A combined horizontal vacuum furnace and method for material preparation using the same

Abstract

The present application relates to a combined horizontal vacuum furnace and a method for material preparation using the same. The combined horizontal vacuum furnace comprises a furnace body, a connecting channel, a replaceable box and a vacuum system. The furnace body comprises a fixed half furnace body and a movable half furnace body. A heating reactor in the fixed half furnace body is used for heating raw materials to a process reaction condition to generate gaseous products. A cooling collector in the movable half furnace body is in communication with the inside of the heating reactor. The gaseous products enter the cooling collector from the heating reactor and are deposited on the inner wall of the cooling collector to obtain the prepared material. The box is provided with a mechanical telescopic rod device for moving the cooling collector from the movable half furnace body to the box. The box is removed from the end of the connecting channel to take out the prepared material, and the next process can be directly started by replacing the box without cooling in the furnace body, which greatly shortens the process cycle and improves the production capacity.

Description

A combined horizontal vacuum furnace and a method for material preparation using the vacuum furnace. Technical Field

[0001] This invention relates to the field of materials manufacturing equipment technology, and in particular to a combined horizontal vacuum furnace and a method for preparing materials using the vacuum furnace. Background Technology

[0002] Silicon monoxide is a wide-bandgap semiconductor optical material and an important raw material for the preparation of optical coatings and lithium-ion battery anode materials. Its preparation method usually involves reacting a mixture of metallic silicon and silicon oxide under vacuum and high temperature to produce silicon monoxide vapor, which is then deposited at low temperature.

[0003] Early silicon monoxide production equipment consisted of a high-alumina ceramic refractory tube with a molybdenum or nickel lining on the inner wall of its normally open end. During production, a mixture of carbon dioxide and silicon was placed inside the closed end of the tube. After the refractory tube was sealed and evacuated, its surface was heated directly in the air. When the temperature reached the reaction temperature, the raw material vaporized, and the gas was deposited on the molybdenum or nickel lining at the other end of the refractory tube. This type of production equipment was prone to breakage and had low production efficiency because it directly heated the high-alumina ceramic refractory tube in the air while its interior was evacuated.

[0004] Currently, the commonly used silicon monoxide production equipment in the industry is mostly single-unit vacuum furnaces. A single set of equipment has low energy utilization and high energy consumption, low output, and low equipment utilization. When using a single-unit vacuum furnace, each process cycle requires vacuuming, feeding, heating, processing, cooling, venting, and unloading. The time spent heating and cooling in the furnace is long, resulting in low equipment output and failing to meet the requirements for rapid production of small batches of products. Summary of the Invention

[0005] This invention provides a combined horizontal vacuum furnace and a method for material preparation using the vacuum furnace. By changing the structure of the vacuum furnace, the cooling collector can be moved from the movable half-furnace body into the box body and removed from the end of the connecting channel along with the box body. This allows the material to be cooled outside the vacuum furnace, and the material can directly enter the next process by changing the box body, thereby greatly shortening the process cycle and increasing the production capacity.

[0006] In a first aspect, embodiments of the present invention provide a combined horizontal vacuum furnace comprising: a furnace body 1, a connecting channel 2, a replaceable housing 3, and a vacuum system 10;

[0007] The furnace body 1 includes a fixed half-furnace body 12 and a movable half-furnace body 11; one end of the movable half-furnace body 11 is connected to one end of the outer wall of the fixed half-furnace body 12 via a flange or a hinge; each end of the connecting channel 2 has a mechanical door 8; the other end of the movable half-furnace body 11 is connected to one end of the connecting channel 2 via a flange, and the furnace body 1 and the connecting channel 2 are internally isolated or connected via a mechanical door 8; the housing 3 is connected to the other end of the connecting channel 2 via a mechanical snap-fit, and the housing 3 and the connecting channel 2 are internally isolated or connected via another mechanical door 8.

[0008] The fixed half-furnace body 12 is provided with a heating reactor 5, in which the raw materials are heated to the process reaction conditions and reacted to generate gaseous products.

[0009] The movable half-furnace body 11 is provided with a cooling collector 6 and a cooling device 7. The cooling device 7 is disposed between the cooling collector 6 and the movable half-furnace body 11. The cooling collector 6 is connected to the interior of the heating reactor 5. The gaseous product enters the cooling collector 6 from the heating reactor 5 and is deposited on the inner wall of the cooling collector 6 to obtain the prepared material.

[0010] The box 3 has a mechanical telescopic rod device 9, which is used to move the cooling collector 6 from the movable half furnace body 11 into the box 3, so that the cooling collector 6 is removed together with the box 3 from the other end of the connecting channel 2 to take out the prepared material.

[0011] The vacuum system 10 is connected to the interior of the heating reactor 5, the cooling collector 6, the furnace body 1, the connecting channel 2, and the box body 3, respectively, and performs vacuuming on the heating reactor 5, the cooling collector 6, the furnace body 1, the connecting channel 2, and the box body 3.

[0012] Preferably, the heating reactor 5 includes: a heating reaction tank 18, a heating device 19, and a heat preservation device 20; wherein the heating device 19 is arranged around the outer surface of the heating reaction tank 18; and the heat preservation device 20 is disposed between the heating reaction tank 18 and the heating device 19.

[0013] Preferably, the combined horizontal vacuum furnace further includes a control system, which is used to control the operation of the vacuum system 10, the mechanical door 8, the heating device 19, and the mechanical telescopic rod device 9.

[0014] Preferably, the mechanical telescopic rod device 9 includes a vertical movement and rotation device and a telescopic rod; the end of the telescopic rod is connected to the vertical movement and rotation device;

[0015] The fixed end of the vertical moving and rotating device is fixed to the inner wall at the end of the box 3. The moving end of the vertical moving and rotating device moves up and down in a plane parallel to the inner wall, thereby driving the telescopic rod to move downward to below the cooling collector 6. After the telescopic rod extends below the cooling collector 6, it lifts the cooling collector 6 by moving upward through the telescopic rod and moves it into the box 3.

[0016] Preferably, a plurality of first support columns are provided below the fixed half-furnace body 12 to fix and support the fixed half-furnace body; a plurality of second support columns are installed below the movable half-furnace body 11, the connecting channel 2 and the box 3, and the second support columns are provided with pulleys; a track is laid parallel to the movable half-furnace body 11, the connecting channel 2 and the box 3, and the pulleys slide on the track.

[0017] Preferably, temperature detectors are provided in both the heating reactor 5 and the housing 3.

[0018] Preferably, the combined horizontal vacuum furnace further includes a gas filling system;

[0019] After the cooling collector 6 is removed from the movable half-furnace body 11 into the box body 3, the mechanical door 8 is closed, the box body 3 is inflated to the atmosphere through the inflation system, and the box body 3 is removed from the other end of the connecting channel 2.

[0020] Preferably, the combined horizontal vacuum furnace further includes a feeding container;

[0021] After removing the box 3 from the other end of the connecting channel 2, connect the box 3 containing the feed container holding the raw materials used in the preparation to the other end of the connecting channel 2. After evacuating the box 3, open the mechanical door 8 and send the feed container holding the raw materials used in the preparation into the heating reactor 5 through the mechanical telescopic rod device 9. Rotate the mechanical telescopic rod device 9 to pour the raw materials used in the preparation into the heating reactor 5.

[0022] The mechanical telescopic rod device 9 retracts the feeding container into the box 3, closes the mechanical door 8, inflates the box 3 to atmospheric pressure through the inflation system, removes the feeding container from the mechanical telescopic rod device 9, and then inserts it into a cooling collector 6.

[0023] After the housing 3 is evacuated again, the mechanical door 8 is opened, and the newly installed cooling collector 6 is sent into the movable half-furnace 11 through the mechanical telescopic rod device 9, so that the cooling collector 6 is in communication with the interior of the heating reactor 5.

[0024] More preferably, the end of the heating reactor 5 and the end of the cooling collector 6 have a closed overlapping structure, so that the cooling collector 6 and the heating reactor 5 are sealed together.

[0025] In a second aspect, embodiments of the present invention provide a method for material preparation using the combined horizontal vacuum furnace described in the first aspect above, comprising:

[0026] Step 1, Raw material addition: Connect the box 3 containing the feed container holding the raw materials to the connecting channel 2. After vacuuming the box 3, open the mechanical door 8 and send the feed container holding the raw materials to the heating reactor 5 through the mechanical telescopic rod device 9. Rotate the mechanical telescopic rod device 9 to pour the raw materials into the heating reactor 5.

[0027] Step 2, Installing the cooling collector: The mechanical telescopic rod device 9 retracts the feed container into the housing 3, closes the mechanical door 8, inflates the housing 3 to atmospheric pressure through the inflation system, removes the feed container from the mechanical telescopic rod device 9, and then installs a cooling collector 6; after evacuating the housing 3 again, the mechanical door 8 is opened, and the newly installed cooling collector 6 is sent into the movable half-furnace body 11 through the mechanical telescopic rod device 9, so that the cooling collector 6 communicates with the interior of the heating reactor 5;

[0028] Step 3, reaction deposition: The raw materials are heated to the process reaction conditions in the heating reactor 5 to react and generate gaseous products; the gaseous products enter the cooling collector 6 from the heating reactor 5 and are deposited on the inner wall of the cooling collector 6 to obtain the prepared material;

[0029] Step 4, Remove the cooling collector: The mechanical telescopic rod device 9 moves the cooling collector 6 from the movable half-furnace body 11 into the box body 3, and removes the box body 3 from the connecting channel 2;

[0030] Replace with a new housing 3 and repeat steps 1-4 above.

[0031] The combined horizontal vacuum furnace proposed in this invention, by changing the structure of the vacuum furnace, allows the cooling collector to be moved from the movable half-furnace body into the inner chamber, and removed together with the inner chamber from the end of the connecting channel. This allows the material cooling to take place outside the vacuum furnace. At the same time, the structure of the connecting channel enables both connection and physical isolation between the furnace body and the replaceable inner chamber. This ensures that the furnace body remains in a vacuum and at the process temperature even when the inner chamber is removed, allowing for direct replacement of the inner chamber and entry into the next process. This significantly shortens the process cycle and increases production capacity. Attached Figure Description

[0032] The technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings and examples.

[0033] Figure 1 is a cross-sectional structural diagram of the combined horizontal vacuum furnace according to an embodiment of the present invention;

[0034] Figure 2 is a schematic cross-sectional view of the heating reactor according to an embodiment of the present invention;

[0035] Figure 3 is a flowchart of the method for material preparation using the vacuum furnace according to an embodiment of the present invention. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. However, it should be understood that these embodiments are only for more detailed description and should not be construed as limiting the present invention in any way, that is, not intended to limit the scope of protection of the present invention.

[0037] The combined horizontal vacuum furnace of this invention is suitable for material preparation processes that use solid raw materials to react and generate gaseous products under certain vacuum and temperature conditions, and then precipitate the gaseous products to obtain solid products. For example, it can be applied to the production of silicon monoxide.

[0038] The combined horizontal vacuum furnace of the present invention, as shown in Figure 1, mainly includes four main parts: furnace body 1, connecting channel 2, replaceable housing 3, and vacuum system 10 (shown in Figure 2).

[0039] The furnace body 1 includes a fixed half-furnace body 12 and a movable half-furnace body 11; the fixed half-furnace body 12 has an open end, and the movable half-furnace body 11 has an open end. The open end of the fixed half-furnace body 12 and the open end of the movable half-furnace body 11 are connected to each other by a flange on the outer wall of the furnace body or by a hinge; the other end of the movable half-furnace body 11 is connected to one end of the connecting channel 2 by a flange.

[0040] Each end of the connecting channel 2 has a mechanical door 8. One mechanical door 8 forms a mutual isolation or connection between the furnace body 1 and the interior of the connecting channel 2, and the other mechanical door 8 forms a mutual isolation or connection between the connecting channel 2 and the interior of the box body 3.

[0041] The housing 3 is connected to the other end of the connecting channel 2 via a mechanical latch. The mechanical latch can be specifically located at the end of the housing 3 or at the end of the connecting channel 2, and can be fastened and released according to a control signal or manually. In a preferred embodiment, a mechanical latch device that is controlled by a control signal and can automatically fasten and release is used.

[0042] To ensure sealing performance, sealing rings (not shown in the figure) are installed between the fixed half-furnace body 12 and the movable half-furnace body 11, between the movable half-furnace body 11 and the connecting channel 2, and between the connecting channel 2 and the box body 3, to ensure the airtightness of the combined horizontal vacuum furnace after installation.

[0043] Preferably, a self-aligning guide device (not shown in the figure) is provided at the end where the fixed half-furnace body 12 and the movable half-furnace body 11 are connected, at the end where the movable half-furnace body 11 is connected to the connecting channel 2, and at the end where the connecting channel 2 is connected to the box body 3, so as to facilitate the self-alignment of the combined horizontal vacuum furnace during the installation process and facilitate the assembly of each part.

[0044] A heating reactor 5 is provided in the fixed half-furnace body 12. As shown in Figure 2, the heating reactor 5 includes a heating reaction vessel 18, a heating device 19, and a heat preservation device 20; wherein the heating device 19 is arranged around the outer surface of the heating reaction vessel 18; the heat preservation device 20 is disposed between the heating reaction vessel 18 and the heating device 19. The heating reactor 5 is used to heat the added raw materials to the process reaction conditions, causing them to react and generate gaseous products.

[0045] Specifically, the heating reaction vessel 18 can be made of high-temperature resistant materials such as alumina, graphite, and ceramics, and the insulation device 20 can specifically include felt, insulation cotton, etc.

[0046] The movable half-furnace body 11 is equipped with a cooling collector 6 and a cooling device 7. The cooling device 7 is located between the cooling collector 6 and the movable half-furnace body 11, and a supporting structure is provided between the lower part of the cooling collector 6 and the cooling device 7 to support the cooling collector 6. The cooling collector 6 is cylindrical on the outside and frustoconical on the inside, with the opening radius larger than the bottom radius. The opening faces the heating reactor 5. This structure is beneficial for the condensation and collection of the reaction product vapors, the fixation of the cooling collector 6 in the movable half-furnace body 11, and its transportation. The cooling collector 6 is preferably made of stainless steel, ordinary carbon steel, alloy, or other materials.

[0047] The cooling collector 6 and the heating reactor 5 are tightly fitted together within the furnace body 1. Preferably, a clamping device is provided inside the furnace body 1, and a docking positioning device is provided at the ends of the cooling collector 6 and the heating reactor 5 to indicate whether the cooling collector 6 and the heating reactor 5 have reached the docking position. After reaching the docking position, the clamping device fixes the cooling collector 6 and the heating reactor 5 according to a control signal, thereby ensuring the sealing of the combined horizontal vacuum furnace during the process reaction. Furthermore, according to the control signal, before the cooling collector 6 is removed from the movable half-furnace body 11 to the housing 3 after the process reaction is completed, the clamping device releases the fixing clamp on the cooling collector 6 and the heating reactor 5, allowing the cooling collector 6 to separate from the heating reactor 5.

[0048] When the cooling collector 6 and the heating reactor 5 are in the docking position, the interiors of the cooling collector 6 and the heating reactor 5 are connected. The gaseous products enter the cooling collector 6 from the heating reactor 5 and are deposited on the inner wall of the cooling collector 6 to obtain the prepared material.

[0049] The housing 3 has a mechanical telescopic rod device 9, which is used to move the cooling collector 6 from the movable half-furnace body 11 into the housing 3, so that the cooling collector 6 is removed from the other end of the connecting channel 2 along with the housing 3 to take out the prepared material. In addition, it is also used to move the cooling collector 6 from the housing 3 into the movable half-furnace body 11, and to add the raw materials for the reaction to the heating reactor 5.

[0050] Specifically, the mechanical telescopic rod device 9 includes a vertical moving and rotating device and telescopic rods; the end of the telescopic rod is connected to the vertical moving and rotating device; the fixed end of the vertical moving and rotating device is fixed to the inner wall of the end of the housing 3, and the moving end of the vertical moving and rotating device moves up and down in a plane parallel to the inner wall, and can rotate horizontally around the axis of the moving end of the vertical moving and rotating device. There are two telescopic rods, arranged horizontally.

[0051] When the cooling collector 6 is moved into the housing 3 through the connecting channel 2, the moving end of the vertical moving and rotating device moves up and down, which can drive the telescopic rod to move downward to below the cooling collector 6, aligning it with the space between the cooling collector 6 and the cooling device 7 supported by the support structure between the lower part of the cooling collector 6 and the cooling device 7. The telescopic rod is extended under the cooling collector 6 in a controlled manner, and then the upward movement of the vertical moving and rotating device drives the telescopic rod to move upward to lift the cooling collector 6. The telescopic rod is retracted in a controlled manner, carrying the cooling collector 6 to be moved into the housing 3 through the connecting channel 2.

[0052] When the cooling collector 6 is sent from the housing 3 into the movable half-furnace body 11, the telescopic rod can be moved to the bottom of the cooling collector 6 by moving up and down. The telescopic rod is extended in a controlled manner to the bottom of the cooling collector 6. Then, the telescopic rod is moved upward by the vertical movement and rotation device to lift the cooling collector 6. The telescopic rod is extended in a controlled manner and carries the cooling collector 6 to the movable half-furnace body 11 through the connecting channel 2.

[0053] When feeding raw materials from the cooling collector 6 into the heating reaction vessel 18 of the heating reactor 5, the feed container containing the raw materials to be prepared is first installed on the telescopic rod. The telescopic rod is extended into the heating reaction vessel 18 in a controlled manner. It is then rotated horizontally 180 degrees around the axis of the moving end of the vertical moving and rotating device to pour the raw materials in the feed container into the heating reaction vessel 18. After rotating another 180 degrees, the telescopic rod is retracted in a controlled manner.

[0054] To ensure effective cooling of the cooling collector 6, a cooling medium is incorporated into its outer layer. The cooling device 7 then facilitates rapid heat exchange between itself and the cooling collector 6 via this cooling medium, resulting in a shorter material production cycle and increased production efficiency for the combined horizontal vacuum furnace. The cooling device 7 is preferably a water-circulating cooling device.

[0055] Vacuum system 10 is connected to the interior of heating reactor 5, cooling collector 6, furnace body 1, connecting channel 2 and box 3 respectively, and evacuates heating reactor 5, cooling collector 6, furnace body 1, connecting channel 2 and box 3 according to the process procedure.

[0056] The combined horizontal vacuum furnace also includes a gas filling system (not shown in the figure) for filling the heating reactor 5, cooling collector 6, furnace body 1, connecting channel 2 and box 3 with gas.

[0057] In this process, after the cooling collector 6 is moved from the movable half-furnace body 11 into the box body 3, the mechanical door 8 is closed to form an isolation between the connecting channel 2 and the box body 3. The box body 3 is then inflated to the atmosphere by the inflation system, and the box body 3 can be removed from the other end of the connecting channel 2. This allows the cooling of the prepared material to be carried out outside the vacuum furnace, and the material can be directly introduced into the next process by replacing the box body 3.

[0058] The combined horizontal vacuum furnace also includes a control system (not shown in the figure). The power, gas filling, gas venting, mechanical telescopic rod device 9, mechanical latches, and other components in the process are all controlled by the control system. Specifically, the control system controls the operation of the vacuum system 10, gas filling system, mechanical door 8, heating device 19, mechanical telescopic rod device 9, clamping device, and mechanical latches according to the process program.

[0059] Furthermore, due to the high internal temperature of the heating reactor 5 during operation, to prevent the outer shell temperatures of the housing 3, connecting channel 2, and fixed half-furnace body 12 from becoming excessively high and posing a high-temperature hazard, the combined horizontal vacuum furnace is also equipped with a reaction cooling device 17 on the housing 3, connecting channel 2, and fixed half-furnace body 12. The reaction cooling device 17 can specifically employ a cooling method using circulating cooling water, or a combination of circulating cooling water and a cooling medium. Compared to the traditional method of cooling with a large flow of inert gas inside the furnace, this method is less expensive. The reaction cooling device 17 can be specifically installed in the housing wall of the housing 3, the outer shell interlayer of the connecting channel 2, and the outer furnace wall of the fixed half-furnace body 12 to cool the entire combined horizontal vacuum furnace, ensuring that the outer surface temperature of the vacuum furnace remains below the set temperature, for example, not exceeding 30 degrees Celsius, thus making the working environment of the combined horizontal vacuum furnace safer.

[0060] Temperature detectors may also be installed in the heating reactor 5 and the tank 3 respectively, wherein the temperature detection end of the temperature detector 4 in the heating reactor 5 is located in the heating reaction tank 18.

[0061] In a preferred embodiment, multiple first support columns 13 are provided below the fixed half-furnace body 12 to fix and support the fixed half-furnace body 12; multiple second support columns 14 are installed below the movable half-furnace body 11, the connecting channel 2, and the box body 3, and pulleys 15 are provided below the second support columns 14; a track 16 is laid in the direction parallel to the movable half-furnace body 11, the connecting channel 2, and the box body 3, and the pulleys 15 slide on the track 16, thereby facilitating the installation and disassembly of the movable half-furnace body 11, the connecting channel 2, and the box body 3. Especially in continuous process where the box body 3 needs to be replaced frequently, the design of the second support columns 14, pulleys 15, and track 16 makes it easy to remove the box body 3 from the end of the connecting channel 2.

[0062] In one specific embodiment of the present invention, the heating reaction vessel 18 has a diameter of 600 mm and a length of 1350 mm, the cooling collector 6 has a length of 1350 mm, and the finished dimensions of the entire combined horizontal vacuum furnace are 2000 mm high, 2200 mm wide, and 6400 mm long.

[0063] The structure of the combined horizontal vacuum furnace has been described above. The following example illustrates a method for material preparation using this vacuum furnace. In this embodiment, the preparation of silicon monoxide is used as an example. It should be understood that the preparation of silicon monoxide is merely an example and should not be construed as limiting the specific application of the vacuum furnace of this invention.

[0064] Figure 3 is a flowchart of a method for material preparation using the vacuum furnace according to an embodiment of the present invention. As shown in the figure, the method includes:

[0065] Step 1, Raw material addition: Connect the box 3 containing the feed container holding the raw materials to the connecting channel 2. After evacuating the box 3, open the mechanical door 8 and send the feed container holding the raw materials into the heating reactor 5 through the mechanical telescopic rod device 9. Rotate the mechanical telescopic rod device 9 to pour the raw materials into the heating reactor 5.

[0066] Specifically, a mixture of silicon powder and silicon dioxide is used as the raw material for producing solid silicon monoxide and placed into a feeding container. The feeding container is then placed on a mechanical telescopic rod device 9, connecting the housing 3 and the connecting channel 2. At this time, the mechanical door 8 of the connecting channel 2 is closed. The furnace body 1 maintains the temperature and pressure state at the end of the previous process.

[0067] Vacuum the inside of the chamber 3. When the vacuum level reaches the required level, open the mechanical door 8 and use the mechanical telescopic rod device 9 to add the raw materials in the feed container to the heating reaction tank 18 of the heating reactor 5.

[0068] Step 2, Installing the cooling collector: The mechanical telescopic rod device 9 retracts the feed container into the housing 3, closes the mechanical door 8, inflates the housing 3 to atmospheric pressure through the inflation system, removes the feed container from the mechanical telescopic rod device 9, and then installs a cooling collector 6; after evacuating the housing 3 again, the mechanical door 8 is opened, and the newly installed cooling collector 6 is sent into the movable half-furnace body 11 through the mechanical telescopic rod device 9, so that the cooling collector 6 is connected to the interior of the heating reactor 5.

[0069] Specifically, the mechanical telescopic rod device 9 delivers the cooling collector 6 to the docking position with the heating reactor 5. After reaching the docking position, the clamping device clamps the cooling collector 6 and the heating reactor 5 in place according to the control signal.

[0070] Step 3, reaction deposition: The raw materials are heated to the process reaction conditions in the heating reactor 5 to react and generate gaseous products; the gaseous products enter the cooling collector 6 from the heating reactor 5 and are deposited on the inner wall of the cooling collector 6 to obtain the prepared material;

[0071] After the raw materials are fed in step 1, the heating reactor 5 directly transitions from the temperature and pressure holding state at the end of the previous process to the conditions of this process. Compared to existing equipment that restarts the process from low temperature and normal pressure, the temperature and pressure adjustment time is significantly shortened. Since the raw materials are at room temperature upon entry and require a certain amount of time to heat to the reaction temperature, no gaseous products are generated during the loading of the cooling collector in step 2. This invention uses a high-power vacuum pump to evacuate the housing 3, ensuring that the time for replacing the cooling collector is much shorter than the time from the loading of the raw materials to the reaction and generation of gaseous products.

[0072] When the environment inside the heating reaction vessel 18 reaches the set vacuum level, the heating device 19 continuously heats the raw materials inside the heating reaction vessel 18, and the temperature is controlled between 1000-1500 degrees Celsius.

[0073] The raw materials react to produce gaseous silicon monoxide. The cooling device 7 cools the cooling collector 6, causing the gaseous silicon monoxide that diffused into the cooling collector 6 to deposit inside the cooling collector 6.

[0074] Step 4, Remove the cooling collector: The mechanical telescopic rod device 9 moves the cooling collector 6 from the movable half-furnace body 11 into the box body 3, and removes the box body 3 from the connecting channel 2;

[0075] The telescopic rod of the mechanical telescopic rod device 9 moves downward to below the cooling collector 6, aligning with the space between the cooling collector 6 and the cooling device 7 supported by the support structure between the lower part of the cooling collector 6 and the cooling device 7. The telescopic rod is extended under the cooling collector 6 in a controlled manner. Then, the upward movement of the vertical movement and rotation device drives the telescopic rod to move upward to lift the cooling collector 6. The telescopic rod is retracted in a controlled manner, carrying the cooling collector 6 and moving it into the box 3 through the connecting channel 2.

[0076] In the silicon monoxide preparation process of this embodiment of the invention, in order to achieve low cost and high production efficiency, the heating reaction tank 18 and the cooling collector 6 are designed to weigh 2-20 kg, the reaction time is controlled to be 2-60 hours, and the temperature of the cooling device 7 is controlled to be 100℃-900℃.

[0077] Then replace the new housing 3 and repeat steps 1-4 above.

[0078] During this process, the prepared material can be taken out and cooled naturally outside the equipment when the box 3 is replaced, without the need for cooling in the vacuum furnace, which greatly saves process time. At the same time, during the process from one process to the next, the heating reactor 5 is kept warm and pressurized, without the need for large-scale temperature rise and fall and vacuum degree adjustment in each process cycle. The equipment process has good stability and saves energy.

[0079] The combined horizontal vacuum furnace provided in this invention connects the furnace body and the housing via a channel, and achieves isolation and sealing between the various parts through a mechanical door. The processes of adding raw materials and collecting prepared materials do not require stopping the furnace, thus not affecting the gas pressure and temperature within the furnace. It eliminates the need for repeated temperature increases and decreases and vacuum adjustments, and eliminates the need to wait for materials to cool down, resulting in high production efficiency and energy savings. Furthermore, the use of guide rails for housing movement is labor-saving and convenient, better meeting the requirements for silicon monoxide and ensuring quality.

[0080] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A combined horizontal vacuum furnace, characterized in that, The combined horizontal vacuum furnace includes: a furnace body (1), a connecting channel (2), a replaceable housing (3), and a vacuum system (10); the furnace body (1) includes a fixed half-furnace body (12) and a movable half-furnace body (11); one end of the movable half-furnace body (11) is connected to one end of the outer wall of the fixed half-furnace body (12) via a flange or by a hinge; each end of the connecting channel (2) has a mechanical door (8); the other end of the movable half-furnace body (11) is connected to one end of the connecting channel (2) via a flange. The furnace body (1) and the connecting channel (2) are connected and isolated or connected internally through a mechanical door (8); the box body (3) and the other end of the connecting channel (2) are connected by a mechanical buckle and isolated or connected internally through another mechanical door (8); a heating reactor (5) is provided in the fixed half-furnace body (12) for the raw materials to be heated to the process reaction conditions in the heating reactor (5) to generate gaseous products; the movable The semi-furnace body (11) is provided with a cooling collector (6) and a cooling device (7), the cooling device (7) being disposed between the cooling collector (6) and the movable semi-furnace body (11); the cooling collector (6) is connected to the interior of the heating reactor (5), the gaseous product enters the cooling collector (6) from the heating reactor (5), and the prepared material is deposited on the inner wall of the cooling collector (6); the box body (3) is provided with a mechanical telescopic rod device (9), the mechanical telescopic rod device (9) being used to transfer the cooling product into the cooling container. The cooling collector (6) is moved from the movable half-furnace body (11) into the box body (3), so that the cooling collector (6) is removed from the other end of the connecting channel (2) along with the box body (3) to take out the prepared material; the vacuum system (10) is connected to the interior of the heating reactor (5), the cooling collector (6), the furnace body (1), the connecting channel (2) and the box body (3) respectively, and evacuates the heating reactor (5), the cooling collector (6), the furnace body (1), the connecting channel (2) and the box body (3) respectively.

2. The combined horizontal vacuum furnace according to claim 1, characterized in that, The heating reactor (5) includes a heating reaction tank (18), a heating device (19), and a heat preservation device (20); wherein the heating device (19) is arranged around the outer surface of the heating reaction tank (18); and the heat preservation device (20) is arranged between the heating reaction tank (18) and the heating device (19).

3. The combined horizontal vacuum furnace according to claim 1, characterized in that, The combined horizontal vacuum furnace also includes a control system, which is used to control the operation of the vacuum system (10), the mechanical door (8), the heating device (19), and the mechanical telescopic rod device (9).

4. The combined horizontal vacuum furnace according to claim 1, characterized in that, The mechanical telescopic rod device (9) includes a vertical moving and rotating device and a telescopic rod; the end of the telescopic rod is connected to the vertical moving and rotating device; the fixed end of the vertical moving and rotating device is fixed to the inner wall of the end of the box (3), and the moving end of the vertical moving and rotating device moves up and down in a plane parallel to the inner wall, thereby driving the telescopic rod to move down to below the cooling collector (6), and after the telescopic rod extends into the cooling collector (6), the cooling collector (6) is lifted up by the telescopic rod and moved into the box (3).

5. The combined horizontal vacuum furnace according to claim 1, characterized in that, Multiple first support columns are provided below the fixed half-furnace body (12) to fix and support the fixed half-furnace body; multiple second support columns are installed below the movable half-furnace body (11), the connecting channel (2) and the box (3), and pulleys are provided on the second support columns; a track is laid parallel to the movable half-furnace body (11), the connecting channel (2) and the box (3), and the pulleys slide on the track.

6. The combined horizontal vacuum furnace according to claim 1, characterized in that, Temperature detectors are respectively installed in the heating reactor (5) and the box (3).

7. The combined horizontal vacuum furnace according to claim 1, characterized in that, The combined horizontal vacuum furnace also includes an inflation system; after the cooling collector (6) is removed from the movable half-furnace body (11) into the box (3), the mechanical door (8) is closed, the box (3) is inflated to the atmosphere by the inflation system, and the box (3) is removed from the other end of the connecting channel (2).

8. The combined horizontal vacuum furnace according to claim 7, characterized in that, The combined horizontal vacuum furnace also includes a feeding container; after removing the box (3) from the other end of the connecting channel (2), the box 3 containing the feeding container for the preparation of raw materials is connected to the other end of the connecting channel (2), the box (3) is evacuated, the mechanical door (8) is opened, and the feeding container containing the raw materials for the preparation of raw materials is sent into the heating reactor (5) through the mechanical telescopic rod device (9), and the mechanical telescopic rod device (9) is rotated so that the raw materials for the preparation of raw materials are poured into the heating reactor (5); the mechanical The telescopic rod device (9) retracts the feed container into the box (3), closes the mechanical door (8), inflates the box (3) to atmospheric pressure through the inflation system, removes the feed container from the mechanical telescopic rod device (9), and then installs a cooling collector (6); after evacuating the box (3) again, the mechanical door (8) is opened, and the newly installed cooling collector (6) is sent into the movable half-furnace body (11) through the mechanical telescopic rod device (9), so that the cooling collector (6) communicates with the interior of the heating reactor (5).

9. The combined horizontal vacuum furnace according to claim 8, characterized in that, The end of the heating reactor (5) and the end of the cooling collector (6) have a closed overlapping structure, so that the cooling collector (6) and the heating reactor (5) are connected in a sealed manner.

10. A method for material preparation using the combined horizontal vacuum furnace according to any one of claims 1-9, characterized in that, The method includes: Step 1, adding raw materials: Connect the box (3) containing the feed container holding the raw materials to the connecting channel (2), after evacuating the box (3), open the mechanical door (8), and send the feed container holding the raw materials to the heating reactor (5) through the mechanical telescopic rod device (9), and rotate the mechanical telescopic rod device (9) so that the raw materials to be prepared are poured into the heating reactor (5); Step 2, loading a cooling collector: The mechanical telescopic rod device (9) retracts the feed container into the box (3), closes the mechanical door (8), and after inflating the box (3) to the atmosphere through the inflation system, remove the feed container from the mechanical telescopic rod device (9) and load it into a cooling collector (6); After evacuating the box (3) again, open the connecting channel (2). The mechanical door (8) sends the newly installed cooling collector (6) into the movable half-furnace body (11) through the mechanical telescopic rod device (9), and makes the cooling collector (6) communicate with the interior of the heating reactor (5); Step 3, reaction deposition: the raw materials are heated to the process reaction conditions in the heating reactor (5) to react and generate gaseous products; the gaseous products enter the cooling collector (6) from the heating reactor (5) and are deposited on the inner wall of the cooling collector (6) to obtain the prepared material; Step 4, remove the cooling collector: the mechanical telescopic rod device (9) removes the cooling collector (6) from the movable half-furnace body (11) into the box body (3), and removes the box body (3) from the connecting channel (2); replace the new box body (3) and repeat the above steps 1-4.

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