A synergistic adsorption plate for coating deposits in a vacuum coating machine

Abstract

The invention discloses a synergistic adsorption plate for coating deposits in a vacuum coating machine, relates to the technical field of coating, and comprises a substrate plate; a sandblasting layer is arranged on the substrate plate, a normal temperature spraying layer is arranged on the sandblasting layer, and a thermal spraying layer is arranged on the normal temperature spraying layer; the air pressure of the sandblasting layer during sandblasting is 0.1-3 Kgf / cm², the sandblasting particles adopt 10-80 mesh brown corundum, and the roughness Ra of the sandblasting layer is 3-8 μm; the normal temperature spraying layer comprises, in terms of mass percentage, 30-60% of an adhesion promoter, 0-40% of a polyurethane resin, and 0-40% of an epoxy resin, and the thickness of the normal temperature spraying layer is 0.5-1 μm; the roughness of the synergistic adsorption plate of the invention is between 30-80 μm, and compared with the existing adsorption plate products with a roughness of less than 25 μm, it has a better effect of adsorbing deposits, increases the adsorption rate by ≥30%, and increases the yield by ≥10% and prolongs the service life after verification by a vacuum coating machine.

Description

Technical Field

[0001] The present invention relates to the field of coating technology, and in particular to a synergistic adsorption plate for coating deposits in a vacuum coating machine, which can be used in vacuum sputtering coating, optical vacuum coating, semiconductors, liquid crystal panels, optical communications, automotive glass, decorative coating and other industries. Background Art

[0002] The adsorption plate is used to absorb the excess coating deposits in the coating machine cavity. Because the adsorption plate has a thin film layer (the thickness of the film layer is 0.01-1.00mm), the adsorption plate has the characteristics of adsorbing coating deposits and has the function of allowing particles to stay on the adsorption plate and not fall off easily.

[0003] At present, the roughness (Ra) of adsorption plates on the market is generally below 25μm, and the specific roughness (Ra) is between 15-25μm. When absorbing coating deposits, due to insufficient depth, it is easy to fall off with the change of gas parameters in the vacuum furnace. In addition, the surface area of ​​the adsorption plate is insufficient, resulting in insufficient adsorption of the coating deposits. In addition, the adsorption plate is prone to delamination and slag when bent.

[0004] Due to the above-mentioned defects of the existing adsorption plate, the maintenance period of the vacuum furnace is short, which will have a certain impact on the production cost and yield of the coating machine. Summary of the invention

[0005] In order to overcome the above-mentioned shortcomings, the present invention provides a technical solution that can solve the above-mentioned problems.

[0006] A synergistic adsorption plate for coating deposits in a vacuum coating machine, comprising a substrate plate;

[0007] A sandblasting layer is provided on the substrate plate, a normal temperature spraying layer is provided on the sandblasting layer, and a thermal spraying layer is provided on the normal temperature spraying layer;

[0008] The sandblasting layer is sandblasted on the surface of the substrate plate to roughen the surface. The air pressure of the sandblasting layer during sandblasting is 0.1-3 Kgf / cm². The sandblasting particles of the sandblasting layer are 10-80 mesh brown corundum. The roughness Ra of the sandblasting layer is 3-8μm.

[0009] The room temperature spray layer is formed by a spray film on the sandblasting layer using a coupling agent, wherein the coupling agent comprises, by mass percentage, 30-60% of an adhesion promoter, 0-40% of a polyurethane resin, and 0-40% of an epoxy resin, wherein the adhesion promoter is any one or a mixture of multiple groups of silanes, titanates, aluminates, zirconates, aluminum-titanium composites, borates, organic sulfonic acids, polyacrylamides, curing agents, and promoters, and the thickness of the room temperature spray layer is 0.5-1 μm.

[0010] As a further solution of the present invention: the substrate plate is any one of 304 stainless steel plate, copper plate, aluminum plate, titanium plate, engineering plastic PA plate, engineering plastic PEEK plate, silicon plate, and ceramic plate.

[0011] As a further solution of the present invention: the coupling agent of the room temperature spray coating includes, by mass percentage, 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent, and 1-2% of accelerator.

[0012] As a further solution of the present invention: the thermal spray layer is sprayed on the sandblasting layer by arc thermal spraying, the metal wire diameter during arc thermal spraying is 0.5-5mm, the wire feeding speed during arc thermal spraying is 1-20mm / sec, the compressed air during arc thermal spraying is 0.1-3.0 Kgf / cm², and the current during arc thermal spraying is 200-600A.

[0013] As a further solution of the present invention: the wire diameter of the metal wire during arc thermal spraying is 2.0 mm, the wire feeding speed during arc thermal spraying is 10 mm / sec, the compressed air during arc thermal spraying is 0.13-0.15 Kgf / cm², the current during arc thermal spraying is 300-350 A, the thickness of the thermal spray layer is 0.1-0.5 mm, the roughness Ra of the thermal spray layer is 35-45 μm, Rz is 200-300 μm, and the surface area of ​​the thermal spray layer is more than 4 times the surface area of ​​the substrate plate.

[0014] As a further solution of the present invention: the metal wire used in arc thermal spraying is any one of aluminum wire, copper wire, nickel wire and stainless steel wire.

[0015] As a further solution of the present invention: the thermal spray layer is sprayed on the sandblasted layer by flame spraying, and a spray gun is used for flame spraying. The combustion gas sprayed by the spray gun includes: acetylene 0.08-0.14MPa, oxygen 0.5-0.7Mpa and air 0.5-0.7Mpa. During flame spraying, metal powder is fed into the spray gun at a speed of 10-150g / min for spraying, and the size of the metal powder is 50-150 mesh.

[0016] As a further solution of the present invention: during flame spraying, metal powder is fed into the spray gun at a speed of 25-30 g / min for spraying, the size of the metal powder is 60-120 mesh, the speed of the spray gun is 150 mm / sec, the distance between the spray gun and the sandblasting layer is 20-30 cm, and the thickness of the thermal spray layer is 0.1-0.5 mm.

[0017] As a further solution of the present invention: the metal powder used in flame spraying is any one of aluminum, copper, indium and tin metal particles.

[0018] As a further solution of the present invention: dust is removed on the thermal spray coating using an air gun with a wind pressure of 6-8 Kgf / cm², and then the coating is placed in a water pool for ultrasonic cleaning with a power of 150w.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. Apply coupling agent on the substrate plate, and use arc or flame thermal spraying to produce an adsorption plate product with a surface roughness of about 30-80μm; as the roughness increases, the depth of the holes in the adsorption plate can be increased. The deeper the holes, the less likely the coating deposition will fall off.

[0021] 2. The present invention is a practical method for producing the structural features of the film layer on the adsorption plate, which increases the bonding force between the roughness of the film layer and the substrate plate, thereby increasing the surface area of ​​adsorption; the film layer has good bonding and is not easy to fall off; the product characteristics of the adsorption plate of the present invention, when compared with the same untreated surface, it has been measured that the surface area can be increased by more than 4 times, and has a better adsorption effect.

[0022] 3. The present invention manufactures an enhanced adsorption plate for coating deposits in a vacuum coating machine, increases the roughness to between 30-80 μm to increase the absorption of various coating deposits, and the adsorption plate increases the adsorption rate by ≥30%. After verification by the vacuum coating machine, the yield is increased by ≥10% and the service life can be extended.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 It is a schematic diagram of the process flow of the present invention;

[0026] Figure 2 It is a schematic diagram of the process flow of arc thermal spraying in the present invention;

[0027] Figure 3 It is a schematic diagram of the process flow of flame thermal spraying in the present invention;

[0028] Figure 4 It is a schematic diagram of the structure of the synergistic adsorption plate made by arc thermal spraying in the present invention;

[0029] Figure 5 It is a schematic structural diagram of a synergistic adsorption plate made by flame thermal spraying in the present invention. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0031] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0032] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] like Figure 1-5 As shown, a synergistic adsorption plate for coating deposits in a vacuum coating machine of the present invention comprises a substrate plate 1;

[0036] The substrate plate 1 is provided with a sandblasting layer 2, the sandblasting layer 2 is provided with a normal temperature spraying layer 3, and the normal temperature spraying layer 3 is provided with a thermal spraying layer 4;

[0037] The sandblasting layer 2 is sandblasted on the surface of the substrate plate 1 to roughen the surface. The air pressure of the sandblasting layer 2 during sandblasting is 0.1-3 Kgf / cm². The sandblasting particles of the sandblasting layer 2 are 10-80 mesh brown corundum. The roughness Ra of the sandblasting layer 2 is 3-8μm.

[0038] The room temperature spray layer 3 is formed by a spray film on the sandblasting layer 2 using a coupling agent, and the coupling agent includes, by mass percentage, 30-60% adhesion promoter, 0-40% polyurethane resin, and 0-40% epoxy resin, wherein the adhesion promoter is composed of any one or a mixture of multiple groups of silanes, titanates, aluminates, zirconates, aluminum-titanium composites, borates, organic sulfonic acids, polyacrylamides, curing agents, and promoters, and the thickness of the room temperature spray layer 3 is 0.5-1 μm.

[0039] As a further solution of the present invention: the substrate plate 1 is any one of 304 stainless steel plate, copper plate, aluminum plate, titanium plate, engineering plastic PA plate, engineering plastic PEEK plate, silicon plate, and ceramic plate.

[0040] As a further solution of the present invention: the coupling agent of the room temperature spray layer 3 includes, by mass percentage, 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent, and 1-2% of accelerator.

[0041] As a further solution of the present invention: the thermal spray layer 4 is sprayed on the sandblasting layer 2 by arc thermal spraying, the wire diameter of the metal wire during arc thermal spraying is 0.5-5mm, the wire feeding speed during arc thermal spraying is 1-20mm / sec, the compressed air during arc thermal spraying is 0.1-3.0 Kgf / cm², and the current during arc thermal spraying is 200-600A.

[0042] As a further solution of the present invention: the wire diameter of the metal wire during arc thermal spraying is 2.0 mm, the wire feeding speed during arc thermal spraying is 10 mm / sec, the compressed air during arc thermal spraying is 0.13-0.15 Kgf / cm², the current during arc thermal spraying is 300-350 A, the thickness of the thermal spray layer 4 is 0.1-0.5 mm, the roughness Ra of the thermal spray layer 4 is 35-45 μm, Rz is 200-300 μm, and the surface area of ​​the thermal spray layer 4 is more than 4 times the surface area of ​​the substrate plate 1.

[0043] As a further solution of the present invention: the metal wire used in arc thermal spraying is any one of aluminum wire, copper wire, nickel wire and stainless steel wire.

[0044] As a further solution of the present invention: the thermal spray layer 4 is sprayed on the sandblasted layer 2 by flame spraying, and a spray gun is used to spray on the sandblasted layer 2 during flame spraying. The combustion gas sprayed by the spray gun includes: acetylene 0.08-0.14MPa, oxygen 0.5-0.7Mpa and air 0.5-0.7Mpa. During flame spraying, metal powder is fed into the spray gun at a speed of 10-150g / min for spraying, and the size of the metal powder is 50-150 mesh.

[0045] As a further solution of the present invention: during flame spraying, metal powder is fed into the spray gun at a speed of 25-30 g / min for spraying, the size of the metal powder is 60-120 mesh, the speed of the spray gun is 150 mm / sec, the distance between the spray gun and the sandblasting layer 2 is 20-30 cm, and the thickness of the thermal spray layer 4 is 0.1-0.5 mm.

[0046] As a further solution of the present invention: the metal powder used in flame spraying is any one of aluminum, copper, indium and tin metal particles.

[0047] As a further solution of the present invention: dust is removed on the thermal spray layer 4 using an air gun with a wind pressure of 6-8 Kgf / cm², and then the layer is placed in a water pool for ultrasonic cleaning with a power of 150w.

[0048] The present invention also provides two cases in the specific implementation operation:

[0049] Embodiment 1, as Figure 1 , 2 , 4,

[0050] The substrate plate 1 is made of 304 stainless steel plate;

[0051] A sandblasting layer 2 is provided on the base plate 1, and the surface of the base plate 1 is roughened by sandblasting through the sandblasting layer 2. The air pressure during sandblasting is 0.1-3 Kgf / cm², the particles used for sandblasting are 10-80 mesh brown corundum, and the roughness Ra of the sandblasting layer 2 is 3-8μm;

[0052] The normal temperature spray layer 3 is a thin film sprayed on the sandblasting layer 2 using a coupling agent, the film thickness is 0.5-1 μm, and the coupling agent includes 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent, and 1-2% of accelerator by mass percentage;

[0053] The thermal spray layer 4 is provided on the normal temperature spray layer 3 by means of arc thermal spraying. The metal wire of the arc thermal spraying is an aluminum wire with a wire diameter of 2.0 mm, the wire feeding speed is 10 mm / sec, the compressed air during the arc thermal spraying is 0.13-0.15 Kgf / cm², the current used during the arc thermal spraying is 300-350 A, the thickness of the thermal spray layer 4 is 0.1-0.5 mm, the roughness Ra of the thermal spray layer 4 is 35-45 μm, Rz is 200-300 μm, and the surface area of ​​the thermal spray layer 4 is more than 4 times that of the substrate plate 1;

[0054] The surface of the thermal spray coating 4 is dusted by using an air gun with a wind pressure of 6-8 Kgf / cm², and then placed in clean water and cleaned by ultrasonic waves with a power of 150w to form an enhanced adsorption plate.

[0055] Embodiment 2, as Figure 1 , 3 ,5,

[0056] The substrate plate 1 is made of 304 stainless steel plate;

[0057] A sandblasting layer 2 is provided on the base plate 1, and the surface of the base plate 1 is roughened by sandblasting through the sandblasting layer 2. The air pressure during sandblasting is 0.1-3 Kgf / cm², the particles used for sandblasting are 10-80 mesh brown corundum, and the roughness Ra of the sandblasting layer 2 is 3-8μm;

[0058] The normal temperature spray layer 3 is a thin film sprayed on the sandblasting layer 2 using a coupling agent, the film thickness is 0.5-1 μm, and the coupling agent includes 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent, and 1-2% of accelerator by mass percentage;

[0059] A thermal spray layer 4 is provided on the normal temperature spray layer 3 by flame spraying, the combustion gas sprayed by the spray gun includes: acetylene 0.08-0.14MPa, oxygen 0.5-0.7Mpa and air 0.5-0.7Mpa, the metal powder during flame spraying is 60-120 mesh aluminum powder particles, the aluminum powder is fed into the spray gun at a speed of 25-30g / min for spraying, the speed of the spray gun is 150mm / sec, the distance between the spray gun and the sandblasting layer 2 is 20-30cm, and the thickness of the thermal spray layer 4 is 0.1-0.5mm;

[0060] The surface of the thermal spray coating 4 is dusted by using an air gun with a wind pressure of 6-8 Kgf / cm², and then placed in clean water and cleaned by ultrasonic waves with a power of 150w to form an enhanced adsorption plate.

[0061] The present invention applies a coupling agent on the substrate plate 1, and after thermal spraying using an arc or flame, the surface roughness is about 30-80 μm. The coupling agent can increase the depth of the roughness and allow the thermal spray material to have a good combination with the substrate plate 1, and the coating will not fall off when bent. The high roughness can increase the surface adsorption force and make the coating deposits firmly adhere. The coating machine has verified that the adsorption plate product of the present invention achieves the expected results.

[0062] Verification results from a coating machine show that there is no delamination between the high surface area adsorption plate of the present invention and the aluminum material, and there is no slag falling problem in actual measurements.

[0063] The present invention manufactures an enhanced adsorption plate for coating deposits in a vacuum coating machine, increases the roughness to between 30-80 μm to increase the absorption of various coating deposits, and the adsorption plate increases the adsorption rate by ≥30%. After verification by the vacuum coating machine, the yield is increased by ≥10% and the service life can be extended.

[0064] This embodiment does not impose any formal limitation on the shape, material, structure, etc. of the present invention. Any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. A synergistic adsorption plate for coating deposits in a vacuum coating machine, comprising a substrate plate (1); Features: A sandblasting layer (2) is provided on the substrate plate (1), a normal temperature spraying layer (3) is provided on the sandblasting layer (2), and a thermal spraying layer (4) is provided on the normal temperature spraying layer (3); The sandblasting layer (2) is sandblasted on the surface of the substrate plate (1) to roughen the surface, the air pressure of the sandblasting layer (2) during sandblasting is 0.1-3 Kgf / cm², the sandblasting particles of the sandblasting layer (2) are 10-80 mesh brown corundum, and the roughness Ra of the sandblasting layer (2) is 3-8 μm; The room temperature spray coating (3) is formed by spraying a thin film on the sandblasting layer (2) using a coupling agent, wherein the coupling agent comprises, by mass percentage, 30-60% of an adhesion promoter, 0-40% of a polyurethane resin, and 0-40% of an epoxy resin, wherein the adhesion promoter is any one or a mixture of multiple groups of silanes, titanates, aluminates, zirconates, aluminum-titanium composites, borates, organic sulfonic acids, polyacrylamides, curing agents, and promoters, and the thickness of the room temperature spray coating (3) is 0.5-1 μm.

2. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 1, characterized in that: The substrate plate (1) is any one of a 304 stainless steel plate, a copper plate, an aluminum plate, a titanium plate, an engineering plastic PA plate, an engineering plastic PEEK plate, a silicon plate, and a ceramic plate.

3. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 1, characterized in that: The coupling agent of the room temperature spray coating (3) comprises, by mass percentage, 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent, and 1-2% of accelerator.

4. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to any one of claims 1, 2 or 3, characterized in that: The thermal spray layer (4) is sprayed on the sandblasting layer (2) by arc thermal spraying, the metal wire diameter during arc thermal spraying is 0.5-5 mm, the wire feeding speed during arc thermal spraying is 1-20 mm / sec, the compressed air during arc thermal spraying is 0.1-3.0 Kgf / cm², and the current during arc thermal spraying is 200-600A.

5. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 4, characterized in that: The wire diameter of the metal wire during arc thermal spraying is 2.0 mm, the wire feeding speed during arc thermal spraying is 10 mm / sec, the compressed air during arc thermal spraying is 0.13-0.15 kgf / cm², the current during arc thermal spraying is 300-350 A, the thickness of the thermal spray layer (4) is 0.1-0.5 mm, the roughness Ra of the thermal spray layer (4) is 35-45 μm, and the Rz is 200-300 μm. The surface area of ​​the thermal spray layer (4) is more than 4 times the surface area of ​​the substrate plate (1).

6. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 5, characterized in that: The metal wire used in arc thermal spraying can be any one of aluminum wire, copper wire, nickel wire and stainless steel wire.

7. A synergistic adsorption plate for coating deposits in a vacuum coating machine according to any one of claims 1, 2 or 3, characterized in that: The thermal spray coating (4) is sprayed on the sandblasting layer (2) by flame spraying. During the flame spraying, a spray gun is used to spray on the sandblasting layer (2). The combustion gas sprayed by the spray gun includes: acetylene 0.08-0.14MPa, oxygen 0.5-0.7Mpa and air 0.5-0.7Mpa. During the flame spraying, metal powder is fed into the spray gun at a speed of 10-150g / min for spraying. The size of the metal powder is 50-150 mesh.

8. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 7, characterized in that: During flame spraying, metal powder is fed into the spray gun at a speed of 25-30 g / min for spraying, the size of the metal powder is 60-120 mesh, the speed of the spray gun is 150 mm / sec, the distance between the spray gun and the sandblasting layer (2) is 20-30 cm, and the thickness of the thermal spray layer (4) is 0.1-0.5 mm.

9. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 8, characterized in that: The metal powder used in flame spraying is any one of aluminum, copper, indium and tin metal particles.

10. The synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 1, characterized in that: The thermal spray coating (4) is dusted using an air gun with an air pressure of 6-8 Kgf / cm², and then placed in a water pool for ultrasonic cleaning with a power of 150W.

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