Clean room temperature control method, apparatus, and system

By linking pressure and temperature regulation amplitudes in a cleanroom, dividing the process into stages, and dynamically adjusting the rate and duration, the problem of synchronous temperature and pressure regulation in a cleanroom is solved, achieving efficient temperature and pressure control.

CN116928851BActive Publication Date: 2026-02-13SHENZHEN YAERDIAN ENVIRONMENTAL TECH CO LTD
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Patent Information

Application Number
CN202310900937.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-07-20
Publication Date
2026-02-13
Estimated Expiration
2043-07-20

AI Technical Summary

Technical Problem

How to comprehensively adjust temperature and pressure in a cleanroom to ensure that both parameters meet requirements and avoid the problem of insufficient pressure when temperature is controlled alone.

Method used

By determining the correlation between the pressure regulation amplitude and the temperature regulation amplitude, the system is divided into three stages: the initial stage, the stable stage, and the final stage. A control unit is set in each stage to dynamically adjust the duration of the temperature and pressure regulation rates, thereby achieving synchronous adjustment of temperature and pressure.

Benefits of technology

It achieves synchronous adjustment of temperature and pressure, reduces adjustment time, avoids air waste and slow temperature adjustment during pressure regulation, and improves adjustment efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application belongs to the technical field of temperature regulation, and particularly relates to a clean room temperature control method, device and system, which comprises the following steps: determining a pressure regulation amplitude; determining a temperature regulation amplitude; correlating the pressure regulation amplitude and the temperature regulation amplitude; dividing the correlation result into a starting section, a stable section and an ending section; dividing each section into several regulation units; in the starting section, setting a first unit time, and in each first unit time, adjusting the temperature of the air supply according to the regulation unit, and adjusting the flow difference between the air supply port and the air outlet to change the indoor pressure to the target pressure; adjusting the time length of the starting section; adjusting the time length of the stable section; in the stable section, adjusting the temperature and the pressure according to the regulation unit; and in the ending section, adjusting the temperature and the pressure according to the first unit time and the regulation unit. The application realizes the synchronous adjustment of the two parameters by correlating the temperature regulation and the pressure regulation, and correspondingly performing the pressure regulation in the temperature regulation process.
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Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of temperature regulation, and particularly relates to a clean room temperature control method, device and system. BACKGROUND

[0002] The clean room has strict limitations on air cleanliness, temperature, pressure, humidity and the like, and can be divided into multiple levels according to different cleanliness levels.

[0003] The air cleanliness of the clean room is mainly achieved by changing the filtering capacity of the filtering device, the temperature control is mainly achieved by adjusting the temperature and flow of the circulating air, the air pressure in the clean room is adjusted by controlling the flow of the inlet and the flow of the outlet, and the temperature control is mainly achieved by adjusting the humidity of the circulating air. The control of temperature and pressure is relatively complex, because both of them are related to flow, and separate control of temperature cannot guarantee that the pressure also meets the requirements, and comprehensive consideration is needed.

[0004] How to comprehensively adjust the temperature and pressure in the clean room so that both parameters meet the requirements is a problem to be solved. SUMMARY

[0005] Therefore, the application provides a clean room temperature control method, which can solve the problem of how to comprehensively adjust the temperature and pressure in the clean room so that both parameters meet the requirements.

[0006] The first aspect of the application provides a clean room temperature control method, which comprises:

[0007] Obtaining a target pressure and a current indoor pressure, and determining a pressure adjustment range according to the target pressure and the current indoor pressure;

[0008] Obtaining a target temperature and a current indoor temperature, and determining a temperature adjustment range according to the target temperature and the current indoor temperature;

[0009] Correlating the pressure adjustment range and the temperature adjustment range, dividing the correlation result into three stages of a starting section, a stable section and an ending section, and dividing each stage into a plurality of control units, wherein the pressure adjustment range of each control unit is the same and the temperature adjustment range of each control unit is the same;

[0010] In the starting section, a first unit time is set, in each first unit time, the temperature of the air supply is adjusted according to the control unit, and the flow difference between the air supply port and the air outlet is adjusted to change the indoor pressure to the target pressure;

[0011] Every first unit time, the temperature value of all temperature detection points is obtained, the temperature time delay is determined according to the obtained temperature value, and the length of the starting section is adjusted according to the temperature time delay;

[0012] Every first unit time, the pressure value of all pressure detection points is obtained, the pressure time delay is determined according to the obtained pressure value, and the length of the stable section is adjusted according to the pressure time delay;

[0013] In the stable section, a plurality of control units are combined to obtain a control unit, and the temperature and the pressure are adjusted according to the control unit;

[0014] In the end section, the temperature and the pressure are adjusted according to the first unit time and the control unit.

[0015] The second aspect of the present application provides a clean room temperature control device, the clean room temperature control device comprises:

[0016] The pressure regulating amplitude determination module is used for obtaining the target pressure and the current indoor pressure, and determining the pressure regulating amplitude according to the target pressure and the current indoor pressure;

[0017] The temperature regulating amplitude determination module is used for obtaining the target temperature and the current indoor temperature, and determining the temperature regulating amplitude according to the target temperature and the current indoor temperature;

[0018] The association module is used for associating the pressure regulating amplitude and the temperature regulating amplitude, dividing the association result into three stages of a starting section, a stable section and an end section, dividing each stage into a plurality of control units, and the pressure regulating range and the temperature regulating range of each control unit being the same;

[0019] The starting control module is used for setting a first unit time in the starting section, adjusting the temperature of the air supply and the flow difference between the air supply port and the air outlet to change the indoor pressure to the target pressure according to the control unit in each first unit time, obtaining the temperature value of all temperature detection points every first unit time, determining the temperature time delay according to the obtained temperature value, and adjusting the length of the starting section according to the temperature time delay; every first unit time, the pressure value of all pressure detection points is obtained, the pressure time delay is determined according to the obtained pressure value, and the length of the stable section is adjusted according to the pressure time delay;

[0020] The stable control module is used for combining a plurality of control units to obtain a control unit in the stable section, and adjusting the temperature and the pressure according to the control unit;

[0021] The end control module is used for adjusting the temperature and the pressure according to the first unit time and the control unit in the end section.

[0022] The third aspect of the present application provides a clean room temperature control system, the clean room temperature control system comprising a temperature control device, a pressure regulating device and a control module;

[0023] The temperature control device and the pressure regulating device are connected in series, and are respectively used for adjusting the temperature and the pressure of the output air;

[0024] The control module is connected with the temperature control device and the pressure regulating device respectively, and is used for executing the clean room temperature control method as described in the present application.

[0025] Compared with the prior art, the present application has the beneficial effects that: the present application determines the pressure regulating amplitude and the temperature regulating amplitude, and correlates the two, to realize the synchronous adjustment of the temperature and the pressure; in the adjustment process, a step-by-step manner is adopted, and by setting the regulating unit, step-by-step adjustment is realized; further, the present application adjusts the time length of the starting section, the stable section and the ending section according to the changes of the temperature and the pressure in the adjustment process, so as to dynamically adjust the time length proportion of different temperature regulating or pressure regulating rates, so as to timely adjust the total time length according to the change situation of the temperature and the pressure, to avoid the problems of uneven indoor temperature and pressure distribution, or waste of adjustment energy consumption because the adjustment program has not ended although the adjustment target has been reached. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0027] Figure 1 is a flow chart of the clean room temperature control method provided by the embodiments of the present application;

[0028] Figure 2 is a structural block diagram of the clean room temperature control device provided by the embodiments of the present application;

[0029] Figure 3 is a schematic diagram of the controller provided by the embodiments of the present application. DETAILED DESCRIPTION

[0030] In the following description, specific details such as specific system structures, techniques, etc. are presented in order to thoroughly understand the embodiments of the present application. However, it should be clear to those skilled in the art that the present application can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits and methods are omitted to avoid unnecessary details that hinder the description of the present application.

[0031] In order to illustrate the technical solutions described in the present application, the following will be described by specific examples.

[0032] Figure 1 A clean room temperature control method is shown, which comprises:

[0033] The target pressure and the current indoor pressure are obtained, and the pressure regulating amplitude is determined according to the target pressure and the current indoor pressure;

[0034] The target temperature and the current indoor temperature are obtained, and the temperature regulating amplitude is determined according to the target temperature and the current indoor temperature;

[0035] The pressure regulating amplitude and the temperature regulating amplitude are associated, and the association result is divided into three stages of a starting section, a stable section and an ending section, each stage is divided into several regulating units, and the pressure regulating range and the temperature regulating range of each regulating unit are the same;

[0036] In the starting section, a first unit time is set, in each first unit time, the temperature of the supply air is adjusted according to the regulating unit, and the flow difference between the air supply port and the air outlet is adjusted to change the indoor pressure to the target pressure;

[0037] After each first unit time, the temperature values of all temperature detection points are obtained, the temperature time delay is determined according to the obtained temperature values, and the length of the starting section is adjusted according to the temperature time delay;

[0038] After each first unit time, the pressure values of all pressure detection points are obtained, the pressure time delay is determined according to the obtained pressure values, and the length of the stable section is adjusted according to the pressure time delay;

[0039] In the stable section, several regulating units are combined to obtain a regulating unit, and the temperature and the pressure are adjusted according to the regulating unit;

[0040] In the ending section, the temperature and the pressure are adjusted according to the first unit time and the regulating unit.

[0041] In the present application, the target pressure and the target temperature refer to the pressure and the temperature required to be reached in the clean room, which is the final target of control. The pressure regulating amplitude is equal to the current indoor pressure minus the target pressure, and the temperature regulating amplitude is equal to the current indoor temperature minus the target temperature, both of which can be positive or negative, and the positive and negative only represent the direction of adjustment.

[0042] In the present application, unlike the general adjustment scheme which adjusts the pressure first and then adjusts the pressure (or adjusts the temperature first and then adjusts the pressure), the present application combines the two and adjusts the temperature and the pressure simultaneously, reducing the adjustment time, avoiding the waste of air that reaches the target temperature during the pressure adjustment process, and the problem of excessive air supply during the temperature adjustment process (incomplete pressure adjustment, air supply is too large or too small) leading to waste or too small air supply leading to slow temperature adjustment.

[0043] In the present application, the first unit time is a set time, which can be set to 1 / 20, 1 / 50, 1 / 100, etc. of the desired total adjustment time. The shorter the first unit time, the more precise the adjustment, and vice versa. This can be set according to actual needs.

[0044] In the present application, while adjusting the temperature of the supply air, the flow difference between the supply air outlet and the exhaust air outlet also needs to be adjusted, and the purpose of adjusting the indoor air pressure is achieved by controlling the flow difference. It should be understood that for a clean room with low airtightness, only the inflow of air needs to be controlled, and the speed or flow of air outflow does not need to be controlled in particular, and the exhaust is achieved by the gap between the door and the window. For a clean room with high airtightness, both the inflow and outflow speeds of air need to be detected and controlled. In the present application, the indoor pressure is adjusted while adjusting the temperature of the supply air, and the indoor pressure is adjusted by adjusting the flow difference between the supply air outlet and the exhaust air outlet. When adjusting the flow difference, the exhaust air outlet size can be set to be fixed and unchanged, and the adjustment is achieved only by adjusting the flow of the inlet. In the present application, the flow of the supply air outlet is affected by the opening degree of the supply air outlet and the flow of the air source. Generally speaking, the flow of the air source is the root cause, which can be achieved by setting the supply air flow of the air source. The relationship between the supply air flow and the indoor pressure can be obtained by testing under the condition that the exhaust air outlet opening degree is constant, and the corresponding table of the supply air flow and the pressure can be determined by looking up the table to determine the corresponding supply air flow change range of the pressure adjustment amplitude. This is a conventional prior art, and the present application will not be described in detail. The pressure adjustment amplitude is used as a direct output variable to describe the present scheme.

[0045] In the present application, the entire adjustment process is divided into three stages, and the time length of the three stages is dynamically determined. The adjustment amplitude of the air flow and the temperature is different in different stages, thereby accelerating the entire adjustment process. In the present application, a number of control units are combined to obtain one control unit in the stable stage. Since the unit time used in the starting stage and the stable stage is the same, the stable stage has a larger control step distance and a faster control speed. Therefore, it is necessary to use the starting stage to obtain a relatively stable state before entering the stable stage. In order to make the control more accurate, the ending stage is adjusted again according to the first unit time and the control unit. This process is the same as the starting stage, except that the time length is shorter and it belongs to the final fine adjustment process.

[0046] The beneficial effects of the present application compared with the prior art are: the present application determines the pressure adjustment range and the temperature adjustment range, and correlates the two, to realize the synchronous adjustment of temperature and pressure; in the adjustment process, a step-by-step manner is adopted, and by setting the control unit, step-by-step gradual adjustment is realized; further, the present application adjusts the time length of the starting section, the stable section and the ending section according to the changes of temperature and pressure in the adjustment process, so as to dynamically adjust the time length proportion of different temperature adjustment or pressure adjustment rates, so as to timely adjust the total time length according to the change of temperature and pressure, and avoid the problems of uneven indoor temperature and pressure distribution, or waste of adjustment energy consumption because the adjustment program has not ended although the adjustment target has been reached.

[0047] As an optional embodiment of the present application, the pressure adjustment range and the temperature adjustment range are correlated, and the correlation result is divided into three stages of starting section, stable section and ending section, and each stage is divided into several control units, including:

[0048] The ratio of the total width of the pressure adjustment range to the total width of the temperature adjustment range is calculated to obtain the pressure adjustment amount corresponding to the temperature adjustment amount of each unit;

[0049] The total width of the temperature adjustment range is divided into three stages of starting section, stable section and ending section according to the set ratio, and the pressure adjustment range is correspondingly divided according to the division result;

[0050] According to the set unit adjustment temperature, each stage is divided to obtain several control units.

[0051] In the present application, the correlation of the temperature adjustment range and the pressure adjustment range is to determine the corresponding relationship between the pressure adjustment range and the temperature adjustment range, and to determine the change amount of pressure per degree of temperature adjustment. The control unit can be specifically represented as (a℃ / bPa), that is, the temperature adjustment range of each time is a℃, and the pressure adjustment range is bPa at the same time. The control unit is the minimum adjustment range of temperature and pressure in the adjustment process, that is, the step distance of the control.

[0052] As an optional embodiment of the present application, in each first unit time, the temperature of the supply air is adjusted according to the control unit, and the flow difference between the supply air port and the exhaust air port is adjusted to make the indoor pressure change towards the target pressure, including:

[0053] Every unit time, the supply air temperature is lowered or raised by a unit temperature adjustment amount according to the control unit;

[0054] The flow difference between the supply air port and the exhaust air port is lowered or raised according to the pressure adjustment amount corresponding to the temperature adjustment amount of each unit to make the indoor pressure change towards the target pressure.

[0055] In the present application, the temperature and the pressure are simultaneously adjusted through the above process. Here, the indoor pressure is increased to the pressure change, which can be understood as the current pressure is lower than the target pressure, the indoor pressure is increased, and vice versa. The corresponding relationship between the flow difference and the pressure can be determined by looking up the table, which records the corresponding relationship between the net flow (the difference between the inflow speed of the air supply port and the outflow speed of the air outlet) and the indoor pressure, which is obtained by testing the same environment multiple times.

[0056] As an optional embodiment of the present application, the temperature delay is determined according to the obtained temperature value, and the length of the starting section is adjusted according to the temperature delay, comprising:

[0057] For each detection point, the order number of the regulation unit is taken as the horizontal axis, and the time difference between the temperature of the regulation unit detected at the detection point and the starting time of the regulation unit is taken as the vertical axis, to obtain the time delay of each regulation unit corresponding to each detection point, and the regression line of each time delay is calculated to obtain the regression line of each detection point.

[0058] The first target regression line is selected from the regression lines of all detection points.

[0059] The temperature delay is determined according to the first target regression line from the order number of the latest regulation unit.

[0060] The length of the starting section is set to N times of the temperature delay, where N is the order number of the latest regulation unit and the length of the starting section is less than 2 / 3 of the total temperature adjustment time.

[0061] In the present application, the temperature of the regulation unit is the temperature of the air outlet after being adjusted by the regulation unit, which is the current temperature of the air supplied by the air supply port. This temperature cannot be reflected at the same time in each detection point, and the time when the temperature is detected by different detection points is different. Without considering the shielding problem, the detection point closer to the air supply port detects the temperature earlier.

[0062] In the present application, by recording the time delay of each detection point detecting each temperature, the regression line of each detection point about the time delay can be obtained, which represents the trend of the time delay of the corresponding detection point detecting the temperature of the air supplied by the air supply port. The first target regression line is selected from all regression lines. According to the first target regression line, the time delay of the latest regulating unit detected by the detection point can be determined. According to the law of the indoor temperature tending to be stable, the temperature time delay corresponding to the latest regulating unit will become smaller and smaller, and the starting segment length calculated accordingly will also become shorter and shorter. When the calculated starting segment length is equal to (or less than or equal to) the length of time that has been experienced, the execution of the starting segment is completed. In the present application, the starting segment length is further limited to within 2 / 3 of the total temperature regulation time to limit the length of the starting segment and allocate time to other stages. The total temperature regulation time is an empirical value, which can be set according to the regulation time or regulation experience, and the present application does not make too many limitations. In the present application, N is a set coefficient, and N is usually valued at about 20-80. The larger N is, the longer the starting segment length is, and the more stable it tends to be.

[0063] As an optional embodiment of the present application, the pressure time delay is determined according to the obtained pressure value, and the length of the stable segment is adjusted according to the pressure time delay, which comprises:

[0064] For each detection point, the ordinal number of the regulating unit is taken as the horizontal axis, and the time distance between the pressure of the regulating unit detected at the detection point and the starting time of the regulating unit is taken as the vertical axis, to obtain the time delay of each regulating unit corresponding to each detection point, and the regression line of each detection point is calculated by calculating the regression line of each time delay.

[0065] The second target regression line is selected from the regression lines of all detection points.

[0066] The pressure time delay is determined according to the second target regression line from the ordinal number of the latest regulating unit.

[0067] The length of the stable segment is set to M times of the pressure time delay, where M is the ordinal number of the current latest regulating unit and the length of the stable segment is less than 1 / 3 of the total temperature regulation time.

[0068] In the present application, the pressure of the regulating unit is the expected indoor pressure after the adjustment of the regulating unit, that is, the pressure value corresponding to the current air source flow. This pressure value cannot be reflected at the same time at each detection point, and the time of detecting this pressure value by different detection points is different. Without considering the shielding problem, the closer to the air supply port, the earlier the detection point detects the pressure value.

[0069] In the present application, by recording the time delay of each detection point detecting each pressure value, the regression line of each detection point about time delay can be obtained, which represents the trend of the pressure value corresponding to the flow of the air supplied by the air supply port detected by the corresponding detection point. A second target regression line is selected from all regression lines. According to the second target regression line, the time delay of the latest regulating unit detected by the detection point can be determined. According to the law of the indoor pressure tending to be stable, the pressure time delay corresponding to the latest regulating unit will become smaller and smaller, and the stable segment length calculated accordingly will also become shorter and shorter. When the calculated stable segment length is equal to (or less than or equal to) the length of time that has been experienced (referring to the length of time experienced after entering the stable segment from the end of the starting segment), the stable execution is completed. In the present application, the stable segment length is further limited to within 1 / 3 of the total temperature adjustment time to limit the stable segment time for other end allocation time. The total temperature adjustment time is an empirical value, which can be set according to the regulation time or regulation experience, and the present application does not make too many limitations. In the present application, M is a set coefficient, and M is less than or equal to N.

[0070] In the present application, it can be understood that the length of time remaining after the total temperature adjustment time minus the starting segment and the stable segment is the end segment length.

[0071] In the present application, through the above settings, the automatic adjustment of the lengths of the three stages can be realized, so that each stage is more reasonable, the total regulation time is reduced, and the joint adjustment of temperature and pressure is realized.

[0072] As an optional embodiment of the present application, selecting the first target regression line or the second target regression line from all regression lines of the detection points comprises:

[0073] determining whether there is a regression line whose Y value corresponding to the same X value is greater than all regression lines, and if so, selecting the regression line as the first target regression line or the second target regression line;

[0074] if not, selecting the regression line with the largest slope as the first target regression line or the second target regression line.

[0075] In the present application, the above gives the selection method of the target regression line. Through this method, the regression line that is most obviously affected by time delay can be found, or the regression line can be re-determined, so as to adjust the lengths of the stages and reduce the influence degree of a single detection point.

[0076] Figure 2 A clean room temperature control device provided by Embodiment Two of the present application is shown. The clean room temperature control device comprises:

[0077] A pressure regulation amplitude determination module is configured to obtain a target pressure and a current indoor pressure, and determine a pressure regulation amplitude according to the target pressure and the current indoor pressure.

[0078] The temperature adjustment range determination module is configured to obtain a target temperature and a current indoor temperature, and determine a temperature adjustment range according to the target temperature and the current indoor temperature.

[0079] The association module is configured to associate the pressure adjustment range and the temperature adjustment range, divide the association result into three stages of a starting stage, a stable stage and an ending stage, and divide each stage into a plurality of control units, wherein the pressure adjustment range of each control unit is the same and the temperature adjustment range of each control unit is the same.

[0080] The starting control module is configured to set a first unit time in the starting stage, adjust the temperature of the supplied air and simultaneously adjust the flow difference between the air supply port and the air outlet to change the indoor pressure to the target pressure according to the control unit in each first unit time, obtain the temperature values of all temperature detection points after each first unit time, determine a temperature time delay according to the obtained temperature values, adjust the time length of the starting stage according to the temperature time delay, obtain the pressure values of all pressure detection points after each first unit time, determine a pressure time delay according to the obtained pressure values, and adjust the time length of the stable stage according to the pressure time delay.

[0081] The stable control module is configured to combine a plurality of control units to obtain a control unit, and adjust the temperature and the pressure according to the control unit.

[0082] The ending control module is configured to adjust the temperature and the pressure according to the first unit time and the control unit.

[0083] In the present application, the above-mentioned various modules are modularization of the clean room temperature control method provided by the present application. For specific explanation and description of each module, please refer to the content of the method part. The present embodiment will not be repeated here.

[0084] Embodiment three of the present application provides a clean room temperature control system, wherein the clean room temperature control system comprises a temperature control device, a pressure adjustment device and a control module.

[0085] The temperature control device and the pressure adjustment device are connected in series, and are respectively configured to adjust the temperature and the pressure of the output air.

[0086] The control module is connected with the temperature control device and the pressure adjustment device, and is configured to execute the clean room temperature control method according to any one of the embodiments of the present application.

[0087] In the present application, the temperature control device can be specifically an air conditioner, and the adjusting device can be specifically a fan or the like that can drive air to flow quantitatively; the air conditioner first adjusts the air to the required temperature, and then drives the fan to blow into the clean room, so as to realize the adjustment of the temperature and the flow, thereby changing the temperature and the pressure in the clean room. The control module can be specifically a computer device or other types of controllers, etc., and the present application does not make specific limitations on the specific implementation forms.

[0088] It should be understood that the size of the serial number of each step in the above embodiments does not mean the order of execution, and the execution order of each process should be determined according to its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0089] It should be understood that when used in the present application and the appended claims, the term "comprising" indicates the presence of described features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or sets thereof.

[0090] It should also be understood that the term "and / or" used in the present application and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0091] As used in the present application and the appended claims, the term "if" can be interpreted as "when" or "upon" or "in response to a determination" or "in response to detecting" depending on the context. Similarly, the phrase "if it is determined" or "if [a described condition or event] is detected" can be interpreted depending on the context to mean "upon determining" or "in response to determining" or "upon detecting [a described condition or event]" or "in response to detecting [a described condition or event]".

[0092] In addition, in the description of the present application and the appended claims, the terms "first", "second", "third", etc. are only used for differentiation, and cannot be understood as indicating or implying relative importance. It should also be understood that although the terms "first", "second", etc. are used in the text to describe various elements in some embodiments of the present application, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first table can be named as the second table, and similarly, the second table can be named as the first table, without departing from the scope of various described embodiments. The first table and the second table are both tables, but they are not the same table.

[0093] Reference throughout this application to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrase "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. The term "or" as used herein is intended to mean an inclusive "or" unless specifically indicated otherwise, such as "or else" or "or in the alternative." Furthermore, the terms "comprise," "comprises," "comprising," "include," "includes," and "including" are intended to be open-ended terms that mean "including, but not limited to," unless otherwise noted. The term "coupled" as used herein is intended to mean the direct or indirect coupling between elements, unless otherwise noted.

[0094] The temperature control method for clean rooms provided by the embodiments of the present application can be applied to controllers such as mobile phones, tablet computers, wearable devices, vehicle-mounted devices, augmented reality (AR) / virtual reality (VR) devices, notebook computers, ultra-mobile personal computers (UMPCs), netbooks, personal digital assistants (PDAs), and the like, thereby achieving local or cloud control. The embodiments of the present application do not limit the specific types of controllers.

[0095] For example, the controller can be a station (STATION, ST) in a WLAN, can be a cellular phone, a cordless phone, a Session Initiation Protocol (SIP) phone, a Wireless Local Loop (WLL) station, a Personal Digital Assistant (PDA) device, a handheld device having wireless communication function, a computing device, or other processing device connected to a wireless modem, a vehicle-mounted device, a vehicle networking terminal, a computer, a laptop computer, a handheld communication device, a handheld computing device, a satellite radio device, a wireless modem card, a television set top box (STB), a customer premise equipment (CPE), and / or other devices for communicating over a wireless system, and a next-generation communication system, for example, a controller in a 5G network or a controller in a future evolved Public Land Mobile Network (PLMN) network.

[0096] As an example and not a limitation, when the controller is a wearable device, the term "wearable device" can also refer to any device that utilizes wearable technology to intelligently design and develop everyday wearables, such as glasses, gloves, watches, clothing, and shoes. Wearable devices are portable devices worn directly on the body or integrated into a user's clothing or accessories. Wearable devices are not merely hardware devices; they achieve powerful functions through software support, data interaction, and cloud interaction. Broadly defined, wearable smart devices include those with comprehensive functions, large sizes, and the ability to perform complete or partial functions without relying on a smartphone, such as smartwatches or smart glasses, as well as those focused on a specific application function that require interaction with other devices such as smartphones, such as various smart bracelets and smart jewelry for vital sign monitoring.

[0097] Figure 3 This is a schematic diagram of the controller provided in one embodiment of this application. Figure 3 As shown, the controller 3 in this embodiment includes: at least one processor 30 ( Figure 3 Only one is shown in the image), memory 31, which stores a computer program 32 that can run on the processor 30. When the processor 30 executes the computer program 32, it implements the steps in the above-described embodiments of temperature control methods for cleanrooms, for example... Figure 1 The steps S100 to S600 are shown. Alternatively, when the processor 30 executes the computer program 32, it implements the functions of each module / unit in the above-described device embodiments.

[0098] The controller 3 can be a computing device such as a desktop computer, laptop, handheld computer, or cloud server. The controller may include, but is not limited to, a processor 30 and a memory 31. Those skilled in the art will understand that... Figure 3 This is merely an example of controller 3 and does not constitute a limitation on controller 3. It may include more or fewer components than shown, or combine certain components, or different components. For example, the controller may also include input transmitting devices, network access devices, buses, etc.

[0099] The processor 30 can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gates or transistor logic, discrete hardware components, etc. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor.

[0100] The memory 31 can be an internal storage unit of the controller 3 in some embodiments, for example, a hard disk or a memory of the controller 3. The memory 31 can also be an external storage device of the controller 3, for example, a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. Further, the memory 31 can also include both the internal storage unit and the external storage device of the controller 3. The memory 31 is used to store an operating system, an application program, a boot loader, data and other programs, for example, program codes of the computer program, etc. The memory 31 can also be used to temporarily store data that has been transmitted or is to be transmitted.

[0101] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can be physically present separately, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0102] The embodiments of the present application also provide a controller, which includes at least one memory, at least one processor and a computer program stored in the at least one memory and executable on the at least one processor, and the processor executes the computer program to enable the controller to implement the steps in any of the above method embodiments.

[0103] The embodiments of the present application also provide a computer readable storage medium, which stores a computer program, and the computer program is executable on a processor to implement the steps in any of the above method embodiments.

[0104] The embodiments of the present application provide a computer program product, when the computer program product runs on the controller, causes the controller to execute the steps in the above-mentioned various method embodiments.

[0105] The integrated modules / units, if realized in the form of software function units and sold or used as independent products, can be stored in a computer readable storage medium. Based on such understanding, the present application realizes all or part of the processes in the above-mentioned embodiment methods, which can also be completed by instructing related hardware through a computer program. The computer program can be stored in a computer readable storage medium, and the computer program can realize the steps in the above-mentioned various method embodiments when executed by a processor. The computer program includes computer program code, which can be in the form of source code, object code, executable file or some intermediate form. The computer readable medium can include any entity or device, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier wave signal, telecommunication signal and software distribution medium, etc. that can carry the computer program code.

[0106] In the above-mentioned embodiments, the description of each embodiment has its own focus, and the parts not described or recorded in detail in a certain embodiment can be referred to the relevant description of other embodiments.

[0107] Those skilled in the art can realize that the units and algorithm steps of the examples described in combination with the embodiments disclosed herein can be realized by electronic hardware or a combination of computer software and electronic hardware. Whether the functions are realized in hardware or software mode depends on the specific application and design constraints of the technical solution. The skilled person can use different methods to realize the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0108] The units described as separate components can or can not be physically separated, and the components shown as units can or can not be physical units, i.e. they can be located in one place or distributed on multiple network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the present embodiment.

[0109] The above-described embodiments are only used to illustrate the technical solutions of the present application, but not limit them; although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A temperature control method for a clean room, characterized by, The clean room temperature control method comprises: obtaining a target pressure and a current indoor pressure, and determining a pressure regulating amplitude according to the target pressure and the current indoor pressure; obtaining a target temperature and a current indoor temperature, and determining a temperature regulating amplitude according to the target temperature and the current indoor temperature; correlating the pressure regulating amplitude and the temperature regulating amplitude, dividing the correlation result into three stages of a starting section, a stable section and an ending section, and dividing each stage into a plurality of regulating units, wherein the pressure regulating range of each regulating unit is the same and the temperature regulating range of each regulating unit is the same; in the starting section, a first unit time is set, in each first unit time, the temperature of the air supply is adjusted according to the regulating unit, and the flow difference between the air supply port and the air outlet is adjusted to change the indoor pressure to the target pressure; after each first unit time, the temperature values of all temperature detection points are obtained, a temperature time delay is determined according to the obtained temperature values, and the length of the starting section is adjusted according to the temperature time delay; after each first unit time, the pressure values of all pressure detection points are obtained, a pressure time delay is determined according to the obtained pressure values, and the length of the stable section is adjusted according to the pressure time delay; in the stable section, a plurality of regulating units are combined to obtain a regulating unit, and the temperature and the pressure are adjusted according to the regulating unit; in the ending section, the temperature and the pressure are adjusted according to the first unit time and the regulating unit; the temperature time delay is determined according to the obtained temperature values, and the length of the starting section is adjusted according to the temperature time delay, comprising: for each detection point, taking the serial number of the regulating unit as the horizontal axis and taking the time difference between the temperature of the regulating unit detected at the detection point and the starting time of the regulating unit as the vertical axis, the time delay of each detection point corresponding to each regulating unit is obtained, and the regression line of each time delay is calculated to obtain the regression line of each detection point; a first target regression line is selected from the regression lines of all detection points; the temperature time delay is determined according to the first target regression line from the serial number of the latest regulating unit; the length of the starting section is set to N times of the temperature time delay, wherein N is the serial number of the current latest regulating unit and the length of the starting section is less than 2 / 3 of the total temperature regulating time; the pressure time delay is determined according to the obtained pressure values, and the length of the stable section is adjusted according to the pressure time delay, comprising: for each detection point, taking the serial number of the regulating unit as the horizontal axis and taking the time difference between the pressure of the regulating unit detected at the detection point and the starting time of the regulating unit as the vertical axis, the time delay of each detection point corresponding to each regulating unit is obtained, and the regression line of each time delay is calculated to obtain the regression line of each detection point; a second target regression line is selected from the regression lines of all detection points; the pressure time delay is determined according to the second target regression line from the serial number of the latest regulating unit; the length of the stable section is set to M times of the pressure time delay, wherein M is the serial number of the current latest regulating unit and the length of the stable section is less than 1 / 3 of the total temperature regulating time.

2. The clean room temperature control method of claim 1, wherein, the pressure regulating amplitude and the temperature regulating amplitude are correlated, the correlation result is divided into three stages of a starting section, a stable section and an ending section, and each stage is divided into a plurality of regulating units, comprising: The ratio of the total width of the pressure regulating amplitude to the total width of the temperature regulating amplitude is calculated to obtain the pressure regulating amount corresponding to the temperature regulating amount of each unit; The total width of the temperature regulating amplitude is divided into three stages of a starting stage, a stable stage and an ending stage according to the set ratio, and the pressure regulating amplitude is correspondingly divided according to the division result; Each stage is divided into a plurality of regulating units according to the set unit adjustment temperature.

3. The clean room temperature control method of claim 1, wherein, In each first unit time, the temperature of the supply air is adjusted according to the regulating unit, and the flow difference between the air supply port and the air outlet is adjusted to change the indoor pressure to the target pressure, including: After each unit time, the supply air temperature is lowered or raised by a unit of temperature regulating amount according to the regulating unit; The flow difference between the air supply port and the air outlet is lowered or raised according to the pressure regulating amount corresponding to the temperature regulating amount of each unit to change the indoor pressure to the target pressure.

4. The clean room temperature control method of claim 1, wherein, The first target regression line or the second target regression line is selected from all regression lines of the detection points, including: It is judged whether there is a regression line, for the same X value, the Y value corresponding to the regression line is greater than all regression lines, if yes, the regression line is selected as the first target regression line or the second target regression line; If not, the regression line with the largest slope is selected as the first target regression line or the second target regression line.

5. A clean room temperature control device, characterized by, The clean room temperature control device comprises: A pressure regulating amplitude determination module is configured to obtain a target pressure and a current indoor pressure, and determine a pressure regulating amplitude based on the target pressure and the current indoor pressure; A temperature regulating amplitude determination module is configured to obtain a target temperature and a current indoor temperature, and determine a temperature regulating amplitude based on the target temperature and the current indoor temperature; An association module is configured to associate the pressure regulating amplitude and the temperature regulating amplitude, divide the association result into three stages of a starting stage, a stable stage and an ending stage, and divide each stage into a plurality of regulating units, each of which has the same pressure regulating range and the same temperature regulating range; A starting control module is configured to set a first unit time in the starting stage, adjust the temperature of the supply air according to the regulating unit in each first unit time, and adjust the flow difference between the air supply port and the air outlet to change the indoor pressure to the target pressure; after each first unit time, obtain the temperature values of all temperature detection points, determine a temperature time delay based on the obtained temperature values, and adjust the time length of the starting stage based on the temperature time delay; after each first unit time, obtain the pressure values of all pressure detection points, determine a pressure time delay based on the obtained pressure values, and adjust the time length of the stable stage based on the pressure time delay; A stable control module is configured to combine a plurality of regulating units to obtain a regulating unit, and adjust the temperature and the pressure based on the regulating unit; An ending control module is configured to adjust the temperature and the pressure based on the first unit time and the regulating unit; The temperature time delay is determined based on the obtained temperature values, and the time length of the starting stage is adjusted based on the temperature time delay, including: For each detection point, taking the ordinal number of the regulation unit as the horizontal axis and the time distance between the temperature of the regulation unit detected at the detection point and the starting time of the regulation unit as the vertical axis, the time delay of each regulation unit corresponding to each detection point is obtained, and a regression line of each time delay is calculated to obtain the regression line of each detection point; A first target regression line is selected from the regression lines of all detection points; A temperature time delay is determined according to the first target regression line from the ordinal number of the latest regulation unit; The length of the starting section is set to N times of the temperature time delay, wherein N is the ordinal number of the current latest regulation unit and the length of the starting section is less than 2 / 3 of the total temperature adjustment duration; The pressure time delay is determined according to the obtained pressure value, and the length of the stable section is adjusted according to the pressure time delay, including: For each detection point, taking the ordinal number of the regulation unit as the horizontal axis and the time distance between the pressure of the regulation unit detected at the detection point and the starting time of the regulation unit as the vertical axis, the time delay of each regulation unit corresponding to each detection point is obtained, and a regression line of each time delay is calculated to obtain the regression line of each detection point; A second target regression line is selected from the regression lines of all detection points; A pressure time delay is determined according to the second target regression line from the ordinal number of the latest regulation unit; The length of the stable section is set to M times of the pressure time delay, wherein M is the ordinal number of the current latest regulation unit and the length of the stable section is less than 1 / 3 of the total temperature adjustment duration.

6. A clean room temperature control system, characterized by, The clean room temperature control system comprises a temperature control device, a pressure regulating device and a control module; The temperature control device and the pressure regulating device are connected in series and are respectively used for adjusting the temperature and pressure of the output air; The control module is connected with the temperature control device and the pressure regulating device, and is used for executing the clean room temperature control method according to any one of claims 1-4.

Citation Information

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