Shaping Spot Correction Method for Laser Processing System, Laser Processing System

Abstract

The present invention belongs to the technical field of laser processing, and particularly relates to a shaping spot correction method for a laser processing system, a laser processing system, a laser processing method, and a correction model. The shaping spot correction method includes: obtaining an ideal Gaussian beam model G0; obtaining a transfer function T through the optical model of a beam shaper; calculating the beam function G0*T in front of an incident field lens; obtaining a transfer function F(x,y) through the optical model of the field lens; solving a correction function δ(x,y) through G0*T*F(x,y)*δ(x,y)=H0, where H0 is an ideal shaping spot distribution function, and * represents convolution; obtaining a grayscale image corresponding to the correction function δ(x,y), and inputting the grayscale image into a phase programmable device to correct the shaping spot scanned to a position (x,y) in the field lens area. The phase programmable device of the present invention can correct the spot at a certain position in the field lens area when the galvanometer scans to that position, so as to obtain an ideal and uniform shaping spot, and can achieve an ideal shaping spot throughout the entire area of the field lens.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser processing, and particularly relates to a shaping spot correction method for a laser processing system, a laser processing system, a laser processing method, and a correction model. Background Art

[0002] In laser processing applications, it is often necessary to shape and transform a laser beam into a spot with a special light field distribution for material processing. Common shaping spots include flat-top light, multi-focus, ring, etc. For example, it is relatively common to shape a Gaussian beam into flat-top light. Among them, the flat-top light generated by a diffractive optical element (DOE) has a steep edge and a uniform energy distribution, so it has been more widely used.

[0003] In actual laser processing applications, in order to improve processing efficiency, it is necessary to perform laser scanning processing on materials. Common laser processing systems are equipped with galvanometers and field lenses to achieve the function of area scanning. The field lenses commonly used in industry are designed to achieve a smaller focused spot in ordinary focusing applications. It can form a focused spot with a uniform size within a certain range of the processing plane for the laser beam. Figure 2 The figure shows the focus Spot size distribution of a 532nm field lens within a 210×210mm area. It can be seen that the focus size of the entire area is relatively uniform (12.1um - 13.6um).

[0004] The design of common field lenses is not optimized for specific beam shaping systems. For a beam shaping processing system, there will be varying degrees of differences and distortions in the shaping spots at each point on the field lens area, which affects the process effect of actual applications. Especially for high-precision laser processing, such as laser annealing of semiconductor wafers and laser doping of photovoltaic cells, flat-top light shaping is required for large-area scanning, and it is required that the shaping spots at each point on the entire area can achieve uniform energy distribution and consistent spot shape. However, the commonly used field lenses in industry are difficult to meet the requirements and cannot achieve the ideal process effect.

[0005] For example, in a flat-top light shaping system based on a diffractive optical element (DOE), generally a focusing lens is required to obtain the designed flat-top spot on the focal plane. In order to achieve area scanning, an F-Theta lens (field lens) is generally used in industry as the focusing lens, combined with a galvanometer application, to achieve scanning of a certain area. The focal plane of the field lens is a plane, and the planar material can just be placed on the focal plane. As Figure 1 shown, the laser output beam passes through an expander to expand to the incident beam size required by the DOE, is modulated by the DOE, enters the galvanometer and the field lens, and finally obtains a flat-top spot on the focal plane.

[0006] However, the design of the field lens itself is not optimized for the diffracted beam modulated by the DOE. The shape and energy distribution of the reshaped light spot are not considered in the design, and machining and assembly errors will also cause various types of aberrations in the field lens. Therefore, the reshaped light spots obtained in some areas of the entire field lens surface will be distorted, deviating from the originally designed light spot shape and energy uniform distribution. See Figure 3 , which shows the flat-top light distribution obtained at the focus by using an ordinary plano-convex lens instead of the field lens and simulating the incidence with an ideal Gaussian beam model. It can be seen that the energy distribution of the flat-top light obtained by the DOE and the plano-convex lens is very uniform, and the square shape is also regular. See Figure 4 , which shows the use of a field lens (brand: SILL OPTICS, Germany, model: S4LFT1330 / 292) in the DOE system, for comparison Figure 3 and Figure 4 It can be seen that for the flat-top light spots at different coordinates on the field lens surface, for example, energy dips have appeared at the four corners of the light spot at the center (0, 0) position of the surface, and the energy distribution further deteriorates at the four coordinates 75 mm away from the center in the positive and negative directions. Summary of the Invention

[0007] The purpose of the present invention is to provide a method for correcting the reshaped light spot of a laser processing system, a laser processing system, a laser processing method, and a correction model to solve the technical problem of large differences in the reshaped light spots at various positions on the scanning surface of the field lens in the laser processing system.

[0008] To solve the above technical problem, the present invention provides a method for correcting the reshaped light spot of a laser processing system, including: obtaining an ideal Gaussian beam model G0; obtaining a transfer function T through the optical model of the beam shaper; calculating the beam function G0*T before entering the field lens; obtaining a transfer function F(x, y) through the optical model of the field lens; solving the correction function δ(x, y) through G0*T*F(x, y)*δ(x, y)=H0, where H0 is the ideal reshaped light spot distribution function, and * represents convolution; obtaining the grayscale image corresponding to the correction function δ(x, y), and inputting the grayscale image into the phase programmable device to correct the reshaped light spot scanned to the position (x, y) on the field lens surface.

[0009] Further, the method for correcting the reshaped light spot of the laser processing system further includes: correcting the aberration of the beam before entering the beam shaper; the method for correcting the aberration of the beam before entering the beam shaper includes: measuring the wavefront of the beam before entering the beam shaper through a wavefront detector to obtain a wavefront distribution grayscale image; obtaining a wavefront aberration correction grayscale image according to the wavefront distribution grayscale image; inputting the wavefront aberration correction grayscale image into the phase programmable device for correction.

[0010] On the other hand, the present invention also provides a beam shaping laser processing system, comprising: a laser emitting device, a phase programmable device, a beam shaper, a galvanometer scanner, a field lens, and a processing module, which are arranged in sequence; the laser emitting device, the phase programmable device, and the galvanometer scanner are all electrically connected to the processing module; the processing module is adapted to control the phase programmable device to correct the shaped light spot scanned to the corresponding position in the field lens field according to the galvanometer scanner scanning position.

[0011] Further, the laser emitting device comprises a laser and a beam expander arranged in sequence; the laser is electrically connected to the processing module; the beam expander is used for expanding the laser beam emitted by the laser.

[0012] Further, the laser processing system further comprises: a wavefront detector electrically connected to the processing module; the wavefront detector is adapted to perform wavefront measurement on the beam before entering the beam shaper; the processing module is adapted to control the phase programmable device to perform correction according to the wavefront data measured by the wavefront detector, so as to output a Gaussian beam with corrected phase.

[0013] Further, a plurality of reflectors are arranged between the phase programmable device and the galvanometer scanner.

[0014] Further, the phase programmable device comprises: a liquid crystal spatial light modulator, a DMD spatial light modulator; the beam shaper comprises: a flat-top light shaper, a multi-focus shaper, a ring shaper.

[0015] On the other hand, the present invention also provides a laser processing method, comprising: the laser emitting device emits a laser beam; the phase programmable device processes the laser beam; the beam shaper modulates the output beam; the field lens focuses the laser beam output by the phase programmable device to obtain a shaped light spot on the processing surface; the galvanometer scanner scans the processing surface; wherein the phase programmable device is adapted to correct the shaped light spot scanned to the corresponding position in the field lens field according to the galvanometer scanner scanning position.

[0016] Further, the beam shaping laser processing method further comprises: the phase programmable device corrects the beam according to the wavefront data of the beam before entering, so as to output a Gaussian beam with corrected phase.

[0017] On the other hand, the present invention also provides a correction model for the shaped light spot in the field lens field, comprising:

[0018] G0*T*F(x,y)*δ(x,y) = H0;

[0019] Wherein, G0 is an ideal Gaussian beam model, * represents convolution, T is a transfer function obtained through the optical model of the beam shaper, G0*T is the diffraction beam function in front of the incident field lens, F(x,y) is a transfer function obtained through the optical model of the field lens, δ(x,y) is the correction function input to the phase programmable device, and (x, y) is the position scanned into the field lens aperture.

[0020] The beneficial effect of the present invention is that the shaping spot correction method of the laser processing system of the present invention, the laser processing system, the laser processing method, and the phase programmable device of the correction model can correct the shaping spot at a certain position in the field lens aperture in real time when the galvanometer scans to that position, so as to obtain an ideal and uniform shaping spot, and it can achieve an ideal shaping spot throughout the entire aperture of the field lens.

[0021] Other features and advantages of the present invention will be described in the following specification, and, in part, will become apparent from the specification or will be understood by implementing the present invention. The objectives and other advantages of the present invention are achieved and obtained by the structures specifically pointed out in the specification and the drawings.

[0022] To make the above objectives, features, and advantages of the present invention more obvious and understandable, the following specific preferred embodiments are given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 is a conventional beam shaping laser processing system based on a field lens in the prior art;

[0025] Figure 2 is the distribution diagram of the focal spot size of the field lens aperture;

[0026] Figure 3 is the uniform flat-top light obtained by the beam shaper through a plano-convex lens;

[0027] Figure 4 is the flat-top light distribution at each position obtained by the beam shaper through the field lens;

[0028] Figure 5 is a schematic diagram of the beam shaping laser processing system of the embodiment of the present invention;

[0029] Figure 6 is the wavefront grayscale image obtained by the wavefront detector. Specific Embodiments

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0031] A first embodiment of the present invention provides a method for correcting a shaped light spot of a laser processing system, including: obtaining an ideal Gaussian beam model G0; obtaining a transfer function T through the optical model of a beam shaper; calculating a diffracted beam function G0*T in front of an incident field lens; obtaining a transfer function F(x, y) through the optical model of the field lens; solving a correction function δ(x, y) through G0*T*F(x, y)*δ(x, y)=H0, where H0 is an ideal shaped light spot distribution function, defined according to the shaped light spot optical field distribution required specifically, and the shaped light spot can be a flat-top light, multi-focus, ring, etc.; * represents convolution; obtaining a grayscale image corresponding to the correction function δ(x, y), and inputting the grayscale image into a phase programmable device to correct the shaped light spot scanned to the position (x, y) in the field lens aperture.

[0032] In some application scenarios, it is very difficult to make the wavefront of the laser's actual output beam distortion-free. After passing through devices such as beam expanders in the external optical path, the wavefront will be further distorted. For diffractive optical type beam shapers, they are all designed according to the incident conditions of an ideal Gaussian beam without distortion. If the input beam wavefront is distorted, it will affect the effect of the finally obtained shaped light spot, resulting in the light field distribution and shape deviating from the design.

[0033] In this embodiment, preferably, the method for correcting a shaped light spot of the laser processing system further includes: correcting the distortion of the beam before entering the beam shaper; the method for correcting the distortion of the beam before entering the beam shaper includes: measuring the wavefront of the beam before entering the beam shaper through a wavefront detector to obtain a wavefront distribution grayscale image; obtaining a wavefront distortion correction grayscale image according to the wavefront distribution grayscale image; inputting the wavefront distortion correction grayscale image into a phase programmable device for correction.

[0034] In an application scenario, when a laser emits an initial Gaussian beam and passes through some components (such as a beam expander, a power regulator, etc.), a wavefront detector can be used to measure the wavefront of the beam before entering the beam shaper; then, through the obtained wavefront distribution grayscale image (see Figure 6)The calculated wavefront distortion correction grayscale image is input into the phase programmable device for correction, and then the Gaussian beam after phase correction is output, which is closer to the ideal Gaussian beam; the Gaussian beam after phase correction enters the beam shaper, and theoretically, an ideal shaped spot can be obtained on the focal plane of the lens; the phase programmable device can be but is not limited to a liquid crystal spatial light modulator, a DMD spatial light modulator, and the beam shaper can be but is not limited to a flat-top beam shaper, a multi-focus shaper, a ring shaper.

[0035] However, for the galvanometer and field lens scanning system, conventional industrial field lenses are designed to achieve as consistent a focused spot as possible across the entire field for an incident Gaussian beam. However, due to the existence of aberrations, there will always be differences in the focused spots at different positions across the field, resulting in the fact that the beam modulated by the beam shaper, when focused by the field lens at different positions across the field, does not result in an ideal shaped spot (see Figure 3 and Figure 4 ), that is, there is a transfer function F(x,y) corresponding to each different position across the field lens;

[0036] The ideal Gaussian beam G0 is focused by the field lens, and the beam shaped spot obtained across the field is G0*T*F(x,y). Let the ideal shaped spot distribution function be H0. Due to the existence of aberrations in the field lens, there is a certain deviation between G0*T*F(x,y) and H0. This deviation can be described by δ(x,y), and through G0*T*F(x,y)*δ(x,y)=H0, the correction function δ(x,y) can be obtained. The grayscale image corresponding to the correction function δ(x,y) is calculated through a calculation program, and the grayscale image is input into the phase programmable device to perform real-time correction on the shaped spot scanned to the position (x,y) in the field lens field; for example, according to the real-time position of the galvanometer scan, when scanned to a certain position in the field lens field, such as (x0, y0), the phase programmable device loads the corresponding δ(x0,y0) value that satisfies G0*T*F(x0,y0)*δ(x0,y0)=H0, and the spot at this position can be adjusted to an ideal shaped spot, that is, an ideal uniform shaped spot H0 can be obtained across the entire field lens field.

[0037] In this embodiment, the transfer function T for obtaining the optical model of the beam shaper can be obtained from the beam shaper designer; the transfer function F(x,y) for obtaining the optical model of the field lens can be obtained from the field lens designer.

[0038] On the basis of the above embodiment, see Figure 2, a second inventive embodiment of the present invention provides a laser processing system, comprising: a laser emitting device, a phase programmable device, a beam shaper, a galvanometer scanner, a field lens, and a processing module arranged in sequence; the laser emitting device, the phase programmable device, and the galvanometer scanner are all electrically connected to the processing module; the processing module is adapted to control the phase programmable device to correct the shaped light spot scanned to a corresponding position in the field lens area according to the scanning position of the galvanometer scanner.

[0039] In this embodiment, the phase programmable device can correct the light spot at a certain position when the galvanometer scanner scans to a position in the field lens area, so as to obtain an ideal shaped light spot, and it can be realized that the entire area of the field lens can reach an ideal shaped light spot.

[0040] In this embodiment, optionally, the laser emitting device includes a laser and a beam expander arranged in sequence, and may further include a power regulator; the laser is electrically connected to the processing module; the beam expander is used to expand the laser beam emitted by the laser; the power regulator is used to adjust the power of the expanded beam.

[0041] In some application scenarios, for conventional industrial lasers, due to the existence of minute defects in the optical elements themselves, the influence of heat and installation and fixation processes on the elements, there is a certain distortion in the wavefront of the laser output beam. External optical path elements such as beam expanders and power regulators will also cause further deterioration of the wavefront quality of the beam due to factors such as optical design, lens processing, and assembly defects. Therefore, there is a certain deviation between the beam entering the beam shaper and an ideal single-mode Gaussian beam, and finally the energy distribution of the shaped light spot is uneven, and the shape of the light spot also becomes irregular, deviating from the designed shaped light spot, which affects the actual application effect.

[0042] Therefore, in this embodiment, the laser processing system further includes: a wavefront detector electrically connected to the processing module; the wavefront detector is adapted to measure the wavefront of the beam before entering the beam shaper; the processing module is adapted to control the phase programmable device to perform correction according to the wavefront data measured by the wavefront detector, so as to output a Gaussian beam with phase correction; for the specific correction method, reference can be made to the method for correcting the distortion of the beam before entering the beam shaper described above, which will not be elaborated here.

[0043] In this embodiment, optionally, a plurality of reflectors are arranged between the phase programmable device and the galvanometer scanner.

[0044] In this embodiment, optionally, the processing module can be a PC.

[0045] Based on the above embodiments, a third embodiment of the present invention provides a laser processing method, including: a laser emitting device emits a laser beam; a phase programmable device processes the laser beam; a beam shaper modulates the output beam; a field lens focuses the laser beam output from the phase programmable device to obtain a shaped light spot on the processing surface; a galvanometer is used to scan the processing surface; wherein the phase programmable device is adapted to correct the shaped light spot scanned to the corresponding position in the field lens field according to the galvanometer scanning position.

[0046] In this embodiment, optionally, the laser processing method further includes: the phase programmable device corrects the beam according to the beam wavefront data before entering the beam shaper to output a Gaussian beam with phase correction.

[0047] Based on the above embodiments, a fourth embodiment of the present invention provides a correction model for the shaped light spot in the field lens field, including:

[0048] G0*T*F(x,y)*δ(x,y) = H0;

[0049] Wherein, G0 is the Gaussian beam after phase correction, T is the transfer function obtained through the optical model of the DOE, G0*T is the diffraction beam function before entering the field lens, F(x,y) is the transfer function obtained through the optical model of the field lens, δ(x,y) is the correction function input to the phase programmable device, and (x, y) is the position scanned to the field lens field.

[0050] The following is an example of the application of a flat-top light laser processing system

[0051] In a specific application scenario of laser annealing of semiconductors, the main components and parameters involved in the laser processing system are as follows:

[0052] 1. Laser: wavelength 532nm, power 40W, repetition frequency 20kHz, pulse width 10ns, output light spot 0.8mm;

[0053] 2. Beam expander: 2 - 8 times adjustable;

[0054] 3. Phase programmable device: DMD spatial light adjuster;

[0055] 4. Beam shaper: incident light spot 6mm, flat-top light shape is square, light spot size 100um @ 300mm focal length;

[0056] 5. Field lens: focal length 300mm, field 160 * 160mm;

[0057] 6. Wavefront detector: wavefront analyzer of the French PHASICS brand, model SID4;

[0058] The specific implementation of the present invention is as follows:

[0059] 1. Use a wavefront analyzer to measure the beam wavefront of the laser beam after passing through the beam expander, as Figure 6 shown;

[0060] 2. Calculate the wavefront distortion correction grayscale map from the obtained wavefront data, input it into the spatial light modulator for correction, and output a Gaussian beam with corrected phase, so that the wavefront distribution is uniform and the same without distortion;

[0061] 3. Obtain the transfer function T through the optical model of the beam shaper (which can be obtained from the beam shaper manufacturer), then the diffraction beam function of the incident field lens is G0*T;

[0062] 4. Obtain the transfer function F(x,y) through the optical model of the field lens (which can be obtained from the field lens manufacturer), calculate δ(x,y) through the computer matlab program, so that G0*T*F(x,y)*δ(x,y) = H0;

[0063] 5. Input the grayscale map corresponding to δ(x,y) into the spatial light modulator and synchronize it with the galvanometer scanning process. When the field lens scans to a certain position (x0, y0), the spatial light modulator loads the corresponding δ(x0,y0) value, so that G0*T*F(x0,y0)*δ(x0,y0) = H0, so that the light at the position (x0, y0) is an ideal uniform flat-top light, so that an ideal uniform flat-top light H0 can be obtained over the entire scene area.

[0064] All the devices selected in this application (components without specific structures described) are common standard components or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or obtained through conventional experimental methods.

[0065] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0066] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0067] In several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there can be other division methods in actual implementation. For another example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the coupling, direct coupling, or communication connection shown or discussed with each other can be through some communication interfaces. The indirect coupling or communication connection of the devices or units can be in electrical, mechanical, or other forms.

[0068] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0069] In addition, in each embodiment of the present invention, the functional units can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit.

[0070] Taking the above-mentioned ideal embodiments of the present invention as an inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A method for correcting a shaped light spot of a laser processing system, characterized in that, Comprising: Obtain the ideal Gaussian beam model G 0; Obtain the transfer function through the optical model of the beam shaper T ; Calculate the diffraction beam function in front of the incident field lens G 0* T ; Obtain the transfer function through the optical model of the field lens F ( x , y ); By G 0* T * F ( x , y )* δ ( x , y )= H 0, solve the calibration function δ ( x , y ), Among them, H 0 is the ideal shaping spot distribution function, and * represents convolution; Obtain the calibration function δ ( x , y ) corresponding grayscale image, input the grayscale image into the phase programmable device to correct the shaped light spot scanned to the position ( x , y ) 2. The shaping light spot correction method according to claim 1, wherein Further comprising: Performing aberration correction on the light beam before entering the beam shaper; The method for performing aberration correction on the light beam before entering the beam shaper includes: Performing wavefront measurement on the light beam before entering the beam shaper through a wavefront detector to obtain a wavefront distribution grayscale image; Obtaining a wavefront aberration correction grayscale image according to the wavefront distribution grayscale image; Inputting the wavefront aberration correction grayscale image into a phase programmable device for correction.

3. A laser processing system, characterized in that, Comprising: A laser emission device, a phase programmable device, a beam shaper, a galvanometer scanner, a field lens, and a processing module arranged in sequence; The laser emission device, the phase programmable device, and the galvanometer scanner are all electrically connected to the processing module; The processing module is adapted to control the phase programmable device to correct the shaped light spot scanned to the corresponding position in the field lens field according to the scanning position of the galvanometer scanner; wherein The correction is performed by using the shaped light spot correction method of the laser processing system as described in claim 1.

4. The laser processing system according to claim 3, wherein The laser emission device includes a laser and a beam expander arranged in sequence; The laser is electrically connected to the processing module; The beam expander is used to expand the laser beam emitted by the laser.

5. The laser processing system according to claim 3, characterized in that, Further comprising: A wavefront detector electrically connected to the processing module; The wavefront detector is adapted to perform wavefront measurement on the light beam before entering the beam shaper; The processing module is adapted to control the phase programmable device to perform correction according to the wavefront data measured by the wavefront detector to output a Gaussian light beam after phase correction.

6. The laser processing system according to claim 3, wherein A plurality of reflectors are arranged between the phase programmable device and the galvanometer scanner.

7. The laser processing system according to claim 3, wherein The phase programmable device includes: a liquid crystal spatial light modulator, DMD a spatial light modulator; The beam shaper includes: a flat-top beam shaper, a multi-focus beam shaper, and an annular beam shaper.

8. A laser processing method, characterized in that, Comprising: The laser emission device emits a laser beam; The phase programmable device processes the laser beam; The beam shaper modulates the output light beam; The field lens focuses the laser beam after the output of the phase programmable device to obtain a shaped light spot on the processing surface; Using the galvanometer scanner to scan the processing surface; wherein The phase programmable device is adapted to correct the shaped light spot scanned to the corresponding position in the field lens field according to the scanning position of the galvanometer scanner; wherein The correction is performed by using the shaped light spot correction method of the laser processing system as described in claim 1.

9. The laser processing method according to claim 8, wherein Further comprising: The phase programmable device corrects the light beam according to the wavefront data of the light beam before entering the beam shaper to output a Gaussian light beam after phase correction.

10. A method for constructing a field lens format shaping spot correction model, characterized in that, For the shaped light spot correction of the shaped light spot correction method of the laser processing system as described in claim 1, including: G 0* T * F ( x , y )* δ ( x , y )= H 0； wherein, G 0 is an ideal Gaussian beam model, * represents convolution, T is a transfer function obtained through the optical model of the beam shaper, G 0 * T is the diffraction beam function in front of the incident field lens, F ( x , y ) is a transfer function obtained through the optical model of the field lens, δ ( x , y ) is the correction function input to the phase programmable device, ( x , y ) is the position scanned into the field lens area.

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