A high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system

Abstract

The present invention provides a high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system, including: fresh air clean air conditioning control system, FFU air volume and floor return air volume control system, CO2 comfort exhaust and supply air indoor positive pressure control system, cold and hot radiation panel flow control system, air conditioning water circulation control system, lighting system and central control system. The high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system is reasonably designed, and can achieve precise control of the constant temperature and humidity and uniform wind speed environment in the microelectronics laboratory, ensure the Class 100 cleanliness of the air in the microelectronics laboratory and low concentration of chemical pollution gas, and reduce the interference factor in the microelectronic chip component experimental sample manufacturing process.

Description

Technical Field

[0001] The present invention relates to the technical field of laboratory equipment, and in particular to a high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system. Background Art

[0002] Microelectronics technology is a new technology developed along with integrated circuits, especially very large-scale integrated circuits. Various toxic, corrosive and irritating chemical gaseous pollutants are continuously produced in the process of microelectronic chip manufacturing, such as silane, dichlorosilane, disilane, boron trichloride, boron trifluoride, phosphine, arsine, chlorine, HCL, HF, H2NO3, hydrogen bromide, ammonia, nitrous oxide, carbon dioxide, etc., which will cause certain pollution to the indoor and outdoor air environment. Microelectronic laboratories need to fully consider the treatment of waste gas and wastewater.

[0003] Microelectronics laboratories have extremely high requirements for environmental temperature and humidity, air cleanliness, vibration, noise and electromagnetic interference. High-precision chip lithography machines need to minimize the interference of fine particles in the environment and air on the lithography process. The location and design of the laboratory must fully consider various environmental factors. For example, for electron beam lithography machines, the fluctuations in temperature, humidity and wind speed have a great impact on chip sample production. It is necessary to work in a high-precision, stable, constant temperature and humidity Class 100 clean environment (temperature 22°C ± 0.1°C, humidity ± 2%) to reduce the impact of chip production on chip sample quality.

[0004] Most of the Class 100 laboratories in the microelectronics laboratories that have been built on the market use ultra-high-efficiency FFU filtration modules for the air laminar flow process, achieving the Class 100 requirements for particulate pollutants in the indoor air. However, adequate treatment measures have not been taken for chemical gaseous pollutants that affect the process quality. The control of the constant temperature and humidity environment is also at a relatively rough level, which cannot meet the requirements of precise control of fluctuations and stability. When replacing and installing the ultra-high-efficiency filtration FFU module, it is necessary to climb to the top (when there is enough height space) or tilt the FFU module at a high altitude below to pick it up and put it in, which increases the maintenance difficulty and safety risks for the staff. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention proposes a high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system, which can achieve precise control of the constant temperature and humidity and uniform wind speed environment in the microelectronics laboratory, ensure the Class 100 cleanliness of the air and low concentration of chemical pollution gases in the microelectronics laboratory, and reduce the interference factors in the microelectronic chip component experimental sample manufacturing process.

[0006] To realize the above technical scheme, the present invention provides a high-precision constant temperature and humidity microelectronic Class 100 clean laboratory automatic control system, including: a fresh air clean air conditioning control system, the fresh air clean air conditioning control system is used to obtain the temperature and relative humidity values ​​in the Class 100 clean room in real time, and draw an enthalpy-humidity diagram, and divide it into different meteorological zones according to the equal enthalpy lines and equal moisture content lines on the enthalpy-humidity diagram according to the indoor temperature and humidity parameter requirements, and then use the dew point temperature calculated by the indoor required temperature and relative humidity as the target value, and then control the outdoor fresh air parameters according to the air conditioning working conditions corresponding to different external environments, so as to achieve the indoor temperature and humidity indicators required by the clean room; FFU air volume and floor return air volume control system, the FFU air volume and floor return air volume control system is used to fine-tune the air volume according to the on-site situation group system, by installing a wind speed sensor in the FFU filter unit on the blowing surface, installing an electric air volume regulating valve under the anti-static floor of the return air, setting a suitable surface wind speed on the touch screen system, and detecting the surface wind speed of the system laminar flow in real time. The FFU filter unit increases or decreases the fan air volume in real time according to the surface wind speed feedback from the surface wind speed sensor to achieve fine-tuning control of the FFU air volume, and the opening of the electric air volume regulating valve of the return air is then properly fine-tuned to make the wind speed at the FFU supply air level and the floor return air level in the laboratory uniform; a CO2 comfort exhaust and supply air indoor positive pressure control system, the CO2 comfort exhaust and supply air indoor positive pressure control system detects the CO2 concentration in the laboratory in real time through the CO2 sensor and pressure difference sensor installed in the laboratory. When the CO2 concentration is too high, the system's fresh air volume is increased in real time. When the CO2 concentration is in a comfortable range, the fresh air volume is adjusted back. While adjusting the fresh air volume, the pressure in the laboratory is detected in real time through the pressure difference sensor, and the exhaust valve opening is adjusted in real time according to the pressure parameters to control the comfort of the laboratory and the positive pressure stability of the system; a central control system, the central control system is respectively connected to the fresh air clean air conditioning control system, the FFU air volume and floor return air volume control system and the CO2 comfort exhaust and supply air indoor positive pressure control system.

[0007] Preferably, the system also includes a cold and hot radiation panel flow control system, which is arranged into four groups and respectively installed on the anti-condensation aluminum honeycomb cold and hot radiation panels on the inner side of the outer wall, the outer side of the inner wall, the inner side of the inner wall and the mezzanine ceiling of the laboratory. The cold and hot radiation panel flow control systems are respectively electrically connected to the electric regulating water valves and temperature sensors at the water outlet and water inlet at the top of the cold circuit pipe installed on the anti-condensation aluminum honeycomb cold and hot radiation panels. The cold and hot radiation panel flow control system controls the opening of the electric regulating water valve in real time according to the return water temperature, controls the flow of the cold and hot radiation panels, realizes the adjustment of the return water temperature, and obtains the optimal water flow.

[0008] Preferably, the anti-condensation aluminum honeycomb hot and cold radiation plate includes an electrostatically sprayed aluminum plate, an aluminum honeycomb radiation plate and a water-cooling loop pipe, the water-cooling loop pipe is embedded and installed in the aluminum honeycomb radiation plate, the top water outlet and water inlet of the water-cooling loop pipe extend to the outside of the aluminum honeycomb radiation plate, and the gaps at the joints between the water-cooling loop pipe and the aluminum honeycomb radiation plate are filled with thermal conductive sealant, the honeycomb holes of the aluminum honeycomb radiation plate are filled with desiccant, the front and rear two electrostatically sprayed aluminum plates are respectively fitted on the front and rear sides of the aluminum honeycomb radiation plate, the top water outlet and water inlet of the water-cooling loop pipe are both installed with water pipe joints, the top water outlet and water inlet of the water-cooling loop pipe are connected to the external circulating water pipeline through the water pipe joint, and the top water outlet and water inlet of the cold loop pipe are both installed with electric regulating water valves and temperature sensors.

[0009] Preferably, the system also includes an air-conditioning water circulation control system and a lighting system. The air-conditioning water circulation control system adjusts the opening of the bypass electric butterfly valve installed on the laboratory circulating water supply main and return water main through a three-position floating-point control method, so that the pressure difference between the laboratory circulating water supply main and return water main is always maintained within the allowable error range of the set value; the lighting system controls the lighting of the laboratory through touch screen control or panel switches.

[0010] Preferably, the fresh air clean air conditioning control system includes an outdoor fresh air temperature and humidity processing device, which is a shell formed by splicing a first outer shell, a second outer shell and a third outer shell, wherein an air inlet chamber, a first filter chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the first outer shell along the gas flow direction, a filter assembly is installed in the first filter chamber, an electric heating pipe is installed in the preheating chamber, an evaporating coil is installed in the first surface cooling chamber, a humidifying chamber, a second surface cooling chamber and a reheating chamber are sequentially arranged in the second outer shell along the gas flow direction, a humidifier is installed in the humidifying chamber, an evaporating coil is installed in the second surface cooling chamber, an electric heating pipe is installed in the reheating chamber, and an air inlet chamber, a first filter chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the third outer shell along the gas flow direction. a machine room, a high-efficiency filter room and an air outlet room, wherein an EC fan is installed in the fan room, and a high-efficiency filter is installed in the high-efficiency filter room; a first differential pressure switch is installed on the first outer shell between the air inlet room and the first filter room, a second differential pressure switch is installed at the air inlet of the fan room, and a third differential pressure switch is installed between the air outlet of the fan room and the high-efficiency filter room; a water inlet pipe and a water outlet pipe connected to the evaporating coil in the first surface cooling room are installed on the first outer shell at the first surface cooling room, and a first electric regulating water valve and a second electric regulating water valve are installed on the water inlet pipe and the water outlet pipe respectively; a first temperature and humidity sensor and an enthalpy sensor are installed on the second outer shell at the humidification chamber, and a second temperature and humidity sensor is installed on the third outer shell at the air outlet room.

[0011] Preferably, the FFU air volume and floor return air volume control system includes a laboratory exterior wall assembly; a laboratory interior wall assembly installed in the laboratory exterior wall assembly, an air duct is formed between the laboratory exterior wall assembly and the laboratory interior wall assembly; an outdoor wind distribution device installed on the outside of the top of the laboratory exterior wall assembly; an FFU air supply control system installed on the top of the laboratory interior wall assembly, the FFU air supply control system is composed of a plurality of FFU filter units installed on the top of the laboratory interior wall assembly and distributed in a square matrix, the FFU filter units distributed in a square matrix in the FFU air supply control system are divided into three independently controllable FFU air supply speed control combinations I, FFU air supply speed control combination II and FFU air supply speed control combination III according to different air supply areas, and a wind speed sensor is installed at the air outlet of each FFU filter unit; A floor return air control system at the bottom of the inner wall assembly, the floor return air control system is composed of multiple anti-static floors installed at the bottom of the laboratory inner wall assembly and distributed in a square matrix, each anti-static floor surface is evenly provided with air holes, the anti-static floors distributed in a square matrix in the floor return air control system are divided into three independently controllable ground return air speed control combinations I, ground return air speed control combination II and ground return air speed control combination III according to different return air areas, and an electric air volume regulating valve is installed under each anti-static floor; a central controller, the central controller is electrically connected to each FFU filter unit, wind speed sensor, and electric air volume regulating valve respectively, and the central controller sets the return air volume of the electric air volume regulating valve under the corresponding anti-static floor according to the wind speed data collected by the wind speed sensor, so that the wind speed at the FFU supply air layer and the floor return air layer is uniform.

[0012] Preferably, the FFU air supply speed control combination I corresponds to the peripheral unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination I in the floor return air control system; the FFU air supply speed control combination II corresponds to the middle unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination II in the floor return air control system; the FFU air supply speed control combination III corresponds to the central unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination III in the floor return air control system.

[0013] Preferably, the FFU filter unit includes an FFU filter unit body, a chemical purification module, a high-efficiency filter and an aluminum profile keel assembly, wherein the aluminum profile keel assembly is formed by splicing four aluminum profile keels end to end, and the end joints of the aluminum profile keels are fixedly connected by keel connectors, and each aluminum profile keel is provided with plug-in docking hooks on both sides, and the aluminum profile plug-in is fixed on the aluminum profile keel and protrudes outward after fitting with the plug-in docking hook through the hook position, and each aluminum profile keel is provided with a top hook groove on the top, and the bottom of the suspension rod assembly is embedded in the top hook groove of the aluminum profile keel through a T-screw, and the top of the suspension rod assembly is suspended on the top plate of the laboratory exterior wall assembly, the high-efficiency filter is fitted on the bottom of the chemical purification module, and the chemical purification module is fitted on the bottom of the FFU filter unit body, and the four end edges of the high-efficiency filter are respectively placed on the four aluminum profile plugs inserted into the four aluminum profile keels, and the wind speed sensor is installed at the air outlet at the bottom of the high-efficiency filter.

[0014] Preferably, two stainless steel safety latches are respectively installed on the front and rear sides of the FFU filter unit body, and each stainless steel safety latch is installed with a pin protruding outward.

[0015] Preferably, the hanger assembly includes a hanger, a hanger mounting frame and a T-screw, the top of the T-screw is locked and installed on the bottom of the hanger mounting frame, and the T-shaped end of the T-screw is embedded and installed in the top hook groove of the aluminum profile keel, the bottom of the hanger is locked and fixed on the top of the hanger mounting frame, the top of the hanger is suspended on the top plate of the laboratory exterior wall assembly, each aluminum profile keel is suspended on the top plate of the laboratory exterior wall assembly through two hanger assemblies, the FFU filter unit body includes an outer shell, the fan is installed in the outer shell, an air inlet is provided at the top of the outer shell opposite to the fan, and a guide vane is installed at the air outlet of the fan.

[0016] The beneficial effects of the high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system provided by the present invention are:

[0017] (1) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can achieve precise control of the constant temperature and humidity and uniform wind speed environment in the microelectronics laboratory through the innovative design of key systems such as the fresh air clean air conditioning control system, FFU air volume and floor return air volume control system, CO2 comfort exhaust and supply air indoor positive pressure control system and hot and cold radiation panel flow control system, ensuring the Class 100 cleanliness and low concentration of chemical pollution gases in the microelectronics laboratory, reducing the interference factors in the microelectronic chip component experimental sample manufacturing process.

[0018] (2) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can ensure Class 100 cleanliness and low concentration of chemical pollutants in the microelectronics laboratory through the innovative design of the FFU air volume and floor return air volume control system, reducing the interference factors in the microelectronic chip component experimental sample process and improving the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine-tuning system ensures the uniformity of air volume and wind speed from top to bottom. During actual operation, the processed air from the outside is first distributed through the outdoor air distribution device through the air duct between the laboratory outer wall assembly and the top of the laboratory inner wall assembly to the FFU air supply control system installed on the top of the laboratory inner wall assembly. The FFU air supply control system can obtain wind speed data based on the wind speed sensors installed in each FFU filter unit. The central controller sets the return air volume of the electric air volume regulating valve under the corresponding anti-static floor according to the wind speed data collected by the wind speed sensor, so that the wind speed at the FFU air supply level and the floor return air level is uniform, which overcomes the problem in the prior art that the internal circulating air in the laboratory is returned from the small holes in the anti-static floor at the bottom of the laboratory inner wall assembly to the air duct formed by the inner and outer walls of the laboratory, and then flows back to the space between the FFU fan filter unit and the top plate of the laboratory outer wall assembly. Due to the wind pressure reduction caused by the air duct structure, the return air speed on the anti-static floor with holes in the entire laboratory and the wind speed on the entire FFU air supply surface are uneven, and the air volume and wind speed will be greater near the inner wall periphery, thereby improving the quality stability of chip products.

[0019] (3) This high-precision constant temperature and humidity microelectronic Class 100 clean laboratory automatic control system greatly facilitates the installation and disassembly of the FFU fan filter unit through the structural design of the FFU filter unit. During the actual installation, first use the keel connector to connect the four aluminum profile keels end to end to form an aluminum profile keel assembly, then use the hanger assembly to hoist the assembled aluminum profile keel assembly on the top plate of the laboratory, then install the high-efficiency filter, chemical purification module and FFU filter unit body into an integrated FFU assembly, and then place it on the elevator platform. Use the elevator platform to lift the above FFU assembly through the frame hole in the center of the aluminum profile keel assembly to the top of the aluminum profile keel assembly, and then insert the aluminum profile insert into the slot of the insert docking hook of the aluminum profile keel in an oblique position, rotate the aluminum profile insert and push it horizontally, move it up and then pull it outward, move it down and push it inward, so that the insert docking hook is tightly connected with the hook position of the aluminum profile insert, and the aluminum profile insert is firmly connected to the aluminum profile keel. The aluminum profile insert serves as a support for the FFU assembly, and then the elevator platform is controlled to descend. During the descent of the elevator platform, the FFU assembly is placed on the aluminum profile insert to support the FFU assembly. When the FFU assembly needs to be disassembled, just use the lifting platform to lift up the FFU assembly, reverse the operation on the aluminum profile insert, separate the aluminum profile insert from the aluminum profile keel, and then use the lifting platform to lower the FFU assembly from the frame hole in the center of the aluminum profile keel assembly to the ground, which greatly facilitates the installation and disassembly of the FFU fan filter unit.

[0020] (4) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can process the outdoor fresh air entering the laboratory through the structural design of the fresh air clean air conditioning control system, which is convenient for the precise control of the constant temperature and humidity environment in the microelectronics laboratory. In actual operation, the EC fan installed in the fan room first generates suction force, so that the outdoor air passes through the air inlet chamber, the first filter chamber, the preheating chamber, the first surface cooling chamber in the first outer shell, the humidification chamber, the second surface cooling chamber, and the reheating chamber in the second outer shell, the fan chamber, the high-efficiency filter chamber, and the air outlet chamber in the third outer shell, and finally enters the indoor microelectronics laboratory. When outdoor air passes through the first filter chamber, the large particles of impurities, dust and polluted chemical gases that may be contained in the outdoor air are filtered through the filter assembly installed in the first filter chamber, and then enters the preheating chamber, where the air is preheated to the set temperature by the electric heating tube installed in the preheating chamber, and then enters the first cooling chamber, where the humidity of the air is controlled by the evaporating coil installed in the first cooling chamber, and then enters the humidifying chamber to regulate the humidity of the air again, and the humidified air enters the second cooling chamber, where the humidity is accurately controlled again by the evaporating coil installed in the second cooling chamber, and the air with accurately controlled humidity is transported to the reheating chamber for accurate temperature adjustment, and then passes through the EC fan in the fan room, and after high-efficiency filtration by the high-efficiency filter in the high-efficiency filter room, it enters the microelectronics laboratory through the air outlet chamber, providing the microelectronics laboratory with fresh air with stable temperature and humidity, reducing the humidity and temperature fluctuations of the fresh air, and facilitating the precise control of the constant temperature and humidity environment in the microelectronics laboratory.

[0021] (5) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can maintain continuous heat conduction, radiation or absorption, and convection through the structural design of the anti-condensation aluminum honeycomb hot and cold radiation plate, preventing condensation and moisture on the surface of the plate. In actual operation, cooling water with a temperature close to that controlled by the air conditioner can flow through the water cooling loop pipe, and heat is conducted, radiated or absorbed by the aluminum honeycomb radiation plate, so that the temperature of the surface of the electrostatically sprayed aluminum plate can always be kept close to the temperature controlled by the air conditioner. In addition, by filling the honeycomb holes of the aluminum honeycomb radiation plate with desiccant, the air in the honeycomb holes of the aluminum honeycomb radiation plate sealed by the electrostatically sprayed aluminum plates on both sides is isolated from the outside and always in a dry state, thereby preventing condensation and moisture on the surface of the electrostatically sprayed aluminum plate, which is conducive to the precise control of the constant temperature and humidity environment in the microelectronics laboratory. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of system control of the present invention.

[0023] Figure 2 It is a schematic diagram of the installation structure of the present invention.

[0024] Figure 3 It is a schematic diagram of the installation structure of the outdoor fresh air temperature and humidity treatment device in the present invention.

[0025] Figure 4 It is the layout diagram of the FFU air supply control system in the present invention.

[0026] Figure 5 It is the layout diagram of the floor return air control system in the present invention.

[0027] Figure 6 It is a schematic diagram of the three-dimensional structural assembly of the FFU filter unit in the present invention.

[0028] Figure 7 It is a schematic diagram of the three-dimensional structure explosion of the FFU filter unit in the present invention.

[0029] Figure 8 It is a cross-sectional view of the assembly structure of the FFU filter unit in the present invention.

[0030] Fig. 9 It is a schematic diagram of the three-dimensional assembly structure of the suspension rod assembly and the aluminum profile keel of the FFU filter unit in the present invention.

[0031] Fig.10 It is a schematic diagram of the assembly structure of the suspension rod assembly, the aluminum profile keel and the aluminum profile insert of the FFU filter unit in the present invention.

[0032] Fig.11 It is a structural schematic diagram of the installation steps of the aluminum profile insert and the aluminum profile keel of the FFU filter unit in the present invention.

[0033] Fig.12 It is a schematic diagram of the installation structure of the anti-condensation aluminum honeycomb cold and hot radiation panel in the present invention.

[0034] Fig.13 It is a transverse cross-sectional view of the anti-condensation aluminum honeycomb cold and hot radiation panel of the present invention.

[0035] In the figure: 1. Laboratory inner wall assembly; 2. FFU air supply control system; 21. FFU air supply speed control assembly I; 22. FFU air supply speed control assembly II; 23. FFU air supply speed control assembly III; 211. FFU filter unit body; 212. Safety latch; 213. Chemical purification module; 214. High efficiency filter; 215. Suspension rod assembly; 2151. Suspension rod; 2152. Suspension rod mounting frame; 2153. T-screw; 216. Keel connection 217, aluminum profile insert; 218, aluminum profile keel; 2181, top hook groove; 2182, insert butt hook; 219, wind speed sensor; 2110, handle; 2111, shell; 2112, air inlet; 2113, fan; 2114, guide vane; 3, floor return air control system; 31, ground return air speed control combination I; 32, ground return air speed control combination II; 33, ground return air speed control combination III; 4, laboratory exterior wall assembly; 5 , outdoor air distribution device; 6, electric air volume regulating valve; 7, outdoor fresh air temperature and humidity treatment device; 71, first outer shell; 72, second outer shell; 73, third outer shell; 74, air inlet chamber; 75, first filter chamber; 76, preheating chamber; 77, first surface cooling chamber; 78, humidification chamber; 79, second surface cooling chamber; 710, reheating chamber; 711, fan chamber; 712, high-efficiency filter chamber; 713, air outlet chamber; 714, first pressure difference switch; 715, first electric regulating water Valve; 716, second electric regulating water valve; 717, first temperature and humidity sensor; 718, enthalpy sensor; 719, third electric regulating water valve; 720, fourth electric regulating water valve; 721, second differential pressure switch; 722, third differential pressure switch; 723, second temperature and humidity sensor; 8, anti-condensation aluminum honeycomb hot and cold radiation plate; 81, electrostatically sprayed aluminum plate; 82, aluminum honeycomb radiation plate; 83, water cooling circuit pipe; 84, desiccant; 85, thermal conductive sealant; 86, wiring trough. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary persons in the art without creative work are within the scope of protection of the present invention.

[0037] Embodiment: A high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system.

[0038] Reference Figures 1 to 13 As shown, a high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system includes:

[0039] (1) Fresh air clean air conditioning control system. It is very difficult to achieve precise control of temperature and relative humidity parameters and ensure a certain control accuracy in traditional air conditioning control. In fact, there is a certain coupling phenomenon between temperature and relative humidity, that is, when the absolute moisture content remains unchanged, the temperature rises and the relative humidity decreases, while the temperature decreases and the relative humidity increases. Due to the coupling between the two and the lack of strict process precision control, the cold and heat in the processing process offset each other, resulting in a huge waste of energy. Based on this, the fresh air clean air conditioning control system provided by the present invention adopts the dew point temperature calculated based on the temperature and relative humidity required by the clean laboratory as the target control value, avoiding the phenomenon that the cold and heat in the processing process offset each other due to the coupling between the two and the lack of strict process precision control, resulting in a huge waste of energy.

[0040] This fresh air clean air conditioning control system is used to obtain the temperature and relative humidity values ​​in the Class 100 clean room in real time, and draw a humid enthalpy diagram. According to the indoor temperature and humidity parameter requirements, the humid enthalpy diagram is divided into different meteorological zones according to the isoenthalpy lines and isohumidity lines. Then, the dew point temperature calculated based on the required indoor temperature and relative humidity is used as the target value. Then, according to the air conditioning working conditions corresponding to different external environments, the outdoor fresh air parameters are controlled to achieve the indoor temperature and humidity indicators required by the clean room.

[0041] Reference Figure 2 and Figure 3 As shown, the fresh air clean air conditioning control system includes an outdoor fresh air temperature and humidity processing device 7, which is composed of a first outer shell 71, a second outer shell 72 and a third outer shell 73. The first outer shell 71, the second outer shell 72 and the third outer shell 73 are all square stainless steel boxes with open left and right ends and closed front, rear, upper and lower surfaces. An air inlet chamber 74, a first filter chamber 75, a preheating chamber 76 and a first surface cooling chamber 77 are sequentially arranged in the first outer shell 71 along the gas flow direction. A filter assembly is installed in the first filter chamber 75, and the filter assembly includes a primary filter, a chemical filter module and a medium filter sequentially arranged along the gas flow direction. In actual operation, large particles of impurities, dust, etc. contained in the air can be filtered out by the primary filter and the medium filter, and chemical pollutants NO that may be contained in the air can be removed through chemical reactions by a special chemical filter module that applies chemical molecular gas phase filtration technology. x, SO2, H2S, etc. The preheating chamber 76 is equipped with an electric heating pipe, and the function of the preheating chamber 76 is to preheat the filtered air to a set temperature. The first surface cold chamber 77 is equipped with an evaporating coil, and the function of the first surface cold chamber 77 is to control the humidity of the air by the evaporating coil. The second outer shell 72 is provided with a humidifying chamber 78, a second surface cold chamber 79 and a reheating chamber 710 in sequence along the gas flow direction. The humidifying chamber 78 is equipped with a humidifier, and the function of the humidifying chamber 78 is to perform necessary humidification operations on the air after evaporation in the first surface cold chamber 77, so as to better control the humidity of the air. The second surface cold chamber 79 is equipped with an evaporating coil, and the function of the second surface cold chamber 79 is to perform surface evaporation on the humidified air again, so as to more accurately control the humidity in the air. The reheating chamber 710 is equipped with an electric heating pipe, and the air can be accurately heated to the required temperature by the electric heating pipe installed in the reheating chamber 710. The third outer shell 73 is provided with a fan chamber 711, a high-efficiency filter chamber 712 and an air outlet chamber 713 in sequence along the gas flow direction. The fan chamber 711 is provided with an EC fan, and in actual operation, the EC fan generates suction force to control the flow direction of the air. The high-efficiency filter chamber 712 is provided with a high-efficiency filter, which can filter tiny impurities in the air to further improve the cleanliness of the air.

[0042] In this embodiment, a first differential pressure switch 714 is installed on the first outer shell 71 between the air inlet chamber 74 and the first filter chamber 75, a second differential pressure switch 721 is installed at the air inlet of the fan chamber 711, and a third differential pressure switch 722 is installed between the air outlet of the fan chamber 711 and the high-efficiency filter chamber 712. In actual operation, only when the EC fan installed in the fan chamber 711 generates suction force and reaches the pressure difference activated by the first differential pressure switch 714, the second differential pressure switch 721, and the third differential pressure switch 722, the first differential pressure switch 714, the second differential pressure switch 721, and the third differential pressure switch 722 will automatically open. If the pressure difference does not reach the set value activated by the first differential pressure switch 714, the second differential pressure switch 721, and the third differential pressure switch 722, the first differential pressure switch 714, the second differential pressure switch 721, and the third differential pressure switch 722 will be in a closed state, and the entire system will also be in a closed state. The first outer shell 71 is provided with a water inlet pipe and a water outlet pipe connected to the evaporation coil in the first surface cooling chamber 77, and the first electric regulating water valve 715 and the second electric regulating water valve 716 are respectively provided on the water inlet pipe and the water outlet pipe. In actual operation, the evaporation amount of water in the air can be controlled by controlling the opening of the first electric regulating water valve 715 and the second electric regulating water valve 716, so as to achieve accurate control of the air humidity. The second outer shell 72 is provided with a first temperature and humidity sensor 717 and an enthalpy sensor 718 in the humidification chamber 78, and the third outer shell 73 is provided with a second temperature and humidity sensor 723 in the air outlet chamber 713. In actual operation, the humidity and enthalpy of the air in the humidification chamber 78 can be accurately collected by the first temperature and humidity sensor 717 and the enthalpy sensor 718, so as to provide parameters for subsequent control. The humidity of the air in the air outlet chamber 713 can be accurately collected by the second temperature and humidity sensor 723 to provide parameters for subsequent precise control.

[0043] In actual operation, the central control system of the microelectronics laboratory is connected to the first differential pressure switch 714, the first electric regulating water valve 715, the second electric regulating water valve 716, the first temperature and humidity sensor 717, the enthalpy sensor 718, the third electric regulating water valve 719, the fourth electric regulating water valve 720, the second differential pressure switch 721, the third differential pressure switch 722, and the second temperature and humidity sensor 723 through signal control lines to obtain the temperature and relative humidity values ​​in the Class 100 clean room in real time. Then draw the enthalpy and humidity diagram, and divide it into four meteorological zones according to the equal enthalpy lines and equal moisture content lines on the enthalpy and humidity diagram according to the indoor temperature and humidity parameter requirements, namely the air conditioning working condition zone, among which the air conditioning working condition zone I is the heating and humidification working condition, the air conditioning working condition zone II is the cooling and humidification working condition, and the air conditioning working condition zone III and the air conditioning working condition zone IV are the cooling and dehumidification working conditions. The air conditioning working condition corresponds to different external environments to realize the indoor temperature and humidity demand control. The fresh air air conditioning box takes the dew point temperature calculated by the required indoor temperature and relative humidity as the target value, controls the outdoor fresh air parameters according to the air-conditioning working conditions corresponding to different external environments, and then mixes it with the return air after passing through the aluminum honeycomb radiation panel, so as to achieve the indoor temperature and humidity indicators required by the clean room.

[0044] When the external ambient air is in the air conditioning working condition zone I, the outdoor air is heated and humidified: the second electric regulating water valve 716 of the first surface cooling chamber 77 and the third electric regulating water valve 719 on the reheat chamber 710 are closed, the first electric regulating water valve 715 on the preheat chamber 76 and the humidifier in the humidifying chamber 78 are opened, and the opening of the first electric regulating water valve 715 on the preheating chamber 76 is controlled according to the enthalpy value of the enthalpy sensor 718 in front of the humidifying chamber 78, and the opening of the third electric regulating water valve 719 in the reheat chamber 710 is controlled by the temperature setting value of the second temperature and humidity sensor 723 at the downstream air outlet section of the high-efficiency filter chamber 712, so that the fresh air that reaches the target parameters is evenly mixed with the return air treated by the anti-condensation aluminum honeycomb hot and cold radiation plate 8 when it is sent to the top of the clean room and sent to the clean room.

[0045] When the external ambient air is in the air conditioning condition zone II, the outdoor air is cooled and humidified: the first electric regulating water valve 715 on the preheating chamber 76 is closed, the second electric regulating water valve 716 of the first surface cooling chamber 77 and the humidifier in the humidifying chamber 78 are opened, and the opening of the second electric regulating water valve 716 in the first surface cooling chamber 77 is controlled based on the enthalpy value of the enthalpy sensor 718 in front of the humidifying chamber 78, and then the opening of the third electric regulating water valve 719 in the reheating chamber 710 is controlled by the temperature setting value of the second temperature and humidity sensor 723 in the downstream air outlet section of the high-efficiency filter chamber 712, so that the fresh air that reaches the target parameters is evenly mixed with the return air treated by the anti-condensation aluminum honeycomb hot and cold radiation plate 8 when it is delivered to the top of the clean room and delivered to the clean room.

[0046] When the outside ambient air is in the air conditioning working condition zone III and the air conditioning working condition zone IV, the outdoor air needs to be cooled and dehumidified: close the first electric regulating water valve 715 of the preheating chamber 76, open the second electric regulating water valve 716 of the first surface cooling chamber 77, the fourth electric regulating water valve 720 on the second surface cooling chamber 79, and the humidifier in the humidifying chamber 78, adjust the opening of the second electric regulating water valve 716 according to the set temperature behind the surface cooling coil in the first surface cooling chamber 77, use the medium-temperature chilled water to reduce the temperature and moisture content of the treated air, and then adjust the opening of the fourth electric regulating water valve 720 in the second surface cooling chamber 79 with low-temperature chilled water according to the air supply dew point through the humidifier in the humidifying chamber 78, so that the fresh air that reaches the target parameters is evenly mixed with the return air treated by the anti-condensation aluminum honeycomb cold and hot radiation plate 8 when it is sent to the top of the clean room and sent to the clean room. In this way, the precise control of the temperature and humidity requirements in the laboratory can be achieved according to the air conditioning working conditions corresponding to different external environments.

[0047] The fresh air clean air conditioning control system is reasonably designed and easy to operate. It can process the outdoor fresh air entering the laboratory, which is convenient for precise control of the constant temperature and humidity environment in the microelectronics laboratory. In actual operation, the EC fan installed in the fan room 711 first generates suction force, so that the outdoor air passes through the air inlet chamber 74, the first filter chamber 75, the preheating chamber 76, the first surface cooling chamber 77 in the first outer shell 71, the humidification chamber 78, the second surface cooling chamber 79, the reheating chamber 710 in the second outer shell 72, the fan chamber 711, the high-efficiency filter chamber 712, and the air outlet chamber 713 in the third outer shell 73, and finally enters the indoor of the microelectronics laboratory through the outdoor air distribution device 5. When outdoor air passes through the first filter chamber 75, the large particles of impurities, dust and polluted chemical gases that may be contained in the outdoor air are filtered by the filter assembly installed in the first filter chamber 75, and then the air enters the preheating chamber 76, and the electric heating tube installed in the preheating chamber 76 preheats the air to a set temperature, and then enters the first surface cooling chamber 77, and the humidity of the air is controlled by the evaporating coil installed in the first surface cooling chamber 77, and then enters the humidifying chamber 78 to adjust the humidity of the air again, and the humidified air enters the second surface cooling chamber 79, and the humidity is accurately controlled again by the evaporating coil installed in the second surface cooling chamber 79, and the air with accurately controlled humidity is transported to the reheating chamber 710 for accurate temperature adjustment, and then is induced by the EC fan in the fan chamber 711, and after being efficiently filtered by the high-efficiency filter in the high-efficiency filter chamber 712, it enters the microelectronics laboratory through the air outlet chamber 713, providing the microelectronics laboratory with fresh air with stable temperature and humidity, reducing the humidity and temperature fluctuations of the fresh air, and facilitating the precise control of the constant temperature and humidity environment in the microelectronics laboratory.

[0048] (ii) This high-precision constant temperature and humidity microelectronic Class 100 clean laboratory automatic control system also includes: FFU air volume and floor return air volume control system, which is used to fine-tune the air volume by grouping the system according to the on-site situation, by installing a wind speed sensor 219 in the FFU filter unit on the blowing surface, installing an electric air volume regulating valve 6 under the anti-static floor of the return air, setting a suitable surface wind speed on the touch screen system, and detecting the surface wind speed of the system laminar flow in real time. The two groups of FFU filter units increase or decrease the fan air volume in real time according to the surface wind speed feedback from the surface wind speed sensor 219 to achieve FFU air volume fine-tuning control, and the opening of the return air electric air volume regulating valve 6 is appropriately fine-tuned to make the wind speed at the FFU supply air level and the floor return air level in the laboratory uniform and consistent.

[0049] In this FFU air volume and floor return air volume control system, each FFU filter unit is controlled by a controller. The controller is installed on the FFU filter unit, obtains working power directly from the FFU filter unit, and is connected to the FFU filter unit motor locally with a one- or two-core cable to provide speed control power for the motor. The controller can detect the motor status and generate status information. Each FFU filter unit controller has an RS485 interface for communicating with the central controller, receiving commands and returning motor status. On a twisted pair cable, up to 256 FFU controllers are allowed to be connected at the same time, and the controllers are distinguished by address codes. In other words, 256 FFUs can be controlled at the same time to form a network. The central controller then communicates with the master control system through TCP / IP. The master control system can control each FFU filter unit or control the FFU filter unit in groups and display the working status and fault information of the FFU filter unit. The system has less wiring and is easy to maintain in the future. If one FFU filter unit fails, it will not affect the work of other FFU filter units.

[0050] Reference Figures 3 to 11As shown, the FFU air volume and floor return air volume control system includes: a laboratory exterior wall assembly 4, which is a closed space for realizing the external separation of the microelectronics laboratory. A laboratory interior wall assembly 1 installed in the laboratory exterior wall assembly 4, and an air duct is formed between the laboratory exterior wall assembly 4 and the laboratory interior wall assembly 1, and outdoor fresh air and internal circulating air can flow in the air duct formed between the laboratory exterior wall assembly 4 and the laboratory interior wall assembly 1. An outdoor air distribution device 5 is installed on the outside of the top of the laboratory exterior wall assembly 4, and the outdoor air distribution device 5 is used to supplement fresh air into the microelectronics laboratory. An FFU air supply control system 2 is installed on the top of the laboratory inner wall assembly 1, and the FFU air supply control system 2 is composed of multiple FFU filter units installed on the top of the laboratory inner wall assembly 1 and distributed in a square matrix. The FFU filter units distributed in a square matrix in the FFU air supply control system 2 are divided into three independently controllable FFU air supply speed control combinations I 21, FFU air supply speed control combination II 22 and FFU air supply speed control combination III 23 according to different air supply areas, and a wind speed sensor 219 is installed at the air outlet of each FFU filter unit.

[0051] Reference Figure 6 Picture to Fig.11 As shown, the FFU filter unit includes an FFU filter unit body 211, a chemical purification module 213, a high-efficiency filter 214 and an aluminum profile keel assembly, wherein the aluminum profile keel assembly is formed by splicing four aluminum profile keels 218 end to end, and the aluminum profile keel 218 is fixedly connected at the end to end splicing by a keel connector 216, wherein each aluminum profile keel 218 is provided with a plug-in docking hook piece 2182 on both sides, and the aluminum profile plug-in 217 is fixed on the aluminum profile keel 218 and protrudes outward after being fitted with the plug-in docking hook piece 2182 through the hook position, and each aluminum profile keel 218 is provided with a top hook groove 2181 at the top, and the bottom of the suspension rod assembly 215 is embedded in the aluminum profile keel 218 through a T-screw 2153. The top of the hanger assembly is suspended on the top plate of the laboratory exterior wall assembly in the top hook groove 2181 of the profile keel 218. The hanger assembly 215 includes a hanger 2151, a hanger mounting frame 2152 and a T-screw 2153. The top of the T-screw 2153 is locked and installed on the bottom of the hanger mounting frame 2152, and the T-end of the T-screw 2153 is embedded and installed in the top hook groove 2181 of the aluminum profile keel 218. The bottom of the hanger 2151 is locked and fixed on the top of the hanger mounting frame 2152, and the top of the hanger 2151 is suspended on the top plate of the laboratory exterior wall assembly. The above structural design can facilitate the rapid installation of the hanger assembly 215, the aluminum profile keel 218 and the top plate. Each aluminum profile keel 218 is suspended on the top plate of the laboratory exterior wall assembly through two suspension rod assemblies 215 to ensure that the lifting of each aluminum profile keel 218 is balanced and stable.

[0052] The high efficiency filter 214 is fitted on the bottom of the chemical purification module 213, and the chemical purification module 213 is fitted on the bottom of the FFU filter unit body 211. The four ends of the high efficiency filter 214 are respectively placed on the four aluminum profile inserts 217 inserted into the four aluminum profile keels 218. Two stainless steel safety pins 212 are respectively installed on the front and rear sides of the FFU filter unit body 211. Each stainless steel safety pin 212 is installed with a pin protruding outward. During the actual installation, after the FFU filter unit body 211 is installed, the pin of the stainless steel safety pin 212 remains in a protruding state, which can prevent the pin on the safety pin 212 from being held by other intact aluminum profile inserts 217 during the falling process of the FFU filter unit body 211 when a problem occurs, so as to ensure that no safety accidents will occur. A handle 2110 is installed on the top of the FFU filter unit body 211 to facilitate the transportation of the FFU filter unit body 211. A wind speed sensor 219 is installed at the bottom of the high efficiency filter 214 to facilitate accurate monitoring of the wind speed at the high efficiency filter 214 .

[0053] In this embodiment, the FFU filter unit body 211 includes a housing 2111, and a fan 2113 is installed in the housing 2111. An air inlet 2112 is provided at the top of the housing 2111 and directly opposite to the fan 2113, and a guide plate 2114 is installed at the air outlet of the fan 2113. In actual operation, the air of the outdoor air distribution device 5 is sucked from the air inlet 2112 by the operation of the fan 2113, and the air volume of the air can be controlled by controlling the power of the fan 2113, and the air is sent to the laboratory inner wall assembly 1 after being guided by the guide plate 2114.

[0054] In this embodiment, the chemical purification module 213 is filled with a fine aluminum oxide filter substrate with a high specific surface area and multiple micropores, and the surface of the aluminum oxide filter substrate is infiltrated with strongly oxidized potassium permanganate and potassium hydroxide. In actual operation, potassium permanganate and potassium hydroxide molecules fully penetrate and firmly adsorb on the inner surface of the micropores of the aluminum oxide filter substrate. When acidic and organic chemical gas molecules pass through these capillary pores, through redox and neutralization reactions, various acidic chemical pollutant gases and volatile organic pollutant gases generated during the manufacturing and cleaning of microelectronic components can be efficiently removed, such as chlorine, HCL, HF, H2NO3, hydrogen bromide, silane, dichlorodihydrosilane, disilane, boron trifluoride, phosphine, arsine, etc. The harmless salt solids generated remain in the micropores of the substrate and do not form hazardous waste. The present invention adds a special chemical purification module 213. With more than 300 ventilation cycles per hour, the ultra-efficient (99.9995% purification efficiency) particle purification system and the specially formulated chemical purification module 213 comprehensive technology application ensure the 100-level cleanliness of the air in the microelectronics laboratory and low-concentration chemical pollution gases, reducing the interference factors in the process of microelectronic chip component experimental samples.

[0055] The present invention greatly facilitates the installation and disassembly of the FFU fan filter unit through the structural design of the FFU filter unit. During the actual installation, first use the keel connector 216 to connect the four aluminum profile keels 218 end to end to form an aluminum profile keel assembly, and then use the suspension rod assembly 215 to hang the assembled aluminum profile keel assembly on the top plate of the laboratory, and then install the high-efficiency filter 214, chemical purification module 213 and FFU filter unit body 211 into an integrated FFU assembly, and then place it on the elevator platform, and use the elevator platform to lift the above FFU assembly through the frame hole in the center of the aluminum profile keel assembly to the top of the aluminum profile keel assembly, and then use the aluminum profile insert 215 to hang the assembled aluminum profile keel assembly on the top plate of the laboratory. 17 is inserted obliquely into the groove of the plug-in docking hook piece 2182 of the aluminum profile keel 218, the aluminum profile plug-in 217 is rotated and pushed horizontally, moved up and pulled outward, and moved down and pushed inward, so that the plug-in docking hook piece 2182 is tightly hooked with the hook position of the aluminum profile plug-in 217, and the aluminum profile plug-in 217 is tightly connected to the aluminum profile keel 218. The aluminum profile plug-in 217 serves as a support for the FFU assembly, and then the lift platform is controlled to descend. During the descent of the lift platform, the FFU assembly is placed on the aluminum profile plug-in 217 protruding outward to support the FFU assembly. When the FFU assembly needs to be disassembled, just use the lifting platform to lift up the FFU assembly, reverse the operation on the aluminum profile insert 217, separate the aluminum profile insert 217 from the aluminum profile keel 218, and then use the lifting platform to lower the FFU assembly from the frame hole in the center of the aluminum profile keel assembly to the ground, which greatly facilitates the installation and disassembly of the FFU fan filter unit.

[0056] In this embodiment, the FFU air volume and floor return air volume control system also includes a floor return air control system 3 installed at the bottom of the laboratory inner wall assembly 1, and the floor return air control system 3 is composed of multiple anti-static floors installed at the bottom of the laboratory inner wall assembly and distributed in a square matrix. Air holes are evenly opened on the surface of each anti-static floor. The anti-static floors distributed in a square matrix in the floor return air control system are divided into three independently controllable ground return air speed control combinations I31, ground return air speed control combination II32 and ground return air speed control combination III33 according to different return air areas. An electric air volume regulating valve 6 is installed under each anti-static floor. In this embodiment, the FFU air supply speed control combination I21 corresponds to the peripheral unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination I31 in the floor return air control system 3; the FFU air supply speed control combination II22 corresponds to the middle unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination II32 in the floor return air control system 3; the FFU air supply speed control combination III23 corresponds to the central unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination III33 in the floor return air control system 3. By correspondingly setting the FFU supply air speed control combination Ⅰ21 and the ground return air speed control combination Ⅰ31, the FFU supply air speed control combination Ⅱ22 and the ground return air speed control combination Ⅱ32, as well as the FFU supply air speed control combination Ⅲ23 and the ground return air speed control combination Ⅲ33, it is convenient to control the wind speed in different areas of the FFU supply air layer and the floor return air layer, so as to form stable and uniform supply air speed and return air speed.

[0057] The central controller is electrically connected to each FFU filter unit, wind speed sensor 219, and electric air volume regulating valve 6 respectively. The central controller sets the return air volume of the electric air volume regulating valve 6 under the corresponding anti-static floor according to the wind speed data collected by the wind speed sensor 219, so that the wind speed at the FFU supply air level and the floor return air level is uniform.

[0058] This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can ensure Class 100 air cleanliness and low concentration of chemical pollutants in the microelectronics laboratory through the innovative design of FFU air volume and floor return air volume control system, reduce the interference factor in the microelectronic chip component experimental sample process and improve the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine-tuning system ensures the uniformity of air volume and wind speed from top to bottom. During actual operation, the processed air outside is first distributed through the outdoor air distribution device 5 through the air duct between the laboratory outer wall assembly 4 and the top of the laboratory inner wall assembly 1 to the FFU air supply control system 2 installed on the top of the laboratory inner wall assembly 1. The FFU air supply control system 2 is composed of a plurality of FFU filter units installed on the top of the laboratory inner wall assembly and distributed in a square matrix, and is divided into three independently controllable FFU air supply speed control combinations Ⅰ21, FFU air supply speed control combination Ⅱ22 and FFU air supply speed control combination Ⅲ23 according to different air supply areas. By independently controlling each FFU filter unit in the FFU air supply speed control combination Ⅰ21, FFU air supply speed control combination Ⅱ22 and FFU air supply speed control combination Ⅲ23, the air volume and wind speed of the corresponding air supply areas of the FFU air supply speed control combination Ⅰ21, FFU air supply speed control combination Ⅱ22 and FFU air supply speed control combination Ⅲ23 can be controlled (the wind speed can be controlled by the air supply speed control combination installed in the FFU filter unit). The wind speed sensor at the air outlet of the group is obtained), and then the air volume and wind speed of the corresponding return air areas of the ground return air speed control combination I31, the ground return air speed control combination II32 and the ground return air speed control combination III33 are controlled by controlling each electric air volume regulating valve 6 in the ground return air speed control combination I31, the ground return air speed control combination II32 and the ground return air speed control combination III33, so that the wind speeds at the FFU supply air level and the floor return air level are uniform, which overcomes the problem in the prior art that when the internal circulation wind in the laboratory is returned from the small holes in the anti-static floor at the bottom of the laboratory inner wall assembly 1 to the air duct formed by the inner and outer walls of the laboratory and then flows back to the space between the FFU fan filter unit and the top plate of the laboratory outer wall assembly, the wind pressure decreases due to the air duct structure, resulting in uneven return air speed on the anti-static floor with holes in the entire laboratory and uneven wind speed on the entire FFU supply air surface, and the greater the air volume and wind speed are, the fluctuation of air flow is reduced, and the quality stability of chip products is improved.

[0059] (III) This high-precision constant temperature and humidity microelectronic Class 100 clean laboratory automatic control system also includes: a CO2 comfort exhaust and supply air indoor positive pressure control system. The CO2 comfort exhaust and supply air indoor positive pressure control system detects the CO2 concentration in the laboratory in real time through the CO2 sensor and pressure difference sensor installed in the laboratory. When the CO2 concentration is too high, the fresh air volume of the system is increased in real time. When the CO2 concentration is in a comfortable range, the fresh air volume is adjusted back. While adjusting the fresh air volume, the pressure in the laboratory is detected in real time through the pressure difference sensor, and the exhaust valve opening is adjusted in real time according to the pressure parameters to control the comfort of the laboratory and the positive pressure stability of the system.

[0060] In this embodiment, the exhaust air adopts the method of upper air supply and lower air return. The air supply is processed by the fresh air clean air conditioning control system and then sent to the laboratory. The air supply volume per person is not less than 40m 3 / h configuration. The system detects CO2 concentration in real time. When the CO2 concentration is too high, the system's fresh air volume is increased in real time. When the CO2 concentration is in a comfortable range, the fresh air volume is adjusted back. While adjusting the fresh air volume, the system detects the room pressure in real time through the pressure difference sensor, and adjusts the exhaust valve opening in real time according to the pre-pressure parameters to control the comfort of the laboratory and the positive pressure stability of the system. The indoor air is connected to the exhaust main pipe of the entire laboratory through the exhaust valve, and is discharged into the atmosphere after purification.

[0061] (IV) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system also includes: a hot and cold radiation panel flow control system, which is arranged into four groups and respectively installed on the anti-condensation aluminum honeycomb hot and cold radiation panels 8 on the inner side of the outer wall, the outer side of the inner wall, the inner side of the inner wall and the mezzanine ceiling of the laboratory. The hot and cold radiation panel flow control systems are respectively electrically connected to the electric regulating water valves and temperature sensors at the water outlet and water inlet at the top of the cold circuit pipe installed on the anti-condensation aluminum honeycomb hot and cold radiation panels 8. The hot and cold radiation panel flow control system controls the opening of the electric regulating water valve in real time according to the return water temperature, controls the flow of the hot and cold radiation panels, realizes the adjustment of the return water temperature, and obtains the optimal water flow.

[0062] Reference Fig.12 and Fig.13As shown, the anti-condensation aluminum honeycomb hot and cold radiation panel includes: an electrostatically sprayed aluminum plate 81, an aluminum honeycomb radiation plate 82 and a water-cooling loop pipe 83. The water-cooling loop pipe 83 is embedded and installed in the aluminum honeycomb radiation plate 82. The water-cooling loop pipe 83 is a copper pipe that is bent once and has no disconnections. The above features ensure that there is no water seepage or leakage in the aluminum honeycomb radiation plate 82 that requires maintenance. The top water outlet and water inlet of the water-cooling loop pipe 83 extend to the outside of the aluminum honeycomb radiation plate 82, and the gap between the water-cooling loop pipe 83 and the aluminum honeycomb radiation plate 82 is filled with thermal conductive sealant 85 to ensure that the water-cooling loop pipe 83 and the aluminum honeycomb radiation plate 82 have good sealing at the joint. The top water outlet and water inlet of the water-cooling loop pipe 83 are both installed with water pipe joints. The water outlet and water inlet at the top of the water-cooling loop pipe 83 are connected to the external circulating water pipeline through the water pipe joint to facilitate water injection and circulation into the water-cooling loop pipe 3. The water outlet and water inlet at the top of the cold loop pipe 83 are both installed with electric regulating water valves and temperature sensors, and are connected to the flow control system of the hot and cold radiation plates. The honeycomb holes of the aluminum honeycomb radiation panel 82 are filled with desiccant 84, and the front and rear electrostatically sprayed aluminum panels 81 are respectively mounted on the front and rear sides of the aluminum honeycomb radiation panel 82. By filling the desiccant 84 in the honeycomb holes of the aluminum honeycomb radiation panel 82, the air in the honeycomb holes of the aluminum honeycomb radiation panel 82 sealed by the electrostatically sprayed aluminum panels 81 on both sides is isolated from the outside and is always in a dry state without condensation or water seepage. The aluminum honeycomb radiation panel 82 is pre-buried with a wiring groove 86 that runs through the top and bottom of the aluminum honeycomb radiation panel 82, which reduces the construction difficulty of threading wires or data transmission lines during installation and enhances the aesthetics of the wiring.

[0063] The anti-condensation aluminum honeycomb cold and hot radiation plate has a reasonable design and a simple structure. It can maintain continuous conduction, radiation or absorption and convection of cold and heat, and prevent condensation and moisture on the surface of the plate. In actual operation, cooling water with a temperature close to that controlled by the air conditioner can flow in the water cooling loop pipe 83, and the cold and heat are conducted, radiated or absorbed by the aluminum honeycomb radiation plate 82, so that the temperature of the surface of the electrostatically sprayed aluminum plate 81 can always be kept close to the temperature controlled by the air conditioner, thereby preventing condensation and moisture on the surface of the electrostatically sprayed aluminum plate 81. Since the surface of the electrostatically sprayed aluminum plate 81 is subjected to electrostatic powder spraying, the heat radiation surface area of ​​the aluminum honeycomb radiation plate 82 is increased. At the same time, the honeycomb holes of the aluminum honeycomb radiation plate 82 are filled with desiccant 84, so that the air in the honeycomb holes of the aluminum honeycomb radiation plate 82 sealed by the electrostatically sprayed aluminum plates 81 on both sides is isolated from the outside and is always in a dry state, and condensation and water seepage will not occur, further improving the effect of preventing condensation and moisture on the surface, which is conducive to the precise control of the constant temperature and humidity environment in the microelectronics laboratory.

[0064] (V) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system also includes: an air-conditioning water circulation control system, which uses a three-position floating point control method to adjust the opening of the bypass electric butterfly valve installed on the laboratory circulating water supply pipe and return pipe, so that the pressure difference between the laboratory circulating water supply pipe and return pipe is always maintained within the set value allowable error range. In actual operation, the circulating water pump is a backup for dual purposes. When no failure occurs, the system will automatically select the pump with the shorter running time to start the next time the water pump is started according to the running time of the water pump. When a failure occurs, the system will ignore the running time strategy and start each water pump immediately to minimize the heat load on the Fengleng module machine caused by the water pump failure.

[0065] (VI) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system also includes: a lighting system, which controls the laboratory lighting through a touch screen control or a panel switch.

[0066] (VII) This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system also includes: a central control system, which is respectively connected to the fresh air clean air conditioning control system, FFU air volume and floor return air volume control system, CO2 comfort exhaust and supply air indoor positive pressure control system, cold and hot radiation panel flow control system, air conditioning water circulation control system and lighting system. The central control system serves as the control brain of this high-precision constant temperature and humidity microelectronics Class 100 clean laboratory, and is mainly used to coordinate the fresh air clean air conditioning control system, FFU air volume and floor return air volume control system, CO2 comfort exhaust and supply air indoor positive pressure control system, cold and hot radiation panel flow control system, air conditioning water circulation control system and connected lighting system to operate according to the set program.

[0067] This high-precision constant temperature and humidity microelectronics Class 100 clean laboratory automatic control system can achieve precise control of the constant temperature and humidity and uniform wind speed environment in the microelectronics laboratory through the innovative design of the fresh air clean air conditioning control system, FFU air volume and floor return air volume control system, CO2 comfort exhaust and supply air indoor positive pressure control system, hot and cold radiation panel flow control system, air conditioning water circulation control system and lighting system, ensuring the Class 100 cleanliness and low concentration of chemical pollution gas in the microelectronics laboratory, reducing the interference factor in the microelectronic chip component experimental sample process.

[0068] The above description is only a preferred embodiment of the present invention, but the present invention should not be limited to the contents disclosed in the embodiment and the drawings, so any equivalent or modification completed without departing from the spirit disclosed in the present invention shall fall within the scope of protection of the present invention.

Claims

1. A high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system, characterized by include: A fresh air clean air conditioning control system, which is used to obtain the temperature and relative humidity values ​​in a Class 100 clean room in real time, and draw a psychrometric diagram. According to the indoor temperature and humidity parameter requirements, the psychrometric diagram is divided into different meteorological zones according to the isoenthalpy lines and isohumidity lines. Then, the dew point temperature calculated based on the required indoor temperature and relative humidity is used as the target value. Then, according to the air conditioning working conditions corresponding to different external environments, the outdoor fresh air parameters are controlled to achieve the indoor temperature and humidity indicators required by the clean room. FFU air volume and floor return air volume control system, the FFU air volume and floor return air volume control system is used to fine-tune the air volume according to the on-site situation group system, by installing a wind speed sensor in the FFU filter unit on the blowing surface, installing an electric air volume regulating valve under the anti-static floor of the return air, setting a suitable surface wind speed on the touch screen system, and real-time detection of the surface wind speed of the system laminar flow. The two groups of FFU filter units increase or decrease the fan air volume in real time according to the surface wind speed feedback from the surface wind speed sensor to achieve FFU air volume fine-tuning control, and the opening of the return air electric air volume regulating valve is then appropriately fine-tuned to make the wind speed of the FFU supply air layer and the floor return air layer in the laboratory uniform; the FFU air volume and floor return air volume control system includes a laboratory exterior wall combination body; a laboratory inner wall assembly installed in the laboratory outer wall assembly, an air duct is formed between the laboratory outer wall assembly and the laboratory inner wall assembly; an outdoor wind distribution device installed on the outside of the top of the laboratory outer wall assembly; an FFU air supply control system installed on the top of the laboratory inner wall assembly, the FFU air supply control system is composed of a plurality of FFU filter units installed on the top of the laboratory inner wall assembly and distributed in a square matrix, the FFU filter units distributed in a square matrix in the FFU air supply control system are divided into three independently controllable FFU air supply speed control combinations I, FFU air supply speed control combination II and FFU air supply speed control combination III according to different air supply areas, and a wind speed sensor is installed at the air outlet of each FFU filter unit; A floor return air control system installed at the bottom of the laboratory inner wall assembly, the floor return air control system is composed of a plurality of anti-static floors installed at the bottom of the laboratory inner wall assembly and distributed in a square matrix, each anti-static floor surface is evenly provided with air holes, the anti-static floors distributed in a square matrix in the floor return air control system are divided into three independently controllable ground return air speed control combinations I, ground return air speed control combination II and ground return air speed control combination III according to different return air areas, and an electric air volume regulating valve is installed under each anti-static floor; a central controller, the central controller is electrically connected to each FFU filter unit, wind speed sensor, and electric air volume regulating valve respectively, and the central controller sets the return air volume of the electric air volume regulating valve under the corresponding anti-static floor according to the wind speed data collected by the wind speed sensor, so that the wind speeds at the FFU air supply level and the floor return air level are uniform; CO2 comfort exhaust and supply air indoor positive pressure control system, the CO2 comfort exhaust and supply air indoor positive pressure control system detects the CO2 concentration in the laboratory in real time through the CO2 sensor and pressure difference sensor installed in the laboratory. When the CO2 concentration is too high, the fresh air volume of the system is increased in real time. When the CO2 concentration is in a comfortable range, the fresh air volume is adjusted back. While adjusting the fresh air volume, the pressure in the laboratory is detected in real time through the pressure difference sensor, and the exhaust valve opening is adjusted in real time according to the pressure parameters to control the comfort of the laboratory and the positive pressure stability of the system; The central control system is respectively connected with the fresh air clean air conditioning control system, the FFU air volume and floor return air volume control system and the CO2 comfort exhaust and supply air indoor positive pressure control system.

2. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as described in claim 1 is characterized in that: It also includes a flow control system for hot and cold radiation panels, which is divided into four groups and are respectively installed on the anti-condensation aluminum honeycomb hot and cold radiation panels on the inner side of the outer wall, the outer side of the inner wall, the inner side of the inner wall and the mezzanine ceiling of the laboratory. The hot and cold radiation panel flow control systems are respectively electrically connected to the electric regulating water valves and temperature sensors at the water outlet and water inlet on the top of the cold circuit pipe installed on the anti-condensation aluminum honeycomb hot and cold radiation panels. The hot and cold radiation panel flow control system controls the opening of the electric regulating water valve in real time according to the return water temperature, controls the flow of the hot and cold radiation panels, realizes the adjustment of the return water temperature, and obtains the optimal water flow.

3. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as described in claim 2 is characterized in that: The anti-condensation aluminum honeycomb hot and cold radiation plate includes an electrostatically sprayed aluminum plate, an aluminum honeycomb radiation plate and a water-cooling loop pipe, the water-cooling loop pipe is embedded and installed in the aluminum honeycomb radiation plate, the top water outlet and water inlet of the water-cooling loop pipe extend to the outside of the aluminum honeycomb radiation plate, and the gap at the joint between the water-cooling loop pipe and the aluminum honeycomb radiation plate is filled with thermal conductive sealant, the honeycomb holes of the aluminum honeycomb radiation plate are filled with desiccant, the front and rear electrostatically sprayed aluminum plates are respectively fitted on the front and rear sides of the aluminum honeycomb radiation plate, the top water outlet and water inlet of the water-cooling loop pipe are both installed with water pipe joints, the top water outlet and water inlet of the water-cooling loop pipe are connected to the external circulating water pipeline through the water pipe joint, and the top water outlet and water inlet of the cold loop pipe are both installed with electric regulating water valves and temperature sensors.

4. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 1, characterized in that: It also includes an air-conditioning water circulation control system and a lighting system. The air-conditioning water circulation control system adjusts the opening of the bypass electric butterfly valve installed on the laboratory circulating water supply main and return water main through a three-position floating point control method, so that the pressure difference between the laboratory circulating water supply main and return water main is always maintained within the allowable error range of the set value; the lighting system controls the lighting of the laboratory through touch screen control or panel switches.

5. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 1, characterized in that: The fresh air clean air conditioning control system includes an outdoor fresh air temperature and humidity processing device, which is composed of a first outer shell, a second outer shell and a third outer shell, wherein an air inlet chamber, a first filter chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the first outer shell along the gas flow direction, a filter assembly is installed in the first filter chamber, an electric heating pipe is installed in the preheating chamber, an evaporation coil is installed in the first surface cooling chamber, a humidification chamber, a second surface cooling chamber and a reheating chamber are sequentially arranged in the second outer shell along the gas flow direction, a humidifier is installed in the humidification chamber, an evaporation coil is installed in the second surface cooling chamber, an electric heating pipe is installed in the reheating chamber, and a fan chamber is sequentially arranged in the third outer shell along the gas flow direction. , a high-efficiency filter chamber and an air outlet chamber, an EC fan is installed in the fan chamber, and a high-efficiency filter is installed in the high-efficiency filter chamber; a first differential pressure switch is installed on the first outer shell between the air inlet chamber and the first filter chamber, a second differential pressure switch is installed at the air inlet of the fan chamber, and a third differential pressure switch is installed between the air outlet of the fan chamber and the high-efficiency filter chamber; a water inlet pipe and a water outlet pipe connected with the evaporating coil in the first surface cooling chamber are installed on the first outer shell at the first surface cooling chamber, and a first electric regulating water valve and a second electric regulating water valve are installed on the water inlet pipe and the water outlet pipe respectively; a first temperature and humidity sensor and an enthalpy sensor are installed on the second outer shell at the humidification chamber, and a second temperature and humidity sensor is installed on the third outer shell at the air outlet chamber.

6. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 1, characterized in that: The FFU air supply speed control combination I corresponds to the peripheral units of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination I in the floor return air control system; the FFU air supply speed control combination II corresponds to the middle units of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination II in the floor return air control system; the FFU air supply speed control combination III corresponds to the central unit of the FFU filter unit distributed in a square matrix, and corresponds to the return air area of ​​the floor return air speed control combination III in the floor return air control system.

7. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 1, characterized in that: The FFU filter unit includes an FFU filter unit body, a chemical purification module, a high-efficiency filter and an aluminum profile keel assembly. The aluminum profile keel assembly is formed by splicing four aluminum profile keels end to end. The end joints of the aluminum profile keels are fixedly connected by keel connectors. The left and right sides of each aluminum profile keel are provided with plug-in docking hooks. The aluminum profile plug-in is fixed on the aluminum profile keel and protrudes outward after fitting with the plug-in docking hook through the hook position. The top of each aluminum profile keel is provided with a top hook groove. The bottom of the suspension rod assembly is embedded in the top hook groove of the aluminum profile keel through a T-screw. The top of the suspension rod assembly is suspended on the top plate of the laboratory exterior wall assembly. The high-efficiency filter is fitted on the bottom of the chemical purification module. The chemical purification module is fitted on the bottom of the FFU filter unit body. The four end edges of the high-efficiency filter are respectively placed on the four aluminum profile plug-ins inserted into the four aluminum profile keels. The wind speed sensor is installed at the air outlet at the bottom of the high-efficiency filter.

8. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 7, characterized in that: Two stainless steel safety latches are respectively installed on the front and rear sides of the FFU filter unit body, and each stainless steel safety latch is installed with a pin protruding outward.

9. The high-precision constant temperature and humidity microelectronics 100-level clean laboratory automatic control system as claimed in claim 8, characterized in that: The hanger assembly includes a hanger, a hanger mounting frame and a T-screw. The top of the T-screw is locked and installed on the bottom of the hanger mounting frame, and the T-end of the T-screw is embedded and installed in the top hook groove of the aluminum profile keel. The bottom of the hanger is locked and fixed on the top of the hanger mounting frame. The top of the hanger is suspended on the top plate of the laboratory exterior wall assembly. Each aluminum profile keel is suspended on the top plate of the laboratory exterior wall assembly through two hanger assemblies. The FFU filter unit body includes an outer shell, and the fan is installed in the outer shell. An air inlet is arranged at the top of the outer shell opposite to the fan, and a guide vane is installed at the air outlet of the fan.

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