A process for enhancing the firmness of a sheet, plate or disc shaped getter

Abstract

The present application relates to the technical field of vacuum devices, in particular to a process for enhancing the firmness of a sheet-shaped, plate-shaped or disc-shaped getter. The technical problem to be solved by the present application is that the existing method is less applicable for enhancing the firmness of a sheet-shaped, plate-shaped or disc-shaped getter, and a new design is needed in the process to meet the corresponding requirements. The technical solution is to provide a process for enhancing the firmness of a sheet-shaped, plate-shaped or disc-shaped getter, comprising a vibration tank. The beneficial effects of the present application are that the present application uses a mixing unit and a distribution unit, adopts a proper specification and ratio of rolling beads, obtains a moderate rolling time through tests, and adds the same optimized ultrasonic vibration conditions, so as to obtain a getter with significantly enhanced firmness. When rolling the rolling beads of different materials, the metal containers of different materials can be replaced correspondingly, so that the rolling effect between the test sample and the rolling beads is better.

Description

Technical Field

[0001] This invention relates to the field of vacuum device technology, specifically to a process method for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters. Background Technology

[0002] Getters are mainly used in the vacuum field to eliminate residual gases in vacuum devices, maintain vacuum levels, and thus extend device life and reduce noise.

[0003] Getters are typically activated by heating in a vacuum, and then absorb residual gases in the vacuum environment through physicochemical processes.

[0004] Getters are generally porous sintered bodies obtained by processing alloy powder with adsorption properties. To meet the requirements of a vacuum environment, the porosity of the sintered body is generally required to be high, which makes its surface strength and overall strength much lower than that of metal forgings.

[0005] In addition to the requirement for vacuum level, vacuum devices also have high requirements for strength and cleanliness. For example, the device must not generate 100μm-sized foreign particles inside it under impact vibration of 500Hz / S.

[0006] Currently, the main technical approaches to meet these needs are as follows:

[0007] The first method is to add or modify fasteners to the getter to improve the reliability of the getter installation and allow the fasteners to withstand the impact force. For sheet, plate, or disc-shaped getters, the common method is to add a set of metal rings to the center of the getter. This method helps to improve the firmness of the central part of the getter, but the edges of the getter are still relatively weak. The second method is to use ultrasonic vibration on the getter to remove the weak particles on its surface and enhance its overall firmness.

[0008] Chinese Patent CN208984485U, entitled "A Device for Detecting Firmness Using Ultrasonic Vibration," discloses a device for detecting firmness using ultrasonic vibration. The device is characterized by including a vibration tank, a balance, a drying oven, and shock-absorbing cotton. The balance is located at the bottom right side of the vibration tank, and the drying oven is located at the top right side of the vibration tank. A layer of shock-absorbing cotton is provided at the connection surface between the vibration tank, the balance, and the drying oven. The vibration tank is a square water tank, with an ultrasonic vibration motor at the bottom. The tank is filled with a vibration fluid, specifically deionized water or alcohol. The balance is an analytical balance with an accuracy of 1 mg or higher. The drying oven has a ceramic body and uses a heating wire as a heat source. The heating wire has a power of 300 W or higher and is equipped with a temperature controller. The method disclosed in this patent can be applied to detect and enhance the strength of getters. Currently, it is mainly used to enhance the strength of mm-sized columnar getters. However, for cm-sized, dm-sized sheet, plate, or disc-shaped getters, due to the significant increase in product volume and weight, the vibration force provided by this method is insufficient, resulting in less gain on product strength.

[0009] These measures have enhanced the strength of getters to some extent, and some application cases have emerged in the market. However, for enhancing the strength of a getter in the form of a sheet, plate, or disc, the existing methods are not very applicable, and new designs in the process are needed to meet the corresponding requirements.

[0010] Combining the above issues, we find that existing methods for enhancing the strength of getters in the form of sheets, plates, or discs on the market are difficult to simultaneously avoid the problems mentioned above. Even if they can be solved, they require the use of external tools, thus failing to achieve the desired effect. Therefore, we propose a process method for enhancing the strength of getters in the form of sheets, plates, or discs. Summary of the Invention

[0011] The purpose of this invention is to provide a process method for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters, in order to solve the problems mentioned in the background art.

[0012] To achieve the above objectives, the present invention provides the following technical solution: a process method for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters, comprising the following specific steps:

[0013] S1: Roller ball filling: Place a small amount of roller balls into the metal container, spread them at the bottom, then add some sample, then add a small amount of roller balls, then add some sample, repeat this process until the metal container is filled to one-third to two-thirds.

[0014] S2: Tumbling: After filling, fix the metal container on the positioning shell and rotate it for 5 minutes to 3 hours;

[0015] S3: Isolation device: Place the samples one by one into the isolation shell;

[0016] S4: Ultrasonic vibration: Place the isolation shell into the vibration tank, pour in the vibration medium, and vibrate for 5 minutes to 3 hours;

[0017] S5: Drying: Place the sample in a drying oven for low-temperature drying;

[0018] A process for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters further includes a vibration trough, an ultrasonic vibration motor, a housing, a drying oven, a balance, and shock-absorbing cotton, wherein a tumbling mechanism is provided on one side of the vibration trough;

[0019] The tumbling mechanism includes a mixing unit, which is used to mix and tumble the sample and the tumbling beads.

[0020] The tumbling mechanism also includes a material distribution unit. The mixing unit and the material distribution unit are used together. The material distribution unit is used to distribute the tumbling sample and the tumbling beads.

[0021] The top of the vibration tank is provided with an adjustment mechanism, which is used in conjunction with the mixing unit and the dispensing unit. The adjustment mechanism is used to separate the sample and place it into the vibration tank for vibration.

[0022] Preferably, in step S1, grinding beads of appropriate material should be selected according to the type of sample.

[0023] Preferably, in step S1, the grinding balls are placed according to certain size specifications and proportions.

[0024] Preferably, in step S1, the isolation shell must ensure that the samples do not come into contact with each other.

[0025] Preferably, the mixing unit includes a mixing platform, which is fixedly connected to one side of the vibrating trough. A support base is fixedly connected to the top of the mixing platform, and a first motor is fixedly connected to the top of the support base. A positioning shell is fixedly connected to the output end of the first motor. A metal container is snapped into the inner wall of the positioning shell. A stabilizing frame is fixedly connected to the top of the mixing platform, and the stabilizing frame is fitted onto the surface of the metal container.

[0026] Preferably, positioning blocks are fixedly connected to both sides of the metal container, the inner wall of the positioning blocks is provided with snap-fit ​​grooves, the inner wall of the stabilizing frame is provided with sliding grooves that cooperate with the positioning blocks, the top of the metal container is fixedly connected to a feed inlet, and a sealing door is rotatably connected to one side of the metal container.

[0027] Preferably, the inner wall of the positioning shell is provided with positioning grooves, and there are two positioning grooves. The positioning grooves are used in conjunction with the positioning block. A first bearing is fixedly connected to one side of the positioning shell. A first threaded rod is fixedly connected to the inner wall of the inner ring of the first bearing. A connecting rod is threadedly connected to the surface of the first threaded rod. A snap-fit ​​rod is fixedly connected to one side of the connecting rod. There are two snap-fit ​​rods. The snap-fit ​​rods are slidably connected to the inner wall of the positioning shell. The inner wall of the positioning shell is provided with a rod groove that cooperates with the snap-fit ​​rod.

[0028] Preferably, the material dispensing unit includes a placement frame, which is fixedly connected to the top of the mixing table. A dispensing box is slidably connected to the inner wall of the placement frame. A storage box is placed on the inner wall of the mixing table and is located directly below the dispensing box. The inner wall of the dispensing box has several perforations. Dovetail blocks are fixedly connected to both sides of the dispensing box. The inner wall of the placement frame has dovetail grooves that cooperate with the dovetail blocks.

[0029] Preferably, the adjusting mechanism includes a first support rod, which is fixedly connected to one side of the vibration groove. A second support rod is fixedly connected to one side of the housing. Guide grooves are provided on opposite sides of the first and second support rods. A sliding rod is slidably connected to the inner wall of the guide groove. A fixed rod is fixedly connected to the bottom of the sliding rod. There are five fixed rods. An isolation shell is fixedly connected to the bottom of the fixed rod. A liquid outlet hole is provided at the bottom of the isolation shell. A bolt is threadedly connected to the inner wall of the liquid outlet hole.

[0030] Preferably, a limiting slide rod is fixedly connected to the inner wall of the first support rod, and a limiting slider is slidably connected to the surface of the limiting slide rod. One side of the limiting slider is fixedly connected to one end of the sliding rod. A second bearing is fixedly connected to the inner wall of the second support rod, and a second threaded rod is fixedly connected to the inner wall of the inner ring of the second bearing. A threaded sleeve is fitted onto the surface of the second threaded rod, and one side of the threaded sleeve is fixedly connected to the other end of the sliding rod. A second motor is fixedly connected to the top of the second support rod, and the output end of the second motor passes through the inner wall of the second support rod and is fixedly connected to one end of the second threaded rod.

[0031] Compared with the prior art, the beneficial effects of the present invention are:

[0032] This invention utilizes a mixing unit and a dispensing unit, employing tumbling beads of appropriate specifications and proportions. Through experimentation, a suitable tumbling time is obtained. Combined with optimized ultrasonic vibration conditions, a getter with significantly enhanced strength can be obtained. Furthermore, when tumbling beads of different materials, metal containers of different materials can be used accordingly, thereby improving the tumbling effect between the sample and the tumbling beads. The dispensing box can separate the tumbled sample from the tumbling beads, facilitating the removal and placement of the sample into the isolation shell, thus ensuring that the samples do not come into contact with each other and making the test results more accurate.

[0033] This invention utilizes an adjustment mechanism to place individual samples into the isolation shell. By starting a second motor to drive the second threaded rod to rotate, the threaded sleeve moves, causing the sliding rod to move, thereby controlling the isolation shell to descend into the vibration groove. After ultrasonic vibration for a certain period of time by starting an ultrasonic vibration motor, the second motor is started again to raise the sliding rod, and the sample is removed. The sample is then placed in a drying oven to dry thoroughly, and the weight of the sample is weighed again and recorded as the post-test weight. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 This is a schematic diagram of the metal container of the present invention;

[0036] Figure 3 This is an exploded view of the mixing unit of the present invention;

[0037] Figure 4 This is an exploded view of the placement frame and the dispensing box of the present invention;

[0038] Figure 5 This is a schematic diagram of the adjustment mechanism of the present invention;

[0039] Figure 6 This is an exploded view of the isolation shell and bolts of the present invention;

[0040] Figure 7 This is a schematic diagram of the structure of the threaded rod and threaded sleeve of the present invention;

[0041] Figure 8 This is a schematic diagram of the operation process of the present invention;

[0042] Figure 9 The figure shows the test results of Example 3, which tested the firmness of the sample of the present invention.

[0043] In the diagram: 1. Vibration groove; 11. Ultrasonic vibration motor; 12. Housing; 13. Drying oven; 14. Balance; 15. Shock-absorbing cotton; 2. Tumbling mechanism; 21. Mixing unit; 2101. Mixing table; 2102. Support base; 2103. First motor; 2104. Positioning shell; 2105. Stabilizer; 2106. Metal container; 2107. Feed inlet; 2108. Sealing door; 2109. Positioning block; 2110. Snap-fit ​​groove; 2111. Slide groove; 2112. Positioning groove; 2113. Rod groove; 2114. First bearing; 2115. First threaded rod; 2116. Connecting rod; 2117. Snap-fit ​​rod; 22. Material distribution unit; 2201. Placement frame; 2202. Material distribution box; 2203. Storage box; 2204. Leakage hole; 2205. Dovetail block; 2206. Dovetail groove; 3. Adjustment mechanism; 31. First support rod; 32. Second support rod; 33. Guide groove; 34. Sliding rod; 35. Fixing rod; 36. Isolation shell; 37. Liquid outlet hole; 38. Bolt; 39. Second bearing; 310. Second threaded rod; 311. Threaded sleeve; 312. Second motor; 313. Limiting slide rod; 314. Limiting slider. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] Example 1

[0046] Please see Figure 1-9 This invention provides a technical solution: a process method for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters. This invention addresses the technical problems mentioned in the background art by making corresponding improvements, including the following specific steps:

[0047] S1: Filling with grinding balls: Place a small amount of grinding balls into the metal container 2106 to form a base, then place some of the sample in, then place a small amount of grinding balls in, then place some of the sample in, and repeat this process until the metal container 2106 is filled to one-third to two-thirds full.

[0048] S2: Tumbling: After filling, fix the metal container 2106 on the positioning shell 2104 and rotate it for 5 minutes to 3 hours;

[0049] S3: Isolation device: Place the samples one by one into the isolation shell 36;

[0050] S4: Ultrasonic vibration: Place the isolation shell 36 into the vibration tank 1, pour in the vibration medium, and vibrate for 5 minutes to 3 hours.

[0051] S5: Drying: Place the sample in drying oven 13 for low-temperature drying;

[0052] A process for enhancing the firmness of sheet-like, plate-like, or disc-shaped getters also includes a vibration tank 1, an ultrasonic vibration motor 11, a housing 12, a drying oven 13, a balance 14, and shock-absorbing cotton 15. A tumbling mechanism 2 is provided on one side of the vibration tank 1.

[0053] In S1, the appropriate grinding beads should be selected according to the different types of samples.

[0054] In S1, the grinding balls are placed according to certain size specifications and proportions;

[0055] In S1, the isolation shell 36 must ensure that the samples do not come into contact with each other.

[0056] As a further definition of the tumbling mechanism 2 of the present invention, the tumbling mechanism 2 includes a mixing unit 21, which is used to mix and tumble the sample and the tumbling beads.

[0057] The mixing unit 21 includes a mixing table 2101, which is fixedly connected to one side of the vibrating tank 1. A support base 2102 is fixedly connected to the top of the mixing table 2101. A first motor 2103 is fixedly connected to the top of the support base 2102. A positioning shell 2104 is fixedly connected to the output end of the first motor 2103. A metal container 2106 is snapped into the inner wall of the positioning shell 2104. A stabilizing frame 2105 is fixedly connected to the top of the mixing table 2101. The stabilizing frame 2105 is sleeved on the surface of the metal container 2106.

[0058] Positioning blocks 2109 are fixedly connected to both sides of the metal container 2106. The inner wall of the positioning block 2109 is provided with a snap-fit ​​groove 2110. The inner wall of the stabilizer 2105 is provided with a sliding groove 2111 that cooperates with the positioning block 2109. The top of the metal container 2106 is fixedly connected to a feed inlet 2107. A sealing door 2108 is rotatably connected to one side of the metal container 2106.

[0059] The inner wall of the positioning shell 2104 is provided with positioning grooves 2112. There are two positioning grooves 2112. The positioning grooves 2112 are used in conjunction with the positioning block 2109. A first bearing 2114 is fixedly connected to one side of the positioning shell 2104. A first threaded rod 2115 is fixedly connected to the inner wall of the inner ring of the first bearing 2114. A connecting rod 2116 is threadedly connected to the surface of the first threaded rod 2115. A snap-fit ​​rod 2117 is fixedly connected to one side of the connecting rod 2116. There are two snap-fit ​​rods 2117. The snap-fit ​​rods 2117 are slidably connected to the inner wall of the positioning shell 2104. The inner wall of the positioning shell 2104 is provided with a rod groove 2113 that is used in conjunction with the snap-fit ​​rod 2117.

[0060] The specific implementation of this embodiment is as follows: A stainless steel metal container 2106 is used, and a positioning block 2109 passes through the slide groove 2111 and is snapped into the positioning groove 2112. The first threaded rod 2115 is rotated to move the connecting rod 2116, causing the snapping rod 2117 to slide within the positioning shell 2104 and pass through the snapping groove 2110 to fix the metal container 2106, so that the metal container 2106 is stably snapped into the positioning shell 2104. Stainless steel grinding balls are used, with specifications of 5mm diameter and 1mm diameter, wherein the 5mm diameter grinding balls... The grinding balls account for 30%, and the tumbling grinding balls with a diameter of 1 mm account for 70%. A small amount of tumbling grinding balls are put into the metal container 2106 through the feed port 2107 to form a bottom layer. Then, some samples are put in, and a small amount of tumbling grinding balls are put in again. Then, some samples are put in again. This process is repeated until half of the metal container 2106 is filled. After filling, the first motor 2103 is started to drive the metal container 2106 to rotate for 1.5 hours. Then, the samples are taken out and placed in the vibration tank 1. Propanol, the vibration medium, is poured in and vibrated for 1.5 hours. The samples are then placed in the drying oven 13 for low-temperature drying.

[0061] Example 2

[0062] Please see Figure 1-9 The present invention provides a technical solution: a process method for enhancing the firmness of getters in the form of sheets, plates or discs. The present invention makes corresponding improvements to the technical problems mentioned in the background art. The tumbling mechanism 2 also includes a material distribution unit 22. The mixing unit 21 and the material distribution unit 22 are used together. The material distribution unit 22 is used to distribute the tumbling sample and the tumbling beads.

[0063] As a further definition of the grinding mechanism 2 of the present invention, the material dispensing unit 22 includes a placement frame 2201, which is fixedly connected to the top of the mixing table 2101. A material dispensing box 2202 is slidably connected to the inner wall of the placement frame 2201. A storage box 2203 is placed on the inner wall of the mixing table 2101. The storage box 2203 is located directly below the material dispensing box 2202. A number of drainage holes 2204 are provided on the inner wall of the material dispensing box 2202. Dovetail blocks 2205 are fixedly connected to both sides of the material dispensing box 2202. A dovetail groove 2206 that cooperates with the dovetail blocks 2205 is provided on the inner wall of the placement frame 2201.

[0064] The specific implementation method of this embodiment is as follows: A titanium metal container 2106 is replaced and installed on the positioning shell 2104. Titanium grinding balls with diameters of 3mm and 0.5mm are used, with 50% of the grinding balls being 3mm and 50% being 0.5mm. A small amount of grinding balls is placed into the metal container 2106 as a base, then some samples are added, followed by a small amount of grinding balls, and then some samples are added again. This process is repeated until the metal container 2106 is two-thirds full. After filling, the first motor 2103 is started to rotate the metal container 2106 for 2 hours. Then, the corresponding... The material distribution box 2202 with a diameter leakage hole 2204 is attached to the placement frame 2201 by the cooperation of the dovetail block 2205 and the dovetail groove 2206. The storage box 2203 is placed at the bottom of the material distribution box 2202. The sealing door 2108 is opened, and the sample and grinding balls are dropped into the material distribution box 2202 by the material taking tool. The sample is filtered into the material distribution box 2202, and the grinding balls fall into the storage box 2203 through the leakage hole 2204. Then, the sample is placed in the vibration tank 1, the vibration medium deionized water is poured in, and the sample is vibrated for 2 hours. The sample is then placed in the drying oven 13 for low-temperature drying.

[0065] Example 3

[0066] Please see Figure 1-9 The present invention provides a technical solution: a process method for enhancing the firmness of sheet-like, plate-like or disc-shaped getters. The present invention makes corresponding improvements to the technical problems mentioned in the background art. An adjustment mechanism 3 is provided at the top of the vibration tank 1. The adjustment mechanism 3 is used in conjunction with the mixing unit 21 and the dispensing unit 22. The adjustment mechanism 3 is used to separate the sample and place it into the vibration tank 1 for vibration.

[0067] As a further definition of the adjustment mechanism 3 of the present invention, the adjustment mechanism 3 includes a first support rod 31, which is fixedly connected to one side of the vibration groove 1. A second support rod 32 is fixedly connected to one side of the housing 12. Guide grooves 33 are provided on the opposite sides of the first support rod 31 and the second support rod 32. A sliding rod 34 is slidably connected to the inner wall of the guide groove 33. A fixed rod 35 is fixedly connected to the bottom of the sliding rod 34. There are five fixed rods 35. An isolation shell 36 is fixedly connected to the bottom of the fixed rod 35. An outlet hole 37 is provided at the bottom of the isolation shell 36. A bolt 38 is threadedly connected to the inner wall of the outlet hole 37.

[0068] A limiting slide rod 313 is fixedly connected to the inner wall of the first support rod 31. A limiting slider 314 is slidably connected to the surface of the limiting slide rod 313. One side of the limiting slider 314 is fixedly connected to one end of the sliding rod 34. A second bearing 39 is fixedly connected to the inner wall of the second support rod 32. A second threaded rod 310 is fixedly connected to the inner wall of the inner ring of the second bearing 39. A threaded sleeve 311 is fitted on the surface of the second threaded rod 310. One side of the threaded sleeve 311 is fixedly connected to the other end of the sliding rod 34. A second motor 312 is fixedly connected to the top of the second support rod 32. The output end of the second motor 312 passes through the inner wall of the second support rod 32 and is fixedly connected to one end of the second threaded rod 310.

[0069] The specific implementation method of this embodiment is as follows: Ten identical samples are divided into two groups, named Group A and Group B. Samples 1-5 belong to Group A, and samples 6-10 belong to Group B. Samples in Group A are processed according to the process flow shown in Example 1, while samples in Group B are not processed. Then, samples 1-5 of Group A are placed in the isolation shell 36 respectively. The contact area between the isolation shell 36 and the sample is approximately 10% of the total surface area of ​​the sample. The second motor 312 is started to drive the second threaded rod 310 to rotate, causing the threaded sleeve 311 to move and drive the sliding rod 34 to move, thereby controlling the isolation shell 36 to descend into the vibration groove 1. The limiting sliding rod 313 and the limiting slider 314 can guide the movement of the sliding rod 34, making the movement of the sliding rod 34 more stable. The two groups of samples are tested for firmness according to the method disclosed in Chinese Patent No. CN208984485U, "A Device for Testing Firmness Using Ultrasonic Vibration". The specific testing process is as follows:

[0070] Prepare the sample to be tested, and select a suitable and stable vibrating liquid according to the properties of the sample;

[0071] Before the test, the weight of the sample is measured on balance 14 and recorded as the weight before the test.

[0072] Add vibration fluid to vibration tank 1, the fluid level should be high enough to cover the sample. Place the sample in the vibration fluid and vibrate it ultrasonically for a certain period of time. Raise the sliding rod 34 to remove the sample. Place the sample in the drying oven 13 to dry it thoroughly. Weigh the sample again and record it as the weight after the test. After removing the sample, unscrew the bolt 38 on the isolation shell 36 so that the vibration fluid brought out of the isolation shell 36 can fall into the vibration tank 1 for reuse.

[0073] The difference between the two weighings of the sample is used as the test result to measure the sample's firmness.

[0074] Test conditions and results (unit: mg) are as follows Figure 9 As shown:

[0075] The weight loss of the A group samples after the process was very small, all less than 0.2 mg, while the weight loss of the B group samples without the process was all above 3 mg. The process method designed in this invention significantly improves the stability of the getter.

[0076] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0077] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A process for enhancing the firmness of a sheet, plate or disc shaped getter, characterized in that, The process comprises the following specific steps: S1: roll bead filling: a small amount of roll beads is put into the metal container (2106), the bottom is paved, then part of the sample is put in, then a small amount of roll beads is put in, then part of the sample is put in, and the process is repeated until the metal container (2106) is filled with one-third to two-thirds; S2: roll grinding: after filling, the metal container (2106) is fixed on the positioning shell (2104), and rotated for 5 minutes to 3 hours; S3: isolation device: the sample is put into the isolation shell (36) one by one; S4: ultrasonic vibration: the isolation shell (36) is put into the vibration tank (1), the vibration medium is poured, and vibration is performed for 5 minutes to 3 hours; S5: drying: the sample is put into the drying box (13) for low-temperature drying; The device used in the process comprises a vibration tank (1), an ultrasonic vibration motor (11), a shell (12), a drying box (13), a balance (14) and shockproof cotton (15), and a roll grinding mechanism (2) is arranged on one side of the vibration tank (1); The roll grinding mechanism (2) comprises a mixing unit (21) for mixing and roll grinding the sample and roll beads; The roll grinding mechanism (2) further comprises a distribution unit (22), which is used in cooperation with the mixing unit (21) and the distribution unit (22), and is used for distributing the roll-ground sample and roll beads; An adjusting mechanism (3) is arranged on the top of the vibration tank (1), which is used in cooperation with the mixing unit (21) and the distribution unit (22), and is used for separating the sample and putting it into the vibration tank (1) for vibration; The mixing unit (21) comprises a mixing table (2101) fixedly connected to one side of the vibration tank (1), a support seat (2102) fixedly connected to the top of the mixing table (2101), a first motor (2103) fixedly connected to the top of the support seat (2102), a positioning shell (2104) fixedly connected to the output end of the first motor (2103), a metal container (2106) clamped to the inner wall of the positioning shell (2104), and a stabilizing frame (2105) fixedly connected to the top of the mixing table (2101) and sleeved on the surface of the metal container (2106); The distribution unit (22) comprises a placing frame (2201) fixedly connected to the top of the mixing table (2101), a distribution box (2202) slidably connected to the inner wall of the placing frame (2201), a storage box (2203) placed in the inner wall of the mixing table (2101), and a plurality of leakage holes (2204) formed in the inner wall of the distribution box (2202), wherein the storage box (2203) is located directly below the distribution box (2202), the distribution box (2202) is fixedly connected with dovetail blocks (2205) on both sides, and the placing frame (2201) is provided with dovetail grooves (2206) matched with the dovetail blocks (2205). The adjusting mechanism (3) includes a first support rod (31) fixedly connected to one side of the vibrating tank (1), one side of the shell (12) is fixedly connected with a second support rod (32), the opposite sides of the first support rod (31) and the second support rod (32) are provided with guide grooves (33), the inner walls of the guide grooves (33) are slidably connected with sliding rods (34), the bottoms of the sliding rods (34) are fixedly connected with fixing rods (35), the number of the fixing rods (35) is five, the bottoms of the fixing rods (35) are fixedly connected with isolation shells (36), the bottoms of the isolation shells (36) are provided with liquid outlet holes (37), and the inner walls of the liquid outlet holes (37) are threadedly connected with bolts (38).

2. The process for enhancing the firmness of a sheet, plate or disc shaped getter according to claim 1, characterized by the fact that, In the S1, according to the different types of samples, the corresponding material of the rolling grinding beads should be selected.

3. A process for enhancing the firmness of a sheet, plate or disc shaped getter according to claim 2, characterized by the fact that: In the S1, the rolling grinding beads are placed according to certain size specifications and proportions.

4. The process of claim 2, wherein the process is characterized by: In the S1, the isolation shell (36) needs to ensure that the samples do not contact each other.

5. The process method for enhancing the adhesion of sheet-like, plate-like, or disc-shaped getters according to claim 1, characterized in that: The metal container (2106) is fixedly connected with positioning blocks (2109) on both sides, the inner wall of the positioning block (2109) is provided with a clamping groove (2110), the inner wall of the stabilizing frame (2105) is provided with a sliding groove (2111) matched with the positioning block (2109), the top of the metal container (2106) is fixedly connected with a feeding port (2107), and one side of the metal container (2106) is rotatably connected with a sealing door (2108).

6. The process of claim 5, wherein the process is characterized by: The inner wall of the positioning shell (2104) is provided with a positioning groove (2112), the number of the positioning groove (2112) is two, the positioning groove (2112) is matched with the positioning block (2109), one side of the positioning shell (2104) is fixedly connected with a first bearing (2114), the inner wall of the inner ring of the first bearing (2114) is fixedly connected with a first threaded rod (2115), the surface of the first threaded rod (2115) is threadedly connected with a connecting rod (2116), one side of the connecting rod (2116) is fixedly connected with a clamping rod (2117), the number of the clamping rod (2117) is two, the clamping rod (2117) is slidably connected to the inner wall of the positioning shell (2104), and the inner wall of the positioning shell (2104) is provided with a rod groove (2113) matched with the clamping rod (2117).

7. The process of claim 1, wherein the process is characterized by: The inner wall of the first supporting rod (31) is fixedly connected with a limiting sliding rod (313), the surface of the limiting sliding rod (313) is slidably connected with a limiting sliding block (314), one side of the limiting sliding block (314) is fixedly connected with one end of a sliding rod (34), the inner wall of the inner ring of a second bearing (39) fixedly connected with a second supporting rod (32) is fixedly connected with a second threaded rod (310), the surface of the second threaded rod (310) is sleeved with a threaded sleeve (311), one side of the threaded sleeve (311) is fixedly connected with the other end of the sliding rod (34), the top of the second supporting rod (32) is fixedly connected with a second motor (312), the output end of the second motor (312) penetrates through the inner wall of the second supporting rod (32) and is fixedly connected with one end of the second threaded rod (310).

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