Flame polishing apparatus and method for quartz capillary tubes and rods

Abstract

The application provides a flame polishing device and polishing method for quartz small tubes and small rods, which comprises a polishing gun, a rotary disc machine table, a driving part, a rotating disc, three clamping claws, three adjusting claws and a supporting table. The polishing gun is used for flame polishing a workpiece to be polished. The supporting table is vertically arranged on the rotary disc machine table and is used for supporting one end of the workpiece to be polished. The driving part is installed on the rotary disc machine table and is drivingly connected with the rotating disc and used for driving the rotating disc to rotate. The end of the clamping claw is installed on one side of the rotating disc away from the driving part. The three adjusting claws are respectively installed on the corresponding clamping claws and can be moved and adjusted along the radial direction of the rotating disc. The three adjusting claws are used for clamping the other end of the workpiece to be polished. By moving and adjusting the position of the clamping claw, the spacing between the adjusting claw and the clamping claw is adjusted, and then the concentricity of the adjusting claw can be finely adjusted and corrected, so that the concentricity of the workpiece to be polished meets the design requirements, the product precision is ensured, and the appearance quality problem of the product is reduced.

Description

Flame polishing equipment and methods for quartz tubes and rods Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a flame polishing device and polishing method for quartz tubes and rods. Background Technology

[0002] In the quartz semiconductor industry, some high-precision tubes and rods have extremely high requirements for concentricity and appearance quality. They require flame polishing to achieve near-zero defect quality. However, due to slight negligence in the process or by employees during flame polishing, the concentricity often changes after flame polishing, resulting in a failure to meet design requirements.

[0003] Current technologies typically use chucks to clamp quartz tubes and rods. However, the concentricity of existing chucks cannot be finely adjusted. After flame polishing, the product's concentricity does not meet high-precision requirements, and it also suffers from scratches and other quality and appearance issues. Repairing defective products requires additional personnel and time, involving grinding and other methods to fix the surface defects. Therefore, highly skilled technicians are needed for polishing and repair work, resulting in high labor costs.

[0004] Therefore, it is necessary to propose a flame polishing device and polishing method for quartz tubes and rods to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a flame polishing device and polishing method for quartz tubes and rods, in order to improve the problem that the concentricity of existing chucks cannot be finely adjusted and corrected, which easily leads to the product concentricity not meeting the high precision requirements.

[0006] This invention provides a flame polishing device for quartz tubes and rods. The device includes: a polishing gun, a swivel table, a drive unit, a rotating disk, three chucks, three adjusting chucks, and a support platform. The polishing gun is used to flame polish the workpiece. The support platform is vertically mounted on the swivel table, located in the middle of the swivel table, and supports one end of the workpiece. The drive unit is mounted on the swivel table and located at one end of the swivel table; the drive unit is connected to the rotating disk and drives the rotating disk. The rotating disk rotates; the ends of the jaws are mounted on the side of the rotating disk away from the driving component, and the three jaws are evenly distributed around the circumference of the rotating disk; the adjusting jaws are arranged in a one-to-one correspondence with the jaws, and the three adjusting jaws are respectively mounted on the corresponding jaws and can be moved and adjusted along the radial direction of the rotating disk. The adjusting jaws are located on the side close to the jaws, and the three adjusting jaws are used to clamp the other end of the workpiece to be polished. By moving and adjusting the position of the jaws, the distance between the adjusting jaws and the jaws is adjusted, thereby adjusting the concentricity of the adjusting jaws.

[0007] In one possible embodiment, a fastening component is mounted on each of the jaws and the corresponding adjusting jaw. The distance between the adjusting jaw and the jaw is adjusted by adjusting the length of the portion of the fastening component located between the jaw and the adjusting jaw.

[0008] In one possible embodiment, the jaw is provided with at least one first through hole and at least one first threaded hole; the adjusting jaw is provided with a second threaded hole corresponding to the first through hole and a second through hole corresponding to the first threaded hole; a first fastener passes through the first through hole and is threaded into the second threaded hole, and a second fastener is threaded into the first threaded hole and supports the second through hole, so as to install and fix the adjusting jaw on the jaw; by turning and adjusting the first fastener and the second fastener, the distance between the adjusting jaw and the jaw can be adjusted.

[0009] In one possible embodiment, there are two second fasteners located at both ends of the jaws; there are two first fasteners located between the two second fasteners.

[0010] In one possible embodiment, the flame polishing apparatus further includes a protective claw made of graphite, which is detachably mounted on the side of the adjusting claw away from the clamping claw.

[0011] In one possible embodiment, the protective claw is provided with a mounting hole, and a locking member passes through the mounting hole and is threaded into the adjusting claw to install and fix the protective claw on the side of the adjusting claw away from the pawl, with the end of the locking member away from the adjusting claw located in the mounting hole.

[0012] In one possible embodiment, the protective claw has a first side and a second side disposed opposite to each other, the first side being disposed closer to the adjusting claw and the second side being disposed further away from the adjusting claw, the size of the second side being smaller than the size of the first side.

[0013] In one possible embodiment, the support platform is adjustable in the XYZ three-axis direction or its length is telescopically adjustable.

[0014] In one possible embodiment, the flame polishing apparatus further includes a pad made of graphite mounted on the support platform, the support platform supporting one end of the workpiece to be polished via the pad.

[0015] The present invention also provides a flame polishing method for quartz tubes and rods, employing the flame polishing equipment for quartz tubes and rods as described in any of the above embodiments, wherein the flame polishing method includes:

[0016] The workpiece to be polished is supported by the support platform. The position of the three jaws is adjusted to adjust the distance between the adjusting jaws and the clamping jaws, so that the three adjusting jaws clamp the other end of the workpiece to be polished and the concentricity of the adjusting jaws is adjusted.

[0017] When polishing the workpiece, the rotating disk is driven to rotate by the driving component, thereby causing the workpiece to rotate. At the same time, the polishing gun is used to perform flame polishing on the workpiece. By moving the polishing gun along the surface of the workpiece, the flame polishing process of the entire workpiece is completed, and the polished workpiece is obtained.

[0018] The beneficial effects of this invention are as follows: the support platform supports one end of the workpiece to be polished, and the adjusting claws are respectively set on the three jaws. The other end of the workpiece to be polished is clamped by the three adjusting claws. By moving and adjusting the adjusting claws along the radial direction of the rotating disk, the distance between the adjusting claws and the jaws can be finely adjusted, thereby finely adjusting and correcting the concentricity of the adjusting claws to ensure that the concentricity of the workpiece to be polished meets the design requirements, ensuring high product precision and reducing product appearance quality problems. Attached Figure Description

[0019] Figure 1 is a schematic diagram of the flame polishing equipment for quartz tubes and rods of the present invention.

[0020] Figure 2 is a schematic diagram of the rotating disk, chuck, adjusting claw, and protective claw in the flame polishing equipment for quartz tubes and rods of the present invention.

[0021] Figure 3 is a cross-sectional view of the chuck, adjusting chuck, protective chuck, fastening assembly, and locking component in the flame polishing equipment for quartz tubes and rods of the present invention.

[0022] Figure 4 is a schematic diagram of the XYZ three-axis displacement platform in the flame polishing equipment for quartz tubes and rods of the present invention.

[0023] Figure 5 is a diagram showing the state of the workpiece after polishing in the flame polishing method for quartz tubes and rods of the present invention.

[0024] Explanation of reference numerals in the attached drawings: Workpiece to be polished 100; Polished workpiece 110; Polishing gun 210; Turning table 220; Drive component 221; Rotary disk 222; Clamping jaw 230; First through hole 231; First threaded hole 232; Adjusting jaw 240; Second threaded hole 241; Second through hole 242; Protective jaw 250; Mounting hole 251; First side 252; Second side 253; Support table 260; XYZ three-axis displacement platform 261; Pad block 270; Fastening assembly 280; First fastener 281; Second fastener 282; Locking component 290; Inspection platform 300; Feeler gauge 400. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] To address the problems existing in the above-mentioned technologies, embodiments of the present invention provide a flame polishing device for quartz tubes and rods. Referring to Figures 1 and 2, the flame polishing device includes: a polishing gun 210, a swivel table 220, a drive component 221, a circular rotating disk 222, three chucks 230, three adjusting chucks 240, and a support platform 260. The polishing gun 210 is used to flame polish the workpiece 100 to be polished, which can be a quartz tube or quartz rod. The support platform 260 is vertically arranged on the swivel table 220, located in the middle of the swivel table 220, and used to support one end of the workpiece 100 to be polished. The drive component 221 is mounted on the swivel table 220 and located at the end of the swivel table 220. The drive component 221 is drivenly connected to the rotating disk 222 and used to drive the rotating disk 222 to rotate. The ends of the jaws 230 are mounted on the side of the rotating disk 222 away from the drive member 221, and the three jaws 230 are evenly distributed circumferentially along the rotating disk 222. The adjusting jaws 240 are arranged in a one-to-one correspondence with the jaws 230, and the three adjusting jaws 240 are respectively mounted on their corresponding jaws 230 and can be moved and adjusted radially along the rotating disk 222. The adjusting jaws 240 are located on the side closest to the jaws 230, and are used to clamp the other end of the workpiece 100 to be polished. By moving and adjusting the position of the jaws 230, the distance between the adjusting jaws 240 and the jaws 230 is adjusted, thereby adjusting the concentricity of the adjusting jaws 240. Preferably, the drive member 221 is a motor.

[0027] In this embodiment, one end of the workpiece 100 to be polished is supported and fixed by the support platform 260, and the other end is clamped and fixed by three adjusting claws 240. The adjusting claws 240 are movably and adjustablely mounted on the chuck 230. By moving and adjusting the adjusting claws 240 in the radial direction of the rotating disk 222, the distance between the adjusting claws 240 and the chuck 230 can be finely adjusted, thereby finely adjusting and correcting the concentricity of the adjusting claws 240 (the concentricity of the adjusting claws 240 is the deviation of the center of the area formed by the three adjusting claws 240), ensuring that the concentricity of the quartz tubes and quartz rods meets the design requirements, so as to achieve high-precision and high-requirement processing of quartz tubes and quartz rods, greatly reducing product appearance quality problems, improving work efficiency, and increasing product yield, so that the yield rate increases from the original 60% to 95%, reducing the reliance on highly skilled workers and saving labor costs.

[0028] In a preferred embodiment, referring to FIG3, a fastening component 280 is mounted on each of the jaws 230 and the corresponding adjusting jaw 240. By adjusting the length of the portion of the fastening component 280 located between the jaws 230 and the adjusting jaw 240, the distance between the adjusting jaw 240 and the jaws 230 can be adjusted.

[0029] In a preferred embodiment, referring to Figure 3, the jaw 230 is provided with at least one first through hole 231 and at least one first threaded hole 232; the adjusting jaw 240 is provided with a second threaded hole 241 corresponding to the first through hole 231 and a second through hole 242 corresponding to the first threaded hole 232; a first fastener 281 passes through the first through hole 231 and is threaded into the second threaded hole 241, and a second fastener 282 is threaded into the first threaded hole 232 and supports the second through hole 242, so as to install and fix the adjusting jaw 240 on the jaw 230. By turning and adjusting the first fastener 281 and the second fastener 282, the distance between the adjusting jaw 240 and the jaw 230 can be adjusted. Specifically, the first fastener 281 and the second fastener 282 are bolts, screws, etc. In this embodiment, the first fastener 281 is fixed only to the adjusting claw 240, and the second fastener 282 is fixed only to the retaining claw 230. By screwing and adjusting the first fastener 281 and the second fastener 282, the length of the portion of the second fastener 282 located between the retaining claw 230 and the adjusting claw 240 is adjusted, so that the second fastener 282 supports the adjusting claw 240, thereby adjusting the distance between the adjusting claw 240 and the retaining claw 230. The adjusting claw 240 can be easily moved and adjusted through the first fastener 281 and the second fastener 282, which is convenient to operate and has a simple structure.

[0030] In one specific embodiment, referring to Figure 3, there are two second fasteners 282 located at both ends of the jaw 230; there are two first fasteners 281 located between the two second fasteners 282. In this embodiment, by setting two first fasteners 281 and two second fasteners 282, the adjusting jaw 240 is securely mounted on the jaw 230. This not only allows for adjustment of the distance between the adjusting jaw 240 and the jaw 230, but also allows for adjustment of the tilt posture of the adjusting jaw 240. For example, if the adjusting jaw 240 experiences localized wear, resulting in a large concentricity deviation, the corresponding second fastener 282 can be adjusted individually to ensure that the concentricity of the adjusting jaw 240 meets the requirements. This invention allows for flexible adjustment of any one of the first fasteners 281 and any one of the second fasteners 282 according to actual conditions, enhancing practicality and flexibility.

[0031] In a preferred embodiment, referring to Figures 2 and 3, the flame polishing apparatus further includes protective claws 250 made of graphite, which are detachably mounted on the side of the adjusting claws 240 away from the clamping claws 230. In this embodiment, the workpiece 100 to be polished is clamped and fixed by the protective claws 250 on the three adjusting claws 240. The protective claws 250 are made of graphite, which is a chemically stable non-metallic material, and will not cause chemical damage to the workpiece 100 during clamping. Furthermore, because graphite has a low coefficient of friction, the protective claws 250 will not scratch or damage the surface of the workpiece 100 during clamping, thus avoiding problems such as over-clamping and resulting surface defects.

[0032] In a preferred embodiment, referring to Figure 3, the protective claw 250 has a mounting hole 251. A locking member 290 passes through the mounting hole 251 and is threaded into the adjusting claw 240 to fix the protective claw 250 to the side of the adjusting claw 240 away from the retaining claw 230. The end of the locking member 290 away from the adjusting claw 240 is located inside the mounting hole 251. Specifically, the locking member 290 is a bolt, screw, etc. Using the locking member 290 for installation facilitates the installation and removal of the protective claw 250.

[0033] In one specific embodiment, referring to Figure 2, the protective claw 250 has a first side 252 and a second side 253 disposed opposite to each other. The first side 252 is disposed close to the adjusting claw 240, and the second side 253 is disposed away from the adjusting claw 240. The size of the second side 253 is smaller than the size of the first side 252. In this embodiment, during the clamping process, the second side 253 of the protective claw 250 is used to clamp the workpiece 100 to be polished. By reducing the size of the second side 253, while ensuring a stable clamping of the workpiece 100 to be polished, the contact area between the protective claw 250 and the workpiece 100 to be polished is reduced, thereby reducing contamination on the surface of the workpiece 100 and avoiding adverse effects such as product defects and scratches caused by clamping problems.

[0034] In one specific embodiment, referring to Figure 1, the support platform 260 is adjustable in the XYZ three-axis direction or has a telescopic adjustable length. Preferably, the support platform 260 can be an XYZ three-axis displacement platform 261, a cylinder, or an electric telescopic rod. Referring to Figure 4, the XYZ three-axis displacement platform 261 is a lifting worktable with manual fine-tuning in the XYZ three-axis direction. By adjusting the X-axis and Y-axis directions, the levelness of the support platform 260 can be adjusted to ensure horizontal support of the workpiece 100 to be polished. By adjusting the Z-axis direction, the height of the support platform 260 can be adjusted to meet different support height requirements.

[0035] In one specific embodiment, referring to Figure 1, the flame polishing device further includes a pad 270 mounted on the support platform 260. The pad 270 is made of graphite, and the support platform 260 supports one end of the workpiece 100 to be polished via the pad 270. Because graphite is a chemically stable non-metallic material with a low coefficient of friction, the graphite pad 270, when supporting the workpiece 100, will not cause chemical damage to the workpiece 100, nor will it cause scratches or damage to the surface of the workpiece 100.

[0036] In addition, the present invention also provides a flame polishing method for quartz tubes and rods, as shown in Figure 1, using the flame polishing equipment for quartz tubes and rods as described in any of the above embodiments, the flame polishing method comprising:

[0037] The support platform 260 supports one end of the workpiece 100 to be polished. By moving and adjusting the position of the three jaws 230, the distance between the adjusting jaw 240 and the jaws 230 is adjusted so that the three adjusting jaws 240 clamp the other end of the workpiece 100 to be polished, and the concentricity of the adjusting jaws 240 is adjusted.

[0038] When polishing the workpiece 100, the rotating disk 222 is driven to rotate by the driving component 221, thereby driving the workpiece 100 to rotate. At the same time, the polishing gun 210 is used to perform flame polishing on the workpiece 100. By moving the polishing gun 210 along the surface of the workpiece 100, the flame polishing process of the entire workpiece 100 is completed, and the polished workpiece 110 is obtained.

[0039] In one specific embodiment, referring to Figure 5, after completing the flame polishing process on the entire workpiece 100 to be polished and obtaining the polished workpiece 110, the process further includes:

[0040] The polished workpiece 110 is placed on the inspection platform 300. Feeler gauges 400 of different thicknesses are inserted into the gap between the polished workpiece 110 and the inspection platform 300. Based on the specifications of the feeler gauges 400 that can be inserted into the gap, it is determined whether the polished workpiece 110 meets the straightness requirements. The top surface of the inspection platform 300 is a horizontal surface and is used to place the polished workpiece 110. The thickness specifications of the feeler gauges 400 include 0.01mm, 0.02mm, 0.03mm, 0.05mm, etc.

[0041] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways. Unless otherwise defined, the technical or scientific terms used herein should be understood in their ordinary sense by one of ordinary skill in the art to which this invention pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

Claims

1. A flame polishing device for quartz tubes and rods, characterized in that, include: Polishing gun, spinning machine base, drive unit, rotating disk, three chucks, three adjusting chucks, support table; The polishing gun is used to perform flame polishing on the workpiece to be polished. The support platform is vertically mounted on the spinning machine platform, located in the middle of the platform and supporting one end of the workpiece to be polished. The drive unit is mounted on the spinning machine platform and located at one end, connected to the rotating disk and used to drive its rotation. The ends of the jaws are mounted on the rotating disk away from the drive unit, and three jaws are evenly distributed circumferentially around the rotating disk. Adjusting jaws are arranged in a one-to-one correspondence with the jaws, each mounted on a corresponding jaw and movable and adjustable along the radial direction of the rotating disk. The adjusting jaws are located on the side closest to the jaws, and are used to clamp the other end of the workpiece to be polished. By moving the position of the adjusting jaws, the distance between them is adjusted, thereby adjusting the concentricity of the adjusting jaws. Each jaw and its corresponding adjusting jaw... A fastening assembly is installed on the jaw. By adjusting the length of the portion of the fastening assembly located between the jaw and the adjusting jaw, the distance between the adjusting jaw and the jaw can be adjusted. The jaw has at least one first through hole and at least one first threaded hole. The adjusting jaw has a second threaded hole corresponding to the first through hole and a second through hole corresponding to the first threaded hole. A first fastener passes through the first through hole and is threaded into the second threaded hole, and a second fastener is threaded into the first threaded hole and supports the second through hole, thereby fixing the adjusting jaw onto the jaw. By turning and adjusting the first fastener and the second fastener, the distance between the adjusting jaw and the jaw can be adjusted, and the tilt posture of the adjusting jaw can also be adjusted. There are two second fasteners located at both ends of the jaw, and there are two first fasteners located between the two second fasteners.

2. The flame polishing equipment for quartz tubes and rods according to claim 1, characterized in that, It also includes a protective claw made of graphite, which can be detachably mounted on the side of the adjusting claw away from the locking claw.

3. The flame polishing equipment for quartz tubes and rods according to claim 2, characterized in that, The protective claw is provided with a mounting hole. A locking member passes through the mounting hole and is threaded into the adjusting claw to install and fix the protective claw on the side of the adjusting claw away from the pawl. The end of the locking member away from the adjusting claw is located in the mounting hole.

4. The flame polishing equipment for quartz tubes and rods according to claim 2, characterized in that, The protective claw has a first side and a second side that are arranged opposite to each other. The first side is located close to the adjusting claw and the second side is located away from the adjusting claw. The size of the second side is smaller than the size of the first side.

5. The flame polishing equipment for quartz tubes and rods according to claim 1, characterized in that, The support platform is adjustable in the XYZ three-axis direction or its length is adjustable.

6. The flame polishing equipment for quartz tubes and rods according to claim 1, characterized in that, It also includes a pad made of graphite installed on the support platform, the support platform supporting one end of the workpiece to be polished via the pad.

7. A flame polishing method for quartz tubes and rods, characterized in that, The flame polishing equipment for quartz tubes and rods as described in any one of claims 1-6, the flame polishing method comprising: supporting one end of the workpiece to be polished by the support platform; adjusting the position of the three jaws to adjust the distance between the adjusting jaws and the jaws so that the three adjusting jaws clamp the other end of the workpiece to be polished, and adjusting the concentricity of the adjusting jaws; during polishing of the workpiece to be polished, driving the rotating disk to rotate by the driving component, thereby driving the workpiece to be polished to rotate, and simultaneously using the polishing gun to perform flame polishing on the workpiece to be polished; by moving the polishing gun along the surface of the workpiece to be polished, completing the flame polishing process of the entire workpiece to be polished, and obtaining the polished workpiece.

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