A magnetic mixed active air floating support structure and support method

Abstract

The present invention provides a magnetic mixed active air-floating support structure and support method, belonging to the field of air-floating support technology. The thickness of the air film of the support structure can be flexibly adjusted, the support is reliable, and the stability is good. The air-floating bearing is arranged above the platform, the position of the magnetic conductor corresponds to the position of the air-floating bearing up and down, the magnetic conductor is installed on the platform, and the air film active adjustment unit is arranged in the air-floating bearing, and the thickness of the air film is controlled by the air film active adjustment unit. The present application effectively improves the dynamic and static characteristics of the air-floating bearing by adding a throttle structure, actively compensating the air supply pressure, and adding a magnetic structure.

Description

Technical Field

[0001] The invention belongs to the technical field of air floating support, and in particular relates to the design and application of a magnetic mixed active air floating structure. Background Art

[0002] Air-floating static pressure bearings have the advantages of high precision, no friction, cleanliness and no pollution, and are widely used in precision instruments and manufacturing fields such as ultra-precision machine tools and photolithography machines. Due to their unique advantages of low friction and low temperature rise, they greatly reduce the errors caused by friction, heat and deformation between moving parts, and achieve the improvement of the precision of the motion mechanism from micron level to nanometer level. They have become the mainstream support method for precision and ultra-precision processing equipment.

[0003] When the thickness of the working air film of the air static pressure bearing reaches several microns, the gas flow pattern in the air film changes, and the load-bearing capacity, stiffness and stability of the air bearing change accordingly. The vibration caused by the internal gas flow of the air static pressure bearing cannot be ignored. Even when the working parameters or operation are unreasonable, non-steady-state air hammer phenomenon will occur, which will directly cause the air bearing structure to lose its function and cannot work normally. Therefore, the improvement of the static and dynamic performance of the air static pressure bearing has always restricted the further improvement and development of the bearing. Summary of the invention

[0004] In order to solve the problems existing in the above-mentioned background technology, the present invention provides a magnetic-gas hybrid active air-floating support structure, the air film thickness of the support structure can be flexibly adjusted, the support is reliable, and the stability is good.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a magnetic-gas hybrid active air-floating support structure, including a platform, an air-floating bearing, a magnetizer and an air film active adjustment unit; the air-floating bearing is arranged above the platform, the position of the magnetizer corresponds to the position of the air-floating bearing up and down, the magnetizer is installed on the platform, the air film active adjustment unit is arranged in the air-floating bearing, and the thickness of the air film is controlled by the air film active adjustment unit.

[0006] The air film active regulation unit includes a central electromagnetic block, n throttle structures, m high-pressure gas channels and multiple groups of peripheral electromagnetic blocks. Each throttle structure is arranged in a circular ring shape, the n throttle structures are arranged concentrically, and the n throttle structures are connected by m high-pressure gas channels. Each group of peripheral electromagnetic blocks is also arranged in a circular ring shape. Each group of peripheral electromagnetic blocks is arranged between two adjacent throttle structures and fixedly embedded on the bottom surface of the air floating bearing. The central electromagnetic block is arranged at the center of the bottom surface of the air floating bearing. The thickness of the air film is controlled by applying current to the peripheral electromagnetic blocks on different rings.

[0007] Beneficial effects of the present invention:

[0008] 1. The present application arranges an electromagnetic block on the air bearing and a magnetic strip on the platform. When the air force supplied by the throttle structure to the air bearing and the platform is equal to the magnetic force between the electromagnetic block and the magnetic strip plus the load, the magnetic force plus the load can balance the air force. At this time, the thickness of the air film generated is stable, and the air bearing will also be stable without shaking. Therefore, the air bearing has good static stability at this time, and the thickness of the air film is controlled by applying current to the peripheral electromagnetic blocks on different rings.

[0009] 2. This application can effectively improve the static characteristics of the air bearing by actively compensating the air supply pressure and adding a magnetic structure.

[0010] 3. High-pressure gas is provided by the air source to enter the air bearing throttle, flow to the pressure chamber, and form a high-pressure air film with the upper end surface of the marble platform. The air bearing can move horizontally and vertically on the marble platform.

[0011] 4. The present application can effectively compensate for the air supply pressure of the air bearing by adding a throttle structure, and realize real-time control of the static and dynamic characteristics of the air bearing during the operation of the air bearing.

[0012] 5. The present application effectively controls the thickness of the working air film of the air bearing by adding an electromagnetic structure (electromagnetic block), thereby enabling vertical adjustment of the air bearing.

[0013] 6. The present application arranges magnetic conductors on the upper end of the marble platform, so that when the air bearing moves horizontally on the marble platform, real-time control of the static and dynamic characteristics of the air film of the air bearing can be achieved at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In the attached picture:

[0015] Figure 1 is a bottom view of the air-floating support structure of the present invention;

[0016] Figure 2 It is a schematic diagram of the cross-sectional structure of the pressure equalizing tank of the present invention;

[0017] Figure 3 It is the BB section view of body 1;

[0018] Figure 4 yes Figure 1 Middle AA section view;

[0019] Figure 5 It is a working schematic diagram of the electromagnetic block of the present invention. DETAILED DESCRIPTION

[0020] The present invention is now described in further detail with reference to the accompanying drawings. The accompanying drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0021] The present application discloses an active air-floating support structure of magnetic-gas mixing and its application. The air-floating support structure of magnetic-gas mixing includes an air-floating bearing 2 and a platform 1. The platform 1 is located at the bottom and plays a supporting role. A magnetic conductor 1-1 is provided inside the platform. The air-floating bearing 2 is located at the upper end of the platform 1, and a supporting air film 3 with a certain bearing capacity is formed between the platform 1 and the air-floating bearing 2. A throttle structure and an electromagnetic component (multiple electromagnetic blocks) are provided inside the air-floating bearing 2. Three circles of throttle structures are provided inside the air-floating bearing 2. The pressure chambers 2-4 of the throttles 2-5 in each circle of the throttle structure are connected through the pressure equalizing groove 2-6, wherein the lower end surface of the throttle 2-5 has a concave shape as the pressure chamber 2-4. The air-floating bearing 2 can move horizontally on the platform 1, and the vertical micro-motion height of the air-floating bearing 2 and the shape of the air film 3 can be controlled by the throttle structure and the electromagnetic components inside the platform 1.

[0022] Specific implementation method 1: Combination Figures 1 to 4 The present embodiment is described as a magnetic mixed active air floating support structure, the device includes a platform 1, an air floating bearing 2, a magnetic conductor 1-1 and an air film active adjustment unit; the air film active adjustment unit includes n throttle structures, m high-pressure gas channels 2-1, a central electromagnetic block 2-2 and multiple peripheral electromagnetic blocks 2-3, n and m are both positive integers greater than or equal to 0, and m≤n.

[0023] Each throttle structure includes a pressure chamber 2-4, a throttling pipe 2-5 and a pressure equalizing groove 2-6. The air bearing 2 is arranged above the platform 1. A groove is opened in the platform 1. The magnet 1-1 is placed in the groove. The position of the magnet 1-1 corresponds to the position of the air bearing 2 up and down.

[0024] The bottom of the air bearing 2 is evenly provided with n concentric annular pressure equalizing grooves 2-6, and multiple pressure chambers 2-4 are evenly provided in each pressure equalizing groove 2-6, and all the pressure chambers 2-4 are evenly distributed on radial lines diverging from the center of the air bearing 2. Multiple throttling pipes 2-5 and m high-pressure gas channels 2-1 are provided inside the air bearing 2, the air outlet of the throttling pipe 2-5 is smaller than the air inlet of the throttling pipe 2-5, and each pressure chamber 2-4 is connected to an air outlet of the throttling pipe 2-5.

[0025] The air inlet ends of the m high-pressure gas channels 2-1 are the gas inlet 2-7, and the air outlet ends of the m high-pressure gas channels 2-1 are connected to the air inlet hole of the throttling pipe 2-5. A central groove is opened at the center of the circle at the bottom of the air floating bearing 2, and a central electromagnetic block 2-2 is arranged in the center. A plurality of grooves are evenly opened in the annular direction between every two adjacent pressure equalizing grooves 2-6, and a peripheral electromagnetic block 2-3 is arranged in each groove. Each group of peripheral electromagnetic blocks 2-3 is respectively arranged in the middle of two adjacent throttling structures, and each peripheral electromagnetic block 2-3 is arranged between two adjacent pressure chambers 2-4, and each of the pressure chambers 2-4 is a circular chamber.

[0026] In this embodiment, the central electromagnetic block 2-2 and the plurality of peripheral electromagnetic blocks 2-3 are used to adsorb the magnetic conductor 1-1 on the platform 1. The gas source provides high-pressure gas which enters the throttling pipe 2-5 and then flows into the pressure chamber 2-4 and the pressure equalizing tank 2-6, forming a high-pressure gas film 3 on the upper end surface of the platform 1. Figure 1 Three throttle structures are arranged inside the middle air bearing 2 , and the pressure chambers 2 - 4 of each throttle structure are connected through the pressure equalizing grooves 2 - 6 . The air bearing 2 can move horizontally and vertically on the platform 1 .

[0027] Figure 3 The middle throttle structure is set to three concentric circles, among which the throttle structure in the middle is independently set and has a separate gas inlet 2-7, and the other two throttle structures are combined and connected, sharing the same gas inlet 2-7. During operation, the gas inlet 2-7 of the double-circle connected throttle structure is given priority to supply gas to ensure the rigidity of the air-floating bearing 2. When higher rigidity or load is required, high-pressure gas needs to be introduced into the gas inlet 2-7 of the single-circle throttle structure. The air supply pressure of the air-floating bearing 2 can be provided by an air source, and if the single-circle throttle structure and the double-circle throttle structure need to be opened at the same time, high-pressure gases of different pressures can be introduced.

[0028] Figure 1 Each circle of the throttle structure includes six pressure equalizing grooves 2-6.

[0029] The air bearing 2 is made of industrial aviation aluminum material, and the bearing surface is finely processed to a nanometer level of precision. The platform 1 can be made of marble.

[0030] When the compressed gas flows from the throttling pipe 2-5 into the pressure equalizing groove 2-6, it fills the entire bearing gap and finally flows into the atmosphere from the outlet. Since the outlet hole of the throttling pipe 2-5 is smaller than the inlet hole of the throttling pipe 2-5, the size of the flow channel inside the throttling device 2-5 suddenly changes, causing the gas flow rate to increase rapidly. Due to the friction of the fluid in the pipe, its kinetic energy is converted into internal energy, making the pressure at the outlet hole lower than the pressure at the inlet. When the upper end of the air bearing 2 is subjected to a vertical downward force, due to the compressibility of the gas, the air bearing 2 will move downward for a distance. At this time, the thickness of the air film 3 becomes smaller, and the bearing capacity and stiffness of the air film 3 also increase accordingly. Therefore, based on the current technology and methods, the magnetic mixing method can effectively improve the static and dynamic characteristics of the air bearing.

[0031] The working principle of the magnetic hybrid active air floating support structure is as follows Figure 1 As shown: the air bearing 2 forms a layer of high-pressure air film 3 with bearing capacity between the air source and the platform 1, so that the bottom surface of the air bearing 2 has an upward pressure, and the air bearing 2 is provided with a plurality of array-arranged electromagnetic blocks, which are attracted to the magnetic conductor 1-1 at the upper end of the platform 1 to achieve a method of real-time control of the thickness of the air film 3 of the air bearing 2. At the same time, the high-pressure gas can increase the thickness of the air support structure, and the electromagnetic block can reduce the thickness of the air film 3 of the air bearing 2 through electromagnetic force. When the pressure of the high-pressure gas and the electromagnetic force of the electromagnetic block are balanced, a relatively stable high-pressure air film can be achieved. If the thickness of the air film 3 needs to be changed, the gas supply pressure and the magnetic force can be increased to balance the forces of the two again.

[0032] Specific embodiment 2: This embodiment further limits the magnetic mixed active air floating support structure described in specific embodiment 1. In this embodiment, 6 pressure chambers 2-4 are evenly opened in each pressure equalizing groove 2-6, and the n pressure chambers 2-4 on the n pressure equalizing grooves 2-6 are located on the same straight line, and the straight line passes through the center of the air floating bearing 2.

[0033] In this embodiment, if Figure 1 As shown, a pressure chamber 2 - 4 is taken out from each of the three throttle structures, and the three pressure chambers 2 - 4 are located on the same straight line, and the straight line passes through the center of the air bearing 2 .

[0034] Specific implementation method three: This implementation method further defines the magnetic hybrid active air floating support structure described in specific implementation method two. In this implementation method, Figure 1 As shown, n peripheral electromagnetic blocks 2 - 3 are arranged between every two adjacent straight lines, and the n peripheral electromagnetic blocks 2 - 3 are located on the same straight line, and the straight line passes through the center of the air bearing 2 .

[0035] In this embodiment, in addition to a central electromagnetic block 2-2 in the center, three circles of peripheral electromagnetic blocks 2-3 are set. In order to increase the bearing capacity of the air bearing 2 and the electromagnet adsorption efficiency, the electromagnetic blocks and the pressure chambers are installed alternately.

[0036] Specific implementation method 4: This implementation method further limits the active air floating support structure of magnetic mixing described in specific implementation method 1. In this implementation method, each pressure chamber 2-4 is a circular chamber.

[0037] Specific embodiment five: This embodiment further limits the active air floating support structure of magnetic mixing described in specific embodiment one. In this embodiment, when m is 1, multiple air outlets are opened on one high-pressure gas channel 2-1, and each air inlet hole of the throttling pipe 2-5 is connected to an air outlet end of the high-pressure gas channel 2-1.

[0038] Specific embodiment six: This embodiment further limits the active air-floating support structure of magnetic mixing described in specific embodiment one. In this embodiment, when m is 2, one high-pressure gas channel 2-1 is used to inflate one or more pressure equalizing tanks 2-6 through a throttling pipe 2-5, and another high-pressure gas channel 2-1 is used to inflate the remaining pressure equalizing tanks 2-6 through a throttling pipe 2-5.

[0039] In this embodiment, if Figure 3 As shown, the air bearing is defined as the first throttle structure, the second throttle structure and the third throttle structure from the center to the outer ring. Figure 3 One high-pressure gas channel 2-1 supplies gas to the first throttle structure and the third throttle structure at the same time, and another high-pressure gas channel 2-1 supplies gas to the second throttle structure.

[0040] Specific embodiment seven: This embodiment further limits the magnetic hybrid active air floating support structure described in specific embodiment six. In this embodiment, the device also includes a current control device, and multiple peripheral electromagnetic blocks 2-3 located on the same circular line are applied with the same current by the current control device.

[0041] In this embodiment, the magnetic force of the electromagnetic block can be controlled in real time by inputting current, and multiple electromagnets on the same circular line are controlled synchronously, while electromagnets on different circular lines are controlled independently.

[0042] Specific implementation example eight: The magnetic hybrid active air floating support method described in this implementation example is implemented based on the magnetic hybrid active air floating support structure described in specific implementation example one, and the method includes the following steps:

[0043] Step 1: inject pressurized gas into m high-pressure gas channels 2-1, the gas flows into the pressure chamber 2-4 from the throttling pipe 2-5, and is discharged from the pressure equalizing tank 2-6 to between the platform 1 and the air bearing 2, so that an air film 3 is formed between the platform 1 and the air bearing 2.

[0044] Step 2: Control the thickness of the air film 3 by applying current to the central electromagnetic block 2-2 and the peripheral electromagnetic blocks 2-3 on different circular lines.

[0045] In this embodiment, on the basis of the traditional air-floating static pressure bearing, the performance of the air-floating bearing 2 is improved through two air supply holes in an active manner, and a plurality of electromagnetic blocks arranged in a circular array are provided inside the air-floating bearing 2. The method of controlling the thickness of the air film 3 in real time is achieved by attracting the magnetic conductor 1-1 at the upper end of the platform 1. At the same time, the high-pressure gas can increase the thickness of the air-floating support structure as a whole, and the electromagnetic block can reduce the thickness of the air film 3 through electromagnetic force. When the pressure of the high-pressure gas and the electromagnetic force of the electromagnetic block are balanced, a relatively stable high-pressure air film 3 can be achieved. If the thickness of the air film 3 needs to be changed, the air supply pressure and the magnetic force can be adjusted to balance the forces of the two again.

[0046] That is, the present application effectively improves the static and dynamic characteristics of the air bearing and expands the application field of the air bearing by introducing the high-pressure air supply passage and the magnetic structure.

[0047] Working principle:

[0048] The upper end surface of the air-floating support device (i.e., the lower end surface of the air-floating bearing 2) is provided with a plurality of throttling holes (i.e., the air outlet holes of the throttling pipe 2-5). The high-pressure gas provided by the gas source enters from the gas inlet 2-7, passes through the high-pressure gas channel 2-1 to the inside of the throttling structure of the air-floating bearing 2, and the gas flows into the pressure chamber 2-4 through the throttling pipe 2-5, and forms an air film 3 between the upper end surfaces of the platform 1. The air-floating bearing 2 is provided with three circles of throttling structures, and the pressure chambers 2-4 of each circle of throttling structures are connected through the pressure equalizing groove 2-6, such as Figure 1 and 2 shown.

[0049] The air bearing 2 is arranged above the platform 1. The air bearing 2 forms a layer of high-pressure air film 3 with bearing capacity between the platform 1 and the high-pressure gas introduced by the air source, so that the bottom surface of the air bearing 2 has an upward thrust, and a layer of magnetic conductor 1-1 is arranged on the upper end of the platform 1. A plurality of groups of electromagnetic blocks are arranged inside the air bearing 2, which are just used to adsorb the magnetic conductor 1-1 on the platform 1. By attracting the magnetic conductor 1-1 on the upper end of the platform 1, the thickness of the air film 3 of the air bearing 2 can be controlled in real time. The thickness of the air film 3 can be measured in real time by using a displacement sensor. At the same time, the high-pressure gas can increase the thickness of the air support structure as a whole, and the electromagnetic block can reduce the thickness of the air film 3 through the electromagnetic force. When the pressure of the high-pressure gas and the electromagnetic force of the electromagnetic block are balanced, a relatively stable and high-pressure air film 3 can be achieved.

[0050] Working process 1: When it is necessary to actively control the thickness of the air film 3 of the air floating support device, if it is necessary to increase the thickness of the air film 3, the air supply pressure can be increased, the current of the electromagnetic block inside the air floating bearing can be reduced, or the power supply current of the electromagnetic block can be reduced while the air supply pressure is increased, so that the air film reaches the desired thickness; conversely, if it is necessary to reduce the thickness of the air film, the air supply pressure can be reduced, the current of the magnetic block inside the air floating bearing can be increased, or the power supply current can be increased while the air supply pressure is reduced, so that the air film 3 reaches the desired thickness, such as Figures 2 to 4 When the air-floating support structure needs to increase the thickness of the air film during operation, it only needs to be opened again. Figure 3 The gas inlet of the high-pressure gas channel connected to the first throttle structure and the third throttle structure is opened, and the inlet pressure is adjusted to increase the thickness of the gas film, provided that the pressure and magnetic force are balanced. When the gas inlet of the high-pressure gas channel connected to the second throttle structure is opened, the high-pressure gas is distributed more evenly and the bearing stiffness can be significantly improved.

[0051] Working process 2: When it is necessary to actively control the air film shape of the air bearing, such as Figure 5 As shown, the peripheral electromagnetic blocks 2-3 arranged in an annular manner between the first throttle structure and the second throttle structure, the peripheral electromagnetic blocks 2-3 arranged in an annular manner between the second throttle structure and the third throttle structure, and the peripheral electromagnetic blocks 2-3 arranged in an annular manner between the third throttle structure and the outer ring of the air-floating bearing can be arranged. The current increases successively, and the specific current size can be obtained by calculation, and finally input into the peripheral electromagnetic blocks 2-3. Each circle of peripheral electromagnetic blocks 2-3 is controlled separately, so that the shape of the air film 3 is a conical distribution with a thick middle and thin edges. At this time, the overall load-bearing and stiffness of the air-floating support structure can be effectively increased. Compared with the air-floating support structure without active control, the characteristics of the air-floating support structure in the present application will change with the change of the shape of the air film gap, and finally the stiffness will be enhanced.

[0052] Working process 3: When it is necessary to actively control the horizontal movement of the air bearing 2, it is necessary to drive the air bearing 2 to slide on the platform. Since the magnetic conductors 1-1 are evenly distributed on the upper end of the platform, it is only necessary to drive the air bearing 2 to control the static and dynamic characteristics of the air bearing 2 during its movement.

[0053] It is to be understood that the present invention is described by some embodiments, and it is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. A magnetic mixed active air floating support structure, characterized in that: The invention comprises a platform (1), an air-floating bearing (2), a magnetic conductor (1-1) and an air film active adjustment unit; the air-floating bearing (2) is arranged above the platform (1), the position of the magnetic conductor (1-1) corresponds to the position of the air-floating bearing (2) in the upper and lower directions, the magnetic conductor (1-1) is installed on the platform (1), the air film active adjustment unit is arranged in the air-floating bearing (2), and the thickness of the air film (3) is controlled by the air film active adjustment unit; The air film active regulation unit comprises a central electromagnetic block (2-2), n throttle structures, m high-pressure gas channels (2-1) and a plurality of groups of peripheral electromagnetic blocks (2-3), each throttle structure is arranged in a circular ring shape, the n throttle structures are arranged concentrically, the n throttle structures are connected by gas supply from the m high-pressure gas channels (2-1), each group of peripheral electromagnetic blocks (2-3) is also arranged in a circular ring shape, each group of peripheral electromagnetic blocks (2-3) is arranged between two adjacent throttle structures and fixedly embedded on the bottom surface of the air-floating bearing (2), the central electromagnetic block (2-2) is arranged at the center of the bottom surface of the air-floating bearing (2), and the thickness of the air film (3) is controlled by applying current to the peripheral electromagnetic blocks (2-3) on different ring shapes.

2. The magnetic hybrid active air floating support structure according to claim 1, characterized in that: Each throttle structure comprises a pressure chamber (2-4), a throttling pipe (2-5) and a pressure equalizing groove (2-6); m high-pressure gas channels (2-1) are radially arranged inside the air-floating bearing (2); n concentric annular pressure equalizing grooves (2-6) with the same spacing are provided at the bottom of the air-floating bearing (2); a plurality of groups of throttling pipes (2-5) are provided inside the air-floating bearing (2); the upper air inlet ends of the plurality of throttling pipes (2-5) in each group are ventilated and connected to any one of the high-pressure gas channels (2-1); the air outlet ends of the plurality of throttling pipes (2-5) in each group are provided with a pressure chamber (2-4) at the pressure equalizing groove (2-6); and the air inlet end aperture of each throttling pipe (2-5) is larger than the air outlet end aperture.

3. The magnetic hybrid active air floating support structure according to claim 2, characterized in that: Six pressure chambers (2-4) are evenly distributed on each pressure equalizing groove (2-6), and all the pressure chambers (2-4) are evenly distributed on radial lines diverging from the center of the air floating bearing (2) to the outside.

4. The magnetic hybrid active air floating support structure according to claim 3, characterized in that: Each group of peripheral electromagnetic blocks (2-3) is respectively arranged between two adjacent throttle structures, and each peripheral electromagnetic block (2-3) is arranged between two adjacent pressure chambers (2-4).

5. A magnetic hybrid active air floating support structure according to claim 2 or 4, characterized in that: Each of the pressure chambers (2-4) is a circular chamber.

6. The magnetic hybrid active air floating support structure according to claim 2, characterized in that: When m is 1, a plurality of gas outlet ends are provided on a high-pressure gas channel (2-1), and the gas inlet ends of a plurality of throttling pipes (2-5) are connected to the plurality of gas outlet ends of the high-pressure gas channel (2-1).

7. The magnetic hybrid active air floating support structure according to claim 6, characterized in that: When m is 2, one high-pressure gas channel (2-1) is used to inflate one or more throttle structures, and another high-pressure gas channel (2-1) is used to inflate the remaining throttle structures.

8. The magnetic hybrid active air floating support structure according to claim 1 or 7, characterized in that: The same current is applied to multiple peripheral electromagnetic blocks (2-3) in one group of peripheral electromagnetic blocks (2-3) by a current control device, multiple peripheral electromagnetic blocks (2-3) in one group of peripheral electromagnetic blocks (2-3) are synchronously controlled, and peripheral electromagnetic blocks (2-3) in different groups of peripheral electromagnetic blocks (2-3) are independently controlled.

9. A method for supporting a magnetic hybrid active air floating support structure according to any one of claims 1 to 8, characterized in that: The following steps are included: Step 1: Filling m high-pressure gas channels (2-1) with pressurized gas, the gas flows into the pressure chamber (2-4) through the throttling pipe (2-5), and is discharged from the pressure equalizing groove (2-6) to between the platform (1) and the air bearing (2), so that an air film (3) is formed between the platform (1) and the air bearing (2); Step 2: Control the thickness of the air film (3) by applying current to the peripheral electromagnetic blocks (2-3) on different rings.

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