A constant-volume water adding device for gas cylinders

Abstract

The present invention belongs to the technical field of grinding and polishing the inner wall of gas cylinders, and particularly relates to a fixed-volume water adding device for gas cylinders. The present invention includes a water injection column unit, a sliding column, an induction float, and an induction component unit. By adjusting the induction component unit, a predetermined target water level height can be set, and the induction float can monitor the water level height in the gas cylinder in real time. Once the induction float is flush with the induction component unit, the water level reaches the predetermined value, and the induction component unit sends a stop signal to an external water adding device to achieve the technical purpose of adding water with a fixed volume. The advantages of the present invention are as follows: by adjusting the height of the induction component unit, the adjustment of the target water level can be achieved without observing the water level in the gas cylinder; when the induction float is at the same height as the induction component unit, the water injection process stops, achieving an automatic water control effect; a magnetic base is provided at the bottom of the sliding column, so that the initial height of the induction component unit is aligned with the bottom of the gas cylinder, eliminating the need for zero adjustment; after the magnetic base contacts the bottom of the gas cylinder, the restriction on the induction component unit is automatically released.

Description

Technical Field

[0001] The present invention belongs to the technical field of inner wall grinding and polishing of gas cylinders, and particularly relates to a fixed-volume water adding device for gas cylinders. Background Art

[0002] Precision gas delivery is the core of semiconductor manufacturing. Many different gases - corrosive gases, reactive gases, and inert gases - are delivered to the processing chamber at different flow rates to create critical features on silicon wafers used to manufacture logic and memory chips. These gases are collectively referred to as electronic special gases (ESG). During the production process, not only are these gases required to be delivered in precise quantities and with excellent repeatability, but also strict purity levels are needed. Therefore, the inner wall of the gas cylinder storing such gases needs to be clean enough, that is, its inner wall needs to be smooth enough without small gaps resulting in insufficient cleanliness requirements.

[0003] In the prior art, the fluid polishing method is generally used to meet the requirement of ultra-smooth inner wall of the gas cylinder. In the fluid polishing method, abrasive, grinding paste, and deionized water need to be loaded into the bottle, and then the grinding plug is screwed tightly onto the stainless steel gas cylinder mouth through threads; then the stainless steel gas cylinder filled with abrasive, grinding paste, and deionized water is installed in the grinding rotary machine, and the inner surface of the stainless steel gas cylinder is ground under the drive of the rotation of the grinding rotary machine. It should be noted that since the sizes of the abrasives themselves are inconsistent, after determining the weight of the abrasives and adding them into the gas cylinder, their height is not fixed. Therefore, it is necessary to determine the volume of deionized water to be added according to the height of the abrasives added into the gas cylinder. Generally, when the liquid level height formed after adding deionized water into the gas cylinder exceeds the abrasives by about 30 mm, it reaches the standard.

[0004] However, after the abrasives are added into the bottle, since the gas cylinder itself is not transparent, it is difficult to observe the water adding height by conventional water adding methods, resulting in the ratio of abrasive, grinding paste, and deionized water not meeting the standard and affecting the final grinding effect. Therefore, there is a need for a device that can add water into the gas cylinder with a fixed volume at present. Summary of the Invention

[0005] The purpose of the present invention is to provide a fixed-volume water adding device for gas cylinders. The present invention adjusts the sensing element unit to set the target water level height, and the sensing buoy can monitor the water level height in the gas cylinder in real time. Once the sensing buoy is flush with the sensing element unit, the water level reaches the set value, and the sensing element unit sends a stop signal to the external water adding device to achieve the technical purpose of adding water with a fixed volume.

[0006] The technical solution adopted by the present invention to solve the above problems is as follows: A constant-volume water injection device for a gas cylinder, comprising a water injection column unit for installation on the mouth of the gas cylinder, a sliding column arranged on the water injection column unit and extending to the bottom of the gas cylinder, an induction buoy sleeved on the sliding column, and an induction element unit arranged in the inner cavity of the sliding column, which adjusts the height up and down and is used to receive signals from the induction buoy.

[0007] A further preferred technical solution lies in that: the water injection column unit includes a water injection column, a water inlet pipe arranged on the side surface of the water injection column, and a water injection hole arranged at the bottom end of the water injection column.

[0008] A further preferred technical solution lies in that: the induction element unit includes a receiver for receiving signals from the induction buoy, a counterweight block for installing the receiver, and a traction rope with its bottom end connected to the counterweight block; it also includes a storage roller unit arranged on the water injection column and used for storing the traction rope.

[0009] A further preferred technical solution lies in that: the storage roller unit includes a storage cylinder, a storage roller arranged on the storage cylinder, a rotating handrail arranged on the storage roller, and an indicating protrusion arranged on the storage cylinder and the storage roller.

[0010] A further preferred technical solution lies in that: it also includes a magnetic base unit arranged at the lower end of the sliding column and used for locking the induction element unit.

[0011] A further preferred technical solution lies in that: the magnetic base unit includes a base, a permanent magnet arranged on the base and used for attracting the counterweight block, and a trigger column part arranged on the base and used for moving the permanent magnet.

[0012] A further preferred technical solution lies in that: the trigger column part includes a trigger column, a connecting column arranged at the lower end of the trigger column, a transmission rope connecting the outer end of the permanent magnet and the lower end of the connecting column, and a reversing pulley for installing the transmission rope.

[0013] A further preferred technical solution lies in that: the trigger column part also includes a first return spring for pushing the connecting column outwards, and a second return spring for pushing the permanent magnet inwards.

[0014] A further preferred technical solution lies in that: the trigger column part also includes a limit lever for blocking the upward movement of the counterweight block, an unlocking lever arranged at the upper end of the trigger column and used for lifting the limit lever, and an unlocking permanent magnet arranged at the bottom end of the unlocking lever.

[0015] A method for fluid grinding of a gas cylinder uses the above constant-volume water injection device for a gas cylinder.

[0016] The advantages of the present invention are as follows:

[0017] First, by adjusting the height of the sensing element unit, the adjustment of the target water level can be achieved without observing the water level in the gas cylinder;

[0018] Second, when the sensing buoy is at the same height as the sensing element unit, the water injection process stops, achieving the effect of automatic water control;

[0019] Third, a magnetic base is provided at the bottom of the sliding column, so that the initial height of the sensing element unit is aligned with the bottom of the gas cylinder, eliminating the need for zero adjustment;

[0020] Fourth, after the magnetic base contacts the bottom of the gas cylinder, the restriction on the sensing element unit is automatically released. Description of the Drawings

[0021] Figure 1 Schematic diagram of the fixed-volume water addition device installed in the gas cylinder.

[0022] Figure 2 For Figure 1 Schematic diagram of stopping water injection when the height of the sensing buoy in [specific figure] is the same as that of the sensing element unit.

[0023] Figure 3 Schematic diagram of the structure of the fixed-volume water addition device.

[0024] Figure 4 Schematic diagram of the structure of the sensing element unit.

[0025] Figure 5 Schematic diagram of the structure of the storage roller unit.

[0026] Figure 6 Schematic diagram of the connection between the magnetic base unit and the bottom end of the sliding column.

[0027] Figure 7 For Figure 6 Schematic diagram of releasing the magnetic attraction restriction on the counterweight when the magnetic base unit in [specific figure] contacts the bottom of the gas cylinder.

[0028] Figure 8 Schematic diagram of the structure of the trigger column part.

[0029] Figure 9 For Figure 8 Schematic diagram of the structure in [specific figure].

[0030] Figure 10 Schematic diagram of the installation positions of the unlocking rod and the limiting lever.

[0031] Figure 11 For Figure 10 Schematic diagram of the unlocking of the limiting lever caused by the outward movement of the permanent magnet in [specific figure].

[0032] In the attached drawings, the components represented by each reference numeral are as follows: gas cylinder A, water injection column unit 1, sliding column 2, induction buoy 3, induction element unit 4, storage roller unit 5, magnetic base unit 6, water injection column 101, water inlet pipe 102, water injection hole 103, receiver 401, counterweight 402, towing rope 403, storage cylinder 501, storage roller 502, rotating handrail 503, indicating protrusion 504, base 601, permanent magnet 602, trigger column part 603, trigger column 603a, connecting column 603b, transmission rope 603c, reversing pulley 603d, first return spring 603e, second return spring 603f, unlocking rod 603g, limit lever 603h. Detailed implementation mode

[0033] The present invention will be further described in detail below with reference to the attached drawings.

[0034] This specific embodiment is only an interpretation of the present invention and does not limit the present invention. After reading this specification, those skilled in the art can make modifications to this embodiment without creative contributions as needed, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

[0035] Embodiment: A fixed-volume water addition device for a gas cylinder includes a water injection column unit 1 for installing on the gas cylinder mouth of the gas cylinder, a sliding column 2 arranged on the water injection column unit 1 and extending to the bottom of the gas cylinder, an induction buoy 3 sleeved on the sliding column 2, and an induction element unit 4 arranged in the inner cavity of the sliding column 2, which adjusts the height up and down and is used to receive signals from the induction buoy 3. Refer to Figure 1-2 , when using the water addition device, insert the sliding column 2 along the gas cylinder mouth of the gas cylinder A until the water injection column unit 1 is installed at the gas cylinder mouth, then calculate the target water level according to the required water volume, and then adjust the height position of the induction element unit 4; then turn on the water injection unit to inject water into the gas cylinder. The induction buoy 3 changes with the real-time water level height in the gas cylinder until the height of the induction buoy 3 is flush with the height of the induction element unit 4. At this time, the signal transmitter built in the induction element unit 4 sends a signal to stop water injection to the water injection unit, and finally makes the actual water level in the gas cylinder consistent with the target water level, achieving the effect of water control.

[0036] The water injection column unit 1 includes a water injection column 101, a water inlet pipe 102 arranged on the side surface of the water injection column 101, and a water injection hole 103 arranged at the bottom end of the water injection column 101. Refer to Figure 3, the water injection hole 103 is arranged on the bottom side of the water injection column 101, and the top of the sliding column 2 is welded to the sealed bottom of the water injection column 101. In this way, the position of water injection through the water injection hole 103 will not affect the installation position of the sliding column 2, and the water flow during water injection will flow down along the inner wall of the gas cylinder, so that the water in the gas cylinder will not splash everywhere, and there will not be too much water remaining on the inner wall of the gas cylinder or the sliding column 2, ensuring that the actual water injection volume is always consistent with the target water injection volume.

[0037] The sensing element unit 4 includes a receiver 401 for receiving the signal of the sensing buoy 3, a counterweight 402 for installing the receiver 401, and a towing rope 403 with its bottom end connected to the counterweight 402; it also includes a storage roller unit 5 arranged on the water injection column 101 and used for storing the towing rope 403. The receiver 401 on the sensing element unit 4 and the signal emitter on the sensing buoy 3 both adopt the radio frequency identification technology in the prior art, and its principle is non-contact data communication between the reader and the tag to achieve the purpose of identifying the target. Such a non-contact information transmission method ensures that the receiver 401 located in the cavity of the sliding column 2 will never come into contact with the water in the gas cylinder, achieving the effect of isolating the electrical device from the liquid. Refer to Figure 4 , the receiver 401 is arranged on the left and right sides of the counterweight 402. If the two receivers 401 do not receive the signal from the sensing buoy 3 simultaneously, it means that the counterweight 402 is tilted and needs to be readjusted. The counterweight 402 also keeps the towing rope 403 always taut, which is convenient for calculating the actual height of the counterweight 402 in the inner cavity of the sliding column 2 through the length of the towing rope 403 stored, without the need for an additional observation device. The function of the storage roller unit 5 is, on the one hand, to store the towing rope 403 to raise the height position of the counterweight 402, and on the other hand, to calculate the total length of the towing rope 403 stored by the number of rotations of the storage roller unit 5, thereby calculating the actual height position of the counterweight 402.

[0038] The storage roller unit 5 includes a storage cylinder 501, a storage roller 502 arranged on the storage cylinder 501, a rotating handrail 503 arranged on the storage roller 502, and an indicating protrusion 504 arranged on the storage cylinder 501 and the storage roller 502. A rotating column for storing the towing rope 403 is provided in the storage cylinder 501. When the towing rope 403 is fully extended, there is no towing rope 403 wound around the rotating column. At this time, the indicating protrusions 504 arranged on the storage cylinder 501 and the storage roller 502 are aligned. When the rotating column starts to store the towing rope 403, the indicating protrusions 504 on the storage cylinder 501 and the storage roller 502 rotate relative to each other. By calculating the angle through which the indicating protrusions 504 on the storage cylinder 501 and the storage roller 502 rotate and the diameter of the rotating column, the length of the towing rope 403 stored at this time can be calculated, thereby calculating the rising distance of the counterweight 402.

[0039] The water adding device further includes a magnetic base unit 6 disposed at the lower end of the sliding column 2 and used for locking the sensing element unit 4. The function of the magnetic base unit 6 is that when the counterweight 402 is placed at the lower end of the sliding column 2, it is attracted by the magnetic base unit 6 and thus cannot rise. At this time, the traction rope 403 is straightened, and the length of the traction rope 403 is the distance from the counterweight 402 to the top end of the sliding column 2.

[0040] The magnetic base unit 6 includes a base 601, a permanent magnet 602 disposed on the base 601 and used for attracting the counterweight 402, and a trigger post portion 603 disposed on the base 601 and used for moving the permanent magnet 602. When the base 601 is placed at the lower end of the gas cylinder, the trigger post portion 603 will move the permanent magnet 602 to one side, so that the permanent magnet 602 loses the attraction to the counterweight 402, and the counterweight 402 can be pulled up again.

[0041] The trigger post portion 603 includes a trigger post 603a, a connecting post 603b disposed at the lower end of the trigger post 603a, a transmission rope 603c connecting the outer end of the permanent magnet 602 and the lower end of the connecting post 603b, and a reversing pulley 603d for installing the transmission rope 603c. Refer to Figures 6-9 , the trigger post 603a is disposed at the bottom end of the sliding column 2, and the rest of the components of the trigger post portion 603 are disposed inside the base 601. When the base 601 is placed at the lower end of the gas cylinder, the sliding column 2 drives the trigger post 603a to move downward relative to the base 601, thereby pulling down the transmission rope 603c. Since the upper end of the transmission rope 603c is connected to the outer end of the permanent magnet 602, the permanent magnet 602 is pulled outward, away from the lower part of the counterweight 402, and thus loses the magnetic attraction to the counterweight 402.

[0042] The trigger post portion 603 further includes a first return spring 603e for pushing the connecting post 603b outward, and a second return spring 603f for pushing the permanent magnet 602 inward. When the base 601 is removed from the lower end of the gas cylinder, under the action of the first return spring 603e, the connecting post 603b is pushed to make the trigger post 603a move upward relative to the base 601, thereby canceling the downward pulling of the transmission rope 603c. Under the inward pushing action of the second return spring 603f, the extra transmission rope 603c makes the permanent magnet 602 move inward and come to the lower part of the counterweight 402 again. When the counterweight 402 reaches the bottom end of the sliding column 2, it is attracted by the permanent magnet 602 again and locked in position.

[0043] The trigger post portion 603 further includes a limiting lever 603h for blocking the upward movement of the counterweight 402, an unlocking lever 603g provided at the upper end of the trigger post 603a and used for lifting the limiting lever 603h, and an unlocking permanent magnet 603i provided at the bottom end of the unlocking lever 603g. Refer to Figures 10-11 , when the base 601 is placed at the lower end of the gas cylinder, the sliding column 2 drives the trigger post 603a to move downward relative to the base 601, thereby pulling the transmission rope 603c downward. Since the upper end of the transmission rope 603c is connected to the outer end of the permanent magnet 602, the permanent magnet 602 is pulled outward. When the permanent magnet 602 moves outward, it comes below the unlocking permanent magnet 603i, causing the unlocking permanent magnet 603i to move toward the permanent magnet 602 below. Thus, the unlocking permanent magnet 603i drives the unlocking lever 603g to move downward. During the downward movement of the unlocking lever 603g, the outer end of the limiting lever 603h sinks, causing its inner end to rise, thereby canceling the clamping effect on the counterweight 402 and enabling it to be pulled upward by the towing rope 403. The limiting lever 603h and the permanent magnet 602 cooperate to lock the counterweight 402 together, so that the counterweight 402 can be well fixed at the lower end of the sliding column 2 when it is not working.

[0044] The method for grinding inside the gas cylinder is as described below:

[0045] First, load abrasive, grinding paste, and deionized water into the gas cylinder; then, screw the grinding plug cover onto the gas cylinder mouth through threads; then install the gas cylinder filled with abrasive, grinding paste, and deionized water in the grinding rotary machine, and carry out the grinding process of the inner surface of the gas cylinder driven by the rotation of the grinding rotary machine; control the grinding time according to the required roughness and dimensional requirements of the inner surface of the gas cylinder; after grinding, repeatedly flush the inner surface of the gas cylinder with heated and pressurized deionized water multiple times to wash away the residual substances on the inner surface of the gas cylinder.

[0046] The above grinding process is a rough grinding process. The abrasive used in the rough grinding process is brown fused alumina, and the shape of the brown fused alumina used is triangular or rhombic; under the drive of the rotation of the grinding rotary machine, the edges of the brown fused alumina are used to repeatedly rub the inner surface of the stainless steel gas cylinder, reducing the roughness of the inner surface of the stainless steel gas cylinder to Ra less than 0.32. The grinding time of the rough grinding process is not less than 10h, and the grinding plug cover is removed to observe the state of the inner surface of the stainless steel gas cylinder.

[0047] If the state of the inner surface of the gas cylinder is not good, the grinding time can be increased. The grinding time of the rough grinding process generally does not exceed 24h according to the requirements of roughness.

[0048] In addition, for stainless steel gas cylinder products, the rough grinding efficiency is relatively high; while for titanium alloy gas cylinder products, the rough grinding time is approximately doubled. Secondly, for aluminum alloy gas cylinder products, acidic grinding paste should be avoided to prevent corrosion of the inner surface of the aluminum alloy gas cylinders.

[0049] The temperature of the heated and pressurized deionized water does not exceed 75 °C, and the pressure is controlled within 0.35 - 0.85 MPa; these temperature and pressure values are suitable for gas cylinders with composite material layers.

[0050] After the grinding is completed, the inner surface of the stainless steel gas cylinder 1 is rinsed 4 times with heated and pressurized deionized water to thoroughly rinse off the residual substances on the inner surface of the stainless steel gas cylinder 1, so as to avoid affecting the cleanliness of the gas source.

[0051] The above specific description of the present invention is only for explaining the present invention and is not limited to the technical solutions described in the embodiments of the present invention. Those of ordinary skill in the art should understand that the present invention can still be modified or equivalently replaced to achieve the same technical effects; as long as the use requirements are met, they are all within the protection scope of the present invention.

[0052] In addition, the same or similar element symbols are used as much as possible in the drawings and the description to refer to the same or similar parts or steps. The drawings are presented in a simplified form and are not drawn to an exact scale. For convenience and clarity only, directional terms such as top, bottom, left, right, up, above, over, below, beneath, behind, and in front may be used with respect to the drawings. These and similar directional terms should not be construed as limiting the scope of the disclosure in any way.

Claims

1. A fixed - volume water - adding device for gas cylinders, characterized in that, It includes a water injection column unit (1) for installation on the mouth of a gas cylinder, a sliding column (2) arranged on the water injection column unit (1) and extending to the bottom of the gas cylinder, an induction buoy (3) sleeved on the sliding column (2), and an induction unit (4) arranged in the inner cavity of the sliding column (2), which can adjust the height up and down and is used to receive signals from the induction buoy (3); the water injection column unit (1) includes a water injection column (101), a water inlet pipe (102) arranged on the side of the water injection column (101), and a water injection hole (103) arranged at the bottom end of the water injection column (101); the induction unit (4) includes a receiver (401) for receiving signals from the induction buoy (3), a counterweight block (402) for installing the receiver (401), and a traction rope (403) with its bottom end connected to the counterweight block (402); it also includes a storage roller unit (5) arranged on the water injection column (101) and used for storing the traction rope (403); the storage roller unit (5) includes a storage cylinder (501), a storage roller (502) arranged on the storage cylinder (501), a rotating handrail (503) arranged on the storage roller (502), and an indicating protrusion (504) arranged on the storage cylinder (501) and the storage roller (502); it also includes a magnetic base unit (6) arranged at the lower end of the sliding column (2) and used for locking the induction unit (4).

2. The fixed - volume water - adding device for gas cylinders according to claim 1, characterized in that, The magnetic base unit (6) includes a base (601), a permanent magnet (602) arranged on the base (601) and used for attracting the counterweight block (402), and a trigger column part (603) arranged on the base (601) and used for moving the permanent magnet (602).

3. The fixed - volume water - adding device for gas cylinders according to claim 2, characterized in that, The trigger column part (603) includes a trigger column (603a), a connecting column (603b) arranged at the lower end of the trigger column (603a), a transmission rope (603c) connecting the outer end of the permanent magnet (602) and the lower end of the connecting column (603b), and a reversing pulley (603d) for installing the transmission rope (603c).

4. The fixed - volume water - adding device for gas cylinders according to claim 3, characterized in that, The trigger column part (603) also includes a first return spring (603e) for jacking up the connecting column (603b) outwards, and a second return spring (603f) for jacking up the permanent magnet (602) inwards.

5. The fixed - volume water - adding device for gas cylinders according to claim 3, characterized in that, The trigger column part (603) also includes a limit lever (603h) for blocking the upward movement of the counterweight block (402), an unlocking lever (603g) arranged at the upper end of the trigger column (603a) and used for lifting the limit lever (603h), and an unlocking permanent magnet (603i) arranged at the bottom end of the unlocking lever (603g).

6. A method for fluid grinding of gas cylinders, characterized in that, Use the fixed-volume water adding device for gas cylinders according to any one of claims 1-5.

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