An automatic water quality control system for electronic and semiconductor precision processes

Abstract

An automatic water quality control system for electronic and semiconductor precision processes, comprising a water treatment component, a water quality adjustment component and a control component; the water treatment component comprises a water quality adjustment box, an outlet pipe, an inlet pipe, a water supply pipe and a drainage pipe connected to the water quality adjustment box, a water pump arranged on the outlet pipe or the inlet pipe, and a connecting pipe connecting the drainage pipe and the inlet pipe; the water quality adjustment component comprises a pH detector, a conductivity detector, a chloride ion detector, a biocide addition device, a corrosion inhibitor addition device, and a water pressure detector arranged in the water quality adjustment box, and the control component comprises a first solenoid valve, a second solenoid valve, a third solenoid valve, a fourth solenoid valve, and a pressure regulating valve.

Description

Technical Field

[0001] The present application relates to the technical field of water quality regulation, and in particular to an automatic water quality control system for electronic and semiconductor precision processes. Background Art

[0002] Special water quality control system for electronic and semiconductor precision processes, because there are a variety of materials in the system: copper, carbon steel, stainless steel, zinc, and different materials have different requirements for water quality. Copper pipes have corrosion resistance, high temperature resistance and good thermal conductivity. Copper has higher requirements for water quality, especially for acidic and alkaline water. Hard water (containing more calcium and magnesium) may cause copper pipes to corrode and release harmful substances. Therefore, for copper pipes, the water quality should be neutral and not contain too many soluble solids or corrosive substances; carbon steel pipes have higher strength and durability. For carbon steel pipes, the main requirement is that the water quality does not contain too many corrosive substances or particulate matter to prevent pipeline corrosion and blockage, and the pH value of the water quality should be in the neutral range, avoiding too high or too low pH values; stainless steel pipes have excellent corrosion resistance and antioxidant properties. Stainless steel pipes have relatively low requirements for water quality, but it is still necessary to pay attention to whether there is too much chlorine, sulfide and other substances in the water that may corrode stainless steel; zinc pipes have certain corrosion resistance and lower cost. The water quality requirements for zinc pipes are relatively basic, but care should be taken to avoid too high pH values ​​and too many soluble solids to avoid corrosion or blockage of the pipes.

[0003] In view of the above reasons, the current conventional water quality regulation system cannot adapt to the special water quality control of electronic and semiconductor precision processes, which have high requirements for the accuracy of water quality control. Therefore, technical personnel in this field need to improve the existing water quality regulation system to meet the above requirements. Summary of the invention

[0004] The main purpose of this application is to provide an automatic water quality control system for electronic and semiconductor precision processes, which can accurately adjust the water quality to adapt to the water quality requirements of pipes of different materials in the system.

[0005] In order to achieve the above-mentioned objectives, in a first aspect, the present application provides an automatic water quality control system for electronic and semiconductor precision processes, including a water treatment component, a water quality adjustment component, and a control component;

[0006] The water treatment assembly includes a water quality regulating box, a water outlet pipe, a water inlet pipe, a water supply pipe and a drainage pipe connected to the water quality regulating box, a water pump arranged on the water outlet pipe or the water inlet pipe, and a connecting pipe connecting the drainage pipe and the water inlet pipe;

[0007] The water quality adjustment component includes a pH detector, a conductivity detector, a chloride ion detector, a biocide adding device, a corrosion inhibitor adding device, and a water pressure detector arranged in the water quality adjustment box, which are arranged on the water inlet pipeline. A detection branch pipe is arranged on the water inlet pipeline, and the pH detector is arranged on the detection branch pipe, and a pressure gauge is also arranged on the detection branch pipe;

[0008] The control assembly includes a first solenoid valve arranged on the water inlet pipe, a second solenoid valve arranged on the connecting pipe, a third solenoid valve arranged on the water supply pipe, a fourth solenoid valve arranged on the drainage pipe, and a pressure regulating valve arranged on the detection branch pipe;

[0009] It also includes a controller, which is configured to: when the chloride ion detector detects that the chloride ion content exceeds a preset value, control the first solenoid valve and the fourth solenoid valve to be closed, control the second solenoid valve and the third solenoid valve to be opened, and control the drainage volume of the drainage pipe and the water replenishment volume of the water replenishment pipe so that the detection value of the water pressure detector is within a preset range; when the detection value of the pH detector is lower than the preset value, control the biocidal agent adding device to add biocides into the water inlet pipe; when the detection value of the pH detector is higher than the preset value, control the second solenoid valve to be closed, control the first solenoid valve, the third solenoid valve, and the fourth solenoid valve to be opened, and control the drainage volume of the drainage pipe and the water replenishment volume of the water replenishment pipe so that the detection value of the water pressure detector is within a preset range; when the detection value of the conductivity detector is higher than the preset value, control the corrosion inhibitor adding device to add corrosion inhibitor into the water inlet pipe; according to the detection value of the pressure mark, adjust the pressure regulating valve so that the water pressure in the detection branch is within a preset range.

[0010] A further improvement is that a water replenishment flow meter for detecting the water replenishment amount is provided on the water replenishment pipeline.

[0011] A further improvement is that when the detection value of the pH detector is higher than a preset value, the controller is also configured to control the corrosion inhibitor adding device to add corrosion inhibitor into the water inlet pipe according to the detection value of the water replenishment flow meter and a preset ratio of corrosion inhibitor to replenished water.

[0012] As a further improvement, both the pH detector and the conductivity detector are provided with a display screen for displaying the detection results.

[0013] A further improvement is that it also includes an alarm device, and the controller is electrically connected to the alarm device.

[0014] A further improvement is that the chloride ion detector is a water quality detection metal hanging piece.

[0015] As a further improvement, the biocidal agent adding device comprises a first storage tank for storing the biocidal agent and a first pulse dosing pump connected to the first storage tank.

[0016] As a further improvement, the corrosion inhibitor adding device comprises a second storage tank for storing the corrosion inhibitor and a second pulse dosing pump connected to the second storage tank.

[0017] A further improvement is that the drainage pipe is connected to a sewage treatment device.

[0018] A further improvement is that when the chloride ion detector detects that the chloride ion content exceeds a preset value, the controller controls the biocide adding device and the corrosion inhibitor adding device to stop working.

[0019] The electronic and semiconductor precision process water quality automatic control system provided by the present invention has the following beneficial effects compared with the prior art: 1. When the chloride ion exceeds the standard, the whole system can be changed online, that is, the water inlet pipe is directly connected to the drainage pipe, and the excessive sewage in the whole system is directly discharged without returning to the water quality adjustment tank, and the water supply pipe is connected to the water quality adjustment tank, and the new water source replenished replaces the water in the water quality adjustment tank and gradually replaces the water in the whole system at the same time, thereby achieving the purpose of online water change, and when the whole system changes water, the biocide adding device and the corrosion inhibitor adding device stop working;

[0020] 2. When the pH value is lower than the set value, add biocides to control the microbial content. When the pH value exceeds the set value, adjust the pH value by draining part of the system water and replenishing water at the same time, and add corrosion inhibitors in the proportion set with the replenishment amount to prevent scaling of the system;

[0021] 3. When the conductivity exceeds the set value, automatic control is performed by adding corrosion inhibitor;

[0022] 4. When conducting pH value testing, a detection branch pipe is used, and the water pressure of the detection branch pipe is adjusted through water pressure testing and a water pressure regulating valve to keep it stable, thereby improving the accuracy of the pH detector in detecting pH values ​​and avoiding the influence of water pressure on it. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The schematic embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application. In the drawings:

[0024] Figure 1 It is a schematic diagram of the present invention.

[0025] Among them: 1. Water quality regulating box; 2. Water inlet pipe; 3. Water outlet pipe; 4. Water supply pipe; 5. Drainage pipe; 6. Connecting pipe; 7. Detection branch pipe; 8. PH detector; 9. Conductivity detector; 10. Biocide adding device; 11. Corrosion inhibitor adding device; 12. Pressure gauge; 13. Water supply flow meter; 14. First solenoid valve; 15. Second solenoid valve; 16. Third solenoid valve; 17. Fourth solenoid valve; 18. Pressure regulating valve. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0027] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0028] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0029] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0030] In addition, the term "plurality" shall mean two or more.

[0031] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] like Figure 1 As shown, an automatic water quality control system for electronic and semiconductor precision processes includes a water treatment component, a water quality adjustment component, and a control component;

[0033] The water treatment assembly includes a water quality adjustment box 1, a water outlet pipe 3 connected to the water quality adjustment box 1, a water inlet pipe 2, a water supply pipe 4 and a drainage pipe 5, a water pump arranged on the water outlet pipe 3 or the water inlet pipe 2, and a connecting pipe 6 connecting the drainage pipe 5 and the water inlet pipe 2;

[0034] The water quality adjustment component includes a pH detector 8, a conductivity detector 9, a chloride ion detector, a biocide adding device 10, a corrosion inhibitor adding device 11, and a water pressure detector 8 arranged in the water quality adjustment box 1, the water inlet pipeline 2 is provided with a detection branch pipe 7, the pH detector 8 is arranged on the detection branch pipe 7, and the detection branch pipe 7 is also provided with a pressure gauge 12;

[0035] The control assembly includes a first solenoid valve 14 provided on the water inlet pipe 2, a second solenoid valve 15 provided on the connecting pipe 6, a third solenoid valve 16 provided on the water supply pipe 4, a fourth solenoid valve 17 provided on the drainage pipe 5, and a pressure regulating valve 18 provided on the detection branch pipe 7;

[0036] The controller is further configured to: when the chloride ion detector detects that the chloride ion content exceeds a preset value, control the first solenoid valve 14 and the fourth solenoid valve 17 to close, control the second solenoid valve 15 and the third solenoid valve 16 to open, and control the drainage volume of the drainage pipe 5 and the replenishment volume of the water replenishment pipe 4 so that the detection value of the water pressure detector 8 is within a preset range; when the detection value of the pH detector 8 is lower than the preset value, control the biocidal agent adding device 10 to add the biocidal agent into the water inlet pipe 2, and the detection value of the pH detector 8 is lower than the preset value. When it is higher than a preset value, the second solenoid valve 15 is controlled to be closed, the first solenoid valve 14, the third solenoid valve 16, and the fourth solenoid valve 17 are controlled to be opened, and the drainage volume of the drainage pipe 5 and the replenishment volume of the water replenishment pipe 4 are controlled so that the detection value of the water pressure detector 8 is within a preset range; when the detection value of the conductivity detector 9 is higher than a preset value, the corrosion inhibitor adding device 11 is controlled to add corrosion inhibitor into the water inlet pipe 2; according to the detection value of the pressure mark, the pressure regulating valve 18 is adjusted so that the water pressure in the detection branch pipe 7 is within a preset range.

[0037] It should be noted that the water in the entire system is connected to the water quality regulating tank 1 through the water inlet pipe 2, and the water in the water quality regulating tank 1 flows back to the system through the water outlet pipe 3. The water supply pipe 4 is used for water supply, and the drainage pipe 5 is used for sewage discharge. Finally, it is connected to the sewage treatment device. Since there are pipes of various materials, the control requirements for pH value and conductivity are relatively high. This system adopts fully automatic control to avoid the participation of personnel, thereby achieving the purpose of precise control. In addition, in each control step, it also takes full consideration from multiple aspects such as system stability, energy saving, cost reduction, and efficiency improvement.

[0038] The control process is as follows:

[0039] 1. When the chloride ion exceeds the standard, the whole system can be changed online, that is, the water inlet pipe 2 is directly connected to the drainage pipe 5, and the excessive sewage in the whole system is directly discharged without returning to the water quality adjustment tank, and the water supply pipe 4 is connected to the water quality adjustment tank 1, and the new water source replenished replaces the water in the water quality adjustment tank 1 and gradually replaces the water in the whole system at the same time, thereby achieving the purpose of online water change, and when the whole system is changed, the biocide adding device 10 and the corrosion inhibitor adding device 11 stop working, thereby avoiding the waste of drugs, and it is not the waste of water resources caused by the simultaneous operation of the water inlet pipe 2, the water outlet pipe 3, the water supply pipe 4, and the drainage pipe 5, which also causes the subsequent sewage treatment volume to increase;

[0040] 2. When the pH value is lower than the set value, add a biocide to control the microbial content. When the pH value exceeds the set value, drain part of the system water and add water to adjust the pH value. At the same time, add a corrosion inhibitor in a ratio set with the amount of water added to prevent scaling of the system. At the same time, the water pressure in the water quality regulating box 1 is tested and water is added to maintain the water pressure stability of the whole system.

[0041] 3. When the conductivity exceeds the set value, automatic control is performed by adding corrosion inhibitor;

[0042] 4. When performing pH value detection, a detection branch pipe 7 is used, and the water pressure of the detection branch pipe 7 is adjusted through water pressure detection and a water pressure regulating valve to keep it stable, thereby improving the accuracy of pH value detection by the pH detector 8 and avoiding the influence of water pressure on it.

[0043] In order to facilitate the statistics of the water replenishment amount to calculate the amount of corrosion inhibitor to be added, a water replenishment flow meter 13 for detecting the water replenishment amount is provided on the water replenishment pipeline 4. When the detection value of the pH detector 8 is higher than the preset value, the controller is also configured to control the corrosion inhibitor adding device 11 to add corrosion inhibitor to the water inlet pipeline 2 according to the detection value of the water replenishment flow meter 13 and the preset ratio of corrosion inhibitor to the replenished water amount, thereby further achieving the purpose of precise automatic control.

[0044] In order to facilitate the inspection personnel to know the operating status of the entire system, the pH detector 8 and the conductivity detector 9 are both provided with a display screen for displaying the test results. When the water quality exceeds the standard, not only automatic adjustment is performed, but also an alarm device is included. The controller is electrically connected to the alarm device, thereby reminding the staff to supervise at any time through the alarm device to avoid malfunction of the water quality control system and affect the operation of the entire system.

[0045] In this embodiment, preferably, the chloride ion detector is a metal hanging piece for water quality detection.

[0046] Preferably, in this embodiment, the biocidal agent adding device 10 includes a first storage tank for storing the biocidal agent and a first pulse dosing pump connected to the first storage tank; the corrosion inhibitor adding device 11 includes a second storage tank for storing the corrosion inhibitor and a second pulse dosing pump connected to the second storage tank. The use of the pulse dosing pump can achieve precise control of the addition amount.

[0047] In order to prevent the discharged sewage from polluting the environment, the drainage pipe 5 is connected to a sewage treatment device.

[0048] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An automatic water quality control system for electronic and semiconductor precision processes, characterized by: Including water treatment components, water quality adjustment components and control components; The water treatment assembly includes a water quality adjustment box, a water outlet pipe, a water inlet pipe, a water supply pipe and a drainage pipe, a water pump arranged on the water outlet pipe or the water inlet pipe, and a connecting pipe connecting the drainage pipe and the water inlet pipe, wherein the water outlet pipe, the water inlet pipe, the water supply pipe and the drainage pipe are all connected to the water quality adjustment box; The water quality adjustment component includes a conductivity detector, a chloride ion detector, a biocide adding device, a corrosion inhibitor adding device, and a water pressure detector arranged in the water quality adjustment box. The conductivity detector, the chloride ion detector, the biocide adding device, and the corrosion inhibitor adding device are all arranged on the water inlet pipeline, and a detection branch pipe is arranged on the water inlet pipeline. The pH detector is arranged on the detection branch pipe, and a pressure gauge is also arranged on the detection branch pipe; The control assembly includes a first solenoid valve arranged on the water inlet pipe, a second solenoid valve arranged on the connecting pipe, a third solenoid valve arranged on the water supply pipe, a fourth solenoid valve arranged on the drainage pipe, and a pressure regulating valve arranged on the detection branch pipe; It also includes a controller, which is configured to: when the chloride ion detector detects that the chloride ion content exceeds a preset value, control the first solenoid valve and the fourth solenoid valve to be closed, control the second solenoid valve and the third solenoid valve to be opened, and control the drainage volume of the drainage pipe and the water replenishment volume of the water replenishment pipe so that the detection value of the water pressure detector is within a preset range; when the detection value of the pH detector is lower than the preset value, control the biocidal agent adding device to add biocides to the water inlet pipe, and when the detection value of the pH detector is higher than the preset value, control the second solenoid valve to be closed, control the first solenoid valve, the third solenoid valve, and the fourth solenoid valve to be opened, and control the drainage volume of the drainage pipe and the water replenishment volume of the water replenishment pipe so that the detection value of the water pressure detector is within a preset range; when the detection value of the conductivity detector is higher than the preset value, control the corrosion inhibitor adding device to add corrosion inhibitor to the water inlet pipe; according to the detection value of the pressure gauge, adjust the pressure regulating valve so that the water pressure in the detection branch pipe is within a preset range; The water in the entire system is connected to the water quality regulating tank through the water inlet pipe, and the water in the water quality regulating tank flows back to the system through the water outlet pipe. When the chloride ion is detected to be excessive, the whole system is replaced online, and the water inlet pipe is directly connected to the drainage pipe. The excessive sewage in the whole system is directly discharged without flowing back to the water quality regulating tank, and the water supply pipe is connected to the water quality regulating tank. The new water source replaces the water in the water quality regulating tank and gradually replaces the water in the whole system at the same time. When the detection value of the pH detector is lower than the preset value, the biological sterilizer is added to control the microbial content. When the detection value of the pH detector is higher than the preset value, the pH value is adjusted by discharging part of the system water and replenishing water at the same time.

2. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The water replenishment pipeline is provided with a water replenishment flowmeter for detecting the water replenishment amount.

3. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 2, characterized in that: When the detection value of the pH detector is higher than a preset value, the controller is also configured to control the corrosion inhibitor adding device to add corrosion inhibitor into the water inlet pipe according to the detection value of the water replenishment flow meter and a preset ratio of corrosion inhibitor to replenished water.

4. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The pH detector and the conductivity detector are both provided with a display screen for displaying the detection results.

5. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: It also includes an alarm device, and the controller is electrically connected to the alarm device.

6. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The chloride ion detector is a metal hanging piece for water quality detection.

7. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The biocidal agent adding device comprises a first storage tank for storing the biocidal agent and a first pulse dosing pump connected with the first storage tank.

8. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The corrosion inhibitor adding device comprises a second storage tank for storing the corrosion inhibitor and a second pulse dosing pump connected with the second storage tank.

9. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: The drainage pipe is connected with a sewage treatment device.

10. The electronic and semiconductor precision process water quality automatic control system as claimed in claim 1, characterized in that: When the chloride ion detector detects that the chloride ion content exceeds a preset value, the controller controls the biocide adding device and the corrosion inhibitor adding device to stop working.

Images