Butterfly valve control method and device

Abstract

The present invention provides a control device and a control method for a butterfly valve. The control device and the control method for a butterfly valve of multiple embodiments implement a first control mode in which the plate angle is pre-adjusted by means of pressure level high-speed rotation information, which can shorten the control time and control cycle required for the chamber to reach the target pressure, and improve the quality and reliability of the process performed in the chamber. The control method and the control device for a butterfly valve of multiple embodiments can update the pressure level high-speed rotation information based on the state change that occurs as the process is performed, thereby performing more precise control.

Description

Technical Field

[0001] The invention relates to a control method and device of a butterfly valve, and relates to a control method and device of a butterfly valve which is applied to a chamber system and automatically adjusts the internal pressure of the chamber. Background Art

[0002] The contents described herein merely provide background information for the present embodiment and do not constitute prior art.

[0003] The butterfly valve can provide a function to adjust the flow of the fluid guided by the valve passage formed in the valve body by the degree of rotation of the plate and actually close the flow path. That is, the butterfly valve can control the supply or discharge of the fluid flowing into a specific environment, and can support the structure of the sealed environment. The butterfly valve is mainly used in the process chamber for manufacturing highly sensitive semiconductor components, and provides the function of maintaining the pressure in the process chamber according to the process conditions.

[0004] The existing method of regulating the pressure in the process chamber by a butterfly valve is performed based on the feedback information (pressure value) provided by the chamber. The control device generates an output signal to track the target pressure value based on the current measured pressure value, and controls the rotation of the butterfly valve based on the output signal. As the above control process is repeatedly performed, the final target pressure can be formed in the chamber.

[0005] This conventional control method is executed based on the feedback information of the chamber, and inevitably causes time loss when obtaining and analyzing the feedback information. That is, time delay may occur in the process of quickly achieving the chamber process conditions, and in the semiconductor device manufacturing process that requires high precision and high sensitivity, the quality and reliability of the final product may be reduced.

[0006] Therefore, there is a need for a method and apparatus for controlling a butterfly valve that can further effectively perform chamber processes by providing a faster and more reliable control method. Summary of the invention

[0007] Technical issues

[0008] An object of the present invention is to provide a control method and a control device, which can more quickly and reliably control a butterfly valve applied to a chamber system and automatically adjust the pressure inside the chamber.

[0009] The purpose of the present invention is not limited to the purpose mentioned above. Other purposes and advantages not mentioned in the present invention can be understood through the following description and can be made clearer based on the embodiments of the present invention. Moreover, it is obvious that the purpose and advantages of the present invention can be achieved by the devices and combinations thereof described in the scope of the invention.

[0010] Technical Solution

[0011] According to multiple embodiments of the present invention, a control device for a butterfly valve includes: a butterfly valve located on a pipeline connected to a fluid inside a chamber, including a valve body and a plate, wherein the valve body has a valve passage connected to the pipeline formed on an inner wall surface, the plate is connected to the valve body via a shaft, and the flow rate flowing through the valve passage is adjusted by axial rotation of the shaft; a valve drive unit for providing a rotational force required to rotate the shaft; a valve control unit for providing a control signal to the valve drive unit, and controlling the pressure inside the chamber by axial rotation of the plate; a first sensor unit for detecting the pressure inside the chamber and generating pressure information; and a memory for storing high-speed rotation information of the pressure level inside the chamber, wherein the valve control unit controls the pressure inside the chamber according to at least one of a first control mode and a second control mode, wherein in the first control mode, a first control signal is generated based on the high-speed rotation information of the pressure level and the rotation angle of the plate is controlled by the first control signal, and in the second control mode, a second control signal is generated so that the pressure information tracks the target pressure and the rotation angle of the plate is controlled by the second control signal.

[0012] Furthermore, the plate is controlled in a closed state and an open state. The closed state is a state in which the valve passage is closed when the shaft cannot rotate, and the open state is a state in which the valve passage is opened by rotating the shaft. In the closed state, a gap of a specified width is formed between the plate and the inner wall surface. In the closed state, the butterfly valve may be in an unsealed state.

[0013] Furthermore, the valve control unit controls the rotation angle of the plate by preferentially applying the first control mode in response to a control start signal. In the first control mode, the valve control unit can call the rotation angle of the plate corresponding to the set target pressure from the pressure level high-speed rotation information to generate the first control signal.

[0014] Furthermore, the valve control unit may determine whether to switch the first control mode to the second control mode based on the target pressure and the amount of change in the pressure information.

[0015] In addition, the valve control unit determines whether the target pressure is the same as the pressure information. When the target pressure is not the same as the pressure information, the valve control unit determines the change in the pressure information. When the change in the pressure information is greater than a preset reference value, the first control mode is maintained. When the change in the pressure information is less than the preset reference value, the first control mode can be converted to the second control mode.

[0016] Furthermore, the valve control unit may construct actual measurement information by mapping the pressure information and the current rotation angle of the plate, and may update the pressure level high-speed rotation information based on the actual measurement information.

[0017] Furthermore, the above-mentioned memory may be a non-volatile memory.

[0018] In addition, the valve driving unit includes: a motor, which generates a rotational force for rotating the shaft based on one of the first control signal and the second control signal; a connector, which is connected to the shaft and is used to transmit the rotational force provided by the motor; a gear box, which is located between the connector and the motor and is used to adjust the reduction ratio of the rotational force; and an encoder, which is used to generate first rotation angle information based on the drive of the motor, and the rotation angle information can be generated based on the first rotation angle information.

[0019] Furthermore, the control device of the butterfly valve further comprises a second sensor unit, which generates a plate image by photographing the plate, and the second sensor unit can determine the accumulation degree of the by-products in the plate by analyzing the plate image.

[0020] According to multiple embodiments of the present invention, a control method for a butterfly valve is used to control a butterfly valve, wherein the butterfly valve is located on a pipeline connected to the interior of a chamber, and includes a valve body and a plate. The valve body has a valve passage connected to the pipeline formed on an inner wall surface, and the plate is connected to the valve body via an axis, and the flow rate through the valve passage is adjusted by axial rotation of the axis. The control method includes: a first control mode execution step, in which a rotation angle of the plate corresponding to a set target pressure is called from pressure level high-speed rotation information stored in a memory, and the axis is controlled to rotate the plate based on the called rotation angle of the plate; and a control mode conversion step, in which the above The pressure in the chamber is compared with the set target pressure to determine whether to maintain the first control mode. When the difference between the set target pressure and the pressure in the chamber is below a preset reference value, the first control mode is converted to a second control mode. The second control mode execution step comprises: calculating a control input for adjusting the rotation angle of the plate to track the target pressure based on the pressure in the chamber, and controlling the axis to rotate the plate based on the control input. An updating step comprises mapping the pressure in the chamber and the rotation angle of the plate to construct actual measurement information, and updating the pressure level high-speed rotation information based on the actual measurement information.

[0021] Effects of the Invention

[0022] According to multiple embodiments of the present invention, the control method and control device of the butterfly valve have the following effect, namely, by executing a first control mode for pre-adjusting the plate angle based on pressure level high-speed rotation information, the control time and control cycle required for the chamber to reach the target pressure can be shortened, thereby improving the quality and reliability of the process performed in the chamber.

[0023] Furthermore, according to multiple embodiments of the present invention, the control method and control device of the butterfly valve can update the pressure level high-speed rotation information based on the state changes that occur as the process is executed, thereby performing more precise control, and since the pressure level high-speed rotation information is stored in a non-volatile memory, it can be applied not only to the current process but also to subsequent processes.

[0024] In addition to the above contents, the specific effects of the present invention will be described in the following description of the specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a block diagram showing the structure of a control device for a butterfly valve according to multiple embodiments of the present invention.

[0026] Figure 2 3D diagram of butterfly valves according to various embodiments of the present invention.

[0027] Figure 3a and Figure 3b 1 is an illustrative diagram for explaining the relationship between a plate and the interior of a valve body according to various embodiments of the present invention.

[0028] Figure 4 illustrative diagram for explaining the structure and function of the second sensor unit according to multiple embodiments of the present invention.

[0029] Figure 5 Flowcharts for describing a method for controlling a butterfly valve according to various embodiments of the present invention.

[0030] Figure 6 FIG. 1 is an illustrative diagram for explaining a first control mode according to multiple embodiments of the present invention.

[0031] Figure 7 The following is an exemplary diagram for explaining the control mode conversion process according to multiple embodiments of the present invention.

[0032] Figure 8 FIG. 1 is an illustrative diagram for explaining a second control mode according to multiple embodiments of the present invention.

[0033] Fig. 9 FIG. 4 is an exemplary diagram for explaining a pressure level high-speed rotation information updating process according to multiple embodiments of the present invention. DETAILED DESCRIPTION

[0034] In this specification and the scope of protection of the invention, the terms or words used should not be limited to the common meaning or the meaning in the dictionary. Based on the principle that the inventor can define the concept of terms or words in order to explain his own invention in the best way, they should be interpreted in accordance with the meaning and concept of the technical idea of ​​the present invention. In addition, the embodiments recorded in this specification and the structures shown in the accompanying drawings are only one embodiment of the present invention and do not represent the entire technical idea of ​​the present invention. Therefore, it should be understood that at the time of submitting this application, there may be various equivalent technical solutions, variations and applicable examples that can replace them.

[0035] In this specification and the scope of protection claimed in the invention, the terms "first", "second", "A", "B" and the like used may be used to describe a variety of structural elements, and the above structural elements are not limited to the above terms. The above terms are only used to distinguish one structural element from other structural elements. For example, without departing from the scope of protection claimed in the present invention, the first structural element may be named as the second structural element, and similarly, the second structural element may be named as the first structural element. The term "and / or" includes a combination of multiple related recorded items or one of multiple related recorded items.

[0036] In this specification and the scope of protection of the invention, the terms used are only used to illustrate specific embodiments and do not limit the present invention. Unless the context clearly indicates otherwise, the expression in the singular includes the expression in the plural. In this specification, the terms such as "including" or "having" should not be understood as excluding in advance the existence or additional possibility of features, numbers, steps, operations, structural elements, components or their combinations recorded in this specification.

[0037] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meanings as commonly understood by one of ordinary skill in the art to which the present invention belongs.

[0038] Terms defined in commonly used dictionaries should be interpreted as meaning the same as the meaning they have in the context of the relevant technology, and should not be interpreted as idealized or overly formal meanings unless clearly defined in this specification.

[0039] Furthermore, the various structures, processes, procedures or methods included in the various embodiments of the present invention may be shared within the scope of non-interference with each other at the technical level.

[0040] Below, refer to Figures 1 to 9 The control methods and devices of butterfly valves according to various embodiments of the present invention are described.

[0041] Figure 1 It is a block diagram showing the structure of a control device for a butterfly valve according to multiple embodiments of the present invention. Figure 23D diagram of butterfly valves according to various embodiments of the present invention. Figure 3a and Figure 3b 1 is an illustrative diagram for explaining the relationship between a plate and the interior of a valve body according to various embodiments of the present invention. Figure 4 The diagrams are illustrative diagrams for explaining the structure and function of the valve control unit according to various embodiments of the present invention.

[0042] Reference Figure 1 The butterfly valve control device 10 includes a butterfly valve 100 , a valve control unit 110 , a first sensor unit 120 , a second sensor unit 130 , a memory 140 and a valve driving unit 150 .

[0043] The butterfly valve 100 may be located on the pipe H connected to the fluid inside the chamber C. The chamber C may be a closed space for performing physical reactions or chemical reactions such as semiconductor processes. For example, although the chamber C may be a space for forming a thin film on a substrate by performing a chemical vapor deposition (CVD) process, the embodiment of the present invention is not limited thereto. The state in which the chamber C and the pipe H are connected to the external space may change according to the working state of the butterfly valve 100, thereby causing the pressure inside the chamber C to change.

[0044] Reference Figure 2 The butterfly valve 100 may include at least a plate 101 , a valve body 102 and a shaft 103 .

[0045] The plate 101 may be a thin plate of a predetermined thickness. The valve body 102 as a whole constitutes the outer shape of the valve, and the valve passage G connected to the pipeline H may be formed on the inner wall. The valve passage G may be an open open area to be connected to the pipeline H. The plate 101 is arranged at a position corresponding to the valve passage G, and the valve passage G can be opened and closed. The plate 101 may have a shape corresponding to the valve passage G. For example, when the valve passage G is circular, the plate 101 may also be circular. Figure 2 As shown, on the pipeline H, the direction of fluid communication can be the Z-axis direction, and when the plate 101 is correspondingly located in the XY plane, the valve passage G can be actually closed.

[0046] The shaft 103 partially penetrates the valve body 102, and the end is connected to the valve body 102 in a rotatable manner. When connected to the valve body 102, the shaft 103 can rotate in a clockwise direction or a counterclockwise direction. The shaft 103 can be formed to extend along the X-axis direction and rotate along the axial direction. When extending through the center of the plate 101, the shaft 103 can be connected to the plate 101. The plate 101 rotates with the rotation of the shaft 103, and the area of ​​the valve passage G changes due to the rotation of the shaft 103. The plate 101 can adjust the flow rate flowing through the valve passage G by the axial rotation of the shaft 103.

[0047] The plate 101 is controlled to operate in a closed state in which the valve passage G is closed without the shaft 103 being able to rotate, and an open state in which the valve passage G is opened by the shaft 103 rotating.

[0048] When the shaft 103 is not rotating, the plate 101 can be located correspondingly in the XY plane, and the valve passage G can be actually closed.

[0049] like Figure 3a As shown in , this state can be defined as the closed state. Figure 3b As shown, when the shaft 103 partially rotates in the counterclockwise direction R1, the plate 101 may also rotate. The open state may be defined as a state in which the area of ​​the valve passage G increases compared to the closed state as the plate 101 rotates. As the closed state is converted to the open state, the area of ​​the valve passage G is expanded, and the pressure of the chamber C changes due to the change in the flow rate of the fluid flowing into or out of the chamber C.

[0050] In the closed state, a gap of a predetermined width may be formed between the plate 101 and the inner wall surface. Figure 3a , refers to a state where a predetermined gap is formed between the plate 101 and the inner wall. In the closed state, the butterfly valve 100 may be in an unsealed state, but it is not an unsealed state that completely blocks the flow of fluid. The main purpose of the butterfly valve 100 is to maintain the pressure inside the chamber C at a predetermined level by regulating the flow of fluid flowing into or out of the chamber C, and this function can be performed in the unsealed state.

[0051] The valve control unit 110 can control the plate 101 of the butterfly valve 100 to rotate based on the X-axis direction, thereby controlling the pressure inside the chamber C. The valve control unit 110 can rotate the shaft 103 for fixing the plate 101 in a clockwise or counterclockwise direction based on the axial direction, and can change the area of ​​the valve passage covered by the plate 101. Corresponding to the change in the area of ​​the valve passage G, the pressure of the chamber C can be changed by the axial rotation of the plate 101.

[0052] The valve control part 110 may control the butterfly valve 100 based on the state of the chamber C, the state of the butterfly valve 100 , and the pressure level and high speed rotation information stored in the memory 140 .

[0053] The memory 140 may include pressure level high-speed rotation information. The pressure level high-speed rotation information refers to storage information that pre-sets the rotation angle of the plate 101 according to the target pressure. That is, the pressure level high-speed rotation information may be information that is pre-mapped and stored according to the pressure and the rotation angle of the plate 101. In multiple embodiments, the pressure level high-speed rotation information may also be named as the pressure level predetermined rotation angle. The valve control unit 110 may generate a control signal that conforms to the current state of the chamber C based on at least one of the predetermined information stored in the memory 140 and the actual measured information, and provide a control signal to the valve drive unit 150 to control the plate 101 to rotate at an appropriate rotation angle. That is, the valve control unit 110 may control the pressure inside the chamber C according to at least one of the first control mode and the second control mode. In the first control mode, a first control signal is generated based on the pressure level high-speed rotation information and the rotation angle of the plate is controlled by the first control signal. In the second control mode, a second control signal is generated so that the pressure information tracks the target pressure and the plate rotation angle is controlled by the second control signal.

[0054] The first sensor unit 120 may detect the state of the chamber C and provide the valve control unit 110 with information related to the chamber C. Specifically, the first sensor unit 110 may detect the pressure inside the chamber C to generate pressure information and provide the pressure information to the valve control unit 110 .

[0055] The rotation angle information of the butterfly valve 100 may be provided by the valve driving unit 150. The valve driving unit 150 may detect the rotation degree of the shaft 103, thereby generating the first rotation angle information.

[0056] The generated first rotation angle information is provided.

[0057] Specifically, refer to Figure 4 In part (a), the valve driving unit 150 includes an encoder 151 , a motor 152 , a gear box 153 and a connector 154 .

[0058] The motor 152 generates a rotational force for rotating the shaft 103 based on a control signal provided by the valve control unit 110. The motor 152 can rotate the shaft 103 in a clockwise direction or a counterclockwise direction based on a first control signal in a first control mode and a second control signal in a second control mode. The shaft 103 and the motor 152 can be connected via a connector 154, and a gear box 153 can be located between the connector 154 and the motor 152. The gear box 153 can adjust the reduction ratio of the rotational force generated by the motor 152. The encoder 151 can generate first rotation angle information based on the drive of the motor. That is, the encoder 151 can determine the state and degree of rotation of the shaft 103 by detecting the driving state of the motor, thereby generating first rotation angle information indicating the degree of rotation of the plate 101.

[0059] In an embodiment, the valve control unit 110 may determine the rotation degree and rotation angle information of the plate 101 based on the first rotation angle information. However, the embodiments of the present invention are not limited thereto. In multiple embodiments, the valve control unit 110 may also additionally consider the second rotation angle information generated based on the actual rotation state of the plate 101 to determine the rotation degree and rotation angle information of the plate 101.

[0060] The second sensing unit 130 may additionally detect the state of the butterfly valve 100. The second sensing unit 130 may determine the degree of rotation of the plate 101 of the butterfly valve 100 to detect the second rotation angle information. The second sensing unit 130 may be a visual sensor, and may generate a plate image by photographing the plate 101 in the current state. The second sensing unit 130 may include a first image analysis model, and may perform image analysis on the plate image to generate the second rotation angle information.

[0061] The first image analysis model may be an artificial intelligence analysis model based on deep learning. In the input image, rotation angle information for determining the degree of rotation of the plate 101 may be generated by analyzing the spacing between the inner wall and the plate 101 .

[0062] In various embodiments, the second sensing unit 130 may include a second image analysis model to further analyze the generated board image to determine the amount of accumulation of byproducts in the board 101. During the process performed in the chamber C, byproducts of the process may accumulate on the board 101, and the accumulated byproducts may hinder the precise control of the board 101.

[0063] The second sensing unit 130 may analyze the plate image generated by the second image analysis model to generate byproduct accumulation information for determining the accumulation degree of byproducts and the accumulation degree. The second image analysis model may be an artificial intelligence learning model based on deep learning, or may be a pre-learning model for identifying byproducts in an input image and determining the amount of the identified byproducts (dose). If the byproduct accumulation information is greater than a preset critical value, the second sensing unit 130 may issue a notification requesting the processing board 101 to enable the user to perform appropriate processing. The second rotation angle information generated by the second sensing unit 130 may be provided to the valve control unit 110.

[0064] The valve control unit 110 may receive both the first rotation angle information generated based on the rotation of the motor 152 and the second rotation angle information generated based on the actual rotation degree of the judgment plate 101. The first rotation angle and the second rotation angle information may be detected as the same angle, but may also be determined as different angles according to the state of the butterfly valve 100. Therefore, the valve control unit 110 may generate the rotation angle information as the basic data for generating the control signal based on the first rotation angle information and the second rotation angle information, and may generate the control signal based on the rotation angle information.

[0065] Reference Figure 4 In part (b), the valve control unit 110 may include a rotation angle analysis model to generate final rotation angle information based on the input first rotation angle information and second rotation angle information. The rotation angle analysis model may be an artificial intelligence learning model based on deep learning, but is not limited thereto. In multiple embodiments, the rotation angle analysis model may apply a weighted value to the first rotation angle information and the second rotation angle information and add them to generate the rotation angle information. In addition, in multiple embodiments, the rotation angle analysis model may also receive the pressure information of chamber C and the process execution time information, and the rotation angle analysis model may also generate the rotation angle information based on the pressure information and the time information. The rotation angle analysis model may determine the weighted value required for the operation based on the pressure information of chamber C and the process execution time information, and the final weighted value may be determined by applying the determined weighted value to the first rotation angle information and the second rotation angle information. The valve control unit 110 may use the finally determined rotation angle information to perform control of the butterfly valve 100.

[0066] As described above, based on the collected information, the valve control unit 110 can control the butterfly valve 100 in at least one of the first control mode and the second control mode. The valve control unit 110 can control the rotation angle of the plate 101 by preferentially applying the first control mode in response to the control start signal. In the first control mode, the valve control unit 110 calls the rotation angle of the plate corresponding to the set target pressure from the pressure level high-speed rotation information to generate a first control signal.

[0067] Furthermore, the valve control unit 110 determines whether to switch the first control mode to the second control mode based on the target pressure and the change amount of the pressure information. Furthermore, the valve control unit 110 determines whether the target pressure is the same as the pressure information. If the target pressure is not the same as the pressure information, the valve control unit 110 determines the change amount of the pressure information. When the change amount of the pressure information is greater than a preset reference value, the first control mode is maintained. When the change amount of the pressure information is less than the preset reference value, the valve control unit 110 can switch to the second control mode.

[0068] Furthermore, the valve control unit 110 constructs actual measurement information by mapping the pressure information with the current plate rotation angle, and can update the pressure level high-speed rotation information based on the actual measurement information. The memory 140 can be a non-volatile memory, and after the process of the chamber C is completed, the updated pressure level high-speed rotation information can be used in the state of executing a new process.

[0069] Below, refer to Figures 5 to 9 The control methods of the butterfly valve according to the various embodiments of the present invention are further described in detail.

[0070] Figure 5 Flowcharts for describing a method for controlling a butterfly valve according to various embodiments of the present invention. Figure 6 FIG. 1 is an illustrative diagram for explaining a first control mode according to multiple embodiments of the present invention. Figure 7 The following is an exemplary diagram for explaining the control mode conversion process according to multiple embodiments of the present invention. Figure 8 FIG. 1 is an illustrative diagram for explaining a second control mode according to multiple embodiments of the present invention. Fig. 9 FIG. 4 is an exemplary diagram for explaining a pressure level high-speed rotation information updating process according to multiple embodiments of the present invention.

[0071] Reference Figure 5 The butterfly valve 100 control method of multiple embodiments is executed by the butterfly valve control device 10, specifically, as a control method executed by the valve control unit 110, including a first control mode execution step S110, a control mode conversion step S120, a second control mode execution step S130 and a predetermined information update step S140.

[0072] In the embodiment of the present invention, the valve control unit 110 generates the first control signal or the second control signal, and the process of controlling the angle of the plate 101 of the butterfly valve 100 in response thereto can be defined as one cycle. The first control mode of step S110 and the second control mode of step S130 can each consist of at least one cycle, and the cycle of forming or maintaining the target pressure in the chamber C can be repeatedly performed.

[0073] First, the first control mode is executed (step S110). Figure 6 , as the control start signal is provided, the target pressure is set (step S112). The control start signal and the target pressure may be generated and provided by the host controller or user input. The valve control unit 110 may preferentially apply the first control mode to control the rotation angle of the butterfly valve 100 in response to the control start signal.

[0074] The first control mode corresponds to a control process in which the rotation angle corresponding to the target pressure is quickly set as the rotation angle of the plate 101 based on the pressure level high-speed rotation information. That is, in the first control mode, the rotation of the plate 101 is performed at a high speed in a short time using the pressure level high-speed rotation information corresponding to the pre-stored data and the set value, without being based on the inspection and measurement of the state of the chamber C.

[0075] In this first control mode, the plate 101 can be formed at a predetermined angle due to high-speed rotation, which is not related to the pressure state of the chamber C. Therefore, in order to make the chamber C reach a stable state and a target pressure, the time for controlling the angle can be shortened, and the quality and reliability of the process performed in the chamber C can be improved.

[0076] The pressure level high speed rotation information is stored in the memory 140, such as Figure 6 As shown, the state of the rotation angle of the plate 101 may be pre-recorded according to the target pressure. That is, the pressure level high-speed rotation information refers to information pre-mapped and pre-stored in a manner that the pressure corresponds to the rotation angle of the plate 101. The memory 140 may include the first target pressure high-speed rotation information to the nth target pressure high-speed rotation information. Among them, n can be a natural number greater than 2, and the first target pressure to the nth target pressure may mean different pressure values. This pressure level high-speed rotation information is equivalent to pre-prepared information and can be updated by reflecting the information changed during the execution of the process.

[0077] As an example, in step S112, if the set target pressure is the second target pressure, the valve control unit 110 can call the second target pressure high-speed rotation information from the memory 140 (step S114), and can generate a first control signal for controlling the plate 101 to form a rotation angle corresponding to the second target pressure high-speed rotation information. The first control signal is provided to the valve drive unit 150 (step S116). The valve drive unit 150 can rotate the shaft 103 in response to the first control signal (step S118). Corresponding to the rotation of the shaft 103, as the plate 101 of the butterfly valve 100 rotates and forms a prescribed rotation angle, the pressure of the chamber C can be controlled.

[0078] Next, the valve control unit 110 may switch the control mode (step S120 ).

[0079] In step S120, the valve control unit 110 may determine whether to convert the first control mode to the second control mode. When the current state of the chamber C satisfies a predetermined condition, the valve control unit 110 may perform more precise control by converting to the second control mode. Specifically, the valve control unit 110 may determine whether to convert the first control mode to the second control mode based on the target pressure and the change amount of the pressure information.

[0080] Reference Figure 7 , the valve control unit 110 may compare the pressure information of the measured pressure of chamber C with the target pressure (step S122). Wherein, when the pressure information is the same as the target pressure (Yes), it can be regarded as a state where the control target of the valve control unit 110 is actually achieved, and a conversion can be performed to maintain the second control mode required for the current state (step S128). In step S122, when the pressure information is different from the target pressure (No), the valve control unit 110 may confirm the pressure change of chamber C (step S124). Wherein, the pressure change refers to the difference between the pressure information of chamber C measured in the current cycle and the pressure information of chamber C measured in the previous cycle.

[0081] In step S124, if the pressure change is below the reference value, the pressure of chamber C is regarded as being in a stable state with little change, and the second control mode is switched for precision control (step S128). Differently, in step S124, if the pressure change is greater than the reference value, it can be regarded as not reaching a stable state or not reaching the rotation angle required for high-speed rotation. When the pressure change is greater than the reference value, the valve control unit 110 can determine that the first control mode needs to be maintained (step S126). When it is determined to switch to the second control mode, the second control mode is entered to execute step S130.

[0082] In step S130 , the second control mode executed includes a process of generating a second control signal to control the rotation angle of the plate 101 based on the currently measured chamber C pressure tracking the target pressure.

[0083] As an example, Figure 8 As shown, as the PID operation of the target pressure and the pressure information is performed, the valve control unit 110 can generate a second control signal based thereon. The valve control unit 110 can generate the second control signal by receiving the target pressure and the pressure information and performing PID operation including proportional, integral, and differential operations of the input values. The second control signal is provided to the valve driving unit 150, and the valve driving unit 150 can rotate the shaft 103 based on the second control signal. Corresponding to the rotation of the shaft 103, as the plate 101 of the butterfly valve 100 rotates and forms a prescribed rotation angle, the pressure of the chamber C can be controlled.

[0084] During the provision of the second control mode, the control cycle of the above process may be performed at least once, thereby controlling the pressure of the chamber C to reach a state that meets the target pressure, a stable state.

[0085] Subsequently, after the second control mode is performed or the chamber C enters a stable state, the valve control part 110 may perform step S140 of updating the pressure level high speed rotation information using the rotation angle information of the plate 101 .

[0086] During the process of performing the process in the chamber C, as the state of the plate 101 and the butterfly valve 100 changes, the rotation degree of the control signal may also change. The valve control unit 110 may perform a preset update of the high-speed rotation information by reflecting such a state change. In step S140, the valve control unit 110 constructs actual measurement information by mapping the pressure information with the current plate rotation angle, and may update the pressure level high-speed rotation information based on the actual measurement information.

[0087] Reference Fig. 9, the second target pressure high-speed rotation information corresponding to the second target pressure as the currently set target pressure can be compared with the current plate rotation angle (step S142). In step S142, if the execution result is below the reference value, the current second target pressure high-speed rotation information is maintained, and the process of not updating and ending is executed (step S144). In step S142, if the execution result is greater than the reference value, the process of updating the current plate rotation angle to the second target pressure high-speed rotation information is executed (step S146). Among them, the memory 140 can be a non-volatile memory, and after the process of chamber C is completed, the updated pressure level high-speed rotation information can be used in the state of executing a new process.

[0088] According to multiple embodiments of the present invention, the control method and control device of the butterfly valve can shorten the control time and control cycle required for the chamber to reach the target pressure by executing a first control mode that pre-adjusts the plate angle based on pressure level high-speed rotation information, thereby improving the quality and reliability of the process performed in the chamber.

[0089] Furthermore, according to multiple embodiments of the present invention, the control method and control device of the butterfly valve can update the pressure level high-speed rotation information based on the state changes that occur as the process is executed, thereby performing more precise control, and since the pressure level high-speed rotation information is stored in a non-volatile memory, it can be applied not only to the current process but also to subsequent processes.

[0090] The above description is only an illustrative description of the technical idea of ​​the present invention, and a person skilled in the art of the present invention may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the present embodiment is only used for illustration and is not used to limit the technical idea of ​​the present invention, and the scope of the technical idea of ​​the present invention is not limited to the above embodiment. The protection scope of this embodiment should be interpreted based on the protection scope of the invention claim, and all technical ideas within the equivalent scope thereof belong to the protection scope of the invention claim.

Claims

1. A control device for a butterfly valve, characterized in that: include: The butterfly valve is located on a pipeline connected to the fluid inside the chamber, and includes a valve body and a plate. The valve body has a valve passage connected to the pipeline formed on the inner wall surface. The plate is connected to the valve body through a shaft, and the flow rate flowing through the valve passage is adjusted by the circumferential rotation of the shaft. A valve driving unit, used to provide the rotational force required to rotate the shaft; A valve control unit, providing a control signal to the valve drive unit, and controlling the pressure inside the chamber by rotating the plate in the circumferential direction; A first sensor unit, used to detect the pressure inside the chamber and generate pressure information; and A memory for storing the pressure level high-speed rotation information inside the chamber, The valve control unit controls the pressure inside the chamber according to a first control mode and a second control mode. In the first control mode, a first control signal is generated based on the pressure level high-speed rotation information and the rotation angle of the plate is controlled by the first control signal. In the second control mode, a second control signal is generated so that the pressure information tracks the target pressure and the rotation angle of the plate is controlled by the second control signal. The valve control unit controls the rotation angle of the plate by preferentially applying the first control mode in response to the control start signal, and in the first control mode, the valve control unit calls the rotation angle of the plate corresponding to the set target pressure from the pressure level high-speed rotation information to generate the first control signal. The valve control unit determines whether to switch the first control mode to the second control mode based on the target pressure and the change amount of the pressure information. The valve control unit constructs actual measurement information by mapping the pressure information with the current rotation angle of the plate, and stores the actual measurement information in the memory as the pressure level high-speed rotation information.

2. A butterfly valve control device, characterized in that: include: The butterfly valve is located on a pipeline connected to the fluid inside the chamber, and includes a valve body and a plate. The valve body has a valve passage connected to the pipeline formed on the inner wall surface. The plate is connected to the valve body through a shaft, and the flow rate flowing through the valve passage is adjusted by the circumferential rotation of the shaft. A valve driving unit, used to provide the rotational force required to rotate the shaft; A valve control unit, providing a control signal to the valve drive unit, and controlling the pressure inside the chamber by rotating the plate in the circumferential direction; A first sensing unit, used to detect the pressure inside the chamber and generate pressure information; A second sensor unit generates a board image by photographing the board; and A memory for storing the pressure level high-speed rotation information inside the chamber, The valve control unit controls the pressure inside the chamber according to a first control mode and a second control mode. In the first control mode, a first control signal is generated based on the pressure level high-speed rotation information and the rotation angle of the plate is controlled by the first control signal. In the second control mode, a second control signal is generated so that the pressure information tracks the target pressure and the rotation angle of the plate is controlled by the second control signal. The valve driving unit includes: a motor, which generates a rotational force for rotating the shaft based on one of the first control signal and the second control signal; a connector, which is connected to the shaft and is used to transmit the rotational force provided by the motor; a gear box, which is located between the connector and the motor and is used to adjust the reduction ratio of the rotational force; and an encoder, which is used to generate first rotation angle information based on the drive of the motor. The second sensing unit includes an artificial intelligence first image analysis model based on deep learning. The second sensing unit analyzes the gap between the inner wall and the plate in the plate image through the first image analysis model, and generates second rotation angle information for determining the rotation angle of the plate. The valve control unit includes a rotation angle analysis model, which is an artificial intelligence learning model based on deep learning. The artificial intelligence learning model generates rotation angle information based on the first rotation angle information and the second rotation angle information. The rotation angle analysis model determines a weighted value applied to the calculation of the first rotation angle information and the second rotation angle information according to the pressure information and the process execution time information. The rotation angle analysis model generates rotation angle information according to the determined weighted value.

3. The butterfly valve control device according to claim 1 or 2, characterized in that: The plate is controlled to operate in a closed state and an open state. The closed state is a state in which the valve passage is closed when the shaft cannot rotate, and the open state is a state in which the valve passage is opened when the shaft rotates. In the closed state, a gap of a predetermined width is formed between the plate and the inner wall surface. In the closed state, the butterfly valve is in an unsealed state.

4. The control device of the butterfly valve according to claim 1, characterized in that: The valve control unit determines whether the target pressure is the same as the pressure information. If the target pressure is not the same as the pressure information, the valve control unit determines the amount of change in the pressure information. When the amount of change in the pressure information is greater than a preset reference value, the first control mode is maintained. When the amount of change in the pressure information is less than the preset reference value, the first control mode is converted to the second control mode.

5. The butterfly valve control device according to claim 1, characterized in that: When the second control mode is executed, the valve control unit updates the pressure level high speed rotation information.

6. The control device of the butterfly valve according to claim 1, characterized in that: The above-mentioned memory is a non-volatile memory.

7. The control device of the butterfly valve according to claim 2, characterized in that: The second sensing unit further determines the accumulation degree of the byproducts in the plate by analyzing the plate image.

8. A method for controlling a butterfly valve, for controlling a butterfly valve, wherein the butterfly valve is located on a pipeline connected to the interior of a chamber, and comprises a valve body and a plate, wherein the valve body has a valve passage connected to the pipeline formed on an inner wall surface thereof, the plate is connected to the valve body via a shaft, and the flow rate flowing through the valve passage is adjusted by the circumferential rotation of the shaft, The above control method is characterized by comprising: a first control mode execution step of calling a rotation angle of the plate corresponding to the set target pressure from the pressure level high-speed rotation information stored in the memory, and controlling the shaft to rotate the plate based on the called rotation angle of the plate; a control mode switching step, comparing the pressure of the chamber with the set target pressure to determine whether to maintain the first control mode, and switching the first control mode to the second control mode when the difference between the set target pressure and the pressure of the chamber is less than a preset reference value; a second control mode execution step of calculating a control input for adjusting a rotation angle of the plate to track the target pressure based on the pressure of the chamber, and controlling the shaft to rotate the plate based on the control input; as well as A storing step constructs actual measurement information by mapping the current pressure of the chamber with the current rotation angle of the plate, and stores the actual measurement information in a memory as pressure level high-speed rotation information.

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