A single crystal diamond growth device with raw gas concentration stratification control function

Abstract

The present invention provides a single crystal diamond growth device with a raw gas concentration stratification control function, and relates to the field of diamond growth. The present invention includes an ionization chamber, a microwave system, an ionization cylinder, a controller, a heat exchanger, an air supply pipeline and a feed air pump. The ionization cylinder is arranged inside the ionization chamber, and an air supply structure is arranged between the air outlet of the feed air pump and the air inlet at the bottom of the heat exchanger. The air supply structure installed in the present invention not only controls the circulation of raw gas between the ionization cylinder, the heat exchanger, and the feed air pump, but also ensures the balance of raw gas supply and discharge, and cools the raw gas; the rotating diffuser and multiple flow control valves cooperate to control the uniform distribution of raw gas concentration inside the ionization cylinder, and the upper drive assembly controls the reciprocating push assembly to make the ionization cylinder vibrate, so as to avoid the decrease in diamond generation quality caused by the sticky diamond inside the ionization cylinder, and ensure the quality of diamond generation.

Description

Technical Field

[0001] The invention relates to a diamond growth device, in particular to a single crystal diamond growth device with a raw material gas concentration stratification control function, belonging to the technical field of diamond growth. Background Art

[0002] Diamond is an excellent semiconductor material with high thermal conductivity, high electron and hole mobility, high dielectric breakdown field, low dielectric loss and wide band gap, which surpasses most materials.

[0003] However, naturally occurring type IIb diamonds with semiconductor properties are so rare that the research, technology or methods that have been published all use naturally occurring relatively large quantities of type IIa diamonds or artificially grown diamonds as substrate materials for semiconductor wafer processing.

[0004] Therefore, when growing diamonds using chemical vapor deposition (CVD), the chemical vapor deposition (CVD) diamond growth technology requires ionization of the raw gas during the production process. After the raw gas is introduced into the ionization box through the gas supply pipe, the density of the raw gas inside the ionization box will decrease as it is farther away from the gas supply pipe. The raw gas concentration cannot be controlled, resulting in reduced quality of diamond growth. Summary of the invention

[0005] To solve the above problems, the present invention is implemented through the following technical solutions: a single crystal diamond growth device with a raw gas concentration stratification control function; comprising an ionization chamber, a microwave system, an ionization tube, a controller, a heat exchanger, a gas supply pipeline and a feed gas pump, wherein the ionization tube is arranged inside the ionization chamber, and a gas supply structure is arranged between the gas outlet of the feed gas pump and the gas inlet at the bottom of the heat exchanger; the gas supply structure comprises an upper driving assembly, a diffuser pipe and a lower diversion and discharge assembly, wherein a plurality of flow control valves, an air pressure sensor and a partition plate are arranged in sequence from top to bottom inside the diffuser pipe; a plurality of inclined grooves are opened at the bottom of the outer side of the diffuser pipe; a first telescopic tube is arranged between the top of the diffuser pipe and the upper driving assembly, a second telescopic tube is arranged between the bottom of the diffuser pipe and the lower diversion and discharge assembly, and a reciprocating driving assembly is arranged between the upper driving assembly and the ionization tube.

[0006] Preferably, a one-way valve is installed at the air outlet of the heat exchanger, and the air supply pipe is fixedly installed on the top of the one-way valve. The setting of the one-way valve prevents the raw gas inside the air supply pipe from flowing back into the heat exchanger, so that the air supply pipe can transport the raw gas to the inside of the diffuser pipe. The air outlet of the feed air pump is installed on one side of the air supply pipe, and the heat exchanger and the controller are respectively fixedly installed on both sides of the ionization chamber. One end of the air supply pipe is rotatably connected with a short tube, the bottom end of the short tube passes through the ionization chamber and is rotatably connected to the ionization chamber through a bearing, and the bottom end of the short tube is fixedly connected to the first telescopic tube.

[0007] Preferably, the upper driving assembly includes a driven gear, a transmission gear, a forward and reverse motor and a reciprocating screw. The forward and reverse motor drives the transmission gear to rotate through the reciprocating screw, drives the meshing driven gear to rotate, and drives the air diffuser to rotate. The driven gear is meshed with one side of the transmission gear. The driven gear is fixedly sleeved on the outside of the damper. The reciprocating screw is fixedly installed between the transmission gear and the output end of the forward and reverse motor. The reciprocating screw passes through the ionization chamber and is rotatably connected to the ionization chamber through a bearing.

[0008] Preferably, the reciprocating driving assembly includes a nut pair, which is sleeved on the outside of the reciprocating screw, a fixed cross plate is fixedly connected to one side of the nut pair, a striker is fixedly connected to the bottom of the fixed cross plate, a fixed bent plate is sleeved on the outside of the striker, and when the reciprocating screw rotates, the nut pair is driven to move up and down, so that the striker moves up and down and continuously strikes the ionization cylinder, the fixed bent plate is fixedly connected between the ionization chamber and the forward and reverse motors, and a plurality of dampers are fixedly connected between the bottom of the outside of the ionization cylinder and the ionization chamber, and the continuous impact of the striker will cause the ionization cylinder to vibrate inside the ionization chamber.

[0009] Preferably, the top end of the gas diffusion pipe passes through the ionization cylinder and is rotatably connected to the ionization cylinder through a bearing, the multiple flow control valves are fixedly connected to the inside of the gas diffusion pipe, and a gas guide elbow is fixedly connected between the multiple flow control valves and the gas diffusion pipe. When the multiple flow control valves are in operation, raw gas is sprayed into the ionization cylinder through the gas guide elbow. The partition plate is fixedly connected to the inside of the gas diffusion pipe, and the air pressure sensor is fixedly connected to the top of the partition plate.

[0010] Preferably, a rubber cover is provided on the outer fixed sleeve of the air diffusion pipe, the inclined groove is opened on the outer side of the air diffusion pipe and arranged inside the rubber cover, a one-way bearing is provided on the top fixed sleeve on the outer side of the air diffusion pipe, a magnet column is provided on the top of the one-way bearing, the magnet column fixed to the ionization cylinder is adsorbed and fixed to the outer ring of the one-way bearing to limit the connection plate to prevent the connection plate and the cleaning frame from shaking, and the magnet column is fixedly connected to the top of the inner cavity of the ionization cylinder.

[0011] Preferably, a connecting plate is fixedly connected to one side of the one-way bearing, and a cleaning frame is fixedly connected to one end of the connecting plate. The cleaning frame rotates inside the ionization cylinder, and the cleaning frame in contact with the inner wall of the ionization cylinder scrapes the air intake of the inner wall of the ionization cylinder to prevent the diamonds generated by the ionization cylinder from sticking to the ionization cylinder. The bottom end of the cleaning frame extends to the bottom of the chute.

[0012] Preferably, the bottom end of the air diffusion pipe passes through the ionization cylinder and is rotatably connected to the ionization cylinder through a bearing, the lower diversion and discharge assembly includes an air extraction pipe, a separation box and a three-way valve, the outer top of the air extraction pipe is rotatably arranged at the bottom of the inner cavity of the air diffusion pipe through a bearing, the second telescopic pipe is fixedly connected between the bottom of the air extraction pipe and the normally closed end of the three-way valve, an air duct is fixedly connected between the air extraction pipe and the normally open end of the three-way valve, and a filter tube is arranged inside the separation box.

[0013] Preferably, a rubber sleeve is fixedly connected to the top of the exhaust pipe, and the rubber sleeve is arranged inside the air diffusion pipe. The inside of the rubber sleeve is larger at the top and smaller at the bottom, ensuring that all diamonds enter the exhaust pipe from the air diffusion pipe. The filter pipe is fixedly connected to the top of the inner cavity of the separation box, and a discharge elbow is fixedly connected between the filter pipe and the separation box. One end of the discharge elbow is fixedly connected to a collecting box, and the diamonds are retained in the filter pipe. The diamonds enter the collecting box through the discharge elbow fixed at the bottom of the filter pipe for temporary storage, and one end of the collecting box is fixedly connected to a control valve.

[0014] Preferably, a return air pipe is fixedly connected between the three-way valve and the air inlet end of the vacuum pump, the air outlet end of the vacuum pump is arranged at the bottom of the air inlet of the heat exchanger, a plurality of inclined plates are fixedly connected to the inside of the return air pipe, and the plurality of inclined plates are staggeredly distributed inside the return air pipe, and a flaring pipe is fixedly connected to the bottom of the return air pipe, and particulate matter is gathered into the flaring pipe under the action of gravity, and finally the particulate matter enters the waste box threadedly connected to the bottom of the flaring pipe, a waste box is threadedly sleeved on the bottom outer side of the flaring pipe, and the waste box can be disassembled by rotating the waste box to leave the bottom outer side of the flaring pipe.

[0015] The present invention provides a single crystal diamond growth device with a raw material gas concentration stratification control function, which has the following beneficial effects:

[0016] 1. The single crystal diamond growth equipment with raw gas concentration stratification control function, the gas supply structure installed between the ionization chamber, the ionization cylinder, and the heat exchanger not only controls the circulation of raw gas between the ionization cylinder, the heat exchanger, and the feed gas pump, but also ensures the balance of raw gas supply and discharge, and cools the raw gas; at the same time, the gas supply structure composed of the upper drive component, the diffuser pipe, and the lower diversion and discharge component controls the uniform distribution of raw gas concentration inside the ionization cylinder through the rotating diffuser pipe and multiple flow control valves, and the upper drive component controls the reciprocating push component to vibrate the ionization cylinder, avoiding the decrease in diamond generation quality caused by the sticky diamond inside the ionization cylinder, and ensuring the quality of diamond generation. When the lower diversion and discharge component meets the raw gas circulation, it provides different paths for raw gas circulation and diamond collection, which can not only meet the raw gas circulation, but also will not collect fine particles in the raw gas as finished diamonds.

[0017] 2. For the single crystal diamond growth equipment with raw gas concentration stratification control function, when the forward and reverse motors reverse, the direction of rotation of the diffuser pipe is the self-locking direction of the one-way bearing, so the diffuser pipe drives the connecting plate to rotate through the one-way bearing, and the rotating connecting plate drives the cleaning frame to rotate inside the ionization cylinder. The cleaning frame in contact with the inner wall of the ionization cylinder scrapes the air intake of the inner wall of the ionization cylinder to prevent the diamonds generated by the ionization cylinder from sticking to the ionization cylinder, thereby ensuring the quality of the diamonds generated by the reaction of the raw gas with the inner wall of the ionization cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a structural schematic diagram of the short tube of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the gas supply pipeline of the present invention;

[0021] Figure 4 It is a structural schematic diagram of the fixed horizontal plate of the present invention;

[0022] Figure 5 It is a structural schematic diagram of the rubber cover of the present invention;

[0023] Figure 6 It is a structural schematic diagram of the air diffusion pipe of the present invention;

[0024] Figure 7 It is a partial structural schematic diagram of the partition plate of the present invention;

[0025] Figure 8 It is a structural schematic diagram of the separation box of the present invention;

[0026] Fig. 9 It is a schematic diagram of the partial structure of the air return pipe of the present invention;

[0027] Fig.10 It is a schematic structural diagram of the air duct of the present invention.

[0028] Description of reference numerals: 1, ionization chamber; 2, microwave system; 3, ionization cylinder; 4, heat exchanger; 5, feed air pump; 6, one-way valve; 7, air supply pipeline; 8, first telescopic tube; 9, air diffuser; 10, flow control valve; 11, air guide elbow; 12, partition plate; 13, air pressure sensor; 14, chute; 15, driven gear; 16, transmission gear; 17, fixed bent plate; 18, forward and reverse motor; 19, reciprocating screw rod; 20, nut pair; 21, fixed horizontal plate; 2 2. Impact rod; 23. Rubber cover; 24. One-way bearing; 25. Magnet column; 26. Connecting plate; 27. Cleaning rack; 28. Vacuum pipe; 29. ​​Second telescopic pipe; 30. Separation box; 31. Filter pipe; 32. Discharge elbow; 33. Collection box; 34. Control valve; 35. Air duct; 36. Three-way valve; 37. Return air pipe; 38. Inclined plate; 39. Expanding pipe; 40. Waste box; 41. Rubber sleeve; 42. Vacuum pump; 43. Damper; 44. Short pipe. DETAILED DESCRIPTION

[0029] The embodiment of the present invention provides a single crystal diamond growth device with a raw material gas concentration stratification control function.

[0030] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 and Fig.10 , including an ionization chamber 1, a microwave system 2, an ionization cylinder 3, a controller, a heat exchanger 4, an air supply pipeline 7 and a feed air pump 5, the ionization cylinder 3 is arranged inside the ionization chamber 1, the air outlet of the heat exchanger 4 is installed with a one-way valve 6, the air supply pipeline 7 is fixedly installed on the top of the one-way valve 6, the air outlet of the feed air pump 5 is installed on one side of the air supply pipeline 7, the heat exchanger 4 and the controller are respectively fixedly installed on both sides of the ionization chamber 1, and an air supply structure is arranged between the air outlet of the feed air pump 5 and the air inlet at the bottom of the heat exchanger 4, the air supply structure controls the raw material gas to circulate between the ionization cylinder 3, the heat exchanger 4 and the feed air pump 5, the heat exchanger 4 cools down the circulating raw material gas, and increases the temperature difference between the raw material gas and the inner wall of the ionization cylinder 3;

[0031] The gas supply structure includes an upper driving assembly, a diffuser pipe 9 and a lower diversion and discharge assembly. The raw gas extracted by the feed air pump 5 is transported to the inside of the gas supply pipe 7, and the raw gas discharged from the heat exchanger 4 also enters the inside of the gas supply pipe 7. At the same time, the setting of the one-way valve 6 prevents the raw gas in the gas supply pipe 7 from flowing back into the heat exchanger 4. The short pipe 44 is connected to the inside of the diffuser pipe 9 through the first telescopic pipe 8, so the gas supply pipe 7 transports the raw gas to the inside of the diffuser pipe 9 through the short pipe 44. A plurality of flow control valves 10, an air pressure sensor 13 and a partition plate 12 are sequentially arranged inside the air diffusion pipe 9 from top to bottom; the top end of the air diffusion pipe 9 passes through the ionization cylinder 3 and is rotatably connected to the ionization cylinder 3 through a bearing, a plurality of flow control valves 10 are fixedly connected inside the air diffusion pipe 9, the partition plate 12 is fixedly connected inside the air diffusion pipe 9, and the air pressure sensor 13 is fixedly connected to the top of the partition plate 12. The working feed air pump 5 infuses raw gas into the air diffusion pipe 9 to increase the air pressure inside the space at the top of the partition plate 12 inside the air diffusion pipe 9. The air pressure sensor 13 detects the air pressure inside the air diffusion pipe 9 in real time. The air pressure value detected by the air pressure sensor 13 is displayed on the electrically connected controller. The staff can understand the air pressure state inside the air diffusion pipe 9 according to the displayed data and prepare for the next step.

[0032] When the air pressure value reaches a predetermined value, the controller controls the upper drive assembly to work;

[0033] The upper driving assembly includes a driven gear 15, a transmission gear 16, a forward and reverse motor 18 and a reciprocating screw rod 19. The reciprocating screw rod 19 is fixedly installed between the transmission gear 16 and the output end of the forward and reverse motor 18. The reciprocating screw rod 19 penetrates the ionization chamber 1 and is rotatably connected to the ionization chamber 1 through a bearing, so that the transmission gear 16 is installed on the top of the ionization chamber 1. Figure 1 The driven gear 15 is meshed with one side of the transmission gear 16, and the driven gear 15 is fixedly sleeved on the outside of the short tube 44. The short tube 44 is rotatably connected to the air supply pipe 7. The short tube 44 rotatably connected to the air supply pipe 7 is rotatably connected to the ionization chamber 1. Therefore, when the driven gear 15 fixedly sleeved on the outside of the short tube 44 rotates, the rotation of the short tube 44 will not affect the air supply pipe 7, providing support for the rotation of the driven gear 15. The bottom end of the short tube 44 is fixedly connected to the first telescopic tube 8.

[0034] The working forward and reverse motor 18 drives the reciprocating screw 19 installed on the output end to rotate, and the transmission gear 16 fixed to the reciprocating screw 19 rotates synchronously. The rotating transmission gear 16 drives the meshing driven gear 15 to rotate, and the short tube 44 fixed inside the driven gear 15 rotates, and the first telescopic tube 8 fixed by the short tube 44 rotates, and the air diffusion tube 9 fixed at the bottom end of the first telescopic tube 8 rotates, and the air diffusion tube 9 rotatably installed on the ionization cylinder 3 rotates, and the air diffusion tube 9 rotates at a uniform speed in the ionization cylinder 3.

[0035] A gas guide elbow 11 is fixedly connected between the multiple flow control valves 10 and the gas diffusion pipe 9. When the multiple flow control valves 10 are working, the high-pressure raw gas in the gas diffusion pipe 9 is sprayed into the ionization cylinder 3 through the flow control valves 10 and the gas guide elbow 11. The gas diffusion pipe 9 rotates to arrange the raw gas to various positions on the inner wall of the ionization cylinder 3, reducing the time required for the raw gas to fill the ionization cylinder 3. Since the output flow of the multiple flow control valves 10 decreases from top to bottom, the flow of the raw gas sprayed into the ionization cylinder 3 by the multiple gas guide elbows 11 decreases from top to bottom, and the heavier raw gas will naturally sink under the action of gravity. The raw gas with a higher concentration in the upper part automatically sinks to supplement the raw gas in the lower part, so that the raw gas concentration in the ionization cylinder 3 is evenly distributed, solving the problem of reduced diamond production quality caused by different raw gas concentrations in the ionization cylinder 3.

[0036] The reciprocating push assembly includes a nut pair 20, which is sleeved on the outside of the reciprocating screw rod 19, a fixed horizontal plate 21 is fixedly connected to one side of the nut pair 20, a striker rod 22 is fixedly connected to the bottom of the fixed horizontal plate 21, a fixed bent plate 17 is sleeved on the outside of the striker rod 22, and one end of the fixed bent plate 17 is fixedly connected to the forward and reverse motor 18, such as Figure 4 As shown, the other end of the fixed bent plate 17 is fixedly connected to the ionization chamber 1 , so the fixed bent plate 17 fixes the forward and reverse motor 18 inside the ionization chamber 1 .

[0037] The fixedly connected fixed bent plate 17 cannot rotate, so the impact rod 22 inside the fixed bent plate 17 cannot rotate, and the fixed horizontal plate 21 to which the impact rod 22 is fixed cannot rotate either, so the nut pair 20 fixed to the fixed horizontal plate 21 is limited and cannot rotate, and the rotation of the reciprocating screw 19 cannot drive the nut pair 20 to rotate. And the bottom end of the impact rod 22 only passes through the fixed bent plate 17, so the impact rod 22 can move up and down. The rotating reciprocating screw 19 drives the outer nut pair 20 to move up and down, and the nut pair 20 drives the fixed fixed horizontal plate 21 to move up and down, so that the impact rod 22 fixed to the fixed horizontal plate 21 moves up and down, and the impact rod 22 moving up and down continuously hits the ionization cylinder 3.

[0038] A first telescopic tube 8 is arranged between the top of the air diffusion pipe 9 and the upper driving assembly, a second telescopic tube 29 is arranged between the bottom of the air diffusion pipe 9 and the lower diversion and discharge assembly, and a reciprocating driving assembly is arranged between the upper driving assembly and the ionization cylinder 3.

[0039] A first telescopic tube 8 that can be extended and retracted is installed on the top of the diffuser pipe 9 that is rotatably connected inside the ionization cylinder 3, and a second telescopic tube 29 that can be extended and retracted is installed on the bottom of the diffuser pipe 9, so that the ionization cylinder 3 as a whole can move up and down. At the same time, multiple dampers 43 are installed between the bottom of the ionization cylinder 3 and the ionization chamber 1. Since the dampers 43 can only be extended and retracted up and down, the ionization cylinder 3 fixedly installed by the multiple dampers 43 can move up and down. The continuous impact of the impact rod 22 will cause the ionization cylinder 3 to vibrate inside the ionization chamber 1, shake off the diamonds stuck on the inner wall of the ionization cylinder 3, and prevent the diamonds stuck inside the ionization cylinder 3 from affecting the reaction between the raw gas and the inner wall of the ionization cylinder 3.

[0040] A plurality of inclined grooves 14 are provided at the bottom of the outer side of the diffuser pipe 9, and the plurality of inclined grooves 14 provided at the outer side of the diffuser pipe 9 are arranged at the bottom of the inner cavity of the ionization tube 3. The bottom end of the diffuser pipe 9 penetrates the ionization tube 3 and is rotatably connected to the ionization tube 3 through a bearing. The lower flow discharge assembly includes an exhaust pipe 28, a separation box 30 and a three-way valve 36. The top of the exhaust pipe 28 is rotatably arranged at the bottom of the inner cavity of the diffuser pipe 9 through a bearing. The separation box 30 is connected to the inside of the diffuser pipe 9 through the exhaust pipe 28 and the second telescopic pipe 29.

[0041] The second telescopic tube 29 is fixedly connected between the bottom of the air extraction tube 28 and the normally closed end of the three-way valve 36, and an air bleed tube 35 is fixedly connected between the air extraction tube 28 and the normally open end of the three-way valve 36. Fig.10 As shown, a filter tube 31 is provided inside the separation box 30, the bottom of the inner cavity of the ionization cylinder 3 is connected to the inside of the diffuser pipe 9 through the chute 14, the inside of the diffuser pipe 9 is connected to the exhaust pipe 28, and the exhaust pipe 28 is connected to the inside of the separation box 30 through a fixed second telescopic pipe 29.

[0042] When the vacuum pump 42 works at low power, the vacuum pump 42 extracts gas through the normally open end of the three-way valve 36. Since the normally open end of the three-way valve 36 is connected to the bottom of the inner cavity of the ionization tube 3 through the air duct 35, the second telescopic tube 29, the air duct 28 and the multiple inclined slots 14, the vacuum pump 42 extracts gas from the bottom of the inner cavity of the ionization tube 3 through the normally open end of the three-way valve 36, the air duct 35, the air duct 28 and the multiple inclined slots 14. At this time, the gas replenishment speed and the gas extraction speed inside the ionization tube 3 form a stable cycle, and the air outlet end of the vacuum pump 42 is connected to the air inlet of the heat exchanger 4. The gas in the cycle is cooled by the heat exchanger 4, which increases the temperature difference between the raw gas and the inner wall of the ionization tube 3, increases the reaction speed of the raw gas and the inner wall of the ionization tube 3, and improves the diamond generation speed.

[0043] When the vacuum pump 42 works at high power, the three-way valve 36 works and the vacuum pump 42 cooperates with the normally closed end to open, and the vacuum pump 42 extracts air through the normally closed end of the three-way valve 36. The normally closed end of the three-way valve 36 is connected to the separation box 30, so the vacuum pump 42 extracts the gas at the bottom of the inner cavity of the ionization tube 3 through the separation box 30, the second telescopic tube 29, the vacuum pipe 28, the air diffusion pipe 9 and the multiple inclined grooves 14. The high-speed flowing gas forms a negative pressure at the bottom of the inner cavity of the ionization tube 3, and the diamonds at the bottom of the inner cavity of the ionization tube 3 are extracted. When the airflow carrying diamonds passes through the interior of the separation box 30, the diamond particles are intercepted by the filter tube 31 fixed inside the separation box 30, and the diamond collection work is completed.

[0044] Specifically, first, the feed air pump 5 is controlled to work to extract the raw gas and transport it to the inside of the diffuser pipe 9 through the air supply pipe 7. The partition plate 12 and the air pressure sensor 13 are arranged on the top of the inner cavity of the diffuser pipe 9 to form a boost chamber. The air pressure sensor 13 detects the air pressure inside the boost chamber in real time. When the air pressure inside the boost chamber reaches a predetermined value, the controller controls the upper drive assembly to work to drive the diffuser pipe 9 to rotate. At the same time, the controller controls multiple flow control valves 10 to work.

[0045] The output flow rates of the multiple flow control valves 10 decrease from top to bottom, so the speed of the raw gas injected into the ionization cylinder 3 by the multiple gas guide bends 11 decreases from top to bottom. The rotating gas diffusion pipe 9 drives the multiple flow control valves 10 and the multiple gas guide bends 11 to arrange the raw gas into the ionization cylinder 3 in a rotating state.

[0046] Since the raw gas will naturally sink under the action of gravity, the raw gas with a higher concentration in the upper part will automatically sink to supplement the raw gas in the lower part, so that the raw gas concentration inside the ionization cylinder 3 is evenly distributed, ensuring the quality of the diamonds generated by the ionization cylinder 3. In the process of ionization to generate diamonds inside the ionization cylinder 3, the reciprocating push assembly, under the action of the upper drive assembly, the continuous impact of the impact rod 22 will cause the ionization cylinder 3 to vibrate inside the ionization chamber 1, shake off the diamonds in the inner cavity of the ionization cylinder 3, and avoid the position where the inner wall of the ionization cylinder 3 sends the ionization reaction to be covered by diamonds, thereby ensuring the quality of the diamonds generated by the reaction of the ionization cylinder 3 and the raw gas.

[0047] After the upper driving assembly works for a period of time, the lower diversion discharge assembly works. At this time, the air pump 42 works at low power, and at this time, the air pump 42 is connected to the bottom of the inner cavity of the ionization cylinder 3 through the normally open end of the three-way valve 36, the air bleed pipe 35, the second telescopic pipe 29, the air pump 28 and the multiple inclined grooves 14. The air pump 42 works to extract gas from the bottom of the inner cavity of the ionization cylinder 3 through the normally open end of the three-way valve 36, the air bleed pipe 35, the second telescopic pipe 29, the air pump 28 and the multiple inclined grooves 14.

[0048] At this time, the speed at which multiple flow control valves 10 replenish the raw gas into the ionization cylinder 3 forms a stable state with the speed at which the gas settled to the bottom of the inner cavity of the ionization cylinder 3 after the ionization reaction is extracted. The gas extracted by the vacuum pump 42 is transported to the inside of the heat exchanger 4, and the gas is cooled by the cold air of the heat exchanger 4 and transported to the inside of the gas supply pipe 7. After the gas is mixed with the gas transported to the inside of the gas supply pipe 7 by the feed gas pump 5, it is transported to the inside of the diffuser pipe 9 by the gas supply pipe 7, and finally is evenly dispersed in the inside of the ionization cylinder 3 to react with the inner wall of the ionization cylinder 3 to generate diamonds, so that the raw gas circulates among the feed gas pump 5, the gas supply pipe 7, the diffuser pipe 9, the return pipe 37, and the heat exchanger 4 under the control of the gas supply structure, and the raw gas is cooled during the flow process, thereby increasing the temperature difference between the raw gas and the inside of the ionization cylinder 3 and improving the diamond generation speed.

[0049] After the raw gas processing is completed, the lower diversion discharge component is controlled to work at high power. The three-way valve 36 is controlled to work at high power while the vacuum pump 42 works at high power. The normally closed end of the three-way valve 36 is opened and the normally open end is closed. When the vacuum pump 42 extracts gas through the normally closed end of the three-way valve 36, the gas at the bottom of the inner cavity of the ionization tube 3 can be extracted through the separation box 30, the second telescopic tube 29, the vacuum pipe 28, the diffuser pipe 9 and the multiple inclined grooves 14. The high-speed flowing gas forms a negative pressure at the bottom of the inner cavity of the ionization tube 3 to control the flow of the diamonds that fall to the bottom of the inner cavity of the ionization tube 3, and the airflow carrying the diamonds enters the separation box 30 and is intercepted and collected by the filter tube 31.

[0050] Therefore, the air supply structure installed between the ionization chamber 1, the ionization cylinder 3, and the heat exchanger 4 in the present application not only controls the circulation of the raw gas between the ionization cylinder 3, the heat exchanger 4, and the feed gas pump 5, but also ensures the balance of the supply and discharge of the raw gas, and cools the raw gas; at the same time, the air supply structure composed of the upper drive assembly, the diffuser pipe 9, and the lower diversion and discharge assembly controls the uniform distribution of the raw gas concentration inside the ionization cylinder 3 through the rotating diffuser pipe 9 and multiple flow control valves 10, and the upper drive assembly controls the reciprocating driving assembly to vibrate the ionization cylinder 3, avoiding the decrease in the quality of diamond generation caused by the sticky diamond inside the ionization cylinder 3, and ensuring the quality of diamond generation. When the lower diversion and discharge assembly meets the raw gas circulation, it provides different paths for the raw gas circulation and diamond collection, which can not only meet the raw gas circulation, but also will not collect the fine particles in the raw gas as finished diamonds.

[0051] Please refer again Figure 2 , Figure 5 and Figure 6A rubber cover 23 is fixedly sleeved on the outside of the diffuser pipe 9, the chute 14 is opened on the outside of the diffuser pipe 9 and arranged inside the rubber cover 23, a one-way bearing 24 is fixedly sleeved on the top of the outer side of the diffuser pipe 9, a magnet column 25 is arranged on the top of the one-way bearing 24, the magnet column 25 is fixedly connected to the top of the inner cavity of the ionization cylinder 3, a connecting plate 26 is fixedly connected to one side of the one-way bearing 24, a cleaning frame 27 is fixedly connected to one end of the connecting plate 26, and the bottom end of the cleaning frame 27 extends to the bottom of the chute 14.

[0052] Specifically, during the operation of the upper drive assembly, the forward and reverse motor 18 changes its working state at regular intervals. When the forward and reverse motor 18 works forward or reverse, the reciprocating screw 19 drives the transmission gear 16 to rotate forward or reverse, and the transmission gear 16 drives the meshing driven gear 15 to rotate forward or reverse, and the internally fixed short tube 44 rotates forward or reverse, and the short tube 44 drives the air diffusion tube 9 to rotate forward or reverse, and the short tube 44 causes the air diffusion tube 9 to rotate forward or reverse inside the ionization cylinder 3 through the first telescopic tube 8.

[0053] When the forward and reverse motor 18 reverses, the air diffusion pipe 9 rotates in the self-locking direction of the one-way bearing 24, so the air diffusion pipe 9 drives the self-locking one-way bearing 24 to rotate as a whole, and the one-way bearing 24 drives the fixed connecting plate 26 to rotate. The rotating connecting plate 26 drives the fixed cleaning frame 27 to rotate inside the ionization cylinder 3. The cleaning frame 27 in contact with the inner wall of the ionization cylinder 3 scrapes the inner wall of the ionization cylinder 3 to prevent the diamonds generated by the ionization cylinder 3 from sticking to the ionization cylinder 3, thereby ensuring the quality of the diamonds generated by the reaction between the raw gas and the inner wall of the ionization cylinder 3.

[0054] A magnet column 25 is adsorbed on the top of the one-way bearing 24. When the diffuser pipe 9 rotates forward, the rotation direction of the diffuser pipe 9 is not the self-locking direction of the one-way bearing 24. At this time, the magnet column 25 fixed to the ionization cylinder 3 is adsorbed and fixed to the outer ring of the one-way bearing 24 to limit the connection plate 26 to prevent the connection plate 26 and the cleaning frame 27 from shaking.

[0055] Please refer again Figure 1 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 and Fig.10A rubber sleeve 41 is fixedly connected to the top of the exhaust pipe 28, and the rubber sleeve 41 is arranged inside the diffuser pipe 9. A filter pipe 31 is fixedly connected to the top of the inner cavity of the separation box 30. A discharge elbow 32 is fixedly connected between the filter pipe 31 and the separation box 30. One end of the discharge elbow 32 is fixedly connected to a collecting box 33, and one end of the collecting box 33 is fixedly connected to a control valve 34. A return pipe 37 is fixedly connected between the three-way valve 36 and the air inlet end of the exhaust pump 42. The air outlet end of the exhaust pump 42 is arranged at the bottom of the air inlet of the heat exchanger 4. A plurality of inclined plates 38 are fixedly connected to the inside of the return pipe 37. The plurality of inclined plates 38 are staggeredly distributed inside the return pipe 37. A flaring pipe 39 is fixedly connected to the bottom of the return pipe 37. A waste box 40 is provided on the outer bottom threaded sleeve of the flaring pipe 39.

[0056] Specifically, a rubber cover 23 is fixedly sleeved on the outer side of the air diffusion pipe 9, and an inclined groove 14 is arranged on the inner wall of the rubber cover 23. The rubber cover 23 cooperates with the ionization tube 3 to form a relatively sealed space. When the high-power vacuum pump 42 extracts the gas at the bottom of the inner cavity of the ionization tube 3 through the normally closed end of the three-way valve 36, the separation box 30, the second telescopic tube 29, the vacuum pipe 28, the air diffusion pipe 9 and the multiple inclined grooves 14, the rubber cover 23 reduces the range of negative pressure generation, increases the intensity of the negative pressure generated at the bottom of the inner cavity of the ionization tube 3, and sucks the diamond at the bottom of the inner cavity of the ionization tube 3 into the air diffusion pipe 9.

[0057] The diamonds entering the diffuser pipe 9 enter the exhaust pipe 28 through the rubber sleeve 41. The rubber sleeve 41 is larger at the top and smaller at the bottom, ensuring that all diamonds enter the exhaust pipe 28 from the diffuser pipe 9, and preventing diamonds from accumulating at the installation point of the diffuser pipe 9 and the exhaust pipe 28. When the airflow containing diamonds passes through the filter pipe 31, the diamonds are intercepted in the filter pipe 31, and the diamonds enter the collection box 33 through the discharge elbow 32 fixed at the bottom of the filter pipe 31 for temporary storage.

[0058] When the diamond processing is completed, the control valve 34 fixed to the collection box 33 is opened to discharge the diamonds stored in the inclined collection box 33 .

[0059] When the vacuum pump 42 works at low power, the normally open end of the three-way valve 36 is connected to the bottom of the inner cavity of the ionization tube 3 through the air duct 35, the second telescopic tube 29, the air duct 28 and the multiple inclined slots 14. The vacuum pump 42 extracts gas from the bottom of the inner cavity of the ionization tube 3 through the normally open end of the three-way valve 36, the air duct 35, the air duct 28 and the multiple inclined slots 14. The gas directly enters the three-way valve 36 through the air duct 35. The gas will not be filtered by the filter tube 31, so as to prevent particles in the gas from being trapped by the filter tube 31 and mixed with the final diamond product.

[0060] In addition, a return air pipe 37 is fixedly connected between the air inlet end of the vacuum pump 42 and the three-way valve 36. Before the gas enters the vacuum pump 42, it needs to pass through the inside of the return air pipe 37. The gas collides with multiple inclined plates 38 fixed inside the return air pipe 37, so that the particles in the gas are intercepted and adsorbed by the inclined plates 38, and the particles are intercepted inside the return air pipe 37.

[0061] When the vacuum pump 42 stops working, it hits the return air pipe 37 to make it vibrate, so that the particles inside the return air pipe 37 are collected into the expansion pipe 39 under the action of vibration and gravity, and the particles fall into the waste box 40 at the bottom of the expansion pipe 39 to collect the particles. The waste box 40 can be disassembled by rotating it away from the outer bottom of the expansion pipe 39.

[0062] The output end of the vacuum pump 42 is connected to the air inlet of the heat exchanger 4, and the gas extracted by the vacuum pump 42 enters the heat exchanger 4 to be cooled.

Claims

1. A single crystal diamond growth device with a raw material gas concentration stratification control function, comprising an ionization chamber (1), a microwave system (2), an ionization cylinder (3), a controller, a heat exchanger (4), a gas supply pipeline (7) and a feed gas pump (5), wherein the ionization cylinder (3) is arranged inside the ionization chamber (1), and is characterized in that: An air supply structure is provided between the air outlet of the feed air pump (5) and the air inlet at the bottom of the heat exchanger (4), and the air supply structure controls the raw material gas to circulate between the ionization cylinder (3), the heat exchanger (4), and the feed air pump (5); and a plurality of dampers (43) are fixedly connected between the outer bottom of the ionization cylinder (3) and the ionization chamber (1); The air supply structure comprises an upper driving assembly, an air diffusion pipe (9) and a lower flow distribution and discharge assembly, wherein a plurality of flow control valves (10), an air pressure sensor (13) and a partition plate (12) are arranged in sequence from top to bottom inside the air diffusion pipe (9), and the upper driving assembly controls the air diffusion pipe (9) to rotate inside the ionization cylinder (3); A plurality of inclined grooves (14) are provided at the bottom of the outer side of the gas diffusion pipe (9), and the lower flow and discharge assembly extracts the raw gas or diamond particles that sink to the bottom of the inner cavity of the ionization cylinder (3) through the plurality of inclined grooves (14); a first telescopic tube (8) is provided between the top of the gas diffusion pipe (9) and the upper driving assembly, and a second telescopic tube (29) is provided between the bottom of the gas diffusion pipe (9) and the lower flow and discharge assembly; A reciprocating push component is provided between the upper driving component and the ionization cylinder (3); the ionization cylinder (3) mounted on the first telescopic tube (8) and the second telescopic tube (29) is controlled by the reciprocating push component to vibrate up and down inside the ionization chamber (1); The upper driving assembly comprises a driven gear (15), a transmission gear (16), a forward and reverse motor (18) and a reciprocating screw (19), wherein the driven gear (15) is meshed with one side of the transmission gear (16), the driven gear (15) is fixedly sleeved on the outside of the damper (43), the reciprocating screw (19) is fixedly installed between the transmission gear (16) and the output end of the forward and reverse motor (18), and the reciprocating screw (19) passes through the ionization chamber (1) and is rotatably connected to the ionization chamber (1) via a bearing; The top end of the air diffusion pipe (9) passes through the ionization cylinder (3) and is rotatably connected to the ionization cylinder (3) via a bearing; a plurality of flow control valves (10) are fixedly connected to the inside of the air diffusion pipe (9); an air guide elbow (11) is fixedly connected between the plurality of flow control valves (10) and the air diffusion pipe (9); the partition plate (12) is fixedly connected to the inside of the air diffusion pipe (9); and the air pressure sensor (13) is fixedly connected to the top of the partition plate (12); The outer fixed sleeve of the air diffusion pipe (9) is provided with a rubber cover (23); the inclined groove (14) is opened on the outer side of the air diffusion pipe (9) and arranged inside the rubber cover (23); the outer top fixed sleeve of the air diffusion pipe (9) is provided with a one-way bearing (24); the top of the one-way bearing (24) is provided with a magnet column (25); the magnet column (25) is fixedly connected to the top of the inner cavity of the ionization cylinder (3); A connecting plate (26) is fixedly connected to one side of the one-way bearing (24), a cleaning frame (27) is fixedly connected to one end of the connecting plate (26), and a bottom end of the cleaning frame (27) extends to the bottom of the chute (14); The bottom end of the air diffusion pipe (9) passes through the ionization cylinder (3) and is rotatably connected to the ionization cylinder (3) via a bearing; the lower flow discharge assembly comprises an air extraction pipe (28), a separation box (30) and a three-way valve (36); the outer top of the air extraction pipe (28) is rotatably arranged at the bottom of the inner cavity of the air diffusion pipe (9) via a bearing; the second telescopic pipe (29) is fixedly connected between the bottom of the air extraction pipe (28) and the normally closed end of the three-way valve (36); an air duct (35) is fixedly connected between the air extraction pipe (28) and the normally open end of the three-way valve (36); and a filter pipe (31) is arranged inside the separation box (30); The top end of the air extraction pipe (28) is fixedly connected to a rubber sleeve (41), and the rubber sleeve (41) is arranged inside the air diffusion pipe (9). The filter pipe (31) is fixedly connected to the top of the inner cavity of the separation box (30). A discharge elbow (32) is fixedly connected between the filter pipe (31) and the separation box (30). One end of the discharge elbow (32) is fixedly connected to a collection box (33), and one end of the collection box (33) is fixedly connected to a control valve (34); A return air pipe (37) is fixedly connected between the three-way valve (36) and the air inlet end of the air pump (42); the air outlet end of the air pump (42) is arranged at the bottom of the air inlet of the heat exchanger (4); a plurality of inclined plates (38) are fixedly connected inside the return air pipe (37); the plurality of inclined plates (38) are staggeredly distributed inside the return air pipe (37); a flaring pipe (39) is fixedly connected to the bottom of the return air pipe (37); a waste box (40) is threadedly sleeved on the outer bottom of the flaring pipe (39).

2. The single crystal diamond growth device with raw material gas concentration stratification control function according to claim 1, characterized in that: The heat exchanger (4) is provided with a one-way valve (6) at its air outlet, the air supply pipe (7) is fixedly mounted on the top of the one-way valve (6), the air supply pump (5) is provided with an air outlet at one side of the air supply pipe (7), the heat exchanger (4) and the controller are respectively fixedly mounted on both sides of the ionization chamber (1), one end of the air supply pipe (7) is rotatably connected with a short tube (44), the bottom end of the short tube (44) passes through the ionization chamber (1) and is rotatably connected to the ionization chamber (1) via a bearing, and the bottom end of the short tube (44) is fixedly connected to the first telescopic tube (8).

3. The single crystal diamond growth device with raw material gas concentration stratification control function according to claim 1, characterized in that: The reciprocating push assembly comprises a nut pair (20), the nut pair (20) is sleeved on the outside of the reciprocating screw rod (19), one side of the nut pair (20) is fixedly connected to a fixed transverse plate (21), the bottom of the fixed transverse plate (21) is fixedly connected to an impact rod (22), the outside of the impact rod (22) is sleeved with a fixed bent plate (17), and the fixed bent plate (17) is fixedly connected between the ionization chamber (1) and the forward and reverse motor (18).

Images