Optical element repairing apparatus and repairing method thereof

Abstract

The application discloses an optical element repairing device and a repairing method thereof, and relates to the optical technology field.The optical element repairing device comprises a pumping light source, an online monitoring mechanism and a repairing mechanism.The pumping light source is used for emitting pumping light towards a surface defect of a sample to be repaired.The online monitoring mechanism comprises a detecting light source and a first image processor.The detecting light source is used for emitting detecting light towards the surface defect of the sample to be repaired.The first image processor is used for receiving the detecting light reflected by the surface defect of the sample to be repaired and obtaining image information of the surface defect of the sample to be repaired.The repairing mechanism is used for repairing the surface defect of the sample to be repaired according to the image information of the surface defect of the sample to be repaired.The optical element repairing device can accurately and efficiently repair the damage at a fixed point, thereby improving the problems of low repairing rate and low repairing success rate in the prior art.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and more specifically, to an optical element repair device and repair method. Background Technology

[0002] Extreme optical elements are the most common functional components in the terminal assembly of high-energy heat source devices. During machining, subsurface damage, environmental pollution, and rigid micro-disturbances can easily induce the propagation of surface microcracks and the expansion of pits in extreme optical elements. Especially in high-energy heat source systems, after irradiation under extreme photothermal conditions, it is easy to generate unrepairable burn-type defect areas. Studies have shown that after the appearance of micro-surface properties such as surface defects and subsurface damage, with the increase of continuous irradiation by the heat source, the unit damage distribution area, lattice damage density, and damage layer penetration area of ​​extreme optical elements will increase exponentially. When the defect concentration layer diffusion ratio exceeds the specified critical value, the radiation-resistant layer will completely collapse and can no longer maintain normal optical performance.

[0003] Due to the complex manufacturing process and extremely high cost of extreme optical components, thoroughly addressing their short lifespan is crucial. Currently, online repair is the primary method used both domestically and internationally to improve damage resistance, thereby inhibiting damage propagation and reducing the operating costs of heat source devices. However, existing extreme optical component repair systems still suffer from low repair rates and success rates, and cannot perform precise, efficient, and real-time targeted repair based on the specific defect formation mechanisms of the damaged materials. Therefore, establishing a complete online repair and real-time feedback monitoring system has significant engineering value in improving repair effectiveness and stability. Summary of the Invention

[0004] The purpose of this invention is to provide an optical element repair device and method, which can perform precise and efficient point-to-point repair of damage, thereby improving the problems of low repair rate and low repair success rate in the prior art.

[0005] The embodiments of the present invention are implemented as follows:

[0006] In one aspect, the present invention provides an optical element repair device, comprising: a pump light source for emitting pump light toward a surface defect of a sample to be repaired; an online monitoring mechanism including a detection light source and a first image processor, the detection light source for emitting detection light toward the surface defect of the sample to be repaired, and the first image processor for receiving the detection light reflected from the surface defect of the sample to be repaired and obtaining image information of the surface defect of the sample to be repaired; and a repair mechanism for repairing the surface defect of the sample to be repaired based on the image information of the surface defect of the sample to be repaired. This optical element repair device can perform precise and efficient point-to-point repair of damage, thereby improving the problems of low repair rate and low repair success rate in the prior art.

[0007] Optionally, the online monitoring mechanism further includes: a beam splitter having a first transmission side and a first reflection side opposite to each other, a detection light source disposed on the first transmission side, and a first image processor disposed on the first reflection side; and a beam combiner having a second transmission side and a second reflection side opposite to each other, a pump light source disposed on the second transmission side, the beam splitter disposed on the reflection side of the beam combiner, and the first reflection side and the second reflection side being arranged facing each other.

[0008] Optionally, the online monitoring mechanism also includes: a focusing element; the focusing element is located on the second reflection side of the beam combiner element.

[0009] Optionally, the repair mechanism is a plasma repair mechanism.

[0010] Optionally, the online monitoring device further includes: a second image processor; the second image processor is used to receive probe light passing through the surface defects of the sample to be repaired and to obtain image information of the surface defects of the sample to be repaired.

[0011] Optionally, the online monitoring device also includes: a physicochemical analyzer; the physicochemical analyzer is located at the sample to be repaired and is used to analyze the physical and chemical properties of the surface defects of the sample to be repaired based on the sample particles ejected during the repair process.

[0012] Optionally, the optical component repair apparatus further includes: a clamping mechanism; the clamping mechanism is used to clamp the sample to be repaired.

[0013] Optionally, the optical element repair device further includes: a driving mechanism; the driving mechanism is used to drive the clamping mechanism to move along a first direction, the first direction being perpendicular to the direction of the pump light incident on the surface of the sample to be repaired.

[0014] In another aspect, the present invention provides an optical element repair method employing the aforementioned optical element repair apparatus. The optical element repair method includes: irradiating a surface defect of a sample to be repaired with pump light; irradiating the surface defect of the sample to be repaired with probe light, and causing the probe light reflected from the surface of the sample to be repaired to be incident on a first image processor, wherein the first image processor receives the probe light reflected from the surface defect of the sample to be repaired and obtains image information of the surface defect of the sample to be repaired; and repairing the surface defect of the sample to be repaired using a repair mechanism based on the image information from the first image processor.

[0015] Optionally, the optical element repair device further includes: a second image processor; illuminating the surface defect of the sample to be repaired with probe light and causing the probe light reflected by the surface of the sample to be repaired to be incident on the first image processor, including: illuminating the surface defect of the sample to be repaired with probe light and causing the probe light reflected by the surface of the sample to be repaired to be incident on the first image processor, and causing the probe light transmitted through the sample to be repaired to be incident on the second image processor, the second image processor receiving the probe light transmitted through the sample to be repaired and obtaining image information of the surface defect of the sample to be repaired; repairing the surface defect of the sample to be repaired using a repair mechanism based on the image information of the first image processor, including: repairing the surface defect of the sample to be repaired using a repair mechanism based on the image information of the first image processor and the image information of the second image processor.

[0016] Optionally, the optical element repair device further includes: a physicochemical analyzer; before repairing the surface defects of the sample to be repaired using the repair mechanism based on the image information of the first image processor, the method further includes: using the physicochemical analyzer to analyze the physical and chemical properties of the surface defects of the sample to be repaired by analyzing the sample particles ejected during the repair process; repairing the surface defects of the sample to be repaired using the repair mechanism based on the image information of the first image processor includes: repairing the surface defects of the sample to be repaired using the repair mechanism based on the image information of the first image processor and the analysis structure of the physicochemical analyzer.

[0017] The beneficial effects of this invention include:

[0018] The optical element repair device provided in this application includes: a pump light source for emitting pump light toward the surface defects of the sample to be repaired; an online monitoring mechanism including a detection light source and a first image processor, the detection light source for emitting detection light toward the surface defects of the sample to be repaired, and the first image processor for receiving the detection light reflected from the surface defects of the sample to be repaired and obtaining image information of the surface defects of the sample to be repaired; and a repair mechanism for repairing the surface defects of the sample to be repaired based on the image information of the surface defects of the sample to be repaired. This application, by setting the pump light source to emit pump light to illuminate the sample to be repaired, and by using the detection light source of the online monitoring mechanism to emit detection light toward the sample to be repaired, and by using the first image processor to receive the detection light reflected from the sample to be repaired, allows the first image processor to convert the received reflected light into an electrical signal to obtain image information of the surface defects of the sample to be repaired. The repair mechanism can then perform targeted, precise, and efficient repair of the surface defects of the sample to be repaired based on this image information, thereby improving the problems of low repair speed and repair success rate in existing technologies. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the optical element repair device provided in an embodiment of the present invention;

[0021] Figure 2 This is one of the flowcharts for an optical element repair method provided in an embodiment of the present invention;

[0022] Figure 3 This is the second flowchart of the optical element repair method provided in the embodiments of the present invention;

[0023] Figure 4 The third flowchart of the optical element repair method provided in the embodiments of the present invention.

[0024] Icons: 10-Pump source; 21-Detector source; 22-First image processor; 23-Spectrometer; 24-Beam combiner; 25-Focusing element; 26-Second image processor; 27-Physicochemical analyzer; 30-Repair mechanism; 40-Clamping mechanism; 100-Sample to be repaired. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," not that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0031] Please refer to Figure 1This embodiment provides an optical component repair device, comprising: a pump light source 10 for emitting pump light toward a surface defect of a sample 100 to be repaired; an online monitoring mechanism including a detection light source 21 and a first image processor 22, wherein the detection light source 21 emits detection light toward the surface defect of the sample 100 to be repaired, and the first image processor 22 receives the detection light reflected from the surface defect of the sample 100 to obtain image information of the surface defect of the sample 100 to be repaired; and a repair mechanism 30 for repairing the surface defect of the sample 100 to be repaired based on the image information of the surface defect of the sample 100 to be repaired. This optical component repair device can perform precise and efficient point-to-point repair of damage, thereby improving the problems of low repair speed and low repair success rate in the prior art.

[0032] The optical component repair apparatus provided in this application includes a pump light source 10, an online monitoring mechanism, and a repair mechanism 30. The pump light source 10 emits pump light toward the surface defects of the sample 100 to be repaired. The online monitoring mechanism monitors the surface defects of the sample 100 online, analyzing the damage level, repair rate, and repair quality. The repair mechanism 30 repairs the surface defects of the sample 100.

[0033] The aforementioned pump light source 10 emits pump light, which illuminates the surface defects of the sample 100 to be repaired. The surface defects absorb photothermal energy, resulting in certain physical or chemical changes. The pump light source 10's emission of pump light to illuminate the sample 100 serves two purposes: first, it provides illumination for image acquisition by the image processor of the subsequent online monitoring mechanism; second, it plays a role in repairing the surface defects of the sample 100, assisting the repair mechanism 30 in repairing the surface defects of the sample 100.

[0034] The aforementioned online monitoring mechanism includes a detection light source 21 and a first image processor 22. The detection light source 21 emits detection light at the surface defects of the sample 100 to be repaired. After the detection light shines on the surface of the sample 100 to be repaired, it is reflected by the surface of the sample 100 to be repaired, so that the reflected light is received by the first image processor 22.

[0035] The first image processor 22 is used to receive reflected light and obtain the current image state of the surface defect of the sample 100 to be repaired based on the reflected light. The first image processor 22 may include an imaging photosensitive device and a spectrometer, wherein the imaging photosensitive device is used to receive the reflected light and convert the optical signal of the reflected light into an electrical signal, and the spectrometer is used to form image information and display it based on the electrical signal fed back by the imaging photosensitive device.

[0036] The aforementioned repair mechanism 30 is located at the surface defect of the sample 100 to be repaired, and is used to repair the surface defect of the sample 100 to be repaired.

[0037] Optionally, the aforementioned repair mechanism 30 may be a low-temperature plasma repair mechanism 30.

[0038] In summary, the optical element repair device provided in this application includes: a pump light source 10, which emits pump light toward the surface defect of the sample 100 to be repaired; an online monitoring mechanism, which includes a detection light source 21 and a first image processor 22, wherein the detection light source 21 emits detection light toward the surface defect of the sample 100 to be repaired, and the first image processor 22 receives the detection light reflected by the surface defect of the sample 100 to be repaired and obtains image information of the surface defect of the sample 100 to be repaired; and a repair mechanism 30, which repairs the surface defect of the sample 100 to be repaired according to the image information of the surface defect of the sample 100 to be repaired. This application uses a pump light source 10 to emit pump light to illuminate the sample 100 to be repaired, and a detection light source 21 of an online monitoring mechanism to emit detection light to the sample 100 to be repaired. The first image processor 22 receives the detection light reflected by the sample 100 to be repaired. In this way, the first image processor 22 can convert the received reflected light into an electrical signal to obtain image information of the surface defects of the sample 100 to be repaired. The repair mechanism 30 can perform targeted, precise and efficient repair of the surface defects of the sample 100 to be repaired based on the image information, thereby improving the problem of low repair speed and repair success rate in the prior art.

[0039] Please continue to refer to Figure 1 Optionally, the aforementioned online monitoring mechanism may further include: a beam splitter 23 and a beam combiner 24. The beam splitter 23 has a first transmission side and a first reflection side facing each other, the detection light source 21 is disposed on the first transmission side, and the first image processor 22 is disposed on the first reflection side; the beam combiner 24 has a second transmission side and a second reflection side facing each other, the pump light source 10 is disposed on the second transmission side, the beam splitter 23 is disposed on the reflection side of the beam combiner 24, and the first reflection side and the second reflection side are arranged facing each other.

[0040] The aforementioned beam splitter 23 is disposed between the detection light source 21 and the sample 100 to be repaired, and the beam splitter 23 is also located between the first image processor 22 and the sample 100 to be repaired.

[0041] In this embodiment, the beam splitter 23 includes a first transmission side and a first reflection side opposite to the first transmission side. The detection light source 21 is located on the first transmission side, and the first image processor 22 is located on the first reflection side. Thus, the detection light emitted by the detection light source 21 can pass through the first transmission side of the beam splitter 23 and be incident on the surface of the sample 100 to be repaired; while the detection light reflected by the surface of the sample 100 to be repaired can be reflected by the first reflection side of the beam splitter 23, so that the reflected light is incident on the first image processor 22.

[0042] The beam combining element 24 is located between the beam splitting element 23 and the sample 100 to be repaired, and the beam combining element 24 is also located between the pump light source 10 and the sample 100 to be repaired.

[0043] In this embodiment, the beam combiner 24 includes a second transmission side and a second reflection side opposite to the second transmission side. The beam splitter 23 is located on the second reflection side, and the pump light source 10 is located on the second transmission side. Thus, the probe light emitted by the probe light source 21 can pass through the first transmission side of the beam splitter 23, be reflected by the second reflection side, and then enter the surface of the sample 100 to be repaired. The probe light reflected by the surface of the sample 100 to be repaired can be reflected by the second reflection side and enter the first reflection side of the beam splitter 23, and then be reflected by the first reflection side before entering the first image processor 22. The pump light emitted by the pump light source 10 can pass through the second transmission side of the beam combiner 24 and enter the surface of the sample 100 to be repaired.

[0044] Optionally, the above-mentioned online monitoring mechanism further includes a focusing element 25; the focusing element 25 is located on the second reflection side of the beam combining element 24.

[0045] In this way, the pump light emitted from the pump light source 10 passes through the beam combiner 24 and is focused by the focusing element 25, so that the beam can be focused on the surface defect of the sample 100 to be repaired; while the probe light emitted from the probe light source 21 passes through the beam splitter 23 and is reflected by the beam combiner 24, so that it can be focused by the focusing element 25 and converged on the surface defect of the sample 100 to be repaired.

[0046] In addition, the above-mentioned online monitoring device may also include: a second image processor 26; the second image processor 26 is used to receive the detection light transmitted through the surface defect of the sample 100 to be repaired and to obtain image information of the surface defect of the sample 100 to be repaired.

[0047] It should be noted that the second image processor 26 and the first image processor 22 are similar in principle, the difference being that the first image processor 22 is used to receive the probe light reflected by the sample 100 to be repaired, while the second image processor 26 is used to receive the probe light transmitted from the sample 100 to be repaired. The second image processor 26 may also include an imaging sensor and a spectrometer, wherein the imaging sensor is used to receive the transmitted light and convert the optical signal of the transmitted light into an electrical signal, and the spectrometer is used to form image information and display it based on the electrical signal fed back by the imaging sensor.

[0048] The online monitoring system provided in this application utilizes the basic principle of coherent optical interference to directly measure real-time images of the micro-nano (subwavelength level) two-dimensional or three-dimensional morphological changes on the surface of the sample 100 to be repaired. The pump light emitted from the pump source 10 and the probe light emitted from the probe source 21 are coherently combined by the beam combiner 24, focused by the focusing element 25, and then imaged in real-time by the first image processor 22 and the second image processor 26. In this way, the repair mechanism 30 can combine the image information from the first image processor 22 and the second image processor 26 to perform targeted repairs on the surface defects of the sample 100 to be repaired.

[0049] That is, the optical component repair device provided in this application utilizes an online monitoring system employing the principle of coherent light interference and online imaging function to measure and record the changes in the repair morphology at the surface defects of the sample 100 to be repaired. The repair mechanism 30 performs precise repair based on these changes in morphology. It should be noted that when the repair mechanism 30 performs precise repair based on the changes in morphology at the surface defects of the sample 100, it can use the original repair parameters for precise point-to-point repair, or it can modify the repair parameters of the repair mechanism 30 based on these changes. These repair parameters include, but are not limited to: repair power, repair speed, spot size, material concentration, ambient temperature, and ion energy density.

[0050] Optionally, the online monitoring device also includes a physicochemical analyzer 27; the physicochemical analyzer 27 is located at the sample 100 to be repaired and is used to analyze the physical and chemical properties of the surface defects of the sample 100 to be repaired based on the sample particles ejected during the repair process.

[0051] It should be noted that the physicochemical analyzer 27, based on the measurement of plasma optical signals of element types and contents, can quickly provide feedback on the feed rate and processing parameters of different sputtered particles, and perform composition calibration of plasma signals with standard block materials, including comparing the distribution, density, depth, etc. of chemical concentration signals, and analyzing defects formed based on the microstructure.

[0052] By setting up the physicochemical analyzer 27, this application can combine it with the first image processor 22 and the second image processor 26 to achieve three aspects of detection at the surface defects of the sample 100 to be repaired: reflection detection (corresponding to the first image processor 22), transmission detection (corresponding to the second image processor 26), and scattering detection (corresponding to the physicochemical analyzer 27). In this way, the repair progress and repair effect at the surface defects of the sample 100 to be repaired can be monitored comprehensively, which can better provide data support for the further repair of the repair mechanism 30 and facilitate the efficient repair of the sample 100 to be repaired.

[0053] To facilitate fixing the sample 100 to be repaired, in this embodiment, the optical element repair device may optionally include a clamping mechanism 40; the clamping mechanism 40 is used to clamp the sample 100 to be repaired.

[0054] This application does not limit the structural form of the clamping mechanism 40. Those skilled in the art can set it according to the shape of the sample 100 to be repaired, as long as it can clamp and fix the sample 100 to be repaired.

[0055] Furthermore, the optical element repair device also includes a driving mechanism; the driving mechanism is used to drive the clamping mechanism 40 to move along a first direction, the first direction being perpendicular to the direction of the pump light incident on the surface of the sample 100 to be repaired.

[0056] The driving mechanism can be a motor or a cylinder, etc., and this application does not impose specific limitations, as long as it can drive the sample to be repaired 100 to move along the first direction, corresponding to... Figure 1 In the middle, the first direction is Figure 1 The horizontal direction is described. This application uses a drive mechanism to drive the sample 100 to be repaired to move in the first direction, thus enabling the repair of different areas of the sample 100.

[0057] Please refer to Figure 2 In another aspect, the present invention provides an optical element repair method employing the above-described optical element repair apparatus, the optical element repair method comprising:

[0058] S100. Use pump light to irradiate the surface defects of the sample 100 to be repaired.

[0059] The pump light mentioned above is provided by the pump light source 10.

[0060] S200: The surface defect of the sample 100 to be repaired is illuminated by a probe light, and the probe light reflected by the surface of the sample 100 to be repaired is incident on the first image processor 22. The first image processor 22 receives the probe light reflected by the surface defect of the sample 100 to be repaired and obtains the image information of the surface defect of the sample 100 to be repaired.

[0061] The location and working principle of the first image processor 22 have been explained in detail above and will not be repeated here.

[0062] S300: Based on the image information from the first image processor 22, the repair mechanism 30 repairs the surface defects of the sample 100 to be repaired.

[0063] This application uses a pump light source 10 to emit pump light to illuminate the sample 100 to be repaired, and a detection light source 21 of an online monitoring mechanism to emit detection light to the sample 100 to be repaired. The first image processor 22 receives the detection light reflected by the sample 100 to be repaired. In this way, the first image processor 22 can convert the received reflected light into an electrical signal to obtain image information of the surface defects of the sample 100 to be repaired. The repair mechanism 30 can perform targeted, precise and efficient repair of the surface defects of the sample 100 to be repaired based on the image information, thereby improving the problem of low repair speed and repair success rate in the prior art.

[0064] Alternatively, please refer to Figure 1 The optical element repair device also includes a second image processor 26; when the optical element repair device includes a second image processor 26, please refer to... Figure 3 The above step S200, which involves illuminating the surface defect of the sample 100 to be repaired with probe light and causing the probe light reflected from the surface of the sample 100 to be repaired to be incident on the first image processor 22, is specifically implemented in the following way:

[0065] The surface defect of the sample 100 to be repaired is illuminated by a probe light, and the probe light reflected by the surface of the sample 100 to be repaired is incident on the first image processor 22, and the probe light that passes through the sample 100 to be repaired is incident on the second image processor 26. The second image processor 26 receives the probe light that passes through the sample 100 to be repaired and obtains image information of the surface defect of the sample 100 to be repaired.

[0066] When the optical element repair device includes a second image processor 26, please refer to... Figure 3 In step S300 above, the surface defects of the sample 100 to be repaired are repaired by the repair mechanism 30 according to the image information of the first image processor 22, which is specifically achieved in the following way:

[0067] Based on the image information from the first image processor 22 and the second image processor 26, the repair mechanism 30 repairs the surface defects of the sample 100 to be repaired.

[0068] That is, when the optical element repair device also includes a second image processor 26, compared to the absence of a second image processor 26, such as Figure 3 As shown, in step S200, the second image processor 26 also needs to receive the probe light transmitted through the sample 100 to be repaired and obtain image information of the surface defects of the sample 100 to be repaired. Moreover, in step S300, compared to when the second image processor 26 is not provided, it is also necessary to repair the surface defects of the sample 100 to be repaired based on the image information of the first image processor 22 and the image information of the second image processor 26.

[0069] Please refer to Figure 1 Optionally, the optical component repair apparatus further includes a physicochemical analyzer 27. When the optical component repair apparatus includes a physicochemical analyzer 27, please refer to... Figure 4 Before step S300 above, where the repair mechanism 30 repairs the surface defects of the sample 100 to be repaired based on the image information from the first image processor 22, the repair method further includes the following steps:

[0070] S400, The physical and chemical properties of the surface defects of the sample 100 to be repaired are analyzed by using the physicochemical analyzer 27 to analyze the sample particles sprayed out during the repair process.

[0071] When the optical element repair device includes a physicochemical analyzer 27, please refer to... Figure 4 In step S300 above, the surface defects of the sample 100 to be repaired are repaired by the repair mechanism 30 according to the image information of the first image processor 22, which is specifically achieved in the following way:

[0072] Based on the image information from the first image processor 22 and the analysis structure from the physicochemical analyzer 27, the repair mechanism 30 repairs the surface defects of the sample 100 to be repaired.

[0073] That is, when the optical element repair device also includes a physicochemical analyzer 27, compared to the case where the physicochemical analyzer 27 is not provided, step S400 described above needs to be performed before step S300. Furthermore, compared to the case where the physicochemical analyzer 27 is not provided, step S300 also needs to repair the surface defects of the sample 100 to be repaired based on the image information of the first image processor 22 and the analysis structure of the physicochemical analyzer 27.

[0074] Of course, when the optical element repair device simultaneously includes a first image processor 22, a second image processor, and a physicochemical analyzer 27, relative to Figure 2 Without a second image processor and physicochemical analyzer 27, step S400 needs to be performed before step S300; in step S200, the second image processor 26 needs to receive the probe light transmitted through the sample 100 to be repaired and obtain image information of the surface defects of the sample 100 to be repaired; and, relative to Figure 2 If the second image processor and physicochemical analyzer 27 are not provided, step S300 also requires repairing the surface defects of the sample 100 to be repaired based on the image information of the first image processor 22, combined with the image information of the second image processor 26 and the analysis structure of the physicochemical analyzer 27.

[0075] Additionally, it should be noted that when the repair mechanism 30 repairs the surface defects of the sample 100 to be repaired in step S300 above, the repair parameters of the repair mechanism 30 are adjusted according to the image information of the first image processor 22, the image information of the second image processor 26, and the analysis structure of the physicochemical analyzer 27, and then the sample 100 to be repaired is repaired.

[0076] The repair process of the repair mechanism 30 includes synchronous feeding and equal-volume repair. Its laser radiation parameters include laser power, scanning processing rate and laser spot diameter. The laser power can be adjusted from 0.01mW to 100W, the scanning processing rate can be controlled from 1mm / s to 5000mm / s, and the laser spot diameter can be controlled from 50μm to 10mm.

[0077] In addition, it should be noted that the online monitoring agency can perform online monitoring of the sample 100 to be repaired continuously or periodically at specific intervals, and this application does not impose any restrictions on this.

[0078] After completing step S300, you can return to step S100 and repeat the cycle of steps S100-S300.

[0079] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

[0080] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

Claims

1. An optical element repair device, characterized in that, include: A pump light source, wherein the pump light source is used to emit pump light toward the surface defects of the sample to be repaired; An online monitoring mechanism includes a detection light source and a first image processor. The detection light source is used to emit detection light towards the surface defects of the sample to be repaired, and the first image processor is used to receive the detection light reflected by the surface defects of the sample to be repaired and obtain image information of the surface defects of the sample to be repaired. A repair mechanism is used to repair the surface defects of the sample to be repaired based on image information of the surface defects of the sample to be repaired; The repair mechanism is a plasma repair mechanism; The online monitoring device also includes: a second image processor; The second image processor is used to receive probe light passing through the surface defect of the sample to be repaired and to obtain image information of the surface defect of the sample to be repaired.

2. The optical component repair device according to claim 1, characterized in that, The online monitoring agencies also include: A beam splitter has a first transmission side and a first reflection side, the detection light source is disposed on the first transmission side, and the first image processor is disposed on the first reflection side; A beam combiner has a second transmission side and a second reflection side facing each other. The pump light source is located on the second transmission side, and the beam splitter is located on the reflection side of the beam combiner. The first reflection side and the second reflection side are arranged facing each other.

3. The optical element repair device according to claim 2, characterized in that, The online monitoring agencies also include: A focusing element; the focusing element is located on the second reflecting side of the beam combining element.

4. The optical element repair device according to claim 1, characterized in that, The online monitoring device also includes a physicochemical analyzer; the physicochemical analyzer is located at the sample to be repaired and is used to analyze the physical and chemical properties of the surface defects of the sample to be repaired based on the sample particles ejected during the repair process.

5. The optical element repair device according to claim 1, characterized in that, The optical element repair device further includes a clamping mechanism; the clamping mechanism is used to clamp the sample to be repaired.

6. The optical element repair device according to claim 5, characterized in that, The optical element repair device further includes a driving mechanism; the driving mechanism is used to drive the clamping mechanism to move along a first direction, the first direction being perpendicular to the direction of the pump light incident on the surface of the sample to be repaired.

7. A method for repairing optical components, characterized in that, The optical element repair apparatus according to any one of claims 1 to 5 is used, and the method includes: The surface defects of the sample to be repaired are irradiated with pump light. The surface defect of the sample to be repaired is illuminated with a probe light, and the probe light reflected by the surface of the sample to be repaired is incident on the first image processor. The first image processor receives the probe light reflected by the surface defect of the sample to be repaired and obtains the image information of the surface defect of the sample to be repaired. The surface defects of the sample to be repaired are repaired using a repair mechanism based on the image information from the first image processor.

8. The optical element repair method according to claim 7, characterized in that, The optical component repair device further includes: a second image processor; The step of illuminating the surface defect of the sample to be repaired with a probe light and causing the probe light reflected by the surface of the sample to be repaired to be incident on the first image processor includes: illuminating the surface defect of the sample to be repaired with a probe light and causing the probe light reflected by the surface of the sample to be repaired to be incident on the first image processor, and causing the probe light transmitted through the sample to be repaired to be incident on the second image processor, wherein the second image processor receives the probe light transmitted through the sample to be repaired and obtains image information of the surface defect of the sample to be repaired; The step of repairing the surface defects of the sample to be repaired using a repair mechanism based on the image information of the first image processor includes: repairing the surface defects of the sample to be repaired using a repair mechanism based on the image information of the first image processor and the image information of the second image processor.

9. The optical element repair method according to claim 7 or 8, characterized in that, The optical element repair device further includes: a physicochemical analyzer; and before repairing the surface defects of the sample to be repaired using the repair mechanism based on the image information from the first image processor, the method further includes: The physical and chemical properties of the surface defects of the sample to be repaired are analyzed by using the physicochemical analyzer to analyze the sample particles ejected during the repair process. The step of repairing the surface defects of the sample to be repaired using a repair mechanism based on the image information of the first image processor includes: repairing the surface defects of the sample to be repaired using a repair mechanism based on the image information of the first image processor and the analysis structure of the physicochemical analyzer.

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