Substrate processing apparatus and substrate processing method

Abstract

A substrate processing apparatus is provided. The substrate processing apparatus includes a base portion configured to provide a circumferential rotational force, a placement module positioned on the base portion and configured to place a substrate, a nozzle module positioned above the base portion and configured to spray a chemical liquid to the substrate of the placement module, and a flying prevention module positioned on the base portion at a peripheral portion of the placement module and configured to guide a flying chemical liquid to be discharged when the chemical liquid flies after being sprayed to the substrate, wherein the flying prevention module guides the flying chemical liquid by a variable operation due to the rotational force.

Description

Technical Field

[0001] This invention relates to a substrate processing apparatus and a substrate processing method. Background Technology

[0002] In the substrate processing, it is necessary to effectively handle the liquid chemicals that spill from the substrate. In particular, the degree of liquid spillage varies depending on the degree of substrate rotation, so it is necessary to take this into account and proactively prevent liquid spillage by guiding and draining the liquid. Furthermore, while meeting this requirement, it is also necessary to avoid structural complexity or increased installation costs.

[0003] Existing technical documents

[0004] Patent document: Korean Patent Publication No. 10-2015-0004074 Summary of the Invention

[0005] The problem to be solved

[0006] The technical problem to be solved by the present invention is to provide a substrate processing apparatus that can effectively handle liquid medicine spilled from the substrate during the process of processing the substrate.

[0007] In addition, a substrate processing apparatus is provided, which is equipped with tools that can actively respond to various states of the substrate, such as the initial rotation state of the substrate, the acceleration state of the substrate, and the state of the substrate reaching the target rotation speed, during the process of preventing liquid spillage.

[0008] Furthermore, a substrate processing device is provided that, through this proactive approach, not only prevents the spillage of the liquid medicine, but also takes into account the discharge direction and recovery location of the liquid medicine.

[0009] In addition, a substrate processing apparatus is provided that can be moved variably at various angles according to the characteristics of the liquid, such as the degree of dispersion and the type of liquid.

[0010] Furthermore, a substrate processing device is provided that, due to its folding structure, can simultaneously consider the speed and rotation angle of the variable movement when performing variable movement, thereby enabling it to cope with the scattering of liquid medicine in more ways.

[0011] In addition, a substrate processing device is provided that can meet these needs while avoiding structural complexity or increased installation costs.

[0012] The technical problems of this invention are not limited to those mentioned above. Those skilled in the art can clearly understand other technical problems not mentioned through the following description.

[0013] Solution

[0014] According to one aspect of the present invention, a substrate processing apparatus for solving the above-mentioned technical problems includes: a base portion for providing a circumferential rotational force; a placement module located on the base portion and for placing a substrate; a nozzle module located above the base portion and for spraying a liquid medicine onto the substrate of the placement module; and an anti-spreading module located on the base portion at the peripheral portion of the placement module and for guiding the spread liquid medicine out when it spreads after being sprayed onto the substrate, wherein the anti-spreading module guides the spread liquid medicine through variable operation achieved due to the rotational force.

[0015] In addition, the anti-scattering module includes: a support portion disposed on the base portion; a main body portion disposed on the periphery of the placement module with the support portion as a medium; and a movable portion disposed on the upper part of the main body portion and used to perform the variable operation.

[0016] Furthermore, the moving part performs the variable operation based on rotation between the inner and outer sides of the main body.

[0017] Furthermore, the moving part performs the variable operation based on centrifugal force to guide the liquid medicine that is dispersed from the substrate.

[0018] Furthermore, the degree of dispersion of the liquid medicine from the substrate increases in proportion to the rotational speed of the base portion, and the degree of variable operation of the moving portion increases in proportion to the rotational speed of the base portion.

[0019] Furthermore, the moving part of the anti-scattering module is formed into a rounded shape facing outwards.

[0020] Furthermore, the moving part includes: a first moving member that is directly linked to the base part; and a second moving member that is rotatably disposed on the upper part of the first moving member and performs the variable operation based on the centrifugal force.

[0021] In addition, the moving part further includes a third moving member, which is rotatably disposed above the second moving member, and performs the variable operation based on the centrifugal force.

[0022] In addition, the substrate processing apparatus further includes: a bowl-shaped component located on the periphery of the base portion and used to contain the liquid medicine that spills from the substrate, and an anti-spreading module located between the placement module and the bowl-shaped component.

[0023] Furthermore, the bowl-shaped component includes: a first bowl-shaped component, a second bowl-shaped component, and a third bowl-shaped component, wherein the second bowl-shaped component is positioned to form a first gap space with the first bowl-shaped component, the third bowl-shaped component is positioned to form a second gap space with the second bowl-shaped component, and the anti-scattering module causes the liquid medicine scattered from the substrate to flow into either the first gap space or the second gap space, or guides the liquid medicine to flow into another location outside the bowl-shaped component.

[0024] Furthermore, the movable part is configured as a plurality of sheet-like pieces adjacent to each other on the main body.

[0025] Furthermore, the moving parts are arranged such that adjacent sheet-like members overlap at least a portion of their area to perform the variable operation.

[0026] Furthermore, multiple support portions are provided at the lower part of the main body, and the liquid medicine guided by the moving portion is discharged at least through the main body and the base portion.

[0027] According to another aspect of the present invention, a substrate processing apparatus for solving the above-mentioned technical problems includes: a base portion rotatable horizontally; a placement module located on the base portion and used for placing a substrate; a nozzle module located above the base portion and used for spraying a liquid medicine onto the substrate of the placement module; and an anti-spraying module located on the base portion at the periphery of the placement module and used for guiding the scattered liquid medicine to be discharged when it is sprayed onto the substrate and then spreads out, wherein the anti-spraying module guides the scattered liquid medicine by a variable operation achieved due to the centrifugal force of the horizontal rotation, and the anti-spraying module includes: a support portion supported on the base portion; a main body portion disposed at the periphery of the placement module with the support portion as a medium; and a movable portion disposed on the main body portion. The upper part is used to perform the variable operation. The moving part performs the variable operation based on the rotation between the inner and outer sides of the main body and the centrifugal force to guide the liquid medicine flying from the substrate. The degree of the liquid medicine flying from the substrate increases correspondingly to the rotation speed of the base part. The degree of the variable operation of the moving part increases correspondingly to the rotation speed of the base part. The moving part is formed in a rounded shape facing outward. The moving part includes: a first moving member that is directly linked to the base part; and a second moving member that is rotatably disposed on the upper part of the first moving member and performs the variable operation based on the centrifugal force. The moving part also includes: a third moving member that is rotatably disposed on the upper part of the second moving member and performs the variable operation based on the centrifugal force.

[0028] According to another aspect of the present invention, a substrate processing method for solving the above-mentioned technical problems includes: a step of placing a substrate on a placement module located on a base portion; a step of spraying a liquid medicine onto the substrate of the placement module from a nozzle module located above the base portion; and a step of guiding the liquid medicine that has been scattered from the substrate out of the peripheral portion of the placement module located on the base portion, wherein the anti-scattering module guides the scattered liquid medicine based on variable operation from the inside to the outside by means of centrifugal force generated due to the rotation of the base portion.

[0029] Beneficial effects

[0030] The present invention provides a substrate processing apparatus that can effectively handle liquid medicine spilled from the substrate during the substrate processing process.

[0031] In addition, a substrate processing apparatus can be provided that is equipped with the ability to actively respond to various states of the substrate, such as the initial rotation state of the substrate, the acceleration state of the substrate, and the state of the substrate reaching the target rotation speed, during the process of preventing liquid spillage.

[0032] In addition, a substrate processing device can be provided that, through this proactive approach, not only prevents the spillage of the liquid medicine, but also takes into account the discharge direction and recovery location of the liquid medicine.

[0033] In addition, a substrate processing device can be provided that can be moved at various angles according to the characteristics of the liquid, such as the degree of dispersion and the type of liquid.

[0034] Furthermore, a substrate processing device can be provided that, due to its folding structure, can simultaneously consider the speed and rotation angle of variable movement during variable movement, thereby enabling it to handle the scattering of liquid medicine in more ways.

[0035] In addition, substrate processing devices can be provided that can meet these needs while avoiding structural complexity or increased installation costs. Attached Figure Description

[0036] Figure 1 This is a diagram illustrating the configuration of a substrate processing apparatus according to an embodiment of the present invention.

[0037] Figures 2 to 5 It shows the basis Figure 1 The diagram shows the substrate processing procedure.

[0038] Figures 6 to 8 It shows the basis Figure 1 The diagram shows the operational status of the anti-scattering module in the structure.

[0039] Figure 9This is a diagram illustrating the configuration of a substrate processing apparatus according to another embodiment of the present invention.

[0040] Figure 10 It shows the basis Figure 9 A schematic diagram showing the operating status of the anti-scattering module.

[0041] Figure 11 This is a schematic diagram illustrating the operation of a substrate processing apparatus according to yet another embodiment of the present invention.

[0042] Figure 12 This is a flowchart illustrating a substrate processing method according to an embodiment of the present invention.

[0043] Explanation of reference numerals in the attached figures

[0044] 110: Base section

[0045] 120: Placement Module

[0046] 130: Nozzle Module

[0047] 140: Anti-scattering module

[0048] 141: Support section

[0049] 142: Main body

[0050] 143: Mobile Department

[0051] 150: Bowl-shaped piece

[0052] 151: First bowl-shaped piece

[0053] 152: Second bowl-shaped piece

[0054] 153: The third bowl-shaped piece

[0055] HP: Rotary Module Detailed Implementation

[0056] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, as well as methods for achieving these advantages and features, will be explained below with reference to the accompanying drawings. Figure 1 The invention becomes clear from the detailed description of the embodiments. However, the invention is not limited to the embodiments disclosed below, but can be implemented in many different forms. These embodiments are provided only to make the disclosure of the invention complete and to fully inform those skilled in the art of the scope of the invention, which is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0057] To readily describe the relationship between one element or component and another, as shown in the figure, spatial relative terms such as "below," "below," "lower," "above," and "upper" can be used. It should be understood that, in addition to the orientation shown in the figure, spatial relative terms also include terms indicating the different orientations of the elements during use or operation. For example, when the element shown in the figure is flipped, an element described as "below" or "below" of another element may be located "above" of that element. Therefore, the exemplary term "below" can include both "below" and "above" orientations. An element may also be oriented in another direction, thus allowing the spatial relative terms to be interpreted according to orientation.

[0058] Although the terms "first," "second," etc., are used to describe various elements, constituent elements, and / or parts, these elements, constituent elements, and / or parts are obviously not limited by these terms. These terms are only used to distinguish one element, constituent element, and / or part from another element, constituent element, and / or part. Therefore, the first element, first constituent element, or first part mentioned below can obviously also be a second element, second constituent element, or second part within the technical concept of the present invention.

[0059] The terminology used in this specification is for illustrative purposes and is not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise. The terms "comprises" and / or "comprising" as used in this specification do not exclude the presence or addition of one or more other constituent elements, steps, operations, and / or components besides those mentioned. Unless otherwise defined, all terms used in this specification (including technical and scientific terms) are to be used in the sense that would be commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, terms defined in commonly used dictionaries are not to be ideally or excessively interpreted unless explicitly defined otherwise.

[0060] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing the invention with reference to the drawings, identical or corresponding constituent elements are given the same reference numerals, regardless of the reference numerals, and repeated descriptions thereof are omitted.

[0061] Figure 1 This is a diagram illustrating the configuration of a substrate processing apparatus according to an embodiment of the present invention. Figures 2 to 5 It shows the basis Figure 1 The diagram shows the substrate processing procedure.

[0062] Reference Figure 1 and Figure 2 According to an embodiment of the present invention, a substrate processing apparatus 100 includes a base portion 110, a placement module 120, a nozzle module 130, an anti-scattering module 140, and a bowl-shaped component 150.

[0063] Here, the aforementioned anti-scattering module 140 includes a support portion 141, a main body portion 142, and a moving portion 143. The aforementioned bowl-shaped member 150 includes a first bowl-shaped member 151, a second bowl-shaped member 152, and a third bowl-shaped member 153.

[0064] The base portion 110 can rotate circumferentially or provide a circumferential rotational force. That is, a rotational force can be provided to the substrate W, or a rotational force can be provided to the anti-scattering module 140 using the support portion 141 as a medium. In other words, the base portion 110 can achieve a first method of rotating itself along the axial direction and a second method of providing a rotational force to cause the substrate W and the anti-scattering module 140 to rotate along the axial direction.

[0065] Furthermore, the aforementioned placement module 120 is located on the aforementioned base portion 110 and is used to place the substrate W. This placement module 120, together with the aforementioned base portion 110, enables the substrate W to rotate circumferentially.

[0066] The nozzle module 130 is located above the base portion 110 and sprays liquid medicine onto the substrate W of the placement module 120. Here, the liquid medicine sprayed onto the substrate W is sprayed at a set intensity and to a set position. The liquid medicine spraying from the nozzle module 130 can be considered together with the anti-spraying module 140, and the settings between them can be changed.

[0067] Here, the aforementioned anti-spraying module 140 is located on the base portion 110 at the periphery of the placement module 120. When the liquid medicine is sprayed onto the substrate W and then spreads, the aforementioned anti-spraying module 140 guides the spread liquid medicine out.

[0068] Reference Figure 2 and Figure 3 The aforementioned anti-scattering module 140 does not simply remain in a fixed, stationary state, but rather guides the scattered liquid medicine through variable operation caused by the aforementioned rotational force. The aforementioned support portion 141 of this anti-scattering module 140 is provided on the aforementioned base portion 110 in the shape of a bar.

[0069] The main body 142 of the aforementioned anti-scattering module 140 is disposed on the peripheral portion of the placement module 120 via the support portion 141. The main body 142 may be disposed continuously or discontinuously on the peripheral portion, but considering operational stability and durability, it is preferable to discontinuously dispose of it.

[0070] On the other hand, multiple support portions 141 are provided at the lower part of the main body portion 142. The liquid medicine guided by the moving portion 143 is discharged at least through the main body portion 142 and the base portion 110.

[0071] The movable part 143 of the aforementioned anti-scattering module 140 is disposed on the upper part of the main body 142. This movable part 143 performs the aforementioned variable operation in conjunction with the main body 142.

[0072] Reference Figures 3 to 5 Based on the speed set in the circumferential rotation of the base portion 110, it can rotate at a preset higher first speed range value and a preset lower second speed range value that is less than the first speed range value.

[0073] When operating at the aforementioned first speed range, the liquid medicine, after being sprayed onto the substrate W, is discharged to the outside through the space between the moving parts 143 during its dispersion. That is, it is discharged through the sheet-like body 1431 of the moving parts 143 (see below). Figure 6 The space between them is drained.

[0074] Furthermore, when operating at the aforementioned second speed range value, the liquid medicine is discharged at least via the aforementioned main body 142 and the aforementioned base 110.

[0075] Figures 6 to 8 It shows the basis Figure 1 The diagram shows the operational status of the anti-scattering module in the structure.

[0076] Reference Figures 6 to 8 The aforementioned movable part 143 performs the variable operation based on rotation between the inner and outer sides of the aforementioned main body 142. The rotation of the aforementioned movable part 143 is achieved through a hinge with the aforementioned main body 142, for example, via a rotation module HP.

[0077] The aforementioned moving part 143 performs the aforementioned variable operation by using centrifugal force generated based on the rotational force of the aforementioned base part 110, thereby guiding the aforementioned liquid medicine that is scattered from the aforementioned substrate W.

[0078] Here, the degree of dispersion of the liquid medicine scattering from the substrate W increases in proportion to the rotational speed of the base portion 110. Correspondingly, the degree of variable operation of the moving portion 143 increases in proportion to the rotational speed of the base portion 110.

[0079] The aforementioned anti-spraying module 140 guides the liquid medicine by increasing the degree of existing variable operation, thereby preventing the liquid medicine from ultimately spreading beyond a set range. Here, the aforementioned variable operation includes the operation of gradually or rapidly increasing the height of the upper region of the anti-spraying module 140.

[0080] In the aforementioned anti-scattering module 140, the main body that performs the aforementioned variable operation corresponds to the aforementioned moving part 143 of the anti-scattering module 140. This moving part 143 is formed in a shape that is rounded outwards.

[0081] Here, the aforementioned moving part 143 is configured as a plurality of sheet-like bodies 1431 adjacent to each other on the aforementioned main body 142. The aforementioned moving part 143 is arranged such that the adjacent sheet-like bodies 1431 overlap each other by at least a portion of their area, in order to perform the aforementioned variable operation.

[0082] Here, the first bowl-shaped member 151 of the aforementioned bowl-shaped member 150 is located at the uppermost end. The second bowl-shaped member 150 of the aforementioned bowl-shaped member 150 is positioned to form a first gap space 151H with the first bowl-shaped member 151. The third bowl-shaped member 153 of the aforementioned bowl-shaped member 150 is positioned to form a second gap space 152H with the second bowl-shaped member 152.

[0083] On the other hand, the aforementioned anti-spill module 140 allows the liquid medicine that has spilled from the substrate W to flow into either the first spacer space 151H or the second spacer space 152H. Of course, it is not limited to this; the aforementioned anti-spill module 140 can obviously also guide the liquid medicine to flow into other locations outside the bowl-shaped member 150.

[0084] Furthermore, although not shown separately, the aforementioned anti-scattering module 140 can replace the bowl-shaped member 150 and be disposed in the position of the bowl-shaped member 150. In this case, the aforementioned base portion 110 can be configured to expand from the existing area to the existing position of the bowl-shaped member 150.

[0085] Hereinafter, based on the foregoing, a substrate processing apparatus according to another embodiment of the present invention will be described, focusing on the parts with technical features. Figure 9 This is a diagram illustrating the configuration of a substrate processing apparatus according to another embodiment of the present invention. Figure 10 It shows the basis Figure 9 A schematic diagram showing the operating status of the anti-scattering module.

[0086] Reference Figure 9 and Figure 10The moving part 143 includes a first moving member 1431 and a second moving member 1432. Here, the first moving member 1431 of the moving part 143 is directly linked to the base part 110. The second moving member 1432 of the moving part 143 is rotatably disposed on the upper part of the first moving member 1431 based on a hinge connection or the like.

[0087] The first moving member 1431 and the second moving member 1432 described above rotate in a folding manner based on the centrifugal force and perform the variable operation described above. The bowl-shaped member 150 is located on the peripheral portion of the base portion 110 and contains the liquid medicine that spills from the substrate W. The anti-spillage module 140 is located between the placement module 120 and the bowl-shaped member 150.

[0088] Similarly, based on the foregoing, the following description focuses on the parts with technical features to illustrate a substrate processing apparatus according to another embodiment of the present invention. Figure 11 This is a schematic diagram illustrating the operation of a substrate processing apparatus according to yet another embodiment of the present invention.

[0089] Reference Figure 11 The first moving member 1431 of the aforementioned moving part 143 is directly linked to the aforementioned base part 110. The second moving member 1432 of the aforementioned moving part 143 is rotatably disposed on the upper part of the aforementioned first moving member 1431 based on a hinge connection with the aforementioned first moving member 1431.

[0090] The aforementioned first moving member 1431 and the aforementioned second moving member 1432 rotate in a folding manner based on the aforementioned centrifugal force and perform the aforementioned variable operation.

[0091] The third moving member 1433 of the moving part 143 is rotatably disposed on the upper part of the second moving member 1432, and performs the variable operation based on the centrifugal force in a similar manner to the above.

[0092] Figure 12 This is a flowchart illustrating a substrate processing method according to an embodiment of the present invention.

[0093] Reference Figure 12 According to an embodiment of the present invention, a substrate processing method (S100) includes: a step of placing a substrate (S110); a step of spraying out a liquid (S120); and a step of guiding the liquid (S130).

[0094] First, in step S110, the substrate W is placed on the placement module 120 located on the base portion 110. Next, in step S120, a liquid medicine is sprayed onto the substrate W of the placement module 120 through the nozzle module 130 located above the base portion 110.

[0095] Next, in step S130, the anti-scattering module 140 provided on the base portion 110 at the periphery of the placement module 120 guides the liquid medicine that is scattered from the substrate W.

[0096] Here, the aforementioned anti-scattering module 140 guides the scattered liquid medicine by means of the centrifugal force generated by the rotation of the aforementioned base portion 110, based on variable operation from the inside to the outside.

[0097] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art should understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims

1. A substrate processing apparatus, comprising: The base section is used to provide circumferential rotational force; A placement module is located on the base portion and is used to place the substrate; A nozzle module is located above the base portion and is used to spray liquid medicine onto the substrate on which the module is placed; as well as The anti-scattering module, located on the base portion around the placement module, includes a main body portion disposed on the periphery of the placement module and a movable portion disposed on the upper part of the main body portion for performing variable operations. The anti-scattering module is configured to guide the scattered medicine out by means of the variable operation achieved by the moving part rotating between the inner and outer sides of the main body when the medicine is sprayed onto the substrate and then scattered.

2. The substrate processing apparatus according to claim 1, wherein The anti-scattering module also includes: A support portion is provided on the base portion and supports the main body portion.

3. The substrate processing apparatus according to claim 1, wherein, The moving part performs the variable operation based on centrifugal force to guide the liquid medicine that is dispersed from the substrate.

4. The substrate processing apparatus according to claim 3, wherein, The degree of dispersion of the liquid medicine from the substrate increases correspondingly to the rotational speed of the base portion, and The degree of variable operation of the moving part increases in accordance with the rotational speed of the base part.

5. The substrate processing apparatus according to claim 3, wherein, The movable part of the anti-scattering module is formed in a rounded shape facing outwards.

6. The substrate processing apparatus according to claim 5, wherein The moving part includes: The first movable component is directly linked to the base portion; and The second moving part is rotatably disposed above the first moving part and performs the variable operation based on the centrifugal force.

7. The substrate processing apparatus according to claim 6, wherein The moving part further includes: The third moving part is rotatably disposed above the second moving part and performs the variable operation based on the centrifugal force.

8. The substrate processing apparatus according to claim 1, wherein, The substrate processing apparatus further includes: a bowl-shaped member located at the periphery of the base portion, for containing the liquid medicine spilled from the substrate; and The anti-scattering module is located between the placement module and the bowl-shaped component.

9. The substrate processing apparatus according to claim 8, wherein, The bowl-shaped component includes: a first bowl-shaped component, a second bowl-shaped component, and a third bowl-shaped component, wherein the second bowl-shaped component is positioned to form a first gap space with the first bowl-shaped component, and the third bowl-shaped component is positioned to form a second gap space with the second bowl-shaped component. The anti-spreading module allows the liquid medicine that has been spilled from the substrate to flow into either the first spacer space or the second spacer space, or guides the liquid medicine to flow into another location outside the bowl-shaped member.

10. The substrate processing apparatus according to claim 2, wherein, The movable part is configured as a plurality of sheet-like pieces adjacent to each other on the main body.

11. The substrate processing apparatus of claim 10, wherein, The movable parts are arranged such that adjacent sheet-like members overlap at least a portion of their area to perform the variable operation.

12. The substrate processing apparatus according to claim 2, wherein, The support portion is provided in multiple parts at the lower part of the main body, and The liquid medicine guided by the moving part is discharged at least through the main body and the base.

13. A substrate processing apparatus, comprising: The base section can rotate horizontally; A placement module is located on the base portion and is used to place the substrate; A nozzle module is located above the base portion and is used to spray liquid medicine onto the substrate on which the module is placed; as well as An anti-scattering module is located on the base portion of the placement module, and is used to guide the scattered liquid medicine out when it is sprayed onto the substrate and scatters. The anti-scattering module guides the scattered liquid medicine through variable operation achieved by the centrifugal force of the horizontal rotation. The anti-scattering module includes: The support portion is supported on the base portion; The main body, with the support portion as the medium, is disposed in the peripheral portion of the placement module; and A movable part is provided on the upper part of the main body and is used to perform the variable operation. The moving part performs the variable operation based on rotation between the inner and outer sides of the main body and the centrifugal force to guide the liquid medicine flying from the substrate, and the degree of dispersion of the liquid medicine flying from the substrate increases correspondingly to the rotational speed of the base part. The degree of variable operation of the moving part increases in correspondence with the rotational speed of the base part, and the moving part is formed in a rounded shape towards the outside. The moving part includes: The first movable component is directly linked to the base portion; and The second moving member is rotatably disposed above the first moving member and performs the variable operation based on the centrifugal force. The moving part further includes a third moving member, rotatably disposed above the second moving member, and performing the variable operation based on the centrifugal force.

14. A substrate processing method, comprising: The step of placing the substrate on the placement module located on the base portion; The step of the nozzle module located above the base portion spraying liquid medicine onto the substrate of the placement module; as well as The step of guiding the discharge of the liquid medicine that has been scattered from the substrate by the anti-scattering module located on the periphery of the placement module on the base portion. The anti-scattering module guides the scattered liquid medicine by using the centrifugal force generated by the rotation of the base. The anti-scattering module includes a main body disposed on the periphery of the placement module and a movable part disposed on the upper part of the main body for performing variable operations. It is configured to guide the scattered liquid medicine out through the variable operations achieved by the movable part rotating between the inner and outer sides of the main body due to centrifugal force.

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