A graphite disk baking tray furnace for MOCVD

Abstract

This application relates to the field of metalorganic chemical vapor deposition, and particularly to a graphite disk baking furnace for MOCVD, which includes a graphite disk body, a furnace body for placing the graphite disk body to be cleaned, a heater arranged in the furnace body for heating the interior of the furnace body, a graphite disk rotating device arranged at the bottom of the furnace body, an intake pipe for inflating the interior of the furnace body and purging the surface of the graphite disk body, and an exhaust pipe for discharging the gas inside the furnace body; wherein, the graphite disk body is placed on the graphite disk rotating device, and the graphite disk rotating device can drive the graphite disk to rotate, and multiple intake pipes and multiple exhaust pipes are provided. This application has the effect of achieving a better cleaning effect on large-sized graphite disks.

Description

Technical Field

[0001] This application relates to the field of metal organic chemical vapor deposition, and particularly to a graphite disk baking furnace for MOCVD. Background Art

[0002] With the increasing demands in the LED lighting, display, and power semiconductor markets, the demand for metal organic chemical vapor deposition (MOCVD) equipment has also risen. During the epitaxial growth process of MOCVD, epitaxial growth materials such as GaN and AlN will inevitably adhere to the surface of the graphite disk, which serves as a substrate carrier. Since the graphite disk is of high value and needs to be recycled, the residual deposits on the graphite disk surface can lead to abnormal or even failed epitaxial growth. Currently, the traditional method in the industry to clean the graphite disk is to batch-put the graphite disks to be cleaned into a dedicated baking furnace. The graphite disks are vertically and fixedly placed on a dedicated graphite support, and the deposited epitaxial materials on the disk surface are removed through the combined action of baking at a temperature as high as 1350 - 1450 °C and air flow purging.

[0003] With the rapid expansion of the downstream market, higher requirements are put forward for the production capacity of MOCVD equipment and the cost of epitaxial wafers. Therefore, current MOCVD equipment is all developing towards the direction of producing more epitaxial wafers in one process. Along with this, the size of the graphite disk, which serves as an epitaxial wafer carrier, has increased, and the graphite disk size may continue to increase in the future. For small-sized graphite disks, a high-temperature baking furnace can achieve good temperature uniformity and the cleaning air flow can also be evenly distributed. However, if the size of the graphite disk to be cleaned is larger, the corresponding size of the baking furnace body will also increase accordingly. Based on the layout of a single air inlet pipe and outlet pipe in the existing baking furnace, during the baking process, there may be poor cleaning effects, inconsistent cleaning effects, or even no cleaning effects in some areas of individual graphite disks or on some parts of individual graphite disks. Using a graphite disk with incomplete cleaning for epitaxial growth will lead to poor epitaxial quality or failed epitaxial growth, resulting in high economic losses.

[0004] Regarding the above related technologies, the inventor believes that for large-sized graphite disks, the existing baking furnace may have the defect that the graphite disk may not be thoroughly cleaned due to uneven heating caused by its large size. Summary of the Invention

[0005] In order to achieve a better cleaning effect for large-sized graphite disks, this application provides a graphite disk baking furnace for MOCVD.

[0006] A graphite disk baking furnace for MOCVD provided by this application adopts the following technical solutions:

[0007] A graphite disk baking tray furnace for MOCVD, comprising a graphite disk body, a furnace body for placing the graphite disk body to be cleaned, a heater arranged in the furnace body for heating the interior of the furnace body, a graphite disk rotating device arranged at the bottom of the furnace body, an intake pipe for inflating the interior of the furnace body and purging the surface of the graphite disk body, and an exhaust pipe for discharging the gas inside the furnace body;

[0008] Wherein, the graphite disk body is placed on the graphite disk rotating device, and the graphite disk rotating device can drive the graphite disk to rotate. The intake pipe and the exhaust pipe are both provided with multiple pieces.

[0009] By adopting the above technical solution, when cleaning the large-size graphite disk body, the heater heats the interior of the furnace body. At the same time, the graphite disk rotating device drives the graphite disk body to rotate, and the rotation can make the graphite disk heat evenly. The intake pipe and the exhaust pipe are both provided with multiple pieces. The multiple intake pipes blow air towards the graphite disk body, and the surface substances on the graphite disk body after high-temperature decomposition are taken away by the cleaning gas under the heating action of the baking tray furnace after high-temperature decomposition, or after the cleaning gas entering from the intake pipe reacts chemically with the substances on the graphite disk surface, the reactants are taken away by the cleaning gas and finally discharged out of the furnace body through the exhaust pipe, achieving a good and uniform baking effect.

[0010] Preferably, the graphite disk rotating device includes a rotating motor, a driving rotating shaft connected to the driving shaft of the rotating motor, and a driven rotating shaft arranged with the driving rotating shaft. Fixed bearing seats are arranged at both ends of the driving rotating shaft and the driven rotating shaft close to the length direction of the furnace body. Fixed bearings are arranged in the fixed bearing seats. The driving rotating shaft and the driven rotating shaft are arranged in parallel, and fixing members for fixing the graphite disk body are arranged on both the driving rotating shaft and the driven rotating shaft.

[0011] By adopting the above technical solution, the driving shaft of the rotating motor drives the driving rotating shaft to rotate. At this time, the graphite disk body is fixed between the driving rotating shaft and the driven rotating shaft by the fixing member. When the driving rotating shaft rotates, the edge of the graphite disk body rubs against the driving rotating shaft, causing the driving rotating shaft to drive the fixing member to rotate with the axis of the driving shaft of the rotating motor as the center line, thereby driving the graphite disk body to rotate. The driven rotating shaft not only plays a role in fixing the graphite disk body, but also plays a role in assisting the rotation of the graphite disk body, making the graphite disk body more stable during the rotation process.

[0012] Preferably, the fixed bearing seat of the driving rotating shaft and the fixed bearing seat arranged on the driven rotating shaft are detachably arranged with each other, and the fixed bearing seat of the driving rotating shaft, the fixed bearing seat of the driven rotating shaft and the furnace body are all detachably arranged.

[0013] By adopting the above technical solution, for graphite disk bodies of different sizes, the position of the fixed bearing seat of the driving rotating shaft along the length direction of the furnace body can be adjusted, and the position of the fixed bearing seat of the driven rotating shaft can be adjusted to make the graphite disk body more stable during the rotation cleaning process, which is convenient and can adapt to the scenarios of more graphite disk bodies of different sizes.

[0014] Preferably, one or more spacing members are provided between the fixed bearing seat of the driving rotating shaft and the fixed bearing seat of the driven rotating shaft. The spacing members are detachably connected to both the fixed bearing seat of the driving rotating shaft and the fixed bearing seat of the driven rotating shaft, and every two adjacent spacing members are detachably connected.

[0015] By adopting the above technical solution, the spacing members can make the fixed bearing seat more stable, and can effectively prevent the movement of the fixed bearing caused by the extrusion of the fixed bearing seat to both sides during the cleaning of the graphite disk body. For graphite disks with the same diameter in the same furnace body, the spacing members provide a force towards the graphite disk body direction for the fixed bearing seat during use, so that the graphite disk body can be more stable when being cleaned, avoiding the tipping of the graphite disk body. When the graphite disk body is in the best state, the axis of the graphite disk body coincides with the axis in the baking tray furnace body. For graphite disk bodies with the same size in different-sized furnace bodies, the spacing members can also make the graphite disk bodies with the same diameter be in the best position when placed in the baking tray furnace body. For graphite disk bodies of different sizes in the same baking tray furnace body, the spacing members are used for zoning, so that graphite disk bodies with different diameters can be stably placed in the same baking tray furnace body.

[0016] Preferably, a support plate is provided at the bottom of the furnace body. A plurality of holes are evenly formed in the support plate. The fixed bearing seat of the driving rotating shaft and the fixed bearing seat of the driven rotating shaft are both installed on the support plate, and a plurality of installation spaces are provided at the positions where the support plate installs the fixed bearing seat of the driving rotating shaft and the fixed bearing seat of the driven rotating shaft.

[0017] By adopting the above technical solution, the plurality of holes formed in the support plate can make the gas flow in the furnace more smooth, and at the same time, the graphite disk body can be heated more evenly when the heater heats the inside of the furnace body. The plurality of installation spaces facilitate adjusting the distance between the fixed bearing seats according to graphite disk bodies of different sizes, so that graphite disk bodies of different sizes can achieve a stable effect during use.

[0018] Preferably, support bearing seats are provided between the fixed bearing seats of the driving rotating shaft and between the fixed bearing seats of the driven rotating shaft.

[0019] By adopting the above technical solution, since the lengths of the driving rotating shaft and the driven rotating shaft are relatively long in some scenarios, the support bearing seat can support the driving rotating shaft and the driven rotating shaft at this time. Moreover, when cleaning multiple graphite disk bodies simultaneously, the support bearing seat also plays a supporting role at this time, avoiding the bending of the driving rotating shaft and the driven rotating shaft due to stress, prolonging the service life of the driving rotating shaft and the driven rotating shaft, and saving maintenance costs.

[0020] Preferably, the multiple intake pipes are arranged evenly, and the multiple intake pipes are arranged at the top of the furnace body, and the multiple intake pipes are arranged along the length direction of the furnace body.

[0021] By adopting the above technical solution, the intake pipes are located at the top and the graphite disk bodies rotate, which can effectively make the cleaning gas entering the furnace body from the intake pipes blow more evenly on the graphite disk bodies, facilitating the uniform blowing off of the disk substances on the graphite disk bodies, or uniformly reacting with the disk substances on the graphite disk bodies and then dropping or falling along with the reacted substances.

[0022] Preferably, the intake pipes arranged evenly along the length direction of the furnace body are taken as a group, and multiple groups of intake pipes are arranged evenly along the circumferential direction of the cross-section of the furnace body.

[0023] By adopting the above technical solution, the arrangement of multiple groups of intake pipes can make the graphite disk bodies contact the cleaning gas more evenly, improving the cleaning effect and cleaning efficiency of the graphite disk bodies.

[0024] Preferably, the multiple exhaust pipes are arranged evenly, the multiple outlet pipes are arranged at the bottom of the furnace body, and the multiple outlet pipes are arranged evenly along the length direction of the furnace body.

[0025] By adopting the above technical solution, the exhaust pipes are used to discharge the cleaning gas, the disk substances blown off by the cleaning gas, and the reaction products of the cleaning gas and the disk substances.

[0026] Preferably, one or more heaters are provided. One heater is arranged at the bottom of the furnace body, and multiple heaters are arranged evenly along the circumferential direction of the cross-section of the furnace body.

[0027] By adopting the above technical solution, when multiple heaters act together, the larger-sized graphite disk bodies can be heated more evenly.

[0028] In summary, the present application includes at least one of the following beneficial technical effects:

[0029] 1. When cleaning the large-sized graphite disk body, the heater heats the interior of the furnace body. At the same time, the graphite disk rotating device drives the graphite disk body to rotate, which can make the graphite disk heat evenly. There are multiple intake pipes and exhaust pipes. The multiple intake pipes blow air towards the graphite disk body, taking away the disk surface substances after high-temperature decomposition on the graphite disk body through the cleaning gas under the heating of the baking furnace, or after the cleaning gas entering from the intake pipe reacts chemically with the graphite disk surface substances, taking away the reaction products through the cleaning gas and finally discharging them out of the furnace body through the exhaust pipe, achieving a good and uniform baking effect.

[0030] 2. The drive shaft of the rotating motor drives the active rotating shaft to rotate. At this time, the graphite disk body is fixed between the active rotating shaft and the driven rotating shaft by a fixing part. When the active rotating shaft rotates, the edge of the graphite disk body rubs against the active rotating shaft, causing the active rotating shaft to drive the fixing part to rotate with the axis of the drive shaft of the rotating motor as the center line, thereby driving the graphite disk body to rotate. The driven rotating shaft not only plays a role in fixing the graphite disk body but also plays a role in assisting the rotation of the graphite disk body, making the graphite disk body more stable during rotation.

[0031] 3. Since the lengths of the active rotating shaft and the driven rotating shaft are relatively long in some scenarios, the support bearing seat can support the active rotating shaft and the driven rotating shaft at this time. And when cleaning multiple graphite disk bodies simultaneously, the support bearing seat also plays a supporting role at this time, preventing the active rotating shaft and the driven rotating shaft from being bent under stress, extending the service life of the active rotating shaft and the driven rotating shaft, and saving maintenance costs. Description of the Drawings

[0032] Figure 1 is the overall structural schematic diagram of a graphite disk baking furnace for MOCVD in an embodiment of the present application;

[0033] Figure 2 is the front view of the graphite disk baking furnace for MOCVD;

[0034] Figure 3 is the structural schematic diagram of the graphite disk rotating device of the graphite disk baking furnace for MOCVD;

[0035] Figure 4 is the partial enlarged schematic diagram of part A.

[0036] Description of the Reference Numerals: 1. Graphite disk body; 11. Front furnace door; 12. Rear furnace door; 2. Furnace body; 21. Heat insulation layer; 22. Support plate; 3. Heater; 4. Graphite disk rotating device; 41. Rotating motor; 42. Active rotating shaft; 43. Driven rotating shaft; 44. Fixed bearing seat; 45. Spacer; 46. Support bearing seat; 5. Intake pipe; 6. Exhaust pipe; 7. Magnetic fluid seal; 8. Fixing part; 9. Ball. Detailed implementation mode

[0037] The following will further elaborate on this application in conjunction with the attached Figures 1-4 drawings.

[0038] The embodiment of this application discloses a graphite disk baking furnace for MOCVD. Refer to Figure 1 , the graphite disk baking furnace for MOCVD includes a graphite disk body 1, a furnace body 2 for placing the graphite disk body 1 to be cleaned, a heater 3 arranged in the furnace body 2 for heating the interior of the furnace body 2, a graphite disk rotating device 4 arranged at the bottom of the furnace body 2, an intake pipe 5 for inflating the interior of the furnace body 2, and an exhaust pipe 6 for discharging the gas inside the furnace body 2.

[0039] Refer to Figure 1 and Figure 2 , the furnace body 2 is cylindrical, and a front furnace door 11 and a rear furnace door 12 are respectively arranged at both ends in the length direction of the furnace body 2. The front furnace door 11, the rear furnace door 12 and the furnace body 2 together form a cylindrical closed cavity to achieve vacuum sealing during the baking process. A heat insulation layer 21 is arranged inside the furnace body 2. Optionally, the heat insulation layer 21 is a heat insulation felt, and the heat insulation felt plays a role in blocking heat loss, protecting the structure of the furnace body 2, and saving energy. A support plate 22 is arranged along the length direction of the furnace body 2 at the bottom of the furnace body 2. The support plate 22 is evenly provided with a plurality of holes, which is convenient for the heating of the heater 3 located at the bottom of the furnace body 2 and for conducting the air flow inside the furnace body 2. A plurality of installation spaces are also arranged on the support plate 22, and the plurality of installation spaces are used for installing the graphite disk rotating device 4. One or more heaters 3 are arranged. Optionally, one heater 3 is arranged inside the furnace body 2. At this time, the heater 3 is arranged at the bottom of the furnace body 2. Optionally, a plurality of heaters 3 are arranged inside the furnace body 2, and the plurality of heaters 3 are evenly arranged along the circumferential direction of the cross-section of the furnace body 2. When the plurality of heaters 3 act together, the larger-sized graphite disk body 1 can be heated more evenly.

[0040] Refer to Figure 2 , both the intake pipe 5 and the exhaust pipe 6 are provided with multiple roots. The multiple intake pipes 5 are evenly arranged. Optionally, the multiple intake pipes 5 are arranged at the top of the furnace body 2, and the multiple intake pipes 5 are arranged along the length direction of the furnace body 2. The intake pipe 5 is located at the top and the graphite disk body 1 rotates, which can effectively make the cleaning gas entering the interior of the furnace body 2 from the intake pipe 5 blow more evenly on the graphite disk body 1, facilitating the uniform blowing off of the disk body substances on the graphite disk body 1, or uniformly reacting with the disk body substances on the graphite disk body 1 and then dropping or falling along with the reacted substances. The intake pipes 5 evenly arranged in the length direction of the furnace body 2 are taken as a group. Optionally, multiple groups of intake pipes 5 are evenly arranged along the circumferential direction of the cross-section of the furnace body 2, and several rows of intake pipes 5 are symmetrically arranged along the equipment center line around the furnace body 2 (except for the position directly below the furnace body 2).

[0041] Refer toFigure 2 , a multi-group intake pipe is arranged in a 5-column array. During the baking pan process, the cleaning gas is evenly filled into the furnace through the intake pipes 5 arranged in an array. After the substances on the pan surface are thermally decomposed under the heating of the baking pan furnace, they are carried away by the cleaning gas, or a chemical reaction occurs between the cleaning gas and the substances on the graphite pan surface. Multiple exhaust pipes 6 are evenly arranged. A row of exhaust pipes 6 is arranged directly below the furnace body 2. Multiple outlet pipes are evenly arranged along the length direction of the furnace body 2. The exhaust pipes 6 are used to discharge the cleaning gas, the substances on the pan body blown off by the cleaning gas, and the reaction products of the cleaning gas and the substances on the pan body. Optionally, the intake pipes 5 and the exhaust pipes 6 are arranged at equal intervals in each row of pipelines.

[0042] Refer to Figure 3 , the graphite pan rotating device 4 includes a rotating motor 41, a driving rotating shaft 42 connected to the driving shaft of the rotating motor 41, and a driven rotating shaft 43 arranged with the driving rotating shaft. Fixed bearing seats 44 are arranged at the positions of the driving rotating shaft 42 and the driven rotating shaft 43 close to the front furnace door 11 and the rear furnace door 12. Fixed bearings are arranged in the fixed bearing seats 44. The driving rotating shaft 42 and the driven rotating shaft 43 are arranged in parallel. The length of the driving rotating shaft 42 is longer than that of the driven rotating shaft 43. The driving rotating shaft 42 passes through the rear furnace door 12 until the outside of the furnace body 2 and is connected to the rotating motor 41. A magnetic fluid seal 7 is arranged between the driving rotating shaft 42 and the rear furnace door 12. The driving shaft of the rotating motor 41 drives the driving rotating shaft 42 to rotate. At this time, the graphite pan body 1 is fixed between the driving rotating shaft 42 and the driven rotating shaft 43 by a fixing member 8. When the driving rotating shaft 42 rotates, the edge of the graphite pan body 1 rubs against the driving rotating shaft 42, causing the driving rotating shaft 42 to drive the fixing member 8 to rotate with the axis of the driving shaft of the rotating motor 41 as the center line, thereby driving the graphite pan body 1 to rotate. The driven rotating shaft 43 not only plays a role in fixing the graphite pan body 1 but also plays a role in assisting the rotation of the graphite pan body 1, making the graphite pan body 1 more stable during the rotation process.

[0043] Refer to Figure 3 , optionally, the fixed bearing seat 44 of the driving rotating shaft 42 and the fixed bearing seat 44 arranged on the driven rotating shaft 43 are detachably arranged with each other, and both the fixed bearing seat 44 of the driving rotating shaft 42 and the fixed bearing seat 44 of the driven rotating shaft 43 are detachably arranged with the furnace body 2. The fixed bearing seat 44 of the driving rotating shaft 42 and the fixed bearing seat 44 of the driven rotating shaft 43 are installed in the installation space on the support plate 22. One or more spacing members 45 are arranged between the fixed bearing seat 44 of the driving rotating shaft 42 and the fixed bearing seat 44 of the driven rotating shaft 43. The spacing members 45 are detachably connected to both the fixed bearing seat 44 of the driving rotating shaft 42 and the fixed bearing seat 44 of the driven rotating shaft 43, and every two adjacent spacing members 45 are detachably connected.

[0044] Refer to Figure 2 andFigure 3 For graphite disk bodies 1 of different sizes, the position of the fixed bearing seat 44 of the active rotating shaft 42 along the length direction of the furnace body 2 can be adjusted, and the position of the fixed bearing seat 44 of the driven rotating shaft 43 can be adjusted to make the graphite disk body 1 more stable during the rotation cleaning process, which is convenient and can adapt to more scenarios of graphite disk bodies 1 of different sizes. The spacing member 45 can make the fixed bearing seat 44 more stable, and can effectively prevent the movement of the fixed bearing caused by the extrusion of the fixed bearing seat 44 to both sides during the cleaning of the graphite disk body 1. For graphite disk bodies 1 with the same diameter in the same furnace body 2, the spacing member 45 provides a force towards the graphite disk body 1 for the fixed bearing seat 44 during use, so that the graphite disk body 1 can be more stable when being cleaned, avoiding the tipping of the graphite disk body 1. When the graphite disk body 1 is in the optimal state, the axis of the graphite disk body 1 coincides with the axis inside the baking tray furnace body 2. For graphite disk bodies 1 with the same size in different furnace bodies 2, the spacing member 45 can also make the graphite disk bodies 1 with the same diameter be in the optimal position when placed in the furnace body 2. For graphite disk bodies 1 with different sizes in the same furnace body 2, the spacing member 45 is used for zoning. According to graphite disk bodies 1 of different sizes placed on different driven rotating shafts 43, graphite disk bodies 1 with different diameters can be stably placed in the same furnace body 2.

[0045] Refer to Figure 3 Between the fixed bearing seats 44 of the active rotating shaft 42 and between the fixed bearing seats 44 of the driven rotating shaft 43, support bearing seats 46 are provided. Since the lengths of the active rotating shaft 42 and the driven rotating shaft 43 are relatively long in some scenarios, the support bearing seat 46 can support the active rotating shaft 42 and the driven rotating shaft 43 at this time. And when cleaning multiple graphite disk bodies 1 simultaneously, the support bearing seat 46 also plays a supporting role at this time, avoiding the bending of the active rotating shaft 42 and the driven rotating shaft 43 due to force, extending the service life of the active rotating shaft 42 and the driven rotating shaft 43, and saving maintenance costs.

[0046] Refer to Figure 4 On both the active rotating shaft 42 and the driven rotating shaft 43, there are fixing members 8 for fixing the graphite disk body 1. There are multiple fixing members 8, and the multiple fixing members 8 are evenly arranged on the active rotating shaft 42 and the driven rotating shaft 43. During use, the graphite disk body 1 is placed between every two adjacent fixing members 8 on the active rotating shaft 42 and / or the driven rotating shaft 43. Optionally, a plurality of balls 9 are provided on the surface of the fixing member 8 that fits the graphite disk body 1. When the graphite disk body 1 rotates, the plurality of balls 9 can reduce the friction between the graphite disk body 1 and the fixing member 8, making the rotation of the graphite disk body 1 smoother.

[0047] The implementation principle of the embodiment of this application is as follows: When cleaning the large-size graphite disk body 1, open the front furnace door 11, vertically insert the graphite disks to be cleaned on the graphite disk rotating device 4 in sequence, close the front furnace door 11, turn on the heater 3 to increase the temperature, and the temperature in the furnace continues to rise. After the temperature in the furnace reaches the baking pan temperature, the graphite disk rotating device 4 drives the graphite disk body 1 to rotate, and the rotation can make the graphite disk heat evenly. There are multiple intake pipes 5 and exhaust pipes 6. The multiple intake pipes 5 blow air towards the graphite disk body 1, and the surface substances on the graphite disk body 1 after high-temperature decomposition are taken away by the cleaning gas after high-temperature decomposition under the heating of the baking pan furnace, or after the cleaning gas entering from the intake pipe 5 reacts chemically with the surface substances of the graphite disk, the reactants are taken away by the cleaning gas and finally discharged out of the furnace body 2 through the exhaust pipe 6, achieving a good and uniform baking pan effect.

[0048] The above are all the preferred embodiments of this application, and the protection scope of this application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of this application should be covered within the protection scope of this application.

Claims

1. A graphite disk baking furnace for MOCVD, characterized in that, It includes a graphite disk body (1), a furnace body (2) for placing the graphite disk body (1) to be cleaned, a heater (3) arranged inside the furnace body (2) for heating the interior of the furnace body (2), a graphite disk rotating device (4) arranged at the bottom of the furnace body (2), an intake pipe (5) for inflating the interior of the furnace body (2) and purging the surface of the graphite disk body (1), and an exhaust pipe (6) for discharging the gas inside the furnace body (2); Among them, the graphite disk body (1) is placed on the graphite disk rotating device (4), and the graphite disk rotating device (4) can drive the graphite disk to rotate. Both the intake pipe (5) and the exhaust pipe (6) are provided with multiple pieces; The graphite disk rotating device (4) includes a rotating motor (41), a driving rotating shaft (42) connected to the driving shaft of the rotating motor (41), and a driven rotating shaft (43) connected to the driving rotating shaft. Fixed bearing seats (44) are arranged at both ends of the driving rotating shaft (42) and the driven rotating shaft (43) close to the length direction of the furnace body (2). Fixed bearings are arranged inside the fixed bearing seats (44). The driving rotating shaft (42) and the driven rotating shaft (43) are arranged in parallel. Fixing members (8) for fixing the graphite disk body (1) are arranged on both the driving rotating shaft (42) and the driven rotating shaft (43); The fixed bearing seat (44) of the driving rotating shaft (42) and the fixed bearing seat (44) arranged on the driven rotating shaft (43) are detachably arranged with each other, and the fixed bearing seat (44) of the driving rotating shaft (42), the fixed bearing seat (44) of the driven rotating shaft (43) and the furnace body (2) are all detachably arranged; Bracket bearing seats (46) are arranged between the fixed bearing seats (44) of the driving rotating shaft (42) and between the fixed bearing seats (44) of the driven rotating shaft (43).

2. The graphite disk baking furnace for MOCVD according to claim 1, wherein: One or more spacing members (45) are arranged between the fixed bearing seat (44) of the driving rotating shaft (42) and the fixed bearing seat (44) of the driven rotating shaft (43). The spacing members (45) are detachably connected to the fixed bearing seat (44) of the driving rotating shaft (42) and the fixed bearing seat (44) of the driven rotating shaft (43), and every two adjacent spacing members (45) are detachably connected.

3. The graphite disk baking furnace for MOCVD according to claim 2, wherein: A support plate (22) is arranged at the bottom of the furnace body (2). A plurality of holes are evenly formed in the support plate (22). The fixed bearing seats (44) of the driving rotating shaft (42) and the fixed bearing seats (44) of the driven rotating shaft (43) are both installed on the support plate (22). Multiple installation spaces are arranged at the positions where the support plate (22) installs the fixed bearing seat (44) of the driving rotating shaft (42) and the fixed bearing seat (44) of the driven rotating shaft (43).

4. The graphite disk baking furnace for MOCVD according to claim 1, wherein: The multiple intake pipes (5) are evenly arranged, and the multiple intake pipes (5) are arranged at the top of the furnace body (2) and are arranged along the length direction of the furnace body (2).

5. The graphite disk baking furnace for MOCVD according to claim 4, characterized in that: The intake pipes (5) uniformly arranged along the length direction of the furnace body (2) are a group, and multiple groups of intake pipes (5) are uniformly arranged along the circumferential direction of the cross-section of the furnace body (2).

6. The graphite disk baking furnace for MOCVD according to claim 1, characterized in that: Multiple exhaust pipes (6) are uniformly arranged, multiple exhaust pipes are arranged at the bottom of the furnace body (2), and multiple exhaust pipes are uniformly arranged along the length direction of the furnace body (2).

7. The graphite disk baking furnace for MOCVD according to claim 1, wherein: One or more heaters (3) are provided. One heater (3) is provided at the bottom of the furnace body (2), and multiple heaters (3) are uniformly arranged along the circumferential direction of the cross-section of the furnace body (2).

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