Silicon tube cleaning device and cleaning method

Abstract

The present invention provides a silicon tube cleaning device and cleaning method. The silicon tube cleaning device includes a liquid collecting tank, the bottom surface of which is provided with a lower liquid port; a filter, which is arranged below the liquid collecting tank and connected with the lower liquid port; an infusion pump, which is arranged below the liquid collecting tank and the inlet of the infusion pump is connected with the filter; an inlet pipe, the inlet end of the inlet pipe is connected with the outlet of the infusion pump, the outlet end of the inlet pipe is located above the liquid collecting tank and the opening faces upward; a return pipe, the inlet end of the return pipe is located above the outlet end of the inlet pipe and the opening faces downward, the outlet end of the return pipe is located in the liquid collecting tank and the opening faces downward; a support rod, the bottom of the support rod is connected with the side wall of the liquid collecting tank, and two fixing clamps are installed on the support rod, and the fixing clamps are used to clamp and fix the silicon tube. The present invention designs a cleaning device specially used for silicon tubes, which adopts a bottom-in-top-out method to introduce cleaning liquid, so that the cleaning liquid can fill the inside of the tube, flush the inner wall of the tube, and achieve an ideal cleaning effect.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning equipment, and in particular to a silicon tube cleaning device and a cleaning method. Background Art

[0002] Silicon materials are commonly used components in semiconductor equipment. Diffusion equipment uses many silicon tubular parts, which are generally called silicon tubes in the industry. If the inside of the silicon tube is not clean, it will affect the performance of the semiconductor material, so it needs to be cleaned regularly.

[0003] The existing technology generally uses acid immersion for cleaning. In order to make the cleaning more thorough, the acid is oscillated, bubbled or convected in the cleaning tank. This cleaning mode is more suitable for parts with simple structures, but for tubular parts, the acid cannot effectively flush the inner wall of the tube, especially the inner wall of the silicon tube with a large aspect ratio will be attached to impurities such as metal ions and organic matter, and the existing cleaning method is not effective. Summary of the invention

[0004] The problem to be solved by the present invention is how to effectively clean silicon tubular parts.

[0005] In order to solve the above problems, the present invention provides a silicon tube cleaning device, comprising:

[0006] A liquid collecting tank, used for containing cleaning liquid, wherein the bottom surface of the liquid collecting tank is provided with a liquid outlet;

[0007] A filter, the filter is arranged below the liquid collecting tank and communicated with the lower liquid port;

[0008] An infusion pump, wherein the infusion pump is arranged below the liquid collecting tank, and an inlet of the infusion pump is connected to the filter;

[0009] A liquid inlet pipe, wherein the inlet end of the liquid inlet pipe is connected to the outlet of the infusion pump, and the outlet end of the liquid inlet pipe is located above the liquid collecting tank and the opening faces upward;

[0010] A liquid return pipe, wherein the inlet end of the liquid return pipe is located above the outlet end of the liquid inlet pipe and opens downward, and the outlet end of the liquid return pipe is located in the liquid collecting tank and opens downward;

[0011] A support rod, the bottom of which is connected to the side wall of the liquid collecting tank, and two fixing clips are installed on the support rod, and the fixing clips are used to clamp and fix the silicon tube.

[0012] Compared with the prior art, the present invention designs a cleaning device specifically for silicon tubes, in which the silicon tube is clamped and fixed by a fixing clamp, the lower end of the silicon tube is connected to the liquid inlet pipe, and the upper end is connected to the liquid return pipe. The cleaning liquid is introduced in a bottom-in-top-out manner, so that the cleaning liquid can fill the inside of the tube and flush the inner wall of the tube to achieve an ideal cleaning effect. The infusion pump is used to provide flow power for the cleaning liquid, and the filter can filter out impurities in the cleaning liquid, so as to achieve the recycling of the cleaning liquid in the liquid collecting tank and extend the service life of the cleaning liquid.

[0013] In a preferred or optional solution, a liquid inlet joint is provided on the outlet end of the liquid inlet pipe, and a liquid outlet connector is provided on the inlet end of the liquid return pipe, and the liquid outlet connector includes a connecting cap, a connecting hose and a liquid outlet joint arranged in sequence, and the connecting cap is installed on the inlet end of the liquid return pipe, and the liquid inlet joint and the liquid outlet joint are used to connect the two ends of the silicon tube respectively. The liquid outlet joint is connected to the connecting hose, and the height can be adjusted, so that it is convenient to connect with silicon tubes of different lengths and sizes, so the cleaning device has good versatility.

[0014] In a preferred or optional solution, the liquid inlet joint includes a first tube seat and a first liquid passing pipe, the first tube seat is connected to the liquid inlet pipe, the first liquid passing pipe is arranged on the first tube seat and passes through the top of the first tube seat, the first liquid passing pipe is communicated with the liquid inlet pipe, the outer diameter of the first liquid passing pipe is smaller than the inner diameter of the silicon tube, the outer diameter of the first tube seat is greater than or equal to the outer diameter of the silicon tube, the liquid outlet joint includes a second tube seat and a second liquid passing pipe, the second tube seat is connected to the liquid return pipe, the second liquid passing pipe is arranged on the second tube seat and passes through the bottom of the second tube seat, the second liquid passing pipe is communicated with the connecting hose, the outer diameter of the second liquid passing pipe is smaller than the inner diameter of the silicon tube, the outer diameter of the second tube seat is greater than or equal to the outer diameter of the silicon tube, a first annular gasket is provided on the top of the first tube seat, a second annular gasket is provided on the bottom of the second tube seat, and the outer diameters of the first annular gasket and the second annular gasket are greater than or equal to the outer diameter of the silicon tube. The first liquid passing pipe and the second liquid passing pipe can enter the interior of the silicon tube, so that the cleaning liquid can directly enter the interior of the silicon tube, enter the connecting hose along the second liquid passing pipe, and then enter the return liquid pipe. Annular gaskets are arranged on the first tube seat and the second tube seat, thereby improving the connection sealing performance between the liquid inlet joint, the liquid outlet joint and the silicon tube.

[0015] In a preferred or optional solution, the first annular gasket has an upwardly protruding first boss, which is suitable for inserting the silicon tube and interferingly connecting with the silicon tube, and the second annular gasket has a downwardly protruding second boss, which is suitable for inserting the silicon tube and interferingly connecting with the silicon tube. Providing the boss can make the annular gasket form a tight connection with the silicon tube, and prevent the silicon tube from being separated from the liquid inlet joint or the liquid outlet joint.

[0016] In a preferred or optional solution, the support rod is provided with a plurality of connection holes penetrating in the thickness direction in the height direction, the fixing clamp comprises a connecting rod, a first clamping plate and a second clamping plate, the first clamping plate is connected to the connecting rod, the first clamping plate and the second clamping plate are connected by a screw rod, so that the silicon tube is clamped between the first clamping plate and the second clamping plate. The two clamping plate structure can be adapted to silicon tubes of different diameters, and the two clamping plates are connected by a screw rod for a good clamping effect.

[0017] In a preferred or optional solution, an inner thread is provided on the inner wall of the connecting hole, an outer thread is provided on the outer wall of one end of the connecting rod connected to the support rod, and the connecting rod is threadedly connected to the connecting hole. The connecting rod and the support rod are easy to assemble and reliably connected. Due to the threaded connection, the extension length of the connecting rod relative to the support rod can be adjusted within the extension length range of the thread, so that the silicon tube is conveniently positioned at a suitable position for connection with the liquid inlet pipe and the liquid return pipe.

[0018] In a preferred or optional solution, the upper portion of the liquid return pipe is placed in the pipe bracket, the lower portion of the support rod is provided with a pipe penetration hole, the pipe penetration hole is located below the lowermost connecting hole, and the lower portion of the liquid return pipe passes through the pipe penetration hole. The pipe bracket and the pipe penetration hole support and position the liquid return pipe to prevent the liquid return pipe from shaking.

[0019] In a preferred or optional solution, the filter includes a filter housing, a filtrate inlet is provided at the top of the filter housing, a filtrate outlet is provided at the bottom of the filter housing, three layers of parallel partitions are provided in the filter housing, a plurality of filter holes are provided on the partitions, the space above each layer of the partitions is a filter space, the filter space is filled with activated carbon particles, the particle size of the activated carbon particles is larger than the diameter of the filter holes, and the top surface of the partition is covered with an acid-resistant filter membrane. The filter has three layers of filter space, the filter space is filled with activated carbon particles, which can absorb metal ions, organic matter and other impurities in the silicon tube cleaning liquid, and the partition cleaning liquid can only flow downward from the filter holes, thereby extending the residence time of the cleaning liquid in the filter space and improving the filtering effect. The acid-resistant filter membrane can further enhance the filter's filtering effect on metal ions and organic matter, and prevent the activated carbon particles from entering the filter holes and causing blockage.

[0020] In a preferred or optional solution, the height of the three filter spaces increases from top to bottom, and the particle size of the activated carbon particles filled in the three filter spaces decreases from top to bottom. This layout structure of the filter can achieve a shorter residence time of the cleaning liquid containing more impurities in the upper filter space, while the cleaning liquid containing less impurities stays longer in the lower filter space, which is conducive to evenly distributing the filtration load of each layer of the filter space, thereby extending the service life of the filter. At the same time, filling activated carbon particles of different particle sizes in different filter spaces can achieve layered filtration of impurities, gradually improve the filtration accuracy, and achieve better filtration effect.

[0021] The second aspect of the present invention provides a silicon tube cleaning method, using the above-mentioned silicon tube cleaning device, the silicon tube cleaning method comprises the following steps: the cleaning liquid is contained in the liquid collecting tank, the silicon tube is installed on the cleaning device, the liquid inlet pipe is connected with the lower end of the silicon tube, the liquid return pipe is connected with the upper end of the silicon tube, the silicon tube is fixed by a fixing clamp, the infusion pump is turned on to introduce the cleaning liquid into the silicon tube, and the flow rate of the cleaning liquid is set according to the inner diameter of the silicon tube to satisfy the following relationship:

[0022]

[0023] Among them, d is the inner diameter of the silicon tube, p is the outlet pressure of the infusion pump, and q is the inflow flow rate of the cleaning fluid.

[0024] The above method uses a silicon tube cleaning device to clean the silicon tube. The cleaning liquid flows in the silicon tube in a bottom-in-top-out manner, which can effectively remove impurities attached to the inside of the tube and significantly improve the cleaning effect. The present invention also summarizes a cleaning liquid flow calculation formula based on cleaning experiments. By controlling the flow within the range of the formula, the silicon tube can be cleaned, energy consumption can be saved, the filter can be ensured to work effectively, and the cleaning liquid can be recycled.

[0025] In summary, the present invention has the following beneficial effects:

[0026] 1) The silicon tube cleaning device can realize the cleaning method of the cleaning liquid entering from the bottom and exiting from the top, and make the cleaning liquid circulate rapidly, fully contact with the inner wall of the tube, effectively remove the metal ions and organic matter attached to the inner wall of the tube, and significantly improve the cleaning effect of the silicon tube with a large depth-to-diameter ratio;

[0027] 2) The cleaning liquid in the liquid collecting tank can be recycled, without the need to prepare a large amount of liquid medicine, thus saving raw material costs;

[0028] 3) The filter can filter out impurities that enter the cleaning liquid during the cleaning process, thus extending the service life of the cleaning liquid;

[0029] 4) The silicon tube cleaning device is designed with a special clamping structure and connection structure, which can be adapted to silicon tubes of different lengths and diameters, thus improving the versatility of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a front view of a silicon tube cleaning device according to an embodiment of the present invention;

[0031] Figure 2 It is a three-dimensional structural diagram of a silicon tube cleaning device in an embodiment of the present invention;

[0032] Figure 3 is a structural diagram of a fixing clip in an embodiment of the present invention;

[0033] Figure 4 This is a structural diagram of a liquid inlet connector in an embodiment of the present invention;

[0034] Figure 5 It is a structural diagram of a liquid outlet connector in an embodiment of the present invention;

[0035] Figure 6 A structural diagram of a filter in an embodiment of the present invention;

[0036] Figure 7 is a longitudinal cross-sectional view of a filter in an embodiment of the present invention;

[0037] Figure 8 is a transverse cross-sectional view of a filter in an embodiment of the present invention;

[0038] Fig. 9 Schematic diagram of the use status of the silicon tube cleaning device in an embodiment of the present invention.

[0039] Description of reference numerals:

[0040] 1-liquid collecting tank, 11-support foot, 2-filter, 21-filter housing, 22-filtrate inlet, 23-filtrate outlet, 24-partition, 25-filter hole, 26-filter space, 3-infusion pump, 4-liquid inlet pipe, 41-liquid inlet joint, 42-first pipe seat, 43-first liquid pipe, 44-first annular gasket, 5-liquid return pipe, 51-connecting cap, 52-connecting hose, 53-liquid outlet joint, 54-second pipe seat, 55-second liquid pipe, 56-second annular gasket, 57-first insert pipe, 58-second insert pipe, 6-support rod, 61-connecting hole, 62-tube bracket, 63-tube through hole, 7-fixing clamp, 71-connecting rod, 72-first clamping plate, 73-second clamping plate, 74-screw, 75-arc groove, 8-silicon tube. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] It should be noted that similar symbols and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

[0043] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, or are the positions or positional relationships in which the inventive product is usually placed when in use, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. A coordinate system XYZ is provided in the drawings of the embodiments of the present invention, wherein the positive direction of the X-axis represents the front, the reverse direction of the X-axis represents the back, the positive direction of the Y-axis represents the right, the reverse direction of the Y-axis represents the left, the positive direction of the Z-axis represents the top, and the reverse direction of the Z-axis represents the bottom.

[0044] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0046] Combination Figures 1 to 9As shown, an embodiment of the present invention provides a silicon tube cleaning device, which is specially used for cleaning silicon tubular parts of semiconductor processing equipment. The silicon tube cleaning device includes a liquid collecting tank 1, a filter 2, an infusion pump 3, a liquid inlet pipe 4, a liquid return pipe 5 and a clamping mechanism. The liquid collecting tank 1 is used to contain cleaning liquid, and the bottom surface of the liquid collecting tank 1 is provided with a lower liquid port; the filter 2 is arranged below the liquid collecting tank 1 and connected with the lower liquid port, and is used to filter the cleaning liquid; the infusion pump 3 is arranged below the liquid collecting tank 1, the inlet of the infusion pump 3 is connected with the filter 2, and the outlet is connected with the liquid inlet pipe 4, and is used to provide the flow power of the cleaning liquid; the liquid inlet pipe 4 is used to pass the cleaning liquid into the silicon tube 8, and its outlet end is located above the liquid collecting tank 1 and the opening is upward; the liquid return pipe 5 is used to lead out the cleaning liquid in the silicon tube 8, and its inlet end is located above the outlet end of the liquid inlet pipe 4 and the opening is downward, and the outlet end of the liquid return pipe 5 is located in the liquid collecting tank 1 and the opening is downward, so that the cleaning liquid can be discharged into the liquid collecting tank 1; the clamping mechanism is used to clamp and position the silicon tube 8, and the silicon tube 8 is installed on the cleaning device. The above-mentioned silicon tube cleaning device fixes the silicon tube 8 by a clamping mechanism. The lower end of the silicon tube 8 can be connected to the liquid inlet pipe 4, and the upper end is connected to the liquid return pipe 5. The cleaning liquid is introduced in a bottom-in-top-out manner, so that the cleaning liquid can fill the inside of the tube and flush the inner wall of the tube to achieve an ideal cleaning effect. The filter 2 can filter out impurities in the cleaning liquid, realize the recycling of the cleaning liquid in the liquid collecting tank 1, extend the service life of the cleaning liquid, and save costs.

[0047] Combination Figure 1 and Figure 2 As shown, the liquid collecting tank 1 is a square tank, and a support leg 11 is respectively provided at the four corners of the bottom thereof, so that the lower part of the liquid collecting tank 1 has equipment installation space, which is convenient for installing the filter 2 and the infusion pump 3.

[0048] The clamping mechanism includes a support rod 6 and two fixing clamps 7. The support rod 6 is arranged in the vertical direction (Z-axis direction). The support rod 6 is provided with a plurality of connecting holes 61 penetrating in the thickness direction (Y-axis direction) in the height direction. The fixing clamp 7 includes a connecting rod 71 and a clamping member. One end of the connecting rod 71 is inserted into the connecting hole 61 and detachably connected to the support rod 6, and the other end is connected to the clamping member. The clamping member is used to clamp the silicon tube 8. The two fixing clamps 7 of the clamping mechanism are arranged on the vertical support rod 6, and can clamp the upper and lower parts of the silicon tube 8, fix the silicon tube 8 and keep it in a vertical state, thereby realizing a cleaning method in which the cleaning liquid enters from the bottom and exits from the top.

[0049] Furthermore, an internal thread is provided on the inner wall of the connection hole 61, and an external thread is provided on the outer wall of one end of the connection rod 71 connected to the support rod 6. The connection rod 71 is threadedly connected to the connection hole 61. This connection structure is easy to assemble and has reliable connection. In addition, within the extension length range of the external thread, the connection rod 71 can move in the Y-axis direction, that is, the distance between the clamping member and the support rod 6 can be adjusted, so that the silicon tube 8 can be positioned at a suitable position, which is convenient for connection with the liquid inlet pipe 4 and the liquid return pipe 5.

[0050] In this embodiment, the number of connection holes 61 is 15, and adjacent connection holes 61 are arranged equidistantly. The arrangement of multiple connection holes 61 can flexibly adjust the installation height of the fixing clamp 7, adapt to silicon tubes 8 of different lengths, and improve the versatility of the cleaning device. The distance between adjacent connection holes 61 is 10 cm, so that the distance between two fixing clamps 7 can be slightly adjusted. In other embodiments, the number of connection holes 61 is 10 to 20, and the distance between adjacent connection holes 61 is between 5 and 20 cm.

[0051] The return pipe 5 of the silicon tube cleaning device is relatively long and is prone to shaking. A pipe support groove 62 is provided at the top of the support rod 6, and a pipe penetration hole 63 is provided at the bottom. The pipe penetration hole 63 is located below the lowermost connection hole 61. The upper part of the return pipe 5 is placed in the pipe support groove 62. The pipe support groove 62 plays a supporting role to position the upper part of the return pipe 5. The lower part of the return pipe 5 is passed through the pipe penetration hole 63. The pipe penetration hole 63 plays a supporting and positioning role. The pipe support groove 62 cooperates with the pipe penetration hole 63 to position the upper and lower parts of the return pipe 5 respectively to prevent the return pipe 5 from shaking.

[0052] Combination Figure 3 As shown, the clamping member includes a first clamping plate 72, a second clamping plate 73 and four screws 74. The first clamping plate 72 is connected to the connecting rod 71. The four corners of the first clamping plate 72 and the second clamping plate 73 are provided with screw holes. The screws 74 pass through the screw holes to connect the first clamping plate 72 and the second clamping plate 73. The silicon tube 8 can be clamped by the first clamping plate 72 and the second clamping plate 73. The distance between the first clamping plate 72 and the second clamping plate 73 can be adjusted, so this clamping member can be adapted to silicon tubes 8 of different diameters and has good versatility. In this embodiment, the material of the first clamping plate 72 and the second clamping plate 73 is selected from polytetrafluoroethylene material, which has good durability and will not damage the surface of the silicon tube 8 when clamping.

[0053] Furthermore, arc grooves 75 are provided on the two opposite wall surfaces of the first clamping plate 72 and the second clamping plate 73. When the clamping piece is in use, the silicon tube 8 can enter the arc groove 75, and the outer wall fits with the arc groove 75. This can increase the contact area between the clamping plate and the silicon tube 8 and avoid local force. The arc groove 75 is provided to facilitate the positioning of the silicon tube 8 and avoid tilting.

[0054] Combination Figure 1 and Figure 2As shown, a liquid inlet joint 41 is provided on the liquid outlet of the liquid inlet pipe 4, which is used to connect with the lower end of the silicon tube 8; a liquid outlet connector is provided on the liquid inlet of the liquid return pipe 5, and the liquid outlet connector includes a connecting cap 51, a connecting hose 52 and a liquid outlet joint 53 which are arranged in sequence, the connecting cap 51 is installed on the liquid inlet of the liquid return pipe 5, and the liquid outlet joint 53 is used to connect with the upper end of the silicon tube 8. The liquid outlet joint 53 is connected to the connecting hose 52, and the setting position and height can be adjusted, so the cleaning connection structure can be adapted to silicon tubes 8 of different lengths and sizes, and has good versatility.

[0055] In this embodiment, the distance between the liquid outlet of the liquid inlet pipe 4 and the liquid inlet of the liquid return pipe 5 is 1.5m, which meets the size requirements of most silicon tubes 8, and the length of the connecting hose 52 is 25cm, which is relatively long and can be adapted to various lengths of silicon tubes 8. In other embodiments, the distance between the liquid outlet of the liquid inlet pipe 4 and the liquid inlet of the liquid return pipe 5 is between 1 and 2m, and the length of the connecting hose 52 is between 20 and 50cm.

[0056] Combination Figure 4 As shown, the liquid inlet connector 41 includes a first tube seat 42 and a first liquid passage 43. The first tube seat 42 is threadedly connected to the liquid inlet tube 4, which is easy to install. The first liquid passage 43 is arranged on the first tube seat 42 and passes through the top of the first tube seat 42. The first liquid passage 43 is connected to the liquid inlet tube 4. The material of the first liquid passage 43 is PVC. A first annular gasket 44 is arranged on the top of the first tube seat 42 to improve the sealing performance of the connection between the liquid inlet connector 41 and the silicon tube 8. The material of the first annular gasket 44 is polytetrafluoroethylene, which has good sealing performance and corrosion resistance. The outer diameter of the first liquid passage 43 is smaller than the inner diameter of the silicon tube 8, the outer diameter of the first tube seat 42 is greater than or equal to the outer diameter of the silicon tube 8, and the outer diameter of the first annular gasket 44 is greater than or equal to the outer diameter of the silicon tube 8. When the liquid inlet joint 41 is connected to the silicon tube 8, the bottom of the silicon tube 8 abuts against the first annular gasket 44, and the first liquid passage 43 can enter the interior of the silicon tube 8, so that the cleaning liquid can directly pass into the interior of the silicon tube 8, thereby improving the sealing performance of the connection between the liquid inlet joint 41 and the silicon tube 8.

[0057] Combination Figure 5As shown, the liquid outlet connector includes a connecting cap 51, a connecting hose 52 and a liquid outlet connector 53. The connecting cap 51 is threadedly connected to the liquid return pipe 5, which is easy to install and has reliable connection. A first insert 57 is provided at the bottom of the connecting cap 51, and a second insert 58 is provided at the top of the second pipe seat 54. The two ends of the connecting hose 52 are respectively sleeved on the first insert 57 and the second insert 58. The connecting cap 51, the connecting hose 52 and the liquid outlet connector 53 can be replaced separately. The connecting hose 52 is made of ethylene oxide, which is soft and convenient for fixing the liquid outlet connector 53 in a suitable position, and has good durability. The liquid outlet connector 53 includes a second pipe seat 54 and a second liquid pipe 55. The second liquid pipe 55 is arranged on the second pipe seat 54 and passes through the bottom of the second pipe seat 54. The second liquid pipe 55 is connected to the connecting hose 52, and the material of the second liquid pipe 55 is PVC. A second annular gasket 56 is provided on the top of the second tube seat 54, which is used to improve the sealing performance of the connection between the liquid outlet joint 53 and the silicon tube 8. The material of the second annular gasket 56 is polytetrafluoroethylene, which has good corrosion resistance. The outer diameter of the second liquid pipe 55 is smaller than the inner diameter of the silicon tube 8, the outer diameter of the second tube seat 54 is greater than or equal to the outer diameter of the silicon tube 8, and the outer diameter of the second annular gasket 56 is greater than or equal to the outer diameter of the silicon tube 8. When the liquid outlet joint 53 is connected to the silicon tube 8, the fixed part of the silicon tube 8 abuts against the second annular gasket 56, and the second liquid pipe 55 can enter the inside of the silicon tube 8, so that the cleaning liquid can enter the connecting hose 52 along the second liquid pipe 55, and then enter the liquid return pipe 5, thereby improving the sealing performance of the connection between the liquid outlet joint 53 and the silicon tube 8.

[0058] Further, the first annular gasket 44 has an upwardly protruding first boss (not shown in the figure), which is suitable for inserting into the silicon tube 8 and being connected with the silicon tube 8 by interference fit; the second annular gasket 56 has a downwardly protruding second boss (not shown in the figure), which is suitable for inserting into the silicon tube 8 and being connected with the silicon tube 8 by interference fit. The provision of the boss can enable the annular gasket to form a tight connection with the silicon tube 8, thereby preventing the silicon tube 8 from being separated from the liquid inlet joint 41 or the liquid outlet joint 53.

[0059] Combination Figure 6 As shown, the filter 2 includes a filter housing 21. The top of the filter housing 21 is provided with a filtrate inlet 22, and the bottom is provided with a filtrate outlet 23. The cleaning liquid to be filtered is in the top-in and bottom-out manner to ensure smooth flow. The side wall of the filter housing 21 is cylindrical, with a diameter of 25 cm and a height of 40 cm. The cylindrical shell has high strength and is easy to install. The overall volume of the filter 2 is small, which can meet the assembly requirements of the silicon tube cleaning device. The bottom wall of the filter housing 21 is a conical surface, which plays a guiding role and is conducive to the outflow of the cleaning liquid. In other embodiments, the diameter of the side wall of the filter housing 21 is between 10 and 50 cm, and the height is between 20 and 50 cm.

[0060] Combination Figure 7As shown, three layers of parallel partitions 24 are arranged in the filter housing 21, the partitions 24 are arranged horizontally, and a plurality of filter holes 25 are arranged on the partitions 24, and the space above each layer of partitions 24 is a filter space 26, so there are three layers of filter spaces 26 in the filter housing 21, and the filter space 26 is filled with activated carbon particles, which can adsorb metal ions, organic matter and other impurities in the cleaning liquid of the silicon tube 8, and the cleaning liquid can only flow downward from the filter holes 25, thereby extending the residence time of the cleaning liquid in the filter space 26 and improving the filtering effect. The particle size of the activated carbon particles is larger than the diameter of the filter hole 25, so as to prevent the activated carbon particles from entering the filter hole 25 and causing blockage.

[0061] In this embodiment, the heights of the three layers of filter spaces 26 are equal, all being 10 cm. The activated carbon particles filled in each layer of filter space 26 are the same. The filter 2 of this structure is convenient to process and has a low manufacturing cost.

[0062] In another embodiment, the height of the three layers of the three-layer filter space 26 increases from top to bottom, so that the cleaning liquid containing more impurities stays in the upper filter space 26 for a shorter time, while the cleaning liquid containing less impurities stays in the lower filter space 26 for a longer time, which is conducive to evenly distributing the filtering load of each layer of the filter space 26 to extend the service life of the filter 2. In addition, the particle size of the activated carbon particles filled in the three-layer filter space 26 decreases from top to bottom, so that different impurities can be filtered in layers, the filtering accuracy is gradually improved, and the filtering effect is better.

[0063] Combination Figure 8 As described above, the filter holes 25 on the partition 24 are arranged in a lattice, and the lattice arrangement can evenly distribute the flow of the cleaning liquid passing through each filter hole 25, and the filter 2 can still work normally when some of the filter holes 25 are blocked. The pore size of the filter hole 25 is small, with a diameter between 1 and 3 mm, thereby reducing the probability of activated carbon particles entering the filter hole 25 and increasing the residence time of the cleaning liquid in the filter space 26.

[0064] Furthermore, the top surface of the partition 24 is covered with an acid-resistant filter membrane (not shown in the figure). The provision of the acid-resistant filter membrane can further enhance the filtering effect of the filter 2 on metal ions and organic matter, and can prevent activated carbon particles from entering the filter pores 25 and causing blockage, thereby extending the service life of the filter 2.

[0065] Another embodiment of the present invention provides a silicon tube cleaning method, using the cleaning device in the above embodiment, and the cleaning method includes the following steps: the cleaning liquid is contained in the liquid collecting tank 1, the silicon tube 8 is installed on the cleaning device, the liquid inlet pipe 4 is connected with the lower end of the silicon tube 8, the liquid return pipe 5 is connected with the upper end of the silicon tube 8, the silicon tube 8 is clamped and fixed with a fixing clamp 7, and the infusion pump 3 is turned on to pass the cleaning liquid into the silicon tube 8. The flow direction of the cleaning liquid is to flow out from the liquid collecting tank 1, be filtered in the filter 2, be transported to the liquid inlet pipe 4 by the infusion pump 3, flow into the silicon tube 8 from the lower end, flow out from the upper end of the silicon tube 8 into the liquid return pipe 5, and then be discharged from the liquid return pipe 5 back to the liquid collecting tank 1, thereby forming a flow cycle.

[0066] The above method realizes a cleaning mode in which the cleaning liquid enters from the bottom and exits from the top, and makes the cleaning liquid circulate rapidly, making full contact with the inner wall of the tube, effectively removing metal ions and organic matter attached to the inner wall of the tube, and significantly improving the cleaning effect of the silicon tube 8 with a large aspect ratio; and the cleaning liquid in the liquid collecting tank 1 can be recycled, without the need to prepare a large amount of liquid medicine, thus saving raw material costs; the filter 2 is provided to filter impurities entering the cleaning liquid during the cleaning process, thereby extending the service life of the cleaning liquid; the silicon tube cleaning device is also designed with a special clamping mechanism and connection structure, which can be adapted to silicon tubes 8 of different lengths and diameters, thereby improving the versatility of the device.

[0067] Furthermore, during cleaning, the flow rate of the cleaning liquid can be set according to the inner diameter of the silicon tube 8 so that the flow rate satisfies the following relationship:

[0068] Among them, d is the inner diameter of the silicon tube, p is the outlet pressure of the infusion pump, and q is the inflow flow rate of the cleaning fluid.

[0069] In the above formula, the outlet pressure of the infusion pump 3 is determined by the equipment, the flow rate can be adjusted, and the inner diameters of the silicon tubes 8 are different. According to the cleaning experiment, a calculation formula for the flow rate of the cleaning liquid is summarized. If the flow rate is controlled within the range of the formula, the silicon tube 8 can be cleaned, and energy consumption can be saved, ensuring that the filter 2 can work effectively and the cleaning liquid can be recycled.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon tube cleaning device, characterized in that: include A liquid collecting tank (1) is used to contain cleaning liquid, and a liquid outlet is provided on the bottom surface of the liquid collecting tank (1); A filter (2), the filter (2) being arranged below the liquid collecting tank (1) and being in communication with the lower liquid port; the filter (2) comprising a filter housing (21), the top of the filter housing (21) being provided with a filtrate inlet (22), the bottom of the filter housing (21) being provided with a filtrate outlet (23), the filter housing (21) being provided with three layers of parallel partitions (24), the partitions (24) being provided with a plurality of filter holes (25), the space above each layer of the partitions (24) being a filter space (26), the filter space (26) being filled with activated carbon particles, the particle size of the activated carbon particles being larger than the diameter of the filter holes (25), and the top surface of the partition (24) being covered with an acid-resistant filter membrane; an infusion pump (3), the infusion pump (3) being arranged below the liquid collecting tank (1), and the inlet of the infusion pump (3) being connected to the filter (2); A liquid inlet pipe (4), the inlet end of the liquid inlet pipe (4) being connected to the outlet of the infusion pump (3), and the outlet end of the liquid inlet pipe (4) being located above the liquid collecting tank (1) and opening upward; A liquid return pipe (5), wherein the inlet end of the liquid return pipe (5) is located above the outlet end of the liquid inlet pipe (4) and opens downward, and the outlet end of the liquid return pipe (5) is located in the liquid collecting tank (1) and opens downward; A support rod (6), the bottom of which is connected to the side wall of the liquid collecting tank (1), and two fixing clamps (7) are installed on the support rod (6), and the fixing clamps (7) are used to clamp and fix the silicon tube (8); the support rod (6) is provided with a plurality of connecting holes (61) penetrating along the thickness direction in the height direction, and the fixing clamp (7) comprises a connecting rod (71), a first clamping plate (72) and a second clamping plate (73), the first clamping plate (72) is connected to the connecting rod (71), and the first clamping plate (72) and the second clamping plate (73) are connected by a screw (74), so that the silicon tube (8) is clamped between the first clamping plate (72) and the second clamping plate (73).

2. The silicon tube cleaning device according to claim 1, characterized in that: The outlet end of the liquid inlet pipe (4) is provided with a liquid inlet joint (41), and the inlet end of the liquid return pipe (5) is provided with a liquid outlet connector, the liquid outlet connector comprising a connecting cap (51), a connecting hose (52) and a liquid outlet joint (53) which are arranged in sequence, the connecting cap (51) is installed on the inlet end of the liquid return pipe (5), and the liquid inlet joint (41) and the liquid outlet joint (53) are respectively used to connect the two ends of the silicon tube (8).

3. The silicon tube cleaning device according to claim 2, characterized in that: The liquid inlet joint (41) comprises a first tube seat (42) and a first liquid passage pipe (43); the first tube seat (42) is connected to the liquid inlet pipe (4); the first liquid passage pipe (43) is arranged on the first tube seat (42) and passes through the top of the first tube seat (42); the first liquid passage pipe (43) is connected to the liquid inlet pipe (4); the outer diameter of the first liquid passage pipe (43) is smaller than the inner diameter of the silicon tube (8); the outer diameter of the first tube seat (42) is greater than or equal to the outer diameter of the silicon tube (8); the liquid outlet joint (53) comprises a second tube seat (54) and a second liquid passage pipe (55); the second tube seat (54) is connected to the liquid return pipe ( 5), the second liquid-passing pipe (55) is arranged on the second pipe seat (54) and passes through the bottom of the second pipe seat (54), the second liquid-passing pipe (55) is connected to the connecting hose (52), the outer diameter of the second liquid-passing pipe (55) is smaller than the inner diameter of the silicon tube (8), the outer diameter of the second pipe seat (54) is greater than or equal to the outer diameter of the silicon tube (8), the top of the first pipe seat (42) is provided with a first annular gasket (44), the bottom of the second pipe seat (54) is provided with a second annular gasket (56), and the outer diameters of the first annular gasket (44) and the second annular gasket (56) are greater than or equal to the outer diameter of the silicon tube (8).

4. The silicon tube cleaning device according to claim 3, characterized in that: The first annular gasket (44) has a first boss protruding upward, and the first boss is suitable for being inserted into the silicon tube (8) and being interference-connected with the silicon tube (8). The second annular gasket (56) has a second boss protruding downward, and the second boss is suitable for being inserted into the silicon tube (8) and being interference-connected with the silicon tube (8).

5. The silicon tube cleaning device according to claim 4, characterized in that: An inner wall of the connecting hole (61) is provided with an internal thread, an outer wall of one end of the connecting rod (71) connected to the support rod (6) is provided with an external thread, and the connecting rod (71) is threadedly connected to the connecting hole (61).

6. The silicon tube cleaning device according to claim 4, characterized in that: The top of the support rod (6) is provided with a pipe bracket groove (62), the upper part of the liquid return pipe (5) is placed in the pipe bracket groove (62), the lower part of the support rod (6) is provided with a pipe penetration hole (63), the pipe penetration hole (63) is located below the lowermost connecting hole (61), and the lower part of the liquid return pipe (5) passes through the pipe penetration hole (63).

7. The silicon tube cleaning device according to claim 1, characterized in that: The heights of the three layers of the filter space (26) increase sequentially from top to bottom, and the particle sizes of the activated carbon particles filled in the three layers of the filter space (26) decrease sequentially from top to bottom.

8. A silicon tube cleaning method, characterized in that: Using the silicon tube cleaning device as claimed in any one of claims 1 to 7, the silicon tube cleaning method comprises the following steps: the cleaning liquid is contained in the liquid collecting tank (1), the silicon tube (8) is installed on the cleaning device, the liquid inlet pipe (4) is connected with the lower end of the silicon tube (8), the liquid return pipe (5) is connected with the upper end of the silicon tube (8), the silicon tube (8) is clamped and fixed with a fixing clamp (7), the infusion pump (3) is turned on to pass the cleaning liquid into the silicon tube (8), and the flow rate of the cleaning liquid is set according to the inner diameter of the silicon tube (8) to satisfy the following relationship: ； Among them, d is the inner diameter of the silicon tube, p is the outlet pressure of the infusion pump, and q is the inflow flow rate of the cleaning fluid.

Images