A 6-DOF error decoupling method and measurement system for a three-dimensional micro-displacement slider

Abstract

The present invention relates to the field of precision measurement technology, and in particular to a 6-degree-of-freedom error decoupling method and measurement system for a three-dimensional micro-displacement slider, comprising a three-dimensional micro-displacement slider; an outer surface of the three-dimensional micro-displacement slider is provided with an X-direction measurement module in the X-axis direction, the X-direction measurement module being used to measure the initial distance of an incident light beam in the X-direction, and the angles between an x-direction +1-order main maximum diffraction beam and an x-direction ‑1-order main maximum diffraction beam and the incident light beam in the X-direction; and an outer surface of the three-dimensional micro-displacement slider is provided with a Y-direction measurement module in the Y-axis direction. In the present invention, by providing three groups of orthogonally arranged reflective gratings and three groups of photoelectric position sensors, measurement data coupled by the 6-degree-of-freedom errors can be effectively obtained, and the measurement data can be used to highly accurately separate the 6-degree-of-freedom errors of the three-dimensional micro-displacement slider along the x, y and z axes, as well as around the x, y and z axes, using a fast error decoupling method.

Description

Technical Field

[0001] The present invention relates to the field of precision measurement technology, and in particular to a 6-degree-of-freedom error decoupling method and a measurement system for a three-dimensional micro-displacement slider. Background Art

[0002] Three-dimensional micro-displacement sliders are widely used in industrial manufacturing, precision measurement and other fields. The manufacturing accuracy, assembly accuracy and control accuracy of three-dimensional micro-displacement sliders directly affect the motion accuracy of linear motion such as precision slides and precision guide rails. Traditional methods use a combination system of laser autocollimators, laser interferometers, micrometers, inductive micrometers, etc. to achieve precise measurement of the six-degree-of-freedom error of three-dimensional micro-displacement sliders, which cannot avoid the problems of low measurement efficiency and complex measurement system.

[0003] To this end, a simple measurement system is designed, and a 6-DOF error fast separation and decoupling method is adopted, which plays a vital role in realizing the online and real-time measurement of the 6-DOF error of the three-dimensional micro-displacement slider. Summary of the Invention

[0004] The purpose of the present invention is to provide a 6-DOF error decoupling method and measurement system for a three-dimensional micro-displacement slider, which mainly solves the technical problems mentioned in the prior art.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A three-dimensional micro-displacement slider measurement system includes a three-dimensional micro-displacement slider;

[0007] An X-direction measurement module is provided on the outer surface of the three-dimensional micro-displacement slider in the x-axis direction, and the X-direction measurement module is used to measure the initial distance of the x-direction incident light beam, and the angles between the x-direction +1st order main maximum diffraction beam and the x-direction -1st order main maximum diffraction beam and the x-direction incident light beam;

[0008] A Y-direction measurement module is provided on the outer surface of the three-dimensional micro-displacement slider in the y-axis direction, and the Y-direction measurement module is used to measure the initial distance of the y-direction incident light beam, and the angles between the y-direction +1st order main maximum diffraction beam and the y-direction -1st order main maximum diffraction beam and the y-direction incident light beam;

[0009] A Z-direction measurement module is provided on the outer surface of the three-dimensional micro-displacement slider in the z-axis direction. The Z-direction measurement module is used to measure the initial distance of the z-direction incident light beam, as well as the angles between the z-direction +1st order main maximum diffraction beam and the z-direction -1st order main maximum diffraction beam and the z-direction incident light beam.

[0010] Preferably, the X-direction measurement module includes:

[0011] an x-direction angular displacement stage, wherein an x-direction reflective grating is mounted on a side of an outer surface of the x-direction angular displacement stage away from the three-dimensional micro-displacement slider, the x-direction reflective grating being configured to receive an x-direction incident light beam and generate an x-direction +1st order main maximum diffraction beam and an x-direction -1st order main maximum diffraction beam;

[0012] An x-direction sensor connecting plate is arranged parallel to the x-direction angular displacement stage, and the x-direction sensor connecting plate is located on the side of the x-direction angular displacement stage away from the three-dimensional micro-displacement slider. A first x-direction photoelectric position sensor and a second x-direction photoelectric position sensor are installed on the outer surface of the x-direction sensor connecting plate close to the x-direction reflective grating. The first x-direction photoelectric position sensor is used to receive the x-direction +1 order main maximum diffraction beam, and the second x-direction photoelectric position sensor is used to receive the x-direction -1 order main maximum diffraction beam.

[0013] Preferably, the Y-direction measurement module includes:

[0014] a y-direction angular displacement stage, wherein a y-direction reflective grating is mounted on a side of an outer surface of the y-direction angular displacement stage away from the three-dimensional micro-displacement slider, the y-direction reflective grating being configured to receive a y-direction incident light beam and generate a y-direction +1st order main maximum diffraction beam and a y-direction -1st order main maximum diffraction beam;

[0015] A y-axis sensor connecting plate is arranged parallel to the y-axis angular displacement stage, and the y-axis sensor connecting plate is located on the side of the y-axis angular displacement stage away from the three-dimensional micro-displacement slider. A first y-axis photoelectric position sensor and a second y-axis photoelectric position sensor are installed on the outer surface of the y-axis sensor connecting plate close to the y-axis reflective grating. The first y-axis photoelectric position sensor is used to receive the y-axis +1st order main maximum diffraction beam, and the second y-axis photoelectric position sensor is used to receive the y-axis -1st order main maximum diffraction beam.

[0016] Preferably, the Z-direction measurement module includes:

[0017] a z-direction angular displacement stage, wherein a z-direction reflective grating is mounted on a side of an outer surface of the z-direction angular displacement stage away from the three-dimensional micro-displacement slider, the z-direction reflective grating being configured to receive a z-direction incident light beam and generate a z-direction +1st order main maximum diffraction beam and a z-direction -1st order main maximum diffraction beam;

[0018] A z-direction sensor connecting plate is arranged parallel to the z-direction angular displacement stage, and the z-direction sensor connecting plate is located on the side of the z-direction angular displacement stage away from the three-dimensional micro-displacement slider. A first z-direction photoelectric position sensor and a second z-direction photoelectric position sensor are installed on the outer surface of the z-direction sensor connecting plate close to the z-direction reflective grating. The first z-direction photoelectric position sensor is used to receive the z-direction +1st order main maximum diffraction beam, and the second z-direction photoelectric position sensor is used to receive the z-direction -1st order main maximum diffraction beam.

[0019] Preferably, the x-axis angular displacement stage, the y-axis angular displacement stage and the z-axis angular displacement stage are respectively mounted on the three-dimensional micro-displacement slider via angle adjustment devices;

[0020] In which, the angle adjustment device includes a first adjusting screw, a second adjusting screw, a third adjusting screw and a steel ball arranged on three angle displacement platforms, and a first adjusting screw pit, a second adjusting screw pit, a third adjusting screw top plate and a steel ball pit arranged on the three-dimensional micro-displacement slider, the screw end of the first adjusting screw is installed in the first adjusting screw pit, the screw end of the second adjusting screw is installed in the second adjusting screw pit, the third adjusting screw is installed on the third adjusting screw top plate, the steel ball is embedded in the steel ball pit, and the first adjusting screw, the second adjusting screw and the third adjusting screw are respectively installed with tension springs, which are used to drive the three-dimensional micro-displacement slider to reset after the first adjusting screw, the second adjusting screw and the third adjusting screw lose their rotational force.

[0021] Further preferably, the first adjusting screw on the x-axis angular displacement stage is used to drive the x-axis angular displacement stage to rotate around the steel ball along the y-axis, so that the x-axis reflective grating rotates around the y-axis;

[0022] The second adjusting screw on the x-axis angular displacement stage is used to drive the x-axis angular displacement stage to rotate around the steel ball along the z-axis, so that the x-axis reflective grating rotates around the z-axis;

[0023] The third adjusting screw on the x-axis angular displacement stage is used to drive the x-axis angular displacement stage to rotate around the steel ball along the x-axis, so that the x-axis reflective grating rotates around the x-axis;

[0024] The first adjustment screw, the second adjustment screw and the third adjustment screw on the x-direction angular displacement stage are used to adjust the x-direction angular displacement stage so that the light plane formed by the x-direction +1st order main maximum diffraction beam and the x-direction -1st order main maximum diffraction beam is perpendicular to the grating lines of the x-direction reflective grating.

[0025] Further preferably, the first adjusting screw on the y-axis angular displacement stage is used to drive the y-axis angular displacement stage to rotate around the steel ball along the x-axis, so that the y-axis reflective grating rotates around the x-axis;

[0026] The second adjusting screw on the y-axis angular displacement stage is used to drive the y-axis angular displacement stage to rotate around the steel ball along the z-axis, so that the y-axis reflective grating rotates around the z-axis;

[0027] The third adjusting screw on the y-axis angular displacement stage is used to drive the y-axis angular displacement stage to rotate around the steel ball along the y-axis, so that the y-axis reflective grating rotates around the y-axis;

[0028] The first adjustment screw, the second adjustment screw and the third adjustment screw on the y-direction angular displacement stage are used to adjust the y-direction angular displacement stage so that the light plane formed by the y-direction +1st order main maximum diffraction beam and the y-direction -1st order main maximum diffraction beam is perpendicular to the grating lines of the y-direction reflective grating.

[0029] Further preferably, the first adjusting screw on the z-axis angular displacement stage is used to drive the z-axis angular displacement stage to rotate around the steel ball along the y-axis, so that the z-axis reflective grating rotates around the y-axis;

[0030] The second adjusting screw on the z-axis angular displacement stage is used to drive the z-axis angular displacement stage to rotate around the steel ball along the x-axis, so that the z-axis reflective grating rotates around the x-axis;

[0031] The third adjusting screw on the z-axis angular displacement stage is used to drive the z-axis angular displacement stage to rotate around the steel ball along the z-axis, so that the z-axis reflective grating rotates around the z-axis;

[0032] The first adjustment screw, the second adjustment screw and the third adjustment screw on the z-direction angular displacement stage are used to adjust the z-direction angular displacement stage so that the light plane formed by the z-direction +1st order main maximum diffraction beam and the z-direction -1st order main maximum diffraction beam is perpendicular to the grating lines of the z-direction reflective grating.

[0033] A 6-DOF error decoupling method for a three-dimensional micro-displacement slider comprises the following steps:

[0034] S1. Obtain the angle ε of the three-dimensional micro-displacement slider along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , the angle ε of the three-dimensional micro-displacement slider along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z The measurement is performed using the above-mentioned three-dimensional micro-displacement slider measurement system;

[0035] S2, according to the angle ε of the three-dimensional micro-displacement slider along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , respectively, to solve the displacement δ of the three-dimensional micro-displacement slider along the x-axis x , displacement along the y-axis δ y and the displacement δ along the z-axis z ;

[0036] S3, using a fast error decoupling method, using the displacement δ of the three-dimensional micro-displacement slider along the x-axis x , the displacement of the three-dimensional micro-displacement slider along the y-axis δ y and the displacement δ of the three-dimensional micro-displacement slider along the z-axis z , the six degrees of freedom errors of the three-dimensional micro-displacement slider along the x-axis, y-axis and z-axis, as well as around the x-axis, y-axis and z-axis are separated.

[0037] Preferably, in S1, an x-direction incident light beam, a y-direction incident light beam, and a z-direction incident light beam are incident on the three-dimensional micro-displacement slider along the x-axis, y-axis, and z-axis directions respectively;

[0038] The x-direction incident light beam is irradiated onto the x-direction reflective grating to generate an x-direction +1-order main maximum diffraction beam and an x-direction -1-order main maximum diffraction beam, and then the x-direction +1-order main maximum diffraction beam and the x-direction -1-order main maximum diffraction beam are respectively reflected onto the x-direction first photoelectric position sensor and the x-direction second photoelectric position sensor, and the coordinates of the light spot positions on the x-direction first photoelectric position sensor and the x-direction second photoelectric position sensor are used to calculate the angle ε of the three-dimensional micro-displacement slider along the x-axis. x ;

[0039] The incident light beam in the y direction is irradiated onto the reflective grating in the y direction to generate a +1-order main maximum diffraction beam in the y direction and a -1-order main maximum diffraction beam in the y direction, and then the +1-order main maximum diffraction beam in the y direction and the -1-order main maximum diffraction beam in the y direction are reflected onto the first photoelectric position sensor in the y direction and the second photoelectric position sensor in the y direction, respectively. The coordinates of the light spot positions on the first photoelectric position sensor in the y direction and the second photoelectric position sensor in the y direction are used to calculate the angle ε of the three-dimensional micro-displacement slider along the y axis. y ;

[0040] The incident light beam in the z direction is irradiated onto the z direction reflective grating to generate a z direction +1 order main maximum diffraction beam and a z direction -1 order main maximum diffraction beam, and then the z direction +1 order main maximum diffraction beam and the z direction -1 order main maximum diffraction beam are respectively reflected onto the first photoelectric position sensor in the z direction and the second photoelectric position sensor in the z direction, and the coordinates of the light spot positions on the first photoelectric position sensor in the z direction and the second photoelectric position sensor in the z direction are used to calculate the angle ε of the three-dimensional micro-displacement slider along the z axis. z .

[0041] Preferably, in S2, the horizontal coordinates and displacement δ of the light spot positions on the first x-direction photoelectric position sensor and the second x-direction photoelectric position sensor are established. x , angle quantity ε x and the angle ε z Functional relationship:

[0042] ;

[0043] ;

[0044] ;

[0045] In the formula, (y 1,1 , z 1,1 ) and (y 1,2 , z 1,2 ) are the light spot coordinates on the first photoelectric position sensor in the x direction and the second photoelectric position sensor in the x direction, respectively. 2,1 , z 2,1 ) and (x 2,2 , z 2,2 ) are the light spot coordinates on the first photoelectric position sensor in the y direction and the second photoelectric position sensor in the y direction, (y 3,1 , x 3,1 ) and (y 3,2 , x 3,2 ) are respectively the light spot coordinates on the first photoelectric position sensor in the z direction and the second photoelectric position sensor in the z direction;

[0046] Then, according to the angle ε of the three-dimensional micro-displacement slider along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider along the x-axis x ;

[0047] ;

[0048] Wherein, R is the initial distance between the first x-direction photoelectric position sensor and the second x-direction photoelectric position sensor and the x-direction incident light beam; the angle between the x-direction +1st order main maximum diffraction beam and the x-direction -1st order main maximum diffraction beam and the x-direction incident light beam is the diffraction angle θ; δ x1 The x-axis y of the light spot on the first photoelectric position sensor is 1,1 δ x2 The x-axis y of the light spot on the second photoelectric position sensor is 1,2 The displacement of the three-dimensional micro-displacement slider along the x-axis is obtained as follows: x is δ x1 and δ x2 The mean of .

[0049] Preferably, in S2, the displacement δ of the three-dimensional micro-displacement slider along the y-axis is y and the displacement δ along the z-axis z The solution and its displacement along the x-axis δ x The solution method is the same.

[0050] Compared with the prior art, the present invention has the following beneficial effects:

[0051] In the present invention, by providing three groups of orthogonally arranged reflective gratings and three groups of photoelectric position sensors, measurement data coupled by six-degree-of-freedom errors can be effectively obtained. Through a fast error decoupling method, the measurement data can be used to highly accurately separate the six-degree-of-freedom errors of a three-dimensional micro-displacement slider along the x, y, and z axes, as well as around the x, y, and z axes. The measurement system has a wide range of uses and is particularly suitable for high-precision three-dimensional micro-displacement sliders in precision slides and precision guide rails. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0053] Figure 1 Schematic diagram of the structure of the measurement system of the three-dimensional micro-displacement slider of the present invention;

[0054] Figure 2 For the present invention Figure 1 A top view of the x-axis measurement module;

[0055] Figure 3 For the present invention Figure 2 Schematic diagram of the spot position of the grating moving linearly along the x-axis;

[0056] Figure 4 For the present invention Figure 2 Schematic diagram of the spot position of the grating moving linearly along the y-axis;

[0057] Figure 5 For the present invention Figure 2 Schematic diagram of the spot position of the grating moving linearly along the z-axis;

[0058] Figure 6 For the present invention Figure 2 Schematic diagram of the spot position of the grating rotating along the x-axis;

[0059] Figure 7 For the present invention Figure 2 Schematic diagram of the spot position of the grating rotating along the y-axis;

[0060] Figure 8 For the present invention Figure 2 Schematic diagram of the spot position of the grating rotating along the z-axis;

[0061] Figure 9 For the present invention Figure 1 Schematic diagram of the angle separation of the x-direction measurement module, y-direction measurement module and z-direction measurement module;

[0062] Figure 10 For the present invention Figure 1 Schematic diagram of the separation of the x-direction measurement module displacement;

[0063] Figure 11 For the present invention Figure 1 Plan view of the three-dimensional micro-displacement slider and angular displacement stage;

[0064] Figure 12 It is a structural schematic diagram of the angle adjustment device of the present invention;

[0065] In the figure: 1. three-dimensional micro-displacement slider, 2. x-axis angular displacement stage, 3. x-axis reflective grating, 4. y-axis angular displacement stage, 5. y-axis reflective grating, 6. z-axis angular displacement stage, 7. z-axis reflective grating, 8. first adjustment screw, 9. second adjustment screw, 10. third adjustment screw, 11. x-axis incident beam, 12. x-axis +1st order main maximum diffraction beam, 13. x-axis -1st order main maximum diffraction beam, 14. y-axis incident beam, 15. y-axis +1st order main maximum diffraction beam, 16. y-axis -1st order main maximum diffraction beam, 17. z-axis incident beam, 18. z-axis +1st order main maximum diffraction beam, 19. z-axis -1st order main maximum diffraction beam, 20. x-axis sensor connecting plate, 21. x-axis first photoelectric position sensor, 22. x 1. The second photoelectric position sensor in the y-direction direction, 23. The sensor connecting plate in the y-direction direction, 24. The first photoelectric position sensor in the y-direction direction, 25. The second photoelectric position sensor in the y-direction direction, 26. The sensor connecting plate in the z-direction direction, 27. The first photoelectric position sensor in the z-direction direction, 28. The second photoelectric position sensor in the z-direction direction, 29. The original position of the light spot, 30. The lateral movement position of the light spot, 31. The rotational movement position of the light spot, 32. The longitudinal movement position of the light spot, 33. The lateral movement position of the light spot, 34. The angle guide line of the x-direction measurement module, 35. The angle guide line of the y-direction measurement module, 36. The angle guide line of the z-direction measurement module, 37. The steel ball, 38. The steel ball pit, 39. The second adjusting screw pit, 40. The first adjusting screw pit, 41. The third adjusting screw top plate, 42. The tension spring. DETAILED DESCRIPTION

[0066] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0067] like Figures 1-12 As shown, the present invention provides a three-dimensional micro-displacement slider measurement system, including a three-dimensional micro-displacement slider 1;

[0068] Among them, the outer surface of the three-dimensional micro-displacement slider 1 is located in the x-axis direction and an X-direction measurement module is installed. The X-direction measurement module includes an x-direction angle displacement stage 2 and an x-direction sensor connecting plate 20. Figure 1 As shown, a through hole is provided at the geometric center of the x-direction sensor connecting plate 20, through which the x-direction incident light beam 11 can pass. An x-direction reflective grating 3 is mounted on the outer surface of the x-direction angular displacement stage 2 on the side away from the three-dimensional micro-displacement slider 1. The x-direction reflective grating 3 is used to receive the x-direction incident light beam 11 and measure the initial distance of the x-direction incident light beam 11.

[0069] And generate the x-direction +1 order main maximum diffraction beam 12 and the x-direction -1 order main maximum diffraction beam 13, the x-direction sensor connecting plate 20 is arranged in parallel with the x-direction angular displacement stage 2, and the x-direction sensor connecting plate 20 is located on the side of the x-direction angular displacement stage 2 away from the three-dimensional micro-displacement slider 1, on the side of the x-direction sensor connecting plate 20 facing the x-direction reflective grating 3, the x-direction first photoelectric position sensor 21 and the x-direction second photoelectric position sensor 22 are symmetrically installed about the through hole on the x-direction sensor connecting plate 20, the x-direction first photoelectric position sensor 21 is used to receive the x-direction +1 order main maximum diffraction beam 1 2. The second x-direction photoelectric position sensor 22 is used to receive the x-direction -1 order main maximum diffraction beam 13; during use, the angle of the x-direction sensor connecting plate 20 is adjusted along the x-axis, and the displacement of the x-direction sensor connecting plate 20 is adjusted along the x-axis, so that the x-direction +1 order main maximum diffraction beam 12 and the x-direction -1 order main maximum diffraction beam 13 are respectively incident on the center positions of the x-direction first photoelectric position sensor 21 and the x-direction second photoelectric position sensor 22; it is used to measure the angles between the x-direction +1 order main maximum diffraction beam 18 and the x-direction -1 order main maximum diffraction beam 19 and the x-direction incident beam 17.

[0070] Among them, the outer surface of the three-dimensional micro-displacement slider 1 is located in the y-axis direction and a Y-direction measurement module is installed. The Y-direction measurement module includes a y-direction angle displacement stage 4 and a y-direction sensor connecting plate 23. Figure 1 As shown, a through hole is provided at the geometric center of the y-direction sensor connecting plate 23, through which the y-direction incident light beam 14 can pass. A y-direction reflective grating 5 is mounted on the outer surface of the y-direction angular displacement stage 4 on the side away from the three-dimensional micro-displacement slider 1. The y-direction reflective grating 5 is used to receive the y-direction incident light beam 14 and measure the initial distance of the y-direction incident light beam 14.

[0071] And generate the y-direction +1 order main maximum diffraction beam 15 and the y-direction -1 order main maximum diffraction beam 16, the y-direction sensor connecting plate 23 is arranged parallel to the y-direction angular displacement stage 4, and the y-direction sensor connecting plate 23 is located on the side of the y-direction angular displacement stage 4 away from the three-dimensional micro-displacement slider 1, on the side of the y-direction sensor connecting plate 23 facing the y-direction reflective grating 5, the y-direction first photoelectric position sensor 24 and the y-direction second photoelectric position sensor 25 are symmetrically installed about the through hole on the y-direction sensor connecting plate 23, and the y-direction first photoelectric position sensor 24 and the y-direction second photoelectric position sensor 25 are installed on the outer surface of the y-direction sensor connecting plate 23 close to the y-direction reflective grating 5. The first photoelectric position sensor 24 in the y-direction is used to receive the +1-order main maximum diffraction beam 15 in the y-direction, and the second photoelectric position sensor 25 in the y-direction is used to receive the -1-order main maximum diffraction beam 16 in the y-direction; during use, the angle of the y-direction sensor connecting plate 23 is adjusted along the y-axis, and the displacement of the y-direction sensor connecting plate 23 is adjusted along the y-axis, so that the +1-order main maximum diffraction beam 15 in the y-direction and the -1-order main maximum diffraction beam 16 in the y-direction are respectively incident on the center positions of the first photoelectric position sensor 24 in the y-direction and the second photoelectric position sensor 25 in the y-direction; and are used to measure the angles between the +-order main maximum diffraction beam in the y-direction and the --order main maximum diffraction beam in the y-direction and the incident beam 14 in the y-direction.

[0072] The outer surface of the three-dimensional micro-displacement slider 1 is located in the z-axis direction and a Z-direction measurement module is installed. The Z-direction measurement module includes a z-direction angle displacement stage 6 and a z-direction sensor connecting plate 26. Figure 1 As shown, a through hole is provided at the geometric center of the z-direction sensor connecting plate 26, through which the z-direction incident light beam 17 can pass. A z-direction reflective grating 7 is mounted on the outer surface of the z-direction angular displacement stage 6 on the side away from the three-dimensional micro-displacement slider 1. The z-direction reflective grating 7 is used to receive the z-direction incident light beam 17 and measure the initial distance of the z-direction incident light beam 17.

[0073] And generate the z-direction +1 order main maximum diffraction beam 18 and the z-direction -1 order main maximum diffraction beam 19, the z-direction sensor connecting plate 26 is arranged parallel to the z-direction angular displacement stage 6, and the z-direction sensor connecting plate 26 is located on the side of the z-direction angular displacement stage 6 away from the three-dimensional micro-displacement slider 1, on the side of the z-direction sensor connecting plate 26 facing the z-direction reflective grating 7, the z-direction first photoelectric position sensor 27 and the z-direction second photoelectric position sensor 28 are symmetrically installed about the through hole on the z-direction sensor connecting plate 26, the z-direction first photoelectric position sensor 27 and the z-direction second photoelectric position sensor 28 are installed on the outer surface of the z-direction sensor connecting plate 26 close to the z-direction reflective grating 7. The first photoelectric position sensor 27 is used to receive the +1st order main maximum diffraction beam 18 in the z direction, and the second photoelectric position sensor 28 in the z direction is used to receive the -1st order main maximum diffraction beam 19 in the z direction; during use, the angle of the z-direction sensor connecting plate 26 is adjusted along the z-axis, and the displacement of the z-direction sensor connecting plate 26 is adjusted along the z-axis, so that the +1st order main maximum diffraction beam 18 in the z direction and the -1st order main maximum diffraction beam 19 in the z direction are respectively incident on the center positions of the first photoelectric position sensor 27 and the second photoelectric position sensor 28 in the z direction; and are used to measure the angles between the +1st order main maximum diffraction beam 18 in the z direction and the -1st order main maximum diffraction beam 19 in the z direction and the incident beam 17 in the z direction.

[0074] Furthermore, the x-axis angular displacement stage 2, the y-axis angular displacement stage 4 and the z-axis angular displacement stage 6 are respectively installed on the three-dimensional micro-displacement slider 1 through angle adjustment devices, wherein the angle adjustment device includes a first adjusting screw 8, a second adjusting screw 9, a third adjusting screw 10 and a steel ball 37 respectively arranged on the three angle displacement stages, and a first adjusting screw pit 40, a second adjusting screw pit 39, a third adjusting screw top plate 41 and a steel ball pit 38 arranged on the three-dimensional micro-displacement slider 1, the screw end of the first adjusting screw 8 is installed in the first adjusting screw pit 40, the screw end of the second adjusting screw 9 is installed in the second adjusting screw pit 39, the third adjusting screw 10 is installed on the third adjusting screw top plate 41, the steel ball 37 is embedded in the steel ball pit 38, and the first adjusting screw 8, the second adjusting screw 9 and the third adjusting screw 10 are respectively installed with tension springs 42, which are used to drive the three-dimensional micro-displacement slider 1 to reset after the first adjusting screw 8, the second adjusting screw 9 and the third adjusting screw 10 lose their rotational force.

[0075] In this embodiment, reference Figure 1 、 Figure 11 and Figure 12As shown, the first adjusting screw 8 of the x-axis angular displacement stage 2 is adjusted to rotate the x-axis angular displacement stage 2 around the steel ball 37, thereby realizing the rotation of the x-axis reflective grating 3 around the y-axis; the second adjusting screw 9 of the x-axis angular displacement stage 2 is adjusted to rotate the x-axis angular displacement stage 2 around the steel ball 37, thereby realizing the rotation of the x-axis reflective grating 3 around the z-axis; the third adjusting screw 10 of the x-axis angular displacement stage 2 is adjusted to rotate the x-axis angular displacement stage 2 around the steel ball 37, thereby realizing the rotation of the x-axis reflective grating 3 around the x-axis; thereby, the x-axis angular displacement stage 2 is adjusted until the light plane formed by the x-direction +1 order main maximum diffraction beam 12 and the x-direction -1 order main maximum diffraction beam 13 is perpendicular to the grating lines of the x-direction reflective grating 3.

[0076] In this embodiment, the first adjustment screw 8 of the y-axis angular displacement stage 4 is adjusted to rotate the y-axis angular displacement stage 4 around the steel ball 37, thereby realizing the rotation of the y-axis reflective grating 5 around the x-axis; the second adjustment screw 9 of the y-axis angular displacement stage 4 is adjusted to rotate the y-axis angular displacement stage 4 around the steel ball 37, thereby realizing the rotation of the y-axis reflective grating 5 around the z-axis; the third adjustment screw 10 of the y-axis angular displacement stage 4 is adjusted to rotate the y-axis angular displacement stage 4 around the steel ball 37, thereby realizing the rotation of the y-axis reflective grating 5 around the y-axis; thereby, the y-axis angular displacement stage 4 is adjusted until the light plane formed by the y-axis +1 main maximum diffraction beam 15 and the y-axis -1 main maximum diffraction beam 16 is perpendicular to the grating lines of the y-axis reflective grating 5.

[0077] In this embodiment, the first adjusting screw 8 of the z-axis angular displacement stage 6 is adjusted to rotate the z-axis angular displacement stage 6 around the steel ball 37, thereby realizing the rotation of the z-axis reflective grating 7 around the y-axis; the second adjusting screw 9 of the z-axis angular displacement stage 6 is adjusted to rotate the z-axis angular displacement stage 6 around the steel ball 37, thereby realizing the rotation of the z-axis reflective grating 7 around the x-axis; the third adjusting screw 10 of the z-axis angular displacement stage 6 is adjusted to rotate the z-axis angular displacement stage 6 around the steel ball 37, thereby realizing the rotation of the z-axis reflective grating 7 around the z-axis; thereby, the z-axis angular displacement stage 6 is adjusted until the light plane formed by the z-axis +1 main maximum diffraction beam 18 and the z-axis -1 main maximum diffraction beam 19 is perpendicular to the grating lines of the z-axis reflective grating 7.

[0078] In this embodiment, reference Figure 2As shown, the initial distance between the first x-direction photoelectric position sensor 21 and the second x-direction photoelectric position sensor 22 and the x-direction incident light beam 11 is set to R, and the angle between the x-direction +1-order main maximum diffraction beam 12 and the x-direction -1-order main maximum diffraction beam 13 and the x-direction incident light beam 11 is the diffraction angle θ; the initial distance between the first y-direction photoelectric position sensor 24 and the second y-direction photoelectric position sensor 25 and the y-direction incident light beam 14 is set to R, and the angle between the y-direction +1-order main maximum diffraction beam 15 and the y-direction -1-order main maximum diffraction beam 16 and the y-direction incident light beam 14 is the diffraction angle θ; the initial distance between the first z-direction photoelectric position sensor 27 and the second z-direction photoelectric position sensor 28 and the z-direction incident light beam 17 is set to R, and the angle between the z-direction +1-order main maximum diffraction beam 18 and the z-direction -1-order main maximum diffraction beam 19 and the z-direction incident light beam 17 is the diffraction angle θ.

[0079] In this embodiment, reference Figure 3-Figure 8 As shown, when the three-dimensional micro-displacement slider 1 produces a displacement δ along the x-axis x When the laser spot irradiated on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 changes from the original position 29 to the lateral opposite position 30; when the three-dimensional micro-displacement slider 1 generates a displacement δ along the y-axis y When the laser spot position irradiated on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 does not change; when the three-dimensional micro-displacement slider 1 generates a displacement δ along the z-axis z When the three-dimensional micro-displacement slider 1 generates an angle ε along the x-axis, the position of the laser spot irradiated on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 does not change; x When the laser spot irradiated on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 changes from the original position 29 to the rotational position 31; when the three-dimensional micro-displacement slider 1 generates an angle ε along the y-axis y When the laser spot irradiated on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 changes from the original position 29 to the longitudinal movement position 32; when the three-dimensional micro-displacement slider 1 generates an angle ε along the z-axis z When , the laser spot irradiated on the first x-direction photoelectric position sensor 21 and the second x-direction photoelectric position sensor 22 will change from the original position 29 of the spot to the lateral movement position 33 of the spot.

[0080] refer to Figure 9 As shown, the angle ε of the three-dimensional micro-displacement slider 1 along the x-axis is calculated using the coordinates of the light spot positions on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22. xThe angle ε of the three-dimensional micro-displacement slider 1 along the y-axis is calculated using the coordinates of the light spot positions on the first y-axis photoelectric position sensor 24 and the second y-axis photoelectric position sensor 25. y The angle ε of the three-dimensional micro-displacement slider 1 along the z-axis is calculated using the coordinates of the light spot positions on the first z-axis photoelectric position sensor 27 and the second z-axis photoelectric position sensor 28. z If the coordinates of the light spots on the first photoelectric position sensor 21 and the second photoelectric position sensor 22 are (y 1,1 , z 1,1 ) and (y 1,2 , z 1,2 ), the light spot coordinates on the first photoelectric position sensor 24 and the second photoelectric position sensor 25 in the y direction are respectively (x 2,1 , z 2,1 ) and (x 2,2 , z 2,2 ), the light spot coordinates on the first photoelectric position sensor 27 and the second photoelectric position sensor 28 in the z direction are respectively (y 3,1 , x 3,1 ) and (y 3,2 , x 3,2 ), then the angle ε of the three-dimensional micro-displacement slider 1 along the x-axis is x , the angle along the y-axis ε y and the angle ε z They are:

[0081] ;

[0082] ;

[0083] ;

[0084] refer to Figure 10 As shown, the horizontal coordinates of the light spot positions on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 are sequentially affected by the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis. x , the angle along the x-axis ε x and the angle ε along the z-axis z Establishing the x-axis first photoelectric position sensor 21 and the x-axis second photoelectric position sensor 22 on the horizontal coordinate of the light spot position and the displacement of the three-dimensional micro-displacement slider 1 along the x-axis δ x , the angle ε of the three-dimensional micro-displacement slider 1 along the x-axis x and the angle ε of the three-dimensional micro-displacement slider 1 along the z axis z Then, according to the obtained angle ε of the three-dimensional micro-displacement slider 1 along the x-axis, x , the angle ε of the three-dimensional micro-displacement slider 1 along the y-axis yand the angle ε of the three-dimensional micro-displacement slider 1 along the z axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis x :

[0085] ;

[0086] ;

[0087] ;

[0088] Where R is the initial distance between the first x-direction photoelectric position sensor 21 and the second x-direction photoelectric position sensor 22 and the x-direction incident light beam 11; the angle between the x-direction +1st order main maximum diffraction beam 12 and the x-direction -1st order main maximum diffraction beam 13 and the x-direction incident light beam 11 is the diffraction angle θ; δ x1 According to the x-axis y of the light spot on the first photoelectric position sensor 21 1,1 δ x2 According to the x-axis y of the light spot on the second photoelectric position sensor 22 1,2 The displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis is obtained: x is δ x1 and δ x2 The mean of .

[0089] The horizontal coordinates of the light spot positions on the first y-axis photoelectric position sensor 24 and the second y-axis photoelectric position sensor 25 are sequentially affected by the displacement δ of the three-dimensional micro-displacement slider 1 along the y-axis. y , the angle along the y-axis ε y and the angle ε along the z-axis z Establishing the z-axis first photoelectric position sensor 24 and the z-axis second photoelectric position sensor 25 on the horizontal coordinate of the spot position and the three-dimensional micro-displacement slider 1 along the x-axis displacement δ x , the angle along the y-axis ε y and the angle ε along the z-axis z Then, according to the obtained angle ε of the three-dimensional micro-displacement slider 1 along the x-axis, x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the y-axis y :

[0090] ;

[0091] ;

[0092] ;

[0093] Where R is the initial distance between the first y-direction photoelectric position sensor 24 and the second y-direction photoelectric position sensor 25 and the x-direction incident light beam; the angle between the y-direction +1st order main maximum diffraction beam 15 and the y-direction -1st order main maximum diffraction beam 16 and the y-direction incident light beam 14 is the diffraction angle θ; δ y1 According to the y-axis x of the light spot on the first photoelectric position sensor 21 2,1 δ y2 According to the y-axis x of the light spot on the second photoelectric position sensor 22 2,2 The displacement δ of the three-dimensional micro-displacement slider 1 along the y-axis is obtained: y is δ y1 and δ y2 The mean of .

[0094] The horizontal coordinates of the light spot positions on the first photoelectric position sensor 27 and the second photoelectric position sensor 28 are respectively affected by the displacement δ of the three-dimensional micro-displacement slider 1 along the z axis. z , the angle along the x-axis ε x and the angle ε along the z-axis z Influence, establish the horizontal coordinate of the light spot position on the first photoelectric position sensor 27 and the second photoelectric position sensor 28 in the z direction and the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis x , the angle along the x-axis ε x and the angle ε along the z-axis z Then, according to the obtained angle ε of the three-dimensional micro-displacement slider 1 along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the z axis z :

[0095] ;

[0096] Wherein, R is the initial distance between the first photoelectric position sensor 21 and the second photoelectric position sensor 22 in the z direction and the incident light beam 17 in the z direction; the angle between the +1st order main maximum diffraction beam 18 and the -1st order main maximum diffraction beam 19 in the z direction and the incident light beam 17 in the z direction is the diffraction angle θ; δ z1 According to the abscissa y of the light spot on the first photoelectric position sensor 21 in the z direction 3,1 δ z2 According to the horizontal coordinate y of the light spot on the second photoelectric position sensor 22 in the z direction 3,2 The displacement δ of the three-dimensional micro-displacement slider 1 along the z axis is obtained z is δ z1 and δ z2 The mean of .

[0097] In the present invention, by setting three groups of orthogonally arranged reflective gratings and three groups of photoelectric position sensors, the measurement data coupled by the 6-DOF error can be effectively obtained, which are the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis x , displacement along the y-axis δ y and the displacement δ along the z-axis z Then, the measurement data can be used to highly accurately separate the six-degree-of-freedom errors of the three-dimensional micro-displacement slider 1 along the x, y and z axes, as well as around the x, y and z axes through a fast error decoupling method; at the same time, the measurement system has a wide range of uses, especially suitable for high-precision three-dimensional micro-displacement sliders 1 in precision slides and precision guide rails.

[0098] The present invention also provides a 6-DOF error decoupling method for a three-dimensional micro-displacement slider, the method comprising the following steps:

[0099] Step S1: Use one of the above-mentioned three-dimensional micro-displacement slider measurement systems to measure the angle ε of the three-dimensional micro-displacement slider 1 along the x-axis. x , the angle along the y-axis ε y and the angle ε along the z-axis z ,in:

[0100] First, an x-direction incident light beam 11, a y-direction incident light beam 14, and a z-direction incident light beam 17 are incident on the three-dimensional micro-displacement slider 1 along the x-axis, y-axis, and z-axis respectively; the x-direction incident light beam 11 is irradiated on the x-direction reflective grating 3 to generate an x-direction +1-order main maximum diffraction light beam 12 and an x-direction -1-order main maximum diffraction light beam 13, and then the x-direction +1-order main maximum diffraction light beam 12 and the x-direction -1-order main maximum diffraction light beam 13 are reflected onto the x-direction first photoelectric position sensor 21 and the x-direction second photoelectric position sensor 22 respectively, and the coordinates of the light spot positions on the x-direction first photoelectric position sensor 21 and the x-direction second photoelectric position sensor 22 are used to calculate the angle ε of the three-dimensional micro-displacement slider 1 along the x-axis x ; The y-direction incident light beam 14 is irradiated onto the y-direction reflective grating 5, generating a y-direction +1-order main maximum diffraction light beam 15 and a y-direction -1-order main maximum diffraction light beam 16, and then the y-direction +1-order main maximum diffraction light beam 15 and the y-direction -1-order main maximum diffraction light beam 16 are reflected onto the y-direction first photoelectric position sensor 24 and the y-direction second photoelectric position sensor 25, respectively, and the coordinates of the light spot positions on the y-direction first photoelectric position sensor 24 and the y-direction second photoelectric position sensor 25 are used to calculate the angle ε of the three-dimensional micro-displacement slider 1 along the y-axis y; The incident light beam 17 in the z direction is irradiated onto the z direction reflective grating 7, generating a z direction +1 order main maximum diffraction beam 18 and a z direction - order main maximum diffraction beam, and then the z direction +1 order main maximum diffraction beam 18 and the z direction -1 order main maximum diffraction beam 19 are reflected onto the first photoelectric position sensor 27 in the z direction and the second photoelectric position sensor 28 in the z direction, respectively, and the coordinates of the light spot positions on the first photoelectric position sensor 27 in the z direction and the second photoelectric position sensor 28 in the z direction are used to calculate the angle ε of the three-dimensional micro-displacement slider 1 along the z axis z .

[0101] Step S2: Establish the horizontal coordinates of the light spot positions on the first x-axis photoelectric position sensor 21 and the second x-axis photoelectric position sensor 22 and the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis. x , the angle along the x-axis ε x and the angle ε along the z-axis z According to the functional relationship of the three-dimensional micro-displacement slider 1 along the x-axis ε x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis x ;

[0102] Establish the horizontal coordinate of the light spot position on the first photoelectric position sensor 24 and the second photoelectric position sensor 25 in the y direction and the displacement δ of the three-dimensional micro-displacement slider 1 along the y axis y , the angle along the y-axis ε y and the angle ε along the z-axis z According to the functional relationship of the three-dimensional micro-displacement slider 1 along the x-axis ε x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the y-axis y ;

[0103] Establish the horizontal coordinates of the light spot positions on the first photoelectric position sensor 27 and the second photoelectric position sensor 28 in the z direction and the displacement δ of the three-dimensional micro-displacement slider 1 along the z axis z , the angle along the x-axis ε x and the angle ε along the z-axis z According to the functional relationship of the three-dimensional micro-displacement slider 1 along the x-axis ε x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider 1 along the z axis z .

[0104] Step S3: Using the fast error decoupling method, the displacement δ of the three-dimensional micro-displacement slider 1 along the x-axis is used. x , displacement along the y-axis δ y and the displacement δ along the z-axis z , separate the degree of freedom errors of the three-dimensional micro-displacement slider 1 along the x-axis, y-axis and z-axis, as well as around the x-axis, y-axis and z-axis.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A three-dimensional micro-displacement slider measurement system, comprising a three-dimensional micro-displacement slider (1), characterized in that: The outer surface of the three-dimensional micro-displacement slider (1) is provided with an X-direction measurement module in the x-axis direction, and the X-direction measurement module is used to measure the initial distance of the x-direction incident light beam (11), and the angles between the x-direction +1-order main maximum diffraction light beam (12) and the x-direction -1-order main maximum diffraction light beam (13) and the x-direction incident light beam (11); wherein the X-direction measurement module includes an x-direction angular displacement stage (2), and an x-direction reflective grating (3) is installed on the side of the outer surface of the x-direction angular displacement stage (2) away from the three-dimensional micro-displacement slider (1), and the x-direction reflective grating (3) is used to receive the x-direction incident light beam (11) and generate the x-direction +1-order main maximum diffraction light beam (12) and the x-1-order main maximum diffraction light beam (13); The outer surface of the three-dimensional micro-displacement slider (1) is provided with a Y-direction measurement module in the y-axis direction, and the Y-direction measurement module is used to measure the initial distance of the y-direction incident light beam (14), and the angles between the y-direction +1-order main maximum diffraction light beam (15) and the y-direction -1-order main maximum diffraction light beam (16) and the y-direction incident light beam (14); wherein the Y-direction measurement module includes a y-direction angular displacement stage (4), and a y-direction reflective grating (5) is installed on the side of the outer surface of the y-direction angular displacement stage (4) away from the three-dimensional micro-displacement slider (1), and the y-direction reflective grating (5) is used to receive the y-direction incident light beam (14) and generate the y-direction +1-order main maximum diffraction light beam (15) and the y-direction -1-order main maximum diffraction light beam (16); The outer surface of the three-dimensional micro-displacement slider (1) is provided with a Z-direction measurement module in the z-axis direction, and the Z-direction measurement module is used to measure the initial distance of the z-direction incident light beam (17), and the angles between the z-direction +1 order main maximum diffraction light beam (18) and the z-direction -1 order main maximum diffraction light beam (19) and the z-direction incident light beam (17); wherein the Z-direction measurement module includes a z-direction angular displacement stage (6), and a z-direction reflective grating (7) is installed on the side of the outer surface of the z-direction angular displacement stage (6) away from the three-dimensional micro-displacement slider (1), and the z-direction reflective grating (7) is used to receive the z-direction incident light beam (17) and generate the z-direction +1 order main maximum diffraction light beam (18) and the z-1 order main maximum diffraction light beam (19); The x-direction angular displacement stage (2), the y-direction angular displacement stage (4), and the z-direction angular displacement stage (6) are respectively mounted on the three-dimensional micro-displacement slider (1) via angle adjustment devices; The angle adjustment device on the x-axis angular displacement stage (2) is used to adjust the x-axis reflective grating (3) to rotate along the y-axis, the z-axis and the x-axis respectively; The angle adjustment device on the y-axis angular displacement stage (4) is used to adjust the y-axis reflective grating (5) to rotate along the x-axis, the z-axis and the y-axis respectively; The angle adjustment device on the z-direction angular displacement stage (6) is used to adjust the z-direction reflective grating (7) to rotate along the y-axis, the x-axis and the z-axis respectively.

2. A three-dimensional micro-displacement slider measurement system according to claim 1, characterized in that , the X-direction measurement module includes: An x-direction sensor connecting plate (20) is provided in parallel with the x-direction angular displacement stage (2), and the x-direction sensor connecting plate (20) is located on a side of the x-direction angular displacement stage (2) away from the three-dimensional micro-displacement slider (1). An x-direction first photoelectric position sensor (21) and an x-direction second photoelectric position sensor (22) are installed on an outer surface of the x-direction sensor connecting plate (20) close to the x-direction reflective grating (3). The x-direction first photoelectric position sensor (21) is used to receive an x-direction +1st order main maximum diffraction beam (12), and the x-direction second photoelectric position sensor (22) is used to receive an x-direction -1st order main maximum diffraction beam (13).

3. A three-dimensional micro-displacement slider measurement system according to claim 2, characterized in that , the Y-direction measurement module includes: A y-direction sensor connecting plate (23) is provided in parallel with the y-direction angular displacement stage (4), and the y-direction sensor connecting plate (23) is located on a side of the y-direction angular displacement stage (4) away from the three-dimensional micro-displacement slider (1). A y-direction first photoelectric position sensor (24) and a y-direction second photoelectric position sensor (25) are installed on an outer surface of the y-direction sensor connecting plate (23) close to the y-direction reflective grating (5). The y-direction first photoelectric position sensor (24) is used to receive a y-direction +1st order main maximum diffraction beam (15), and the y-direction second photoelectric position sensor (25) is used to receive a y-direction -1st order main maximum diffraction beam (16).

4. A three-dimensional micro-displacement slider measurement system according to claim 3, characterized in that , the Z-direction measurement module includes: A z-direction sensor connecting plate (26) is provided in parallel with the z-direction angular displacement stage (6), and the z-direction sensor connecting plate (26) is located on a side of the z-direction angular displacement stage (6) away from the three-dimensional micro-displacement slider (1). A z-direction first photoelectric position sensor (27) and a z-direction second photoelectric position sensor (28) are installed on an outer surface of the z-direction sensor connecting plate (26) close to the z-direction reflective grating (7). The z-direction first photoelectric position sensor (27) is used to receive a z-direction +1st order main maximum diffraction beam (18), and the z-direction second photoelectric position sensor (28) is used to receive a z-direction -1st order main maximum diffraction beam (19).

5. The three-dimensional micro-displacement slider measurement system according to claim 1, characterized in that: The angle adjustment device comprises a first adjustment screw (8), a second adjustment screw (9), a third adjustment screw (10) and a steel ball (37) arranged on the angle displacement platform, and a first adjustment screw socket (40), a second adjustment screw socket (39), a third adjustment screw top plate (41) and a steel ball socket (38) arranged on the three-dimensional micro-displacement slider (1), wherein the screw end of the first adjustment screw (8) is mounted in the first adjustment screw socket (40), the screw end of the second adjustment screw (9) is mounted in the second adjustment screw socket (39), the third adjustment screw (10) is mounted on the third adjustment screw top plate (41), the steel ball (37) is embedded in the steel ball socket (38), and the first adjustment screw (8), the second adjustment screw (9) and the third adjustment screw (10) are respectively mounted with tension springs (42) for driving the three-dimensional micro-displacement slider (1) to reset after the first adjustment screw (8), the second adjustment screw (9) and the third adjustment screw (10) lose their rotational force.

6. A 6-DOF error decoupling method for a three-dimensional micro-displacement slider, characterized in that: The method comprises the following steps: S1. Obtain the angle ε of the three-dimensional micro-displacement slider (1) along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , the angle ε of the three-dimensional micro displacement slider (1) along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z The measurement is performed using a three-dimensional micro-displacement slider measurement system according to any one of claims 1 to 5; S2, according to the angle ε of the three-dimensional micro-displacement slider (1) along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , respectively solve the displacement δ of the three-dimensional micro-displacement slider (1) along the x-axis x , displacement along the y-axis δ y and the displacement δ along the z-axis z ; S3, using a fast error decoupling method, using the displacement δ of the three-dimensional micro-displacement slider (1) along the x-axis x , the displacement δ of the three-dimensional micro-displacement slider (1) along the y-axis y and the displacement δ of the three-dimensional micro-displacement slider (1) along the z-axis z , the six degrees of freedom errors of the three-dimensional micro-displacement slider (1) along the x-axis, y-axis and z-axis, as well as around the x-axis, y-axis and z-axis are separated.

7. The 6-DOF error decoupling method for a three-dimensional micro-displacement slider according to claim 6, characterized in that: In the S1, an x-direction incident light beam (11), a y-direction incident light beam (14), and a z-direction incident light beam (17) are incident on the three-dimensional micro-displacement slider (1) along the x-axis, y-axis, and z-axis directions, respectively; The x-direction incident light beam (11) is irradiated onto the x-direction reflective grating (3), generating an x-direction +1-order main maximum diffraction light beam (12) and an x-direction -1-order main maximum diffraction light beam (13), and then the x-direction +1-order main maximum diffraction light beam (12) and the x-direction -1-order main maximum diffraction light beam (13) are respectively reflected onto the x-direction first photoelectric position sensor (21) and the x-direction second photoelectric position sensor (22), and the coordinates of the light spot positions on the x-direction first photoelectric position sensor (21) and the x-direction second photoelectric position sensor (22) are used to calculate the angle ε of the three-dimensional micro-displacement slider (1) along the x-axis. x ; The y-direction incident light beam (14) is irradiated onto the y-direction reflective grating (5), generating a y-direction +1-order main maximum diffraction light beam (15) and a y-direction -1-order main maximum diffraction light beam (16), and then the y-direction +1-order main maximum diffraction light beam (15) and the y-direction -1-order main maximum diffraction light beam (16) are respectively reflected onto the y-direction first photoelectric position sensor (24) and the y-direction second photoelectric position sensor (25), and the coordinates of the light spot positions on the y-direction first photoelectric position sensor (24) and the y-direction second photoelectric position sensor (25) are used to calculate the angle ε of the three-dimensional micro-displacement slider (1) along the y-axis. y ; The incident light beam (17) in the z direction is irradiated onto the z direction reflective grating (7), generating a z direction +1 order main maximum diffraction light beam (18) and a z direction -1 order main maximum diffraction light beam (19), and then the z direction +1 order main maximum diffraction light beam (18) and the z direction -1 order main maximum diffraction light beam (19) are respectively reflected onto a first photoelectric position sensor (27) in the z direction and a second photoelectric position sensor (28) in the z direction, and the coordinates of the light spot positions on the first photoelectric position sensor (27) and the second photoelectric position sensor (28) in the z direction are used to calculate the angle ε of the three-dimensional micro-displacement slider (1) along the z axis. z .

8. The 6-DOF error decoupling method for a three-dimensional micro-displacement slider according to claim 7, characterized in that: In S2, the horizontal coordinates and displacement δ of the light spot positions on the first x-direction photoelectric position sensor (21) and the second x-direction photoelectric position sensor (22) are established. x , angle quantity ε x and the angle ε z Functional relationship: ； In the formula, (y 1,1 , z 1,1 ) and (y 1,2 , z 1,2 ) are the light spot coordinates on the first x-direction photoelectric position sensor (21) and the second x-direction photoelectric position sensor (22), respectively. (x 2,1 , z 2,1 ) and (x 2,2 , z 2,2 ) are the light spot coordinates on the first y-direction photoelectric position sensor (24) and the second y-direction photoelectric position sensor (25), respectively. (y 3,1 , x 3,1 ) and (y 3,2 ,x 3,2 ) are respectively the light spot coordinates on the first z-direction photoelectric position sensor (27) and the second z-direction photoelectric position sensor (28); Then, according to the angle ε of the three-dimensional micro-displacement slider (1) along the x-axis x , the angle along the y-axis ε y and the angle ε along the z-axis z , inversely calculate the displacement δ of the three-dimensional micro-displacement slider (1) along the x-axis x ; ； Wherein, R is the initial distance between the first x-direction photoelectric position sensor (21) and the second x-direction photoelectric position sensor (22) and the x-direction incident light beam (11); the angle between the x-direction +1st order main maximum diffraction light beam (12) and the x-direction -1st order main maximum diffraction light beam (13) and the x-direction incident light beam (11) is the diffraction angle θ; δ x1 is the horizontal coordinate y of the light spot on the first photoelectric position sensor (21) in the x direction 1,1 δ x2 is the horizontal coordinate y of the light spot on the second photoelectric position sensor (22) in the x direction 1,2 The displacement δ of the three-dimensional micro-displacement slider (1) along the x-axis is obtained: x is δ x1 and δ x2 The mean of The displacement δ of the three-dimensional micro-displacement slider (1) along the y-axis y and the displacement δ along the z-axis z The solution and its displacement along the x-axis δ x The solution method is the same.

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