Interference signal compensation method, device and electronic equipment in electron beam scanning imaging

Abstract

The present application provides a method, device and electronic device for compensating interference signals in electron beam scanning imaging, including: acquiring a scanning image in a reference direction; determining a reference signal model of the interference signal in the scanning image according to the scanning image; determining a target compensation model based on the reference signal model of the interference signal; and compensating for the interference signal in the scanning direction based on the target compensation model. The present application provides a method, device and electronic device for compensating interference signals in electron beam scanning imaging, solving the problem of image quality degradation due to signal interference such as vibration or noise during electron beam scanning imaging, improving image resolution and reducing image positioning deviation.

Description

Technical Field

[0001] The present application relates to the technical field of electron beam scanning imaging, and in particular to an interference signal compensation method, device and electronic equipment in electron beam scanning imaging. Background Art

[0002] Interference signals (such as vibration or noise) in electron beam scanning imaging equipment (mainly including scanning electron microscopes, electron beam defect detection equipment, key dimension measurement equipment, etc.) will affect the image quality, resulting in problems such as reduced resolution, image glitches, and position deviation.

[0003] The main method used in the industry is to reduce the impact of interference through vibration isolation devices, shielding devices or filtering devices. Existing compensation technologies mainly include two categories.

[0004] The first type of compensation technology mainly includes: isolating the electron beam scanning imaging system from the surrounding environment through vibration isolators, shielding noise signals or filtering noise signals, etc. to isolate or suppress interference, thereby reducing the impact of interference. The second type of compensation technology is image compensation processing technology, the basic principle of which is to extract interference feature information from the electron beam image and make corresponding corrections to the position deviation of the image.

[0005] The first type of compensation technology lacks effective means for situations where the interference signal source is located inside the equipment, or the interference exceeds the compensation capacity of the vibration isolation device, shielding device or filtering device. The main problem with the second type of image vibration compensation technology is that it requires post-processing of the image, and it takes at least hundreds of milliseconds or seconds of image processing time. It is not applicable to situations that require real-time high-speed imaging (such as integrated circuit electron beam detection and measurement equipment); and it is necessary to set up additional image scanning intervals, which generates additional data processing requirements and reduces the overall rate. Summary of the invention

[0006] The present application provides a method, device and electronic equipment for compensating interference signals in electron beam scanning imaging, so as to solve the problem of image quality degradation caused by interference signals in the electron beam scanning imaging process.

[0007] According to the first aspect of the present application, a method for compensating interference signals in electron beam scanning imaging is provided, comprising: acquiring a scanning image in a reference direction; determining a reference signal model of the interference signal in the scanning image based on the scanning image; determining a target compensation model based on the reference signal model of the interference signal; and compensating for the interference signal in the scanning direction based on the target compensation model.

[0008] In some embodiments, determining a baseline signal model of an interference signal in the scanned image based on the scanned image includes: performing data analysis on the scanned image to extract a spatial direction and basic parameters of the interference signal; and determining a baseline signal model of the interference signal based on the basic parameters.

[0009] In some implementations, determining a target compensation model based on a reference signal model of the interference signal includes: processing the reference signal model to obtain a target signal model; and determining a target compensation model based on the target signal model.

[0010] In some embodiments, the interference signal is a vibration signal, and the processing of the reference signal model to obtain the target signal model interference signal includes: based on the relationship between the scanning direction and the reference direction, processing the reference signal model to determine the target signal model of the vibration signal; or the interference signal is a noise signal, and the processing of the reference signal model to obtain the target signal model includes: amplifying basic parameters in the reference signal model to obtain the target signal model of the noise signal.

[0011] In some embodiments, the reference direction includes an orthogonal first direction and a second direction, and acquiring a scanned image in the reference direction includes: acquiring a first scanned image in the first direction; and acquiring a second scanned image in the second direction.

[0012] In some embodiments, the reference signal model is processed based on the relationship between the scanning direction and the reference direction to determine the target signal model of the vibration signal, including: judging whether the scanning direction is consistent with the reference direction; when the scanning direction is consistent with the reference direction, the reference signal model is the target signal model; when the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model.

[0013] In some embodiments, when the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model, including: correcting the reference vibration model based on the angle between the scanning direction and the reference direction to obtain the target vibration model.

[0014] In some embodiments, determining the target compensation model based on the target signal model includes: determining an initial compensation model based on the target signal model; determining a phase deviation based on a time difference between an actual interference signal and an interference signal in a scanned image; and correcting the initial compensation model according to the phase deviation to obtain a target compensation model.

[0015] According to the second aspect of the present application, a device for compensating interference signals in electron beam scanning imaging is provided, comprising: an acquisition module for acquiring a scanning image in a reference direction; a reference signal model determination module for determining a reference signal model of an interference signal in the scanning image based on the scanning image; a target compensation model determination module for determining a target compensation model based on the reference signal model of the interference signal; and a waveform generation module for compensating for the interference signal in the scanning direction based on the target compensation model.

[0016] According to the third aspect of the present application, an electronic device is provided, comprising: a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of the above-mentioned method for compensating interference signals in electron beam scanning imaging.

[0017] In summary, the interference signal compensation method, device and electronic device in electron beam scanning imaging provided by the present application have at least the following beneficial effects:

[0018] In the interference signal compensation method in electron beam scanning imaging of the present application, a reference signal model of the interference signal is obtained based on the characteristics of the interference signal extracted from the scanning image obtained in a reference direction, and then a target compensation model is obtained by processing the reference signal model. Then, based on the target compensation model, the interference signal in the scanning imaging process along the scanning direction is compensated. This compensation method for the interference signal is not affected by the position of the signal source, and can perform real-time compensation processing of the interference signal during the electron beam scanning imaging process, thereby reducing the influence of the interference signal on the quality of the scanning image, improving the quality of the scanning image, saving the time of image compensation processing, and improving the efficiency of electron beam scanning imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A flowchart of a method for compensating interference signals in electron beam scanning imaging provided in an embodiment of the present application;

[0021] Figure 2 A flowchart of an embodiment of a method for compensating interference signals in electron beam scanning imaging provided in an embodiment of the present application;

[0022] Figure 3A schematic diagram of the structure of a vibration interference acquisition sample in an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0023] Figure 4 An image obtained by scanning a sample from a first direction using a vibration interference acquisition sample in an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0024] Figure 5 An image obtained by scanning a sample from a second direction using a vibration interference acquisition sample in an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0025] Figure 6 A schematic diagram of the structure of a noise interference acquisition sample in an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0026] Figure 7 An image obtained by scanning a sample with noise interference in a method for compensating interference signals in electron beam scanning imaging provided in an embodiment of the present application;

[0027] Figure 8 A schematic diagram showing a comparison between an actual vibration direction and a reference vibration direction of an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0028] Fig. 9 A schematic diagram of an image before signal compensation based on an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0029] Fig.10 A schematic diagram of an image after signal compensation based on an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application;

[0030] Fig.11 A schematic diagram of the structure of an interference signal compensation device in electron beam scanning imaging provided by an embodiment of the present application;

[0031] Fig.12 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0032] In order to make the above and other features and advantages of the present application more clear, the present application is further described below in conjunction with the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0033] In the following description, many specific details are set forth to provide a thorough understanding of the present application. However, it is apparent to those skilled in the art that specific details need not be adopted to practice the present application. In other cases, well-known steps or operations are not described in detail to avoid blurring the present application.

[0034] The interference signal compensation method in electron beam scanning imaging provided in the embodiment of the present application can be executed by the interference signal compensation device in electron beam scanning imaging provided in the embodiment of the present application, and the device can be configured in an electronic device or a readable storage medium.

[0035] Reference Figure 1 The present application provides a method for compensating interference signals in electron beam scanning imaging, which includes steps 101-104.

[0036] Step 101: Acquire a scanned image in a reference direction.

[0037] Specifically, refer to Figure 2 or Figure 5 , a sample with clear boundaries can be selected, and then the boundary of the sample is placed in the central area of ​​the image field of view of a scanning device (such as an electron beam scanning imaging device), and the slow scanning signal of the device scanning signal (the device scanning signal is a combination of a fast scanning signal and a slow scanning signal in the row direction) is set to zero to obtain a spliced ​​image of the middle row of the field of view in continuous time. If there is no interference, an image of a straight line segment is obtained; if there is interference, an image of a line segment with dislocation information (burrs) can be obtained.

[0038] The acquisition may be active acquisition or passive reception, which may be triggered by an application itself, or may be a request triggered by an application after receiving a user operation, etc., which is not limited in this application. In this embodiment of the application, the interference signal is collected by taking the more common periodic continuous interference and phased interference as examples.

[0039] In addition, the reference direction may be a preset direction, the reference direction may be used as a reference direction for the actual scanning direction, and the reference direction may be used to measure the actual scanning direction. The image processed in the embodiment of the present application may include an image generated by scanning electron microscope (ie, SEM image).

[0040] Step 102: Determine a reference signal model of an interference signal in the scanned image according to the scanned image.

[0041] Specifically, according to the scanned image, a baseline signal model of the interference signal in the scanned image is determined, including: performing data analysis on the scanned image to extract the spatial direction and basic parameters of the interference signal; and determining the baseline signal model of the interference signal based on the basic parameters.

[0042] The data analysis method can be to analyze the scanned image in the time domain and frequency domain (such as using Fourier transform and other technical means for analysis), mainly to extract the spatial direction and basic parameters of the interference signal, and the basic parameters may include but are not limited to frequency, phase, amplitude information, etc. By extracting information such as the basic parameters of the interference signal from the scanned image, time cost and data processing cost can be effectively saved.

[0043] The reference signal model is obtained based on the analysis and extraction of the scanned image, and can be used as an application model or reference model for the actual interference signal. Specifically, the reference signal model can be expressed as:

[0044]

[0045] Where i represents each frequency component; A i represents the amplitude of each frequency, ω i Indicates frequency; Indicates the phase of the interference signal.

[0046] Therefore, based on the reference signal model proposed in the embodiment of the present application, as an application model or reference model of the actual interference signal, the processing speed of the interference signal can be significantly improved.

[0047] Step 103: Determine a target compensation model based on the reference signal model of the interference signal.

[0048] The target compensation model is the compensation model corresponding to the compensation signal, and the compensation signal is used to offset the interference signal during the scanning process. Since the compensation signal is output by the scanning driver of the scanning electron microscope, the final result is to generate a compensation signal with the same amplitude as the interference signal to achieve the offset effect. That is, if the interference causes the sample to shift to the left, the interference signal controls the electron beam to produce the same amplitude of leftward displacement.

[0049] Reference Figure 9-10 , step 104, compensating the interference signal in the scanning direction based on the target compensation model. Fig. 9 This is a schematic diagram of the image obtained before scanning image compensation. Fig.10 Schematic diagram of an image obtained after image compensation is performed based on the compensation method of an embodiment of the present application. Fig. 9 and Fig.10 The comparison can show the reliable and accurate image compensation effect obtained by the compensation method of the present application. Among them, the scanning direction is different from the reference direction and is presented as an actual scanned image. In actual operation, the actual scanning direction is random, and the actual scanning direction may be consistent with the reference direction, or may be consistent with the reference direction at an angle.

[0050] In the interference signal compensation method in electron beam scanning imaging of the present application, a reference signal model of the interference signal is obtained based on the characteristics of the interference signal extracted from the scanning image obtained in the reference direction, and then the target compensation model is obtained by processing the reference signal model. Then, based on the target compensation model, the interference signal in the scanning imaging process along the scanning direction is compensated. This compensation method for the interference signal is not affected by the position of the signal source, and can perform real-time compensation processing of the interference signal during the electron beam scanning imaging process, thereby reducing the influence of the interference signal on the quality of the scanning image, improving the quality of the scanning image, saving the time of image compensation processing, and improving the efficiency of electron beam scanning imaging.

[0051] Reference Figure 2 The present application provides a method for compensating interference signals in electron beam scanning imaging, which includes steps 201-207.

[0052] 201, acquiring a scanned image in a reference direction.

[0053] 202. Determine a reference signal model of an interference signal in the scanned image according to the scanned image.

[0054] 203: Process the reference signal model to obtain a target signal model.

[0055] 204. Determine an initial compensation model based on the target signal model.

[0056] In some embodiments, the initial compensation model can be expressed as:

[0057]

[0058] Where Ti is the transfer coefficient, which represents the proportional coefficient between the amplitude of the compensation signal and the vibration signal. is the phase of the compensation signal, the phase of the compensation signal is the vibration signal phase inverted to achieve the purpose of cancellation.

[0059] 205 , determining a phase deviation based on a time difference between an actual interference signal and an interference signal in the scanned image.

[0060] For the periodic continuous interference signal, its actual compensation signal will be output in real time during the image acquisition process. There will inevitably be a time difference between the interference signal and the interference signal in the scanned image acquired in step 201, so the compensation signal must take into account the phase deviation caused by this.

[0061] Therefore, based on the time difference between the actual interference signal and the interference signal in the scanned image, the phase deviation is determined; according to the phase deviation, the initial compensation model is corrected to obtain the target compensation model.

[0062] Specifically, the time difference between the actual interference signal and the interference signal in the scanned image can be expressed as:

[0063] t d =t0+t c +t w +t m Among them, t d is the time to start compensation, t0 is the time to complete image acquisition, and t c is the time determined by the reference signal model (i.e., the time for image processing and interference signal information extraction), t w The time before image acquisition is the time to wait for the image acquisition signal to be sent and the time to send the image acquisition command, t m is the time that needs to be fine-tuned. The phase reference time based on the interference signal obtained in the scanned image is t0.

[0064] 206 , modifying the initial compensation model according to the phase deviation to obtain a target compensation model.

[0065] In some embodiments, based on t0 and t d , the phase difference between the actual interference signal and the interference signal in the scanned image can be determined Then the modified target compensation model is:

[0066]

[0067] Reference Figure 9-10 , Fig. 9 A schematic diagram of comparison after compensation of an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application is shown in FIG. Fig.10 A post-compensation comparison schematic diagram of an interference signal compensation method in electron beam scanning imaging provided in an embodiment of the present application. Figure 9-10 A method for compensating interference signals in electron beam scanning imaging according to an embodiment of the present application is demonstrated, wherein the difference between the scanned images before and after the interference signal compensation is shown. Based on the real-time scanning compensation of the present application, the scanned image presents a higher quality image.

[0068] 207: Compensate the interference signal based on the target compensation model.

[0069] The embodiment of the present application effectively solves the error caused by the time difference between the target signal and the reference signal in the actual scan through phase modulation, and improves the accuracy of the interference signal compensation model in electron beam scanning imaging. As a result, the problem of image quality degradation caused by interference in electron beam scanning imaging is effectively reduced, the image resolution is improved, and the image positioning deviation generated during the scanning process is reduced.

[0070] The present application provides a method for compensating interference signals in electron beam scanning imaging as follows, wherein the interference signal is a vibration signal, and the method includes steps 301-307.

[0071] 301, acquiring a scanned image in a reference direction.

[0072] Specifically, the reference direction includes a first direction and a second direction that are orthogonal to each other. Acquiring a scanned image in the reference direction includes: acquiring a first scanned image in the first direction and a second scanned image in the second direction. Figure 3-7 As shown, there is a difference between obtaining a vibration scanning image in a reference direction and obtaining a noise scanning image in a reference direction. Figure 3 The vibration scanning sample in the Figure 4 and Figure 5 Specifically, based on Figure 3 The first scanning image obtained by scanning the sample in the first direction is as follows Figure 4 As shown, based on Figure 3 The second scanning image obtained by scanning the sample in the second direction is as follows: Figure 5 Based on Figure 6 The noise scan samples in the Figure 7 Scanned image shown.

[0073] 302: Determine a reference signal model of an interference signal in the scanned image according to the scanned image.

[0074] 303 , based on the relationship between the scanning direction and the reference direction, process the reference signal model to determine a target signal model of the vibration signal.

[0075] In some embodiments, based on the relationship between the scanning direction and the reference direction, determining the target signal model of the vibration signal in the scanning direction includes: judging whether the scanning direction is consistent with the reference direction; if the scanning direction is consistent with the reference direction, the reference signal model is the target signal model; if the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model. Figure 8, when the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model, including: correcting the reference vibration model based on the angle between the scanning direction and the reference direction to obtain the target vibration model.

[0076] In some embodiments, the scanning direction includes a third direction and a fourth direction that are orthogonal to each other, and the third direction and the fourth direction form an angle with the first direction and the second direction, respectively.

[0077] For example, refer to Figure 5 , the third direction of the actual scanning is the u direction and the fourth direction is the v direction, u and v are two orthogonal directions, then the specific correction method for correcting the reference vibration model according to the angle between the scanning direction and the reference direction is: the amplitude component A obtained in step 102 is xi and A yi Project in the third direction and the fourth direction respectively, and get A ui and A vi , and then get the complex amplitude A′ of the vibration signal i , where A′ i =A ui +iA vi , that is, the target vibration model is

[0078] 304. Determine a target compensation model based on the target signal model.

[0079] 305 : Compensate for interference signals in a scanning direction based on the target compensation model.

[0080] It is understandable that the present application corrects the reference signal model based on the projection relationship between the reference direction and the actual scan, successfully avoiding the influence of the non-zero angle between the actual scan direction and the reference direction on the compensation result. At the same time, the calculation method used in this correction method is simple, which saves calculation time and improves the efficiency of the whole process.

[0081] The present application provides a method for compensating interference signals in electron beam scanning imaging as follows, wherein the interference signals are noise signals, and the method includes steps 401-405.

[0082] 401, acquiring a scanned image in a reference direction.

[0083] 402: Determine a reference signal model of an interference signal in the scanned image according to the scanned image.

[0084] 403 , amplify the basic parameters in the reference signal model to obtain a target signal model of the noise signal.

[0085] In some implementations, the interference signal is a noise signal, and the processing of the reference signal model to obtain a target signal model includes: amplifying basic parameters in the reference signal model to obtain a target signal model of the noise signal.

[0086] For example, the basic parameters in the reference signal model are amplified, and after the compensation signal passes through the driving signal amplifier and the scanning device, the deflection displacement of the corresponding electron beam on the image and the noise signal amplitude A i are equal. The relationship can be expressed as:

[0087] A i =M×A′ i

[0088] Among them, M is the magnification ratio of the compensation signal amplitude to the image displacement, also known as sensitivity.

[0089] 404. Determine a target compensation model based on the target signal model.

[0090] 405 : Compensate for interference signals in a scanning direction based on the target compensation model.

[0091] In the embodiment of the present application, the basic parameters in the reference signal model are amplified to improve the accuracy of image processing, and effectively solve the problems that periodic electrical noise may affect image quality, resulting in reduced resolution, image glitches, and position deviation.

[0092] After obtaining the corrected target compensation model, a waveform generator with compensation function can be used or developed, and the relevant waveform parameters in the corrected target compensation model can be directly sent to the waveform generator with compensation function. Then, during the scanning process, the waveform generator can directly output a signal that is opposite to the interference signal, so as to compensate and output the position information deviation caused by the interference signal.

[0093] Specifically, the waveform generator is mainly composed of a circuit board card, a housing, and the firmware or software therein. At the hardware level, the circuit board card mainly includes a waveform data processing chip, a data storage chip, and a communication port; the software and firmware are developed through custom settings and support changing the scanning waveform output through external control signals. The embodiment of the present application is based on real-time processed waveform parameters, and then inputs the value waveform generator to output a real-time compensation signal, which ensures the integrity of the real-time presentation of the compensation process of the present application and improves the time cost and operation cost of the entire scanning compensation process.

[0094] The interference signal compensation method in the electron beam scanning imaging of the embodiment of the present application is based on the processing of the scanned image for compensation, and is not affected by whether the interference signal source is located inside or outside the device. The interference signal compensation method based on the electron beam scanning imaging of the embodiment of the present application is not only applicable to the case where the interference signal source is located outside the device, but also applicable to the case where the interference signal source is located inside the device. The interference signal compensation method based on the electron beam scanning imaging of the embodiment of the present application effectively overcomes the problem that the interference signal exceeds the isolation or compensation capacity of the vibration isolation device. The present application first determines the reference vibration model of the interference signal, and then determines the target signal model of the interference signal, so that in the actual scanning process, the target signal model is confirmed in real time based on the determined reference signal model, saving the time required for image post-processing delay, and then determines the target compensation model, and compensates the interference signal in real time, effectively solving the technical problems such as the additional processing time and interval caused by post-processing of the image. The interference signal compensation method, device, electronic device and readable storage medium in the electron beam scanning imaging of the present application solve the problem of image quality degradation due to signal interference in the electron beam scanning imaging process, improve image resolution, and reduce image positioning deviation. The interference signal compensation method based on electron beam scanning imaging of the present application realizes real-time compensation processing of vibration signal interference or noise signal interference, saves the time of image compensation processing, and improves the efficiency of electron beam scanning imaging.

[0095] like Fig.11 As shown, an interference signal compensation device in electron beam scanning imaging according to an embodiment of the present application includes: an acquisition module 1101, used to acquire a scanning image in a reference direction; a reference signal model determination module 1102, used to determine a reference signal model of the interference signal in the scanning image according to the scanning image; a target compensation model determination module 1103, used to determine a target compensation model based on the reference signal model of the interference signal; and a waveform generation module 1104, used to compensate for the interference signal in the scanning direction based on the target compensation model.

[0096] It is understood that in some embodiments, the waveform generation module may include a developed waveform generator and a modified waveform generator. The waveform generator preferably developed in this application, the waveform generator of some electron beam scanning imaging devices can support a custom scanning drive waveform, and the compensation signal based on the interference signal can be directly input.

[0097] It can be understood that the interference signal compensation method in electron beam scanning imaging provided in the embodiment of the present application can be executed by a compensation device for interference signals in electron beam scanning imaging, or a control module in the compensation device for interference signals in electron beam scanning imaging for executing the interference signal compensation method in electron beam scanning imaging. In the embodiment of the present application, the device for interference signal compensation in electron beam scanning imaging provided in the embodiment of the present application is explained by taking the interference signal compensation device in electron beam scanning imaging executing the interference signal compensation method in electron beam scanning imaging as an example.

[0098] It is to be understood that the specific features, operations and details described hereinabove regarding the method of the present application may also be similarly applied to the device and system of the present application, or vice versa. In addition, each step of the method of the present application described above may be performed by a corresponding component or unit of the device or system of the present application.

[0099] It is understood that each module / unit of the device of the present application can be implemented in whole or in part by software, hardware, firmware or a combination thereof. Each module / unit can be embedded in the processor of the electronic device or independent of the processor in the form of hardware or firmware, or can be stored in the memory of the electronic device in the form of software for the processor to call to perform the operation of each module / unit. Each module / unit can be implemented as an independent component or module, or two or more modules / units can be implemented as a single component or module.

[0100] like Fig.12 As shown, the present application provides an electronic device 1200, which includes a processor 1201 and a memory 1202 storing computer program instructions. When the processor 1201 executes the computer program instructions, each step of the interference signal compensation method in the above-mentioned electron beam scanning imaging is implemented. The electronic device 1200 can be a server, a terminal, or any other electronic device with necessary computing and / or processing capabilities in a broad sense.

[0101] In one embodiment, the electronic device 1200 may include a processor, a memory, a network interface, a communication interface, etc. connected through a system bus. The processor of the electronic device 1200 may be used to provide necessary computing, processing and / or control capabilities. The memory of the electronic device 1200 may include a non-volatile storage medium and an internal memory. The non-volatile storage medium may store an operating system, a computer program, etc. The internal memory may provide an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface and the communication interface of the electronic device 1200 may be used to connect and communicate with external devices through a network. When the computer program is executed by the processor, the steps of the method of the present application are executed.

[0102] The present application provides a computer-readable storage medium on which computer program instructions are stored. When the computer program instructions are executed by a processor, the interference signal compensation method in electron beam scanning imaging is implemented.

[0103] Those skilled in the art will appreciate that the method steps of the present application can be completed by instructing related hardware such as the electronic device 1200 or a processor through a computer program, and the computer program can be stored in a non-temporary computer-readable storage medium, and the computer program causes the steps of the present application to be executed when it is executed. Depending on the circumstances, any reference to memory, storage, or other media herein may include non-volatile or volatile memory. Examples of non-volatile memory include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), flash memory, magnetic tape, floppy disk, magneto-optical data storage device, optical data storage device, hard disk, solid state disk, etc. Examples of volatile memory include random access memory (RAM), external cache memory, etc.

[0104] The interference signal compensation method in electron beam scanning imaging according to the embodiment of the present application can be implemented by one device or a combination of several devices. For example, the image signal extraction and processing part can be completed by a computer (running a program), and the function of the compensation part can be completed by a dedicated electronic device; all functions can also be integrated into an independent device.

[0105] The various technical features described above can be combined arbitrarily. Although all possible combinations of these technical features are not described, any combination of these technical features should be considered to be covered by this specification as long as there is no contradiction in such combination.

[0106] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for compensating interference signals in electron beam scanning imaging, characterized in that: include: Acquire a scanned image in a reference direction; Determining a reference signal model of an interference signal in the scanned image according to the scanned image; Determining a target compensation model based on a reference signal model of the interference signal includes: processing the reference signal model to obtain a target signal model; determining a target compensation model based on the target signal model; wherein determining the target compensation model based on the target signal model includes: determining an initial compensation model based on the target signal model; determining a phase deviation based on a time difference between an actual interference signal and an interference signal in a scanned image; and correcting the initial compensation model according to the phase deviation to obtain a target compensation model; The interference signal is a vibration signal, and the processing of the reference signal model to obtain the target signal model includes: based on the relationship between the scanning direction and the reference direction, processing the reference signal model to determine the target signal model of the vibration signal; or the interference signal is a noise signal, and the processing of the reference signal model to obtain the target signal model includes: amplifying the basic parameters in the reference signal model to obtain the target signal model of the noise signal; wherein the reference direction includes an orthogonal first direction and a second direction, and acquiring the scanning image in the reference direction includes: acquiring a first scanning image in the first direction; acquiring a second scanning image in the second direction; The method of processing the reference signal model based on the relationship between the scanning direction and the reference direction to determine the target signal model of the vibration signal includes: determining whether the scanning direction is consistent with the reference direction; if the scanning direction is consistent with the reference direction, the reference signal model is the target signal model; if the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model; Based on the target compensation model, the interference signal in the scanning direction is compensated.

2. The interference signal compensation method in electron beam scanning imaging according to claim 1, characterized in that: The step of determining a reference signal model of an interference signal in the scanned image according to the scanned image comprises: Performing data analysis on the scanned image to extract the spatial direction and basic parameters of the interference signal; Based on the basic parameters, a reference signal model of the interference signal is determined.

3. The interference signal compensation method in electron beam scanning imaging according to claim 1, characterized in that: When the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model, including: The reference signal model is modified based on the angle between the scanning direction and the reference direction to obtain the target signal model.

4. An interference signal compensation device in electron beam scanning imaging, characterized in that: include: An acquisition module, used for acquiring a scanned image in a reference direction; A reference signal model determination module, used to determine a reference signal model of an interference signal in the scanned image according to the scanned image; A target compensation model determination module is used to determine a target compensation model based on a reference signal model of the interference signal, including: processing the reference signal model to obtain a target signal model; determining a target compensation model based on the target signal model; wherein determining the target compensation model based on the target signal model includes: determining an initial compensation model based on the target signal model; determining a phase deviation based on a time difference between an actual interference signal and an interference signal in a scanned image; correcting the initial compensation model according to the phase deviation to obtain a target compensation model; the interference signal is a vibration signal, and the processing of the reference signal model to obtain a target signal model includes: processing the reference signal model based on a relationship between a scanning direction and a reference direction to determine a target signal model for a vibration signal; or the interference signal is a noise signal, The processing of the reference signal model to obtain the target signal model includes: amplifying the basic parameters in the reference signal model to obtain the target signal model of the noise signal; wherein the reference direction includes a first direction and a second direction that are orthogonal to each other, and acquiring the scanning image in the reference direction includes: acquiring a first scanning image in the first direction; acquiring a second scanning image in the second direction; the processing of the reference signal model based on the relationship between the scanning direction and the reference direction to determine the target signal model of the vibration signal includes: determining whether the scanning direction is consistent with the reference direction; if the scanning direction is consistent with the reference direction, the reference signal model is the target signal model; if the scanning direction is inconsistent with the reference direction, the reference signal model is corrected to obtain the target signal model; The waveform generation module is used to compensate the interference signal in the scanning direction based on the target compensation model.

5. An electronic device, characterized in that: include: A processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of a method for compensating interference signals in electron beam scanning imaging as described in any one of claims 1 to 3.

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