Cylindrical negative pressure regulating device for insertion into gas cylinder

Abstract

The present invention relates to a pressure regulating device (6) for compressed gas, the pressure regulating device comprising a body (18) having a gas inlet (20), a gas outlet (38), and a gas passage (22) fluidly interconnecting the gas inlet and the gas outlet; a valve device (24; 124) having a seat (26; 126) located in the gas passage (22) and a stop (28; 128) configured to cooperate with the seat (26; 126); a regulator (30; 130) housed in a cavity (32; 132) of the body (18) and located downstream of the valve device (24; 124), the regulator defining a regulating chamber together with the cavity (32; 132), the geometry of which varies with the pressure in the regulating chamber, and the regulator driving the stop (28; 128) to regulate the gas flow through the valve device; wherein the body (18) is tubular along its entire length, and its nominal outer diameter is the maximum outer diameter of the body.

Description

Technical Field

[0001] This invention relates to the field of transporting gases (especially hazardous gases used in semiconductor manufacturing) stored in compressed form in gas cylinders. Background Technology

[0002] Published prior art patent document EP 1 328 756 B1 discloses a negative pressure regulating device designed to be placed inside a gas cylinder. For this purpose, the neck ring of the gas cylinder needs to be enlarged to allow the pressure regulating device to be inserted through the neck ring. For hazardous gases, such as those used in the semiconductor industry, placing the pressure regulating device inside the gas cylinder is of interest because it protects the pressure regulating device from external forces that could damage it.

[0003] Published prior art patent document GB 787 192 discloses a gas regulator with an integrated pressure-reducing valve. This gas regulator includes a valve assembly and a regulator disposed within a main body, forming a regulating chamber downstream of the valve assembly. The regulator includes a bellows attached to a fixed portion and a moving portion of the regulator, thereby forming a sealed inner chamber that functions as a spring. The regulating chamber is the space between the inner wall of a cavity in the main body and the outer surface of the regulator. The fixed portion of the regulator is mounted on a tube via a ball, the position of which can be adjusted by a handwheel. The ball in contact with the tube forms a pressure-reducing valve, because if the pressure at the outlet (i.e., in the regulating chamber) increases uncontrollably, the regulator will be further compressed and then further contracted, thereby removing the ball from the tube and allowing gas to escape. The interesting aspect of this regulator structure is that the regulator forming a sealed internal volume achieves pressure regulation independent of atmospheric pressure. However, this configuration is relatively bulky, and undesirable pressure changes may occur when the outlet flow rate changes.

[0004] In some applications, such as in the semiconductor industry, end-point gas consumption devices may be flow regulators operating under sub-atmospheric pressure conditions (i.e., pressures below atmospheric pressure). Such flow regulators can be controlled by semiconductor manufacturing machinery to change the flow rate from zero to a nominal value, or vice versa. When such flow rate changes occur, pressure regulators directly fluidly connected upstream of the flow controller exhibit undesirable outlet pressure variations that can interfere with the flow controller, i.e., put it into a fault mode. Summary of the Invention

[0005] Technical issues

[0006] The technical problem of the present invention is to overcome at least one of the disadvantages of the prior art described above. More specifically, the technical problem of the present invention is to provide a pressure regulating device suitable for applications where special attention needs to be paid to the safety and stability of the outlet pressure when the outlet flow rate changes.

[0007] Technical solution

[0008] This invention relates to a pressure regulating device for compressed gas, comprising: a body having a gas inlet, a gas outlet, and a gas passage fluidly interconnecting the gas inlet and the gas outlet; a valve device having a seat located in the gas passage and a stop configured to cooperate with the seat; a regulator housed in a cavity of the body and located downstream of the valve device, the regulator defining a regulating chamber together with the cavity, the geometry of the regulating chamber varying with the pressure in the regulating chamber, and the regulator actuating the stop to regulate the gas flow through the valve device; wherein the body is tubular along its entire length, and its nominal outer diameter is the maximum outer diameter of the body.

[0009] According to a preferred embodiment, the body includes a main portion having a nominal outer diameter and at least one end having a nominal outer diameter and attached to the main portion.

[0010] According to a preferred embodiment, the attachment of the at least one end to the main part of the body is accomplished by welding.

[0011] According to a preferred embodiment, one end of the main portion receives a valve device and includes an annular groove surrounding the seat.

[0012] According to a preferred embodiment, the body includes a tubular wall, the inner surface of which forms the cavity.

[0013] According to a preferred embodiment, the blocking element includes a lifting valve and a rod, the lifting valve being located upstream of the seat and configured to contact the seat, the rod extending from the lifting valve through the seat, and the rod being attached to a regulator.

[0014] According to a preferred embodiment, the rod includes a tapered portion adjacent to the lifting valve and exhibits a radial clearance of less than 0.02 mm with respect to the seat.

[0015] According to a preferred embodiment, the cavity includes a bottom adjacent to the seat, and the pressure regulating device includes a compression wave spring disposed on the bottom and acting on the regulator.

[0016] According to a preferred embodiment, the regulator includes a shoulder end face that engages with a compression wave spring.

[0017] According to a preferred embodiment, the regulator includes a movable part facing the valve device, the movable part being configured to move along the inner surface of the cavity and drive the closure element.

[0018] According to a preferred embodiment, the regulator includes an open ring mounted around a movable portion of the regulator and configured to contact the inner surface of the cavity.

[0019] According to a preferred embodiment, the regulator includes a fixed portion opposite to the valve device and engaged with a screw, the screw being configured to adjust the position of the fixed portion.

[0020] According to a preferred embodiment, the screw includes a tapered front end that contacts an annular recessed tapered surface of the fixing portion of the adjuster, thereby forming an engagement between the screw and the fixing portion.

[0021] According to a preferred embodiment, the engagement between the screw and the fixing portion of the adjuster is configured to center the fixing portion, thereby presenting radial clearance in the cavity.

[0022] According to a preferred embodiment, the screw is threadedly engaged with the at least one end.

[0023] According to a preferred embodiment, the regulator includes a bellows having a first end that is hermetically attached to the fixed portion and a second end that is hermetically attached to the movable portion, thereby forming a sealed internal volume.

[0024] According to a preferred embodiment, the fixed portion and the movable portion of the regulator are engaged with each other within the bellows in a sliding and longitudinally guided manner.

[0025] According to a preferred embodiment, the valve device is a first valve device, the regulator is a first regulator, and the pressure regulating device further includes a second valve device fluidly connected in series with and located upstream of the first valve device. The second valve device has a seat located in a gas passage and a closure element configured to cooperate with the seat, and a second regulator housed in a cavity of the body and located downstream of the second valve device, thereby defining a regulating chamber together with the cavity. The geometry of the regulating chamber varies with the pressure in the regulating chamber, and the regulator drives the closure element to regulate the gas flow rate through the second valve device.

[0026] According to a preferred embodiment, the main body is a first main part that houses the first valve device and the first regulator, and the main body also includes a second main part that houses the second valve device and the second regulator.

[0027] According to a preferred embodiment, the pressure regulating device is configured to deliver the gas flow when the absolute pressure at the gas outlet is less than 0.9 bar.

[0028] According to a preferred embodiment, the pressure regulating device further includes a port fluidly connected to the sealing chamber of the regulator via a plug, and configured to fluidly connect an external auxiliary gas source to the sealing chamber to regulate the pressure of the auxiliary gas in the sealing chamber.

[0029] According to a preferred embodiment, the port leads to the outside of the body.

[0030] According to a preferred embodiment, the port presents a main axis that is transverse to the longitudinal axis of the pressure regulating device, and preferably radial to the longitudinal axis.

[0031] According to a preferred embodiment, the plug includes a threaded portion that engages with a fixed portion of the regulator, and a tapered needle portion that engages with an auxiliary seat formed in the fixed portion.

[0032] According to a preferred embodiment, the plug is located entirely in the channel between the port and the sealing chamber of the regulator.

[0033] According to a preferred embodiment, the plug includes an internal channel for auxiliary gas located between the threaded portion and the tapered needle portion.

[0034] According to a preferred embodiment, the plug includes an engagement surface at one end opposite the sealing chamber of the regulator, the engagement surface being used to engage with a tool by inserting the tool into the port.

[0035] According to a preferred embodiment, the mating surface of the plug is oriented in the insertion direction of the tool aligned with the port.

[0036] According to a preferred embodiment, the engagement surface of the plug is configured such that the engagement with the tool is in a rotating state, such that the rotation of the tool causes the plug to rotate.

[0037] According to a preferred embodiment, the regulator includes a fixed portion and at least one flexible wall attached in an airtight manner to the fixed portion and the movable portion, the sealing chamber of the regulator being defined by the at least one flexible wall, the fixed portion and the movable portion.

[0038] Advantageously, the occluder is mechanically connected (preferably fixed) to the movable part of the regulator.

[0039] Advantageously, the at least one flexible wall is circular, corrugated, or metallic.

[0040] Advantageously, the port is located on the cylindrical outer surface of the body, which can be connected to the auxiliary gas source in an airtight manner.

[0041] The present invention also relates to an apparatus for a gas cylinder, the apparatus comprising: a body having a male threaded portion configured to engage with a neck ring of the gas cylinder, a gas inlet located in the male threaded portion, a gas outlet, and a gas passage interconnecting the gas inlet and the gas outlet; a shut-off valve for the gas passage housed in the body; and a pressure regulating device fluidly connected to the gas inlet at the male threaded portion and configured to be inserted into the gas cylinder; wherein the pressure regulating device is a pressure regulating device as described in the present invention.

[0042] The present invention also relates to (1) a pressure regulating device for compressed gas, the pressure regulating device comprising: a body having a gas inlet, a gas outlet and a gas passage fluidly interconnecting the gas inlet and the gas outlet; a valve device having a seat located in the gas passage and a closure element configured to cooperate with the seat; a regulator housed in a cavity of the body and located downstream of the valve device, the regulator defining a regulating chamber together with the cavity, the geometry of the regulating chamber varying with the pressure in the regulating chamber, and the regulator actuating the closure element to regulate the gas flow rate through the valve device.

[0043] (2) The pressure regulating device as described in item (1), wherein the closure element includes a lifting valve and a rod, the lifting valve being located upstream of the seat and configured to contact the seat, the rod extending from the lifting valve through the seat, and the rod being attached to the regulator.

[0044] (3) The pressure regulating device as described in item (2), wherein the rod includes a tapered portion adjacent to the lifting valve and presents a radial clearance of less than 0.02 mm with respect to the seat.

[0045] (4) The pressure regulating device as described in any one of (1) to (3), wherein the cavity includes a bottom adjacent to the seat, and the pressure regulating device includes a compressed wave spring disposed on the bottom and acting on the regulator. Each turn of the wave spring may include at least four waves, each wave forming a contact area.

[0046] (5) The pressure regulating device as described in item (4), wherein the regulator includes a shoulder end face that engages with a compression wave spring.

[0047] (6) The pressure regulating device as described in any one of (1) to (5), wherein the regulator includes a movable part facing the valve device, the movable part being configured to move along the inner surface of the cavity and drive the closure element.

[0048] (7) The pressure regulating device as described in item (6), wherein the regulator includes an open ring mounted around a movable portion of the regulator and configured to contact the inner surface of the cavity.

[0049] (8) The pressure regulating device as described in any one of (1) to (7), wherein the regulator includes a fixed portion opposite to the valve device and engaged with a screw, the screw being configured to adjust the position of the fixed portion.

[0050] (9) The pressure regulating device as described in item (8), wherein the screw includes a tapered front end that contacts an annular recessed tapered surface of a fixed portion of the regulator, thereby forming an engagement between the screw and the fixed portion.

[0051] (10) The pressure regulating device as described in item (8) or (9), wherein the engagement between the screw and the fixed portion of the regulator is configured to center the fixed portion, thereby presenting radial clearance in the cavity.

[0052] (11) The pressure regulating device as described in any one of (8) to (10), wherein the screw is threadedly engaged with the body.

[0053] (12) A pressure regulating device as described in any one of items (6) and (7) and any one of items (8)-(11), wherein the regulator comprises a bellows having a first end that is hermetically attached to the fixed portion and a second end that is hermetically attached to the movable portion, thereby forming a sealed internal volume.

[0054] (13) The pressure regulating device as described in item (12), wherein the fixed portion and the movable portion of the regulator are engaged with each other in a sliding and longitudinally guided manner within the bellows.

[0055] The present invention also relates to (14) a pressure regulating device for compressed gas, the pressure regulating device comprising: a body having a gas inlet, a gas outlet and a gas passage fluidly interconnecting the gas inlet and the gas outlet; a valve device having a seat located in the gas passage and a closure element configured to cooperate with the seat; a regulator housed in a cavity of the body and located downstream of the valve device, the regulator defining a regulating chamber together with the cavity, the geometry of the regulating chamber varying with pressure in the regulating chamber, and the regulator actuating the closure element to regulate the gas flow rate through the valve device; wherein the body includes a main portion and at least one end attached to the main portion.

[0056] (15) The pressure regulating device as described in item (14), wherein the attachment of the at least one end to the main part of the body is accomplished by welding.

[0057] (16) A pressure regulating device as described in either (14) or (15), wherein one end of the main part houses a valve device and includes an annular groove surrounding the seat.

[0058] (17) The pressure regulating device as described in any one of (14) to (16), wherein the body comprises a tubular wall, the inner surface of which forms a cavity.

[0059] The present invention also relates to (18) a method for assembling a pressure regulating device as described in any one of items (14) to (17), comprising the step of welding the main part and the at least one end together by applying a welding arc along an annular joint between the main part and at least one end.

[0060] (19) The method as described in paragraph (18) includes the step of placing a cooling ring around the main part of the body and adjacent to the annular joint prior to welding to avoid overheating of the valve assembly.

[0061] (20) The method as described in item (19), wherein the pressure regulating device is the pressure regulating device as described in item (16), and the cooling ring overlaps the annular groove in the axial direction.

[0062] Advantages of the present invention

[0063] What is particularly interesting about this invention is that it offers the advantages of a compact structure (especially in the radial direction) and pressure stability under changes in outlet flow rate and / or inlet pressure. Attached Figure Description

[0064] Figure 1 This is a perspective view of an apparatus for a gas cylinder that includes the pressure regulating device of the present invention.

[0065] Figure 2 yes Figure 1 A cross-sectional view of the first embodiment of the pressure regulating device.

[0066] Figure 3 yes Figure 1 A cross-sectional view of a second embodiment of the pressure regulating device. Detailed Implementation

[0067] Figure 1 This is a perspective view of a device used to deliver gas from a gas cylinder.

[0068] The device 2 includes an outer portion 4 and an inner portion 6. The inner portion is intended to be located inside the gas cylinder, while the outer portion 4 is intended to be located outside the gas cylinder, for example, directly above the neck ring of the gas cylinder.

[0069] The external portion 4 essentially comprises the body 8 of device 2, a shut-off valve 10, a gas outlet 12, a refill port 16, and a refill valve 14. The body 8 includes a male threaded portion 8.1 designed to engage with a neck ring of a gas cylinder. A gas passage (not visible) is formed within the body 8 to fluidly interconnect a gas inlet (not visible) formed at the male threaded portion 8.1 with a gas outlet at the gas outlet port 12. The shut-off valve 10 is, for example, manually operated and designed to selectively close or open the gas passage. The refill port 16 can be fluidly connected to a refill channel that extends parallel to the gas passage through the male threaded portion 8.1 and opens at the front of the male threaded portion 8.1.

[0070] The above-mentioned components are known to those skilled in the art and do not require further description.

[0071] The main body 8 also includes a port 8.2 at the male threaded portion 8.1, which is formed, for example, as a tubular portion integral with the male threaded portion 8.1, for mechanical (e.g., welding) and fluid connection to the second part 6 of the device 2, such as a pressure regulating device.

[0072] Figure 2 yes Figure 1 A cross-sectional view of the first embodiment of the pressure regulating device 6 of the device.

[0073] The pressure regulating device 6 comprises two stages: a first stage 6.1 and a second stage 6.2. It is evident that the pressure regulating device 6 includes a body 18, which is generally tubular along its entire length, and whose nominal outer diameter is the maximum outer diameter of the body. In other words, the nominal outer diameter determines whether the pressure regulating device 6 can be inserted through the neck ring of the gas cylinder. If the nominal outer diameter is smaller than the inner diameter of the neck ring, it can be inserted through the neck ring; if the nominal outer diameter is larger than the inner diameter of the neck ring, it cannot be inserted through the neck ring. The body 18 comprises multiple sections 18.1, 18.2, 18.3, 18.4, 18.5, and 18.6, all of which are tubular, have the same nominal outer diameter, are arranged end-to-end along a longitudinal axis, and are attached to each other, preferably by rail welding.

[0074] The first stage 6.1 of the pressure regulating device 6 includes a main body portion 18.1 and two ends 18.2 and 18.3 located at corresponding ends of the main body portion 18.1. End 18.2 forms a gas inlet 20 for the pressure regulating device 6 and the first stage 6.1. End 18.2 is generally cap-shaped; it includes a tubular portion 18.2.1 arranged abutting against the main body portion 18.1 of the main body 18, a cap portion 18.2.2, and a port 18.2.3 forming a pipe portion with a reduced diameter, which forms the gas inlet 20. The end 18.3 opposite to end 18.2 includes a tubular portion 18.3.1 arranged abutting against the main body portion 18.1 of the main body 18 and a transverse wall 18.3.2 having an orifice 18.3.3, for example accommodating a sintered filter element, forming a gas outlet for the first stage 6.1 of the pressure regulating device 6. Gas passage 22 is provided in the main part 18.1 and the end 18.2 and 18.3 of the main body 18, which interconnects the gas inlet 20 with the gas outlet of the first stage 6.1 of the pressure regulating device 6.

[0075] A valve device 24 is provided in the body 18 (e.g., in its main portion 18.1). The valve device 24 includes a seat 26 arranged in a gas passage 22 and a stop 28 movable to engage with the seat 26. The stop 28 includes a lifting valve 28.1 for airtight contact with the seat 26 and located upstream of the seat 26, and a rod 28.2 extending longitudinally from the lifting valve 28.1 through the seat 26 to a downstream side of the seat 26. The seat 26 may include a ring 26.1 made of a non-metallic material having an inner conical surface contacted by the lifting valve 28.1 of the stop 28. The ring is received in a corresponding cavity formed in the main portion 18.1 of the body 18. A gasket (e.g., O-ring 26.2) may be provided in the cavity between the ring 26.1 and the circular groove of the cavity to provide an airtight barrier between the ring 26.1 and the main portion 18.1 of the body 18. A retaining ring 26.3 may be provided to hold the ring 26.1 in the cavity.

[0076] A regulator 30 is provided in a cavity 32 of the main portion 18.1 of the body 18, the cavity being directly downstream of the valve device 24 and forming part of a gas passage 22. This cavity 32 is cylindrical and radially defined by the inner surface of the cylindrical wall of the main portion 18.1 of the body 18. A stopper 28 of the valve device 24 is attached to the regulator 30, which, together with the cavity, defines a regulating chamber whose geometry varies with the pressure within. The regulator 30 effectively forms a sealed chamber and is capable of further longitudinal contraction as the pressure within the regulating chamber increases. The sealed chamber is filled with gas to provide an elastic reaction force when the regulator 30 is compressed.

[0077] More specifically, the regulator 30 includes a fixed portion 30.1, a movable portion 30.2, and a bellows 30.3 interconnecting the fixed portion and the movable portion. One end of the bellows 30.3 is attached to the fixed portion 30.1, and the opposite end is attached to the movable portion 30.2. Both attachments are hermetically sealed, for example by welding, and the bellows is metallic. It is evident that the fixed portion 30.1 and the movable portion 30.2 are slidably engaged with each other along a longitudinal axis. For this purpose, as an example, the fixed portion 30.1 includes a spindle portion 30.1.1 engaged within the cylindrical wall 30.2.1 of the movable portion 30.2, this engagement being slidably. More specifically, the spindle portion 30.1.1 exhibits an outer circular groove carrying a slip ring 30.1.2, which displays a low coefficient of friction at the location of contact with the cylindrical wall 30.2.1. This contact does not need to be hermetically sealed. The cylindrical wall 30.2.1 may have at least one orifice 30.2.2 for providing gas communication between its internal and external volumes, thereby preventing the pressure difference between the two volumes from increasing during operation of the regulator 30, which would otherwise interfere with the normal operation of the regulator. It is evident that a compression spring 30.4 may be provided in the internal volume (i.e., between the fixed portion 30.1 and the movable portion 30.2) to provide additional elastic force (essentially corresponding to the sum of the internal and external volumes) to the elastic force exerted by the gas contained in the sealed chamber. The presence of the compression spring 30.4 may depend on the desired pressure difference between the inlet and outlet during operation.

[0078] The fixed portion 30.1 of the regulator may have a channel 30.1.3 for filling the sealed chamber with a sufficient mass of gas and / or for regulating the gas mass. For example, the channel 30.1.3 is closed by a ball 30.1.4 pressed into the channel, which preferably has a gradually decreasing inner diameter. The ball 30.1.4 may be replaced by a check valve. Alternatively, the channel 30.1.3 may be absent, meaning that the chamber is definitively closed once the bellows 30.3 is attached hermetically to each of the fixed portion 30.1 and the movable portion 30.2.

[0079] The movable portion 30.2 of the regulator 30 includes a female thread 30.2.3 on its front facing the valve assembly 24, which receives a corresponding threaded end of the rod 28.2 of the stop member 28. The stop member 28 is then rigidly attached to the movable portion 30.2 of the regulator 30.

[0080] A compression spring 34 may be provided at the bottom of the cavity 32, adjacent to the seat 26, between it and the movable portion 30.2 of the regulator 30. This compression spring 34 resists the elastic force of the gas in the sealed chamber of the regulator and the elastic force of an optional compression spring 30.4 housed within the regulator 30. The compression spring 34 is preferably a wave spring, i.e., commonly referred to as... Spring. A wave spring is a spring made from pre-hardened flat steel wire in a process known as edge winding. The compression spring 34 is preferably a multi-turn wave spring, optionally with washer ends. The number of turns can be at least two turns, preferably at least three turns. The number of waves per turn (i.e., contact area) can be at least 4, preferably at least 5, more preferably at least 6. In this embodiment, the number of turns is three. This spring is particularly meaningful and useful in this configuration because the elastic force applied to the regulator 30 (e.g., its movable portion 30.2) is significantly better distributed circumferentially. This is particularly useful in the present case because the movable portion 30.2 of the regulator 30 is not precisely guided radially within the cavity 32. The use of a classic compression spring does indeed result in an unbalanced load distribution around the longitudinal axis, which tends to move the movable portion 30.2 and the occluder 28 radially, potentially leading to a lack of gradualness and precision in gas pressure regulation.

[0081] The regulator 30 may include a guide ring 30.5 mounted on a movable component 30.2, for example, in an outer circular groove formed on said movable component. This guide ring opens to allow gas to flow along the regulating chamber defined by the cavity 32 and the regulator 30 to the outlet. The outer diameter of the guide ring 30.5 is smaller than the inner diameter of the cavity 32 to avoid permanent contact and undesirable friction that would otherwise impair proper and precise regulation. The guide ring 30.5 functions to absorb any possible radial movement of the regulator in the event of an impact to the pressure regulating device 6.

[0082] It is evident that the movable part 30.2 may have a shouldered front end 30.2.4 facing the valve device 24 for receiving the compression spring 34.

[0083] The retaining portion 30.1 of the regulator is held in place axially and radially only by screws 36. The latter is threaded into the transverse wall 18.3.2 of the end 18.3 of the body 18. It shows a tapered front end that contacts the annular recessed tapered surface of the retaining portion 30.1 of the regulator 30. It is evident that the outer diameter of the retaining portion 30.1 is smaller than the corresponding inner diameter of the cavity 32, thus forming an annular segment of the gas passage 22 leading to the outlet. Screw 36 is an adjusting screw because it not only positions and centers the retaining portion 30.1 of the regulator 30, but also adjusts its pre-compression, thereby regulating the outlet pressure.

[0084] The second stage 6.2 of the pressure regulating device 6 is similar to its first stage 6.1. The difference between it and the second stage 6.1 lies primarily in the construction of the body 18 and the valve device 124. The reference numerals of the first stage are used to denote the same or corresponding internal components in the second stage, but these numerals are increased by 100. Please refer to the description of these components given in conjunction with the first stage.

[0085] The main body of the second stage 6.2 includes a main portion 18.4 housing the valve device 124, regulator 130, and compression spring 134, as well as ends 18.5 and 18.6. In contrast to the first stage, the two ends 18.5 and 18.6 of the main body 18 are arranged end-to-end downstream of the main portion 18.4, i.e., opposite to the first stage 6.1. The main portion 18.4 of the second stage 6.2 is similar to the main portion 18.1 of the first stage 6.1. The end 18.5 is similar to the end 18.3 of the first stage 6.1, i.e., it includes a tubular portion 18.5.1 arranged abutting against the main portion 18.4 of the main body 18 and a transverse wall 18.5.2 having an orifice 18.5.3, for example, accommodating a sintered filter element, forming a gas outlet of the second stage 6.2, such as the gas outlet 38 of the pressure regulating device 6.

[0086] End 18.6 forms the gas outlet 38 of the pressure regulating device 6 and the second stage 6.2. End 18.6 is generally cap-shaped; it includes a tubular portion 18.6.1 arranged abutting the end 18.5 of the body 18, a cap portion 18.6.2, and a port 18.6.3 forming a pipe portion with a reduced diameter, which forms the gas outlet 38.

[0087] Valve device 124 differs to some extent from valve device 24 of the first stage 6.1 because seat 126 is formed of a metallic material, for example integrally formed with the main part 18.4 of body 18, while the closure member 128 carries a gasket 128.3 (e.g., an O-ring) of elastic material on its lifting valve 128.1, which is held against the lifting valve 128.1 by the action of sleeve 128.4. The rod 128.2 of the closure member 128 has a circular outer groove for receiving gasket 128.3 immediately adjacent to the lifting valve 128.1. The sleeve slides along the rod 128.2 and presents an inner circular surface that contacts the outer circular portion of the gasket, and a larger internal orifice that is fixed to the outer surface of the lifting valve 128.1. Gasket 128.3 is thus constrained between the circular outer groove on the rod 128.2 and the corresponding inner circular surface of the sleeve 128.4. The latter also presents a front facing the seat 126, and this front can contact the seat 126 when the washer deforms to a given level.

[0088] The valve device 124 differs from the valve device 24 of the first stage 6.1 in that the rod 128.2 presents a tapered portion 128.2.1 near the lifting valve 128.1 and exhibits a reduced radial clearance, for example, less than 0.02 mm, with respect to the gas passage through the seat 126. This radial clearance is the difference between the radius of the gas passage through the seat 126 and the radius of the tapered portion 128.2.1 of the rod 128.2, which is minimized when axially centered. This radial clearance is preferably 0.01 mm or less.

[0089] Another difference between the second stage 6.2 and the first stage 6.1 of the pressure regulating device 6 is that there is no compression spring in the regulator 130.

[0090] The difference between the second stage 6.2 and the first stage is that the second stage 6.2 operates at a lower pressure than the first stage. More specifically, the elastic material involved in the contact with the seat in the valve device 124 allows for a hermetically tight contact with reduced force, resulting in greater sensitivity and stability in the event of changes in outlet flow rate. End-of-line consumption devices (especially in the field of ion implantation in semiconductor manufacturing) may include flow regulators to which the outlet of the device of the present invention is connected. The regulator changes the gas flow rate according to various parameters of the manufacturing process, meaning that the pressure regulating device needs to respond quickly to these changes in a controller-like manner. If the pressure at the outlet of the pressure regulating device deviates from the nominal pressure by more than a given amount, even for a very short time, the flow regulator will be in a malfunctioning state, leading to a production stoppage. The above-described construction of the valve device is particularly suitable for responding quickly and appropriately to such flow rate changes at the outlet.

[0091] Furthermore, as described above, the tapered portion 128.2.1 of the rod 128.2 further enhances the stability of the second stage because it holds the occluder 128 and the movable portion 130.2 of the regulator in a centered position and provides a bifurcated channel in parallel for the gas located directly downstream of the seat 126 and the gasket 128.3 in contact with the seat. This channel converts most of the gas velocity into static pressure, thereby providing stability in the regulating chamber (defined between the cavity 132 and the regulator 130).

[0092] The pressure regulating device 6 is assembled as follows:

[0093] - Regulators 30 and 130 are pre-assembled, including the welding of bellows to the corresponding fixed and movable parts of the regulator. A check valve or any equivalent device can be provided in the fixed part of the regulator for filling and / or regulating the mass of gas contained in its sealed chamber. Furthermore, different components, such as those for the main body parts 18.1-18.6 and valve devices 24 and 124, are manufactured prior to assembly.

[0094] - The first stage 6.1 is assembled by installing the valve device 24 at the inlet end of the main body 18.1 and inserting the regulator 30 through the outlet end of the main body 18.1. Then, the rod 28.2 of the closure member 28 can be screwed in and assembled onto the regulator 30.

[0095] - Subsequently, the end 18.2 forming the inlet 20 is assembled to the main part 18.1, for example by rail welding at the joint between its tubular portions. Similarly, the end 18.3 forming the outlet of the first stage 6.1, equipped with screws 36, is assembled to the main part 18.1, for example by rail welding at the joint between its tubular portions. These two operations can be performed sequentially.

[0096] - The first stage 6.1 is then adjusted by applying an action to screw 36. Special equipment may be required to connect the outlet of the first stage 6.1 while being able to apply an action to screw 36.

[0097] The second stage 6.2 can be assembled in a similar manner to the first stage 6.1, and can be assembled in parallel (i.e., independently of the first stage), thereby subsequently assembling the two stages together. Alternatively, the second stage 6.2 can be assembled on the first stage 6.1, i.e., by assembling the main part 18.4 of the body 4 equipped with the valve device 124 and the regulator 130, and then successively assembling the ends 18.5 and 18.6 of the body 18.

[0098] The aforementioned rail welding operation can be performed using a rotary tool mounted around the body 18 and configured to circumferentially guide the welding head around the joint between the two body parts to be assembled. The welding head is designed to generate an arc together with the body. Referring to the assembly process described above, the body parts are assembled together by rail welding when the valve device and regulator have been installed in the main parts 18.1 and 18.4 of the body 18. Therefore, in order to protect these components, especially the non-metallic components (i.e., the seat 26.1 and gasket 26.2 of the valve device 24 in the first stage 6.1 and the gasket 128.3 of the valve device 124 in the second stage 6.2), it is appropriate to provide specific cooling to the body 18 during the welding operation. For this purpose, a tool can be slid around the main parts 18.4 or 18.1 of the body 18. Figure 2 The cooling ring 40, schematically shown, slides at the height of the valve assembly 124 or 24 to protect it from the heat generated during welding.

[0099] from Figure 2As can be clearly seen, each of the main portions 18.1 and 18.4 of the body 18 presents a circular groove 18.1.1 or 18.4.1 formed around the valve device 24 or 124 at its inlet end. Each of these grooves 18.1.1 or 18.4.1 extends longitudinally beyond the height or level of the non-metallic element of the valve device, such that heat generated at the adjacent joint with the adjacent end 18.2 or 18.3 can be radially transferred to the central portion 18.1.2 or 18.1.2 that houses the non-metallic element.

[0100] Figure 3 yes Figure 1 A cross-sectional view of a second embodiment of the pressure regulating device. (Using...) Figure 2 The reference numerals in the first embodiment are used to denote the same or corresponding elements, but these reference numerals are increased by 200. Please refer to the following: Figure 2 The following descriptions of these components are provided. Specific reference numerals are used to denote specific components.

[0101] Figure 3 Pressure regulating device 206 and Figure 2 The main difference in the pressure regulating device 6 lies in the construction of the regulators 230 and 330. Their sealed chambers are not pre-filled with a fixed and predetermined mass of gas and are preferably controlled in a predetermined manner by... Figure 2 Instead of a stopper similar to ball 30.1.4 in the first stage 6.1, it is sealed by stoppers 230.1.4 and 330.1.4 in channels 230.1.3 and 330.1.3, which are operable and respectively laterally, preferably radially, open to ports 240 and 340. Each of ports 240 and 340 can be connected to an external source 244 of auxiliary gas for regulating the pressure in the chamber of the regulator 230 or 330, while operating the corresponding stopper 230.1.4 or 330.1.4 by engaging tool 246 to open the corresponding channel 230.1.3 or 330.1.3. Once the desired pressure is reached, the corresponding stopper 230.1.4 or 330.1.4 is further operated to close the corresponding channel 230.1.3 or 330.1.3. The external auxiliary gas source can then be disconnected from the corresponding port 240 or 340.

[0102] The above adjustment scheme has basically replaced Figure 2 The screws 36 and 136 in the first embodiment adjust the position of the fixing portions 30.1 and 130.1 of the adjusters 30 and 130.

[0103] The fixing portions 230.1 and 330.1 of the regulators 230 and 330 are rigidly fixed to the body 218, for example, directly formed in the body portions 218.2 and 218.4, but it should be understood that the fixing portions of the regulators may be different from the body 218.

[0104] For example, plug 230.1.4 or 330.1.4 is entirely located in channel 230.1.3 or 330.1.3 between the chamber of regulator 230 or 330 and port 238 or 338. This means that during pressure regulation using external source 244 of auxiliary gas and engagement tool 246, engagement tool 246 will be in contact with auxiliary gas during regulation, thus requiring an airtight connection relative to auxiliary gas channel 244.1 of external source 244 fluidly connected to port 240 or 340. This rotationally airtight connection between engagement tool 246 and the body of external source 244 can be achieved using one or more gaskets or seals mounted around the cylindrical surface portion of the tool, allowing combined translational and rotational movements of the tool while providing an airtight seal.

[0105] The plug 230.1.4 or 330.1.4 includes a male threaded portion 230.1.4.1 or 330.1.4.1 that engages with a corresponding female threaded portion formed in the channel 230.1.3 or 330.1.3, and a needle portion 230.1.4.2 or 330.1.4.2, which is preferably conical and configured to engage in an airtight manner with an auxiliary seat formed in the channel 230.1.3 or 330 that interconnects the chamber and the port 240 or 340. The plug 230.1.4 or 330.1.4 also includes an engagement surface 230.1.4.3 or 330.1.4.3 located at the end opposite to the needle portion 230.1.4.2 or 330.1.4.2, which engages with the tool by inserting the engagement tool 246 into the port 240 or 340. The plug 230.1.4 or 330.1.4 may also include an internal passage 230.1.4.4 or 330.1.4.4 for auxiliary gas located between the threaded portion 230.1.4.1 or 330.1.4.1 and the tapered needle portion 230.1.4.2 or 330.1.4.2.

[0106] Alternatively, the plug 230.1.4.1 or 330.1.4.1 may be located only partially within the channel 230.1.3 or 330.1.3 between the chamber of regulator 230 or 330 and port 240 or 340. More specifically, the mating surface 230.1.4.3 or 330.1.4.3 may be fluidly located outside the channel 230.1.3 or 330.1.3, thereby allowing the plug 230.1.4.1 or 330.1.4.1 to be hermetically connected to the retaining portion 230.1 or 330.1 forming the channel 230.1.3 or 330.1.3, or the second or fourth body portion 218.2 or 218.4. In this configuration, the tool 244 does not need to be hermetically connected to the body of the external source 242 of the auxiliary gas.

[0107] Protective caps 242 or 342 can be provided on ports 240 or 340 to seal the ports and prevent dust or foreign objects from entering channels 230.1.3 or 330.1.3. Protective caps 242 or 342 can be made of plastic or similar materials that are softer than the metal material of the body 218.

[0108] from Figure 3 It is evident that a filter element 248 can be provided in, for example, the gas inlet 220 formed on the first main body portion 218.1. A filter element 248 can be provided in the gas passage 222 between the two stages 206.1 and 206.2 (e.g., in the second main body portion 218.2). A filter element 248 can also be provided in or near the gas outlet 238 (e.g., in the fourth main body portion 218.4). The filter element 248 can be made of a sintered material press-fitted into the respective main body portion.

[0109] A particular advantage of the pressure regulator 206 described above is that its regulators 230 and 330 are easy to control and adjust under both static conditions (i.e., when there is no airflow) and dynamic conditions (i.e., when there is an output airflow).

[0110] It is evident that the body 218 may include an outer ring 218.1.1 designed to engage with a dynamic adjustment tool on its outer surface adjacent to the gas inlet 220 (e.g., on the first body portion 218.1), such that the tool can press against the body 218 at the gas inlet 220 and seal against the gas inlet.

[0111] The pressure regulating devices 6 and 206 described above can be configured to operate under sub-atmospheric pressure conditions, which means that at least one of the stages 6.1 or 206.1 and 6.2 or 206.2 is normally closed at atmospheric pressure (i.e., about 1 bar), and the absolute pressure at the outlet needs to be less than 1 bar (e.g., less than 0.9 bar) to open the closed stage and allow gas delivery.

[0112] The pressure regulating devices 6 and 206 described above can also be configured to operate under conditions above atmospheric pressure (i.e., normally open) and to close the gas passage when the outlet pressure reaches an upper limit greater than 1 bar.

[0113] The nominal outer diameter of the pressure regulating device 6 described above can be less than 25 mm, which allows it to be inserted into the neck ring of most commercially available gas cylinders.

[0114] The pressure regulating device 6 described above can be single-stage, rather than two-stage.

[0115] The pressure regulating devices 6 and 206 described above can be external (i.e., designed to be located outside the gas cylinder) rather than internal (i.e., designed to be located inside the gas cylinder).

Claims

1. A pressure regulating device for compressed gas, comprising: -A main body having a gas inlet (20; 220), a gas outlet, and a gas passage (22; 222) that fluidly interconnects the gas inlet and the gas outlet; - A valve device (24; 124; 224; 324) having a seat located in a gas passage (22; 222) and a stop configured to cooperate with the seat; - A regulator housed in a cavity of the main body, the cavity being directly downstream of the valve device (24; 124; 224; 324) and forming part of a gas passage (22; 222), the regulator together with the cavity defining a regulating chamber whose geometry varies with the pressure in the regulating chamber, and the regulator actuating a closure element to regulate the gas flow through the valve device; Its features are: The body is tubular along its entire length, having a nominal outer diameter along the regulator and valve assembly (24; 124; 224; 324), which is the maximum outer diameter of the body; and The body includes a tubular wall having an inner surface forming a cavity.

2. The pressure regulating device of claim 1, wherein the body comprises a main portion having a nominal outer diameter and at least one end having a nominal outer diameter and attached to the main portion.

3. The pressure regulating device as claimed in claim 2, wherein the attachment of the at least one end to the main part of the body is performed by welding.

4. The pressure regulating device as claimed in any one of claims 2 and 3, wherein one end of the main part receives a valve device (24; 124) and includes an annular groove (18.1.1; 18.4.1) surrounding the seat.

5. The pressure regulating device of claim 1, wherein the closure element comprises a lifting valve (28.1; 128.1) located on the upstream side of the seat and configured to contact the seat, and a rod extending from the lifting valve (28.1; 128.1) through the seat, the rod being attached to the regulator.

6. The pressure regulating device of claim 5, wherein the rod includes a tapered portion (128.2.1) adjacent to the lifting valve (128.1) and exhibits a radial clearance of less than 0.02 mm with respect to the seat.

7. The pressure regulating device of claim 1, wherein the cavity includes a bottom adjacent to the seat, and the pressure regulating device includes a compression wave spring (34; 134; 334) disposed on the bottom and acting on the regulator.

8. The pressure regulating device of claim 7, wherein the regulator includes a shoulder end face (30.2.4; 130.2.4) that engages with a compression wave spring (34; 134; 334).

9. The pressure regulating device of claim 1, wherein the regulator includes a movable portion facing the valve device (24; 124; 224; 324), the movable portion being configured to move along the inner surface of the cavity and drive the closure element.

10. The pressure regulating device of claim 9, wherein the regulator includes an open ring (30.5; 130.5) mounted around a movable portion of the regulator and configured to contact the inner surface of the cavity.

11. The pressure regulating device of claim 1, wherein the regulator includes a fixed portion opposite to the valve device (24; 124) and engaged with a screw (36; 136) configured to adjust the position of the fixed portion.

12. The pressure regulating device of claim 11, wherein the screw (36; 136) includes a tapered front end that contacts an annular recessed tapered surface of a fixed portion of the regulator, thereby forming an engagement between the screw and the fixed portion.

13. The pressure regulating device as claimed in any one of claims 11 and 12, wherein the engagement between the screw (36; 136) and the retaining portion of the regulator is configured to center the retaining portion, thereby presenting radial clearance in the cavity.

14. The pressure regulating device as claimed in any one of claims 2 to 3 and as claimed in any one of claims 11 to 12, wherein the screw (36; 136) is threadedly engaged with at least one end of the body.

15. The pressure regulating device as claimed in any one of claims 9 and 10 and any one of claims 11 to 12, wherein the regulator comprises a bellows (30.3; 130.3) having a first end that is hermetically attached to a fixed portion and a second end that is hermetically attached to a movable portion, thereby forming a sealed internal chamber.

16. The pressure regulating device of claim 15, wherein the fixed portion and the movable portion of the regulator are engaged with each other in a sliding and longitudinally guided manner within the bellows (30.3; 130.3).

17. The pressure regulating device of claim 1, wherein the valve device is a first valve device (24; 224), the regulator is a first regulator, and the pressure regulating device further comprises a second valve device (124; 324) fluidly connected in series with and located downstream of the first valve device (24; 224), the second valve device having a seat located in a gas passage (22; 222) and a closure element configured to cooperate with the seat, and a second regulator housed in a cavity of the body and located downstream of the second valve device (124; 324), thereby defining a regulating chamber together with the cavity, the geometry of which varies with the pressure in the regulating chamber, and the regulator actuating the closure element to regulate the gas flow rate through the second valve device (124; 324).

18. The pressure regulating device as claimed in any one of claims 2 to 3 and as claimed in claim 17, wherein the main body is a first main body that houses the first valve device (24; 224) and the first regulator, and the main body further comprises a second main body that houses the second valve device (124; 324) and the second regulator.

19. The pressure regulating device as claimed in claim 1, configured to deliver a gas flow at an absolute pressure of less than 0.9 bar at the gas outlet.

20. The pressure regulating device of claim 1, further comprising a port (240; 340) in fluid communication with a sealing chamber of the regulator via a plug (230.1.4; 330.1.4) and configured to fluidly connect an external source (244) of auxiliary gas to the sealing chamber to regulate the pressure of the auxiliary gas in the sealing chamber.

21. The pressure regulating device of claim 20, wherein the port (240; 340) opens outward to the body.

22. The pressure regulating device as claimed in any one of claims 20 and 21, wherein the ports (240; 340) present a main axis that is transverse to the longitudinal axis of the pressure regulating device.

23. The pressure regulating device according to any one of claims 20 to 21, wherein the plug (230.1.4; 330.1.4) comprises a threaded portion (230.1.4.1; 330.1.4.1) engaging with a fixed portion of the regulator, and a tapered needle portion (230.1.4.2; 330.1.4.2) engaging with an auxiliary seat formed in the fixed portion.

24. The pressure regulating device according to any one of claims 20 to 21, wherein the plug (230.1.4; 330.1.4) is entirely located within the passage (230.1.3; 330.3.1) between the port (240; 340) of the regulator and the sealing chamber.

25. The pressure regulating device of claim 23, wherein the plug (230.1.4; 330.1.4) includes an internal passage (230.1.4.4; 330.1.4.4) for auxiliary gas between a threaded portion (230.1.4.1; 330.1.4.1) and a tapered needle portion (230.1.4.2; 330.1.4.2).

26. The pressure regulating device as claimed in claim 24, wherein the plug (230.1.4); 330.1.4) includes a mating surface (230.1.4.3) at the end opposite to the sealing chamber of the regulator; 330.1.4.3), the mating surface is used to insert a tool (246) into the port (230.1.4); 330.1.4) and then combined with tool (246).

27. The pressure regulating device of claim 26, wherein the plug (230.1.4); The mating surface of 330.1.4) (230.1.4.3); 330.1.4.3) Presents the insertion direction of the tool (246) aligned with the port (240; 340).

28. The pressure regulating device as claimed in any one of claims 26 and 27, wherein the mating surface (230.1.4.3; 330.1.4) of the plug (230.1.4.3) 330.1.4.3) is configured such that engagement with the tool (246) is rotatable, which causes rotation of the tool (246) to cause the plug (230.1.4); 330.1.4) Rotation.

29. The pressure regulating device according to any one of claims 20 to 21, wherein the regulator comprises a fixed portion, a movable portion, and at least one flexible wall (230.3; 330.3) attached in an airtight manner to the fixed portion and the movable portion, and the sealing chamber of the regulator is defined by the at least one flexible wall (230.3; 330.3), the fixed portion, and the movable portion.

30. A device (2) for a gas cylinder, comprising: - A body having a male threaded portion (8.1) configured to engage with a neck ring of a gas cylinder, a gas inlet located in the male threaded portion, a gas outlet, and a gas passage interconnecting the gas inlet and the gas outlet; -A shut-off valve (10) for the gas passage housed in the main body; as well as - A pressure regulating device, which is fluidly connected to the gas inlet at the male threaded portion (8.1) and is configured to be inserted into the gas cylinder; Its features are: The pressure regulating device is the pressure regulating device as described in any one of claims 1-29.

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