Micro-channel laser single-bar testing system refrigerant recovery device and recovery method
By designing a refrigerant recovery device for a microchannel laser single-bar testing system, the problems of high refrigerant consumption and residual pollution were solved, realizing automatic refrigerant recovery and reuse, reducing production costs and improving the test pass rate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Shandong Huaguang Optoelectronics Co. Ltd.
- Filing Date
- 2022-02-17
- Publication Date
- 2026-06-09
AI Technical Summary
In the single-bar testing process of microchannel lasers, the existing technology consumes a large amount of refrigerant, resulting in high production costs and low testing efficiency. Furthermore, refrigerant residues can contaminate the laser chip, affecting the pass rate.
A refrigerant recovery device for a microchannel laser single-bar testing system was designed, including a test base, a gas storage tank, a liquid drain tank, an exhaust tank, and a refrigeration unit. Through the combination of a liquid inlet, a liquid return port, a liquid inlet pipe, a liquid return pipe, a liquid drain pipe, and an exhaust pipe, the refrigerant is automatically recovered and reused. Automatic control is achieved using a PLC control system.
It enables automatic refrigerant recovery and reuse, reduces production costs, improves testing efficiency and pass rate, reduces labor intensity, and achieves a recovery rate of over 80%.
Smart Images
Figure CN116659125B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a refrigerant recovery device and method for a single-bar testing system for microchannel lasers, belonging to the field of semiconductor laser technology. Background Technology
[0002] Due to their advantages such as small size, light weight, high electro-optical conversion efficiency, long lifespan, and high reliability, semiconductor lasers have gradually replaced gas and solid-state lasers in fields such as communications, medical, display, industrial manufacturing, and security, and their application scope is gradually expanding.
[0003] Microchannel semiconductor lasers (MCCs) incorporate cooling liquid channels, resulting in higher heat dissipation efficiency. Microchannel packaged semiconductor lasers can operate in both CW (continuous wave) and high duty cycle QCW (quadrant continuous wave) modes. Reliability verification is required for packaged MCCs. Typically, a certain number of MCC lasers are first stacked and subjected to aging screening. After aging, individual MCC lasers undergo single-bar testing, which involves observing changes in parameters such as laser power and wavelength under specific voltage and current conditions to eliminate defective devices.
[0004] Microchannel lasers typically have high power, generating a significant amount of heat during testing. This high temperature can cause the laser to burn out if not cooled promptly. Therefore, during single-bar testing, a certain amount of refrigerant needs to be introduced into the laser to dissipate the generated heat in a timely manner.
[0005] The commonly used cooling method involves fixing the microchannel laser to a test fixture, then introducing pentafluoropropane refrigerant into the fixture to lower the laser to a certain temperature before testing. After testing, the refrigerant flow is stopped, and the residual pentafluoropropane in the laser and fixture is directly expelled using gas. Finally, the laser is removed from the fixture, completing the microchannel laser testing. This process consumes a certain amount of pentafluoropropane for each laser tested. In the mass production of microchannel lasers, a large amount of pentafluoropropane is consumed, with each kilogram costing hundreds of yuan. The refrigerant consumption during testing represents a significant portion of production costs. Furthermore, operators need to frequently replenish the refrigerant, increasing labor intensity and impacting production efficiency. Moreover, after purging the pentafluoropropane, a certain pressure of gas and residual pentafluoropropane remains inside the fixture. When removing the laser, the gas pressure blows out the residual pentafluoropropane, potentially contaminating the laser chip and affecting the laser's yield. Therefore, this invention is proposed. Summary of the Invention
[0006] To address the shortcomings of existing technologies, this invention provides a refrigerant recovery device for a microchannel laser single-bar testing system. This device has a simple structure, is easy to operate, and has high production efficiency. It can automatically recover and reuse refrigerant, reducing production costs and improving the test pass rate.
[0007] The present invention also provides a method for recovering the refrigerant from the above-mentioned microchannel laser single-bar test system refrigerant recovery device.
[0008] The technical solution of the present invention is as follows:
[0009] A refrigerant recovery device for a microchannel laser single-bar testing system includes a testing base, a gas storage tank, a liquid discharge tank, an exhaust tank, and a refrigerator.
[0010] The test base is equipped with a liquid inlet and a liquid return port. The liquid inlet is connected to the refrigeration unit through a liquid inlet pipe, and a gas storage tank is connected to the liquid inlet pipe. The liquid return port is connected to the refrigeration unit through a liquid return pipe, and a liquid discharge tank and an air vent are connected to the liquid return pipe through a liquid drain pipe. The bottom of the liquid discharge tank and the air vent are connected to the refrigeration unit through a recovery pipe.
[0011] Preferably, an inlet valve is provided on the inlet pipe, and a gas storage tank is connected to the inlet pipe between the inlet valve and the inlet hole. A vent valve is provided on the gas storage tank connecting pipe, and a return valve is provided on the return pipe. The inlet valve and the return valve are used to control the flow rate of the refrigerant and the on / off and stop of the refrigerant. A drain tank and an exhaust tank are respectively connected to the return pipe between the return valve and the return hole through a drain pipe. A drain valve and an exhaust valve are respectively provided on the drain pipe connecting the drain tank and the exhaust tank. A recovery valve I and a recovery valve II are respectively provided on the recovery pipe connecting the drain tank and the exhaust tank.
[0012] Preferably, pressure gauge I and pressure gauge II are respectively installed on the liquid discharge tank and the air discharge tank.
[0013] Preferably, the drain tank, the vent tank, and the refrigeration unit are respectively equipped with level gauge I, level gauge II, and level gauge III.
[0014] Preferably, the drain tank and the exhaust tank are each connected to a filtration system via a pressure relief pipe. When the drain tank and the exhaust tank are depressurized, the filtration system filters the discharged gas. The pressure relief pipe connected to the drain tank is equipped with a pressure relief valve I and a shut-off valve I. When the pressure in the drain tank is greater than the set pressure value, the pressure relief valve I opens to release pressure. When the pressure in the drain tank is less than the set pressure value, the pressure relief valve I closes, ensuring that the pressure in the drain tank is always less than the pressure of the gas in the storage tank, thus facilitating the gas to blow the refrigerant back into the drain tank. The pressure relief pipe connected to the exhaust tank is equipped with a pressure relief valve II and a shut-off valve II. The exhaust tank is used for secondary refrigerant recovery, recovering the residual refrigerant in the test base, and simultaneously releasing the gas pressure inside the laser test base and pipeline. When the pressure in the exhaust tank is greater than the set pressure value, the pressure relief valve II opens; when the pressure drops to the set pressure value, the pressure relief valve II closes.
[0015] Preferably, the positions of the liquid inlet and liquid return holes correspond to the liquid inlet and liquid return positions on the microchannel laser. The refrigerant enters the laser through the liquid inlet hole, then flows out through the internal channel of the laser and out through the liquid return hole of the test base, thereby cooling the laser.
[0016] Preferably, the gas storage tank uses compressed air or nitrogen at a pressure of 3-7 MPa. The gas in the storage tank can discharge the refrigerant from the test base, laser, and pipelines through the liquid inlet pipe.
[0017] Preferably, the vent valve, inlet valve, return valve, drain valve, exhaust valve, level gauge I, level gauge II, pressure gauge I, pressure gauge II, pressure relief valve I, pressure relief valve II, shut-off valve I, shut-off valve II, recovery valve I, recovery valve II, and level gauge III are all connected to the PLC control system for automatic control.
[0018] The refrigerant recovery method of the above-mentioned microchannel laser single-bar testing system includes the following steps:
[0019] (1) Fix the microchannel laser on the test base with the test fixture, open the inlet valve and the return valve, and the refrigerant in the refrigerator enters the inlet hole of the test base through the inlet pipe, then enters the microchannel laser through the inlet hole, then flows out through the return hole of the test base through the internal channel of the microchannel laser, and finally enters the refrigerator through the return pipe, so that the laser is always kept at a low temperature.
[0020] (2) Perform microchannel laser testing. After the test is completed, close the inlet valve and return valve to stop supplying refrigerant. Open the vent valve and drain valve at the same time. The gas in the gas tank blows the refrigerant sealed in the pipeline. It enters the inlet hole of the test base through the inlet pipe, then enters the microchannel laser through the inlet hole, and then flows out through the return hole of the test base through the internal channel of the microchannel laser. It enters the drain pipe and enters the drain tank through the drain valve to recover the refrigerant into the drain tank. Then close the vent valve and drain valve to complete one recovery of the refrigerant.
[0021] (3) When the exhaust valve is opened, the internal air pressure of the pipeline pushes the residual refrigerant through the drain pipe and into the exhaust tank through the exhaust valve to perform a second recovery of the refrigerant. After the recovery is completed, the exhaust valve is closed, the microchannel laser is removed from the test base, and the testing of other microchannel lasers is continued.
[0022] Preferably, in step (2), the pressure range of the drain tank is 1-3 MPa. When the pressure in the drain tank is greater than 3 MPa, the pressure relief valve I is opened to relieve pressure. When the pressure in the drain tank is less than 1 MPa, the pressure relief valve I is closed to ensure that the pressure in the drain tank is always less than the pressure of the gas in the gas storage tank, so as to facilitate the gas to blow the refrigerant back into the drain tank and ensure that the refrigerant is successfully recovered in one cycle.
[0023] In step (3), the pressure range of the exhaust tank is 0.05-0.3 MPa. When the pressure inside the exhaust tank is greater than 0.3 MPa, the pressure relief valve II opens. When the pressure inside the exhaust tank drops to 0.05 MPa, the pressure relief valve II closes. After the refrigerant is recovered once, the gas pressure inside the test base and the microchannel laser is still greater than 1 MPa, which is greater than the pressure inside the exhaust tank, ensuring that the residual refrigerant is discharged into the exhaust tank.
[0024] Preferably, when the refrigerant recovered in the drain tank reaches the set liquid level, the shut-off valve I closes to stop the automatic pressure relief of the drain tank, and the recovery valve I, drain valve and vent valve open to rapidly increase the internal pressure of the drain tank to the same level as the gas storage tank. The refrigerant in the drain tank enters the refrigeration unit through the recovery pipe to add liquid to the refrigeration unit. After the liquid level in the drain tank falls below the set height, the recovery valve I, drain valve and vent valve close, the shut-off valve I opens, and the gas pressure in the drain tank is released to the normal state.
[0025] When the refrigerant recovered in the exhaust tank reaches the set liquid level, shut-off valve II closes, stopping the automatic depressurization of the exhaust tank. Recovery valve II, exhaust valve, and vent valve open, causing the internal pressure of the exhaust tank to rise rapidly to the same level as the storage tank. The refrigerant in the exhaust tank enters the refrigeration unit through the recovery pipe to add liquid to the refrigeration unit. After the liquid level in the exhaust tank falls below the set height, recovery valve II, exhaust valve, and vent valve close, shut-off valve II opens, and the gas pressure in the exhaust tank is released to normal, allowing the microchannel laser testing to continue.
[0026] The beneficial effects of this invention are as follows:
[0027] 1. This invention has a simple structure, is easy to operate, and has high production efficiency. It can realize the automatic recycling and reuse of refrigerant, with a refrigerant recovery rate of over 80%, which greatly reduces production costs and improves the test pass rate.
[0028] 2. This invention achieves automated operation, automatically adding the recovered refrigerant into the refrigeration unit, reducing labor intensity and improving production efficiency.
[0029] 3. This invention solves the problem of refrigerant residue contamination of microchannel laser chips during testing by recycling the residual refrigerant inside the test fixture and microchannel laser, thereby increasing the pass rate of single-bar microchannel laser testing by more than 3%. Attached Figure Description
[0030] Figure 1 This is a schematic diagram of the structure of the present invention;
[0031] Figure 2 This is a schematic diagram of a microchannel laser.
[0032] The components are as follows: 1. Test base, 2. Liquid inlet, 3. Liquid return outlet, 4. Gas storage tank, 5. Venting valve, 6. Liquid inlet valve, 7. Liquid return valve, 8. Drain valve, 9. Exhaust valve, 10. Drain tank, 11. Exhaust tank, 12. Level gauge I, 13. Level gauge II, 14. Pressure gauge I, 15. Pressure gauge II, 16. Pressure relief valve I, 17. Pressure relief valve II, 18. Shut-off valve I, 19. Shut-off valve II, 20. Recovery valve I, 21. Recovery valve II, 22. Filtration system, 23. Refrigeration unit, 24. Level gauge III, 25. Liquid inlet, 26. Liquid outlet, 27. Liquid return outlet, 28. Liquid inlet pipe, 29. Liquid return pipe, 30. Drain pipe, 31. Recovery pipe, 32. Pressure relief pipe, 33. Microchannel laser, 34. Liquid inlet I, 35. Liquid return outlet I. Detailed Implementation
[0033] The present invention will be further described below with reference to the embodiments and accompanying drawings, but is not limited thereto.
[0034] Example 1:
[0035] like Figure 1-2 As shown, this embodiment provides a refrigerant recovery device for a microchannel laser single-bar testing system, including a test base 1, a gas storage tank 4, a drain tank 10, an exhaust tank 11, and a refrigerator 23.
[0036] The test base 1 is equipped with a liquid inlet 2 and a liquid return port 3. The liquid inlet 2 is connected to the liquid outlet 26 on the refrigeration unit 23 via a liquid inlet pipe 28. A gas storage tank 4 is connected to the liquid inlet pipe 28. The liquid return port 3 is connected to the liquid return port 27 on the refrigeration unit 23 via a liquid return pipe 29. A drain tank 10 and an exhaust tank 11 are connected to the drain pipe 29 via a drain pipe 30. The bottoms of the drain tank 10 and the exhaust tank 11 are connected to the liquid inlet 25 on the refrigeration unit 23 via recovery pipes 31. The refrigeration unit is existing industrial equipment.
[0037] A liquid inlet valve 6 is installed on the liquid inlet pipe 28. A gas storage tank 4 is connected to the liquid inlet pipe 28 between the liquid inlet valve 6 and the liquid inlet hole 2. A vent valve 5 is installed on the pipe connecting the gas storage tank 4. A return valve 7 is installed on the return pipe 29. The liquid inlet valve 6 and the return valve 7 are used to control the flow rate of the refrigerant and the on / off and stop of the refrigerant. A drain tank 10 and an exhaust tank 11 are connected to the return pipe between the return valve 7 and the return hole 3 through a drain pipe 30. A drain valve 8 and an exhaust valve 9 are installed on the drain pipe connecting the drain tank 10 and the exhaust tank 11, respectively. A recovery valve I 20 and a recovery valve II 21 are installed on the recovery pipe connecting the drain tank 10 and the exhaust tank 11, respectively.
[0038] Pressure gauge I14 and pressure gauge II15 are respectively installed on the drain tank 10 and the vent tank 11. Pressure gauge I14 and pressure gauge II15 are digital electric contact pressure gauges of model HC-Y810.
[0039] Liquid level gauges I12, II13, and III24 are respectively installed on the drain tank 10, the vent tank 11, and the refrigeration unit 23. When liquid level gauge III24 detects that the refrigerant level in the refrigeration unit is too low, additional refrigerant needs to be added.
[0040] The drain tank 10 and the exhaust tank 11 are each connected to a filtration system 22 via a pressure relief pipe 32. The filtration system 22 is a commercially available gas filtration device. When the exhaust tank and the drain tank are depressurized, the filtration system filters the discharged gas. The pressure relief pipe 32 connected to the drain tank 10 is equipped with a pressure relief valve I16 and a shut-off valve I18. When the pressure inside the drain tank 10 is greater than the set pressure value, the pressure relief valve I16 opens to release pressure. When the pressure inside the drain tank 10 is less than the set pressure value, the pressure relief valve I16 closes to ensure drainage. The pressure inside the tank is always lower than the pressure of the gas in the storage tank, which facilitates the gas blowing the refrigerant back into the drain tank. The pressure relief pipe 32 connected to the exhaust tank 11 is equipped with a pressure relief valve II 17 and a shut-off valve II 19 respectively. The exhaust tank 11 is used for secondary recovery of refrigerant, recovering the residual refrigerant in the test base 1, and releasing the gas pressure inside the laser test base and pipeline. When the pressure inside the exhaust tank 11 is greater than the set pressure value, the pressure relief valve II opens, and when the pressure drops to the set pressure value, the pressure relief valve II closes.
[0041] The positions of inlet hole 2 and return hole 3 correspond to the positions of inlet hole I 34 and return hole I 35 on the microchannel laser 33. The refrigerant enters the laser through the inlet hole, then flows out through the return hole of the test base via the internal channel of the laser, thereby cooling the laser.
[0042] The gas storage tank 4 uses compressed air or nitrogen at a pressure of 3-7 MPa. The gas in the gas storage tank 4 can discharge the refrigerant from the test base 1, laser and pipeline through the liquid inlet pipe 28.
[0043] The vent valve 5, inlet valve 6, return valve 7, drain valve 8, vent valve 9, level gauge I 12, level gauge II 13, pressure gauge I 14, pressure gauge II 15, pressure relief valve I 16, pressure relief valve II 17, shut-off valve I 18, shut-off valve II 19, recovery valve I 20, recovery valve II 21, and level gauge III 24 are all connected to the PLC control system for automatic control.
[0044] The refrigerant recovery method of the above-mentioned microchannel laser single-bar testing system includes the following steps:
[0045] (1) Fix the microchannel laser 33 on the test base 1 using a test fixture. The test fixture is the fixture used in the prior art, which is used to fix the microchannel laser. It will not be described in detail here. Open the inlet valve 6 and the return valve 7. The refrigerant in the refrigerator 23 enters the inlet hole 2 of the test base 1 through the inlet pipe 28, and then enters the microchannel laser 33 through the inlet hole 2. It then flows out through the return hole 3 of the test base 1 through the internal channel of the microchannel laser 33, and finally enters the refrigerator through the return pipe, so that the laser is always kept at a low temperature.
[0046] (2) Perform microchannel laser test. After the test is completed, close the inlet valve 6 and return valve 7 to stop supplying refrigerant. Open the vent valve 5 and drain valve 8 at the same time. The gas in the gas tank 4 blows the refrigerant sealed in the pipeline and enters the test base inlet hole 2 through the inlet pipe 28. Then it enters the microchannel laser 33 through the inlet hole 2. Then it flows out through the return hole 3 of the test base through the internal channel of the microchannel laser 33 and enters the drain pipe 30. It enters the drain tank 10 through the drain valve 8 and recovers the refrigerant into the drain tank 10. Then close the vent valve 5 and drain valve 8 to complete one recovery of the refrigerant.
[0047] (3) When the exhaust valve 9 is opened, the air pressure inside the pipeline pushes the residual refrigerant through the drain pipe and exhaust valve into the exhaust tank 11 to perform a second recovery of the refrigerant. After the recovery is completed, the exhaust valve 9 is closed, the microchannel laser 33 is removed from the test base, and the testing of other microchannel lasers continues.
[0048] Example 2:
[0049] A method for recovering refrigerant in a microchannel laser single-bar test system as described in Example 1, the difference being that in step (2), the pressure range of the drain tank 10 is 1-3 MPa. When the pressure inside the drain tank 10 is greater than 3 MPa, the pressure relief valve I16 is opened to relieve pressure. When the pressure inside the drain tank 10 is less than 1 MPa, the pressure relief valve I16 is closed to ensure that the pressure inside the drain tank is always less than the pressure of the gas in the gas storage tank, thereby facilitating the gas to blow the refrigerant back into the drain tank and ensuring that the refrigerant recovery is completed smoothly in one operation.
[0050] In step (3), the pressure range of exhaust tank 11 is 0.05-0.3 MPa. When the pressure inside exhaust tank 11 is greater than 0.3 MPa, pressure relief valve II 17 is opened. When the pressure inside exhaust tank 11 drops to 0.05 MPa, pressure relief valve II 17 is closed. After the refrigerant is recovered once, the gas pressure inside the test base and microchannel laser is still greater than 1 MPa, which is greater than the pressure inside the exhaust tank, ensuring that the residual refrigerant is discharged into the exhaust tank.
[0051] Example 3:
[0052] A refrigerant recovery method for a microchannel laser single-bar testing system as described in Example 1 differs in that, when the refrigerant recovered in the drain tank 10 reaches the set liquid level, the shut-off valve I18 closes, stopping the automatic pressure relief of the drain tank 10, and the recovery valve I20, drain valve 8, and vent valve 5 open, causing the internal pressure of the drain tank 10 to rapidly increase to the same level as the gas storage tank 4. The refrigerant in the drain tank 10 enters the refrigeration unit 23 through the recovery pipe to add liquid to the refrigeration unit 23. After the liquid level in the drain tank 10 falls below the set height, the recovery valve I20, drain valve 8, and vent valve 5 close, and the shut-off valve I18 opens, allowing the gas pressure in the drain tank to return to normal.
[0053] When the refrigerant recovered in the exhaust tank 11 reaches the set liquid level, the shut-off valve II 19 closes, stopping the automatic pressure relief of the exhaust tank 11. The recovery valve II 21, exhaust valve 9, and vent valve 5 open, causing the internal pressure of the exhaust tank 11 to rise rapidly to the same level as the gas storage tank 4. The refrigerant in the exhaust tank 11 enters the refrigeration unit 23 through the recovery pipe, adding liquid to the refrigeration unit 23. After the liquid level in the exhaust tank 11 falls below the set height, the recovery valve II 21, exhaust valve 9, and vent valve 5 close, and the shut-off valve II 19 opens, allowing the gas pressure in the exhaust tank 11 to return to normal, and the microchannel laser testing continues.
Claims
1. A refrigerant recovery device for a single-bar testing system of a microchannel laser, characterized in that, It includes a test base, a gas storage tank, a drain tank, an exhaust tank, and a refrigeration unit, among which, The test base is equipped with a liquid inlet and a liquid return port. The liquid inlet is connected to the refrigeration unit through a liquid inlet pipe, and a gas storage tank is connected to the liquid inlet pipe. The liquid return port is connected to the refrigeration unit through a liquid return pipe, and a liquid discharge tank and an air vent are connected to the liquid return pipe through a liquid drain pipe. The bottom of the liquid discharge tank and the air vent are connected to the refrigeration unit through a recovery pipe. An inlet valve is installed on the inlet pipe. A gas storage tank is connected to the inlet pipe between the inlet valve and the inlet hole. A vent valve is installed on the gas storage tank connecting pipe. A return valve is installed on the return pipe. A drain tank and an exhaust tank are connected to the return pipe between the return valve and the return hole via drain pipes. Drain valves and exhaust valves are installed on the drain pipes connecting the drain tank and the exhaust tank. Recovery valve I and recovery valve II are installed on the recovery pipes connecting the drain tank and the exhaust tank. Pressure gauge I and pressure gauge II are respectively installed on the liquid discharge tank and the air discharge tank; The drain tank, the vent tank, and the refrigeration unit are respectively equipped with level gauge I, level gauge II, and level gauge III; The drain tank and vent tank are each connected to a filtration system via pressure relief pipes. When the drain tank and vent tank are depressurized, the filtration system filters the discharged gas. The pressure relief pipe connected to the drain tank is equipped with a pressure relief valve I and a shut-off valve I. When the pressure in the drain tank is greater than the set pressure value, pressure relief valve I opens to release pressure. When the pressure in the drain tank is less than the set pressure value, pressure relief valve I closes to ensure that the pressure in the drain tank is always less than the pressure of the gas in the storage tank, thus facilitating the gas to blow the refrigerant back into the drain tank. The pressure relief pipe connected to the vent tank is equipped with a pressure relief valve II and a shut-off valve II. The vent tank is used for secondary refrigerant recovery, recovering the residual refrigerant in the test base and releasing the internal air pressure of the laser test base and pipeline. When the pressure in the vent tank is greater than the set pressure value, pressure relief valve II opens. When the pressure drops to the set pressure value, pressure relief valve II closes.
2. The refrigerant recovery device for the microchannel laser single-bar testing system as described in claim 1, characterized in that, The positions of the liquid inlet and liquid return holes correspond to the liquid inlet and liquid return positions on the microchannel laser.
3. The refrigerant recovery device for the microchannel laser single-bar testing system as described in claim 2, characterized in that, The gas storage tank uses compressed air or nitrogen at a pressure of 3-7 MPa.
4. The refrigerant recovery device for the microchannel laser single-bar testing system as described in claim 3, characterized in that, The vent valve, inlet valve, return valve, drain valve, exhaust valve, level gauge I, level gauge II, pressure gauge I, pressure gauge II, pressure relief valve I, pressure relief valve II, shut-off valve I, shut-off valve II, recovery valve I, recovery valve II, and level gauge III are all connected to the PLC control system.
5. A method for recovering the refrigerant in a microchannel laser single-bar testing system as described in claim 4, characterized in that, The steps are as follows: (1) Fix the microchannel laser on the test base with the test fixture, open the inlet valve and the return valve, and the refrigerant in the refrigerator enters the inlet hole of the test base through the inlet pipe, then enters the microchannel laser through the inlet hole, then flows out through the return hole of the test base through the internal channel of the microchannel laser, and finally enters the refrigerator through the return pipe, so that the laser is always kept at a low temperature. (2) Perform microchannel laser testing. After the test is completed, close the inlet valve and return valve to stop supplying refrigerant. Open the vent valve and drain valve at the same time. The gas in the gas tank blows the refrigerant sealed in the pipeline. It enters the inlet hole of the test base through the inlet pipe, then enters the microchannel laser through the inlet hole, and then flows out through the return hole of the test base through the internal channel of the microchannel laser. It enters the drain pipe and enters the drain tank through the drain valve to recover the refrigerant into the drain tank. Then close the vent valve and drain valve to complete one recovery of the refrigerant. (3) When the exhaust valve is opened, the internal air pressure of the pipeline pushes the residual refrigerant through the drain pipe and exhaust valve into the exhaust tank for the second recovery of the refrigerant. After the recovery is completed, the exhaust valve is closed, the microchannel laser is removed from the test base, and the testing of other microchannel lasers is continued.
6. The refrigerant recovery method of the microchannel laser single-bar testing system as described in claim 5, characterized in that, In step (2), the pressure range of the drain tank is 1-3 MPa. When the pressure in the drain tank is greater than 3 MPa, the pressure relief valve I opens to release pressure. When the pressure in the drain tank is less than 1 MPa, the pressure relief valve I closes. In step (3), the pressure range of the exhaust tank is 0.05-0.3 MPa. When the pressure inside the exhaust tank is greater than 0.3 MPa, the pressure relief valve II opens. When the pressure inside the exhaust tank drops to 0.05 MPa, the pressure relief valve II closes.
7. The refrigerant recovery method of the microchannel laser single-bar testing system as described in claim 6, characterized in that, When the refrigerant recovered in the drain tank reaches the set liquid level, the shut-off valve I closes, stopping the automatic pressure relief of the drain tank. The recovery valve I, the drain valve, and the vent valve open, raising the internal pressure of the drain tank to the same level as the gas storage tank. The refrigerant in the drain tank enters the refrigeration unit through the recovery pipe to add liquid to the refrigeration unit. When the liquid level in the drain tank falls below the set height, the recovery valve I, the drain valve, and the vent valve close, and the shut-off valve I opens, releasing the gas pressure in the drain tank to the normal state. When the refrigerant recovered in the exhaust tank reaches the set liquid level, the shut-off valve II closes, stopping the automatic depressurization of the exhaust tank. The recovery valve II, exhaust valve, and vent valve open, raising the internal pressure of the exhaust tank to the same level as the storage tank. The refrigerant in the exhaust tank enters the refrigeration unit through the recovery pipe, adding liquid to the refrigeration unit. When the liquid level in the exhaust tank falls below the set height, the recovery valve II, exhaust valve, and vent valve close, and the shut-off valve II opens, releasing the gas pressure in the exhaust tank to normal levels, allowing the microchannel laser testing to continue.