Microscopic imaging measurement system and optical path adjustment method, optical device and medium thereof

Abstract

The present invention provides a microscopic imaging measurement system and an optical path adjustment method, an optical device and a medium thereof; the microscopic imaging measurement system comprises: an objective lens; a first lens group; a second lens group, comprising a first convex lens and a second convex lens arranged along the transmission direction of light; a first movable platform capable of moving the second convex lens; and a collecting device. The optical path adjustment method moves the image of the area to be measured on the second imaging plane to a first target position, and the first target position is an effective signal collection area of ​​the collecting device. In this way, by adjusting the position of the second convex lens, any selected area to be measured (especially the area to be measured that deviates from the optical axis) can be measured, and the operation is convenient.

Description

Technical Field

[0001] The present invention relates to the field of microscopic imaging measurement technology, and in particular to a microscopic imaging measurement system and an optical path adjustment method thereof, an optical device for implementing the optical path adjustment method, and a computer-readable storage medium. Background Art

[0002] With the development of scientific research and the upgrading of the photonic industry, the strong demand for the ability to finely characterize the optical properties of materials at the mesoscopic scale and to quickly obtain sample information in real time will promote the advancement of related detection technologies. Optical equipment commonly used for optical measurement uses a laser as an excitation light source, which enters the objective lens after passing through the excitation light path and then irradiates the sample surface. The signal light generated by the sample is collected and processed by a microscopic imaging measurement system. In the microscopic imaging measurement system of existing optical equipment, the positions of each optical element are fixed, and only the signals located on the optical axis of the objective lens (that is, the center of the field of view) can be collected and measured; it is impossible to measure the signals of predetermined points or areas that deviate from the optical axis in the real space image or momentum space image of the sample to be measured. Summary of the invention

[0003] The present invention provides an optical path adjustment method for a microscopic imaging measurement system, wherein the microscopic imaging measurement system comprises:

[0004] an objective lens capable of receiving signal light from a sample to be measured, the objective lens having an objective lens rear focal plane, and the sample to be measured having a sample surface;

[0005] a first lens group capable of imaging the rear focal plane of the objective lens on a first momentum space imaging plane, and cooperating with the objective lens to image the sample plane on a first real space imaging plane; a second lens group capable of imaging a first imaging plane on a second imaging plane, wherein the first imaging plane is the first real space imaging plane or the first momentum space imaging plane, and the second lens group comprises a first convex lens and a second convex lens arranged along the transmission direction of light; a first movable platform for mounting the second convex lens and capable of moving the second convex lens to change the position of the image in the second imaging plane; and

[0006] a collecting device capable of collecting information of the image of the second imaging surface;

[0007] The optical path adjustment method comprises the following steps:

[0008] Step P1: acquiring the image of the sample to be tested in the second imaging plane through the collecting device;

[0009] Step P2: obtaining a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of an area to be measured in the second imaging plane, wherein x0 is a component of the first starting coordinate in a first direction, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction, y1 is a component of the first target coordinate in the second direction, and the first direction intersects the second direction;

[0010] Step P3: Control the first movable platform to move Δx1 along the first direction and Δy1 along the second direction, where Δx1 = (x1-x0)*f2 / L, Δy1 = (y1-y0)*f2 / L; f2 is the focal length of the second convex lens, and L is the distance between the second imaging plane and the second convex lens.

[0011] Optionally, the method further includes step P4: taking the position of the first movable platform after step P3 as a starting point, controlling the first movable platform to step along the first direction and / or along the second direction.

[0012] Optionally, the first target coordinate is the center of the field of view of the collection device; or

[0013] The collecting device includes a light input window, the light input window is arranged at the second imaging plane, and the first target coordinate is the position of the light input window.

[0014] Optionally, the microscopic imaging measurement system further includes a modulation module, which is disposed at the first imaging plane and can modulate the area to be measured, and the modulation module includes a modulation unit; and a second movable platform for installing the modulation module.

[0015] Optionally, the method further comprises the following steps:

[0016] Step P5: acquiring the image of the modulation module in the second imaging plane through the collecting device;

[0017] Step P6: obtaining a second starting coordinate (x2, y2) and a second target coordinate (x3, y3) of the image of the modulation unit in the second imaging plane, wherein the second target coordinate (x3, y3) is the coordinate of the image of the area to be measured;

[0018] Step P7: Control the second movable platform to move Δx2 along the first direction and Δy2 along the second direction, where Δx2 = (x2-x3) / k, Δy2 = (y2-y3) / k, k = f2 / f1+(f2-L)*Δf / (f1*f2), f1 is the focal length of the first convex lens, and Δf is the distance between the front focal plane of the second convex lens and the back focal plane of the first convex lens.

[0019] The present invention also provides an optical device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the optical path adjustment method when executing the computer program.

[0020] The present invention also provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the optical path adjustment method are implemented.

[0021] The present invention also provides a microscopic imaging test system, comprising:

[0022] an objective lens capable of receiving signal light from a sample to be measured, the objective lens having an objective lens rear focal plane, and the sample to be measured having a sample surface;

[0023] a first lens group, capable of imaging the rear focal plane of the objective lens on a first momentum space imaging plane, and cooperating with the objective lens to image the sample plane on a first real space imaging plane; a second lens group, capable of imaging a first imaging plane on a second imaging plane, the first imaging plane being the first real space imaging plane or the first momentum space imaging plane, the second lens group comprising: a first convex lens and a second convex lens arranged along the transmission direction of light;

[0024] a first movable platform, used for mounting the second convex lens and capable of moving the second convex lens to change the position of the image in the second imaging plane;

[0025] a collecting device capable of collecting information of the image of the second imaging surface; and

[0026] A control device capable of communicating with the first movable platform, comprising:

[0027] an image acquisition unit, which acquires the image of the sample to be tested in the second imaging plane through the collection device;

[0028] a coordinate acquisition unit, acquiring a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of a region to be measured in the second imaging plane, wherein x0 is a component of the first starting coordinate in a first direction, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction, y1 is a component of the first target coordinate in the second direction, and the first direction intersects the second direction; and

[0029] A driving unit controls the first movable platform to move Δx1 along the first direction and Δy1 along the second direction, wherein Δx1=(x1-x0)*f2 / L, Δy1=(y1-y0)*f2 / L; f2 is the focal length of the second convex lens, and L is the distance between the second imaging plane and the second convex lens.

[0030] Optionally, it also includes a human-computer interaction interface, which is communicatively connected to the control device and the collection device; the coordinate acquisition unit acquires the first starting coordinate (x0, y0) and / or the first target coordinate (x1, y1) input by the user through the human-computer interaction interface.

[0031] Optionally, the collecting device includes a light input window, the light input window is arranged at the second imaging plane, and the first target coordinate (x1, y1) is the position of the light input window; and / or

[0032] The microscopic imaging measurement system also includes: a modulation module, which is arranged at the first imaging surface and can modulate the area to be measured, and the modulation module includes a modulation unit; and a second movable platform for installing the modulation module; the control device is communicatively connected to the second movable platform.

[0033] The present invention provides a microscopic imaging measurement system and an optical path adjustment method, an optical device and a medium thereof; the microscopic imaging measurement system comprises: an objective lens; a first lens group; a second lens group, comprising a first convex lens and a second convex lens arranged along the transmission direction of light; a first movable platform, capable of moving the second convex lens; and a collecting device. The optical path adjustment method moves the image of the area to be measured on the second imaging plane to a first target position, and the first target position is an effective signal collection area of ​​the collecting device. In this way, by adjusting the position of the second convex lens, any selected area to be measured (especially the area to be measured that deviates from the optical axis) can be measured, and the operation is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A structural block diagram of a microscopic imaging measurement system provided by the present invention;

[0035] Figure 2 A schematic diagram of the optical path of the second lens group imaging the area to be measured before the optical path is adjusted provided by the present invention;

[0036] Figure 3 A schematic diagram of the optical path of the second lens group imaging the area to be measured after the optical path is adjusted provided by the present invention;

[0037] Figure 4 A flowchart of the optical path adjustment method of the microscopic imaging measurement system provided by the present invention;

[0038] Figure 5 A schematic diagram of the optical path of the second lens group provided by the present invention for imaging the modulation unit and the area to be measured;

[0039] Figure 6 A schematic diagram of the structure of a microscopic imaging measurement system provided by the present invention;

[0040] Figure 7 A schematic diagram of the structure of another microscopic imaging measurement system provided by the present invention.

[0041] Explanation of the reference numerals: 10 sample to be measured, 20 objective lens, 30 first lens group, 40 second lens group, 41 first convex lens, 42 second convex lens, 51 first movable platform, 52 second movable platform, 60 collecting device, 61 light input window, 71 area to be measured, 72 image of area to be measured, 80 modulation module, 81 modulation unit, 82 modulation unit image, 90 control device, 91 image acquisition unit, 92 coordinate acquisition unit, 93 driving unit, 94 human-computer interaction interface, 100 optical axis, S1 sample plane, S2 rear focal plane of objective lens, S3 first real space imaging plane, S4 first momentum space imaging plane, S5 second imaging plane, S34 first imaging plane, X first direction, Z light transmission direction. DETAILED DESCRIPTION

[0042] Figure 1 A structural block diagram of a microscopic imaging measurement system provided by the present invention; Figure 2 A schematic diagram of the optical path of the second lens group imaging the area to be measured before the optical path is adjusted provided by the present invention; Figure 3 This is a schematic diagram of the optical path of the second lens group imaging the area to be measured after the optical path is adjusted according to the present invention. Figure 1-3 It can be seen that the microscopic imaging measurement system includes:

[0043] An objective lens 20, capable of receiving signal light from a sample to be tested 10, the objective lens 20 has an objective lens rear focal plane S2, and the sample to be tested 10 has a sample surface S1;

[0044] A first lens group 30, capable of imaging the objective lens rear focal plane S2 on a first momentum space imaging plane S4, and cooperating with the objective lens 20 to image the sample plane S1 on a first real space imaging plane S3;

[0045] a second lens group 40 capable of imaging a first imaging surface S34 onto a second imaging surface S5, wherein the first imaging surface S34 is the first real-space imaging surface S3 or the first momentum-space imaging surface S4, and the second lens group 40 includes a first convex lens 41 and a second convex lens 42 arranged along the light transmission direction Z;

[0046] a first movable platform 51 for mounting the second convex lens 42 and capable of moving the second convex lens 42 to change the position of the image in the second imaging surface S5; and

[0047] A collecting device 60 is capable of collecting information of the image of the second imaging surface S5.

[0048] Optionally, the microscopic imaging measurement system further includes a sample stage (not shown in the figure), and the sample 10 to be measured is arranged on the sample stage.

[0049] Specifically, the sample surface S1 of the sample to be tested 10 on the sample stage is set at the front focal plane of the objective lens 20. After the signal light (including active luminescence, stimulated luminescence, reflected light, etc.) emitted by the sample to be tested 10 is collected by the objective lens 20, it passes through the first lens group 30 and the second lens group 40 in sequence and is collected by the collecting device 60. The objective lens 20 can perform Fourier transform on the real space information of the light emitted by the sample to be tested 10, and obtain the momentum space information of the signal light emitted by the sample to be tested 10 at the rear focal plane S2 of the objective lens, that is, the rear focal plane S2 of the objective lens has the momentum space image of the sample to be tested 10. The objective lens 20 can also magnify the image of the sample surface S1, and is usually called a microscope objective lens. Usually, the magnification of the objective lens 20 can be 10 times, 20 times, 50 times, etc.

[0050] The first lens group 30 and the objective lens 10 cooperate to image the sample plane S1 (with the real space information of the sample 10 to be tested) onto the first real space imaging plane S3; that is, the first real space imaging plane S3 has the real space image of the sample 10 to be tested. The first lens group 30 images the objective lens rear focal plane S2 onto the first momentum space imaging plane S4, that is, the first momentum space imaging plane S4 has the momentum space image of the sample 10 to be tested. The first lens group 30 and the objective lens 10 with different structures can make the first real space imaging plane S3 and the first momentum space imaging plane S4 located at different positions. Figure 1, the first real-space imaging plane S3 is located between the first lens group 30 and the first momentum-space imaging plane S4. The first real-space imaging plane S3 or the first momentum-space imaging plane S4 is the first imaging plane S34. The image in the first imaging plane S34 is the real-space image or the momentum-space image of the sample 10 to be measured. The positions of the first lens group 30, the first real-space imaging plane S3 and the first momentum-space imaging plane S4 in the optical path are all fixed. Optionally, the first lens group 30 is composed of one or more lenses, such as 1, 2 or 3 lenses, etc.; wherein the lenses are convex lenses or concave lenses. Optionally, all lenses in the first lens group 30 have the same optical axis 100. The first real-space imaging plane S3 and the first momentum-space imaging plane S4 are both perpendicular to the light transmission direction Z, and are also perpendicular to the optical axis 100.

[0051] The second lens group 40 images the first imaging surface S34 onto the second imaging surface S5. When the first imaging surface S34 is the first real space imaging surface S3, the second imaging surface S5 is the second real space imaging surface, having the real space image of the sample 10 to be measured. When the first imaging surface S34 is the first momentum space imaging surface S4, the second imaging surface S5 is the second momentum space imaging surface, having the momentum space image of the sample 10 to be measured. In other words, the image in the second imaging surface S5 is the real space image or the momentum space image of the sample 10 to be measured. The position of the second lens group 40 in the light transmission direction Z in the optical path remains unchanged, and the position of the second imaging surface S5 in the optical path remains unchanged. The second lens group 40 includes a first convex lens 41 and a second convex lens 42 arranged along the light transmission direction Z. In other words, the first convex lens 41 is closer to the first imaging surface S34 than the second convex lens 42, and the second convex lens 42 is closer to the second imaging surface S5 and the collecting device 60 than the first convex lens 41. Optionally, the second lens group 40 further includes more lenses, such as a third convex lens, etc., but the second convex lens 42 is always the lens in the second lens group 40 that is closest to the second imaging plane S5 and the collecting device 60. Usually, the first convex lens 41 and the second convex lens 42 are both perpendicular to the optical axis 100, that is, the optical axes of the two are parallel to the optical axis 100, and are both perpendicular to the first imaging plane S34 and the second imaging plane S5.

[0052] like Figure 2 and 3As shown, a region to be measured 71 on the first imaging surface S34 deviates from the optical axis 100. The image of the region to be measured 71 on the second imaging surface S5 after passing through the second lens group 40 is the image of the region to be measured 72. The image of the region to be measured 72 also deviates from the optical axis 100, and the component of the first starting coordinate in the first direction X is x0. The collecting device 60 usually has a light input window 61 for effectively collecting signals; or has no light input window but has an efficient light collection area. Only the part of the image of the sample to be measured 10 in the second imaging surface S5 (i.e., the image in real space or the image in momentum space) that falls into the light input window 61 or the efficient light collection area can effectively collect signals. In other words, only when the image of the region to be measured 72 falls into the light input window 61, can the region to be measured 71 be effectively measured. Therefore, it is necessary to adjust the optical path of the second lens group 40 to adjust the position of the image in the second imaging surface S5, so that the image of the region to be measured (i.e., the region to be measured 71) can be moved to the target position (e.g., the light input window 61). The area to be measured 71 can be selected according to the actual needs of the user, for example, selecting the area to be measured on the first imaging surface S34, or selecting the area to be measured on the second imaging surface S5 (in this case, the area to be measured is indirectly selected by selecting the image of the area to be measured). Or, for example, selecting the area to be measured in the real space image of the sample to be measured 10, or selecting the area to be measured in the momentum space image of the sample to be measured 10. For example, when the center of the laser spot reflected by the sample to be measured 10 deviates from the optical axis 100, the area to be measured can be the position of the center of the laser spot on the first imaging surface S34.

[0053] The second convex lens 42 is mounted on the first movable platform 51. The first movable platform 51 can be operated to move the second convex lens 42 to change the position of the image in the second imaging plane S5 (i.e., the image in real space or the image in momentum space of the sample 10 to be tested). The second imaging plane S5 is perpendicular to the light transmission direction Z. The first movable platform 51 can be translated along a first direction X and / or a second direction (not shown in the figure); the first direction X and the second direction are perpendicular to each other and are both perpendicular to the light transmission direction Z. In other words, the first movable platform 51 is a one-dimensional translation platform or a two-dimensional translation platform. Figure 2 and 3 Take the first movable platform 51 as a one-dimensional translation stage that can translate along the first direction X as an example. As can be seen from the figure, the second convex lens 42 moves a distance Δx1 in the first direction X, and correspondingly makes the image 72 of the area to be measured move from x0 to x1 in the first direction X, Δx1 = (x1-x0)*f2 / L, f2 is the focal length of the second convex lens 42, and L is the distance between the second imaging surface S5 and the second convex lens 42. Similarly, the second convex lens 42 moves a distance Δy1 in the second direction, and correspondingly makes the image 72 of the area to be measured move from y0 to y1 in the second direction, Δy1 = (y1-y0)*f2 / L. Its principle and process are similar to Figure 1-3In this application document, the distance between a convex lens and a plane refers to the distance between the optical center of the convex lens and the plane.

[0054] Figure 4 The flowchart of the optical path adjustment method of the microscopic imaging measurement system provided by the present invention is as follows. Figure 4 It can be seen that the optical path adjustment method of the microscopic imaging measurement system includes the following steps:

[0055] Step P1: acquiring an image of the sample 10 to be tested in the second imaging surface S5 by the collecting device 60;

[0056] Step P2: obtaining a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of an area to be measured 71 (i.e., an image of the area to be measured 72) in the second imaging surface S5, wherein x0 is a component of the first starting coordinate in a first direction X, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction X, y1 is a component of the first target coordinate in the second direction, and the first direction X intersects with the second direction;

[0057] Step P3: Control the first movable platform 51 to move Δx1 along the first direction X and Δy1 along the second direction, where Δx1 = (x1-x0)*f2 / L, Δy1 = (y1-y0)*f2 / L; f2 is the focal length of the second convex lens 42, and L is the distance between the second imaging surface S5 and the second convex lens 42.

[0058] Specifically, in step P1, the image of the sample 10 to be tested in the second imaging surface S5 is obtained by the collecting device 60, so that it is convenient to observe the image of the sample 10 to be tested through the human-computer interaction interface (such as a display device), and then select the area to be measured as needed. At this time, the light input window 61 of the collecting device 60 should be as large as possible so that as many images of the sample 10 to be tested as possible can be collected. Optionally, the light input window 61 is an adjustable slit; the adjustable slit is opened in step P1. In step P2, the image of the sample 10 to be tested in the second imaging surface S5 obtained by the collecting device 60 is used to determine the first starting coordinates (x0, y0) and the first target coordinates (x1, y1) of the image 72 of the area to be measured. The first starting coordinates (x0, y0) and the first target coordinates (x1, y1) are selected by the user according to the actual application scenario, such as by mouse click operation or keyboard input. Optionally, the first target coordinate is the center of the field of view of the collection device 60 (usually corresponding to the optical axis 100), or the efficient light collection area; or the collection device 60 includes a light input window 61, the light input window 61 is arranged at the second imaging surface S5, and the first target coordinate is the position of the light input window 61 (for example, the center of the light input window 61). Optionally, the light input window 61 is a slit or a small hole or a fiber light entrance. The first direction X intersects with the second direction (preferably, the two are perpendicular), and both are perpendicular to the light transmission direction Z. The first movable platform 51 moves Δx1 along the first direction X, so that the image 72 of the area to be measured can be moved from x0 to x1 in the first direction X; the first movable platform 51 moves Δy1 along the second direction, so that the image 72 of the area to be measured can be moved from y0 to y1 in the second direction. When the first movable platform 51 can only move in one direction, the image of the area to be measured can only be moved in that direction; the image of the area to be measured cannot be moved in other directions.

[0059] After step P3, the image 72 of the area to be measured is moved to the first target position, and the signal of the area to be measured can be collected and processed by the collecting device 60. At this time, if the light input window 61 is an adjustable slit; in step P3, the adjustable slit is narrowed to allow only the light at the first target position to pass through. Optionally, the collecting device 60 is a CCD image sensor (Chargecoupled Device) or a monochromator. When the collecting device 60 is a CCD image sensor, it can image the real space information and momentum space information of the sample to be measured. When the collecting device 60 is a monochromator, it can realize the processing of the spectral information of the sample to be measured. The collecting device 60 can also be a module composed of a monochromator and a CCD image sensor.

[0060] In summary, after steps P1-P3, the image of the area to be measured 71 on the second imaging surface S5 (i.e., the image of the area to be measured 72) is moved to the first target position, and the first target position is the effective signal collection area of ​​the collection device 60. In this way, by adjusting the position of the second convex lens 42, any selected area to be measured (especially the area to be measured that deviates from the optical axis) can be measured, and the operation is convenient.

[0061] In an illustrative embodiment, the optical path adjustment method of the microscopic imaging measurement system further includes step P4: starting from the position of the first movable platform 71 after step P3, the first movable platform 71 is controlled to step along the first direction X and / or along the second direction. After steps P1-P3, the image of the area to be measured 71 on the second imaging surface S5 (i.e., the image of the area to be measured 72) is moved to the first target position. Then the first movable platform 71 is controlled to step N times along the first direction X, each time the first distance L1 is moved, N is a positive integer, and a measurement is performed after each step; in this way, the N areas to be measured in the first direction X can be measured. Similarly, the first movable platform 71 is controlled to step M times along the second direction, each time the second distance L2 is moved, M is a positive integer, and a measurement is performed after each step; in this way, the M areas to be measured in the second direction can be measured. Controlling the first movable platform 71 to step along the first direction X and the second direction can achieve scanning measurement of a certain range of areas.

[0062] When measuring a certain area to be measured, the effective measurement area is the overlapping area of ​​the image 72 of the area to be measured and the effective signal collection area of ​​the collection device 60. The area to be measured can be selected on the first imaging surface S34, or indirectly selected on the second imaging surface S5 by selecting the image of the area to be measured.

[0063] Figure 5 This is a schematic diagram of the optical path of the second lens group provided by the present invention for imaging the modulation unit and the area to be measured. Figure 1 and 5 As shown, in a schematic embodiment, the microscopic imaging measurement system also includes a modulation module 80, which is arranged at the first imaging surface S34 and can modulate the measured area 71, and the modulation module 80 includes a modulation unit 81; and a second movable platform 52 for installing the modulation module 80.

[0064] The modulation module 80 and the image of the sample 10 to be measured are both located on the first imaging plane S34, and the image of the modulation module 80 and the image of the sample 10 to be measured are both located on the second imaging plane S5. The modulation unit 81 of the modulation module 80 is moved in the first imaging plane S34 to move to the area to be measured, and then the image of the modulation unit 81 in the second imaging plane S5 is also moved to the position of the image of the area to be measured.

[0065] In an illustrative embodiment, the optical path adjustment method of the microscopic imaging measurement system further includes the following steps:

[0066] Step P5: acquiring the image of the modulation module 80 in the second imaging surface S5 through the collecting device 60;

[0067] Step P6: obtaining the second starting coordinates (x2, y2) and the second target coordinates (x3, y3) of the image of the modulation unit 81 (i.e., the modulation unit image 82) in the second imaging surface S5, the second target coordinates (x3, y3) being the coordinates of the image of the area to be measured 71 (i.e., the area to be measured image 72);

[0068] Step P7: Control the second movable platform 52 to move Δx2 along the first direction and Δy2 along the second direction, where Δx2 = (x2-x3) / k, Δy2 = (y2-y3) / k, k = f2 / f1+(f2-L)*Δf / (f1*f2), f1 is the focal length of the first convex lens 41, and Δf is the distance between the front focal plane of the second convex lens 42 and the back focal plane of the first convex lens 41.

[0069] The second starting coordinate is the position of the image of the modulation unit 81 (i.e., the modulation unit image 82) in the second imaging surface S5. In other words, by adjusting the position of the modulation unit 81, the position of the modulation unit image 82 is adjusted. When the second target position of the modulation unit image 82 is the position of the image of the area to be measured, the modulation unit 81 is located in the area to be measured 71.

[0070] Figure 5 Only the optical path schematic diagram of the second movable platform 52 moving along the first direction Δx2 is drawn. Those skilled in the art know that the optical path of the second movable platform 52 moving along the second direction Δy2 is the same as Figure 5 The same, no further elaboration here.

[0071] In this way, the modulation unit 81 is moved by the second movable platform 52, so that the modulation unit image 82 moves from the second starting coordinate (x2, y2) to the second target coordinate (x3, y3). The second target coordinate is the coordinate of the image of the area to be measured selected by the user input (for example, by mouse click or keyboard input). At this time, the position of the modulation unit 81 is the same as that of the area to be measured 71, and the position of the modulation unit image 82 is the same as that of the image of the area to be measured 72, so that the modulation unit 81 is used to modulate the area to be measured, which is simple and convenient.

[0072] In summary, executing steps P1-P3 moves the image of the area to be measured to the first target position (usually the light input window of the collection device or the position of the high-efficiency light collection area), thereby realizing the measurement of the target area; executing steps P5-P7 moves the modulation unit to the area to be measured, thereby realizing the modulation of the area to be measured by the modulation unit 81. After steps P1-P3 and steps P5-P7 are executed, the position of the image of the area to be measured, the position of the image of the modulation unit, and the first target position are the same. There is no restriction on the execution order of steps P1-P3 and steps P5-P7.

[0073] Optionally, first execute steps P1-P3, and then execute P5-P7; at this time, the user first selects the area to be measured, and moves the image of the area to be measured to the first target coordinates by moving the first movable platform, and the image of the modulation unit also moves accordingly; then move the second movable platform to move the modulation unit to the first target coordinates, that is, the second target coordinates are the same as the first target coordinates.

[0074] Optionally, execute steps P5-P7 first, and then execute P1-P3; at this time, the user first selects the area to be measured, and moves the modulation unit to the position of the area to be measured by moving the second movable platform, that is, the second target coordinates are the same as the first starting coordinates; and then moves the first movable platform to move both the image of the modulation unit and the image of the area to be measured to the first target coordinates.

[0075] Optionally, step P1 and step P5 may be completed simultaneously, that is, the image of the sample to be tested 10 and the image of the modulation module 80 in the second imaging surface S5 are simultaneously acquired by the collecting device 60 .

[0076] The invention also provides a microscopic imaging measurement system. Figure 6 A schematic diagram of the structure of a microscopic imaging measurement system provided by the present invention; Figure 7 This is another schematic diagram of the structure of the microscopic imaging measurement system provided by the present invention. Figure 6 and 7 It can be seen that the microscopic imaging measurement system includes:

[0077] An objective lens 20, capable of receiving signal light from a sample to be tested 10, the objective lens 20 has an objective lens rear focal plane S2, and the sample to be tested 10 has a sample surface S1;

[0078] A first lens group 30, capable of imaging the objective lens rear focal plane S2 on a first momentum space imaging plane S4, and cooperating with the objective lens 20 to image the sample plane S1 on a first real space imaging plane S3;

[0079] a second lens group 40 capable of imaging a first imaging surface S34 onto a second imaging surface S5, wherein the first imaging surface S34 is the first real space imaging surface S3 or the first momentum space imaging surface S4, and the second lens group 40 comprises: a first convex lens 41 and a second convex lens 42 arranged along the light transmission direction Z;

[0080] a first movable platform 51, used for mounting the second convex lens 42, and capable of moving the second convex lens 42 to change the position of the image in the second imaging surface S5;

[0081] a collecting device 60 capable of collecting information of the image of the second imaging surface S5; and

[0082] A control device 90 is capable of communicating with the first movable platform 51 .

[0083] The control device 90 comprises:

[0084] An image acquisition unit 91, which acquires an image of the sample 10 to be tested in the second imaging surface S5 through the collection device 60;

[0085] a coordinate acquisition unit 92, which acquires a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of a region to be measured 71 (i.e., the image of the region to be measured 72) in the second imaging surface S5, wherein x0 is a component of the first starting coordinate in a first direction X, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction X, y1 is a component of the first target coordinate in the second direction, and the first direction X intersects the second direction;

[0086] A driving unit 93 controls the first movable platform 51 to move Δx1 along the first direction X and Δy1 along the second direction, wherein Δx1=(x1-x0)*f2 / L, Δy1=(y1-y0)*f2 / L; f2 is the focal length of the second convex lens 42, and L is the distance between the second imaging surface S5 and the second convex lens 42.

[0087] Figure 6 and Figure 7 and Figure 1 The similarities are not repeated here, but the differences are: Figure 6 In the embodiment, the first lens group 30 is a third convex lens 31 , and the first imaging surface S34 is the first real space imaging surface S3 . Figure 7 In the embodiment, the first lens group 30 includes a fourth convex lens 32 and a third convex lens 31 which are sequentially arranged along the light transmission direction Z, and the first imaging surface S34 is a first momentum space imaging surface S4.

[0088] In an illustrative embodiment, the microscopic imaging measurement system also includes a human-computer interaction interface 94, which is communicatively connected to the control device 90 and the collection device 60; the coordinate acquisition unit 92 acquires the first starting coordinate (x0, y0) and / or the first target coordinate (x1, y1) input by the user through the human-computer interaction interface 94.

[0089] In an exemplary embodiment, the collecting device includes a light input window 61, and the light input window 61 is arranged at the second imaging surface S5; and / or

[0090] The microscopic imaging measurement system also includes a modulation module 80, which is arranged at the first imaging surface S34 and can modulate the measured area 71. The modulation module 80 includes a modulation unit 81; and a second movable platform 52 for installing the modulation module 80; the control device 90 is communicatively connected to the second movable platform 52.

[0091] Optionally, the image acquisition unit 91 further acquires the image of the modulation module 80 in the second imaging surface S5 through the collection device 60. The coordinate acquisition unit 92 further acquires the second starting coordinates (x2, y2) and the second target coordinates (x3, y3) of the image of the modulation unit 81 in the second imaging surface S5 (i.e., the modulation unit image 82), and the second target coordinates (x3, y3) are the coordinates of the image of the area to be measured 71 (i.e., the area to be measured image 72), such as the first starting coordinates (x0, y0) or the first target coordinates (x1, y1). The driving unit 93 further controls the second movable platform 52 to move Δx2 along the first direction and Δy2 along the second direction, wherein Δx2=(x2-x3) / k, Δy2=(y2-y3) / k, k=f2 / f1+(f2-L)*Δf / (f1*f2), f1 is the focal length of the first convex lens 41, and Δf is the distance between the front focal plane of the second convex lens 42 and the back focal plane of the first convex lens 41. The coordinate acquisition unit 92 acquires the second starting coordinate (x2, y2) and / or the second target coordinate (x3, y3) input by the user through the human-computer interaction interface 94.

[0092] The present invention also provides an optical device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the steps of the optical path adjustment method are implemented when the processor executes the computer program.

[0093] The present invention also provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, the steps of the optical path adjustment method are implemented.

[0094] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the term "include", "comprise" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only those elements, but also includes other elements that are not clearly listed, or also includes elements inherent to such process, method, article or equipment. In the present disclosure, the numeral "one" before a noun is only a prefix when the noun first appears, and does not limit the number of the noun. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or equipment including the elements. In the absence of more restrictions, "parallel" is included in the basic parallelism within the error range, and "vertical" is included in the basic verticality within the error range. In the absence of more restrictions, "and / or" represents one or two of the two elements before and after; for example, A and / or B, including three cases, i.e. A, B, A and B. Without further restrictions, the sequence numbers of the steps in the present disclosure do not limit the execution order of the steps.

[0095] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A method for adjusting the optical path of a microscopic imaging measurement system, characterized in that: The microscopic imaging measurement system comprises: an objective lens capable of receiving signal light from a sample to be measured, the objective lens having an objective lens rear focal plane, and the sample to be measured having a sample surface; a first lens group, capable of imaging the rear focal plane of the objective lens on a first momentum space imaging plane, and cooperating with the objective lens to image the sample surface on a first real space imaging plane; a second lens group capable of imaging a first imaging plane onto a second imaging plane, wherein the first imaging plane is the first real-space imaging plane or the first momentum-space imaging plane, and the second lens group includes a first convex lens and a second convex lens arranged along a light transmission direction; a first movable platform for mounting the second convex lens and capable of moving the second convex lens to change the position of the image in the second imaging plane; and a collecting device capable of collecting information of the image of the second imaging surface; The optical path adjustment method comprises the following steps: Step P1: acquiring the image of the sample to be tested in the second imaging plane through the collecting device; Step P2: obtaining a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of an area to be measured in the second imaging plane, wherein x0 is a component of the first starting coordinate in a first direction, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction, y1 is a component of the first target coordinate in the second direction, and the first direction intersects the second direction; Step P3: Control the first movable platform to move Δx1 along the first direction and Δy1 along the second direction, where Δx1=(x1-x0)*f2 / L, Δy1=(y1-y0)*f2 / L; f2 is the focal length of the second convex lens, and L is the distance between the second imaging plane and the second convex lens.

2. The method according to claim 1, characterized in that The method further includes step P4: taking the position of the first movable platform after step P3 as a starting point, controlling the first movable platform to step along the first direction and / or along the second direction.

3. The method according to claim 1, characterized in that The first target coordinate is the center of the field of view of the collection device; or The collecting device includes a light input window, the light input window is arranged at the second imaging plane, and the first target coordinate is the position of the light input window.

4. The method according to claim 1, characterized in that: The microscopic imaging measurement system further includes a modulation module, which is arranged at the first imaging plane and can modulate the area to be measured. The modulation module includes a modulation unit; and a second movable platform for installing the modulation module.

5. The method according to claim 4, characterized in that The method further comprises the steps of: Step P5: acquiring the image of the modulation module in the second imaging plane through the collecting device; Step P6: obtaining a second starting coordinate (x2, y2) and a second target coordinate (x3, y3) of the image of the modulation unit in the second imaging plane, wherein the second target coordinate (x3, y3) is the coordinate of the image of the area to be measured; Step P7: Control the second movable platform to move Δx2 along the first direction and Δy2 along the second direction, where Δx2=(x2-x3) / k, Δy2=(y2-y3) / k, k=f2 / f1+(f2-L)*Δf / (f1*f2), f1 is the focal length of the first convex lens, and Δf is the distance between the front focal plane of the second convex lens and the back focal plane of the first convex lens.

6. An optical device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the computer program, the steps of the optical path adjustment method according to any one of claims 1 to 5 are implemented.

7. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the steps of the optical path adjustment method according to any one of claims 1 to 5 are implemented.

8. Microscopic imaging measurement system, characterized in that: include: an objective lens capable of receiving signal light from a sample to be measured, the objective lens having an objective lens rear focal plane, and the sample to be measured having a sample surface; a first lens group, capable of imaging the rear focal plane of the objective lens on a first momentum space imaging plane, and cooperating with the objective lens to image the sample surface on a first real space imaging plane; a second lens group capable of imaging a first imaging plane onto a second imaging plane, wherein the first imaging plane is the first real-space imaging plane or the first momentum-space imaging plane, and the second lens group comprises: a first convex lens and a second convex lens arranged along a light transmission direction; a first movable platform, used for mounting the second convex lens and capable of moving the second convex lens to change the position of the image in the second imaging plane; a collecting device capable of collecting information of the image of the second imaging surface; and A control device capable of communicating with the first movable platform, comprising: an image acquisition unit, which acquires the image of the sample to be tested in the second imaging plane through the collection device; a coordinate acquisition unit, acquiring a first starting coordinate (x0, y0) and a first target coordinate (x1, y1) of an image of a region to be measured in the second imaging plane, wherein x0 is a component of the first starting coordinate in a first direction, y0 is a component of the first starting coordinate in a second direction, x1 is a component of the first target coordinate in the first direction, y1 is a component of the first target coordinate in the second direction, and the first direction intersects the second direction; and A driving unit controls the first movable platform to move Δx1 along the first direction and Δy1 along the second direction, wherein Δx1=(x1-x0)*f2 / L, Δy1=(y1-y0)*f2 / L; f2 is the focal length of the second convex lens, and L is the distance between the second imaging plane and the second convex lens.

9. The microscopic imaging measurement system according to claim 8, characterized in that: It also includes a human-computer interaction interface, which is communicatively connected to the control device and the collection device; the coordinate acquisition unit acquires the first starting coordinate (x0, y0) and / or the first target coordinate (x1, y1) input by the user through the human-computer interaction interface.

10. The microscopic imaging measurement system according to claim 8, characterized in that: The collecting device comprises a light input window, the light input window is arranged at the second imaging plane, and the first target coordinate (x1, y1) is the position of the light input window; and / or The microscopic imaging measurement system also includes: a modulation module, which is arranged at the first imaging surface and can modulate the area to be measured, and the modulation module includes a modulation unit; and a second movable platform for installing the modulation module; the control device is communicatively connected to the second movable platform.

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