An integrated optoelectronic oscillator

Abstract

This invention discloses an integrated optoelectronic oscillator, relating to the field of microwave photonics technology, comprising a connected optical input module and an optoelectronic resonant cavity. The optical input module outputs an tunable continuous optical signal and adjusts the state of the generated optical signal to a state that can be directly input to on-chip devices. The optoelectronic resonant cavity includes an electro-optic frequency shifter, an optoelectronic conversion module, and an RF beam splitter forming a closed loop. The electro-optic frequency shifter changes the frequency of a portion of the optical signal output from the optical input module to generate two optical signals with a frequency difference, which are then output. The optoelectronic conversion module converts the optical signal output from the electro-optic frequency shifter into a beat-frequency microwave signal with gain, and then outputs it. The RF beam splitter divides the microwave signal output from the optoelectronic conversion module. This invention can generate higher quality microwave signals and has better flexibility, adapting to more application scenarios.

Description

Technical Field

[0001] This invention relates to the field of microwave photonics technology, and more specifically to an integrated optoelectronic oscillator. Background Technology

[0002] Microwave sources are core components of microwave and microwave photonic systems, and the quality of the microwave signal determines the upper limit of system performance. Utilizing the advantages of photonics to generate microwave signals can achieve higher frequency bands and lower signal noise, making it one of the key areas of research in microwave photonics. Opto-electronic oscillators utilize a hybrid opto-cavity to oscillate microwave signals, thereby generating high-quality microwave signals, and are currently the mainstream method for photogenerated microwaves.

[0003] Integrated optoelectronic oscillators, achieved using mature chip manufacturing processes, can effectively reduce size and power consumption, and are currently a key research trend. However, on-chip photoelectric conversion technology, especially on-chip modulation devices, currently suffers from problems such as large insertion loss and low modulation efficiency. Higher-order modulation sidebands introduce additional noise, limiting the performance of the implemented optoelectronic oscillators. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the purpose of this invention is to provide an integrated optoelectronic oscillator that can generate higher quality microwave signals and has better flexibility, making it adaptable to more application scenarios.

[0005] To achieve the above objectives, the technical solution adopted by the present invention includes a connected optical input module and an optoelectronic resonant cavity;

[0006] The optical input module is used to output an adjustable continuous optical signal and adjust the state of the generated optical signal to a state that can be directly input to the on-chip device;

[0007] The optoelectronic resonant cavity includes an electro-optic frequency shifter, an optoelectronic conversion module, and an RF beam splitter forming a closed loop;

[0008] The electro-optic frequency shifter is used to change the frequency of a portion of the optical signal output by the optical input module, so as to generate two optical signals with a frequency difference and output them.

[0009] The photoelectric conversion module is used to convert the optical signal output by the electro-optic frequency shifter into a beat frequency microwave signal with gain, and then output it.

[0010] The radio frequency beam splitter module is used to input a portion of the microwave signal output by the photoelectric conversion module into the electro-optic frequency shifter, and output the other portion as a microwave signal generated by the photoelectric oscillator.

[0011] Based on the above technical solution, the optical input module and the optoelectronic resonant cavity are monolithically integrated.

[0012] Based on the above technical solution, the optical input module consists of a tunable continuous light laser, or a tunable continuous light laser and a polarization controller.

[0013] Based on the above technical solution, when the tunable continuous light laser is an off-chip device, the optical input module also includes an on-chip optical coupling input device.

[0014] Based on the above technical solutions,

[0015] The electro-optic frequency shifter includes a bus waveguide, coupled dual micro-rings, a ground electrode, and a radio frequency electrode;

[0016] The bus waveguide is mutually coupled with the coupled dual micro-rings;

[0017] The radio frequency electrode and the ground electrode are used to simultaneously apply microwave signals to the two microrings of the coupled dual microrings.

[0018] Based on the above technical solutions,

[0019] The electro-optic frequency shifter includes a coupled dual micro-ring, a ground electrode, a radio frequency electrode, a 1×2MMI (multimode interferometer) and a 2×1MMI, as well as a waveguide and a bus waveguide located between the 1×2MMI and the 2×1MMI;

[0020] The bus waveguide is mutually coupled with the coupled dual micro-rings;

[0021] The radio frequency electrode and the ground electrode are used to simultaneously apply microwave signals to the two microrings of the coupled dual microrings;

[0022] The 1×2MMI is used to split the optical signal output from the optical input module into two paths, and the 2×1MMI is used to combine the two optical signals into one path.

[0023] Based on the above technical solutions,

[0024] The photoelectric conversion module includes a photoelectric detection module and a radio frequency amplification module connected in sequence;

[0025] The photoelectric detection module is used to beat the optical signal output by the electro-optic frequency shifter to generate a microwave signal and output it.

[0026] The radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

[0027] Based on the above technical solutions,

[0028] The photoelectric conversion module includes an optical amplification module and a photoelectric detection module connected in sequence;

[0029] The optical amplification module is used to amplify and output the optical signal output by the electro-optic frequency shifter;

[0030] The photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

[0031] Based on the above technical solutions,

[0032] The photoelectric conversion module includes an adjustable filter module, a photoelectric detection module, and a radio frequency amplification module connected in sequence.

[0033] The adjustable filtering module is used to filter the optical signal output by the electro-optic frequency shifter;

[0034] The photoelectric detection module is used to beat the optical signal filtered by the adjustable filter module to generate a microwave signal and output it.

[0035] The radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

[0036] Based on the above technical solutions,

[0037] The photoelectric conversion module includes an adjustable filter module, an optical amplification module, and a photoelectric detection module connected in sequence.

[0038] The adjustable filtering module is used to filter the optical signal output by the electro-optic frequency shifter;

[0039] The optical amplification module is used to amplify and output the optical signal filtered by the adjustable filter module;

[0040] The photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

[0041] Compared with existing technologies, the advantages of this invention are as follows: Utilizing the high-efficiency, low-insertion-loss electro-optic conversion of the electro-optic frequency shifter can improve the quality of the signal generated by the optoelectronic oscillator and effectively reduce system power consumption. Simultaneously, since the electro-optic frequency shifter does not introduce frequency components other than the target frequency, compared to the modulator which introduces higher-order sidebands, this method can reduce introduced noise and improve the phase noise of the signal generated by the optoelectronic oscillator. Furthermore, by adding an adjustable filter module to the system, the frequency of the microwave signal generated by the optoelectronic oscillator can be adjusted, providing greater flexibility and adapting to more application scenarios. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 This is a schematic diagram of an integrated optoelectronic oscillator according to an embodiment of the present invention;

[0044] Figure 2 This is a schematic diagram of the structure of the photoelectric resonant cavity in an embodiment of the present invention;

[0045] Figure 3 This is a schematic diagram of one structure of the electro-optic frequency shifter in an embodiment of the present invention;

[0046] Figure 4 This is a schematic diagram of one structure of the electro-optic frequency shifter in an embodiment of the present invention;

[0047] Figure 5 This is a schematic diagram of one structure of the integrated optoelectronic oscillator in an embodiment of the present invention;

[0048] Figure 6 This is a schematic diagram of one structure of the integrated optoelectronic oscillator in an embodiment of the present invention;

[0049] Figure 7 This is a schematic diagram of one structure of the integrated optoelectronic oscillator in an embodiment of the present invention;

[0050] Figure 8 This is a schematic diagram of one structure of the integrated optoelectronic oscillator in an embodiment of the present invention. Detailed Implementation

[0051] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0052] See Figure 1 As shown, this embodiment of the invention provides an integrated optoelectronic oscillator that can effectively improve electro-optical conversion efficiency, reduce system insertion loss, and enhance the performance of the optoelectronic oscillator. It includes a connected optical input module and an optoelectronic resonant cavity. Light emitted from the optical input module enters the optoelectronic resonant cavity, generating and outputting a microwave signal. Specifically, the optical input module is used to output an adjustable continuous optical signal and adjust the state of the generated optical signal to a state that can be directly input to on-chip devices.

[0053] See Figure 2As shown, the optoelectronic resonant cavity includes an electro-optic frequency shifter, an optoelectronic conversion module, and an RF beam splitter module forming a closed loop. The connections between these components are explained as follows: the optical input module is connected to the electro-optic frequency shifter; the electro-optic frequency shifter is connected to the optoelectronic conversion module; the optoelectronic conversion module is connected to the RF beam splitter module; and the RF beam splitter module splits the signal into two paths: one path connects to the electro-optic frequency shifter, and the other path outputs a microwave signal. The electro-optic frequency shifter, optoelectronic conversion module, and RF beam splitter module together form a closed loop.

[0054] In this invention, the electro-optic frequency shifter is used to change the frequency of a portion of the optical signal output by the optical input module, so as to generate two optical signals with a frequency difference and output them. That is, the electro-optic frequency shifter is used to frequency shift the optical signal, and the magnitude of the frequency shift is related to the input microwave signal.

[0055] The photoelectric conversion module is used to convert the optical signal output from the electro-optic frequency shifter into a beat-frequency microwave signal with gain, and then output it; that is, the photoelectric conversion module beats multiple optical signals, converts them into electrical signals, and amplifies the optical or electrical signals. Optionally, the photoelectric conversion module can also filter the optical signal.

[0056] The radio frequency beam splitter module is used to input a portion of the microwave signal output from the photoelectric conversion module into the electro-optic frequency shifter, and output the other portion as a microwave signal generated by the photoelectric oscillator.

[0057] In this invention, the basic working principle of the integrated optoelectronic oscillator is as follows: the optical input module generates a continuous optical signal and adjusts its state before inputting it into an electro-optic frequency shifter, changing the frequency of a portion of the optical signal to generate two optical signals with a frequency difference. These signals are then converted by the optoelectronic conversion module to generate a beat-frequency microwave signal with gain, which is input into the radio frequency beam splitter module. The radio frequency beam splitter module inputs a portion of the microwave signal into the electro-optic frequency shifter, while the other portion is output as the microwave signal generated by the optoelectronic oscillator. Since the frequency shifting efficiency of the electro-optic frequency shifter is frequency-dependent, it has the highest conversion efficiency at a specific frequency. This introduces a frequency selection effect into the optoelectronic resonant cavity, allowing signals matching that frequency to be superior to other modes in mode competition, thus generating oscillation and outputting a high-quality microwave signal. When the optoelectronic conversion module also includes an adjustable filter module, mode selection can be achieved through the filter, thereby changing the frequency of the generated microwave signal.

[0058] In this invention, the optical input module consists of a tunable continuous-wave laser, or a tunable continuous-wave laser and a polarization controller. Furthermore, when the tunable continuous-wave laser is an off-chip device, the optical input module also includes an on-chip optical coupling input device. The optical coupling input device can be a coupling grating, a mode converter, or other devices commonly used by researchers in the art.

[0059] In this invention, the optical input module and the optoelectronic resonant cavity are monolithically integrated. That is, the optical input module and the optoelectronic resonant cavity can be monolithically integrated using heterogeneous integration technology, hybrid integration technology, or other integration technologies commonly used by researchers in this field.

[0060] In one possible embodiment, the electro-optic frequency shifter is structured as follows: Figure 3 As shown, the electro-optic frequency shifter includes a bus waveguide, coupled dual micro-rings, a ground electrode, and an RF electrode. The electro-optic frequency shifter is an on-chip integrated device that can be implemented based on lithium niobate thin film material, or optionally, based on electro-optic polymers or other optical chip materials capable of on-chip phase modulation. Figure 3 In the diagram, 1211 represents the bus waveguide, 1212 represents the coupled dual micro-ring, 1213 represents the ground electrode, and 1214 represents the radio frequency electrode.

[0061] In this embodiment, the bus waveguide is coupled to the coupled dual microrings; the radio frequency electrode and the ground electrode are used to simultaneously apply microwave signals to the two microrings of the coupled dual microrings.

[0062] The following combination Figure 3 The electro-optic frequency shifter structure shown illustrates its working principle: When a microwave signal is applied to the coupled dual microrings via RF electrodes and a ground electrode, the electro-optic effect of the material introduces a microwave driving effect, causing the symmetrical and asymmetrical modes of the two microrings to couple together, forming a photonic two-level system. The angular frequency corresponding to the symmetrical mode is denoted as ω1, and the angular frequency corresponding to the asymmetrical mode is denoted as ω2. After the bus waveguide is coupled to the coupled dual microrings, the coupling state of the two microrings and the bus waveguide can be changed by controlling the applied microwave signal. Changing the power of the microwave signal can alter the ratio of the symmetrical and asymmetrical modes coupled into the bus waveguide, and changing the frequency of the microwave signal can change the magnitude of the frequency difference between the modes coupled into the bus waveguide. When the angular frequency of the continuous optical signal input to the bus waveguide is adjusted to ω1, and the frequency of the applied microwave signal is ω, the output of the bus waveguide will consist of two optical signals with angular frequencies of ω1 and ω1+ω (or ω1-ω), respectively. The ratio of these two optical signals can be changed by controlling the power of the microwave signal. When the microwave signal is adjusted to a suitable value, making the ratio of the two optical signals 1:1, the electro-optic frequency shifter effectively splits the input optical signal with angular frequency ω1 into two optical signals with angular frequencies of ω1 and ω1+ω (or ω1-ω). The conversion efficiency is highest when ω = |ω1-ω2|.

[0063] In one possible embodiment, the electro-optic frequency shifter is structured as follows: Figure 4As shown, the electro-optic frequency shifter includes a coupled dual micro-ring, a ground electrode, an RF electrode, a 1×2MMI (multimode interferometer) and a 2×1MMI, as well as a waveguide and a bus waveguide located between the 1×2MMI and the 2×1MMI. Figure 4 In the diagram, 1211 represents the bus waveguide, 1212 represents the coupled dual micro-ring, 1213 represents the ground electrode, 1214 represents the RF electrode, 1215 represents the 1×2 MMI, 1216 represents the waveguide, and 1217 represents the 2×1 MMI.

[0064] In this embodiment, the bus waveguide and the coupled dual microrings are coupled to each other; the radio frequency electrode and the ground electrode are used to simultaneously apply the microwave signal to the two microrings of the coupled dual microrings; the 1×2MMI is used to split the optical signal output by the optical input module into two paths, and the 2×1MMI is used to combine the two optical signals into one path.

[0065] The following combination Figure 4 The electro-optic frequency shifter structure shown illustrates its working principle: When the angular frequency of the input optical signal is ω1, it is split into two paths after passing through a 1×2 MMI. One part is directly input to a 2×1 MMI via a waveguide, and the other part enters the input terminal of the bus waveguide. According to... Figure 3 As shown in the diagram, the electro-optic frequency shifter works by converting an input microwave signal with an angular frequency of ω into an optical signal with an angular frequency of ω1 when the microwave signal is adjusted to a suitable value. The converted optical signal is then combined with the optical signal with an angular frequency of ω1 at a 2×1 MMI. At the output of the 2×1 MMI, there will be two optical signals with angular frequencies of ω1 and ω1+ω (or ω1-ω), respectively, and the amplitudes of the two signals will be equal. Therefore, the electro-optic frequency shifter effectively splits the input optical signal with an angular frequency of ω1 into two optical signals with angular frequencies of ω1 and ω1+ω (or ω1-ω).

[0066] In one possible embodiment, the structure of the photoelectric conversion module is as follows: Figure 5 As shown, the photoelectric conversion module includes a photoelectric detection module and a radio frequency amplification module connected in sequence; the photoelectric detection module is used to beat the optical signal output by the electro-optic frequency shifter to generate a microwave signal and output it; the radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

[0067] The following combination Figure 5The photoelectric conversion module structure shown illustrates the working principle of the integrated photoelectric oscillator of this invention: The optical input module outputs a continuous optical signal with an angular frequency of ω1 and adjusts it to its optimal state before inputting it into the electro-optic frequency shifter. Based on the above effect, two optical signals with angular frequencies of ω1 and ω1+ω (or ω1-ω) are output, and their amplitudes are equal. These two optical signals are input into the photoelectric detection module, where they generate a microwave signal with an angular frequency of ω through beat frequency conversion. The microwave signal is amplified by the RF amplification module, making the gain of the entire loop greater than the loss. The amplified microwave signal is then processed by the RF beam splitter, with one part input into the electro-optic frequency shifter as microwave drive and the other part as the output signal of the photoelectric oscillator. When there is no external microwave signal input, the microwave signal in the system will be generated by white noise through mode competition via the overall gain. Since the frequency shifting efficiency of the electro-optic frequency shifter is highest when the angular frequency of the microwave signal satisfies ω=|ω1-ω2|, the mode with an angular frequency of ω will be selected in the mode competition, other modes will be suppressed, and finally, single-mode output is achieved.

[0068] In one possible embodiment, the structure of the photoelectric conversion module is as follows: Figure 6 As shown, the photoelectric conversion module includes an optical amplification module and a photoelectric detection module connected in sequence; the optical amplification module is used to amplify and output the optical signal output by the electro-optic frequency shifter; the photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

[0069] Figure 6 The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is similar to... Figure 5 The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is basically the same. The difference is that the two optical signals generated by the electro-optic frequency shifter are amplified by the optical amplification module to make the gain of the entire loop greater than the loss, and then the microwave signal is generated by the beat frequency of the photoelectric detection module. The optical amplification module can be implemented by an on-chip rare-earth-doped amplifying waveguide amplifier, or by a hybrid integrated semiconductor amplifier or other technologies commonly used in this field.

[0070] In one possible embodiment, the structure of the photoelectric conversion module is as follows: Figure 7 As shown, the photoelectric conversion module includes an adjustable filter module, a photoelectric detection module, and a radio frequency amplification module connected in sequence; the adjustable filter module is used to filter the optical signal output by the electro-optic frequency shifter; the photoelectric detection module is used to beat the optical signal filtered by the adjustable filter module to generate a microwave signal and output it; the radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

[0071] Figure 7 The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is similar to... Figure 5The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is basically the same, the difference being that the two optical signals generated by the electro-optic frequency shifter first pass through the adjustable filter module before entering the photoelectric detection module. When the center angular frequency of the filter passband of the adjustable filter module is ω... f At that time, the angular frequency ω = |ω1 - ω will be actively selected. f The system selects the appropriate mode and suppresses other modes to generate a microwave signal with an angular frequency of ω. Therefore, by changing the center of the filter passband of the adjustable filter module, the frequency of the generated microwave signal can be adjusted, giving the optoelectronic oscillator greater flexibility. It is important to note that the electro-optic frequency shifter has the highest conversion efficiency when the microwave signal ω = |ω1 - ω2|, and the conversion efficiency gradually decreases away from this frequency. Therefore, the center angular frequency of the filter passband of the adjustable filter module is ω. f The adjustment range is within a certain range close to ω2.

[0072] The adjustable filter module can be implemented by an on-chip adjustable micro-ring resonator, or by an on-chip adjustable Mach-Zehnder interferometer, an on-chip adjustable Bragg grating, or other technologies commonly used in the field.

[0073] In one possible embodiment, the structure of the photoelectric conversion module is as follows: Figure 8 As shown, the photoelectric conversion module includes an adjustable filter module, an optical amplification module, and a photoelectric detection module connected in sequence; the adjustable filter module is used to filter the optical signal output by the electro-optic frequency shifter; the optical amplification module is used to amplify and output the optical signal filtered by the adjustable filter module; and the photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

[0074] Figure 8 The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is similar to... Figure 7 The working principle of the integrated optoelectronic oscillator corresponding to the photoelectric conversion module structure shown is basically the same. The difference is that the optical signal after passing through the adjustable filter module first passes through the photoelectric detection module and then is amplified by the radio frequency amplification module.

[0075] The integrated optoelectronic oscillator of this invention utilizes the high-efficiency, low-insertion-loss electro-optic conversion of an electro-optic frequency shifter, which can improve the quality of the signal generated by the optoelectronic oscillator and effectively reduce system power consumption. At the same time, since the electro-optic frequency shifter does not introduce frequency components other than the target frequency, compared with the modulator which introduces higher-order sidebands, this method can reduce the introduced noise and improve the phase noise of the signal generated by the optoelectronic oscillator. Furthermore, by adding an adjustable filter module to the system, the frequency of the microwave signal generated by the optoelectronic oscillator can be adjusted, which has better flexibility and can adapt to more application scenarios.

[0076] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0077] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0078] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. An integrated optoelectronic oscillator, characterized in that, Including the connected optical input module and optoelectronic resonant cavity; The optical input module is used to output an adjustable continuous optical signal and adjust the state of the generated optical signal to a state that can be directly input to the on-chip device. The optoelectronic resonant cavity includes an electro-optic frequency shifter, an optoelectronic conversion module, and an RF beam splitter forming a closed loop; The electro-optic frequency shifter is used to change the frequency of a portion of the optical signal output by the optical input module, so as to generate two optical signals with a frequency difference and output them. The photoelectric conversion module is used to convert the optical signal output by the electro-optic frequency shifter into a beat frequency microwave signal with gain, and then output it. The radio frequency beam splitter module is used to input a portion of the microwave signal output by the photoelectric conversion module into the electro-optic frequency shifter, and output the other portion as the microwave signal generated by the photoelectric oscillator. The electro-optic frequency shifter includes a bus waveguide, a coupled dual micro-ring, a ground electrode, and a radio frequency electrode. The bus waveguide is mutually coupled with the coupled dual micro-rings; The radio frequency electrode and the ground electrode are used to simultaneously apply microwave signals to the two microrings of the coupled dual microrings.

2. The integrated optoelectronic oscillator as described in claim 1, characterized in that: The optical input module and the optoelectronic resonant cavity are monolithically integrated.

3. The integrated optoelectronic oscillator as described in claim 1, characterized in that: The optical input module consists of a tunable continuous light laser, or a tunable continuous light laser and a polarization controller.

4. An integrated optoelectronic oscillator as described in claim 3, characterized in that: When the tunable continuous light laser is an off-chip device, the optical input module also includes an on-chip optical coupling input device.

5. An integrated optoelectronic oscillator as described in claim 1, characterized in that: The electro-optic frequency shifter includes a coupled dual micro-ring, a ground electrode, a radio frequency electrode, a 1×2 MMI (multimode interferometer) and a 2×1 MMI, as well as a waveguide and a bus waveguide located between the 1×2 MMI and the 2×1 MMI; The bus waveguide is mutually coupled with the coupled dual micro-rings; The radio frequency electrode and the ground electrode are used to simultaneously apply microwave signals to the two microrings of the coupled dual microrings; The 1×2 MMI is used to split the optical signal output from the optical input module into two paths, and the 2×1 MMI is used to combine the two optical signals into one path.

6. An integrated optoelectronic oscillator as described in claim 1, characterized in that: The photoelectric conversion module includes a photoelectric detection module and a radio frequency amplification module connected in sequence; The photoelectric detection module is used to beat the optical signal output by the electro-optic frequency shifter to generate a microwave signal and output it. The radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

7. An integrated optoelectronic oscillator as described in claim 1, characterized in that: The photoelectric conversion module includes an optical amplification module and a photoelectric detection module connected in sequence; The optical amplification module is used to amplify and output the optical signal output by the electro-optic frequency shifter; The photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

8. An integrated optoelectronic oscillator as described in claim 1, characterized in that: The photoelectric conversion module includes an adjustable filter module, a photoelectric detection module, and a radio frequency amplification module connected in sequence. The adjustable filtering module is used to filter the optical signal output by the electro-optic frequency shifter; The photoelectric detection module is used to beat the optical signal filtered by the adjustable filter module to generate a microwave signal and output it. The radio frequency amplification module is used to amplify the microwave signal output by the photoelectric detection module.

9. An integrated optoelectronic oscillator as described in claim 1, characterized in that: The photoelectric conversion module includes an adjustable filter module, an optical amplification module, and a photoelectric detection module connected in sequence. The adjustable filtering module is used to filter the optical signal output by the electro-optic frequency shifter; The optical amplification module is used to amplify and output the optical signal filtered by the adjustable filter module; The photoelectric detection module is used to beat the optical signal output by the optical amplification module to generate a microwave signal.

Images