control has been released. Figure 9 This is a flowchart of the process executed by controller 8 in the release control. Controller 8 controls the lifting motor 61 to release the belt section B, causing the holding unit 7 holding FOUP200 to descend from the receiving position P3 (step S31). Figure 10 As shown in (a), the belt release section B lowers the holding unit 7 and FOUP 200. The position acquisition section 81 of the controller 8 receives a rotation-related signal from the lifting motor 61 and acquires the position of the holding unit 7 (step S32). During the release control based on the controller 8, position acquisition based on the position acquisition section 81 is performed at predetermined intervals. Next, the determination section 83 of the controller 8 determines whether the holding unit 7 has reached the port position (step S33). The controller 8 stores the position of FOUP 200 placed on the loading port 300, i.e., the port position (placement position), regarding the position of the holding unit 7. A predetermined control value corresponding to the port position is stored in the controller 8. The determination section 83 of the controller 8 determines whether the position of the holding unit 7 is the port position based on the position acquired by the position acquisition section 81.

[0065] If it is determined that the holding unit 7 has not reached the port position (step S33: No), the sway acquisition unit 82 of the controller 8 receives a signal from the detection unit 67 that detects the sway of the holding unit 7, and acquires the sway of the holding unit 7 (step S34). Next, the determination unit 83 of the controller 8 determines whether the sway detected by the detection unit 67 is greater than a predetermined amplitude (step S35). If it is determined that the sway is greater than the predetermined amplitude (step S35: Yes), based on the processing of the controller 8, the process proceeds to the first sway cessation control (step S36), and the motor control unit 84 controls the lifting motor 61 to stop the winding of the belt section B, maintaining the holding unit 7 in an arbitrary standby position P1 (step S23). Afterwards, the controller 8 repeatedly performs the processing of step S21 and the determination of step S22.

[0066] The first sway calming control in step S36 and the first sway calming control in the roll-up control ( Figure 6 The steps S21 to S26 shown are the same. In the release control, the detection unit 67 detects the wobbling of the holding unit 7 (detection process). If it is determined midway through the release control that the wobbling is greater than the specified amplitude (step S22: Yes), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the release of the belt section B, and maintains the holding unit 7 in an arbitrary standby position P1 (step S23, (refer to...)). Figure 10 (b)). Afterwards, the controller 8 repeatedly performs the processing of step S21 and the judgment of step S22. If it is determined that the swaying is below the specified amplitude (step S22: No), the motor control unit 84 of the controller 8 controls the lifting motor 61 to wind up the belt section B (step S24, (refer to...)). Figure 10 (c)). In this way, the controller 8 temporarily winds up the belt section B at the point when the shaking of the holding unit 7 has slightly subsided, and shortens the release of the belt section B.

[0067] In the first sway-suppression control, including steps S21 to S24, the release is stopped or the winding begins at any standby position P1 based on whether the sway of the holding unit 7 is greater than a predetermined amplitude as a threshold. The process of stopping the winding in step S23 is equivalent to the first sway-waiting control. In the first sway-suppression control, the holding unit 7 is stopped for waiting control until it is safe to pull up the holding unit 7 and FOUP200, that is, until the sway of the holding unit 7 is calmed down to a certain degree of small sway.

[0068] The judgment unit 83 of the controller 8 determines whether the lifting position is the resting position (step S26). If it determines that the lifting position is not the resting position (step S26: no), the controller 8 repeatedly performs the processing of step S21. Thus, when the holding unit 7 is lowering, if a sway exceeding a predetermined amplitude is detected before the holding unit 7 reaches the resting position P2, the controller 8 repeatedly performs sway detection and first sway waiting control while winding up the belt section B (see reference). Figure 12 ).

[0069] In step S26, if it is determined that the rising / falling position is the leveling position (step S26: Yes), the process based on the controller 8 returns to... Figure 9 The illustrated process shows that the motor control unit 84 controls the lifting motor 61 to stop the winding of the belt section B for a predetermined time, and maintains the holding unit 7 in the flat position P2 (step S37, see reference). Figure 11 (a)

[0070] In the second sway calming control, including step S37, the rolling is stopped for a predetermined time while the holding unit 7 is rising to the calming position P2. The processing of step S37 is equivalent to the second sway waiting control. In the second sway calming control, the threshold related to the holding unit 7 is not used, and the controller 8 ensures that the sway becomes smaller than the aforementioned calming amplitude by stopping the holding unit 7 at the calming position P2 for a predetermined time.

[0071] After a predetermined time has elapsed since the start of the process in step S37, the process based on controller 8 returns to step S31. The motor control unit 84 of controller 8 controls the lifting motor 61 to release the belt section B, causing the holding unit 7 holding the FOUP200 to descend from the resting position P2. (As...) Figure 11 As shown in (b), the holding unit 7 is lowered while the shaking of the holding unit 7 has been fully calmed.

[0072] In step S33, if it is determined that the holding unit 7 has reached the port position (step S33: Yes), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the release of the belt unit B (step S38).

[0073] On the other hand, in step S35, if it is determined that the sway is below a predetermined amplitude (step S35: No), the controller 8 repeatedly performs the processing of step S32 and the determination of step S33. In step S33, if it is determined that the holding unit 7 has reached the port position (step S33: Yes), the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the release of the belt section B (step S38). In this way, when the holding unit 7 descends, if the sway of the holding unit 7 is always below a predetermined amplitude at the time of the determination in step S35, the first sway waiting control is not performed to release the belt section B even once. If the holding unit 7 does not sway more than a predetermined amplitude even once, the control to stop the release or to stop the winding by shortening the release amount of the belt section B is not performed, but normal winding is performed.

[0074] Using the control described in the example above, when the holding unit 7 is descending, if a sway exceeding a predetermined amplitude is detected, a first sway waiting control is executed at least once. After the sway subsides slightly, and the release amount of the belt section B is shortened, a second sway waiting control is executed. As a result, the time until the sway of the holding unit 7 subsides can be shortened.

[0075] According to the lifting control method of the overhead conveyor 1 and the holding unit 7 in this embodiment, the lifting motor 61 is controlled by the controller 8 to release or wind up the belt B, causing the holding unit 7 to descend or rise. Since the holding unit 7 descends or rises while suspended by the belt B, it will sway. This swaying refers to the belt B swinging in a certain direction at an angle, based on its vertical extension. In this overhead conveyor, if the swaying of the holding unit 7 exceeds a predetermined amplitude, the controller 8 stops the winding of the belt B and maintains the holding unit 7 in a standby position P1, lower than the receiving position P3. Then, if the swaying of the holding unit 7 falls below the predetermined amplitude, the controller 8 winds up the belt B. In this way, the holding unit 7 remains in the standby position P1 until the swaying falls below the predetermined amplitude, and then begins winding up again when the swaying falls below the predetermined amplitude. Therefore, in the event of swaying of the holding unit 7, the operation of the overhead conveyor, including the lifting and lowering of the holding unit 7, can be automatically resumed.

[0076] like Figure 12 As shown in the state transition diagram, according to the lifting control method of the aerial transport vehicle 1 and the holding unit 7 of this embodiment, starting from normal lifting control, the system transitions to normal lifting control after passing through a first sway waiting control at the standby position P1 when a large sway ("swing" shown in the diagram) is detected, further winding up the belt section B, and a second sway waiting control at the calming position P2. Based on this series of controls, rapid automatic recovery can be achieved.

[0077] The predetermined range used as the criterion for determining whether to keep the holding unit 7 in the standby position P1 is set to be greater than the allowable value of sway when the holding unit 7 is housed. According to this control, the holding unit 7 is kept in the standby position P1 until a relatively large sway subsides slightly, and then winding begins again at the point when the sway converges to the predetermined range. By restarting winding, the length (release amount) of the tape section B is shortened. Compared to waiting in the standby position P1 until the sway becomes close to the aforementioned allowable value (or until the sway reaches the aforementioned allowable value), restarting winding earlier allows the sway to subside more quickly overall.

[0078] In the winding control of the winding section B, if the first sway waiting control of the holding unit 7 in the standby position P1 has been executed at least once, the controller 8 executes a second sway waiting control to stop the winding of the section B for a predetermined time when the holding unit 7 is in the calm position P2, and to maintain the holding unit 7 in the calm position P2. By executing the second sway waiting control in the calm position P2 using the controller 8, swaying can be reliably calmed before the holding unit 7 is housed in the transport vehicle body 10.

[0079] The second winding speed in the winding control from the calm position P2 to the receiving position P3 is lower than the first winding speed in the winding control from the calm position P2 to the receiving position P3. Since winding from the calm position P2 to the receiving position P3 takes time, residual sway can be effectively reduced.

[0080] When the controller 8 controls the release of the belt section B by controlling the lifting motor 61, if the swaying of the holding unit 7, detected by the detection unit, exceeds a predetermined amplitude, the release of the belt section B is stopped. Subsequently, when the swaying of the holding unit 7 falls below the predetermined amplitude, the belt section B is wound up, and the holding unit 7 is held in a calming position P2, lower than the receiving position P3. According to this control, compared to waiting for calming at the position where swaying exceeding the predetermined amplitude is initially detected, swaying can be calmed more quickly overall.

[0081] The embodiments of this disclosure have been described above, but the present invention is not limited to the above embodiments. For example, in Figure 5In the shown winding control, when the motor control unit 84 of the controller 8 stops the holding unit 7 at the resting position P2 (step S17), the wobbling acquisition unit 82 of the controller 8 can acquire the wobbling at the resting position of the holding unit 7. Next, the judgment unit 83 of the controller 8 can also determine whether the wobbling detected by the detection unit 67 is greater than the resting amplitude. If it is determined that the wobbling is greater than a predetermined amplitude, the controller 8 can repeatedly acquire the wobbling at the resting position and compare and judge the wobbling with the resting amplitude. If it is determined that the wobbling is less than the resting amplitude, the motor control unit 84 of the controller 8 controls the lifting motor 61 to wind up the belt section B. When the holding unit 7 is in the receiving position P3, which is the rising end, the motor control unit 84 of the controller 8 controls the lifting motor 61 to stop the winding of the belt section B.

[0082] According to this control, the holding unit 7 remains in the calmed position P2 until the swaying becomes below the calmed amplitude. Utilizing the two-stage sway calming control (sway waiting control) between the standby position P1 and the calmed position P2, the holding unit 7 can safely and quickly rise to the receiving position P3. Furthermore, the calmed amplitude is set based on the permissible value of swaying when receiving the object in either the driving direction or the lateral direction; therefore, the two-stage sway calming control is reliably and quickly executed.

[0083] It can also be omitted Figure 5 The step S17 is shown. That is, the swaying when the holding unit 7 is in the calm position P2 can be determined without stopping the winding of the belt section B, and the control is made to stop the winding of the belt section B based on the determination result. In this case, if it is determined that the swaying is greater than a predetermined amplitude, the controller 8 stops the winding of the belt section B. If it is determined that the swaying is less than the calm amplitude, the controller 8 continues to wind up the belt section B.

[0084] exist Figure 9 In the release control shown, the controller 8 can also, in the same way as the modified roll-up control described above, acquire the swaying, compare and determine the swaying and calming amplitudes while the holding unit 7 is stopped in the calming position P2 (step S37).

[0085] The form in which the holding unit 7 holds the FOUP 200 is not limited to the above-described embodiment. The reflector 77 may be omitted, and a portion of the holding unit 7 may perform the same function as the reflector 77. The detection unit is not limited to a light-emitting or light-receiving type detection unit. For example, the detection unit may be a detection unit that detects the shaking pattern of the holding unit 7 by taking an image of the holding unit 7 with a camera and performing image processing.

[0086] The detection unit 67 can also be configured to detect the magnitude (amplitude) of the sway of the holding unit 7 based on the aforementioned state. For example, if the belt B extends in the vertical direction, the sway of the holding unit 7 is 0. The detection unit 67 can be configured to detect the amplitude (maximum amplitude during detection) of the sway of the holding unit 7 in a certain horizontal direction based on this state. Furthermore, in order to detect the sway numerically or to detect the sway by comparing it with multiple thresholds, it is necessary to photograph the holding unit 7 with a camera or to set up multiple sets of detection units and reflectors.

[0087] The sway detected by the detection unit, or the sway acquired by the controller (or calculated), is not limited to the state of the belt B extending in the vertical direction. For example, when the aerial transport vehicle 1 is traveling at a predetermined acceleration, the sway can also be defined based on the predetermined posture of the belt B and the holding unit 7. For example, it can also be based on the state in which the belt B forms a small angle relative to the vertical direction in front of or behind the direction of travel. The calming amplitude can also be set to the same value as the aforementioned physical tolerance.

[0088] The suspension part is not limited to the belt part B. The suspension part can be a linear member such as a cable. The gripping part can also have a different configuration than the holding unit 7. The gripping part can also have other configurations that enable it to grip a part of an item.

[0089] Items are not limited to FOUP200. Items can be SMIF (Standard Mechanical Interface) Pods or FOSB (Front Opening Shipping Boxes), etc.

[0090] Explanation of reference numerals in the attached figures

[0091] 1. Overhead transport vehicle, 2. Frame unit, 6. Lifting drive unit, 7. Holding unit (holding part), 10. Transport vehicle body, 61. Lifting motor (drive part), 67. Detection part, 200. FOUP (item), 300. Loading port (placement part), B-belt part (suspension part), P1. Standby position, P2. Calm position, P3. Accommodation position, S. Accommodation space.

Claims

1. An aerial transport vehicle, characterized in that, have: The part that holds an object; The suspension part that suspends the gripping part; A drive unit that lowers the gripping part by releasing the suspension part and raises the gripping part by rolling up the suspension part; The main body of the transport vehicle is equipped with the suspension unit and the drive unit; A detection unit that detects the shaking of the gripping part; as well as The controller controls the drive unit to roll up the suspension unit and accommodate the gripping unit within the transport vehicle body. In the winding control of the suspension part, the controller stops winding the suspension part if the shaking of the gripping part detected by the detection unit exceeds a predetermined amplitude. The controller then maintains the gripping part in a standby position lower than the position where the gripping part is housed within the main body of the transport vehicle. Thereafter, the controller winds the suspension part if the shaking of the gripping part falls below the predetermined amplitude. In the roll-up control of the suspension part, if the controller has executed at least once the first sway waiting control of maintaining the grip part in the standby position, it executes a second sway waiting control to stop the roll-up of the suspension part for a predetermined time and maintain the grip part in the resting position when the grip part is in the calm position between the standby position and the receiving position. If the first sway waiting control is not executed, the second sway waiting control is not executed.

2. The aerial transport vehicle according to claim 1, characterized in that, The specified amplitude is set to be greater than the permissible sway of the handle when the handle is contained in the main body of the transport vehicle and / or the permissible sway of the item.

3. The aerial transport vehicle according to claim 1 or 2, characterized in that, The second winding speed in the winding control from the calm position to the receiving position is less than the first winding speed in the winding control to the calm position.

4. An aerial transport vehicle, characterized in that, have: The part that holds an object; The suspension part that suspends the gripping part; A drive unit that lowers the gripping part by releasing the suspension part and raises the gripping part by rolling up the suspension part; The main body of the transport vehicle is equipped with the suspension unit and the drive unit; A detection unit that detects the shaking of the gripping part; as well as The controller controls the drive unit to roll up the suspension unit and accommodate the gripping unit within the transport vehicle body. In the winding control of the suspension part, the controller stops winding the suspension part if the shaking of the gripping part detected by the detection unit exceeds a predetermined amplitude. The controller then maintains the gripping part in a standby position lower than the position where the gripping part is housed within the main body of the transport vehicle. Thereafter, the controller winds the suspension part if the shaking of the gripping part falls below the predetermined amplitude. In the release control of the suspension part, if the shaking of the gripping part detected by the detection unit exceeds the predetermined amplitude, the controller stops the release of the suspension part. Thereafter, if the shaking of the gripping part is below the predetermined amplitude, the controller rolls up the suspension part and maintains the gripping part in a calm position lower than the receiving position.

5. A lifting control method for a gripping part, which is a lifting control method for the gripping part in an aerial transport vehicle, the aerial transport vehicle comprising the gripping part for gripping an item, a suspension part for suspending the gripping part, a drive part for lowering the gripping part by extending the suspension part and raising the gripping part by rolling up the suspension part, a transport vehicle body on which the suspension part and the drive part are mounted, and a detection part for detecting the swaying of the gripping part. The lifting control method of the gripping part is characterized in that... In the roll-up control of the suspension part. include: The detection process involves using the detection unit to detect the shaking of the gripping part; as well as In the rolling-up process, if the shaking of the gripping part exceeds a predetermined range, the rolling up of the suspension part is stopped. The gripping part is maintained in a standby position lower than the position where the gripping part is housed within the main body of the transport vehicle. Thereafter, if the shaking of the gripping part falls below the predetermined range, the suspension part is rolled up. In the roll-up control of the suspension part, if at least one first sway waiting control is performed in the standby position during the roll-up process, a second sway waiting control is performed to stop the roll-up of the suspension part for a predetermined time and maintain the grip part in the resting position when the grip part is in the calm position between the standby position and the receiving position.

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