Annularly distributed longitudinally aligned plasma excitation device

Abstract

The application provides a ring-distributed longitudinal arrangement plasma excitation device, which comprises a cone body, a plurality of grooves are arranged on the cone body in a ring shape, the grooves are gathered near the tip of the cone body, a small cone is formed between two adjacent grooves, and a plurality of small cones are arranged on the outer surface of the cone body, so that the ring-distributed cone plasma excitation device is designed, plasma can be rapidly excited, the field strength is stable, the reaction rate is greatly improved, and the energy utilization rate is improved.

Description

Technical Field

[0001] This invention relates to the field of microwave technology, and more particularly to a ring-shaped, longitudinally arranged plasma excitation device. Background Technology

[0002] The conversion between microwave energy and plasma energy largely depends on the electric field strength and distribution. Traditional plasma excitation coupling methods struggle to achieve rapid and low-power excitation, limiting the application of microwave systems in many fields. However, using a ring-shaped cone distributed plasma excitation device can excite plasma at low power and ambient pressure. This will greatly promote the application of microwave systems in many fields, such as microwave plasma reaction systems and microwave plasma waste gas treatment systems.

[0003] Microwave plasma excitation involves electrons colliding with atoms under the influence of an electromagnetic field, causing free electrons in atomic orbits to detach from the atomic nucleus and form free electrons and positive ions. These positive ions and free electrons are then subjected to the electromagnetic field to collide with other atoms, achieving the excitation of a large amount of plasma. The plasmas then react to generate the desired products.

[0004] In microwave plasma systems, plasma excitation needs to be rapid and stable. Traditionally, this is achieved by increasing the vacuum level of the plasma system and increasing the feed power. However, this method results in a small number of plasma excitations, a slow response rate, and only a small portion of the high-power energy is excited. A large amount of energy is converted into conductor losses, and some energy is radiated into the external space, causing electromagnetic pollution and energy waste. Summary of the Invention

[0005] This invention provides a ring-shaped, longitudinally arranged plasma excitation device to address the shortcomings of insufficient plasma excitation conditions and low energy coupling efficiency in existing technologies, thereby enabling rapid plasma excitation and improving energy coupling efficiency.

[0006] This invention provides a ring-shaped, longitudinally arranged plasma excitation device, comprising: a cone;

[0007] The cone is provided with a plurality of grooves in a circumferential manner. The grooves converge near the tip of the cone, and a small cone is formed between two adjacent grooves, thereby forming a structure in which a plurality of small cones cover the outer surface of the cone.

[0008] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the depth of the groove gradually changes to 0 mm from the bottom surface of the cone to the tip of the cone;

[0009] The depth of the groove at the bottom surface of the cone is:

[0010]

[0011] in, The angular frequency of the electromagnetic wave. The magnetic permeability of the cone is given. The electrical conductivity of the cone is given by [the relevant term]. The diameter of the conical portion is given.

[0012] Furthermore, in the annularly distributed longitudinally arranged plasma excitation device provided by the present invention, the maximum width of the groove ranges as follows:

[0013]

[0014] in, The wavelength of electromagnetic waves.

[0015] Furthermore, in a ring-shaped, longitudinally arranged plasma excitation device provided by the present invention, the height of the position where the tips of the small cones converge from the bottom surface of the cone is:

[0016]

[0017] in, The height of the cone. It is half the cone angle of the tangential surface of the cone.

[0018] Furthermore, in a ring-shaped longitudinally arranged plasma excitation device provided by the present invention, the interval angle between two adjacent grooves is:

[0019]

[0020] in, The diameter of the conical portion. The height of the cone. It is half the angle of the apex of the cone's cross-section. The wavelength of electromagnetic waves.

[0021] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the grooves are symmetrically distributed along the center line of the cone.

[0022] Furthermore, according to the present invention, a ring-shaped longitudinally arranged plasma excitation device further includes a support rod;

[0023] The support rod is connected to the bottom of the cone.

[0024] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the support rod is connected to the bottom of the cone by high-temperature welding.

[0025] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the support rod is a threaded rod, and the cone has an internal thread at the center of its bottom for connecting the threaded rod.

[0026] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the cone is made of a high-temperature resistant conductor material.

[0027] This invention provides a ring-shaped, longitudinally arranged plasma excitation device, comprising: a cone; the cone having multiple grooves arranged circumferentially, the grooves converging near the tip of the cone, with adjacent grooves forming small pointed cones, thereby creating a structure in which multiple small pointed cones cover the outer surface of the cone. This invention, by designing a ring-shaped distributed pointed cone plasma excitation device, enables rapid plasma excitation, stabilizes the field strength, significantly increases the reaction rate, and improves energy utilization. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of the ring-shaped longitudinally arranged plasma excitation device provided by the present invention;

[0030] Figure 2 This is a schematic diagram of the superposition of electric fields between a slotted cone and an unslotted cone provided by the present invention;

[0031] Figure 3 This is a schematic diagram of the groove depth of the annularly distributed longitudinally arranged plasma excitation device provided by the present invention;

[0032] Figure 4 This is a front view of the ring-shaped, longitudinally arranged plasma excitation device provided by the present invention;

[0033] Figure 5 This is a schematic diagram of the electric field strength of the resonant cavity containing a slotted cone provided by the present invention;

[0034] Figure 6 This is a schematic diagram of the electric field strength of the resonant cavity of the ungrooved cone provided by the present invention;

[0035] Figure label:

[0036] 1: Cone; 2: Groove; 3: Small pointed cone. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0038] The following is combined Figure 1 A ring-shaped, longitudinally arranged plasma excitation device according to the present invention includes: a cone 1;

[0039] The cone 1 is provided with a plurality of grooves 2 in a circumferential manner. The grooves 2 converge near the tip of the cone 1, and a small cone 3 is formed between two adjacent grooves 2, thereby forming a structure in which a plurality of small cones 3 cover the outer surface of the cone 1.

[0040] Specifically, after the electromagnetic wave enters the resonant cavity, it generates a certain electric field strength near cone 1, with the electric field direction being axial. Since the smaller the radius of curvature of the conductor, the greater the surface charge density, a large amount of charge accumulates at the pointed tip under the influence of the electric field. Because the electromagnetic wave is in an oscillating state, the direction of the electric field strength continuously changes between +z and -z directions. Therefore, the large amount of induced charge generated near the tip also exhibits a continuous alternation between positive and negative charge accumulation. The principle of generating high-field-strength excited plasma is illustrated using cone 1 in a cylindrical resonant cavity of TM020 mode as an example.

[0041] When the cylindrical resonant cavity does not contain the cone structure 1, the expression for its internal electromagnetic field during TM mode resonance is:

[0042] (1)

[0043] in: , , The electric field extension of the resonant cavity is respectively Directional components; , These are the magnetic field extensions of the resonant cavity. Directional components; The amplitude of the electromagnetic wave's electric field; It is the angular frequency of the electromagnetic wave; is the dielectric constant of the medium; The cutoff wave number; for Bessel function of order 1; For electromagnetic wave delay Half-wave number in direction; For electromagnetic wave delay Half-wave number in direction; For electromagnetic wave delay Half-wave number in direction; is the length of the resonant cavity.

[0044] For example, when the resonant mode is TM020, the electromagnetic field expression is:

[0045] (2)

[0046] Combination Figure 2 As shown, the electric field direction, obtained from the formula, is along the axis of the cylindrical resonant cavity. The slotted cone 1, under the influence of the electric field, generates charge accumulation (e.g., ...). Figure 2 As shown on the left), and the amount of charge is much greater than that at the ungrooved tip (e.g., Figure 2 (As shown on the right). Therefore, the accumulated charge creates a higher electric field strength. Simultaneously, the charge's electric field and the electromagnetic wave's electric field oscillate at the same frequency and in phase, resulting in a superposition of the two field strengths, forming an ultra-high field strength. This is highly advantageous for continuous plasma excitation, making the conversion between electromagnetic field energy and plasma energy much easier.

[0047] This invention provides a ring-shaped, longitudinally arranged plasma excitation device, comprising: a cone 1; the cone 1 having multiple grooves 2 arranged circumferentially, the grooves 2 converging near the tip of the cone 1, and adjacent grooves 2 forming small pointed cones 3, thereby creating a structure in which multiple small pointed cones 3 cover the outer surface of the cone 1. This invention, by designing a ring-shaped distributed pointed cone plasma excitation device, enables rapid plasma excitation, stabilizes the field strength, significantly increases the reaction rate, and improves energy utilization.

[0048] Furthermore, combined with Figure 3 As shown, according to the present invention, a ring-shaped longitudinally arranged plasma excitation device is provided, wherein the depth of the groove 2 gradually changes to 0 mm from the bottom surface of the cone 1 to the tip of the cone 1.

[0049] The depth of the groove 2 at the bottom surface of the cone 1 is within the range of:

[0050]

[0051] in, The angular frequency of the electromagnetic wave. The permeability of the cone 1 is given by [insert value here]. The electrical conductivity of the cone 1 is... The diameter of the cone 1 is given.

[0052] Specifically, the depth of the groove 2 formed by the small cone 3 must be greater than the skin depth of the conductor. If the depth of the groove 2 is less than the skin depth of the conductor, electromagnetic waves can be transmitted into the interior of the groove 2, resulting in poor charge accumulation. Therefore, the depth h1 of the groove 2 is set to be greater than the skin depth. The minimum remaining thickness after grooving must be greater than the skin depth. Although the groove can shield electromagnetic waves from entering the groove, a small amount of electromagnetic waves can still pass through. Therefore, the remaining thickness after grooving must be greater than the yield depth, i.e., h1 is less than ( ) mm.

[0053] Furthermore, in the annularly distributed longitudinally arranged plasma excitation device provided by the present invention, the maximum width of the groove 2 ranges as follows:

[0054]

[0055] in, The wavelength of electromagnetic waves.

[0056] Specifically, the narrow groove 2 hinders electromagnetic waves from entering the interior of the groove 2, causing the charge flow to be mainly concentrated on the annular pointed cone fan surface, thereby increasing the accumulation of charge on the annular distributed pointed cone. At the same time, it prevents the potential difference charge from causing lateral creep due to the narrow gap of the groove 2.

[0057] therefore, Figure 4 In this invention, the width of groove 2 is very small, much smaller than the wavelength of electromagnetic waves. When the width is less than... When the slot is wide enough, it can shield most electromagnetic waves, thereby effectively reducing the conductive area of ​​the cone 3 and reducing the conductor loss of the cone 3. At the same time, the width of the slot cannot be too small, as the potential difference between the two edges of the slot causes lateral charge flow, affecting the concentration effect at the tip. Therefore, the slot width is set to be greater than 100 mm. .

[0058] Furthermore, according to the annularly distributed longitudinally arranged plasma excitation device provided by the present invention, the height range of the position where the tips of the small cones 3 are clustered from the bottom surface of the cone 1 is as follows:

[0059]

[0060] in, The height of the cone 1 is... It is half the cone angle of the tangential surface of the cone 1.

[0061] Furthermore, in the annularly distributed longitudinally arranged plasma excitation device provided by the present invention, the range of the interval angle between two adjacent grooves 2 is:

[0062]

[0063] in, The diameter of the cone 1 is... The height of the cone 1 is... It is half the angle of the apex of the cross section of the cone 1. The wavelength of electromagnetic waves.

[0064] Specifically, electromagnetic waves have phase. The ring-shaped distributed cones must be in phase with the main cone to induce the same type of charge for the charge field strength to accumulate. Therefore, the cross-sectional diameter l at the location of the ring-shaped cones must be smaller than 1. ,Right now Based on this condition, the grooving angle is 1°. Furthermore, the smaller l is, the greater the electromagnetic wave amplitude at which the annular cone is located, and the greater the charge accumulation.

[0065] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the grooves 2 are symmetrically distributed along the center line of the cone 1.

[0066] Specifically, the grooves 2 are evenly distributed on the outside of the cone 1.

[0067] Distance details are as follows:

[0068] The cone 1 has circumferential grooves 2, the number of which is an integer. To ensure that more small pointed cones 3 are formed at the tip, the axial spacing angle of the grooves 2 is 1°. The width of groove 2 is mm, groove 2 depth is mm. The current distribution after slotting is the same as that of the unslotted cone, so the electromagnetic field distribution is also the same. Therefore, slotting will not affect the already constructed electromagnetic field distribution, but will instead increase the electric field strength. This can greatly improve the energy conversion rate of the microwave system, making it easier to convert electromagnetic wave energy into plasma energy.

[0069] In the actual resonant cavity, slotted cones (such as...) are set up respectively. Figure 5 (as shown) and ungrooved cones (such as) Figure 6 As shown in the figure, the field strength values ​​after the electromagnetic wave generates resonance are compared under the same conditions.

[0070] The comparison of the electric field distribution obtained from simulation calculations shows that the electric field lines near cone 1 after slotting are more concentrated than those near cone 1 without slotting, and the electric field strength is higher than that of cone 1 without slotting. The fundamental reason for the V / m is that multiple small cones 3 are distributed in a ring. Each small cone 3 can accumulate a large amount of charge under the influence of electromagnetic waves. Moreover, the small cones 3 and the cone 1 are both in the same phase of the electromagnetic wave region. The induced charges are both positive or negative charges. The field strength generated is in phase with the electromagnetic wave, thus the field strength is superimposed, and the field strength value is greatly increased.

[0071] Furthermore, according to the present invention, a ring-shaped longitudinally arranged plasma excitation device further includes a support rod;

[0072] The support rod is connected to the bottom of the cone 1.

[0073] Specifically, the position of the cylinder in the resonant cavity is adjusted by the support rod, and the tip of the cone 1 is located at the center of the electromagnetic field.

[0074] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the support rod is connected to the bottom of the cone 1 by high-temperature welding.

[0075] Specifically, the support rod and the cone 1 are connected by welding to form a whole.

[0076] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the support rod is a threaded rod, and the cone 1 has an internal thread at the center of its bottom for connecting the threaded rod.

[0077] Specifically, it is used to connect the support rod and the cone 1 by means of a threaded connection. At the same time, the threaded connection can be used to separate the two when needed, so as to achieve the purpose of recombination or reuse.

[0078] Furthermore, according to the present invention, in a ring-shaped longitudinally arranged plasma excitation device, the cone 1 is made of a high-temperature resistant conductor material.

[0079] Specifically, since cone 1 is used to accumulate charge, the material of cone 1 is a conductor. On the other hand, accumulating a large amount of charge requires cone 1 to be heat-resistant. Therefore, the material of cone 1 is chosen to be a heat-resistant and conductive material, such as graphite.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A ring-shaped, longitudinally arranged plasma excitation device, characterized in that, include: Cone; The cone is provided with a plurality of grooves in a circumferential manner. The grooves converge near the tip of the cone, and a small cone is formed between two adjacent grooves, thereby forming a structure in which a plurality of small cones cover the outer surface of the cone. The depth of the groove gradually changes to 0 mm from the bottom surface of the cone to the tip of the cone; The depth of the groove at the bottom surface of the cone is: ； in, The angular frequency of the electromagnetic wave. The magnetic permeability of the cone is given. The electrical conductivity of the cone is given by [the relevant term]. The diameter of the cone is given.

2. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, The maximum width of the groove is within the range of: ； in, The wavelength of electromagnetic waves.

3. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, The range of the height of the points where the small cones converge from the bottom surface of the cone is: ； in, The height of the cone. It is half the cone angle of the tangential surface of the cone.

4. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, The range of the angle between two adjacent grooves is: ； in, The diameter of the conical portion. The height of the cone. It is half the angle of the apex of the cone's cross-section. The wavelength of electromagnetic waves.

5. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, The grooves are symmetrically distributed along the center line of the cone.

6. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, It also includes support rods; The support rod is connected to the bottom of the cone.

7. The annularly distributed longitudinally arranged plasma excitation device according to claim 6, characterized in that, The support rod is connected to the bottom of the cone by high-temperature welding.

8. The annularly distributed longitudinally arranged plasma excitation device according to claim 6, characterized in that, The support rod is a threaded rod, and the cone has an internal thread at the center of its bottom for connecting the threaded rod.

9. The annularly distributed longitudinally arranged plasma excitation device according to claim 1, characterized in that, The cone is made of a high-temperature resistant conductor material.

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