Biomimetic flexible pressure sensor based on elastic conductive microspheres and preparation method thereof

Abstract

The application provides a preparation method of a biomimetic flexible pressure sensor based on elastic conductive microspheres, and comprises the following steps: S1, preparing Dow Corning 184 silicone rubber, and uniformly mixing A glue, B glue and dimethyl silicone oil to obtain a PDMS mixed solution; S2, adding the PDMS mixed solution into an alcohol solution of sodium dodecyl sulfate to obtain an intermediate product; S3, placing the intermediate product into an oven for baking and curing to obtain elastic small balls; S4, placing the elastic small balls into a mixed solution of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and then performing ultrasonic treatment to obtain pretreated elastic small balls; and S5, dropping a mixed solution of two-dimensional transition metal carbide and carbon nanotubes on the elastic small balls, and then performing vacuum extraction and drying treatment to obtain the biomimetic flexible pressure sensor based on the elastic conductive microspheres. The application further provides the biomimetic flexible pressure sensor and application thereof, and the preparation method is simple, and the prepared sensor has high elasticity, high sensitivity and good tensile stability.

Description

Technical Field

[0001] This invention relates to the field of flexible pressure sensors, and more specifically, to a biomimetic flexible pressure sensor based on elastic conductive microspheres and its fabrication method. Background Technology

[0002] Sensor technology plays a vital role in modern science and technology, and is considered one of the three pillars of modern information technology. Among them, pressure sensors are the most widely used, holding the largest global market share. With the development of intelligent manufacturing and smart healthcare, new demands have been placed on the deformation capabilities of pressure sensors, and their development has shown a trend from rigid to flexible.

[0003] In the development of elastic pressure sensors, researchers have proposed various media and electrode microstructures to improve device sensitivity and tensile stability, such as resistive pressure sensors based on porous pyramidal surface media, capacitive pressure sensors based on long columnar surface media, and capacitive pressure sensors based on long ridge structure electrodes, etc.

[0004] Microstructures have significantly improved device sensitivity, but the sensitivity still changes considerably under stretching conditions, making it difficult to meet the practical application requirements of wearable and implantable devices, thus greatly reducing the application range of sensors.

[0005] However, the current methods for fabricating biomimetic flexible pressure sensors are too cumbersome and complex, and the resulting biomimetic flexible pressure sensors generally have poor tensile stability, elasticity, and sensitivity, while also being costly to manufacture. Summary of the Invention

[0006] One of the technical problems to be solved by the present invention is to provide a method for fabricating a biomimetic flexible pressure sensor based on elastic conductive microspheres, so as to solve the problems of conventional methods being cumbersome, complex and costly.

[0007] To address the above problems, this invention provides a method for fabricating a biomimetic flexible pressure sensor based on elastic conductive microspheres, comprising the following steps:

[0008] S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil evenly to obtain a PDMS mixture;

[0009] S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product;

[0010] S3: Place the intermediate product in an oven for baking and curing to obtain elastic microspheres;

[0011] S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and then subjected to ultrasonic treatment to obtain pretreated elastic microspheres.

[0012] S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0013] As a preferred embodiment, in step S1, the mass ratio of adhesive A, adhesive B and dimethyl silicone oil is 10:(0.1-6):(0.1-6).

[0014] As a preferred embodiment, in step S2, the PDMS mixture is added by dripping it into the sodium dodecyl sulfate alcohol solution through a glass needle connected to a high-pressure gas cylinder, and the output pressure of the high-pressure gas cylinder is 45-150 psi, and the inner diameter of the glass needle used is 25-60 μm.

[0015] As a preferred embodiment, in step S2, the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 1-15 g / L.

[0016] As a preferred embodiment, in step S3, the baking and curing temperature is 60°C and the time is 0.5-3 hours.

[0017] As a preferred embodiment, in step S4, the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:(1-5).

[0018] As a preferred embodiment, in step S4, the ultrasonic power of the ultrasonic treatment is 425W, and the time is 5-15min.

[0019] As a preferred embodiment, in step S5, the mass ratio of the two-dimensional transition metal carbide to the carbon nanotube is (1-10):1.

[0020] As a preferred embodiment, in step S5, the vacuum level of the vacuuming is -0.9 Bar, and the time is 5-10 min; the drying temperature is 60℃, and the time is 5-10 min.

[0021] Compared with existing technologies, the method for fabricating a biomimetic flexible pressure sensor based on elastic conductive microspheres, as described in this invention, has the following advantages and beneficial effects:

[0022] The preparation method provided by this invention is simpler than conventional methods, requires no complex equipment, has low cost, high stability, and does not require harsh reaction conditions, thus having greater promotion and practical value.

[0023] One of the technical problems to be solved by the present invention is to provide a biomimetic flexible pressure sensor based on elastic conductive microspheres, so as to solve the problems that conventional biomimetic flexible pressure sensors have poor tensile stability, elasticity and sensitivity.

[0024] To address the aforementioned problems, this invention provides a biomimetic flexible pressure sensor based on elastic conductive microspheres, wherein the sensor is fabricated using the aforementioned method.

[0025] Compared with existing technologies, the biomimetic flexible pressure sensor based on elastic conductive microspheres of the present invention has the following advantages and beneficial effects:

[0026] The fabrication method provided by this invention utilizes a sensor structure where functional elastic conductive microspheres are separated from an elastic substrate. When the sensor is stretched, the strain is released through the 3D-printed elastic substrate and cannot be applied to the functional microspheres, thus ensuring tensile stability. Compared to other methods that construct microstructures on the surface to improve the tensile stability of devices, this structure is simple to fabricate and exhibits better tensile stability.

[0027] Another technical problem to be solved by the present invention is to provide an application of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0028] As a preferred embodiment, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-like flexible pressure sensor. The application includes: embedding the sensor into an elastic substrate with a spherical segment microstructure printed by 3D printing technology, solidifying and filling the top of the microsphere with a two-dimensional transition metal carbide / single-walled carbon nanotube mixture, and then using a template to coat the surface with a liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

[0029] Compared with existing technologies, the flexible pressure sensor with a cat paw-like structure prepared in this invention has the following advantages and beneficial effects:

[0030] The flexible stress sensor with a cat paw-like structure provided by this invention has the characteristics of high elasticity, high sensitivity, high tensile stability, low manufacturing cost, and simple manufacturing method; it does not require precise micro-nano structure design, is suitable for real-time monitoring of human movement or other physiological signals, and has high theoretical value. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the flexible pressure sensor invented in this paper.

[0032] Figure 1 In the middle, 1. elastic conductive electrode; 2. elastic conductive microsphere; 3. spherical defect.

[0033] Figure 2 The graph shows the sensitivity curves of a flexible pressure sensor with a cat-paw-like structure under different stretching conditions. Detailed Implementation

[0034] The technical solution of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to specific embodiments. It should be understood by those skilled in the art that the following detailed description is illustrative and not restrictive, and should not be construed as limiting the scope of protection of the present invention.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as are familiar to those skilled in the art. Furthermore, any methods and materials similar to or equivalent to those described herein may be applied to the methods of this invention. The preferred embodiments and materials described herein are for illustrative purposes only.

[0037] This invention provides a method for fabricating a biomimetic flexible pressure sensor based on elastic conductive microspheres, comprising the following steps:

[0038] S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil evenly to obtain a PDMS mixture;

[0039] S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product;

[0040] S3: Place the intermediate product in an oven for baking and curing to obtain elastic microspheres;

[0041] S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and then subjected to ultrasonic treatment to obtain pretreated elastic microspheres.

[0042] S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0043] Preferably, in step S1, the mass ratio of adhesive A, adhesive B and dimethyl silicone oil is 10:(0.1-6):(0.1-6).

[0044] Preferably, in step S2, the PDMS mixture is added by dripping it into the sodium dodecyl sulfate alcohol solution through a glass needle connected to a high-pressure gas cylinder, and the output pressure of the high-pressure gas cylinder is 45-150 psi, and the inner diameter of the glass needle used is 25-60 μm.

[0045] Preferably, in step S2, the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 1-15 g / L.

[0046] Preferably, in step S3, the baking and curing temperature is 60°C and the time is 0.5-3 hours.

[0047] Preferably, in step S4, the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:(1-5).

[0048] Preferably, in step S4, the ultrasonic power of the ultrasonic treatment is 425W and the time is 5-15min.

[0049] Preferably, in step S5, the mass ratio of the two-dimensional transition metal carbide to the carbon nanotube is (1-10):1.

[0050] Preferably, the vacuum degree of the vacuuming is -0.9 Bar and the time is 5-10 min; the drying temperature is 60℃ and the time is 5-10 min.

[0051] This invention provides a biomimetic flexible pressure sensor based on elastic conductive microspheres, wherein the sensor is prepared by the aforementioned method.

[0052] The present invention also provides applications of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0053] Preferably, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-like flexible pressure sensor. The application includes: embedding the sensor into an elastic substrate with a spherical segment microstructure printed by 3D printing technology, solidifying and filling the top of the microsphere with a two-dimensional transition metal carbide / single-walled carbon nanotube mixture, and then using a template to coat the surface with a liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

[0054] The following examples are provided to explain the above-described solution:

[0055] Example 1:

[0056] S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil to obtain a PDMS mixture; the mass ratio of the A and B components to the dimethyl silicone oil is 10:3:3.

[0057] S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product; the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 1-15 g / L; the PDMS mixture is added by dripping it into the alcoholic solution of sodium dodecyl sulfate through a glass needle connected to a high-pressure gas cylinder, and the output pipe pressure of the high-pressure gas cylinder is 97.5 psi, and the inner diameter of the glass needle used is 42.5 μm.

[0058] S3: The intermediate product is placed in an oven for baking and curing to obtain elastic microspheres; the baking and curing temperature is 60℃ and the time is 1.75h.

[0059] S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and subjected to ultrasonic treatment to obtain pretreated elastic microspheres; the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:3; the ultrasonic power of the ultrasonic treatment is 425W and the time is 10min.

[0060] S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres; the mass ratio of the two-dimensional transition metal carbide to carbon nanotubes is 5.5:1; the vacuum degree of the vacuuming is -0.9 Bar and the time is 7.5 min; the drying temperature is 60℃ and the time is 7.5 min.

[0061] This invention provides a biomimetic flexible pressure sensor based on elastic conductive microspheres, wherein the sensor is prepared by the aforementioned method.

[0062] The present invention also provides applications of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0063] Preferably, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-like flexible pressure sensor. The application includes: embedding the sensor into an elastic substrate with a spherical segment microstructure printed by 3D printing technology, solidifying and filling the top of the microsphere with a two-dimensional transition metal carbide / single-walled carbon nanotube mixture, and then using a template to coat the surface with a liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

[0064] Example 2:

[0065] S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil to obtain a PDMS mixture; the mass ratio of the A and B components to the dimethyl silicone oil is 10:0.1:0.1.

[0066] S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product; the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 1 g / L; the PDMS mixture is added by dripping it into the alcoholic solution of sodium dodecyl sulfate through a glass needle connected to a high-pressure gas cylinder, and the gas pressure in the output pipe of the high-pressure gas cylinder is 45 psi, and the inner diameter of the glass needle used is 25 μm.

[0067] S3: The intermediate product is placed in an oven for baking and curing to obtain elastic microspheres; the baking and curing temperature is 60℃ and the time is 0.5h.

[0068] S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and subjected to ultrasonic treatment to obtain pretreated elastic microspheres; the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:1; the ultrasonic power of the ultrasonic treatment is 425W and the time is 5min.

[0069] S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres; the mass ratio of the two-dimensional transition metal carbide to carbon nanotubes is 1:1; the vacuum degree of the vacuuming is -0.9 Bar and the time is 5 min; the drying temperature is 60℃ and the time is 5 min.

[0070] This invention provides a biomimetic flexible pressure sensor based on elastic conductive microspheres, wherein the sensor is prepared by the aforementioned method.

[0071] The present invention also provides applications of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0072] Preferably, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-like flexible pressure sensor. The application includes: embedding the sensor into an elastic substrate with a spherical segment microstructure printed by 3D printing technology, solidifying and filling the top of the microsphere with a two-dimensional transition metal carbide / single-walled carbon nanotube mixture, and then using a template to coat the surface with a liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

[0073] Example 3:

[0074] S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil to obtain a PDMS mixture; the mass ratio of the A and B components to the dimethyl silicone oil is 10:6:6.

[0075] S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product; the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 15 g / L; the PDMS mixture is added by dripping it into the alcoholic solution of sodium dodecyl sulfate through a glass needle connected to a high-pressure gas cylinder, and the gas pressure in the output pipe of the high-pressure gas cylinder is 150 psi, and the inner diameter of the glass needle used is 60 μm.

[0076] S3: The intermediate product is placed in an oven for baking and curing to obtain elastic microspheres; the baking and curing temperature is 60℃ and the time is 3h.

[0077] S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and subjected to ultrasonic treatment to obtain pretreated elastic microspheres; the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:5; the ultrasonic power of the ultrasonic treatment is 425W and the time is 15min.

[0078] S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres; the mass ratio of the two-dimensional transition metal carbide to carbon nanotubes is 10:1; the vacuum degree of the vacuuming is -0.9 Bar and the time is 10 min; the drying temperature is 60℃ and the time is 10 min.

[0079] This invention provides a biomimetic flexible pressure sensor based on elastic conductive microspheres, wherein the sensor is prepared by the aforementioned method.

[0080] The present invention also provides applications of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0081] Preferably, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-like flexible pressure sensor. The application includes: embedding the sensor into an elastic substrate with a spherical segment microstructure printed by 3D printing technology, solidifying and filling the top of the microsphere with a two-dimensional transition metal carbide / single-walled carbon nanotube mixture, and then using a template to coat the surface with a liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

[0082] The following examples, combined with specific data, are provided to illustrate the above embodiments:

[0083] Example 4

[0084] A flexible pressure sensor with a cat paw-like structure and its fabrication method include the following steps:

[0085] S1: Mix 10g of Dow Corning 184 silicone rubber A, 4g of Dow Corning 184 silicone rubber B and 3g of dimethyl silicone oil evenly to obtain solution A;

[0086] S2: Solution A is dropped into an alcoholic solution of sodium dodecyl sulfate with a concentration of 5 g / L by a glass needle with an inner diameter of 30 μm connected to a high-pressure gas cylinder with a pressure of 100 psi in the output pipeline to obtain intermediate product B.

[0087] S3: After curing intermediate product B in a 60℃ oven for 1 hour, elastic microspheres are obtained.

[0088] S4: The elastic microspheres described in step S3 are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide (the volume ratio of 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:3) and subjected to ultrasonic treatment to obtain pretreated elastic microspheres.

[0089] S5: A mixture of MXene (two-dimensional transition metal carbide) and CNTs is dropped onto pretreated elastic microspheres, then vacuumed and placed in an oven to dry. This step is repeated twice to obtain elastic conductive microspheres.

[0090] This embodiment also provides an application of the above-mentioned biomimetic flexible pressure sensor based on elastic conductive microspheres.

[0091] Preferably, the application includes using the biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat-paw-like flexible pressure sensor. The application includes: embedding the elastic conductive microspheres described in step S5 into an elastic substrate with spherical notch microstructures printed using 3D printing technology. The printed 3D model has dimensions of 60mm*15mm*1.35mm, a notch radius of 0.5mm, and the notches on the substrate are arranged in a square array with a spacing of 2.5mm between each of the 16 notches, an embedding depth of 0.3mm, and a liquid metal coating thickness of 0.2mm. The top of the microspheres is then filled with a mixture of MXene (two-dimensional transition metal carbide) and single-walled carbon nanotubes, and a template is used to coat the surface with a fixed thickness of liquid metal to obtain the cat-paw-like flexible pressure sensor.

[0092] Comparative Example 1:

[0093] The above embodiment 4 was adjusted by replacing the elastic conductive microspheres with a functional layer of the same thickness and material as the microspheres. All other aspects remained the same.

[0094] The flexible pressure sensor prepared by this method exhibits significantly reduced tensile stability. This is because the absence of microstructures means that strain is applied directly to the functional layer.

[0095] Experimental results verification

[0096] The flexible pressure sensor with a cat paw-like structure prepared in Example 4 of this invention has high tensile stability. Under 15% tension, the device sensitivity changes by less than 10%.

[0097] like Figure 2 As shown, the flexible pressure sensor has a sensitivity of 0.042 kPa⁻¹ in the pressure range of 0-5 kPa, and the sensitivity change is within 10% under 15% stretching.

[0098] The working principle of the flexible pressure sensor with a cat paw-like structure described in this embodiment is as follows:

[0099] When pressure is applied to the sensor, the contact resistance between the elastic conductive microsphere and the electrode changes, converting the pressure signal into an electrical signal. Furthermore, the embedded elastic conductive microsphere is separated from the elastic substrate, stretching the sensor. The strain is released through the 3D-printed elastic substrate and cannot be applied to the functional microsphere, thus ensuring tensile stability.

[0100] The flexible pressure sensor described in this invention has the characteristics of high elasticity, high sensitivity, good tensile stability, low manufacturing cost, and simple manufacturing method, and is suitable for monitoring human physiological signals.

[0101] The above embodiments provide a detailed description of the technical solution of the present invention. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, additions, or similar substitutions made within the scope of the principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An application of a biomimetic flexible pressure sensor based on elastic conductive microspheres, characterized in that, The method for fabricating the biomimetic flexible pressure sensor based on elastic conductive microspheres includes the following steps: S1: Prepare Dow Corning 184 silicone rubber, and mix the A and B components of the Dow Corning 184 silicone rubber with dimethyl silicone oil evenly to obtain a PDMS mixture; S2: The PDMS mixture is added to an alcoholic solution of sodium dodecyl sulfate to obtain an intermediate product; In step S2, the PDMS mixture is added by dripping it into the sodium dodecyl sulfate alcohol solution through a glass needle connected to a high-pressure gas cylinder, and the output pressure of the high-pressure gas cylinder is 45-150 psi, and the inner diameter of the glass needle used is 25-60 μm. S3: Place the intermediate product in an oven for baking and curing to obtain elastic microspheres; S4: The elastic microspheres are placed in a mixture of 75% tetrabutylammonium fluoride aqueous solution and N,N-dimethylformamide, and then subjected to ultrasonic treatment to obtain pretreated elastic microspheres. S5: A mixture of two-dimensional transition metal carbide and carbon nanotubes is dropped onto the pretreated elastic microspheres, followed by at least one vacuuming and drying process to obtain a biomimetic flexible pressure sensor based on elastic conductive microspheres. The application includes using the aforementioned biomimetic flexible pressure sensor based on elastic conductive microspheres in the fabrication of a cat paw-inspired flexible pressure sensor, including: The biomimetic flexible pressure sensor based on elastic conductive microspheres is embedded in an elastic substrate with a spherical segment microstructure printed by 3D printing technology. A two-dimensional transition metal carbide / single-walled carbon nanotube mixture is used to solidify and fill the top of the microspheres. Then, a template is used to coat the surface with liquid metal of a fixed thickness to obtain the cat paw-like flexible pressure sensor.

2. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S1, the mass ratio of adhesive A, adhesive B and dimethyl silicone oil is 10:(0.1-6):(0.1-6).

3. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S2, the concentration of sodium dodecyl sulfate in the alcoholic solution of sodium dodecyl sulfate is 1-15 g / L.

4. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S3, the baking and curing temperature is 60°C and the time is 0.5-3 hours.

5. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S4, the volume ratio of the 75% tetrabutylammonium fluoride aqueous solution to N,N-dimethylformamide is 1:(1-5).

6. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S4, the ultrasonic power of the ultrasonic treatment is 425W, and the time is 5-15 minutes.

7. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, In step S5, the mass ratio of the two-dimensional transition metal carbide to carbon nanotubes is (1-10):

1.

8. The application of the biomimetic flexible pressure sensor based on elastic conductive microspheres according to claim 1, characterized in that, The vacuum level of the vacuum pump is -0.9 Bar, and the time is 5-10 min; the drying temperature is 60℃, and the time is 5-10 min.

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